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2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)最新文献

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Optical induced blueshift of PLE spectrum improvement in n-i-p-i multiple quantum well structures n-i-p-i多量子阱结构中PLE谱改善的光致蓝移
T. Xiaohong, C. Jim, Zhang Baolin, Zhu Jinyi, Huang Gensheng
A large blue shift in the peak position of the photoluminescence excitation (PLE) spectra of n-i-p-i MQW structures have been observed when the excitation power intensity is varied from /spl sim/ 1 mW/cm/sup 2/ to /spl sim/10 W/cm/sup 2/. With multiple step-quantum wells (MS-QWs), the blue shift is found to be much larger than that of the n-i-p-i MQWs structure with normal rectangular quantum wells. The blue shift is found to be dependent on the excitation intensity I/sup ex/ in the form /spl Delta/h/spl nu//sub max/ - /spl Delta/h/spl nu//sub max/ / 1 + (I/sup ex//I/sup a/)/sup s/.
当激发功率强度从/spl sim/1 mW/cm/sup 2/变化到/spl sim/10 W/cm/sup 2/时,n-i-p-i MQW结构的光致发光激发(PLE)光谱的峰值位置发生了较大的蓝移。多阶跃量子阱(MS-QWs)结构的蓝移远大于具有普通矩形量子阱的n-i-p-i MQWs结构。发现蓝移依赖于激发强度I/sup ex/,形式为/spl Delta/h/spl nu//sub max/ - /spl Delta/h/spl nu//sub max/ / 1 + (I/sup ex//I/sup a/)/sup s/。
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引用次数: 0
Improvement of kink-free operation in InGaAs/GaAs/AlGaAs high power, ridge waveguide laser diodes InGaAs/GaAs/AlGaAs高功率脊波导激光二极管无扭结工作的改进
M. Buda, H. Tan, L. Fu, L. Josyula, C. Jagadish
This paper demonstrates the improvement of kink-free operation in InGaAs/GaAs/AlGaAs high power, ridge waveguide laser diodes. Results show that when the thickness of the insulator layer is reduced below 200 nm and Ti/Pt/Au is used as the p-type metallization, significant absorption outside the ridge occurs as a result of the penetration of the vertical optical field into the absorptive metal layers. This effect can be used to introduce selective loss for the first order lateral mode. Hence, this study has shown that the kink-free operation can be improved by 30 to 50% in 980 nm emitting laser diodes when the thickness of the SiO/sub 2/ insulator is reduced to 50 to 75 nm.
本文演示了在InGaAs/GaAs/AlGaAs高功率脊波导激光二极管中无扭结工作的改进。结果表明:当绝缘层厚度减小到200 nm以下,采用Ti/Pt/Au作为p型金属化层时,由于垂直光场渗透到吸收金属层中,在脊外发生了明显的吸收;这种效应可用于引入一阶横向模态的选择性损耗。因此,本研究表明,当SiO/sub - 2/绝缘体厚度减少到50 ~ 75 nm时,980 nm发射激光二极管的无扭结操作可以提高30 ~ 50%。
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引用次数: 1
Evaluation of diffusion barrier layers in Cu interconnects 铜互连中扩散势垒层的评价
K. Prasad, X. Yuan, C. Li, R. Kumar
In this paper, we compare the experimental results on the suitability of oxygen or nitrogen containing SiC (SiCO or SiCN) with conventional SiN as a capping layer to prevent Cu diffusion into interlevel dielectric (ILD) layer in a typical Cu based interconnect structure. In addition to reducing the dielectric constant (k) value of the barrier, SiCN and SiCO show comparable performance in terms of preventing the Cu diffusion as well as offering good dielectric breakdown strength.
