Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597655
O. Tigli, M. Zaghloul
The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 mum 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance
{"title":"Design and fabrication of a novel SAW bio/chemical sensor in CMOS","authors":"O. Tigli, M. Zaghloul","doi":"10.1109/ICSENS.2005.1597655","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597655","url":null,"abstract":"The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 mum 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130353772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597895
Jianjun Ma, W. Bock, Z. Wang, Wenhui Hao, S. M. Mackinnon
With multimode photonic crystal fibers (PCFs) serving as receiving fibers, a fiber-optic probe for the enhancement of fluorescence signal level is investigated. By sealing cladding air holes at the front end of the PCF, a segment of pure glass rod is formed. We prove that the PCF with a longer glass rod has a higher light collection capability. An initial theoretical model is presented to simulate the probe with a tilted target flat membrane placed in front of the probe end face at an arbitrary distance
{"title":"Fiber-optic membrane fluorescent sensor based on photonic crystal fiber with a glass rod in the fiber end","authors":"Jianjun Ma, W. Bock, Z. Wang, Wenhui Hao, S. M. Mackinnon","doi":"10.1109/ICSENS.2005.1597895","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597895","url":null,"abstract":"With multimode photonic crystal fibers (PCFs) serving as receiving fibers, a fiber-optic probe for the enhancement of fluorescence signal level is investigated. By sealing cladding air holes at the front end of the PCF, a segment of pure glass rod is formed. We prove that the PCF with a longer glass rod has a higher light collection capability. An initial theoretical model is presented to simulate the probe with a tilted target flat membrane placed in front of the probe end face at an arbitrary distance","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124482368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597741
Heng Huang, C. Fu
This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper
{"title":"Out-of-plane polymer hollow micro needle array integrated on a microfluidic chip","authors":"Heng Huang, C. Fu","doi":"10.1109/ICSENS.2005.1597741","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597741","url":null,"abstract":"This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131655935","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597756
U. Buder, A. Berns, E. Obermeier, R. Petz, W. Nitsche
Design, simulation, manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2
{"title":"AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations","authors":"U. Buder, A. Berns, E. Obermeier, R. Petz, W. Nitsche","doi":"10.1109/ICSENS.2005.1597756","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597756","url":null,"abstract":"Design, simulation, manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132079007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597820
A. Wixted, D. Thiel, D. James, A. Hahn, C. Gore, D. Pyne
Fitness development of elite athletes requires an understanding of physiological factors such as athlete energy expenditure (EE). For athletes involved in football at the elite level, it is necessary to understand the energy demands during competition to develop training regimes. By identifying an appropriate EE estimator in triaxial accelerometer data, in conjunction with identifying sources of inter-athlete variance in that estimator, signal processing was developed to extract the estimator. In this system, low-power signal processing was implemented to extract both the EE estimator and other information of physiological and statistical interest
{"title":"Signal processing for estimating energy expenditure of elite athletes using triaxial accelerometers","authors":"A. Wixted, D. Thiel, D. James, A. Hahn, C. Gore, D. Pyne","doi":"10.1109/ICSENS.2005.1597820","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597820","url":null,"abstract":"Fitness development of elite athletes requires an understanding of physiological factors such as athlete energy expenditure (EE). For athletes involved in football at the elite level, it is necessary to understand the energy demands during competition to develop training regimes. By identifying an appropriate EE estimator in triaxial accelerometer data, in conjunction with identifying sources of inter-athlete variance in that estimator, signal processing was developed to extract the estimator. In this system, low-power signal processing was implemented to extract both the EE estimator and other information of physiological and statistical interest","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"132 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134148726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597632
Yuyan Zhang, S. Tadigadapa
A new and independent method to investigate biological reactions and their products based upon the accurate and real-time measurement of the thermal conductivity of the reacting samples is presented. A micromachined thermopile based thermal sensor integrated with a planar heater and microfluidic channel has been fabricated for these measurements. The device was calibrated by measuring the thermal conductivity of standard fluids such as DI water and isopropyl alcohol. The calibrated device was then used to measure the thermal properties of biological molecules such as glucose, urea, Bovine Serum Albumin (BSA), Human Fibrinogen (HF), their antibodies, and the bound product. To the best of our knowledge, this is the first report of the observation of the real-time monitoring of antibody-antigen binding based on the change in the thermal properties of the reacting fluids
{"title":"A novel immunosensing technique based on the thermal properties of biochemicals","authors":"Yuyan Zhang, S. Tadigadapa","doi":"10.1109/ICSENS.2005.1597632","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597632","url":null,"abstract":"A new and independent method to investigate biological reactions and their products based upon the accurate and real-time measurement of the thermal conductivity of the reacting samples is presented. A micromachined thermopile based thermal sensor integrated with a planar heater and microfluidic channel has been fabricated for these measurements. The device was calibrated by measuring the thermal conductivity of standard fluids such as DI water and isopropyl alcohol. The calibrated device was then used to measure the thermal properties of biological molecules such as glucose, urea, Bovine Serum Albumin (BSA), Human Fibrinogen (HF), their antibodies, and the bound product. To the best of our knowledge, this is the first report of the observation of the real-time monitoring of antibody-antigen binding based on the change in the thermal properties of the reacting fluids","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133776846","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597687
F. Lochon, L. Dufour, Dominique Rebière, U. Sampath, Stephen M. Heinrich, Fabien Josse
