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Corrections to “TCAD Simulations of Reconfigurable Field-Effect Transistor With Embedded-Fin-Contact to Improve On-Current” 对“可重构场效应晶体管嵌入翅片接触的TCAD模拟以改善导通电流”的修正
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/TED.2025.3606893
Chao Wang;Junfeng Hu;Ziyu Liu;Xiaojin Li;Yanling Shi;Yabin Sun
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引用次数: 0
IEEE Transactions on Electron Devices Information for Authors IEEE电子器件信息汇刊
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/TED.2025.3619313
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引用次数: 0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications 《IEEE电子器件学报:用于射频、功率和光电子应用的超宽带隙半导体器件》特刊征文
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/TED.2025.3619311
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引用次数: 0
In-Depth Electrical Characterization of Carrier Transport in Tellurium/Silicon Heterojunction-Based p-n Diode 碲/硅异质结p-n二极管载流子输运的深入电学表征
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-05 DOI: 10.1109/TED.2025.3626337
Yohan Kim;Gyuri Lim;Byeongjin Park;Jongwon Yoon;Yonghun Kim;Dae-Young Jeon
A comprehensive electrical characterization of a p-n diode constructed from a Te/n-Si heterostructure was presented in this work. Fabricated using CMOS-compatible RF sputtering, the device exhibited a typical diode behavior. Key electrical parameters including the ideality factor, series resistance, built-in potential, and interface state density were precisely extracted from temperature-dependent current–voltage measurements and capacitance–voltage analyses. The ideality factor decreased with increasing temperature, attributed to interface states and barrier inhomogeneities, while the decrease in series resistance with increasing temperature was a result of improved semiconductor conductivity due to increased intrinsic carrier concentration, reduced contact resistance at interfaces, and enhanced conduction through activated trap states. The reverse-bias current was dominated primarily by a thermal generation mechanism rather than by diffusion. Notably, the Te/n-Si diode demonstrated promising temperature sensing capabilities with a high sensitivity.
本文介绍了由Te/n-Si异质结构构成的p-n二极管的综合电学特性。该器件采用兼容cmos的射频溅射技术制备,具有典型的二极管特性。从温度相关的电流-电压测量和电容-电压分析中精确提取了理想因数、串联电阻、内置电位和界面状态密度等关键电气参数。理想因子随温度升高而降低,这是由于界面态和势垒的不均匀性,而串联电阻随温度升高而降低是由于半导体导电性的提高,这是由于固有载流子浓度的增加、界面接触电阻的降低以及激活阱态的导通增强。反偏置电流主要由热产生机制而不是扩散机制控制。值得注意的是,Te/n-Si二极管显示出具有高灵敏度的有前途的温度传感能力。
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引用次数: 0
Erratum to “Spatially Resolved Conductivity of Rectangular Interconnects Considering Surface Scattering—Part I: Physical Modeling” “考虑表面散射的矩形互连的空间分辨电导率-第一部分:物理建模”的勘误
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-03 DOI: 10.1109/TED.2025.3623957
Xinkang Chen;Sumeet Kumar Gupta
In the article referenced below [1], the following errors and their corrections should be noted. The derivations, results, and analyses in [1] use the correct equations, and therefore, these errors do not impact the other content in [1]. 1)In (3), the term $(v_{z}/v)$ in the integrand should be replaced by $(v_{z}^{2}/v)$ .2)In (5), there should be no negative sign before $(2q^{2}m_{mathrm {eff}}^{2}/h^{3})$ .3) In (6), (7), (13), and (16), the prefactor on the right-hand side multiplied with $sigma _{0}$ should be $3/(4pi)$ (instead of $3/4)$ . Similarly, in the equation for $(sigma _{mathrm {SRFS}}(y_{n})/sigma _{0})$ in (18), the prefactor on the right-hand side multiplied by the integral with respect to $theta $ should be $3/(4pi)$ (instead of $3/4)$ .
