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Single-Mask Embedded Trace Redistribution Layer Technology Using Grayscale Lithography 基于灰度光刻的单掩模嵌入轨迹重分布层技术
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-18 DOI: 10.1109/TCPMT.2025.3599484
Wonchul Do;Sanghyun Jin;Insoo Choi;Jinho Jeong
This article presents a novel redistribution layer (RDL) technology with embedded trace structures, targeting high-density interconnects for organic interposers and bridge chips in 2.5-D integration. The proposed embedded trace RDL (ETR) adopts grayscale lithography, enabling the simultaneous formation of vias and traces in a single lithography step. This single-mask process reduces manufacturing complexity and cost compared to conventional dual-mask ETR approaches and is compatible with I-line steppers commonly used in advanced packaging. The proposed ETR successfully demonstrates four-stacked vias with a minimum diameter of $1.5~mu $ m and traces with 2/ $1~mu $ m line/space, validating its capability for fine-pitch, multilayer interconnects. Trace width and dielectric thickness variations were within 7.5% and 2.9% of the median, respectively, and critical dimension uniformity was within 5%. Dense traces between two vias were fabricated and compared with conventional semi-additive process (SAP)-based RDL, confirming that the pad-less vias in the proposed ETR enhance interconnection density. Furthermore, the rounded-edge traces, a distinctive feature of the ETR, reduce conductor loss by mitigating current crowding, leading to improved signal transmission bandwidth. Together, these effects increase bandwidth density, making the proposed ETR highly suitable for advanced high-speed, high-density interconnect applications. Finally, to the best of our knowledge, electromigration (EM) testing was conducted on the ETR structure for the first time, demonstrating a $34.2times $ improvement in mean time-to-failure (MTTF) over SAP-based RDL.
本文针对2.5维集成中有机中间体和桥接芯片的高密度互连,提出了一种具有嵌入式迹线结构的重分布层(RDL)技术。所提出的嵌入式走线RDL (ETR)采用灰度光刻技术,可以在一个光刻步骤中同时形成过孔和走线。与传统的双掩膜ETR方法相比,这种单掩膜工艺降低了制造复杂性和成本,并与先进封装中常用的i线步进器兼容。所提出的ETR成功地展示了最小直径为1.5~ $ $ $ m的四层通孔和2/ $ $1~ $ $ $ m线/空间的走线,验证了其用于细间距多层互连的能力。示踪宽度和介电厚度变化分别在中位数的7.5%和2.9%以内,临界尺寸均匀性在5%以内。制作了两个过孔之间的密集迹线,并与传统的半增材工艺(SAP) RDL进行了比较,证实了所提出的ETR中的无衬垫过孔提高了互连密度。此外,ETR的一个显著特征是圆边走线,通过减轻电流拥挤来减少导体损耗,从而提高信号传输带宽。总之,这些效应增加了带宽密度,使所提出的ETR非常适合先进的高速、高密度互连应用。最后,据我们所知,首次对ETR结构进行了电迁移(EM)测试,结果表明,与基于sap的RDL相比,平均故障时间(MTTF)提高了34.2倍。
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引用次数: 0
Stable HIPPO-Based Circuit Macro-Modeling 基于稳定hippo的电路宏观建模
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-11 DOI: 10.1109/TCPMT.2025.3597811
Bijan Shahriari;Roni Khazaka
Behavioral modeling of analog circuits is an important step of the integrated circuit design flow. Indeed, closed-box behavior modeling allows users to replicate the behavior of circuit elements and devices without explicitly knowing the inner workings of the device. Prior works have automated the generation of behavioral models using machine learning (ML) at both the device and circuit level. More specifically, a recent work has used high-order polynomial projection operators (HIPPOs) to augment gated recurrent unit (GRU)-based macro-models. This new HIPPO-based model has been shown to outperform state-of-the-art GRU-based circuit macro-models. In this article, we introduce a new type of modified recurrent neural network (RNN) circuit macro-model that uses the HIPPO framework, called HIPPO-RNN. Additionally, we present a modified HIPPO-RNN (stable-HIPPO-RNN) model that is more suitable for enforcing input-to-state stability (ISS), and derive corresponding stability constraints. These constraints effectively guarantee ISS stability of the macro-model during transient simulation. We show the validity and superior performance of our macro-models on two circuit modeling examples.
