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IEEE Transactions on Components, Packaging and Manufacturing Technology Publication Information IEEE元件、包装与制造技术汇刊信息
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TCPMT.2025.3602195
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引用次数: 0
Foreword: Special Section on Advances in Design, Modeling, and Simulation Methodologies for Modern Chip-Package-System Integration 前言:关于现代芯片封装系统集成的设计、建模和仿真方法的进展的特别部分
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TCPMT.2025.3598876
Antonio Maffucci;Mihai Telescu
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引用次数: 0
IEEE Transactions on Components, Packaging and Manufacturing Technology Society Information IEEE元件、封装与制造技术学会汇刊
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TCPMT.2025.3602199
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引用次数: 0
IEEE Transactions on Components, Packaging and Manufacturing Technology Information for Authors IEEE元件、封装与制造技术资讯汇刊
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TCPMT.2025.3602197
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引用次数: 0
Advances in Package Microvia Interconnects: Breakthroughs With Picosecond UV Laser Ablation 封装微孔互连的进展:皮秒紫外激光烧蚀的突破
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-15 DOI: 10.1109/TCPMT.2025.3610036
Fuhan Liu;Rui Zhang;Kanno Kimiyuki;Joon Woo Kim;Madhavan Swaminathan;Rao R. Tummala
Downscaling of microvias to approach the critical dimension (CD) of routing half-line pitch is crucial for advanced packaging but presents significant challenges. The state of the art (SOTA), achieved with nanosecond (ns) pulsed UV laser, results in via diameters of 20 $mu $ m. By employing a 5-ps pulsed UV laser, microvias of 5 $mu $ m were achieved in a 5- $mu $ m-thick Ajinomoto build-up film (ABF) through conventional laser ablation and could be reduced to 3 $mu $ m by adding a thin copper layer on top of the ABF as a buffer. With thinner and filler-free materials, the minimum demonstrated microvia size was further down to 1.26 $mu $ m on a 2- $mu $ m-thick JSR dielectric film. A via matrix of $26times 33$ (858) was presented. The heat-affected zone (HAZ) and defects were around 0.5 $mu $ m. The landing accuracy within $16times 16$ (256) with a via pitch of 5- $mu $ m matrix was analyzed, which was ±0.34 $mu $ m. Considerations for the next-generation system designs for 1 $mu $ m and submicrometer microvias are discussed.
缩小微孔尺寸以接近布线半线间距的关键尺寸(CD)对于先进封装至关重要,但也存在重大挑战。利用纳秒(ns)脉冲紫外激光器实现的最先进技术(SOTA),其通孔直径可达20美元/ μ m。通过使用5ps脉冲紫外激光器,在5美元/ μ m厚的味之素沉积膜(ABF)中,通过常规激光烧蚀可实现5美元/ μ m的微通孔,通过在ABF顶部添加薄铜层作为缓冲,微通孔可缩小至3美元/ μ m。使用更薄和无填料的材料,在2- $mu $ m厚的JSR介电膜上,最小微孔尺寸进一步降至1.26 $mu $ m。给出了$26 × 33$(858)的via矩阵。热影响区(HAZ)和缺陷约为0.5 $mu $ m,分析了在$16 × 16(256)内,通孔间距为5- $mu $ m矩阵的着陆精度为±0.34 $mu $ m,讨论了下一代1 $mu $ m和亚微米微通孔系统设计的注意事项。
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引用次数: 0
Enabling Reliable and Efficient Automotive Radar Systems by Investigating FO-WLP/eWLB Packaging for 77-GHz MMICs With Top-Side Cooling 通过研究采用顶部冷却的77 ghz mmic的FO-WLP/eWLB封装,实现可靠高效的汽车雷达系统
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-11 DOI: 10.1109/TCPMT.2025.3609236
Walter Hartner;Simon Kornprobst;Mathias Zinnoecker;Martin Niessner;Markus Fink;Franz-Peter Kalz;Peter Lutz
As the automotive industry continues to advance, the demand for high-performance radar systems increases. To address this need, we explored the potential of fan-out wafer-level packaging (FO-WLP) or embedded wafer-level ball grid Aarray (eWLB) for monolithic microwave integrated circuits (MMICs) in the 77-GHz range, with a focus on thermal management through top-side cooling (TSC). Our thermal simulations revealed that using a thin, high-thermal-conductivity thermal interface material (TIM) layer, the thermal resistance can be reduced by up to 75%. We assessed various scenarios, including TIM/absorber layer thickness and thermal conductivity variations, chip/package size influences, and overmold thickness impacts. To ensure reliability, we analyzed the mechanical aspects of pressure and force applied by TIM compression on the MMIC using thermomechanical simulations. Our results showed a zone with less than 10% loss in lifetime under certain top-force loading conditions. Experimental thermo-mechanical Temperature Cycling on Board (TCoB) board-level reliability tests verified these findings, highlighting the importance of avoiding excessive top-side forces and thermomechanical cycling numbers to prevent solder ball bridging. Electromagnetic characterization of TIM materials’ electrical properties and RF measurements of the radar system with TSC were also conducted. A key takeaway is the recommendation to use high-loss TIM materials to prevent RF performance deterioration when applying TSC with metallic components. By optimizing FO-WLP/eWLB packaging for MMICs in automotive radar applications, we can enable more efficient, reliable, and high-performance systems that make our roads safer and more efficient.
