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Improved Stability of BEOL-Compatible Highly Scaled Ultrathin InZnO Channel Ferroelectric Thin-Film Transistor With TiO₂ Interfacial Layer 具有 TiO$_{text{2}}$ 表面层的 BEOL 兼容型高比例超薄 InZnO 沟道铁电薄膜晶体管稳定性的提高
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3433835
Yan-Kui Liang;Wei-Li Li;Yu-Lon Lin;Dong-Ru Hsieh;Tsung-Ying Yang;Tsung-Te Chou;Chi-Chung Kei;Huai-Ying Huang;Yu-Ming Lin;Yuan-Chieh Tseng;Tien-Sheng Chao;Edward Yi Chang;Kasidit Toprasertpong;Shinichi Takagi;Chun-Hsiung Lin
In this study, we investigated the impact of inserting an interfacial layer (IL) between the InZnO channel and ZrO2/HfO2 superlattice (SL) ferroelectric (FE) gate-stack on the performance and stability of highly scaled FE thin-film transistors (FeTFTs). FeTFTs with various channel lengths (50–750 nm) were characterized to reveal the impact of two IL (i.e., TiO2 and Al2O3) on device characteristics. All the memory window (MW) contours of FeTFTs with a pulsewidth of 1 ms–100 ns and an amplitude of 2.5–5 V have been investigated. The FeTFT with TiO2 IL demonstrated impressive stability in MW ( $boldsymbol {Delta } $ MW/MW $_{{1}text {st cy}text {cle}}~boldsymbol {le } ~3.6$ %) up to 108 cycles for a program/erase voltage of $boldsymbol {pm }3$ V and pulsewidth of $1~boldsymbol {mu } $ s. It was suggested that the FeTFT with a higher dielectric constant $(k)$ TiO2 IL may reduce the electrical field and depolarization field at the interface between the channel and gate dielectric, as well as improve interfacial quality, thereby enhancing the reliability of FeTFTs.
在这项研究中,我们研究了在 InZnO 沟道和 ZrO2/HfO2 超晶格 (SL) 铁电 (FE) 栅极栈之间插入界面层 (IL) 对高比例 FE 薄膜晶体管 (FeTFT) 性能和稳定性的影响。我们对具有不同沟道长度(50-750 nm)的 FeTFT 进行了表征,以揭示两种 IL(即 TiO2 和 Al2O3)对器件特性的影响。研究了脉宽为 1 ms-100 ns、振幅为 2.5-5 V 的 FeTFT 的所有存储窗口 (MW) 轮廓。带有 TiO2 IL 的 FeTFT 在 MW($boldsymbol {Delta })中表现出了令人印象深刻的稳定性。$ MW/MW $_{{1}text {st cy}text {cle}}~boldsymbol {le }~3.6$ %)达 108 个周期,程序/擦除电压为 $boldsymbol {pm }3$ V,脉宽为 1~boldsymbol {mu }$ s。研究表明,具有更高介电常数 $(k)$ TiO2 IL 的 FeTFT 可以降低沟道和栅电介质界面的电场和去极化场,并改善界面质量,从而提高 FeTFT 的可靠性。
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引用次数: 0
Evolution of Enhanced Performance of a-IGZO TFTs With Cu/Al-Based Contacts 采用铜/铝基触点的 a-IGZO TFT 性能增强的演变过程
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3433836
Chunlan Wang;Yuchao Jiao;Chi Luo;Yongle Song;Hao Huang;Hongbing Lu;Jingli Wang
The amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) with Cu/Al stacked contacts to restrain the transferring of Cu to a-IGZO were prepared by thermal evaporation and magnetron sputtering. Compared to Cu contacts, the devices of stacked contacts offered improved performance and stability. When Al thickness was increased to 5 nm, the devices of stacked contacts exhibited field effect mobility ( $mu _{text {FE}}text {)}$ of 25 cm2/V $cdot $ s and the subthreshold swing (SS) of 0.49 V/dec. Particularly, the threshold voltage shift ( $Delta $ V ${}_{text {th}}text {)}$ of the devices with stacked contacts was -0.29 V under the negative bias stress. Furthermore, the devices with stacked contacts of 5 nm Al presented outstanding contact characteristics by transmission line mode analysis. The results suggested that Cu/Al electrodes were expected to become useful electrodes for optimizing metal oxide TFTs.
