Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597743
G. Wingqvist, J. Bjurstrom, L. Liljeholm, I. Katardjiev, A. Spetz
A thin film thickness excited shear acoustic wave resonator is presented. Utilizing a newly developed reactive sputtering process AlN thin films with inclined c-axis relative to the surface normal with a mean tilt of around 30deg are successfully grown. Using the above process, a biosensor consisting of a shear mode thin film bulk acoustic resonator (FBAR) and a microfluidic transport system was fabricated. The biosensor operation in water, glycerol and albumin was characterized. The resonator had a resonance frequency of around 1.2 GHz and a Q value in water of around 150. Results concerning the stability and resolution are also presented. The results demonstrate clearly the potential of FBAR biosensors for the fabrication of highly sensitive low cost biosensors, bioanalytical tools as well as for liquid sensing in general
{"title":"Shear mode AlN thin film electroacoustic resonator for biosensor applications","authors":"G. Wingqvist, J. Bjurstrom, L. Liljeholm, I. Katardjiev, A. Spetz","doi":"10.1109/ICSENS.2005.1597743","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597743","url":null,"abstract":"A thin film thickness excited shear acoustic wave resonator is presented. Utilizing a newly developed reactive sputtering process AlN thin films with inclined c-axis relative to the surface normal with a mean tilt of around 30deg are successfully grown. Using the above process, a biosensor consisting of a shear mode thin film bulk acoustic resonator (FBAR) and a microfluidic transport system was fabricated. The biosensor operation in water, glycerol and albumin was characterized. The resonator had a resonance frequency of around 1.2 GHz and a Q value in water of around 150. Results concerning the stability and resolution are also presented. The results demonstrate clearly the potential of FBAR biosensors for the fabrication of highly sensitive low cost biosensors, bioanalytical tools as well as for liquid sensing in general","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115644709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597835
A. Fuchs, H. Zangl
This paper presents a capacitive single-layer sensor conception that allows for the measurement of particle velocity and particle concentration in a pneumatically conveyed granular flow. Two sensor topologies are analyzed and their applicability for non-invasive parameter estimation in dilute phase flow are discussed
{"title":"Single-layer measurement of particle velocity and concentration in pneumatic dilute phase conveying","authors":"A. Fuchs, H. Zangl","doi":"10.1109/ICSENS.2005.1597835","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597835","url":null,"abstract":"This paper presents a capacitive single-layer sensor conception that allows for the measurement of particle velocity and particle concentration in a pneumatically conveyed granular flow. Two sensor topologies are analyzed and their applicability for non-invasive parameter estimation in dilute phase flow are discussed","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121738150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597638
J. van der Meer, F. Riedijk, E. van Kampen, K. Makinwa, J. Huijsing
For the first time, a compass using CMOS Hall-sensors in a low-cost epoxy package is presented. Due to the high mechanical stress sensitivity of CMOS Hall-sensors, such low-cost plastic or epoxy mold packages have not been a viable option for low-offset applications like the compass application. Instead, expensive ceramic packages have been used. A recently developed, stress insensitive, CMOS Hall-sensor, shows only a 1.65muT offset shift after epoxy molding, while maintaining its low 3muT (3a) offset spread. After repeated thermal shock, the Hall sensor's offset returns almost completely to its original value. For the compass application, the two horizontal plane components of the earth's magnetic field have to be measured. So a package with two orthogonally aligned Hall-sensors was developed
{"title":"Low-cost epoxy packaging of CMOS Hall-effect compasses","authors":"J. van der Meer, F. Riedijk, E. van Kampen, K. Makinwa, J. Huijsing","doi":"10.1109/ICSENS.2005.1597638","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597638","url":null,"abstract":"For the first time, a compass using CMOS Hall-sensors in a low-cost epoxy package is presented. Due to the high mechanical stress sensitivity of CMOS Hall-sensors, such low-cost plastic or epoxy mold packages have not been a viable option for low-offset applications like the compass application. Instead, expensive ceramic packages have been used. A recently developed, stress insensitive, CMOS Hall-sensor, shows only a 1.65muT offset shift after epoxy molding, while maintaining its low 3muT (3a) offset spread. After repeated thermal shock, the Hall sensor's offset returns almost completely to its original value. For the compass application, the two horizontal plane components of the earth's magnetic field have to be measured. So a package with two orthogonally aligned Hall-sensors was developed","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123758236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597787
Yangming Li, K. Baek, M. Gulari, D. Lin, K. Wise
A thermal microflowmeter has been integrated into a bulk-micromachined recording probe to monitor drug delivery in the central nervous system at the cellular level. The flowmeter uses an arsenic-doped polysilicon heater/sensor supported on a dielectric membrane over the flow channel. It is capped by a vacuum-sealed microchamber to minimize heating of the surrounding tissue and maximize heating efficiency. Efficiencies of 18.8degC/mW in air and 17.4degC/mW in water are achieved. At an input power of 0.18mW, the flowmeter can detect a volumetric flow of 1.3nL/sec for a channel cross-section of 318mum2, corresponding to a flow velocity of 4.2mm/sec