在本文中,我们比较了含氧或含氮SiC (SiCO或SiCN)与常规SiN作为封盖层的适用性,以防止Cu扩散到典型的Cu基互连结构中的层间介电层(ILD)。除了降低势垒的介电常数(k)值外,SiCN和SiCO在阻止Cu扩散以及提供良好的介电击穿强度方面表现出相当的性能。
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引用次数: 5
Micro fluxgate sensor using solenoid driving and sensing coils 微磁通门传感器采用电磁驱动和感应线圈
D. Shim, Hae-Seok Park, K. Na, Wonseo Choi, Jun-sik Hwang, Sang-on Choi
This paper describes a MEMS-based micro-fluxgate magnetic sensor composed of solenoid driving coil, sensing coil and rectangular-ring shaped magnetic core. Solenoid coils and magnetic core were separated by benzocyclobutene (BCB) having high resistivity and good planarization characteristics. To take advantage of low cost, small size and low power consumption, MEMS technology was used to fabricate micro fluxgate sensor. Copper coil with 20 /spl mu/m width and 3.5/spl mu/m thickness was electroplated on Cr (300/spl Aring/)/Au (1500/spl Aring/) films for driving and sensing coils. We designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. Permalloy (NiO/sub 0.8/Fe/sub 0.2/) film with the thickness of 2 /spl mu/m was electroplated under 2000 gauss to induce magnetic anisotropy. The magnetic core had the high DC effective permeability of /spl sim/1,100 and coercivity of /spl sim/0.1 Oe. The fabricated fluxgate sensor had the sensitivity of /spl sim/650 V/T and power consumption of 40 mW at the driving frequency of 2 MHz and the driving voltage of 5 Vp-p.
本文介绍了一种基于mems的微磁通门磁传感器,该传感器由电磁驱动线圈、感应线圈和矩形环形磁芯组成。采用具有高电阻率和良好平面化特性的苯并环丁烯(BCB)分离电磁线圈和磁芯。采用MEMS技术制造微磁通门传感器,具有低成本、小尺寸、低功耗等优点。在Cr (300/spl Aring/)/Au (1500/spl Aring/)薄膜上电镀宽度为20 /spl mu/m、厚度为3.5/spl mu/m的铜线圈,用于驱动线圈和传感线圈。我们将磁芯设计成矩形环形,以减少漏磁。在2000高斯下电镀厚度为2/ spl mu/m的坡莫合金(NiO/sub 0.8/Fe/sub 0.2/)薄膜,诱导磁各向异性。磁芯的直流有效磁导率为/spl sim/ 1100,矫顽力为/spl sim/0.1 Oe。所制备的磁通门传感器在驱动频率为2 MHz,驱动电压为5 Vp-p时,灵敏度为/spl sim/650 V/T,功耗为40 mW。
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引用次数: 1
Femtosecond three-pulse photon echo and transient grating studies of the yellow band of GaN 氮化镓黄带飞秒三脉冲光子回波及瞬态光栅研究
L. Van Dao, M. Lowe, P. Hannaford
Using femtosecond three-pulse two-colour photon echo measurements we study the optical nonlinearity induced by pump and probe in the short time scale (< 500 fs) where the free induction decay and photon echo are the main contribution to observed signal and in a long time scale (up to 20 ps) in the trace of the population grating. The variation of the pump and probe wavelength and use of spectrally resolved measurements allows us to study the origin of the yellow band and the phase and energy relaxation properties of this band. The results suggest that the light emission in the yellow band is the recombination between shallow donors and deep acceptors and the carriers trapping time is very short.
利用飞秒三脉冲双色光子回波测量,研究了泵浦和探头在短时间尺度(< 500 fs)下引起的光学非线性,其中自由感应衰减和光子回波是观测信号的主要贡献,在长时间尺度(高达20 ps)下,在人口光栅的轨迹中引起的光学非线性。泵浦和探针波长的变化以及光谱分辨测量的使用使我们能够研究黄色带的起源以及该带的相位和能量弛豫特性。结果表明,黄波段的发光是浅层给体和深层受体的复合,载流子的捕获时间很短。
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引用次数: 0
Towards a compact model for Schottky-barrier nanotube FETs 肖特基势垒纳米管场效应管的紧凑模型
L. C. Castro, D. L. John, D. Pulfrey
Issues pertinent to the development of a compact model for predicting the drain current-voltage characteristics of coaxial-geometry, Schottky-barrier, carbon-nanotube field-effect transistors are discussed. Information on the non-equilibrium barrier shapes at the source-tube and drain-tube contacts is inferred from exact 2-D solutions to Poisson's equation at equilibrium and Laplace's equation. This information is then used in a non-equilibrium flux approach to create a model that accounts for tunneling through both barriers and computes the drain current in the case of ballistic transport. For (16,0) tubes and a gate/tube-radius ratio of 10, saturation drain currents of about 1 /spl mu/m are predicted.
