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High field drift domains in GaAs and InP based heterostructure field effect devices GaAs和InP基异质结构场效应器件中的高场漂移域
E. Kohn, S. Strahle, D. Geiger, U. Erben
Modelling the high field drift region of HFET's as a drift capacitance between gate and drain in series with the gate capacitance allows one to estimate the extension of the drift region, which determines feedback and output conductance, thus relating the microwave power gain to the device structure. The technique is applied to various GaAs and InP based FET structures.<>
将HFET的高场漂移区建模为栅极和漏极之间的漂移电容与栅极电容串联,可以估计漂移区域的扩展,从而确定反馈和输出电导,从而将微波功率增益与器件结构联系起来。该技术应用于各种GaAs和InP基FET结构。
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引用次数: 6
MSM waveguide photodetectors optimized for monolithic integration with HEMTs MSM波导光电探测器优化的单片集成与hemt
M. Leary, J. Ballantyne
The authors describe the design of two MSM waveguide photodetectors which share their layer structure with high electron mobility transistors. This design makes these detectors particularly suited to integration with HEMTs in OEIC's. Resistive loss at the electrode surface, radiation loss into the substrate, and scattering loss are all accounted for in the optimization for internal detection efficiency of these 50 GHz detectors.<>
本文描述了两种与高电子迁移率晶体管具有相同层结构的MSM波导光电探测器的设计。这种设计使得这些探测器特别适合与OEIC中的hemt集成。在优化50 GHz探测器的内部检测效率时,考虑了电极表面的电阻损耗、入射到衬底的辐射损耗和散射损耗
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引用次数: 1
Ultrafast operation of heterostructure bipolar transistors resulting from coherent base transport of minority carriers 少数载流子相干基输运引起的异质结构双极晶体管的超快运行
S. Luryi
The author has discussed coherent base propagation effects that can be obtained in stepwise graded and linearly graded bandgap base structures of heterostructure bipolar transistors. These effects open up one or several bands of frequencies above f/sub T/, where the transistor is active. Physically, the active behavior of a coherent transistor results from the phaseshift between the collector current and voltage, acquired during the minority-carrier transit across the base.<>
讨论了异质结构双极晶体管阶梯式梯度和线性梯度带隙基结构中可以获得的相干基传播效应。这些效应打开了f/sub T/以上的一个或几个频带,此时晶体管处于活动状态。从物理上讲,相干晶体管的有源行为是由集电极电流和电压之间的相移引起的,这种相移是在基极上的少数载流子传输过程中产生的。
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引用次数: 3
Reliability of strained quantum well lasers 应变量子阱激光器的可靠性
H. Yoon, Y.C. Chen, L. Davis, H. Sun, K. Zhang, J. Singh, P. Bhattacharya
Strained quantum well lasers have demonstrated remarkably improved characteristics compared to unstrained quantum well lasers. For extracting the highest level of performance, the required strain may be large. An important factor in the use of strained quantum wells is the long-term stability of the pseudomorphic active region and the associated reliability of the device. The effect of strain on reliability is investigated, in particular, for In/sub x/Ga/sub 1-x/As/GaAs (x=0.2, 0.25, and 0.3) multiple quantum well lasers in 64 mW/facet constant output power tests at 85/spl deg/C for 40 hours. Laser characteristics such as the operating currents (I/sub op/), the threshold currents (I/sub th/), and the slope efficiencies (dL/dI) are measured during the test and serve as useful degradation parameters. The average changes in I/sub op/ are 15, 9.9, and 0.22%, and the average changes in I/sub th/ at 85/spl deg/C are 21, 8.7, and -1.2% for x=0.2, 0.25, and 0.3, respectively. The average changes in dL/dI at 85/spl deg/C are -19, -14, 1.5%, respectively. Defect migration into the pseudomorphic active region is verified to be the dominant mechanism of degradation observed in these lasers. Hence, to account for the strain-induced reliability improvement, it is necessary to study the propagation of defects in semiconductor heterostructures. A theoretical model is constructed based on the the linear theory of elasticity, and relevant experiments are conducted for its support. Strain energy considerations show that defect propagation across a strained layer is unfavorable. The nonradiative defect densities in the GaAs-Al/sub 0.4/Ga/sub 0.6/As quantum wells with and without the surrounding pseudomorphic In/sub 0.2/Ga/sub 0.8/As layers are compared by measuring the photoluminescence intensities after intentionally creating defects and enhancing their diffusion. The structures with pseudomorphic In/sub 0.2/Ga/sub 0.8/As layers consistently show much higher quantum well photoluminescence intensity by as much as 130 times, thereby confirming our model. These results clearly account for the observed reliability improvement in quantum well lasers with increased strain in the well.<>
