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IEEE Sensors, 2005.最新文献

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Design and fabrication of a novel SAW bio/chemical sensor in CMOS 基于CMOS的新型SAW生物/化学传感器的设计与制造
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597655
O. Tigli, M. Zaghloul
The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 mum 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance
介绍了一种基于CMOS技术的表面声波生物/化学传感器的设计、制造、后处理和表征。传感器采用AMI 1.5 mum 2 metal, 2 poly工艺设计。设计并完成了一套独特的无掩模后处理程序。这三个后处理步骤与任何CMOS技术完全兼容。这使得任何信号控制/处理电路可以很容易地集成在同一芯片上。ZnO是产生SAW的压电材料。对溅射ZnO进行了全面的表征和图像化优化。SAW延迟线特性中引入的主要新颖之处是:用于温度控制的嵌入式加热元件,补偿和旨在消除边缘反射和最小化三重传输干扰的吸声器。这两个属性都是通过使用CMOS层来设计的,而不会影响SAW的性能
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引用次数: 11
High Order Bandpass Sigma Delta Interface for Vibratory Gyroscopes 用于振动陀螺仪的高阶带通σ δ接口
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597891
Yufeng Dong, M. Kraft, W. Redman-White
Previous work on sigma delta (SigmaDelta) interfaces for micromachined vibratory gyroscopes were based on lowpass SigmaDelta modulators. However, for a lowpass SigmaDelta interface the signal band is a relatively small fraction of the sampling frequency fs , which increases the noise aliasing and result in a relatively high noise floor in the signal band. Due to the characteristic of narrowband amplitude-modulated signals of vibratory rate gyroscopes, a bandpass SigmaDelta interface is more attractive. A bandpass SigmaDelta interface is superior as it is relatively immune to 1/f noise compared to a lowpass SigmaDelta interface. To achieve a similar noise floor with a given oversampling ratio (OSR), the sampling frequency of a bandpass SigmaDelta interface can be much lower than that of a lowpass SigmaDelta interface. Furthermore, some high order SigmaDelta loop topologies have favorable noise shaping characteristics for electronic noise originating from the pickoff circuit and signal anti-aliasing. Therefore, the requirements for the electronic circuits can be considerably relaxed
先前关于微机械振动陀螺仪的sigma delta (SigmaDelta)接口的工作是基于低通SigmaDelta调制器。然而,对于低通SigmaDelta接口,信号频带是采样频率fs的一个相对较小的部分,这增加了噪声混叠并导致信号频带中相对较高的本底噪声。由于振动速率陀螺仪窄带调幅信号的特点,带通SigmaDelta接口更具吸引力。与低通SigmaDelta接口相比,带通SigmaDelta接口更优越,因为它相对不受1/f噪声的影响。为了在给定过采样比(OSR)的情况下获得相似的本底噪声,带通SigmaDelta接口的采样频率可以比低通SigmaDelta接口的采样频率低得多。此外,一些高阶SigmaDelta环路拓扑对于源自拾取电路的电子噪声和信号抗混叠具有良好的噪声整形特性。因此,对电子电路的要求可以大大放宽
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引用次数: 9
Silicon-based high-frequency multiple-Fourier horn ultrasonic nozzles for atomization and pumping 用于雾化和泵送的硅基高频多傅立叶喇叭超声喷嘴
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597883
C. Tsai, Y.L. Song, S. Tsai, Y. Chou, J. Cheng
This paper reports for the first time on successful atomization and pumping using microfabricated silicon-based high frequency ultrasonic nozzles of a novel design. The nozzle is made of a piezoelectric drive section with transducers isolated from the liquid and a silicon-resonator consisting of multiple Fourier horns with a central channel for liquid flow. Such nozzles possess a number of advantages over conventional metal-based bulk-type ultrasonic nozzles such as microelectromechanical-system (MEMS)-based microfabrication technology for mass production, much higher ultrasonic frequency and thus much smaller drop diameter, much narrower drop-size distribution, and much lower electric drive power requirement. Monodispersed droplets (mist) are produced at the resonance frequency due to pure capillary wave atomization mechanism. For example, more than 93% of the droplets 7.0 mum in diameter were produced at ultrasonic resonance frequency of 484.5 kHz. Pumping is also achieved at the resonance frequency as in atomization
本文首次报道了一种新型硅基高频超声喷嘴的雾化和泵送。喷嘴由压电驱动部分和与液体隔离的换能器以及由多个傅里叶角组成的硅谐振器组成,该硅谐振器具有用于液体流动的中心通道。与传统的金属本体型超声喷嘴相比,这种喷嘴具有许多优点,例如基于微机电系统(MEMS)的批量生产微加工技术,更高的超声波频率,从而更小的液滴直径,更窄的液滴尺寸分布,更低的电力驱动功率要求。由于纯毛细波雾化机制,在共振频率下产生单分散液滴(雾)。例如,在484.5 kHz的超声共振频率下,超过93%的直径为7.0 mum的液滴产生。泵送也实现在共振频率的雾化
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引用次数: 0
Precision interface electronics for a CMOS smart temperature sensor 用于CMOS智能温度传感器的精密接口电子器件
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597856
M. Pertijs, J. Huijsing