随着汽车工业的不断发展,对高性能雷达系统的需求也在增加。为了满足这一需求,我们探索了77 ghz范围内单片微波集成电路(mmic)的扇出晶圆级封装(FO-WLP)或嵌入式晶圆级球栅阵列(eWLB)的潜力,重点是通过顶部冷却(TSC)进行热管理。我们的热模拟表明,使用薄的、高导热的热界面材料(TIM)层,热阻可以降低高达75%。我们评估了各种情况,包括TIM/吸收层厚度和导热系数的变化,芯片/封装尺寸的影响,以及模具厚度的影响。为了确保可靠性,我们使用热力学模拟分析了TIM压缩对MMIC施加的压力和力的力学方面。我们的结果表明,在一定的顶力加载条件下,区域的寿命损失小于10%。实验热机械板上温度循环(TCoB)板级可靠性测试验证了这些发现,强调了避免过多的顶部力和热机械循环次数以防止焊接球桥接的重要性。对TIM材料的电性能进行了电磁表征,并对雷达系统进行了射频测量。一个关键的结论是,在将TSC应用于金属元件时,建议使用高损耗TIM材料,以防止RF性能恶化。通过优化汽车雷达应用中mmic的FO-WLP/eWLB封装,我们可以实现更高效、可靠和高性能的系统,使我们的道路更安全、更高效。
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引用次数: 0
IEEE Transactions on Components, Packaging and Manufacturing Technology Publication Information IEEE元件、包装与制造技术汇刊信息
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-22 DOI: 10.1109/TCPMT.2025.3593032
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引用次数: 0
IEEE Transactions on Components, Packaging and Manufacturing Technology Society Information IEEE元件、封装与制造技术学会汇刊
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-22 DOI: 10.1109/TCPMT.2025.3593037
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引用次数: 0
Foreword: Frontiers of Photonic Integration and Packaging 前言:光子集成与封装前沿
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-22 DOI: 10.1109/TCPMT.2025.3591951
Hiren D. Thacker;Stéphane Bernabé;Richard Pitwon
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引用次数: 0
Single-Mask Embedded Trace Redistribution Layer Technology Using Grayscale Lithography 基于灰度光刻的单掩模嵌入轨迹重分布层技术
IF 3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-18 DOI: 10.1109/TCPMT.2025.3599484
Wonchul Do;Sanghyun Jin;Insoo Choi;Jinho Jeong
This article presents a novel redistribution layer (RDL) technology with embedded trace structures, targeting high-density interconnects for organic interposers and bridge chips in 2.5-D integration. The proposed embedded trace RDL (ETR) adopts grayscale lithography, enabling the simultaneous formation of vias and traces in a single lithography step. This single-mask process reduces manufacturing complexity and cost compared to conventional dual-mask ETR approaches and is compatible with I-line steppers commonly used in advanced packaging. The proposed ETR successfully demonstrates four-stacked vias with a minimum diameter of $1.5~mu $ m and traces with 2/ $1~mu $ m line/space, validating its capability for fine-pitch, multilayer interconnects. Trace width and dielectric thickness variations were within 7.5% and 2.9% of the median, respectively, and critical dimension uniformity was within 5%. Dense traces between two vias were fabricated and compared with conventional semi-additive process (SAP)-based RDL, confirming that the pad-less vias in the proposed ETR enhance interconnection density. Furthermore, the rounded-edge traces, a distinctive feature of the ETR, reduce conductor loss by mitigating current crowding, leading to improved signal transmission bandwidth. Together, these effects increase bandwidth density, making the proposed ETR highly suitable for advanced high-speed, high-density interconnect applications. Finally, to the best of our knowledge, electromigration (EM) testing was conducted on the ETR structure for the first time, demonstrating a $34.2times $ improvement in mean time-to-failure (MTTF) over SAP-based RDL.