与非应变量子阱激光器相比,应变量子阱激光器的性能得到了显著改善。为了获得最高水平的性能,所需的应变可能很大。使用应变量子阱的一个重要因素是伪晶有源区的长期稳定性和相关器件的可靠性。研究了应变对可靠性的影响,特别是对于in /sub x/Ga/sub 1-x/As/GaAs (x=0.2, 0.25和0.3)多量子阱激光器,在64 mW/facet恒定输出功率下,在85/spl度/C下进行了40小时的测试。在测试过程中测量了激光特性,如工作电流(I/sub op/)、阈值电流(I/sub th/)和斜率效率(dL/dI),并作为有用的降解参数。当x=0.2、0.25和0.3℃时,I/sub / op/的平均变化分别为15、9.9和0.22%,而在85/spl℃时,I/sub / op/的平均变化分别为21、8.7和-1.2%。85℃时dL/dI的平均变化分别为-19、-14、1.5%。缺陷迁移到伪晶有源区被证实是这些激光器中观察到的主要退化机制。因此,为了解释应变引起的可靠性提高,有必要研究半导体异质结构中缺陷的传播。基于弹性线性理论建立了理论模型,并进行了相关实验验证。应变能的考虑表明,缺陷在应变层上的传播是不利的。通过测量有意制造缺陷并增强其扩散后的光致发光强度,比较了周围有和没有假晶in /sub 0.2/Ga/sub 0.8/As层的GaAs-Al/sub 0.4/Ga/sub 0.6/As量子阱中的非辐射缺陷密度。具有准晶In/sub 0.2/Ga/sub 0.8/As层的结构始终表现出更高的量子阱光致发光强度,高达130倍,从而证实了我们的模型。这些结果清楚地解释了随着>井中应变的增加,所观察到的量子阱激光器可靠性的提高
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引用次数: 1
Monte Carlo simulation of wide AlGaAs barriers 宽AlGaAs势垒的蒙特卡罗模拟
R. Mills, G. Dunn, A. Walker, M. Daniels, P. Bishop, K. O. Jensen, B. Ridley, D. Herbert, J. Jefferson
An theoretical study has been made of electron transport over a wide AlGaAs barrier with graded interfaces between GaAs contact layers doped at 1/spl times/10/sup 18/ cm/sup -3/. Drift diffusion theory has been used giving excellent agreement with experimental current-voltage curves over the temperature range 100-200 K. We also present a fully self consistent 1-D Monte Carlo simulation in which the change in alloy composition in the graded interfaces is accounted for by position dependent scattering. We present a method used in the Monte Carlo simulation which allowed the modelling of the heavily doped contact regions even though the electron density could change by up to 8 orders of magnitude in the device.<>
本文从理论上研究了掺杂量为1/ sp1倍/10/sup / 18/ cm/sup -3/的砷化镓接触层之间的梯度界面在宽AlGaAs势垒上的电子传递。漂移扩散理论在100- 200k温度范围内与实验电流-电压曲线非常吻合。我们还提出了一个完全自一致的一维蒙特卡罗模拟,其中渐变界面中合金成分的变化是由位置依赖散射来解释的。我们提出了一种在蒙特卡罗模拟中使用的方法,该方法允许对重掺杂接触区域进行建模,即使电子密度在器件中可以变化多达8个数量级。
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引用次数: 0
Thermal runaway analysis of high power AlGaAs/GaAs heterojunction bipolar transistors 大功率AlGaAs/GaAs异质结双极晶体管热失控分析
L. Liou, B. Bayraktaroglu, C.I. Huang
Thermal runaway study of multiple emitter AlGaAs/GaAs power HBTs using an analytical electro-thermal model is described. Thermal runaway causes the fatal destruction of the device under the voltage modulation mode of operation, and thermally-induced current instability of the device under the current modulation mode of operation. The kinetic relation between the thermal runaway and junction temperature rise is studied. The HBT power handling capabilities in relation to the device thermal resistance and ballasting schemes are discussed.<>
采用解析电热模型对多发射极AlGaAs/GaAs功率HBTs进行了热失控研究。热失控是电压调制工作模式下器件的致命破坏,是电流调制工作模式下器件的热致电流不稳定。研究了热失控与结温升之间的动力学关系。讨论了HBT功率处理能力与器件热阻和镇流器方案的关系
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引用次数: 6
Self-consistent calculations of [111]-oriented GaAs and InP based pseudomorphic HEMT's [111]导向GaAs和InP伪晶HEMT的自洽计算
J. Sánchez-Rojas, E. Muñoz
Band structure calculations, charge distribution and charge control properties in InGaAs-based pseudomorphic modulation doped [111]-FET's are presented. Compressive strain in AlGaAs-InGaAs-GaAs structures, and both tensile and compressive strains in AlInAs-InGaAs-InP devices are used to generate internal electric fields via the piezoelectric effect. Normal and inverted HEMT's with maximum. Charge in the well and minimized parallel conduction have been designed using this piezoelectric internal field. Improvements in charge concentration (up to 50% more) and its distribution in the well (almost centered) are achieved in this new orientation. Transconductance and gate capacitance versus gate voltage are compared for the [100] and [111] orientations. We conclude that the device performance is improved when the [111] substrate is used.<>
