Pub Date : 2024-08-01DOI: 10.1109/TED.2024.3433835
Yan-Kui Liang;Wei-Li Li;Yu-Lon Lin;Dong-Ru Hsieh;Tsung-Ying Yang;Tsung-Te Chou;Chi-Chung Kei;Huai-Ying Huang;Yu-Ming Lin;Yuan-Chieh Tseng;Tien-Sheng Chao;Edward Yi Chang;Kasidit Toprasertpong;Shinichi Takagi;Chun-Hsiung Lin
In this study, we investigated the impact of inserting an interfacial layer (IL) between the InZnO channel and ZrO2/HfO2 superlattice (SL) ferroelectric (FE) gate-stack on the performance and stability of highly scaled FE thin-film transistors (FeTFTs). FeTFTs with various channel lengths (50–750 nm) were characterized to reveal the impact of two IL (i.e., TiO2 and Al2O3) on device characteristics. All the memory window (MW) contours of FeTFTs with a pulsewidth of 1 ms–100 ns and an amplitude of 2.5–5 V have been investigated. The FeTFT with TiO2 IL demonstrated impressive stability in MW ( $boldsymbol {Delta } $