通过热蒸发和磁控溅射法制备了具有铜/铝叠层触点的非晶 InGaZnO(a-IGZO)薄膜晶体管(TFT),以抑制铜向 a-IGZO 的转移。与铜触点相比,叠层触点器件的性能和稳定性都有所提高。当铝厚度增加到5 nm时,叠层触点器件的场效应迁移率($mu _{text {FE}}text {)}$为25 cm2/V $cdot $ s,阈下摆动(SS)为0.49 V/dec。特别是,在负偏压应力下,堆叠触点器件的阈值电压偏移($Delta $ V ${}_{text {th}}text {)}$为-0.29 V。此外,通过传输线模式分析,使用 5 nm Al 的堆叠触点的器件具有出色的接触特性。结果表明,铜/铝电极有望成为优化金属氧化物 TFT 的有用电极。
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引用次数: 0
Innovative Reverse Current Coupling Layout of SiC Power Module for Parasitic Inductance Reduction 减少寄生电感的创新型碳化硅功率模块反向电流耦合布局
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3433319
Ying Wang;Xi Jiang;Song Yuan;Nianlong Ma;Runze Ouyang;Daoyong Jia;Xiaowu Gong;Zhenjiang Pang;Lei Wen;Haimin Hong;Hao Niu
In this article, an innovative layout is introduced to reduce the stray inductance of the multichip power modules (MCPMs) through reverse coupling of current in parallel power loops, which effectively cancels out mutual inductance. A half-bridge silicon carbide (SiC) MOSFET power module was designed based on this novel layout. The fabricated SiC power module was experimentally validated, demonstrating a measured stray inductance of about 3.5 nH. Experimental results confirmed that the proposed module outperforms counterpart commercial SiC MOSFET power modules in terms of turn-off overshoot voltage and switching loss reduction, highlighting the advantage of the reverse-coupling current approach in enhancing power module performance. The principle of enhancing negative mutual inductance and dynamic current sharing in circuits through the reverse coupling parallel loops is discussed.
本文介绍了一种创新布局,通过并联电源回路中电流的反向耦合,有效抵消互感,从而降低多芯片电源模块(MCPM)的杂散电感。根据这种新颖的布局设计了一个半桥碳化硅(SiC)MOSFET 功率模块。经实验验证,所制造的碳化硅功率模块的杂散电感测量值约为 3.5 nH。实验结果证实,所提出的模块在关断过冲电压和降低开关损耗方面优于同类商用碳化硅 MOSFET 功率模块,凸显了反向耦合电流方法在提高功率模块性能方面的优势。本文讨论了通过反向耦合并联环路增强电路中负互感和动态电流分担的原理。
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引用次数: 0
Effect of Source/Drain Electrode Materials on the Electrical Performance and Stability of Amorphous Indium-Tin-Zinc-Oxide FETs 源极/漏极电极材料对非晶氧化铟锡锌场效应晶体管电气性能和稳定性的影响
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3433831
Seong Ui An;Dae-Hwan Ahn;Gijun Ju;Simin Chen;Yo Seop Ji;Jae-Hoon Han;Jaekyun Kim;Younghyun Kim
The gate-bias stability of amorphous indium-tin-zinc-oxide (a-ITZO) field-effect transistors (FETs) is critical for their display and emerging memory applications. However, a-ITZO FETs suffer from insufficient gate-bias stability induced by oxygen vacancies in the channel layer. To address this issue, we examined the impact of source/drain (S/D) electrode materials (W, Mo, and Ni) on the oxygen vacancy formation and electrical characteristics in the a-ITZO FETs. Through X-ray photoelectron spectroscopy (XPS) analysis, we found that the Ni S/D electrode is effective in forming fewer oxygen vacancies in the a-ITZO channel, whereas W and Mo induce many oxygen vacancies. Our proposed model suggests that the Ni electrode absorbing less oxygen from the a-ITZO films compared to other electrodes leads to fewer oxygen vacancies in the a-ITZO channel. Notably, the a-ITZO FETs incorporating Ni S/D electrodes exhibit not only excellent electrical performance, including a high field-effect mobility of 27.6 cm2/Vs, a steep subthreshold swing (SS) of 71.8 mV/decade, and high on/off ratio of $sim 10^{{7}}$ , but also an outstanding gate-bias stability ( $Delta V_{text {th}} = -0.04$ V) under negative bias stress (NBS) testing. These findings underscore the potential of Ni S/D electrodes in advancing the development of high-performance, stable a-ITZO FETs for the next-generation semiconductor devices.