本文针对2.5维集成中有机中间体和桥接芯片的高密度互连,提出了一种具有嵌入式迹线结构的重分布层(RDL)技术。所提出的嵌入式走线RDL (ETR)采用灰度光刻技术,可以在一个光刻步骤中同时形成过孔和走线。与传统的双掩膜ETR方法相比,这种单掩膜工艺降低了制造复杂性和成本,并与先进封装中常用的i线步进器兼容。所提出的ETR成功地展示了最小直径为1.5~ $ $ $ m的四层通孔和2/ $ $1~ $ $ $ m线/空间的走线,验证了其用于细间距多层互连的能力。示踪宽度和介电厚度变化分别在中位数的7.5%和2.9%以内,临界尺寸均匀性在5%以内。制作了两个过孔之间的密集迹线,并与传统的半增材工艺(SAP) RDL进行了比较,证实了所提出的ETR中的无衬垫过孔提高了互连密度。此外,ETR的一个显著特征是圆边走线,通过减轻电流拥挤来减少导体损耗,从而提高信号传输带宽。总之,这些效应增加了带宽密度,使所提出的ETR非常适合先进的高速、高密度互连应用。最后,据我们所知,首次对ETR结构进行了电迁移(EM)测试,结果表明,与基于sap的RDL相比,平均故障时间(MTTF)提高了34.2倍。
{"title":"Single-Mask Embedded Trace Redistribution Layer Technology Using Grayscale Lithography","authors":"Wonchul Do;Sanghyun Jin;Insoo Choi;Jinho Jeong","doi":"10.1109/TCPMT.2025.3599484","DOIUrl":"https://doi.org/10.1109/TCPMT.2025.3599484","url":null,"abstract":"This article presents a novel redistribution layer (RDL) technology with embedded trace structures, targeting high-density interconnects for organic interposers and bridge chips in 2.5-D integration. The proposed embedded trace RDL (ETR) adopts grayscale lithography, enabling the simultaneous formation of vias and traces in a single lithography step. This single-mask process reduces manufacturing complexity and cost compared to conventional dual-mask ETR approaches and is compatible with I-line steppers commonly used in advanced packaging. The proposed ETR successfully demonstrates four-stacked vias with a minimum diameter of <inline-formula> <tex-math>$1.5~mu $ </tex-math></inline-formula>m and traces with 2/<inline-formula> <tex-math>$1~mu $ </tex-math></inline-formula>m line/space, validating its capability for fine-pitch, multilayer interconnects. Trace width and dielectric thickness variations were within 7.5% and 2.9% of the median, respectively, and critical dimension uniformity was within 5%. Dense traces between two vias were fabricated and compared with conventional semi-additive process (SAP)-based RDL, confirming that the pad-less vias in the proposed ETR enhance interconnection density. Furthermore, the rounded-edge traces, a distinctive feature of the ETR, reduce conductor loss by mitigating current crowding, leading to improved signal transmission bandwidth. Together, these effects increase bandwidth density, making the proposed ETR highly suitable for advanced high-speed, high-density interconnect applications. Finally, to the best of our knowledge, electromigration (EM) testing was conducted on the ETR structure for the first time, demonstrating a <inline-formula> <tex-math>$34.2times $ </tex-math></inline-formula> improvement in mean time-to-failure (MTTF) over SAP-based RDL.","PeriodicalId":13085,"journal":{"name":"IEEE Transactions on Components, Packaging and Manufacturing Technology","volume":"15 10","pages":"2269-2278"},"PeriodicalIF":3.0,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145374744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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IEEE Transactions on Components, Packaging and Manufacturing Technology
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