在[1]下面引用的文章中,应该注意以下错误及其更正。[1]中的推导、结果和分析使用了正确的方程,因此,这些错误不会影响[1]中的其他内容。1)式(3)中,被积式中的$(v_{z}/v)$应替换为$(v_{z}^{2}/v)$。2)式(5)中$(2q^{2}m_{mathrm {eff}}^{2}/h^{3})$前不应有负号。3)在式(6)、(7)、(13)、(16)中,右边的前因子与$sigma _{0}$相乘应该是$3/(4pi)$(而不是$3/4)$)。类似地,在式(18)中$(sigma _{mathrm {SRFS}}(y_{n})/sigma _{0})$的方程中,右边的前因子乘以对$theta $的积分应该是$3/(4pi)$(而不是$3/4)$)。
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引用次数: 0
Erratum to “Spatially Resolved Conductivity of Rectangular Interconnects Considering Surface Scattering—Part II: Circuit-Compatible Modeling” “考虑表面散射的矩形互连的空间分辨电导率-第二部分:电路兼容建模”的勘误
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-03 DOI: 10.1109/TED.2025.3623949
Xinkang Chen;Sumeet Kumar Gupta
In [1], the following error and its correction should be noted. The derivations, results, and analyses in [1] use the correct equations, and thus, this error does not impact the other content in [1].
在[1]中,应注意以下错误及其更正。[1]中的推导、结果和分析使用了正确的方程,因此,此错误不会影响[1]中的其他内容。
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引用次数: 0
Investigation on Cryogenic Reliability in FinFETs Under Hot Carrier Stress 热载流子应力下finfet低温可靠性研究
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-30 DOI: 10.1109/TED.2025.3623950
Zuoyuan Dong;Zirui Wang;Hongbo Wang;Xiaomei Li;Chen Luo;Jialu Huang;Lan Li;Zepeng Huang;Zixuan Sun;Yue-Yang Liu;Xing Wu;Runsheng Wang
Cryogenic CMOS technology is crucial for high-performance and quantum computing, but faces significant reliability challenges from exacerbated hot carrier degradation (HCD) at ultralow temperatures. In addition, cryogenic HCD (cryo-HCD) is further complicated by the coupling of cryogenic-specific phenomena, such as band tail states. In this work, a change temperature measure-stress-measure (MSM) method is established based on FinFET, which can separate the cryo-HCD from the effects of band tail states. It is found that additional Vth shifts under cryo-HCD in pFinFET at 10 K. The physical mechanism is revealed by advanced atomic-scale characterization [transmission electron microscope (TEM)/energy-dispersive X-ray spectroscopy (EDS)/electron energy-loss spectroscopy (EELS)], which identifies directional Ge migration from Si ${}_{{1}-{x}}$ Gex (SiGe) drain regions into the channel as the origin. Combined with ab initio calculations, we establish that this Ge migration suppresses band tail states, directly inducing the anomalous ${V} _{text {th}}$ shift. These findings offer fundamental insights into cryogenic degradation mechanisms, underscoring the crucial role of atomic-scale material transport, which is essential for cryogenic reliability.
低温CMOS技术对高性能和量子计算至关重要,但在超低温下,由于热载流子降解(HCD)加剧,其可靠性面临重大挑战。此外,低温HCD (cryo-HCD)由于带尾态等低温特有现象的耦合而进一步复杂化。本文建立了一种基于FinFET的变温-应力测量(MSM)方法,该方法可以将cryo-HCD与带尾状态的影响分离开来。发现在10k时,pFinFET在低温hcd下有额外的Vth移位。通过先进的原子尺度表征[透射电子显微镜(TEM)/能量色散x射线能谱(EDS)/电子能量损失能谱(EELS)]揭示了其物理机制,确定了Ge从Si ${}_{{1}-{x}}$ Gex (SiGe)漏极区向通道的定向迁移是成因。结合从头算,我们确定了这种Ge迁移抑制了带尾态,直接导致了异常的${V} _{text {th}}$移位。这些发现为低温降解机制提供了基本见解,强调了原子尺度材料输运的关键作用,这对低温可靠性至关重要。
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引用次数: 0
Multi-VT in Oxide--Semiconductor Transistors Leveraging Sub-1-nm Dipoles for Low-Refresh Energy Gain Cell Memory 利用亚1纳米偶极子实现低刷新能量增益单元存储的氧化物半导体晶体管
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-24 DOI: 10.1109/TED.2025.3616087
Fabia Farlin Athena;Jimin Kang;Matthias Passlack;Nathaniel Safron;Didem Dede;Koustav Jana;Balreen Saini;Xinxin Wang;Shuhan Liu;Jonathan Hartanto;Ethan Boneh;Hugo J.-Y. Chen;Chi-Hsin Huang;Qing Lin;Donglai Zhong;Kaitlyn Leitherer;Paul C. McIntyre;Gregory Pitner;Iuliana P. Radu;H.-S. Philip Wong
