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2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)最新文献

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Performance of InGaP/InGaAs/GaAs camel-gate single /spl delta/-doping pHEMT InGaP/InGaAs/GaAs骆驼栅单/spl δ /掺杂pHEMT的性能
J. Tsai
A newly designed single delta-doped InGaP/InGaAs/GaAs pseudomorphic HEMT with n/sup +/-GaAs/p/sup +/-InGaP/n-InGaP camel gate structure has been first fabricated and demonstrated. For a 1/spl times/100 /spl mu/m/sup 2/ device, the experimental results show an extrinsic transconductance of 85 mS/mm and a saturation current density of 425 mA/mm. Significantly, due to the p-n depletion from p/sup +/-InGaP gate to channel region and the presence of /spl Delta/Ec at InGaP/InGaAs heterostructure, the turn-on voltage of gate is larger than 1.7 V. In addition, an extremely broad gate voltage swing larger than 3 V with above 80% maximum g/sub m/ is obtained. The unit current cutoff frequency f/sub T/ and maximum oscillation frequency f/sub max/ are up to 18 and 30 GHz, respectively.
本文首次制备了一种具有n/sup +/-GaAs/p/sup +/-InGaP/n-InGaP驼峰栅结构的单δ掺杂InGaP/InGaAs/GaAs伪晶HEMT。对于1/spl倍/100 /spl μ /m/sup 2/的器件,实验结果表明,外在跨导为85 mS/mm,饱和电流密度为425 mA/mm。值得注意的是,由于p/sup +/-InGaP栅极到沟道区域的p-n耗尽以及InGaP/InGaAs异质结构中存在/spl δ /Ec,栅极的导通电压大于1.7 V。此外,还获得了大于3v的极宽栅极电压摆幅,最大g/sub /大于80%。单位电流截止频率f/sub T/和最大振荡频率f/sub max/分别高达18 GHz和30 GHz。
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引用次数: 0
Optical study of electronic states in GaAsN GaAsN中电子态的光学研究
X.D. Luo, C. Yang, J. Huang, Z. Xu, J. Liu, W. Ge, Y. Zhang, A. Mascarenhas, H. Xin, C. Tu
GaAs/sub 1-x/N/sub x/ alloys with small N composition (x<1%) and GaAsN/GaAs quantum wells (QWs) were studied by continuous wave photoluminescence (PL), pulse wave excitation PL and time-resolved PL. In the PL spectra an extra transition located at the higher energy side of the commonly reported N-related emissions was observed. By measuring the PL dependence on temperature and excitation power, the new PL peak was identified as a transition of alloy band edge-related recombination in GaAsN and delocalized transition in QWs. The PL dynamics further confirms its intrinsic nature of band edge states rather than N-related bound states.
通过连续波光致发光(PL)、脉冲波激发PL和时间分辨PL研究了具有小N成分(x<1%)的GaAs/sub - 1-x/N/sub -x/合金和GaAsN/GaAs量子阱(QWs)。在PL光谱中,在通常报道的N相关发射的高能量侧观察到额外的跃迁。通过测量PL对温度和激发功率的依赖性,确定了新的PL峰是GaAsN中合金带边相关重组和QWs中离域跃迁的转变。PL动力学进一步证实了其带边态的固有性质,而不是与n相关的束缚态。
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引用次数: 0
Investigation of gas sensors for cabin air quality monitoring 舱内空气质量监测用气体传感器的研究
K. Galatsis, W. Wlodarski, K. Kalantar-zadeh, A. Trinchi
Car cabin air quality monitoring can effectively be analysed using metal oxide semiconducting (MOS) gas sensors. In this paper, commercially available gas sensors are compared with fabricated MoO/sub 3/-TiO/sub 2/ and MoO/sub 3/- WO/sub 3/ thin films. The laboratory tests showed that the MoO/sub 3/ based sensors possessed comparable gas sensing properties. The MoO/sub 3/(75%)-TiO/sub 2/(25%) sensor has a response 74% higher relative to the best commercial sensor tested.
