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A Wideband Dual-Polarized Antenna-in-Package for 5G Millimeter-Wave User Equipment 用于 5G 毫米波用户设备的宽带双极化封装天线
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-22 DOI: 10.1109/TCPMT.2024.3447650
Xinyu Zhang;Jun Li;Chenglin Yang;Tiancheng Liang;Wenwen Zhang;Yang Yang
This article presents a broadband dual-polarization antenna-in-package (AiP) design for 5G millimeter-wave user equipment. The magnetoelectric (ME) antenna is adopted to achieve dual polarization and broadband. We introduce a tapered feeding probe to enhance the antenna’s dual-polarization isolation and optimize the impedance matching between the feeding network and the radiating patch to achieve high gain throughout the entire operating bandwidth. Based on the antenna element, we design a $1times 4$ antenna array with the dimensions of $20times 5times 1.1$ mm3. The impedance bandwidth of both polarizations of the array falls within 26.8–42.7 GHz, covering the majority of the 5G new radio (NR) bands. The gain range for horizontal polarization within this band is 9.87–12.5 dBi, while that for vertical polarization is 10.67–12.51 dBi. The antenna array can achieve the beam-scanning angles of 50° and 30° in the FR2 n257 and n260 frequency bands, respectively. The AiP is manufactured and tested using the flip-chip ball grid array (FCBGA) process on an organic substrate, with the test results closely aligning with simulation outcomes. The proposed AiP covers 5G millimeter-wave n257, n259, n260, and n261 bands and a significant portion of n258 (24.25–27.5 GHz) while guaranteeing high dual-polarization isolation and considerable gain, thus making it suitable for application in 5G millimeter-wave user equipment.
本文介绍了一种用于 5G 毫米波用户设备的宽带双极化封装天线(AiP)设计。采用磁电(ME)天线实现双极化和宽带。我们引入了锥形馈电探针来增强天线的双极化隔离,并优化了馈电网络和辐射贴片之间的阻抗匹配,从而在整个工作带宽内实现了高增益。在该天线元件的基础上,我们设计了一个 1/times 4$ 的天线阵列,尺寸为 20/times 5/times 1.1$ mm3。阵列两个极化的阻抗带宽都在 26.8-42.7 GHz 范围内,覆盖了 5G 新无线电(NR)的大部分频段。该频段内水平极化的增益范围为 9.87-12.5 dBi,垂直极化的增益范围为 10.67-12.51 dBi。天线阵列在 FR2 n257 和 n260 频段的波束扫描角度分别为 50° 和 30°。该天线阵采用有机基板上的倒装芯片球栅阵列(FCBGA)工艺制造和测试,测试结果与仿真结果非常吻合。所提出的AiP覆盖了5G毫米波n257、n259、n260和n261频段以及n258的大部分频段(24.25-27.5 GHz),同时保证了较高的双极化隔离度和可观的增益,因此适合应用于5G毫米波用户设备。
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引用次数: 0
Integrated Circuit Packaging Defect Analysis and Deep Learning Detection Method 集成电路封装缺陷分析与深度学习检测方法
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-21 DOI: 10.1109/TCPMT.2024.3447040
Fei Liu;Heng Wang;Pingfa Feng;Long Zeng
Defects can be regarded as targets when using a target detection algorithm. Compared with conventional targets, chip defects have distinct characteristics. Their sizes are variable, and most defects are small in size. Defects lack texture features and can be viewed as anomalies relative to the background. Some defects exhibit elongated and strip-like characteristics, making the direct application of existing target detection algorithms less than ideal. In this article, we incorporate these characteristics as prior knowledge in the design and improvement of the target detection network structure. We propose a deep learning detection network, you only look once—with defect attention (YOLO-WDA), specifically tailored for chip defect data, using three targeted improvement methods. An anomaly attention mechanism (AAM) highlights defect features by contrasting information with normal chips. An improved module for small target defects uses the focus operation to retain more fine-grained information, combined with ghost convolution to adjust the channel redundancy and reduce network parameters. An Ameba convolution detection (AMBC-Detect) head can better capture continuous features such as curves. In experiments conducted on two chip datasets, YOLO-WDA achieved mean of average precision (mAP) scores of 65.5 and 43.2, outperforming the benchmark model, YOLOv8, by 2.7 and 4.8, respectively. Our model also outperforms other classical algorithms. Datasets are available at: https://pan.baidu.com/s/1vU3hkPUYSrzVHDKgGgt1MA?pwd=1 yja