非晶铟锡锌氧化物(a-ITZO)场效应晶体管(FET)的栅极偏压稳定性对其显示和新兴存储器应用至关重要。然而,a-ITZO 场效应晶体管因沟道层中的氧空位而导致栅极偏压稳定性不足。为了解决这个问题,我们研究了源电极/漏极(S/D)材料(W、Mo 和 Ni)对 a-ITZO FET 中氧空位形成和电气特性的影响。通过 X 射线光电子能谱 (XPS) 分析,我们发现镍 S/D 电极能有效地在 a-ITZO 沟道中形成较少的氧空位,而 W 和 Mo 则会诱发许多氧空位。我们提出的模型表明,与其他电极相比,镍电极从 a-ITZO 薄膜中吸收的氧气更少,从而导致 a-ITZO 沟道中的氧空位更少。值得注意的是,采用镍 S/D 电极的 a-ITZO FET 不仅具有出色的电气性能,包括 27.6 cm2/Vs 的高场效应迁移率、71.8 mV/decade 的陡峭阈下摆动 (SS) 和 $sim 10^{7}}$ 的高导通/关断比,而且在负偏压测试下具有出色的栅偏稳定性($Delta V_{text {th}} = -0.04$ V)。这些发现凸显了镍 S/D 电极在推动高性能、稳定的 a-ITZO FET 开发方面的潜力,可用于下一代半导体器件。
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引用次数: 0
RF Performance Augmentation Using DG-InAlN/GaN HEMT 使用 DG-InAlN/GaN HEMT 提升射频性能
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3430251
Vandana Kumari;Manoj Saxena;Mridula Gupta
The work presented in this study examines the behavior of InAlN/GaN high electron mobility transistor (HEMT) by scaling down the device geometry, including the gate length and barrier thickness, at various operating temperatures. Extensive simulation has been performed using Silvaco’s Victory TCAD simulator tool to analyze the dc and RF performance of InAlN HEMT in terms of ${I}_{text {on}}/{I}_{text {off}}$ , intrinsic gain, DIBL, and cutoff frequency. To strengthen the RF performance at increased device length, dual gate (DG) architecture [i.e., Gate 1 (G1) and Gate 2 (G2)] has been adopted, and different gate biasing combinations have been used to investigate the device performance. A tradeoff among intrinsic gain and cutoff frequency is noted from the results. An increment in the cutoff frequency of nearly 57% has been obtained with the introduction of DG along with a deterioration in intrinsic gain.
本研究通过缩小器件的几何尺寸(包括栅极长度和势垒厚度),研究了 InAlN/GaN 高电子迁移率晶体管 (HEMT) 在不同工作温度下的性能。我们使用 Silvaco 的 Victory TCAD 仿真工具进行了广泛的仿真,从 ${I}_{text {on}}/{I}_{text {off}}$ 、本征增益、DIBL 和截止频率等方面分析了 InAlN HEMT 的直流和射频性能。为了加强器件长度增加时的射频性能,我们采用了双栅极(DG)结构[即栅极 1 (G1) 和栅极 2 (G2)],并使用不同的栅极偏压组合来研究器件性能。结果表明,本征增益和截止频率之间存在权衡。引入栅极偏置后,截止频率提高了近 57%,但本征增益却有所下降。
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引用次数: 0
Review of Nanosecond Pulse Generator With High-Power Switching Devices 使用大功率开关器件的纳秒脉冲发生器回顾
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3429300
Aashish Ranjan;Anand Abhishek;Niraj Kumar;Brijendra Kumar Verma
A nanosecond pulse generator (NSPG), with a high peak voltage, short-duration pulsewidth, high repetition rate, and fast rise/fall times, has gained traction and is now used in several applications such as plasma, biomedical, and industrial. The pulse characteristics vary with the type of application and these are affected by the choice of the switching devices in any topology and other elements of NSPG. Therefore, a variety of NSPGs have been researched, which makes the selection of any particular topology for NSPG development a challenging task. Thus, to address this gap, the literature presents a review of several conventional and state-of-the-art topologies of NSPG with high-power (HP) switching devices such as spark gap, solid-state switches, magnetic switches, and other elements for various applications. It also presents the pulse’s duration, voltage, current, power, rise/fall time, and repetition frequency for different applications. Furthermore, strategies for minimizing switching losses and other losses that substantially lower pulse generator efficiency are also discussed. Finally, a concise evaluation of available switching devices and other elements of NSPG, their pros and cons, and future directions are discussed to provide a clear understanding to designers and researchers.