模拟电路的行为建模是集成电路设计流程中的一个重要步骤。事实上,闭盒行为建模允许用户在不明确知道设备内部工作原理的情况下复制电路元件和设备的行为。先前的工作已经在设备和电路级别使用机器学习(ML)自动生成行为模型。更具体地说,最近的一项工作使用高阶多项式投影算子(hippo)来增强基于门控循环单元(GRU)的宏观模型。这种新的基于hippo的模型已被证明优于最先进的基于gru的电路宏观模型。在本文中,我们介绍了一种使用HIPPO框架的新型改进循环神经网络(RNN)电路宏模型,称为HIPPO-RNN。此外,我们提出了一个改进的希波- rnn (stable-希波- rnn)模型,该模型更适合于执行输入到状态稳定性(ISS),并推导了相应的稳定性约束。这些约束有效地保证了暂态仿真过程中宏观模型的ISS稳定性。通过两个电路建模实例,验证了宏观模型的有效性和优越的性能。
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引用次数: 0
On the Generation of SPICE-Compatible Nonlinear Behavioral Macromodels spice -兼容非线性行为宏模型的生成
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-11 DOI: 10.1109/TCPMT.2025.3597771
Antonio Carlucci;Ion Victor Gosea;Stefano Grivet-Talocia
This article presents a complete framework for the generation of behavioral macromodels of a wide class of nonlinear components, devices, and systems. The model structure and related identification algorithms are based on the Volterra series formulated in the frequency domain through multivariate generalized transfer functions (GTFs). A multivariate rational model is first estimated in pole-residue form from sampled responses and then converted to a bilinear state-space form. The main novel contribution of this work is the SPICE-compatible circuit synthesis, which enables the usage of nonlinear macromodels within circuit simulation environments as part of more complex system-level simulations. Examples are provided for a low dropout voltage regulator and a system-level power distribution network embedding integrated regulators. For such examples, the proposed SPICE equivalents offer speedup factors ranging from $12times $ up to $650times $ with negligible loss in accuracy.
本文提出了一个完整的框架,用于生成广泛的非线性组件、设备和系统的行为宏模型。模型结构和相关的识别算法是基于通过多元广义传递函数(GTFs)在频域形成的Volterra级数。首先从抽样响应中估计出极点残差形式的多元理性模型,然后将其转换为双线性状态空间形式。这项工作的主要新颖贡献是spice兼容电路合成,它可以在电路仿真环境中使用非线性宏模型作为更复杂的系统级仿真的一部分。提供了低差电压调节器和嵌入集成调节器的系统级配电网的实例。对于这样的例子,提出的SPICE等价物提供的加速因子从12美元到650美元不等,精度损失可以忽略不计。
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引用次数: 0
Relational SI/PI-Database for a Data-Driven Approach to PCB Design Automation and Performance Prediction 关系型SI/ pi数据库用于PCB设计自动化和性能预测的数据驱动方法
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-11 DOI: 10.1109/TCPMT.2025.3597840
Til Hillebrecht;Tommy Weber;Johannes Alfert;Christian Schuster
The introduction of machine learning (ML) methods into the design process of printed circuit boards (PCBs) drives the need for large quantities of readily available data. This article addresses the problems of engineers to find ML-ready data that can be easily reused and combined to enhance PCB design by storing the defining parameters in a normalized format within a relational database. It implements search and filter functions to obtain relevant data quickly. The database contains data that were used to address a variety of different signal integrity (SI)- and power integrity (PI)-related problems. Details of the database structure, necessary data conversion steps, currently stored datasets, and a statistical analysis thereof are described. This database is capable of being automated to a degree that ML agents can interact with it.