在使用目标检测算法时,缺陷可被视为目标。与传统目标相比,芯片缺陷具有明显的特征。它们的尺寸是可变的,大多数缺陷尺寸较小。缺陷缺乏纹理特征,可视为相对于背景的异常。有些缺陷表现出拉长和条状特征,因此直接应用现有的目标检测算法并不理想。在本文中,我们将这些特征作为先验知识纳入目标检测网络结构的设计和改进中。我们提出了一种专为芯片缺陷数据定制的深度学习检测网络--"你只看一次--缺陷关注(YOLO-WDA)",并采用了三种有针对性的改进方法。异常关注机制(AAM)通过与正常芯片的信息对比来突出缺陷特征。针对小目标缺陷的改进模块利用聚焦操作保留更多细粒度信息,并结合幽灵卷积调整通道冗余和降低网络参数。阿米巴卷积检测(AMBC-Detect)头能更好地捕捉曲线等连续特征。在两个芯片数据集上进行的实验中,YOLO-WDA 的平均精度 (mAP) 分别达到 65.5 和 43.2,比基准模型 YOLOv8 分别高出 2.7 和 4.8。我们的模型还优于其他经典算法。数据集可从以下网址获取: https://pan.baidu.com/s/1vU3hkPUYSrzVHDKgGgt1MA?pwd=1 yja
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引用次数: 0
Advanced Packaging Technology of GaN HEMT Module for High-Power and High-Frequency Applications: A Review 用于大功率和高频应用的 GaN HEMT 模块的先进封装技术:综述
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-21 DOI: 10.1109/TCPMT.2024.3447079
Meiyu Wang;Peng Gao;Fangmin Shi;Weibo Hu;Xudong Wang;Haidong Yan;Yunhui Mei
The gallium-nitride (GaN) high-electron-mobility transistors (HEMT) devices have great potential for high-power, high-temperature, and high-frequency applications. However, it is challenging to package GaN HEMT power module with both low parasitic inductance and thermal resistance because the lateral GaN HEMT devices have fast switching speed, high heat flux density, and small die size. This article made a comprehensive review on the state-of-the-art packaging technologies of GaN HEMT power modules based on different substrate integration structures, including printed circuit board (PCB) surface mounting, wire-bonded flip chip, PCB-embedded, ceramic-substrate integrated, insulated metal substrate (IMS) integrated, and hybrid PCB-on-direct bond copper (DBC) packaging. Each technology has a tradeoff among parasitic inductance, thermal performance, and manufacturability. Innovations are still necessary for packaging GaN HEMT modules for their applications in high-frequency and high-power-density converters.
氮化镓(GaN)高电子迁移率晶体管(HEMT)器件在大功率、高温和高频应用方面具有巨大潜力。然而,由于侧向 GaN HEMT 器件具有开关速度快、热通量密度高和芯片尺寸小等特点,因此封装具有低寄生电感和热阻的 GaN HEMT 功率模块是一项挑战。本文全面综述了基于不同基板集成结构的 GaN HEMT 功率模块的最新封装技术,包括印刷电路板(PCB)表面贴装、线键合倒装芯片、PCB 嵌入、陶瓷基板集成、绝缘金属基板(IMS)集成以及 PCB 直接键合铜(DBC)混合封装。每种技术都需要在寄生电感、热性能和可制造性之间进行权衡。为了将 GaN HEMT 模块应用于高频和高功率密度转换器,封装技术仍需创新。
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引用次数: 0
Spectrum Splitting-Based Performance of Combined Photovoltaic Thermoelectric Generator System 基于分光的光伏热电联合发电机性能
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-21 DOI: 10.1109/TCPMT.2024.3446590
Ahmed Issa Alnahhal;Balázs Plesz
This article demonstrates the effect of spectrum splitting of the solar spectrum on the output performance of the combined system for low concentration levels. The full spectrum has been split into two parts, the postbandgap spectrum (PBS) with a range of 1100–4000 nm is transferred to the thermoelectric device, and the within-bandgap spectrum with a range of 350–1100 nm is further split into two smaller partitions and divided between the solar cell and thermoelectric generator (TEG). The calculations were performed for 15 configurations, where the splitting wavelength was increased in steps of 50 nm. The results showed that splitting the spectrum decreases the thermal load of the solar cell reducing its temperature, while the TEG device can compensate for the decrease of the solar cell power caused by the reduction of the spectral range transferred to the solar cell. At higher solar concentration levels, the optimal splitting wavelength increases, meaning that the optimal spectral distribution between TEG and photovoltaic (PV) is shifted toward the TEG device as light concentration levels and power densities increase. It was also verified that with increasing light concentration the spectrum-splitting combined system shows a growing efficiency advantage compared with standalone PV cells. This is explained on one hand by the temperature reduction of the PV cells, and on the other by the higher power contribution of the TEG device.