介绍了掺杂[111]-FET的ingaas伪晶调制的能带结构计算、电荷分布和电荷控制特性。AlGaAs-InGaAs-GaAs结构中的压缩应变和AlInAs-InGaAs-InP器件中的拉伸应变和压缩应变均用于通过压电效应产生内部电场。正常和倒置的HEMT最大。利用该压电内场设计了井内电荷和最小化平行传导。在这种新定向下,电荷浓度(提高了50%)及其在井中的分布(几乎居中)得到了改善。比较了[100]和[111]两个方向的跨导和栅极电容与栅极电压。我们得出结论,当使用[111]衬底时,器件性能得到改善。
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引用次数: 2
Breakdown characterization of AlInAs/GaInAs junction modulated HEMTs (JHEMTs) with regrown ohmic contacts by MOCVD 利用MOCVD技术研究具有再生欧姆接触的AlInAs/GaInAs结调制HEMTs (JHEMTs)的击穿特性
J. Shealy, M. Hashemi, S. Denbaars, U. Mishra, T.K. Liu, J.J. Brown, M. Lui
We present a technology to increase both the two-terminal gate-drain breakdown and subsequently the three-terminal-off-state breakdown of AlInAs/GaInAs HEMTs to record values without substantial impact on other parameters such as Idss and g/sub m/. The breakdown in these structures is dependent on the injection of electrons from the source (channel current) and the gate (gate leakage) into the channel where multiplication occurs (due to high electric fields at the drain), producing holes which are swept back into the gate and source electrodes. These phenomena can be suppressed by increasing the gate barrier height and alleviating the fields at the drain. In our approach we have achieved both by incorporating a p+-2DEG junction as the gate which modulates the 2DEG gas and by utilizing selective regrowth of the source and drain regions by MOCVD. The 1 /spl mu/m gate length devices fabricated show a full channel current of 350 mA/mm, transconductance of 240 mS/mm and record high two-terminal gate-drain and three-terminal-off-state breakdown voltages of 31 V and 28 V, respectively. The gate-to-drain spacing is 1/spl mu/m and the breakdown is defined at 1mA/mm gate leakage. Further, temperature measurements were made to characterize both two-terminal and three-terminal-on-state breakdown. The gate current behavior is presented along with a calculated ionization rate which is compared with rates previously reported.<>
我们提出了一种技术,可以将AlInAs/GaInAs hemt的双端栅极-漏极击穿和随后的三端关闭状态击穿增加到记录值,而不会对其他参数(如Idss和g/sub / m/)产生实质性影响。这些结构中的击穿依赖于从源(通道电流)和栅极(栅极泄漏)注入电子到发生倍增的通道中(由于漏极处的高电场),产生被扫回栅极和源电极的空穴。这些现象可以通过增加栅极屏障高度和减轻排水口处的电场来抑制。在我们的方法中,我们通过结合p+-2DEG结作为调节2DEG气体的门,以及通过MOCVD利用源区和漏区选择性再生来实现这两种方法。所制备的栅极长度为1 /spl mu/m的器件显示出350 mA/mm的全通道电流,240 mS/mm的跨导,以及分别为31 V和28 V的高双端栅极漏极和三端断开状态击穿电压。栅极漏极间距为1/spl mu/m,击穿定义为1mA/mm栅极漏极。此外,还进行了温度测量,以表征双端和三端状态击穿。栅极电流行为与计算出的电离率一起呈现,该电离率与先前报道的电离率进行了比较
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引用次数: 4
Development of an appropriate model for the design of D-band InP Gunn devices 为设计d波段InP - Gunn器件建立了合适的模型
R. Kamoua, H. Eisele, George I. Haddad, G. Munns, M. Sherwin
The potential of InP Gunn devices as power sources in the fundamental mode at D-band frequencies (110 GHz-170 GHz) is investigated. A self-consistent ensemble Monte Carte model has been developed to design and identify suitable structures for operation in this frequency range. Using this model with typical InP material parameters found in the literature, it is shown to give results inconsistent with experiment. Based on experimental results from a 1.7 /spl mu/m long Gunn structure, more realistic material parameters were estimated. The resulting model is then used to design various structures with active regions in the 1 /spl mu/m range. In particular, two structures, one with a flat doping profile and the other with a linearly graded doping profile, were fabricated and tested. State-of-the-art performance from these structures operating in the fundamental mode was obtained at frequencies ranging from 108.3 GHz to 155 GHz. The flat structure yielded optimum results at 108.3 GHz with a power level of 33 mW while the graded structure gave 20 mW at 120 GHz, 17 mW at 133 GHz, 10 mW at 136 GHz, and 8 mW at 155 GHz. These results are compared with the model predictions.<>