{"title":"A vacuum-isolated thermal microflowmeter for in-vivo drug delivery","authors":"Yangming Li, K. Baek, M. Gulari, D. Lin, K. Wise","doi":"10.1109/ICSENS.2005.1597787","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597787","url":null,"abstract":"A thermal microflowmeter has been integrated into a bulk-micromachined recording probe to monitor drug delivery in the central nervous system at the cellular level. The flowmeter uses an arsenic-doped polysilicon heater/sensor supported on a dielectric membrane over the flow channel. It is capped by a vacuum-sealed microchamber to minimize heating of the surrounding tissue and maximize heating efficiency. Efficiencies of 18.8degC/mW in air and 17.4degC/mW in water are achieved. At an input power of 0.18mW, the flowmeter can detect a volumetric flow of 1.3nL/sec for a channel cross-section of 318mum2, corresponding to a flow velocity of 4.2mm/sec","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121595740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597801
D. Puccio, D. Malocha, N. Saldanha
Orthogonal frequency coding (OFC) provides a novel method of coding SAW sensors for use in multi-sensor environments. The OFC approach is general and should be applicable to physical, chemical, and biological measurands. OFC sensors offer increased range due to enhanced processing gain and reduced power spectral density. In addition, a reduction in compressed pulse time ambiguity results in increased sensitivity when compared with single frequency signals of similar duration. Successful implementation of an OFC SAW sensor system requires optimization of parameters related to sensitivity and range for the measurand and environment of interest. Several device embodiments are shown, and a discussion of design parameters such as SAW coupling, strip reflectivity, attenuation, and temperature coefficient, and optimal materials for various applications are given. Experimental sensor data are shown and compared with coupling-of-modes (COM) model predictions
{"title":"Multiple access SAW sensors using orthogonal frequency coding","authors":"D. Puccio, D. Malocha, N. Saldanha","doi":"10.1109/ICSENS.2005.1597801","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597801","url":null,"abstract":"Orthogonal frequency coding (OFC) provides a novel method of coding SAW sensors for use in multi-sensor environments. The OFC approach is general and should be applicable to physical, chemical, and biological measurands. OFC sensors offer increased range due to enhanced processing gain and reduced power spectral density. In addition, a reduction in compressed pulse time ambiguity results in increased sensitivity when compared with single frequency signals of similar duration. Successful implementation of an OFC SAW sensor system requires optimization of parameters related to sensitivity and range for the measurand and environment of interest. Several device embodiments are shown, and a discussion of design parameters such as SAW coupling, strip reflectivity, attenuation, and temperature coefficient, and optimal materials for various applications are given. Experimental sensor data are shown and compared with coupling-of-modes (COM) model predictions","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116766908","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597841
M. Pisco, M. Consales, S. D'addio, S. Campopiano, A. Cusano, R. Viter, V. Smyntyna, M. Giordano
In this work, a fiber optic multifunction sensing system is presented. Fiber Bragg grating (FBG) technology is integrated with a thin film refractometric system in order to retrieve simultaneous measurements of temperature and ammonia concentration in water. The sensing probe is fabricated by depositing a tin dioxide (SnO2) layer on the distal end of a single mode standard optical fiber (SOF) including a fiber Bragg grating. Experimental results are shown, demonstrating the capability of the proposed sensor to perform chemical detection of ammonia in the range of sub-ppm with fast time response and good desorption properties
{"title":"Simultaneous temperature and ammonia detection in water by tin-dioxide optoelectronic sensor","authors":"M. Pisco, M. Consales, S. D'addio, S. Campopiano, A. Cusano, R. Viter, V. Smyntyna, M. Giordano","doi":"10.1109/ICSENS.2005.1597841","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597841","url":null,"abstract":"In this work, a fiber optic multifunction sensing system is presented. Fiber Bragg grating (FBG) technology is integrated with a thin film refractometric system in order to retrieve simultaneous measurements of temperature and ammonia concentration in water. The sensing probe is fabricated by depositing a tin dioxide (SnO2) layer on the distal end of a single mode standard optical fiber (SOF) including a fiber Bragg grating. Experimental results are shown, demonstrating the capability of the proposed sensor to perform chemical detection of ammonia in the range of sub-ppm with fast time response and good desorption properties","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125170584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597804
Antao Chen, Haishan Sun, A. Pyayt, A. Young, A. Jen, J. Takayesu, L. Dalton
A novel fiber optical sensor structure based on micro-ring resonators coupled to a side-polished fiber is presented. A waveguide ring resonator is made directly over the core of a side-polished optical fiber. Since the resonator cavity itself is made of sensing material, the detection is intrinsic, which may lead to higher sensitivity and faster response than fiber Bragg grating based sensors. Various fiber-optic sensors with improved temporal and spatial resolution, as well as multifunctional sensor arrays are possible with this small size and light weight device structure
{"title":"Micro Resonators on Side-Polished Fiber - A Potential Fiber Optic Sensor Platform","authors":"Antao Chen, Haishan Sun, A. Pyayt, A. Young, A. Jen, J. Takayesu, L. Dalton","doi":"10.1109/ICSENS.2005.1597804","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597804","url":null,"abstract":"A novel fiber optical sensor structure based on micro-ring resonators coupled to a side-polished fiber is presented. A waveguide ring resonator is made directly over the core of a side-polished optical fiber. Since the resonator cavity itself is made of sensing material, the detection is intrinsic, which may lead to higher sensitivity and faster response than fiber Bragg grating based sensors. Various fiber-optic sensors with improved temporal and spatial resolution, as well as multifunctional sensor arrays are possible with this small size and light weight device structure","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122671441","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597847