将机器学习(ML)方法引入印刷电路板(pcb)的设计过程中,推动了对大量现成数据的需求。本文解决了工程师寻找ml就绪数据的问题,这些数据可以很容易地重用和组合,通过在关系数据库中以规范化格式存储定义参数来增强PCB设计。实现了搜索和过滤功能,快速获取相关数据。该数据库包含用于解决各种不同的信号完整性(SI)和功率完整性(PI)相关问题的数据。描述了数据库结构的细节、必要的数据转换步骤、当前存储的数据集及其统计分析。该数据库能够自动化到机器学习代理可以与之交互的程度。
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引用次数: 0
Using Hybrid Bonding for Stacked Bi-Color Micro-Light-Emitting Diodes 叠层双色微发光二极管的杂化键合技术
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-04 DOI: 10.1109/TCPMT.2025.3595581
Wen-Ching Hung;Jui-Fu Chang;Sheng-Po Chang;Shoou-Jinn Chang;Jyh-Chen Chen
In this work, a vertically stacked bi-color micro-light-emitting diode (Micro-LED) array structure employing Au–Sn hybrid bonding technology is presented. The design integrates blue flip-chip and green vertical Micro-LEDs into a common cathode circuit configuration, achieving an ultrafine pixel pitch of $5~mu $ m across $343times 387$ array on 1.6-cm2 substrate. Precise hybrid bonding was performed at $233~^{circ }$ C for 30 min, enabling effective Au–Sn alloy formation. The structure’s performance was verified through electrical character and cross-sectional SEM-EDX analysis, demonstrating minimal voltage increase postbonding and confirming the feasibility of independent control for both colors. This integration approach provides a scalable solution for high resolution, compact, and low-power consumption. The Micro-LEDs display applications, particularly suited for near-eye devices such as augmented and virtual reality systems.
本文提出了一种采用Au-Sn杂化键合技术的垂直堆叠双色微型发光二极管(Micro-LED)阵列结构。该设计将蓝色倒装芯片和绿色垂直micro - led集成到一个普通阴极电路配置中,在1.6 cm2衬底上的343 × 387阵列上实现了$5~ $ mu $ m的超细像素间距。在$233~^{circ}$ C下进行精确杂化键合30 min,实现了有效的Au-Sn合金形成。通过电学特性和SEM-EDX分析验证了该结构的性能,显示出最小的键合后电压增加,并确认了两种颜色独立控制的可行性。这种集成方法为高分辨率、紧凑和低功耗提供了可扩展的解决方案。micro - led显示应用,特别适合近眼设备,如增强和虚拟现实系统。
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引用次数: 0
Investigation of a Novel Symmetric-Structure-Based MEMS Piezoresistive Accelerometer 一种新型对称结构MEMS压阻式加速度计的研究
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-04 DOI: 10.1109/TCPMT.2025.3595152
Satyapal Singh;Vijay Kumar;Navin Kumar
In this article, a novel symmetric-structure-based silicon microelectromechanical systems (MEMS) piezoresistive accelerometer is proposed. Compared to conventional structures based on multiple support beams and hanging-seismic-mass, the symmetric-structure not only reduces cross-axis output but also ensures lower stresses in the flexures when subjected to cross-axis acceleration inputs. It increases the ratio of the fracture acceleration limit in the cross-direction to that in the sense-direction, from approximately 5.8 to 24. Additionally, it improves the ratio of the second to the first mode resonance frequency from approximately 2.2 to 10.5, which can improve survivability of the structure over a much wider bandwidth against resonance of the second mode. The new structure was fabricated by bonding two silicon-on-insulator (SOI) wafers, each containing complementary halves of the structure. This article presents the configuration details of the structure, along with analytical and finite element analysis (FEA) results to estimate deflections, stresses, modal frequencies, and mode shapes. Additionally, the MEMS fabrication process details, packaging, and test results of X-ray imaging, scanning electron microscope (SEM) imaging, natural frequency measurement using laser doppler vibrometer (LDV), sensitivity test, and so on, at die and package level are discussed.
提出了一种基于对称结构的硅微机电系统(MEMS)压阻式加速度计。与基于多支撑梁和悬震质量的传统结构相比,对称结构不仅减少了跨轴输出,而且在受到跨轴加速度输入时保证了较低的挠曲应力。横向裂缝加速极限与纵向裂缝加速极限之比由5.8左右增加到24。此外,它将第二模与第一模的共振频率之比从大约2.2提高到10.5,这可以提高结构在更宽的带宽上抵抗第二模共振的生存能力。这种新结构是通过结合两个绝缘体上硅(SOI)晶圆来制造的,每个晶圆都包含该结构的互补部分。本文介绍了结构的配置细节,以及分析和有限元分析(FEA)结果,以估计挠度,应力,模态频率和模态振型。此外,还讨论了MEMS的制造工艺细节、封装以及在芯片和封装层面的x射线成像、扫描电子显微镜(SEM)成像、激光多普勒测振仪(LDV)固有频率测量、灵敏度测试等测试结果。
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引用次数: 0
Analysis of Bondwires and RF Compensation Circuits in E-Band e波段键合线及射频补偿电路分析
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-31 DOI: 10.1109/TCPMT.2025.3594505
Sumin David Joseph;Edward A. Ball
This article investigates the impact of bondwire interconnections on signal integrity in low and high millimeter-wave (mmWave) applications, emphasizing transmission degradation caused by inductive and parasitic effects. Through detailed measurements and analysis, we demonstrate that transmission loss and impedance mismatches can be effectively reduced by minimizing bondwire length and using multiple wires in parallel. Based on empirical data, we developed an electrical model of bondwire incorporating distributed inductance, capacitance, resistance $(L/C/R)$ , and transmission line characteristics. To further enhance performance, we introduce compact compensation circuits using LC structures and radial stubs optimized for both single and double bondwire configurations. Experimental validation shows that the proposed double-wire LC compensation technique significantly reduces insertion loss—from 5 to 1.5 dB and provides a return loss bandwidth from 70 to 75 GHz. The key novelty of this work lies in integrating multiple bondwires with low complexity, compact LC compensation structures, providing an effective solution for reducing insertion loss and improving impedance matching in mmWave systems. This approach offers a practical and scalable solution for improving chip-to-board and board-to-board interconnect performance in mmWave systems.