研究了InP - Gunn器件在d波段(110 GHz-170 GHz)作为基模电源的潜力。一个自洽的集合蒙特卡特模型已经开发设计和确定合适的结构在这个频率范围内的操作。将该模型与文献中发现的典型InP材料参数相结合,得到的结果与实验结果不一致。基于1.7 /spl mu/m长Gunn结构的实验结果,估算出更符合实际的材料参数。然后利用所得模型在1 /spl mu/m范围内设计具有活动区域的各种结构。特别地,制备并测试了两种结构,一种是平面掺杂,另一种是线性梯度掺杂。在108.3 GHz到155 GHz的频率范围内,这些工作在基模下的结构获得了最先进的性能。扁平结构在108.3 GHz时产生最佳结果,功率水平为33 mW,而梯度结构在120 GHz时产生20 mW,在133 GHz时产生17 mW,在136 GHz时产生10 mW,在155 GHz时产生8 mW。这些结果与模型预测结果进行了比较。
{"title":"Development of an appropriate model for the design of D-band InP Gunn devices","authors":"R. Kamoua, H. Eisele, George I. Haddad, G. Munns, M. Sherwin","doi":"10.1109/CORNEL.1993.303104","DOIUrl":"https://doi.org/10.1109/CORNEL.1993.303104","url":null,"abstract":"The potential of InP Gunn devices as power sources in the fundamental mode at D-band frequencies (110 GHz-170 GHz) is investigated. A self-consistent ensemble Monte Carte model has been developed to design and identify suitable structures for operation in this frequency range. Using this model with typical InP material parameters found in the literature, it is shown to give results inconsistent with experiment. Based on experimental results from a 1.7 /spl mu/m long Gunn structure, more realistic material parameters were estimated. The resulting model is then used to design various structures with active regions in the 1 /spl mu/m range. In particular, two structures, one with a flat doping profile and the other with a linearly graded doping profile, were fabricated and tested. State-of-the-art performance from these structures operating in the fundamental mode was obtained at frequencies ranging from 108.3 GHz to 155 GHz. The flat structure yielded optimum results at 108.3 GHz with a power level of 33 mW while the graded structure gave 20 mW at 120 GHz, 17 mW at 133 GHz, 10 mW at 136 GHz, and 8 mW at 155 GHz. These results are compared with the model predictions.<<ETX>>","PeriodicalId":129440,"journal":{"name":"Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1993-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114577618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
InP-based HEMTs for the realization of ultra-high efficiency millimeter wave power amplifiers 基于inp的hemt实现超高效率毫米波功率放大器
M. Matloubian, L. Larson, A. Brown, L. Jelloian, L. Nguyen, M. Lui, T. Liu, J. Brown, M. Thompson, W. Lam, A. Kurdoghlian, R. Rhodes, M. Delaney, J. Pence
The authors have conducted a systematic effort to improve the breakdown voltage of InP-based HEMTs without compromising their high frequency performance, and have demonstrated millimeter wave circuit results that are comparable to or exceed those of the best GaAs-based PHEMTs in the critical area of power-added efficiency and output power. This improvement was accomplished by a combination of developments in material growth and device design and fabrication.<>
作者已经进行了系统的努力,在不影响其高频性能的情况下提高基于inp的hemt的击穿电压,并证明了毫米波电路结果在功率附加效率和输出功率的关键区域与最好的基于gaas的phemt相当或超过。这种改进是通过材料生长和设备设计与制造的发展相结合来实现的。
{"title":"InP-based HEMTs for the realization of ultra-high efficiency millimeter wave power amplifiers","authors":"M. Matloubian, L. Larson, A. Brown, L. Jelloian, L. Nguyen, M. Lui, T. Liu, J. Brown, M. Thompson, W. Lam, A. Kurdoghlian, R. Rhodes, M. Delaney, J. Pence","doi":"10.1109/CORNEL.1993.303126","DOIUrl":"https://doi.org/10.1109/CORNEL.1993.303126","url":null,"abstract":"The authors have conducted a systematic effort to improve the breakdown voltage of InP-based HEMTs without compromising their high frequency performance, and have demonstrated millimeter wave circuit results that are comparable to or exceed those of the best GaAs-based PHEMTs in the critical area of power-added efficiency and output power. This improvement was accomplished by a combination of developments in material growth and device design and fabrication.<<ETX>>","PeriodicalId":129440,"journal":{"name":"Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1993-08-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125905773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
期刊
Proceedings of IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits
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