纳秒脉冲发生器(NSPG)具有峰值电压高、脉宽持续时间短、重复率高和上升/下降时间快等特点,目前已在等离子体、生物医学和工业等多个领域得到广泛应用。脉冲特性随应用类型的不同而变化,并受到任何拓扑结构中开关器件的选择以及 NSPG 其他元素的影响。因此,人们对各种 NSPG 进行了研究,这使得为 NSPG 开发选择任何特定拓扑结构成为一项具有挑战性的任务。因此,为了填补这一空白,文献综述了几种传统和最先进的 NSPG 拓扑,包括火花间隙、固态开关、磁开关等大功率(HP)开关器件,以及用于各种应用的其他元件。报告还介绍了不同应用中的脉冲持续时间、电压、电流、功率、上升/下降时间和重复频率。此外,还讨论了如何最大限度地降低开关损耗和其他大大降低脉冲发生器效率的损耗。最后,还讨论了对现有开关器件和 NSPG 其他元件的简明评估、它们的优缺点和未来发展方向,以便让设计人员和研究人员有一个清晰的认识。
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引用次数: 0
Junction Formation Processing of MWIR Small-Pitch HgCdTe Detectors 中波红外小间距碲化镉汞探测器的结形成处理
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-01 DOI: 10.1109/TED.2024.3433313
Yu Zhao;Zhikai Gan;Chun Lin;Quanzhi Sun;Liqi Zhu;Songmin Zhou;Xi Wang;Xun Li
Small-pitch HgCdTe detector is a strong trend in IR imaging. It requires focal plane arrays with small pixels. The key factors including injection dose and Hg vacancy concentration during HgCdTe junction formation were studied. A special designed junction spacing experiment was used to directly measure the junction expansion. The simulation of junction expansion through numerical method was carried out to interpret the physical mechanism of junction expansion in HgCdTe. Moreover, a pixel array test using the suggested parameters obtained in junction spacing experiment and simulation was also carried out. It validates the correctness and effectiveness of the experiment and the numerical model. This work gives fundamental concept of junction formation in HgCdTe, shows the proper parameters for fabricating the small-pitch detectors, and provides numerical model for simulation and optimization of HgCdTe junction design.
小间距碲化镉汞探测器是红外成像技术的一个发展趋势。它需要具有小像素的焦平面阵列。研究了 HgCdTe 结形成过程中的注入剂量和汞空位浓度等关键因素。采用特殊设计的结间距实验直接测量结膨胀。通过数值方法模拟结膨胀,解释了碲化镉汞结膨胀的物理机制。此外,还利用结点间距实验和模拟得到的建议参数进行了像素阵列测试。这验证了实验和数值模型的正确性和有效性。这项研究给出了碲化镉汞结形成的基本概念,显示了制造小间距探测器的适当参数,并提供了用于模拟和优化碲化镉汞结设计的数值模型。
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引用次数: 0
Design of High-Performance UV-Visible Broadband Photodetector Using Cd-Doped ZnO/ZnO Thin-Film Heterostructure 利用掺镉氧化锌/氧化锌薄膜异质结构设计高性能紫外-可见光宽带光电探测器
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-31 DOI: 10.1109/TED.2024.3433315
Chiru Deepak Kalepu;Vasanthi Kondepati;K. Moatemsu Aier;Jay Chandra Dhar
Cd (3%)-doped ZnO TF/ZnO TF heterostructure (HS) was fabricated and studied for UV-Visible broadband photodetection application. X-ray diffraction (XRD) and field emission scanning electron microscope (FESEM) images confirmed the structural and morphological integrity of the HS. The HS showed better device performance both in UV and visible regions when compared with a reference ZnO TF sample. Enhancement in absorption intensity due to replacement of Zn ions by larger Cd ions and large photocurrent generation due to increase in carrier concentration via doping can be credited for the improved performance of the hybrid HS. Thus, achieving high spectral responsivity, R $_{lambda }$ [20.5 A/W (UV), 18 A/W (visible)] and fast photoresponse [ ${T}_{text {rise}} =0.31$ s, ${T}_{text {fall}} =0.53$ s (UV) and ${T}_{text {rise}} =0.27$ s, ${T}_{text {fall}} =0.29$ s (visible)] from the hybrid sample.