本文展示了太阳光谱的频谱分割对低浓度组合系统输出性能的影响。全光谱被分割成两部分,波长范围为 1100-4000 nm 的后带隙光谱 (PBS) 被传输到热电设备,波长范围为 350-1100 nm 的带隙内光谱被进一步分割成两个较小的部分,并在太阳能电池和热电发生器 (TEG) 之间进行分配。计算针对 15 种配置进行,其中分割波长以 50 nm 为单位递增。结果表明,分割光谱可以减少太阳能电池的热负荷,降低其温度,而 TEG 设备则可以补偿由于传输到太阳能电池的光谱范围减少而导致的太阳能电池功率下降。在较高的太阳光浓度水平下,最佳分光波长会增加,这意味着随着光浓度水平和功率密度的增加,TEG 和光伏(PV)之间的最佳光谱分布会向 TEG 设备倾斜。研究还证实,随着光浓度的增加,与独立的光伏电池相比,光谱分离组合系统显示出越来越大的效率优势。这一方面是由于光伏电池的温度降低,另一方面是由于 TEG 设备的功率更高。
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引用次数: 0
Parameter Optimization of Laser Drilling for Through-Glass Vias Based on Deep Learning and Bayesian Algorithm 基于深度学习和贝叶斯算法的玻璃通孔激光钻孔参数优化
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-20 DOI: 10.1109/TCPMT.2024.3446510
Yuhang Ouyang;Dongyang Hou;Ting Lv;Fang Dong;Sheng Liu;Jianhui Zhao
In the semiconductor industry, especially in the manufacturing of through-glass vias (TGVs), there is an increasing need to improve the quality and efficiency of manufacturing processes. To address the challenges such as lack of efficiency, requiring substantial manual labor, and falling short in precision of traditional methods in meeting high standards for TGV manufacturing, the approach that combines deep learning and optimization techniques was introduced to achieve automatic quality assessment and refine laser drilling parameters for TGVs manufacturing. We have developed a residual U-Net model with an accuracy of up to 87.9% by training high-resolution scanning electron microscope (SEM) images of TGVs for automatic assessment of TGVs quality, closely matching the assessments made by human experts. We used Bayesian optimization to iteratively adjust the laser drilling parameters that are crucial for TGVs manufacturing, and the quality scores obtained by the residual U-Net model enhanced by 13.2% after 50 iterations, which confirms the effectiveness of the integration of U-Net architecture with Bayesian optimization in achieving optimal manufacturing results.
