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Inversion channel HFET with unity current gain frequency of 14 GHz and surface emitting laser from a single epitaxial growth 单外延生长的具有14 GHz等增益频率和面发射激光器的反转通道HFET
P. Kiely, P. Evaldsson, P. Cooke, G. Taylor
High speed capability up to 14 GHz is reported for the inversion channel HFET utilizing the inversion channel device structure. The transistor is fabricated from the same epitaxial growth and with the same fabrication technology as previously used to demonstrate the vertical cavity Double Heterostructure Opto-Electronic Switching (DOES) Laser.<>
据报道,利用反转通道器件结构的反转通道HFET具有高达14 GHz的高速性能。该晶体管采用与垂直腔双异质结构光电开关(DOES)激光器相同的外延生长和制造技术制造。
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引用次数: 4
Silicon germanium heterobipolar transistor for high speed operation 用于高速运行的硅锗异质双极晶体管
E. Kasper, A. Gruhle
The high frequency dilemma (limited high frequency operation only possible with high base sheet resistivities) of silicon bipolar junction transistors can be overcome by the application of heterostructures. In a first part we give an overview about the SiGe base heterobipolar-transistor (SiGe-HBT) concept and about the devices realized so far. In the second part we report about our SiGe-HBT device work based on Si-MBE grown structures. Experimental results obtained include transit frequencies up to 100 GHz, maximum oscillation frequencies up to 65 GHz, low base sheet resistivities (0.7 k/spl Omega/spl square/ to 3 k/spl Omega/spl square/), encouraging noise properties (<2 dB at 10 GHz) and successful tests in 24 GHz oscillators.<>
异质结构的应用可以克服硅双极结晶体管的高频困境(只有在高基片电阻率的情况下才能实现有限的高频工作)。在第一部分中,我们概述了SiGe基极异质双极晶体管(SiGe- hbt)的概念和迄今为止实现的器件。在第二部分,我们报告了基于Si-MBE生长结构的SiGe-HBT器件的工作。实验结果包括传输频率高达100 GHz,最大振荡频率高达65 GHz,基片电阻率低(0.7 k/spl ω /spl平方/至3k /spl ω /spl平方/),噪声特性良好(>)
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引用次数: 2
Performance and reliability characteristics of GaAs planar doped barrier detector diodes using carbon-doped acceptor spikes grown by molecular beam epitaxy 利用分子束外延生长的掺杂碳受体峰的GaAs平面掺杂势垒探测二极管的性能和可靠性特性
R. Malik, Y. Anand, M. Micovic, M. Geva, R. Ryan
Significant improvements in the reliability as well as yield and reproducibility of GaAs planar doped barrier (PDB) microwave detector diodes have been achieved by substituting carbon-doped acceptor regions in place of conventional beryllium acceptor dopant. The superior characteristics of the C-doped PDB diodes are thought to be related to the hyperabrupt and stable carbon acceptor doping spikes (10-60 A) obtained in the n/sup +/-i-p/sup +/-i-n/sup +/ doping profile grown by molecular beam epitaxy (MBE). Mesa geometry PDB diodes (10-20 micron diameter) in micropill packages were RF tested at 10 and 35 GHz. Excellent tangential sensitivity up to -58 dBm was measured with a detector video impedance of 2-50 kohms depending upon barrier height. The electrostatic discharge (ESD) failure threshold voltages were found to be much higher for the PDB diodes (3500 V) in comparison to Schottky detector diodes (300 V).<>
通过用碳掺杂受体区取代传统的铍掺杂受体,可以显著提高GaAs平面掺杂势垒(PDB)微波探测二极管的可靠性、产率和再现性。c掺杂PDB二极管的优越特性被认为与通过分子束外延(MBE)生长的n/sup +/-i-p/sup +/-i-n/sup +/掺杂谱中获得的超突变和稳定的碳受体掺杂峰(10-60 A)有关。在10 GHz和35 GHz频率下对微丸包装中的台面几何PDB二极管(直径10-20微米)进行射频测试。优异的切向灵敏度可达-58 dBm,检测器视频阻抗为2-50 khm,取决于屏障高度。与肖特基检测器二极管(300 V)相比,PDB二极管(3500 V)的静电放电(ESD)失效阈值电压要高得多
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引用次数: 0
Broadband optoelectronic wafer probing 宽带光电晶圆探测
