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Cu Sintering for Cu Pillar Bonding: A Comparative Study Among Pressure-Less, Pressure-Assisted, and Transient Liquid Phase Sinter Pastes 铜柱烧结:无压、助压和瞬态液相烧结浆料的比较研究
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-18 DOI: 10.1109/TCPMT.2024.3501478
Augusto Rodrigues;Julien Magnien;Roland Brunner;Ali Roshanghias
The solder-based interconnections have been the backbone of microelectronics. However, the ever-growing trends toward ultrahigh-density interconnected systems with higher thermal and mechanical stability drove the solder to its limit. Alternatively, the solid-state copper (Cu)-based interconnects have gained momentum not only due to their compatibility with back-end-of-the-line and downscalability through the lithography process but also due to the unique characteristics of Cu (e.g., low resistivity, high-temperature stability, high electromigration resistance, as well as low cost). As an interconnect, Cu pillars favor ultrafine pitch applications, as the bump height and footprint can be well-controlled. However, the conventional direct (thermocompression) Cu pillar bonding involves high bonding temperature and pressure. The use of solder caps alleviated these requirements but at the cost of possible issues, such as thermal mismatch and brittle intermetallic compound. Therefore, a solder-free, all-Cu interconnect solution with reduced processing temperature and pressures is currently the holy grail in advanced microelectronics packaging. Accordingly, in this study, Cu-based interconnects consisting of Cu pillars and Cu microparticle (MP) sinter paste caps were fabricated and investigated as an alternative to direct Cu pillar bonding and solder caps. Here, recently developed Cu-based sinter-paste materials [i.e., pressure-less, pressure-assisted Cu sinter pastes, and Cu-based transient liquid phase sinter transient liquid phase sintering (TLPS) pastes] were assessed and applied to join Cu pillars. The electrical and mechanical properties as well as the long-term reliability of the bonded samples were characterized and compared. The bonded interface was also examined using 3-D-tomography analysis.
基于焊料的互连一直是微电子技术的支柱。然而,超高密度互连系统具有更高的热稳定性和机械稳定性的发展趋势将焊料推向了极限。另外,基于固态铜(Cu)的互连已经获得了发展势头,这不仅是因为它们在光刻工艺中具有后端兼容性和向下可扩展性,还因为Cu的独特特性(例如,低电阻率、高温稳定性、高电迁移电阻以及低成本)。作为一种互连,铜柱有利于超细间距应用,因为凹凸高度和足迹可以很好地控制。然而,传统的直接(热压)铜柱键合需要较高的键合温度和压力。焊帽的使用减轻了这些要求,但代价是可能出现的问题,如热失配和脆性金属间化合物。因此,降低加工温度和压力的无焊料、全铜互连解决方案是目前先进微电子封装领域的圣杯。因此,在本研究中,制备并研究了由铜柱和铜微粒(MP)烧结膏帽组成的铜基互连,作为直接铜柱键合和焊帽的替代方案。在这里,最近开发的Cu基烧结膏体材料[即无压力,压力辅助Cu烧结膏体,以及Cu基瞬态液相烧结瞬态液相烧结(TLPS)膏体]被评估并应用于连接Cu柱。对粘接样品的电性能、力学性能和长期可靠性进行了表征和比较。结合界面也使用三维断层扫描分析进行了检查。
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引用次数: 0
Wideband, High Efficiency On-Chip Monolithic Integrated Antenna at W-Band Using Miniaturized Cavity and Through Silicon Via 采用微型化腔和硅通孔的w波段宽带、高效率片上单片集成天线
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-11 DOI: 10.1109/TCPMT.2024.3495520
Sanghoon D. Lee;Seung Yoon Lee;Andrew S. Kim;Brett Ringel;Wenshan Cai;Nima Ghalichechian;John D. Cressler
We present a W-band on-chip planar inverted-F antenna (PIFA) featuring high efficiency and wide bandwidth. The proposed on-chip antenna (OCA) incorporates a miniaturized $0.12~lambda _{{0}}^{{2}}$ -sized substrate-integrated air cavity (SIC) that creates a high dielectric discontinuity between air and silicon enabling an increase in radiation efficiency by suppressing the parallel plate modes. Forming air cavities in the substrate avoids the need for precise heterogeneous packaging, in contrast with integrating dielectric resonators or superstrate dielectrics with OCAs. To the best of the authors’ knowledge, a through-silicon via (TSV) was incorporated into a commercial silicon-based OCA die for the first time, enhancing the electrical connection to the off-chip