制备并研究了掺杂镉(3%)的 ZnO TF/ZnO TF 异质结构(HS),用于紫外-可见光宽带光电探测应用。X 射线衍射(XRD)和场发射扫描电子显微镜(FESEM)图像证实了 HS 结构和形态的完整性。与参考 ZnO TF 样品相比,HS 在紫外和可见光区域都显示出更好的器件性能。混合 HS 性能的提高归功于用较大的镉离子取代锌离子而增强的吸收强度,以及通过掺杂增加载流子浓度而产生的较大光电流。因此,混合样品实现了高光谱响应率 R $_{lambda }$ [20.5 A/W (紫外), 18 A/W (可见光)] 和快速光响应 [${T}_{text {rise}} =0.31$ s, ${T}_{text {fall}} =0.53$ s (紫外) 和 ${T}_{text {rise}} =0.27$ s, ${T}_{text {fall}} =0.29$ s (可见光)]。
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引用次数: 0
Imprint-Correlated Retention Loss in Hf₀.₅Zr₀.₅O₂ Ferroelectric Thin Film Through Wide-Temperature Characterizations 通过宽温特性分析 Hf$_{text{0}.text{5}}$Zr$_{text{0}.text{5}}$O$_{text{2}}$ 铁电薄膜中的印记相关保持损耗
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-31 DOI: 10.1109/TED.2024.3433317
Xiaopeng Li;Lu Tai;Pengpeng Sang;Xiaoyu Dou;Xuepeng Zhan;Hao Xu;Xiaolei Wang;Jixuan Wu;Jiezhi Chen
To address the concerns on the retention loss of HfO2-based ferroelectric (FE) devices in versatile applications, we conduct a comprehensive wide temperature range (250–400 K) characterization on a 9-nm Hf0.5Zr0.5O2 (HZO) film. It reveals that the retention will be damaged by the high temperature and incomplete polarization (fast speed and low amplitude operation). The dominant mechanism is believed to be the imprint effect, which occurs due to the migration of charged defects to the interface along the internal field caused by incomplete polarization. By addressing the intricacies of imprint behaviors and incomplete polarization, this work illuminates crucial aspects of retention loss in FE-HZO thin films.
为了解决基于 HfO2 的铁电(FE)器件在多功能应用中的保持损耗问题,我们对 9 纳米 Hf0.5Zr0.5O2 (HZO) 薄膜进行了全面的宽温度范围(250-400K)表征。结果表明,高温和不完全极化(快速和低振幅操作)会损坏薄膜的保持力。其主要机制被认为是印记效应,这是由于不完全极化导致带电缺陷沿着内部磁场迁移到界面而产生的。通过研究印迹行为和不完全极化的复杂性,这项研究揭示了 FE-HZO 薄膜保留损失的关键方面。
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引用次数: 0
A Comprehensive Physics-Based Compact Model for CNT Thin Film Transistors—Part II: Ohmic Contact 基于物理的 CNT 薄膜晶体管紧凑型综合模型--第二部分:欧姆接触
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-30 DOI: 10.1109/TED.2024.3421179
Srijeet Tripathy;Ambika Kumari;Tarun Kanti Bhattacharyya
In continuation to the preceding article, this part presents a study of electrical transport in Ohmic contact carbon nanotube thin film transistors (CNT TFTs). Here, the transistor model is implemented as a special case of the previously presented generalized model. Based on comparisons between simulated and experimental data, it is observed that optical phonon scattering in Ohmic contact CNT TFTs is fairly independent of gate and drain biases as opposed to the Schottky contact counterparts. Moreover, it is observed that transport is significantly affected by the channel length and alignment between CNTs as optical phonon scattering is found to be more pronounced for smaller channel lengths and greater alignments. The success of the model is supported by good agreement between simulations and a wide range of experimental data. This is verified by calculating the relative root mean square error (RMSE) which shows an average deviation in the order of ~15%. In comparison to previous CNT TFT models, this work introduces a generalized model, considering both Schottky and Ohmic contact-induced ambipolar and unipolar modes of transport, closely following the essential transport physics.
作为前一篇文章的延续,这一部分介绍了欧姆接触碳纳米管薄膜晶体管(CNT TFT)中的电气传输研究。在这里,晶体管模型是作为之前介绍的广义模型的一个特例来实现的。根据模拟数据和实验数据之间的比较,可以发现欧姆接触式 CNT TFT 中的光学声子散射与肖特基接触式 TFT 相比,与栅极和漏极偏置相当独立。此外,研究还发现,传输受到通道长度和 CNT 之间排列的显著影响,因为通道长度越小、排列越整齐,光声子散射越明显。模拟结果与大量实验数据之间的良好一致性证明了该模型的成功。通过计算相对均方根误差 (RMSE),可以验证这一点。与之前的 CNT TFT 模型相比,这项工作引入了一个通用模型,同时考虑了肖特基和欧姆接触诱导的常极性和单极性传输模式,密切遵循了基本的传输物理学原理。
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引用次数: 0
期刊
IEEE Transactions on Electron Devices
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