We demonstrate that inserting an ultrathin (<1> $mathrm {Al_{2}O_{3}}$ layer between an oxide–semiconductor (OS) channel and a high- $kappa $ gate dielectric creates an interface dipole (ID) that shifts the threshold voltage ( $textit {V} {_{text {T}}}$ ) of OS transistors. The ID engineering process by $mathrm {Al_{2}O_{3}}$ layer integration raises $textit {V} {_{text {T}}}$ of 2% W-doped indium tungsten oxide (IWO) FETs by ~450 mV relative to a reference $mathrm {HfO_{2}}$ stack, enabling normally-OFF operation with negligible degradation in mobility or subthreshold swing (SS). The $textit {V} {_{text {T}}}$ shift remains stable from 85 °C down to cryogenic temperatures. Under a worst case + 2-V positive bias stress at 85 °C, ID-engineered oxide–semiconductor field-effect transistors (OSFETs) exhibit a ~60-mV shift versus ~300 mV for the baseline device. The technique is effective across multiple OS channels [ $mathrm {In_{2}O_{3}}$ , indium–tin oxide (ITO) and indium–gallium–zinc oxide (IGZO)] and gate lengths down to ~50 nm. Simulations calibrated to the measured devices show that the leakage reduction afforded by ID engineering decreases refresh energy of two transistor gain cell (2T-GC) arrays by $sim {5}times {10} ^{{4}} times $ , establishing ID engineering as a low thermal budget knob for energy-efficient, high-density GC memories.
我们证明了在氧化物半导体(OS)通道和高$kappa $栅极电介质之间插入超薄($mathrm {Al_{2}O_{3}}$层)可以产生界面偶极子(ID),从而移动OS晶体管的阈值电压($textit {V} {_{text {T}}}$)。ID工程过程由$mathrm {Al_{2}O_{3}}$层集成提出$textit {V} {_{text {T}}}$的2个% W-doped indium tungsten oxide (IWO) FETs by ~450 mV relative to a reference $mathrm {HfO_{2}}$ stack, enabling normally-OFF operation with negligible degradation in mobility or subthreshold swing (SS). The $textit {V} {_{text {T}}}$ shift remains stable from 85 °C down to cryogenic temperatures. Under a worst case + 2-V positive bias stress at 85 °C, ID-engineered oxide–semiconductor field-effect transistors (OSFETs) exhibit a ~60-mV shift versus ~300 mV for the baseline device. The technique is effective across multiple OS channels [ $mathrm {In_{2}O_{3}}$ , indium–tin oxide (ITO) and indium–gallium–zinc oxide (IGZO)] and gate lengths down to ~50 nm. Simulations calibrated to the measured devices show that the leakage reduction afforded by ID engineering decreases refresh energy of two transistor gain cell (2T-GC) arrays by $sim {5}times {10} ^{{4}} times $ , establishing ID engineering as a low thermal budget knob for energy-efficient, high-density GC memories.
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引用次数: 0
Study of Defect-Induced Noise in Advanced MOSFETs for Cryogenic Operation 先进mosfet低温工作缺陷噪声研究
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-14 DOI: 10.1109/TED.2025.3613466
Dasom Lee;Tsu-Jae King Liu
Relevant to the cryogenic operation of CMOS integrated circuits, random telegraph noise (RTN) temperature dependence was investigated using FinFET devices fabricated using Samsung’s 14-nm process technology. Transistor drive current degradation due to trapped charge in the gate oxide is experimentally observed to worsen with decreasing temperature. A newfound dependence of trap capture and emission rates on drain voltage is observed and explained. Technology computer-aided design (TCAD) simulations using models calibrated to the measured data are then performed to investigate trends in RTN temperature dependence with transistor scaling (3-nm FinFET) and evolution [2-nm gate-all-around field-effect transistor (GAAFET)].