ground and mechanical stability. The OCA is fabricated using a 180 nm SiGe BiCMOS process, with CMOS-compatible postprocessing for SICs and TSVs. The proposed OCA complies with various design rule check (DRC) guidelines, including minimum trace width sizing and metal density considerations to achieve a high manufacturing yield. The SIC is created by etching the bottom silicon substrate using a deep reactive-ion etching (DRIE) process. We manufacture an Ag TSV by filling the SIC with Ag epoxy to prevent expensive postprocessing. Measurements of the radiation patterns of the W-band antenna were performed using a robotic arm. The PIFA achievesa −10-dB bandwidth from 89 to 105 GHz with a fractional bandwidth of 16.3%. It also delivers an 11.4 GHz 1-dB gain bandwidth with a maximum realized gain of 1.6 dBi, corresponding to a peak efficiency of 72%. This research leverages commercial SiGe BiCMOS technology to achieve high efficiency and wide bandwidth, with TSVs providing a robust ground plane and potential for use as signal paths in monolithic integrated circuits.
提出了一种高效率、宽带宽的w波段片上平面反f天线(PIFA)。所提出的片上天线(OCA)包含一个小型化的$0.12~lambda _{{0}}^{{2}}$尺寸的基板集成空腔(SIC),该空腔在空气和硅之间产生高介电不连续,从而通过抑制平行板模式来提高辐射效率。与使用oca集成介电谐振器或上介电体相比,在基板上形成空腔避免了对精确异质封装的需要。据作者所知,第一次将硅通孔(TSV)集成到商用硅基OCA芯片中,增强了与片外接地的电气连接和机械稳定性。OCA采用180 nm SiGe BiCMOS工艺制造,具有cmos兼容的sic和tsv后处理。所提出的OCA符合各种设计规则检查(DRC)指南,包括最小走线宽度尺寸和金属密度考虑,以实现高制造良率。SIC是通过使用深反应离子蚀刻(DRIE)工艺蚀刻底部硅衬底而产生的。我们通过在SIC中填充Ag环氧树脂来制造Ag TSV,以避免昂贵的后处理。使用机械臂对w波段天线的辐射方向图进行测量。PIFA在89 ~ 105 GHz范围内实现−10db带宽,分数带宽为16.3%。它还提供11.4 GHz 1 db增益带宽,最大实现增益为1.6 dBi,对应于72%的峰值效率。本研究利用商用SiGe BiCMOS技术实现高效率和宽带宽,tsv提供强大的地平面,并有可能用作单片集成电路中的信号路径。
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引用次数: 0
Increasing Multilayer Ceramic Capacitor Lifetime With Bipolar Voltage Cycling
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-08 DOI: 10.1109/TCPMT.2024.3493964
Kayla Y. Chuong;Jon A. Bock;Eric A. Patterson;Harlan J. Brown-Shaklee;Lukas Graber;Lauren M. Garten
Enhancing the lifetime of multilayer ceramic capacitors (MLCCs) is critical in many aerospace, naval, or electrical grid applications, where device failure could lead to catastrophic consequences. The migration of oxygen vacancies from the ceramic to the electrode interface under constant bias is known to reduce the lifetime of oxide-based MLCCs. Bias cycling presents an opportunity to enhance MLCC lifetime by reducing oxygen vacancy migration. The ideal frequency range is expected to lie between frequencies low enough to avoid self-heating but high enough to avoid interfacial defect formation. However, the impact of low-frequency bipolar voltage cycling (BVC) on MLCC degradation mechanisms has not been well studied. This work investigates the impact of periodic BVC on the degradation of MLCCs through highly accelerated lifetime testing (HALT) on X7R capacitors. HALT tests were conducted at 255 °C and 60 V using different switching frequencies: 0 (dc), 0.1, 2.5, and 10 Hz. BVC was found to improve the lifetime of MLCCs compared to dc test conditions. MLCCs tested at 10-Hz BVC showed a 311% increase in average time to failure compared to the dc case. Impedance spectroscopy shows that BVC decreases the rate of resistance degradation within MLCCs, indicating that oxygen vacancy migration to the electrodes is mitigated. The impedance spectra taken on BVC samples highlight how grain boundaries play a vital role in trapping oxygen vacancies. Periodic cycling causes oxygen vacancies to become trapped at grain boundaries, resulting in oxygen vacancies taking longer to reach the electrode interface and thus increasing MLCC lifetime. This work highlights not only how BVC can be used to increase MLCC lifetime but also how periodically cycling MLCCs could increase lifetime in extreme environments, such as at elevated temperatures and electric fields.