M. Feuer, S. Shunk, P.R. Smith, H. H. Law, C. Burrus, M. Nuss
Optoelectronic S-parameter measurements offer the bandwidth needed to characterize today's state-of-the-art transistors, but have not yet achieved the throughput or accuracy provided by a vector network analyzer with microwave probes. In this paper, we discuss a new approach in which movable optoelectronic probes, calibrated by testing simple standard devices, are stepped around the wafer to provide accurate, high-throughput S-parameter measurements. Sub-picosecond laser pulses drive photoconductive switches on the probe tips, to generate electrical stimulus pulses and define sampling intervals, and signals are transferred to and from the wafer under test by coplanar waveguide transmission lines and plated contact bumps. The probes provide electrical pulses as short as 3 psec (FWHM), while maintaining a broadband 50 ohm termination to ensure stability of the device under test. Since probe flexure under contact significantly disturbs alignment of free-space beams, fiber-optic input is used to improve reproducibility. Analysis by vector error correction in the frequency domain removes systematic errors and separates the incident and reflected pulses without subjective time-window gating. We have demonstrated precise measurement of the complex reflection coefficient S/sub 11/ at frequencies up to 175 GHz. Noise simulations have been performed to investigate the effect of various system parameters on the measurement uncertainty and useful bandwidth for S-parameter tests.<>
光电s参数测量提供了表征当今最先进晶体管所需的带宽,但尚未达到带有微波探头的矢量网络分析仪提供的吞吐量或精度。在本文中,我们讨论了一种新的方法,通过测试简单的标准器件来校准可移动光电探头,在晶圆周围步进,以提供准确,高通量的s参数测量。亚皮秒激光脉冲驱动探针尖端的光导开关,产生电刺激脉冲并定义采样间隔,信号通过共面波导传输线和镀触点在被测晶圆之间传输。探头提供的电脉冲短至3秒(FWHM),同时保持宽带50欧姆的终端,以确保被测设备的稳定性。由于探针在接触下的挠曲会严重干扰自由空间光束的对准,因此采用光纤输入来提高再现性。频域矢量误差校正分析消除了系统误差,分离了入射脉冲和反射脉冲,不需要主观的时间窗门控。我们已经演示了在高达175 GHz的频率下精确测量复杂反射系数S/sub 11/。噪声仿真研究了系统参数对s参数测试测量不确定度和有用带宽的影响。
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引用次数: 4
Millimeter-wave network analysis using nonlinear transmission lines 用非线性传输线分析毫米波网络
M. Rodwell, R. Yu, M. Reddy, J. Pusl, S. Allen, M. Case, U. Bhattacharya
We report systems for network measurements at millimeter-wave frequencies. Active probes are used for on-wafer measurements to approximately 150 GHz. The active probes incorporate monolithic GaAs mm-wave network analysis circuits (comprising a nonlinear transmission line stimulus signal generator and a directional sampling circuit) and low-loss, rugged quartz coplanar-waveguide probe tips. Wideband transmitter and receiver integrated circuits interfaced to frequency-independent antennas, are used for free-space transmission measurements to approximately 250 GHz.<>
我们报告了毫米波频率的网络测量系统。有源探头用于约150 GHz的晶圆上测量。有源探头包括单片砷化镓毫米波网络分析电路(包括非线性传输线刺激信号发生器和定向采样电路)和低损耗,坚固的石英共面波导探头尖端。宽带发射器和接收器集成电路与频率无关的天线接口,用于大约250 GHz的自由空间传输测量。
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引用次数: 1
High temperature operation of n-type 6H-SiC and p-type diamond MESFETs n型6H-SiC和p型金刚石mesfet的高温工作
M. Shin, G. Bilbro, R. Trew