This paper describes the interface electronics of a CMOS smart temperature sensor that is accurate to plusmn0.1degC over the full military temperature range. The sensor is fabricated in a standard CMOS process. Substrate bipolar transistors are used as temperature-sensitive devices. Precision interface electronics are used to make the most of their temperature characteristics. While the sensor is trimmed at one temperature, its accuracy over the full temperature range depends on the initial accuracy of the electronics. Dynamic offset cancellation and dynamic element matching are used to eliminate offset and gain errors. These techniques are combined with a sigma-delta ADC to obtain a readily usable digital temperature reading
本文介绍了一种CMOS智能温度传感器的接口电子元件,该传感器在整个军用温度范围内精确到±0.1℃。该传感器采用标准CMOS工艺制造。衬底双极晶体管用作温度敏感器件。精密接口电子元件用于充分利用其温度特性。当传感器在一个温度下被修整时,其在整个温度范围内的精度取决于电子元件的初始精度。采用动态偏移抵消和动态元件匹配来消除偏移和增益误差。这些技术与sigma-delta ADC相结合,可获得易于使用的数字温度读数
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引用次数: 5
New approaches of wayside temperature measurement for railway car fire detection 铁路车辆火灾探测中的道旁温度测量新方法
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597819
T. Maly, H. Schweinzer
Especially for freight cars, detection of fire mostly requires to establish wayside installed equipment. Because of traveling speeds up to 160km/h, fast and sensitive data acquisition is an important prerequisite. Moreover, fire in closed wagons normally has only small, hardly measurable influence on the outer wagon surface, which requires optimized sensing techniques. One promising approach for reliable fire detection on railroad vehicles is the inspection of their surface temperature. Today's high resolution infrared slit cameras can fulfil all requirements regarding measurement speed, accuracy and temperature range. However, the high camera cost is a major disadvantage in deployment in multiple places along the track. With detailed knowledge of the surface temperature distribution under different fire conditions, cameras may be substituted by temperature sensors, which match the measurement issue better and are cheaper. In this paper the influence of applicable detectors and suitable configurations is discussed
特别是对于货车来说,火灾的探测大多需要建立路旁安装的设备。由于行驶速度高达160公里/小时,快速和敏感的数据采集是重要的先决条件。此外,封闭车厢内的火灾通常对车厢外表面的影响很小,难以测量,这需要优化的传感技术。对铁路车辆进行可靠的火灾探测的一种有前途的方法是检查其表面温度。今天的高分辨率红外狭缝相机可以满足有关测量速度,精度和温度范围的所有要求。然而,高成本的摄像机是一个主要的缺点,部署在多个地方沿轨道。通过对不同火灾条件下地表温度分布的详细了解,可以用温度传感器代替摄像机,从而更好地匹配测量问题,并且更便宜。本文讨论了适用的检测器和合适的配置对测量结果的影响
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引用次数: 2
Omnidirectional ultrasonic location sensor 全向超声定位传感器
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597791
A. Nishitani, Y. Nishida, H. Mizoguch
Rapid construction of the human activity observation system at low cost is necessary with respect to research into human activities and commercialization. The authors have developed an ultrasonic 3D tag system that uses ultrasonic transmitters/receivers for observing human activities. The newly developed system monitors the positions of objects to which transmitters are attached. The ultrasonic 3D tag system can be installed in a wide variety of environments, but the time and the installation cost required to install the numerous required receivers are prohibitive. Therefore, the present authors developed an omnidirectional ultrasonic location sensor. The omnidirectional ultrasonic location sensor is useful because the number of sensors to be attached can be reduced. The present paper proposes an omnidirectional ultrasonic location sensor and reports its feasibility
快速构建低成本的人类活动观测系统是人类活动研究和商业化的必然要求。作者开发了一种超声波3D标签系统,该系统使用超声波发射器/接收器来观察人类活动。新开发的系统可以监测附着发射器的物体的位置。超声波3D标签系统可以安装在各种各样的环境中,但是安装大量所需接收器所需的时间和安装成本令人望而却步。为此,研制了一种全向超声定位传感器。全向超声定位传感器是有用的,因为可以减少连接的传感器数量。本文提出了一种全向超声定位传感器,并报告了其可行性
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引用次数: 19
Fiber-optic membrane fluorescent sensor based on photonic crystal fiber with a glass rod in the fiber end 基于光子晶体光纤的光纤膜荧光传感器,光纤端有玻璃棒
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597895
Jianjun Ma, W. Bock, Z. Wang, Wenhui Hao, S. M. Mackinnon
With multimode photonic crystal fibers (PCFs) serving as receiving fibers, a fiber-optic probe for the enhancement of fluorescence signal level is investigated. By sealing cladding air holes at the front end of the PCF, a segment of pure glass rod is formed. We prove that the PCF with a longer glass rod has a higher light collection capability. An initial theoretical model is presented to simulate the probe with a tilted target flat membrane placed in front of the probe end face at an arbitrary distance