提高多层陶瓷电容器(MLCC)的使用寿命在许多航空航天、舰船或电网应用中至关重要,因为器件故障可能导致灾难性后果。众所周知,在恒定偏压下,氧空位从陶瓷迁移到电极界面会缩短基于氧化物的多层陶瓷电容器的使用寿命。偏压循环为通过减少氧空位迁移来提高 MLCC 寿命提供了机会。理想的频率范围应介于低频和高频之间,低频可避免自热,高频可避免界面缺陷的形成。然而,低频双极性电压循环 (BVC) 对 MLCC 退化机制的影响尚未得到充分研究。本研究通过对 X7R 电容器进行高加速寿命测试 (HALT),研究周期性双极性电压循环对 MLCC 退化的影响。HALT 测试在 255 °C 和 60 V 下使用不同的开关频率进行:0(直流)、0.1、2.5 和 10 Hz。与直流测试条件相比,BVC 能延长 MLCC 的使用寿命。与直流情况相比,在 10 赫兹 BVC 下测试的 MLCC 平均失效时间延长了 311%。阻抗光谱显示,BVC 降低了 MLCC 的电阻衰减率,这表明氧空位向电极的迁移得到了缓解。BVC 样品的阻抗光谱突出显示了晶界在捕获氧空位方面的重要作用。周期性循环会使氧空位滞留在晶界,导致氧空位需要更长的时间才能到达电极界面,从而延长 MLCC 的使用寿命。这项工作不仅强调了如何利用 BVC 来延长 MLCC 的使用寿命,还强调了如何通过周期性循环来延长 MLCC 在极端环境(如高温和电场)中的使用寿命。
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引用次数: 0
Measuring Specificities of Thermal Resistance of IGBT Power Modules IGBT电源模块热阻特性的测量
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-08 DOI: 10.1109/TCPMT.2024.3493971
Vitaliy Smirnov;Andrey Gavrikov;Vladimir Neichev
This article shows that the results of experimental studies of thermoelectric properties of the insulated gate bipolar transistor (IGBT) power modules aimed at developing methods and means for measuring cross-couple thermal resistances between module transistors. The research has shown that the modulation method, which uses heating of a measured object with power modulated according to the harmonic law, has a number of advantages over standard methods based on measuring the transient thermal characteristics. It was possible to measure thermal resistance components “junction-top copper layer of the direct bond copper (DBC) board,” “junction-Al2O3 layer of the DBC board,” “junction-baseplate of the module body,” and “junction-heatsink” using the modulation method for all the IGBTs of the GD35PIT1205SN power module. Analysis of the results showed that the cross-couple thermal resistance between the transistors of the module may contain one or two components. If the transistors are located on the same DBC board and the heat flows between the module transistors within the same DBC board, then only one component appears. If the transistors are located on different DBC boards separated by a gap, then two components of thermal resistance appear.