Large signal RF and DC performance of n-type 6H-SiC and p-type diamond MESFETs has been simulated at various operating temperatures by a large-signal RF simulator using the harmonic balance technique and the two-dimensional device simulator, PISCES-IIB. The RF performance of SiC MESFET is predicted to be optimal in a temperature range slightly higher than room temperature. At room temperature the simulated SiC MESFET exhibits an output power of 3.5 W/mm for an operating frequency of 8 GHz with 16.5 dB gain and 44% power-added efficiency at 24 dBm input power. In contrast to the SiC MESFET, the RF performance of the diamond MESFET is improved with temperature, but the current level is much lower than that in SiC in the entire temperature region investigated. The very different temperature dependencies of DC and RF performance in SiC and diamond MESFETs are attributed to the significant difference in the dopant ionization energies in SiC and diamond.<>
采用谐波平衡技术和二维器件模拟器PISCES-IIB,对n型6H-SiC和p型金刚石mesfet在不同工作温度下的大信号射频和直流性能进行了模拟。预测SiC MESFET的射频性能在略高于室温的温度范围内是最佳的。在室温下,模拟的SiC MESFET在24 dBm输入功率下,工作频率为8 GHz,输出功率为3.5 W/mm,增益为16.5 dB,功率增加效率为44%。与SiC MESFET相比,金刚石MESFET的射频性能随温度的升高而提高,但在整个温度范围内的电流水平远低于SiC MESFET。SiC和金刚石mesfet中直流和射频性能的温度依赖性是由于SiC和金刚石中掺杂剂电离能的显著差异造成的。
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引用次数: 5
InAlAs/InGaAs(P) double heterojunction bipolar transistors with high breakdown voltage grown by chemical beam epitaxy (CBE) 化学束外延生长高击穿电压InAlAs/InGaAs(P)双异质结双极晶体管
J. Cowles, W. Chen, G. Munns, G. Haddad
InAlAs/InGaAs single(S) and double(D) heterojunction bipolar transistors (HBTs) have been grown by Chemical Beam Epitaxy (CBE). The DHBT features an InGaAsP precollector that greatly increases the breakdown voltage from 2V to 8V and decreases the collector emitter offset voltage from 360mV to 210mV in comparison to the SHBT. The common emitter current gain /spl beta/ remains high in both structures. Microwave measurements performed on the DHBT reveal that f/sub t/ increases monotonically with J/sub c/ up to at least 10/sup 5/ A/cm/sup 2/ showing no signs of base pushout. These results show that CBE grown DHBTs are promising devices for high power applications.<>
采用化学束外延(CBE)技术制备了InAlAs/InGaAs单(S)和双(D)异质结双极晶体管(HBTs)。与SHBT相比,DHBT具有InGaAsP预集电极,可将击穿电压从2V大大提高到8V,并将集电极发射极偏置电压从360mV降低到210mV。在这两种结构中,共发射极电流增益/压升/仍然很高。在DHBT上进行的微波测量表明,f/下标t/随着J/下标c/单调增加,至少达到10/sup 5/ A/cm/sup 2/,没有显示出基础推出的迹象。这些结果表明,CBE生长的dhbt是高功率应用的有前途的器件
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引用次数: 1
p/sup +/-thin surface layer Schottky-barrier enhanced high speed pseudomorphic Al/sub 0.25/Ga/sub 0.75/As/In/sub 0.15/Ga/sub 0.85/As and Ga/sub 0.5/In/sub 0.5/P/In/sub 0.15/Ga/sub 0.85/As MODFETs p/sup +/-薄表面层肖特基势垒增强高速伪晶Al/sub 0.25/Ga/sub 0.75/As/In/sub 0.15/Ga/sub 0.85/As和Ga/sub 0.5/In/sub 0.5/ p/ In/sub 0.15/Ga/sub 0.85/As modfet
J. Dickmann, M. Berg, T. Hackbarth, R. Deufel, H. Daembkes, F. Scholz, M. Moser
In this paper we report on our investigation of the introduction of a highly p-doped very thin surface layer in combination with GaInP as the wide bandgap material in order to improve the breakdown voltage of GaAs based pseudomorphic MODFETs without deteriorating other device performances. In order to proof the quality of this approach we compare the device performance of the new device with that of a conventional AlGaAs/InGaAs MODFET also having a p/sup +/-surface layer. The device performances of AlGaAs/InGaAs and GaInP/InGaAs devices with 1.8 /spl mu/m gate length are, g/sub mmax/=224mS/mm, 200mS/mm, I/sub DSmax/=300mA/mm, 400 mA/mm, V/sub BrDG/ (I/sub G/=1 mA/mm)=10 V, 14 V, f/sub T/=15 GHz, 12 GHz, f/sub max/=59 GHz, 42 GHz, respectively.<>
在本文中,我们研究了引入高p掺杂的极薄表面层与GaInP结合作为宽带隙材料,以提高基于GaAs的伪晶modfet的击穿电压,而不会降低器件的其他性能。为了证明这种方法的质量,我们将新器件的器件性能与具有p/sup +/-表面层的传统AlGaAs/InGaAs MODFET的器件性能进行了比较。栅极长度为1.8 /spl mu/m的AlGaAs/InGaAs和GaInP/InGaAs器件的器件性能分别为:g/sub mmax/=224mS/mm、200mS/mm、I/sub DSmax/=300mA/mm、400 mA/mm、V/sub BrDG/ (I/sub g/ = 1ma /mm)=10 V、14 V、f/sub T/=15 GHz、12 GHz、f/sub max/=59 GHz、42 GHz。