讨论了用于预测同轴几何、肖特基势垒、碳纳米管场效应晶体管漏极电流-电压特性的紧凑模型的相关问题。源管和漏管接触处的非平衡势垒形状信息是从泊松方程和拉普拉斯方程的精确二维解中推断出来的。然后将这些信息用于非平衡通量方法,以创建一个模型,该模型考虑了穿过两个障碍的隧道,并计算了弹道输运情况下的漏极电流。对于(16,0)个管,栅极/管半径比为10时,预计饱和漏极电流约为1 /spl mu/m。
{"title":"Towards a compact model for Schottky-barrier nanotube FETs","authors":"L. C. Castro, D. L. John, D. Pulfrey","doi":"10.1109/COMMAD.2002.1237251","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237251","url":null,"abstract":"Issues pertinent to the development of a compact model for predicting the drain current-voltage characteristics of coaxial-geometry, Schottky-barrier, carbon-nanotube field-effect transistors are discussed. Information on the non-equilibrium barrier shapes at the source-tube and drain-tube contacts is inferred from exact 2-D solutions to Poisson's equation at equilibrium and Laplace's equation. This information is then used in a non-equilibrium flux approach to create a model that accounts for tunneling through both barriers and computes the drain current in the case of ballistic transport. For (16,0) tubes and a gate/tube-radius ratio of 10, saturation drain currents of about 1 /spl mu/m are predicted.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116645679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
X-ray photoelectron spectroscopy of Al/sub x/Ga/sub 1-x/Sb grown by metalorganic chemical vapour deposition 金属有机化学气相沉积Al/sub -x/ Ga/sub - 1-x/Sb的x射线光电子能谱
A. H. Ramelan, K. Butcher, E. Goldys
The extent of oxidation and growth derived oxygen contamination for Al/sub 0.05/Ga/sub 0.95/Sb grown by metalorganic chemical vapour deposition (MOCVD) were systematically investigated by X-ray photoelectron spectroscopy (XPS) using a system with high-energy resolution. The Sb3d/sub 5/2/ and O1s peaks are well resolved and the Ga3d peaks are also well resolved. As expected, all samples investigated show oxide layers (Al/sub 2/O/sub 3/, Sb/sub 2/O/sub 2/ and Ga/sub 2/O/sub 5/) on their surfaces. In particular the percentage of aluminium-oxide was very high compared with a small percentage of AlSb. This indicates that the surface aluminium is very reactive to oxygen from the environment. Carbon content on the surface was also very high. Deeper into the layer, the carbon signal was below the detection limit of XPS and secondary ion mass spectroscopy (SIMS) indicating that the carbon was due to atmospheric exposure. The results indicate extremely low carbon content for Al/sub 0.05/Ga/sub 0.95/Sb epilayers grown using TMAl, TMGa and TMSb as metalorganic precursors in an MOCVD system.