本文介绍了绝缘栅双极晶体管(IGBT)功率模块热电特性的实验研究结果,旨在开发模块晶体管间交叉耦合热阻的测量方法和手段。研究表明,该调制方法是根据谐波规律调制功率对被测物体进行加热,与基于测量瞬态热特性的标准方法相比,具有许多优点。采用GD35PIT1205SN功率模块所有igbt的调制方法,可以测量“直键铜(DBC)板的结顶铜层”、“DBC板的结al2o3层”、“模块体的结基板”和“结散热器”的热阻元件。分析结果表明,该模块晶体管间的交叉耦合热阻可能包含一个或两个元件。如果晶体管位于同一DBC板上,并且热量在同一DBC板内的模块晶体管之间流动,则只出现一个组件。如果晶体管位于由间隙隔开的不同DBC板上,则会出现两个热阻分量。
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引用次数: 0
The Impact of Substrate Vibrations on Self-Alignment Accuracy in BGA/Flip-Chip Assembly 衬底振动对BGA/倒装芯片自对准精度的影响
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-06 DOI: 10.1109/TCPMT.2024.3492672
Ming Kong;Yung-Cheng Lee;Christopher Oshman
Solder self-alignment is a crucial manufacturing technology for the cost-effective assembly of optoelectronic devices that require precise positioning. However, concerns remain about the quality of self-alignment, especially due to dynamic factors like mechanical vibrations from conveyor belts during the manufacturing process. Additionally, there has been a lack of comprehensive experimental studies and models to fully address these issues. In this article, the dynamic behavior of a ball grid array (BGA) flip-chip assembly reflowed under forced environmental periodical vibration was investigated. Due to the low dissipative force of the molten solder joint, resonant oscillations between chip and substrate were observed at around 12 Hz driving frequency. The maximum chip’s oscillation amplitude can reach more than $100mu$ m for only several microns’ driven amplitude on the substrate. This resonant motion can be “frozen in” during the solidification of the joint, resulting in large post-assembly misalignments. In order to reduce the adverse influence of environmental vibration on self-alignment accuracy, several feasible methods were proposed, including varying solder surface tension coefficient, adjusting solder joint aspect ratio, adjusting chip mass or the number of joint interconnections, in order to shift the resonant frequency of the to-be-assembled device to a range that is different from the frequency of environmental vibrations.
对于需要精确定位的光电器件而言,焊料自对准是一项具有成本效益的关键制造技术。然而,自对准的质量仍然令人担忧,特别是由于制造过程中传送带的机械振动等动态因素。此外,还缺乏全面的实验研究和模型来充分解决这些问题。研究了球栅阵列(BGA)倒装芯片在强制环境周期性振动下的动态特性。由于熔点的低耗散力,在12 Hz左右的驱动频率下,观察到芯片和衬底之间的谐振振荡。仅在衬底上驱动几微米的振幅,芯片的最大振荡幅度就可以达到100 μ m以上。这种共振运动可以在关节凝固期间“冻结”,导致组装后的大错位。为了降低环境振动对自对准精度的不利影响,提出了几种可行的方法,包括改变焊料表面张力系数、调整焊点长径比、调整芯片质量或调整焊点互连数,以使待组装器件的谐振频率与环境振动频率不同。
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引用次数: 0
Design and Experiment of a Dual-Frequency Ultrasonic Transducer for Aluminum Wedge Bonding 铝楔焊用双频超声换能器的设计与实验
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-05 DOI: 10.1109/TCPMT.2024.3490672
Yuxiang Li;Zhili Long;Shuyuan Ye;Mian Yao;Xiangqing Li
Ultrasonic transducer (UT) plays a critical role in the aluminum wedge bonding of insulated gate bipolar transistors (IGBTs). Compared with the conventional single longitudinal transducer, we propose a dual-frequency UT that can effectively bond aluminum wires ranging from 100 to $500~mu $ m. The configuration of the transducer is designed by finite element method (FEM). A grooved annular flange is developed to obtain the transducer with the common nodal flanges of the two disparate frequencies. The effect of pretightening torques on the performances of the transducer is investigated, and the optimum torque with 55 kg cm is obtained. The impedance measurement proves that the dual frequency of the developed transducer is 61.3 and 86.5 kHz, respectively. Vibration tests indicate that the amplitudes of the capillary at low and high frequencies are 24.4 and $6.4~mu $ m, which can satisfy the bonding specification. Finally, the bonding of 100– $500~mu $ m aluminum wires is successfully realized, with the tensile strength exceeding standard strength.