本文研究了低毫米波和高毫米波应用中键合线互连对信号完整性的影响,强调了由电感和寄生效应引起的传输退化。通过详细的测量和分析,我们证明了通过最小化键合线长度和使用多根线并联可以有效地减少传输损耗和阻抗不匹配。基于经验数据,我们建立了结合分布电感、电容、电阻(L/C/R)和传输线特性的键合线电学模型。为了进一步提高性能,我们引入了紧凑的补偿电路,采用LC结构和径向桩,针对单键合线和双键合线配置进行了优化。实验验证表明,所提出的双线LC补偿技术显著降低了插入损耗(从5到1.5 dB),并提供了70到75 GHz的回波损耗带宽。这项工作的关键新颖之处在于将多个键合线与低复杂性,紧凑的LC补偿结构集成在一起,为降低插入损耗和改善毫米波系统中的阻抗匹配提供了有效的解决方案。这种方法为改善毫米波系统中的芯片对板和板对板互连性能提供了一种实用且可扩展的解决方案。
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引用次数: 0
A Method for Detecting the Initiation of Solder Joint Delamination in a 3-D PCB Assembly of WBG SiC MOSFET WBG SiC MOSFET三维PCB组件中焊点分层起始检测方法
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-30 DOI: 10.1109/TCPMT.2025.3593891
Souhila Bouzerd;Laurent Dupont
This article presents and discusses a method for evaluating the initiation of a solder joint delamination in a 3-D power electronics assembly of SiC MOSFETs integrated into printed circuit board substrate to design a more efficient half bridge. This assembly requires soldering two metallic parts and addresses the integration of active chips with small dimensions compared to the larger heat-sink dimensions to operate only with a convective cooling system. This technological development is part of an effort to assess the robustness of technological choices for a new assembly model of wide bandgap components. However, the conventional methods do not effectively meet the need for detecting the initiation of solder delamination due to the optimized electrothermal assembly design. The method relies on potential difference measurements that exhibit greater sensitivity to detect the onset of solder delamination. Finite element simulations are carried out to assess the method’s sensitivity and discriminating factors, such as geometry and materials involved. Based on the numerical results, the dedicated prototypes of the assembly are developed with controlled delamination rates at the solder joint corners. The results demonstrate that this method is sensitive to detect low delamination rates compared to the traditional method. An improvement of the PCB copper design is made by adding a routing to improve the robustness and the reliability of the method sensitivity.