使用金属氧化物半导体(MOS)气体传感器可以有效地分析汽车舱内空气质量监测。本文将市售气体传感器与制备的MoO/sub 3/- tio /sub 2/和MoO/sub 3/- WO/sub 3/薄膜进行了比较。实验室测试表明,基于MoO/sub - 3/的传感器具有相当的气敏性能。MoO/sub 3/(75%)-TiO/sub 2/(25%)传感器的响应比测试的最佳商用传感器高74%。
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引用次数: 5
Ballistic transport in nanostructures used for novel THz emitters 用于新型太赫兹发射器的纳米结构中的弹道输运
G. Dohler, M. Eckardt, A. Schwanhauber, F. Renner, L. Robledo, A. Friedrich, P. Pohl, S. Malzer, P. Kiesel, D. Driscoll, M. Hanson, A. Gossard
We report on a novel concept for THz-photomixers with strongly increased conversion efficiency. In the familiar THz photomixers, based on photoconductivity in "Low-temperature-grown-GaAs" (LT-GaAs) the performance depends critically on an extremely short lifetime of photo-generated charge carriers in LT-GaAs and is typically limited by the (very low) photoconductive gain. In our photomixer the gain does not depend on the recombination lifetime but only on the transit time and on the path length of the photo-generated electrons within suitably designed p-i-n /spl I.bar/ nanostructures, which both can be optimized if the transport is (primarily) ballistic. In addition, impedance matching to the attached antenna can be achieved.
我们报告了一种新的太赫兹光电混合器的概念,其转换效率大大提高。在我们熟悉的太赫兹光电混合器中,基于“低温生长的砷化镓”(LT-GaAs)的光电性,其性能主要取决于LT-GaAs中光生成电荷载流子的极短寿命,并且通常受到(非常低的)光电性增益的限制。在我们的光电混合器中,增益不依赖于复合寿命,而只依赖于光生电子在适当设计的p-i-n /spl I.bar/纳米结构中的传输时间和路径长度,如果传输(主要)是弹道传输,则两者都可以优化。此外,还可以实现与所附天线的阻抗匹配。
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引用次数: 0
Bulk and surface textured MoS/sub 2/ films on GaAs GaAs上的大块和表面织构MoS/ sub2 /薄膜
G. Jakovidis, I. Jamieson, K. Pavlov, A. Singh
Highly oriented MoS/sub 2/ films on GaAs, suitable for photovoltaic applications, have been obtained using radio frequency (RF)-sputtering. Depositions at 800/spl deg/C exhibit strong [00l] X-ray reflections, indicative of bulk type II texture. Atomic force microscopy (AFM) reveals the orientation of surface platelets for films grown at 800/spl deg/C and 80/spl deg/C, to be consistent with the X-ray data. This study demonstrates that provided the RF-power is kept low (50 W) and the temperature high, well textured type II films up to 500 nm can be deposited, without the need to resort to expensive vapor transport techniques.
采用射频溅射技术,在GaAs表面制备了适合光伏应用的高取向MoS/sub /薄膜。800/spl℃下的沉积表现出强烈的[00l] x射线反射,表明其为II型体织构。原子力显微镜(AFM)揭示了在800和80℃下生长的薄膜表面血小板的取向,与x射线数据一致。该研究表明,只要保持较低的射频功率(50 W)和较高的温度,就可以沉积出质地良好的II型薄膜,厚度可达500 nm,而无需采用昂贵的蒸汽传输技术。
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引用次数: 2
Computation of the modal reflectivity for a partially etched mirror: application for integration of a laser diode and a waveguide 部分蚀刻镜面模态反射率的计算:在激光二极管和波导集成中的应用
M. Buda, C. Jagadish
The purpose of this paper is to investigate a technique to theoretically compute the modal reflectivity of a lasing mode at a partially etched mirror. The research also aims to apply the result to a practical case of integration between a laser diode and a waveguide using the feedback from a partially etched mirror.