超声换能器在绝缘栅双极晶体管(igbt)的铝楔键合中起着至关重要的作用。与传统的单纵向换能器相比,我们提出了一种双频UT,可以有效地结合100 ~ 500~mu $ m的铝线,并采用有限元法设计了换能器的结构。为了得到具有两个不同频率的共同节点法兰的换能器,设计了带槽的环形法兰。研究了预紧力矩对换能器性能的影响,得到了预紧力矩为55 kg cm的最佳预紧力矩。阻抗测量结果表明,所研制的换能器的双频分别为61.3 kHz和86.5 kHz。振动试验表明,毛细管在低、高频处的振幅分别为24.4和6.4~ $ mu $ m,满足粘接要求。最终成功实现了100 ~ 500~ μ $ m铝线的粘接,抗拉强度超过标准强度。
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引用次数: 0
Custom Design Experiments for Semiconductor Package Optimization 半导体封装优化定制设计实验
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-05 DOI: 10.1109/TCPMT.2024.3492022
Yung-Seop Lee;Hyewon Ko;Min Soo Park;Yonghan Ju
The design of memory semiconductors involves satisfying various customer demands and rapid provision of high-quality products; therefore, manufacturers have developed high-quality memory semiconductors using various technological elements to ensure their performance, reliability, and operation in various environments. Major quality aspects, such as warpage, stress, and strain, have different effects. Through experimental investigations, appropriate technological elements are selected using different technological elements (thickness and materials) to deliver the quality desired by customers. Experimental investigations may, however, delay product deliveries and incur considerable costs. This study proposes a new design method to overcome these limitations and determine optimal solutions based on the prepared technological elements for the quality desired by customers. The proposed method differs from traditional optimization methods in that it provides multiple solutions that satisfy the customer’s requirements. Traditional experimental designs that use orthogonal arrays fail to reflect the various constraints involved in memory semiconductor designs. We, therefore, aimed to solve this problem by applying an analysis methodology for a mixture of experimental designs based on orthogonal arrays using the coordinate exchange algorithm. A desirability function was, furthermore, used to assess the satisfaction of multiple quality characteristics (warpage, stress, strain), through which optimal packaging conditions were confirmed at approximately 12.5% of the total combination level. The results of this study are expected to improve the optimization and efficiency of semiconductor packaging processes.
存储半导体的设计需要满足客户的各种需求,快速提供高质量的产品;因此,制造商利用各种技术元素开发出高质量的存储半导体,以确保其性能、可靠性和在各种环境下的运行。主要的质量方面,如翘曲、应力和应变,有不同的影响。通过实验调查,使用不同的工艺元素(厚度和材料)选择合适的工艺元素,以提供客户所需的质量。然而,实验调查可能会延迟产品交付并产生相当大的成本。本研究提出了一种新的设计方法来克服这些限制,并根据所准备的技术要素确定客户所需质量的最优解决方案。该方法与传统优化方法的不同之处在于,它提供了满足客户需求的多个解决方案。使用正交阵列的传统实验设计不能反映存储半导体设计中涉及的各种限制。因此,我们的目标是通过使用坐标交换算法应用基于正交阵列的混合实验设计的分析方法来解决这一问题。此外,期望函数用于评估多种质量特征(翘曲,应力,应变)的满意度,通过该函数,在大约12.5%的总组合水平上确定了最佳包装条件。本研究的结果有望改善半导体封装工艺的优化和效率。
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引用次数: 0
TGSYOLO: Template-Guidance Siamese Network for SMT Welding Defect Detection SMT焊接缺陷检测的模板导向暹罗网络
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-04 DOI: 10.1109/TCPMT.2024.3491163
Kehao Shi;Chengkai Yu;Yang Cao;Yu Kang;Yunbo Zhao;Lijun Zhao;Zhenyi Xu
Surface-mounted technology (SMT) welding defect detection plays a key role in the printed circuit board assembly (PCBA) production process, which affects the use of electronic products and cost. Previous works tend to realize defect detection with only defect samples and they assume that there are sufficient defect samples. However, defect samples are usually difficult to collect in real-life scenarios while enough template samples can be easily obtained. In addition, most existing works carry out defect detection based on benchmarks with simple backgrounds of PCBA, which is not suitable for PCBA with complex structures in modern electronic product manufacturing. To address the above issues, we propose a template-guidance Siamese