在半导体行业,尤其是在玻璃通孔(TGV)的制造过程中,对提高制造过程的质量和效率的需求与日俱增。针对 TGV 制造过程中存在的效率低下、需要大量人工、传统方法精度不高等问题,我们引入了深度学习和优化技术相结合的方法,以实现自动质量评估,并完善 TGV 制造过程中的激光钻孔参数。我们通过训练 TGV 的高分辨率扫描电子显微镜(SEM)图像,开发了一个残差 U-Net 模型,用于自动评估 TGV 的质量,准确率高达 87.9%,与人类专家的评估结果非常接近。我们使用贝叶斯优化方法迭代调整对 TGV 制造至关重要的激光钻孔参数,经过 50 次迭代后,残余 U-Net 模型获得的质量分数提高了 13.2%,这证实了 U-Net 架构与贝叶斯优化方法的整合在实现最佳制造结果方面的有效性。
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引用次数: 0
Transmission Characteristics of Long-Chain Through Silicon Via-Redistribution Layer Interconnects 长链硅通孔 - 再分布层互连的传输特性
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-19 DOI: 10.1109/TCPMT.2024.3445345
Xiaoting Chen;Xiaodong Jian;Hongyue Wang;Xiangjun Lu;Yiming Zhang;Xiangxiang Zhong;Bin Zhou
Current research on the transmission characteristics of through silicon via-redistribution layer (TSV-RDL) interconnects is basically limited to the single-pair interconnect (a device with two TSVs connected by an RDL line is referred to as one-pair), which is obviously insufficient for highly integrated 3-D packaging. Thus, this article aims to simulate the actual long-chain interconnects by establishing an equivalent circuit model of multipair TSV-RDL interconnects in order to explore their transmission characteristics. First, the equivalent circuit model of long-chain ground-signal-ground type (GSG-type) TSV-RDL interconnects is established based on the correlation between single-pair and multipair interconnects. Second, the transmission performance of long-chain interconnects is investigated by analyzing the reasons for the differences in insertion loss of various length test vehicles in the frequency band from 0.01 to 40 GHz. Compared to RDL lines, TSVs have a greater impact on the overall loss. The resistance of interconnects and the capacitance of the insulating layer at low frequency, the capacitance and conductance associated with the conductive substrate in the mid-frequency range, as well as the inductance in the high-frequency region all play pivotal roles in impedance changes in their respective domains. Finally, the above analysis points out the optimization of the long-chain interconnect by increasing its length while avoiding excessive inductance due to RDL lines in order to reduce the use of TSVs and thus improve the overall transmission performance.
目前对硅通孔-再分布层(TSV-RDL)互连传输特性的研究基本上局限于单对互连(由一条 RDL 线路连接两个 TSV 的器件称为一对),这对于高度集成的三维封装来说显然是不够的。因此,本文旨在通过建立多对 TSV-RDL 互连的等效电路模型来模拟实际的长链互连,从而探索其传输特性。首先,基于单对和多对互连的相关性,建立了长链地-信号-地型(GSG 型)TSV-RDL 互连的等效电路模型。其次,通过分析 0.01 至 40 GHz 频段内不同长度测试车辆插入损耗差异的原因,研究了长链互连的传输性能。与 RDL 线路相比,TSV 对总体损耗的影响更大。互连的电阻和绝缘层在低频时的电容、导电基板在中频范围内的电容和电导以及高频区域内的电感都对各自领域内的阻抗变化起着关键作用。最后,上述分析指出了长链互连的优化方法,即增加其长度,同时避免 RDL 线路造成的过大电感,以减少 TSV 的使用,从而提高整体传输性能。
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引用次数: 0
The Transient Thermal Coupling of CBGA Solder Joints in Reflow Soldering: Experimental and Numerical Optimization 回流焊接中 CBGA 焊点的瞬态热耦合:实验与数值优化
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-19 DOI: 10.1109/TCPMT.2024.3445963
Hang-Bo Shi;Wei-Xuan Guo;Min Liu;Kui Li;Yi-Long Chen;Zhi-Xiang Zhang;Tian-Tian Shao
With the rapid advancement of electronic information, electronic components are increasingly trending toward miniaturization and high-density. Reflow soldering has emerged as the predominant method for soldering, but its quality is susceptible to various influencing factors. This study focuses on investigating the reflow soldering process of ceramic ball grid array (CBGA) devices by integrating the Anand constitutive model of solder joints, with the solder joint material being Sn63Pb37. A transient thermodynamic coupling model for the reflow soldering process is established, and the thermal simulation parameters are calibrated through temperature testing. The results indicate that the deviation between simulation and experimental outcomes is below 5%. Furthermore, a comparison of the Anand model and elastic model’s impact on solder joint warping and residual stress reveals that the Anand model yields more precise simulation results. Subsequently, the soldering quality of reflow soldering is analyzed based on Anand model, and the key parameters influencing soldering quality are identified through orthogonal analysis, providing a basis for optimal design. The findings suggest that the temperature of the ninth temperature zone and air supply rate exert the most significant influence on soldering quality. In comparison to the initial temperature curve and the airflow rate, there is a $21~^{circ }$ C increase in peak temperature, a 20-s prolongation of liquid phase time, a reduction of residual stress by 0.15 MPa, and an increase in printed circuit board (PCB) warping by 0.04 mm.