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引用次数: 0
High microwave power performance of self-aligned InGaP/GaAs heterojunction bipolar transistors 自对准InGaP/GaAs异质结双极晶体管的高微波功率性能
L.W. Yang, S. Fu, B. Clark, R.S. Brozovich, H. Lin, S. Liu, P. Chao, F. Ren, C. Abernathy, S. Pearton, J. Lothian, P. Wisk, T.R. Fullowan, T. Chiu, S. Pei
The results of experimental study and design criteria of high efficiency power heterojunction bipolar transistors (HBTs) are reported and discussed. Self-aligned npn HBTs fabricated by dry process technology have shown excellent device characteristics with low collector offset voltage (<150 mV) and low knee voltage (<0.7 V), and excellent high-frequency responses well into the millimeter-wave range. The FET-like device topology provides a means to preserve the power gain in device scaling for large emitter area. At X-band (10 GHz), an 8-cell common-base (CB) power transistor with emitter area of 240 /spl mu/m/sup 2/ demonstrated 17.2-17.5 dB gain. The 12-cell (360 /spl mu/m/sup 2/) common-emitter (CE) HBTs with a breakdown voltage (BV/sub ceo/) of 11 V delivered 0.53 W output power with 57% power added efficiency (P.A.E.) and 11.3 dB power gain at 4 GHz. Peak power of 0.68 W, P.A.E. of 52%, and 10.3 dB power gain also was achieved at a collector current density of 5.5/spl times/10/sup 4/ A/cm/sup 2/.<>
本文报道并讨论了高效功率异质结双极晶体管(hbt)的实验研究结果和设计准则。采用干法技术制备的自对准npn hbt具有优异的器件特性,具有低集电极偏置电压(>
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引用次数: 2
Quasi-optical frequency conversion arrays 准光变频阵列
R. York, Rajeev J Ram
A preliminary investigation of quasi-optical frequency conversion arrays is described. Using a diode loaded dipole placed between two parallel conducting plates to simulate an array, we were able to demonstrate enhanced conversion efficiency into the second harmonic and obtain spontaneous parametric oscillation for certain array geometries. Sub-harmonic parametric oscillation was achieved by strongly driving the nonlinear antenna at a single pump frequency while the cavity length was adjusted for resonance at a subharmonic, and a well-defined threshold for this parametric down-conversion was observed.<>
描述了准光变频阵列的初步研究。通过在两个平行导电板之间放置一个二极管负载偶极子来模拟阵列,我们能够证明增强的转换效率到二次谐波,并获得某些阵列几何形状的自发参数振荡。通过在单泵频下强烈驱动非线性天线实现亚谐波参数振荡,同时调整谐振腔长度以实现亚谐波谐振,并观察到这种参数下转换的明确阈值。
{"title":"Quasi-optical frequency conversion arrays","authors":"R. York, Rajeev J Ram","doi":"10.1109/CORNEL.1993.303121","DOIUrl":"https://doi.org/10.1109/CORNEL.1993.303121","url":null,"abstract":"A preliminary investigation of quasi-optical frequency conversion arrays is described. Using a diode loaded dipole placed between two parallel conducting plates to simulate an array, we were able to demonstrate enhanced conversion efficiency into the second harmonic and obtain spontaneous parametric oscillation for certain array geometries. Sub-harmonic parametric oscillation was achieved by strongly driving the nonlinear antenna at a single pump frequency while the cavity length was adjusted for resonance at a subharmonic, and a well-defined threshold for this parametric down-conversion was observed.<<ETX>>","PeriodicalId":129440,"journal":{"name":"Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1993-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123612057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits
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