network based on YOLO for SMT welding defect detection (TGSYOLO), which is deployed on a real SMT automatic optical inspection (AOI) system. First, the two-stream structure is introduced to extract deep features in defect images and template images, in which template features serve as guidance knowledge. Then, a template fusion Transformer (TFT) is proposed to model global features between detect and template features in the low-level stage, which could acquire long-range correlations to force the network to focus on potential defect regions. Next, to avoid the disappearance of tiny defect features during deep feature fusion, a multiscale attention feature pyramid network (MAFPN) is proposed to directly fuse defect semantic information from low-level features, which retains detailed expressions of defects through skip connection and obtains compact fusion features. Furthermore, we collect limited welding defect samples based on more complex PCBA backgrounds than previous works through a real SMT AOI system. Experiments on the limited dataset show that TGSYOLO could reach 0.985 of mAP@0.5, 0.885 of mAP@0.75, and 0.984 of F1, which is 0.008, 0.054, and 0.025 higher than other SOTA methods. Also, generalization experiments on the public DeepPCB show that TGSYOLO could still reach the best with 0.991 of mAP@0.5 and 0.89 of mAP@0.75, which proves that TGSYOLO has good generalization performance.
表面贴装技术(SMT)焊接缺陷检测在印制电路板组装(PCBA)生产过程中起着关键作用,影响着电子产品的使用和成本。以往的工作往往只通过缺陷样本来实现缺陷检测,并假设缺陷样本足够。然而,在现实场景中,缺陷样本通常很难收集,而足够的模板样本很容易获得。此外,现有的工作大多是基于PCBA背景简单的基准进行缺陷检测,不适合现代电子产品制造中结构复杂的PCBA。针对上述问题,提出了一种基于YOLO的SMT焊接缺陷检测模板引导Siamese网络(TGSYOLO),并将其应用于实际的SMT自动光学检测(AOI)系统。首先,采用双流结构提取缺陷图像和模板图像中的深层特征,其中模板特征作为指导知识;然后,提出了一种模板融合变压器(TFT),在低级阶段对检测特征和模板特征之间的全局特征进行建模,从而获得远程相关性,迫使网络关注潜在缺陷区域。其次,为了避免在深度特征融合过程中微小缺陷特征的消失,提出了一种多尺度关注特征金字塔网络(MAFPN),直接从底层特征中融合缺陷语义信息,通过跳过连接保留缺陷的详细表达,得到紧凑的融合特征。此外,我们通过一个真实的SMT AOI系统,在更复杂的PCBA背景下收集了有限的焊接缺陷样本。在有限数据集上的实验表明,TGSYOLO在mAP@0.5、mAP@0.75和F1上分别能达到0.985、0.885和0.984,分别比其他SOTA方法高0.008、0.054和0.025。同时,在公开的deepppcb上进行的泛化实验表明,TGSYOLO仍然可以达到最佳效果,分别为0.991 (mAP@0.5)和0.89 (mAP@0.75),证明TGSYOLO具有良好的泛化性能。
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引用次数: 0
A Wideband Digital Attenuator Based on Conductive Bridging Random Access Memory Switches for RF System-in-Package 基于导电桥接随机存取存储器开关的射频系统级封装宽带数字衰减器
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-01 DOI: 10.1109/TCPMT.2024.3489882
Zong-Rui Xu;Zhi-Yi Zhang;Lin-Sheng Wu;Jun-Fa Mao
A wideband digital conductive bridging random access memory (CBRAM)-based attenuator is proposed in this article, which can be used to realize reconfigurable RF systems-in-package (SiPs). The fabrication process is developed under the processing temperature lower than $120~^{circ }$ C, compatible with the advanced packaging technology on silicon substrates. The CBRAM switches based on Nafion are integrated with bridged-T-type resistor subnetworks to form single-bit attenuation unit cells, with wide attenuation range and large operating bandwidth. The resistance values and layouts of TaN thin film resistors are optimized when considering the parasitic effects. A 5-bit attenuator prototype is designed for 5–15 GHz, which is highly integrated with the occupied area of $0.84times 0.84$ mm2. The relative attenuation is from 1.0 to 31.3 dB at the central frequency, with a 2.2-dB insertion loss of the reference state. The return loss is better than 10 dB for all the 32 attenuation states. The root mean square (rms) attenuation error is less than 0.74 dB with a relative bandwidth of 100%. Moreover, the proposed digital CBRAM-based attenuator has the advantages of low actuation voltage and no dc power consumption, due to the nonvolatile RF switches used. It is a promising technique for the application of reconfigurable RF SiPs.