本文提出并讨论了一种评估集成在印刷电路板基板上的SiC mosfet三维电力电子组件中焊点分层引发的方法,以设计更高效的半桥。该组件需要焊接两个金属部件,并且与较大的散热片尺寸相比,解决了小尺寸有源芯片的集成问题,仅使用对流冷却系统。这项技术的发展是评估技术选择的稳健性的努力的一部分,为新的组装模型的宽带隙组件。然而,由于优化的电热组件设计,传统的方法不能有效地满足检测焊料分层起始的需要。该方法依赖于电位差测量,表现出更高的灵敏度来检测焊料分层的开始。通过有限元仿真来评估该方法的灵敏度和判别因素,如几何形状和材料。在此基础上,开发了控制焊点角层脱率的专用组件原型。结果表明,与传统方法相比,该方法对低分层率具有较好的检测灵敏度。为了提高方法灵敏度的鲁棒性和可靠性,对PCB铜线设计进行了改进,增加了一条路由。
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引用次数: 0
An Efficient Modeling Method for Multiphysics Analysis of 3-D Interconnects 三维互连多物理场分析的高效建模方法
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-29 DOI: 10.1109/TCPMT.2025.3593614
Yue Pan;Tian Xia;Yu Mao Wu
As the integrated chip packaging technology progresses from 2.5-D to 3-D, new issues arise regarding the reliability of interconnects. The analysis of interconnect reliability is inherently multiphysics, multiscale, and large in computational scale. This article addresses these challenges by developing an electrical–thermal–mechanical co-simulation based on the discontinuous Galerkin finite-element method (DG-FEM). The governing equations for the three fields are formulated in a unified manner, enabling their effective solutions through a single DG-FEM framework. Since DG-FEM naturally supports the handling of nonconformal meshes, the mesh generation process is significantly simplified when handling multiscale models. Furthermore, a GPU parallel acceleration technique is applied to improve computational efficiency for large computational problems. The capability of the method in performing multiphysics simulations is demonstrated by several numerical examples of interconnect structures, achieving GPU speedups of over 20 times. Through simulations, detailed temperature and local stress distributions are efficiently obtained, providing critical insights into interconnect reliability.
随着集成芯片封装技术从2.5-D向3-D的发展,互连的可靠性也出现了新的问题。互连可靠性分析具有多物理场、多尺度和大计算规模的特点。本文通过开发基于不连续Galerkin有限元法(DG-FEM)的电-热-力联合模拟来解决这些挑战。三个场的控制方程以统一的方式制定,使其能够通过单一的DG-FEM框架进行有效求解。由于DG-FEM自然支持非保形网格的处理,因此在处理多尺度模型时,网格生成过程大大简化。在此基础上,应用GPU并行加速技术提高了大型计算问题的计算效率。通过多个互连结构的数值实例,证明了该方法在多物理场模拟中的能力,使GPU的速度提高了20倍以上。通过模拟,有效地获得了详细的温度和局部应力分布,为互连可靠性提供了关键见解。
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引用次数: 0
Encapsulation of ZrO2 Nanoparticles for Improving Total Luminous Flux of White Light-Emitting Diodes ZrO2纳米粒子封装提高白光二极管总光通量
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-25 DOI: 10.1109/TCPMT.2025.3592673
Tomoaki Kashiwao;Ryo Takeda;Tomomi Ito
In recent years, white light-emitting diodes (LEDs) have gained traction in general lighting and displays owing to their energy efficiency and high performance. Zirconium dioxide (ZrO ${}_{{2}}$ ) nanoparticles, characterized by high refractive indices, can significantly improve the luminous efficiency of white LEDs. When integrated into the encapsulation resin of white LED packaging (PKG), a small quantity of these nanoparticles effectively scatters the light emitted by the LED chip, thereby enhancing light extraction from the PKG. A ray-tracing simulation was employed to study the optical behavior of ZrO ${}_{{2}}$ nanoparticles within white LED PKG. Subsequently, the distribution of the ZrO ${}_{{2}}$ nanoparticles was optimized, and the mechanism underlying the enhanced luminosity was analyzed. The simulation results reveal that ZrO ${}_{{2}}$ nanoparticles, particularly in the 50–100-nm range, significantly enhance luminosity while reducing phosphor usage in white LED manufacturing.
近年来,白光发光二极管(led)由于其高能效和高性能,在普通照明和显示领域获得了广泛的应用。二氧化锆纳米粒子(ZrO ${}_{{2}}$)具有高折射率的特点,可以显著提高白光led的发光效率。通过将少量的ZrO ${}_{{2}}$纳米粒子集成到白光LED封装(PKG)的封装树脂中,有效地散射LED芯片发出的光,从而增强PKG的光提取能力。通过射线追踪模拟研究了ZrO ${}_{{2}}$纳米粒子在白光LED封装(PKG)中的光学行为,优化了ZrO ${}_{{2}}$纳米粒子的分布,并分析了其发光增强的机理。模拟结果表明,ZrO ${}_{{2}}$纳米颗粒,特别是在50 - 100 nm范围内,在白光LED制造中显着提高了亮度,同时减少了荧光粉的使用。
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引用次数: 0
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IEEE Transactions on Components, Packaging and Manufacturing Technology
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