采用高能分辨x射线光电子能谱(XPS)系统研究了金属有机化学气相沉积(MOCVD)生长的Al/sub 0.05/Ga/sub 0.95/Sb的氧化和生长源氧污染程度。Sb3d/sub 5/2/和O1s峰被很好地分辨,Ga3d峰也被很好地分辨。正如预期的那样,所有样品的表面都显示出氧化层(Al/sub 2/O/sub 3/, Sb/sub 2/O/sub 2/和Ga/sub 2/O/sub 5/)。特别是氧化铝的百分比非常高,而AlSb的百分比很小。这表明铝的表面对环境中的氧很敏感。地表碳含量也很高。深入地层,碳信号低于XPS和次级离子质谱(SIMS)的检测限,表明碳是由于大气暴露造成的。结果表明,在MOCVD体系中,以TMAl、TMGa和TMSb为金属有机前驱体生长的Al/sub 0.05/Ga/sub 0.95/Sb薄膜的碳含量极低。
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引用次数: 0
Properties of Ga-Zn based mixed oxides for gas sensing applications 气敏应用中Ga-Zn基混合氧化物的性质
A. Trinchi, K. Galatsis, Y.X. Li, W. Wlodarski, S. Russo, J. du Plesis, B. Rout
Gallium-Zinc mixed metal oxides have been fabricated by the sol-gel process and tested towards oxygen gas. These films were deposited on alumina transducers with interdigital electrodes for gas sensing measurements and on single crystal silicon substrates for microcharacterization. X-ray Photoelectron Spectroscopy (XPS) and Rutherford Backscattering Spectrometry (RBS) showed that the actual concentrations in Ga-Zn oxide thin films differ from the nominal values in the prepared solutions as a function of annealing temperature. Furthermore, the concentration of Zn decreases with a rise of sample annealing temperature. It was found that by increasing the amount of Zn in the sensor film, the operating temperature decreased as well as the base resistance.
采用溶胶-凝胶法制备了镓锌混合金属氧化物,并在氧气环境下进行了测试。这些薄膜沉积在带有数字间电极的氧化铝换能器上用于气敏测量,并沉积在单晶硅衬底上用于微表征。x射线光电子能谱(XPS)和卢瑟福后向散射光谱(RBS)结果表明,在制备的溶液中,Ga-Zn氧化物薄膜中的实际浓度随退火温度的变化而不同于标称值。Zn的浓度随退火温度的升高而降低。结果表明,随着传感器膜中Zn含量的增加,工作温度降低,基极电阻降低。
{"title":"Properties of Ga-Zn based mixed oxides for gas sensing applications","authors":"A. Trinchi, K. Galatsis, Y.X. Li, W. Wlodarski, S. Russo, J. du Plesis, B. Rout","doi":"10.1109/COMMAD.2002.1237233","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237233","url":null,"abstract":"Gallium-Zinc mixed metal oxides have been fabricated by the sol-gel process and tested towards oxygen gas. These films were deposited on alumina transducers with interdigital electrodes for gas sensing measurements and on single crystal silicon substrates for microcharacterization. X-ray Photoelectron Spectroscopy (XPS) and Rutherford Backscattering Spectrometry (RBS) showed that the actual concentrations in Ga-Zn oxide thin films differ from the nominal values in the prepared solutions as a function of annealing temperature. Furthermore, the concentration of Zn decreases with a rise of sample annealing temperature. It was found that by increasing the amount of Zn in the sensor film, the operating temperature decreased as well as the base resistance.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126771177","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Self-consistent solution of 2D-Poisson and Schrodinger wave equation for nano-metric MOSFET modeling for VLSI/ULSI purposes 用于VLSI/ULSI的纳米MOSFET建模的二维泊松和薛定谔波方程的自洽解
S. Dasgupta, D. Jain
A numerical solution of two-dimensional Poisson's equation and Schrodinger wave equation of a deep sub-micron and nano-meter MOSFET has been obtained to gather information about the charge and the potential distribution in the depletion region. The quantum as well as classical charge has been computed. The quantum charge is a direct function of Density of States (DOS). The classical charge can be found out by simply solving the two-dimensional Poisson equation under specific boundary conditions governed by the physics of the device. The channel voltage profile has also been presented. It is seen that the classical model underestimates the channel voltage and the longitudinal electric field in the channel as compared to that obtained through Quantum Mechanical (QM) approach.