本文的目的是研究一种理论上计算部分蚀刻镜面处激光模态反射率的方法。该研究还旨在将结果应用于一个实际案例,即利用部分蚀刻镜的反馈将激光二极管和波导集成。
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引用次数: 0
Variable MEMS-based inductors fabricated from PECVD silicon nitride 由PECVD氮化硅制成的可变mems电感
J. Dell, K. Winchester, C. Musca, J. Antoszewski, L. Faraone
This paper presents the implementation of inductors for on-chip integration with RF electronics. The inductors were fabricated using silicon bulk micromachining to form a micro-electro-mechanical system (MEMS) that is free from eddy-current losses found in spiral inductors formed using conventional silicon processing. By using the fabrication approach developed here, the resulting inductors are electrically tunable with the application of low DC bias voltages.
本文介绍了用于射频电子器件片上集成的电感器的实现。电感器采用硅体微加工制造,形成微机电系统(MEMS),避免了传统硅加工螺旋电感器的涡流损耗。通过使用这里开发的制造方法,所得到的电感可以在低直流偏置电压下进行电调谐。
{"title":"Variable MEMS-based inductors fabricated from PECVD silicon nitride","authors":"J. Dell, K. Winchester, C. Musca, J. Antoszewski, L. Faraone","doi":"10.1109/COMMAD.2002.1237315","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237315","url":null,"abstract":"This paper presents the implementation of inductors for on-chip integration with RF electronics. The inductors were fabricated using silicon bulk micromachining to form a micro-electro-mechanical system (MEMS) that is free from eddy-current losses found in spiral inductors formed using conventional silicon processing. By using the fabrication approach developed here, the resulting inductors are electrically tunable with the application of low DC bias voltages.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"176 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121259661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Porous silicon: A photonic material for all seasons 多孔硅:一种适用于所有季节的光子材料
P. Reece, G. Lerondel, W. Zheng, A. Bruyant, M. Gal
Porous silicon has a number of demonstrated optical properties that are ideal for a broad range of applications in photonics and optoelectronics research. Technologies based on the tunability of the optical properties of porous silicon such as the refractive index and the ability to grow monolithic multi-layered structures has emerged as new focus of research. In this paper we report on developments relating to porous silicon based microcavities and Bragg reflectors, which have significant implications for a diverse range of applications. Fabrication of a one-dimensional photonic crystal with photonic band-gap is demonstrated. We have also fabricated microcavity structures that exhibit cavity resonances with sub-nanometer line-widths and very high Q-factors (> 7300). Such structures could be useful as both passive and active devices such as narrow bandpass filters and environmental sensors.
多孔硅具有许多已证明的光学特性,是光子学和光电子学研究中广泛应用的理想材料。基于多孔硅折射率等光学特性的可调性和单片多层结构的生长能力的技术已成为新的研究热点。在本文中,我们报告了有关多孔硅基微腔和布拉格反射器的发展,这对各种应用具有重要意义。介绍了一种具有光子带隙的一维光子晶体。我们还制作了具有亚纳米线宽和非常高q因子(> 7300)的腔共振的微腔结构。这种结构可用于无源和有源器件,如窄带通滤波器和环境传感器。
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引用次数: 1
The study of optical properties of Zn/sub 1-x/MN/sub x/Se thin films grown by MOCVD on GaAs substrates GaAs衬底MOCVD生长Zn/sub - 1-x/MN/sub -x/ Se薄膜的光学性质研究
S. Lu, C. Yang, J. Dai, J.S. Hsuang, W. Ge, Y.Q. Wang, J. Zhang, D. Shen, J. Wang
A series of Zn/sub 1-x/Mn/sub x/Se thin film samples with different Mn compositions were grown by metal-organic chemical vapor deposition. X-ray diffraction measurements indicated the good crystallinity of samples. Two emission peaks were observed in photoluminescence (PL) spectra close to the band edge for the samples. The temperature dependence of PL shows the change of the relative intensity of the two emission peaks, which is attributed to the competition between band-to-band excitonic transitions and transitions of localized excitons bound to Mn-induced impurity bound states. Time-resolved PL measurements and PL under different excitation power also support this analysis. Further investigation implies that the impurity bound states are associated with Mn incorporation.