Microcantilevers with polymer coatings hold great promise as resonant chemical sensors. It is known that the coated cantilever sensitivity increases with coating thickness; however, the drawback of increasing the coating thickness is the increase of the frequency noise and thus the deterioration of the sensor's limit of detection. In this paper, an analytical expression for the viscoelastic losses in the coating, hence the quality factor is established and is used to explain the observed increase of the frequency noise with the polymer thickness. This result is then used to demonstrate that an optimum coating thickness exists that minimise the limit of detection
{"title":"Effect of viscoelasticity on quality factor of microcantilever chemical sensors: optimal coating thickness for minimum limit of detection","authors":"F. Lochon, L. Dufour, Dominique Rebière, U. Sampath, Stephen M. Heinrich, Fabien Josse","doi":"10.1109/ICSENS.2005.1597687","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597687","url":null,"abstract":"Microcantilevers with polymer coatings hold great promise as resonant chemical sensors. It is known that the coated cantilever sensitivity increases with coating thickness; however, the drawback of increasing the coating thickness is the increase of the frequency noise and thus the deterioration of the sensor's limit of detection. In this paper, an analytical expression for the viscoelastic losses in the coating, hence the quality factor is established and is used to explain the observed increase of the frequency noise with the polymer thickness. This result is then used to demonstrate that an optimum coating thickness exists that minimise the limit of detection","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"171 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133821751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597829
Z. Fan, J.G. Lu
Zinc oxide nanowires were configured as n-channel field-effect transistors. These transistors were implemented as chemical sensors for detection of various gases. The ammonia sensing behavior of nanowires was observed to switch from oxidizing to reducing when temperature increased from 300 to 500 K. This effect is attributed to the temperature dependent chemical potential shift. Carbon monoxide was found to increase the nanowire conductance in the presence of oxygen. In addition, nanowire detection sensitivity dependence on the diameter was investigated
{"title":"Chemical sensing with ZnO nanowires","authors":"Z. Fan, J.G. Lu","doi":"10.1109/ICSENS.2005.1597829","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597829","url":null,"abstract":"Zinc oxide nanowires were configured as n-channel field-effect transistors. These transistors were implemented as chemical sensors for detection of various gases. The ammonia sensing behavior of nanowires was observed to switch from oxidizing to reducing when temperature increased from 300 to 500 K. This effect is attributed to the temperature dependent chemical potential shift. Carbon monoxide was found to increase the nanowire conductance in the presence of oxygen. In addition, nanowire detection sensitivity dependence on the diameter was investigated","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132761007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597905
S. Moon, Y. Han, Kuntae Kim, Seunghun Lee, H. Shin
In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V0.95W0.05Ox thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V0.95W0.05Ox-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10-7 W/K. Finally, we obtained high responsivity over 1.8times104 W/K and high detectivity over 1.3times109 cmHzfrac12/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA
{"title":"Enhanced Characteristics of V0.95W0.05OX-Based Uncooled Microbolometer","authors":"S. Moon, Y. Han, Kuntae Kim, Seunghun Lee, H. Shin","doi":"10.1109/ICSENS.2005.1597905","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597905","url":null,"abstract":"In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V<sub>0.95</sub>W<sub>0.05</sub>O<sub>x</sub> thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V<sub>0.95</sub>W<sub>0.05</sub>O<sub>x</sub>-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10<sup>-7 </sup> W/K. Finally, we obtained high responsivity over 1.8times10<sup>4</sup> W/K and high detectivity over 1.3times10<sup>9</sup> cmHz<sup>frac12</sup>/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"164 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116309611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597819
T. Maly, H. Schweinzer
Especially for freight cars, detection of fire mostly requires to establish wayside installed equipment. Because of traveling speeds up to 160km/h, fast and sensitive data acquisition is an important prerequisite. Moreover, fire in closed wagons normally has only small, hardly measurable influence on the outer wagon surface, which requires optimized sensing techniques. One promising approach for reliable fire detection on railroad vehicles is the inspection of their surface temperature. Today's high resolution infrared slit cameras can fulfil all requirements regarding measurement speed, accuracy and temperature range. However, the high camera cost is a major disadvantage in deployment in multiple places along the track. With detailed knowledge of the surface temperature distribution under different fire conditions, cameras may be substituted by temperature sensors, which match the measurement issue better and are cheaper. In this paper the influence of applicable detectors and suitable configurations is discussed
{"title":"New approaches of wayside temperature measurement for railway car fire detection","authors":"T. Maly, H. Schweinzer","doi":"10.1109/ICSENS.2005.1597819","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597819","url":null,"abstract":"Especially for freight cars, detection of fire mostly requires to establish wayside installed equipment. Because of traveling speeds up to 160km/h, fast and sensitive data acquisition is an important prerequisite. Moreover, fire in closed wagons normally has only small, hardly measurable influence on the outer wagon surface, which requires optimized sensing techniques. One promising approach for reliable fire detection on railroad vehicles is the inspection of their surface temperature. Today's high resolution infrared slit cameras can fulfil all requirements regarding measurement speed, accuracy and temperature range. However, the high camera cost is a major disadvantage in deployment in multiple places along the track. With detailed knowledge of the surface temperature distribution under different fire conditions, cameras may be substituted by temperature sensors, which match the measurement issue better and are cheaper. In this paper the influence of applicable detectors and suitable configurations is discussed","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116719643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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