G. Yuan, K. Lear, M. Stephens, D. Dandy
A concept for a novel, compact, immunoassay biosensor that can simultaneously sense multiple analytes simultaneously is being investigated. The dielectric planar waveguide sensor relies on modulation of the local evanescent field coupled into an array detector. Proof of concept experiments carried out using near-field scanning optical microscopy (NSOM) on a 17 nm thick pseudo-adlayer demonstrated high sensitivity with an optical SNR of approximately 55:1. The measured results agree with numerical simulations
{"title":"Initial demonstration of a local, evanescent, array coupled biosensor concept","authors":"G. Yuan, K. Lear, M. Stephens, D. Dandy","doi":"10.1109/ICSENS.2005.1597847","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597847","url":null,"abstract":"A concept for a novel, compact, immunoassay biosensor that can simultaneously sense multiple analytes simultaneously is being investigated. The dielectric planar waveguide sensor relies on modulation of the local evanescent field coupled into an array detector. Proof of concept experiments carried out using near-field scanning optical microscopy (NSOM) on a 17 nm thick pseudo-adlayer demonstrated high sensitivity with an optical SNR of approximately 55:1. The measured results agree with numerical simulations","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123073201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597660
S. Nakano, Y. Goto, K. Yokosawa, K. Tsukada
We fabricated a prototype for detecting hydrogen gas leaks in hydrogen filling stations. The prototype is composed of a wireless network with ten sensor nodes that can monitor the spatial distribution of hydrogen gas leakage. To enable each sensor node to be driven by a battery, field-effect-transistor sensors and a microprocessor with low power consumption have been adopted. Additionally, a function to consume minimal levels of power has been developed and installed in the microprocessor in each node. The use of batteries and wireless communications enables the nodes to be placed at optimal sensing locations without regard to the wiring needed with existing gas sensors
{"title":"Hydrogen gas detection system prototype with wireless sensor networks","authors":"S. Nakano, Y. Goto, K. Yokosawa, K. Tsukada","doi":"10.1109/ICSENS.2005.1597660","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597660","url":null,"abstract":"We fabricated a prototype for detecting hydrogen gas leaks in hydrogen filling stations. The prototype is composed of a wireless network with ten sensor nodes that can monitor the spatial distribution of hydrogen gas leakage. To enable each sensor node to be driven by a battery, field-effect-transistor sensors and a microprocessor with low power consumption have been adopted. Additionally, a function to consume minimal levels of power has been developed and installed in the microprocessor in each node. The use of batteries and wireless communications enables the nodes to be placed at optimal sensing locations without regard to the wiring needed with existing gas sensors","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133141545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597803
G. Pickrell, E. Smirnova
In this paper, hybrid ordered hole-random hole optical fibers are proposed and presented for the first time. In normal PBF and MOF, the fibers consist of a composite of air (the ordered hole phase) and fused silica glass. Since these fibers are made with the tube stack and draw method, control of the refractive index inside the holes has not been feasible (unless a substance is infiltrated into the holes after fiber fabrication). Recent demonstration of the process to produce random hole optical fibers has opened up the potential for modulation of the refractive index inside the ordered hole region. By filling the tubes with the gas producing agent used in the random hole fiber, a new generation of fibers is now possible. The space which was originally air in the ordered holes of the fiber, can now be filled with a random hole region. Therefore, the average refractive index of the hole region can now be controlled over a wide range from essentially the refractive index of air to that of fused silica (hole completely filled). This allows a new range of fibers to be designed with the ability to tailor the refractive index of the hole region, and yet still maintain a pure silica glass fiber
{"title":"Novel structures in random hole optical fibers","authors":"G. Pickrell, E. Smirnova","doi":"10.1109/ICSENS.2005.1597803","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597803","url":null,"abstract":"In this paper, hybrid ordered hole-random hole optical fibers are proposed and presented for the first time. In normal PBF and MOF, the fibers consist of a composite of air (the ordered hole phase) and fused silica glass. Since these fibers are made with the tube stack and draw method, control of the refractive index inside the holes has not been feasible (unless a substance is infiltrated into the holes after fiber fabrication). Recent demonstration of the process to produce random hole optical fibers has opened up the potential for modulation of the refractive index inside the ordered hole region. By filling the tubes with the gas producing agent used in the random hole fiber, a new generation of fibers is now possible. The space which was originally air in the ordered holes of the fiber, can now be filled with a random hole region. Therefore, the average refractive index of the hole region can now be controlled over a wide range from essentially the refractive index of air to that of fused silica (hole completely filled). This allows a new range of fibers to be designed with the ability to tailor the refractive index of the hole region, and yet still maintain a pure silica glass fiber","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133385215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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