采用金属有机化学气相沉积法制备了不同Mn组分的Zn/sub - 1-x/Mn/sub -x/ Se薄膜样品。x射线衍射测量表明样品结晶度良好。在接近带边的光致发光(PL)光谱中观察到两个发射峰。PL的温度依赖性显示了两个发射峰的相对强度的变化,这是由于带到带激子跃迁和与mn诱导的杂质结合态结合的局域激子跃迁之间的竞争。时间分辨PL测量和不同激励功率下的PL也支持这一分析。进一步的研究表明杂质束缚态与Mn的掺入有关。
{"title":"The study of optical properties of Zn/sub 1-x/MN/sub x/Se thin films grown by MOCVD on GaAs substrates","authors":"S. Lu, C. Yang, J. Dai, J.S. Hsuang, W. Ge, Y.Q. Wang, J. Zhang, D. Shen, J. Wang","doi":"10.1109/COMMAD.2002.1237311","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237311","url":null,"abstract":"A series of Zn/sub 1-x/Mn/sub x/Se thin film samples with different Mn compositions were grown by metal-organic chemical vapor deposition. X-ray diffraction measurements indicated the good crystallinity of samples. Two emission peaks were observed in photoluminescence (PL) spectra close to the band edge for the samples. The temperature dependence of PL shows the change of the relative intensity of the two emission peaks, which is attributed to the competition between band-to-band excitonic transitions and transitions of localized excitons bound to Mn-induced impurity bound states. Time-resolved PL measurements and PL under different excitation power also support this analysis. Further investigation implies that the impurity bound states are associated with Mn incorporation.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"229 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130881309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bio-optical gas-sensor (sniffer device) with a fiber optic oxygen sensor 生物光学气体传感器(嗅探装置)带有光纤氧传感器
K. Mitsubayashi, Y. Hashimoto, T. Kon
A bio-optical gas-sensor (sniffer device) was constructed by immobilizing flavin-containing monooxygenase 3 (FMO3, one of xenobiotic metabolizing enzymes for catalyzing the oxidation of odorous substances such as trimethylamine: TMA) onto a tip of a fiber optic oxygen sensor with oxygen sensitive ruthenium organic complex (excitation: 470 nm, fluorescent: 600 nm) with a tube-ring. A reaction unit for circulating buffer solution was applied to the tip of the sniffer device. A substrate regeneration cycle was applied to the FMO3 immobilized sensor in order to amplify the output signal by coupling the monooxygenase with a reducing reagent system of ascorbic acid (AsA) in phosphate buffer. The bio-optical sniffer was possible to detect the oxygen consumption induced by FOM3 enzymatic reaction with TMA application. The sniffer device with 10.0 mmol/1 AsA could be used to measure TMA vapor from 0.31 to 125 ppm, this covers the maximum permissible concentration in the work place (5.0 ppm of Time Weighted Average concentration) and the sensing level-5 of smell in humans (3.0 ppm). The sniffer device possessed high selectivity for TMA being attributable to the FMO3 substrate specificity, continuous measurability.
将含黄素单加氧酶3 (FMO3)固定在氧敏钌有机配合物(激发波长470 nm,荧光波长600 nm)的光纤氧传感器顶端,构建了一种生物光学气体传感器(嗅探装置)。在嗅探装置的尖端安装了循环缓冲溶液反应装置。通过将单加氧酶与磷酸缓冲液中的抗坏血酸还原试剂(AsA)耦合,对FMO3固定化传感器进行底物再生循环,以放大输出信号。应用TMA后,生物光学嗅探器可以检测到FOM3酶促反应引起的耗氧量。10.0 mmol/1 AsA的嗅探装置可用于测量0.31至125 ppm的TMA蒸气,这涵盖了工作场所的最大允许浓度(时间加权平均浓度5.0 ppm)和人类嗅觉5级(3.0 ppm)。该嗅探装置具有FMO3底物特异性和连续可测性,对TMA具有较高的选择性。
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引用次数: 1
期刊
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)
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