本文提出了一种基于宽带数字导电桥接随机存取存储器(CBRAM)的衰减器,该衰减器可用于实现可重构的射频系统级封装(sip)。在低于$120~^{circ}$ C的加工温度下,开发了与硅衬底上的先进封装技术相适应的制造工艺。基于Nafion的CBRAM交换机与桥式t型电阻子网集成,形成单比特衰减单元格,衰减范围宽,工作带宽大。在考虑寄生效应的情况下,对钽薄膜电阻器的电阻值和布局进行了优化。设计了5-15 GHz的5位衰减器原型,该衰减器高度集成,占用面积为0.84 × 0.84$ mm2。中心频率处的相对衰减为1.0 ~ 31.3 dB,参考状态的插入损耗为2.2 dB。在所有32种衰减状态下,回波损耗均优于10 dB。rms(均方根)衰减误差小于0.74 dB,相对带宽为100%。此外,由于采用非易失性射频开关,所提出的基于cbram的数字衰减器具有低驱动电压和无直流功耗的优点。这是一种很有前途的可重构射频sip应用技术。
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引用次数: 0
Failure Mechanism and Reliability Research of Solder Layer Tilt in Double-Sided Cooling Power Modules 双面冷却电源模块焊层倾斜的失效机理与可靠性研究
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-30 DOI: 10.1109/TCPMT.2024.3447124
Guoliao Sun;Wen Jing;Siyuan Lu;Cheng Peng;Wenhui Zhu;Liancheng Wang
The double-sided cooling (DSC) module introduces greater thermomechanical stress compared to single-sided cooling (SSC) modules, posing a significant threat to reliability. The manufacturing process is complex, requiring multiple sintering or reflow operations. Due to gravitational factors, this results in uneven thickness in the solder layer, further exacerbating the reliability issues. This article investigates the failure mechanism of the middle solder layer (SAC305) in flip-chip double-sided cooling (FCDSC) modules under thermal cycling conditions using a thermomechanical coupled model. The results indicate that when the solder layer tilt angle reaches 1.53°, the lifetime is reduced by 99.3%. Local viscoplastic strain in the solder at stress concentration areas is identified as a key factor in solder layer fatigue failure. Subsequent experiments confirm that fatigue cracks occur on the thinner side of the solder layer. There, the coarsening of the Ag3Sn eutectic phase is more severe, leading to reduced tensile strength, thus becoming a crack initiation site. Finally, the protrusions-spacer technique is proposed to control the evenness of the solder layer, with experiments demonstrating an average reduction in solder layer tilt by 79.7%.
与单面冷却(SSC)模块相比,双面冷却(DSC)模块会产生更大的热机械应力,对可靠性构成重大威胁。制造工艺复杂,需要多次烧结或回流焊操作。由于重力因素,这会导致焊料层厚度不均匀,进一步加剧可靠性问题。本文利用热机械耦合模型研究了热循环条件下倒装芯片双面冷却(FCDSC)模块中中间焊接层(SAC305)的失效机理。结果表明,当焊接层倾斜角达到 1.53°时,寿命会缩短 99.3%。焊料中应力集中区域的局部粘塑性应变被认为是导致焊料层疲劳失效的关键因素。随后的实验证实,疲劳裂纹发生在焊料层较薄的一侧。在那里,Ag3Sn 共晶相的粗化更为严重,导致抗拉强度降低,从而成为裂纹的起始点。最后,我们提出了突起-垫片技术来控制焊料层的均匀度,实验表明焊料层倾斜度平均降低了 79.7%。
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IEEE Transactions on Components, Packaging and Manufacturing Technology
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