随着电子信息的飞速发展,电子元件越来越趋向于微型化和高密度化。回流焊接已成为最主要的焊接方法,但其质量易受各种因素的影响。本研究通过整合焊点的 Anand 构成模型(焊点材料为 Sn63Pb37),重点研究了陶瓷球栅阵列(CBGA)器件的回流焊接过程。建立了回流焊接过程的瞬态热力学耦合模型,并通过温度测试校准了热模拟参数。结果表明,模拟结果与实验结果之间的偏差低于 5%。此外,通过比较阿南德模型和弹性模型对焊点翘曲和残余应力的影响,发现阿南德模型能得到更精确的模拟结果。随后,基于 Anand 模型分析了回流焊接的焊接质量,并通过正交分析确定了影响焊接质量的关键参数,为优化设计提供了依据。研究结果表明,第九温区的温度和送风率对焊接质量的影响最大。与初始温度曲线和送风速率相比,峰值温度提高了 21~^{circ }$ C,液相时间延长了 20 秒,残余应力降低了 0.15 兆帕,印刷电路板(PCB)翘曲增加了 0.04 毫米。
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引用次数: 0
Enhanced Fabrication and Assembly of 3-D Chiplets Based on Active Interposer With Frontside Via-Last TSVs 基于带前端最后通孔 TSV 的有源互贴器的三维芯片的强化制造与装配
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-16 DOI: 10.1109/TCPMT.2024.3443858
Chengyi Liao;Huimin He;Fengman Liu;Xugang Wang;Rui Cao;Lijun Chen;Cheng Peng;Liqiang Cao;Qingdong Wang
The development of semiconductors, driven by artificial intelligence (AI) and fifth-generation technology (5G) technologies, has posed challenges in advanced packaging. To address these challenges, a 3-D packaging architecture based on active interposers has emerged. This article presents a novel fabrication method of the active interposer with high-aspect-ratio through-silicon vias (TSVs) and a reliable assembly process of 3-D chiplets. The proposed fabrication method of active interposer adopts frontside via-last TSV technology. First, a two-step protection method etching is implemented to address low-dielectric constant (DK) (low-k) material overetching risks. Then, baking at 350 °C after TSV etching is suggested to prevent short circuits. Last, a blade saw followed by laser scribing is proposed to mitigate die chipping during the dicing saw of low-k material. In addition, the 3-D chiplet assembly process is optimized for low thickness, large-area active interposer-to-substrate and high-density-I/O die-to-die bonding. Optimized recipe of thermal compression bonding (TCB), along with solder on pad (SoP), modified under-bump metallization (UBM), and novel flux transfer method, ensures high-quality solder joints without voids or bridging. The validity of the optimized assembly process is confirmed by reliability tests. The successfully integrated 3-D chiplets demonstrate that the fabrication process of the active interposer and the optimized assembly flow can enhance the performance and reliability of 3-D chiplet packaging in various applications.