以多模光子晶体光纤作为接收光纤,研究了一种增强荧光信号电平的光纤探针。通过密封PCF前端的包层气孔,形成一段纯玻璃棒。我们证明了具有较长玻璃棒的聚光晶体具有更高的光收集能力。提出了一个初始的理论模型来模拟在探头端面前任意距离放置一个倾斜的目标平面膜的探头
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引用次数: 3
Practical industrial applications of TDL analyzers TDL分析仪的实际工业应用
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597868
P. Kaspersen, O. Bjoroey, I. Linnerud, V. Avetisov
Gas analyzers for industrial applications must have high reliability and require little maintenance. Analyzers for in situ measurements using tuneable diode laser spectroscopy in the near infrared have proven to meet these requirements. A brief description of the measurement principle and the LaserGas II analyzer is given. Some examples of practical industrial applications where this measurement technique is superior to most other techniques are presented
用于工业应用的气体分析仪必须具有高可靠性,并且需要很少的维护。使用近红外可调谐二极管激光光谱进行现场测量的分析仪已被证明可以满足这些要求。简要介绍了测量原理和LaserGas II分析仪。给出了一些实际工业应用的例子,其中这种测量技术优于大多数其他技术
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引用次数: 0
Competitive binding assays in microcapsules as "smart tattoo" biosensors 微胶囊作为“智能纹身”生物传感器的竞争性结合分析
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597946
S. Chinnayelka, M. Mcshane
This paper demonstrates a novel fluorescence resonance energy transfer (RET) sensor system, wherein a competitive binding (CB) assay is encapsulated into microcapsules. For CB approaches intended as smart tattoos, microcapsules are superior to hydrogel microparticle systems, as they provide space in the capsule interior for the free movement of the sensing elements while maintaining constant sensing assay concentration. Previously-developed CB glucose sensors suffer from toxicity, nonspecificity, lack of efficient encapsulation technology, and poor reversibility. To overcome some of these limitations, apo-glucose-oxidase (AG) was used as a glucose binding protein and was entrapped in polyelectrolyte microcapsules. The glucose-sensitive change in RET of the fluorescein isothiocyanate (FITC)-dextran and tetramethylrhodamine isothio-cyanate (TRITC)-AG entrapped in microcapsules showed 5times more specificity towards glucose over other sugars, with a sensitivity of 0.035units/mM in the range of 0-40mM. These response characteristics appear to be suitable for glucose monitoring in diabetic patients
本文演示了一种新型荧光共振能量转移(RET)传感器系统,其中竞争性结合(CB)检测被封装到微胶囊中。对于用于智能纹身的CB方法,微胶囊优于水凝胶微粒系统,因为它们在胶囊内部为传感元件的自由运动提供空间,同时保持恒定的传感检测浓度。先前开发的CB葡萄糖传感器存在毒性、非特异性、缺乏有效的封装技术和可逆性差等问题。为了克服这些限制,载脂蛋白葡萄糖氧化酶(AG)被用作葡萄糖结合蛋白,并被包裹在聚电解质微胶囊中。微胶囊包裹的异硫氰酸荧光素(FITC)-葡聚糖和异硫氰酸四甲基罗丹明(TRITC)-AG的RET对葡萄糖的敏感性变化是其他糖的5倍,在0-40mM范围内的敏感性为0.035单位/mM。这些反应特征似乎适用于糖尿病患者的血糖监测
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引用次数: 5
Unbalance Detection in Electrical Engines Using an In-Line Fiber Etalon 利用直列光纤标准子检测发动机不平衡
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597957
J.M. Cones, J. Bravo, F. Arregui, I. Matías
In this work, an indirect method for the detection of voltage unbalance in electrical engines using an optical fiber sensor is presented. The in-line fiber etalon structure has been designed and used to detect 0-5% voltage unbalances in the frequency range up to 500 Hz. The interferometric sensing mechanism of the sensor allows a high sensitivity with the additional advantages of EMI immunity and high dielectric isolation. In order to prove this claim, a 1.5 kW squirrel cage induction motor is unbalanced and its vibration analyzed. It is shown that a precise unbalance factor can be detected without accessing to the electric part of the machine and an accurate monitoring can be obtained using the analysis proposed. This scheme can be applied to reduce the oscillating electromagnetic torque, power losses and temperature rise due to unbalance, and leading to a higher efficiency and the extension of the life of the machine
本文提出了一种利用光纤传感器间接检测发动机电压不平衡的方法。设计了直列光纤标准子结构,并用于检测频率范围达500 Hz的0-5%电压不平衡。该传感器的干涉传感机制使其具有高灵敏度,并具有EMI抗扰性和高介电隔离性的额外优点。为了证明这一说法,对1.5 kW鼠笼式异步电动机进行了不平衡分析,并对其振动进行了分析。结果表明,在不接触机器电气部分的情况下,可以精确地检测出不平衡系数,并利用所提出的分析方法获得准确的监测结果。该方案可以减少振荡电磁转矩、功率损耗和不平衡引起的温升,从而提高效率,延长机器寿命
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引用次数: 4
期刊
IEEE Sensors, 2005.
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