得到了深亚微米和纳米MOSFET二维泊松方程和薛定谔波动方程的数值解,得到了耗尽区电荷和电位分布的信息。计算了量子电荷和经典电荷。量子电荷是态密度(DOS)的直接函数。经典电荷可以通过在特定的边界条件下简单地求解二维泊松方程得到。并给出了通道电压分布图。可以看出,与量子力学(QM)方法相比,经典模型低估了通道电压和通道中的纵向电场。
{"title":"Self-consistent solution of 2D-Poisson and Schrodinger wave equation for nano-metric MOSFET modeling for VLSI/ULSI purposes","authors":"S. Dasgupta, D. Jain","doi":"10.1109/COMMAD.2002.1237269","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237269","url":null,"abstract":"A numerical solution of two-dimensional Poisson's equation and Schrodinger wave equation of a deep sub-micron and nano-meter MOSFET has been obtained to gather information about the charge and the potential distribution in the depletion region. The quantum as well as classical charge has been computed. The quantum charge is a direct function of Density of States (DOS). The classical charge can be found out by simply solving the two-dimensional Poisson equation under specific boundary conditions governed by the physics of the device. The channel voltage profile has also been presented. It is seen that the classical model underestimates the channel voltage and the longitudinal electric field in the channel as compared to that obtained through Quantum Mechanical (QM) approach.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131202407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A new InGap/AlGaAs/GaAs composite-emitter heterojunction bipolar transistors 一种新型InGap/AlGaAs/GaAs复合发射极异质结双极晶体管
M. Tsai, Y. Wu, S. Tan, M. Chu, W.T. Chen, Y. Yang, W. Lour
This paper reported a new composite-emitter heterojunction bipolar transistor (CEHBT) with a composite emitter formed of a 0.04 /spl mu/m In/sub 0.5/Ga/sub 0.5/P bulk layer and a 0.06 /spl mu/m Al/sub 0.45/Ga/sub 0.55/As/GaAs digital graded superlattice (DGSL) layer. The CEHBT's exhibit a small collector-emitter offset voltage of 55 mV and a base-emitter turn-on voltage of 0.87 V, which is 0.4 V lower than that of 1.27 V of the InGaP/AlGaAs abrupt-emitter HBT. It is found that CEHBTs exhibits a current gain as high as 250 and is even enhanced to 385 when only a DGSL layer is used for passivation layer.
本文报道了一种新型复合发射极异质结双极晶体管(CEHBT),其复合发射极由0.04 /spl μ m In/sub 0.5/Ga/sub 0.5/P本体层和0.06 /spl μ l Al/sub 0.45/Ga/sub 0.55/As/GaAs数字渐变超晶格(DGSL)层构成。CEHBT的集电极-发射极偏置电压为55 mV,基极-发射极导通电压为0.87 V,比InGaP/AlGaAs突发发射极HBT的1.27 V低0.4 V。研究发现,仅使用DGSL层作为钝化层时,CEHBTs的电流增益高达250,甚至可以提高到385。
{"title":"A new InGap/AlGaAs/GaAs composite-emitter heterojunction bipolar transistors","authors":"M. Tsai, Y. Wu, S. Tan, M. Chu, W.T. Chen, Y. Yang, W. Lour","doi":"10.1109/COMMAD.2002.1237272","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237272","url":null,"abstract":"This paper reported a new composite-emitter heterojunction bipolar transistor (CEHBT) with a composite emitter formed of a 0.04 /spl mu/m In/sub 0.5/Ga/sub 0.5/P bulk layer and a 0.06 /spl mu/m Al/sub 0.45/Ga/sub 0.55/As/GaAs digital graded superlattice (DGSL) layer. The CEHBT's exhibit a small collector-emitter offset voltage of 55 mV and a base-emitter turn-on voltage of 0.87 V, which is 0.4 V lower than that of 1.27 V of the InGaP/AlGaAs abrupt-emitter HBT. It is found that CEHBTs exhibits a current gain as high as 250 and is even enhanced to 385 when only a DGSL layer is used for passivation layer.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"37 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131353660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)
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