在人工智能(AI)和第五代技术(5G)的推动下,半导体的发展给先进封装带来了挑战。为了应对这些挑战,一种基于有源插层的三维封装架构应运而生。本文介绍了一种具有高宽比硅通孔(TSV)的新型有源插层制造方法,以及可靠的三维芯片组装工艺。所提出的有源插接器制造方法采用了前侧通孔-最后通孔 TSV 技术。首先,采用两步保护蚀刻法来解决低介电常数(DK)(low-k)材料过蚀刻风险。然后,建议在 TSV 蚀刻后进行 350 °C 烘烤,以防止短路。最后,建议在切割低介电常数(low-k)材料时使用刀片锯和激光划线来减少芯片崩裂。此外,还优化了三维芯片组装工艺,以实现低厚度、大面积的有源插层到基板和高密度 I/O 芯片到芯片的接合。优化的热压焊接 (TCB) 配方以及焊盘焊接 (SoP)、改进的凸块下金属化 (UBM) 和新型助焊剂转移方法,确保了无空隙或桥接的高质量焊点。可靠性测试证实了优化装配工艺的有效性。成功集成的三维芯片表明,有源插层的制造工艺和优化的组装流程可以提高三维芯片封装在各种应用中的性能和可靠性。
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引用次数: 0
Prognostic Monitoring of Power QFN Packages with Silver Sintered Die-Attach Materials 使用银烧结芯片连接材料的功率 QFN 封装的预测性监测
IF 2.2 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-14 DOI: 10.1109/tcpmt.2024.3443530
Henry A. Martin, Dong Hu, Xu Liu, René H. Poelma, Edsger C. P. Smits, Willem D. Van Driel, GuoQi Zhang
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引用次数: 0
The Assembly Investigation of a Multichip to PCB Flip-Chip Package Using Cu Pillar Bumps 使用铜柱凸块的多芯片到 PCB 倒装芯片封装的组装研究
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-14 DOI: 10.1109/TCPMT.2024.3443599
Zhibo Cao;Jens Lehmann;Bruno Heusdens;Emre Can Durmaz;Patrick Krüger;Matthias Wietstruck;Norbert Herfurth;Awwal Adeniyi Adesunkanmi;Corrado Carta;Mehmet Kaynak
This article conducts a comprehensive investigation of the assembly technologies of a Cu pillar-based multichip flip-chip package with low-cost PCB substrates. Such a package is considered as a cost-effective solution for mm-wave broadband applications below 60 GHz. Three main trend flip-chip assembly methods are compared: mass reflow soldering, Cu pillar thermocompression soldering, and Au-Cu thermocompression bonding (TCB). Within these three assembly approaches, both the samples used for assembly and the assembly conditions are systematically compared. Specifically, Cu pillars with and without solder caps, PCB substrates with different solder mask thicknesses, PCB substrates with different glass transition temperatures, and different bonding compression forces are carried out in different assembly approaches. After the assembly, the assembly yield and contact resistance per bump are examined by meander daisy chain resistance measurement and the bonding qualities of both the whole chip and individual bumps are inspected using shear testing and cross sectioning. Findings reveal that reflow soldering offers advantages for high-volume, cost-effective assemblies despite a slightly lower yield, and the Au-Cu TCB exhibits a very high yield with diminished throughput. Whereas, Cu pillar thermocompression soldering does not manifest advantages over the other two approaches. This meticulous investigation enhances the accessibility of the discussed packaging approach, contributing to the groundwork for future technological advancements in this domain.
本文全面研究了基于铜柱的多芯片倒装芯片封装与低成本印刷电路板基板的组装技术。这种封装被视为 60 GHz 以下毫米波宽带应用的高性价比解决方案。比较了三种主要的倒装芯片组装方法:大规模回流焊、铜柱热压焊和金-铜热压焊(TCB)。在这三种组装方法中,对用于组装的样品和组装条件进行了系统比较。具体而言,在不同的组装方法中,使用了带焊帽和不带焊帽的铜柱、不同阻焊层厚度的印刷电路板基板、不同玻璃化转变温度的印刷电路板基板以及不同的粘接压缩力。组装完成后,通过蜿蜒菊花链电阻测量法检测组装良率和每个凸点的接触电阻,并通过剪切测试和横截面检测整个芯片和单个凸点的粘合质量。研究结果表明,尽管回流焊接的成品率略低,但它在大批量、高成本效益组装方面具有优势,而金-铜热压焊板的成品率非常高,但产量却有所降低。而铜柱热压焊与其他两种方法相比并不具有优势。这项细致的研究提高了所讨论的封装方法的可用性,为该领域未来的技术进步奠定了基础。
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引用次数: 0
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IEEE Transactions on Components, Packaging and Manufacturing Technology
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