针对CMOS集成电路的低温工作,采用三星14nm工艺制造的FinFET器件,研究了随机电报噪声(RTN)的温度依赖性。由于栅极氧化物中捕获的电荷导致晶体管驱动电流退化,实验观察到随着温度的降低而恶化。观察并解释了疏水阱捕获率和发射率对漏极电压的依赖性。然后使用校准到测量数据的模型进行技术计算机辅助设计(TCAD)模拟,以研究晶体管缩放(3纳米FinFET)和演变[2纳米栅极全方位场效应晶体管(GAAFET)]对RTN温度依赖的趋势。
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引用次数: 0
Ultrasteep Subthreshold Slope Metal-Drain Dual-Type (p/n) Silicon Transistors: Characterization, Analysis, and Application 超陡亚阈斜率金属-漏极双型(p/n)硅晶体管:特性、分析和应用
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-09 DOI: 10.1109/TED.2025.3612318
Zhibo Chen;Baowei Yuan;Haobo Huang;Weiao Chen;Biyu Guo;Chengjie Tang;Yingxin Chen;Weizhuo Gan;Chunsong Zhao;Zhaozhao Hou;Qiang Zhang;Jiachen Gao;Jiale Wang;Jeffrey Xu;Guangxi Hu;Jing Wan;Ye Lu
The switching efficiency of conventional silicon-based field-effect transistors (FETs) is fundamentally constrained by their 60-mV/dec subthreshold swing (SS) lower bound. Recently, we proposed an Al-drain FET to overcome this limitation. In this work, we further design and experimentally demonstrate dual types of (p/n) silicon transistors featuring various metal-drain (MD) structure MD field effect transistor (MDFET). Particularly, Al and Ti are selected for n-type MDFET, while Pt is adapted for p-type MDFET based on their work function. Measurement results show that both n-type and p-type MDFETs achieve ultrasteep average SS ( $ll$ 10 mV/dec) over multiple decades of current. In addition, TCAD simulations have been performed, and the simulation results agree well with experimental data qualitatively. Detailed analysis reveals that the Schottky junction at the metal–silicon drain interface induces a localized electric field amplification ( $gt 1.66times $ compared to conventional doped silicon drain) and extends the depletion region, synergistically enhancing impact ionization (II) of carriers. This mechanism establishes a regenerative feedback loop, enabling ultrasteep switching behavior. Finally, a compact model of MDFET is created for circuit simulation, and an inverter circuit composed of pMOS and n-type MDFET is constructed experimentally. Both measured data and model simulation agree well, illustrating the potential of MDFET for CMOS-compatible low-power logic applications.
传统硅基场效应晶体管(fet)的开关效率从根本上受到其60 mv /dec亚阈值摆幅(SS)下限的限制。最近,我们提出了一种铝漏场效应管来克服这一限制。在这项工作中,我们进一步设计和实验证明了具有各种金属漏极(MD)结构的MD场效应晶体管(MDFET)的双类型(p/n)硅晶体管。其中Al和Ti选择用于n型MDFET, Pt根据其功函数选择用于p型MDFET。测量结果表明,在数十年的电流下,n型和p型mdfet均可实现超陡的平均SS ($ $ 10 mV/dec)。此外,还进行了TCAD仿真,仿真结果与实验数据定性吻合较好。详细分析表明,金属硅漏极界面处的肖特基结引起局域电场放大(与传统掺杂硅漏极相比为1.66倍),并扩大了耗尽区,协同增强了载流子的冲击电离(II)。该机制建立了一个再生反馈回路,使超陡开关行为成为可能。最后,建立了紧凑的MDFET模型进行电路仿真,并实验构建了由pMOS和n型MDFET组成的逆变电路。测量数据和模型仿真结果吻合良好,说明了MDFET在cmos兼容低功耗逻辑应用中的潜力。
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引用次数: 0
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IEEE Transactions on Electron Devices
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