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Area-Adjusted Comparison of BSPDN Interconnects in CFET: Superiority of Frontside Connection 在CFET中BSPDN互连的面积调整比较:前端连接的优越性
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-29 DOI: 10.1109/TED.2025.3608778
Jimyoung Lee;Seung Kyu Kim;Kwang Young Lee;Jongwook Jeon
The complementary field-effect transistors (CFETs) are promising for next-generation logic devices, but tall vias (TVs) face challenges, including high resistance, parasitic capacitance, and metal void defects. This study evaluates three source-side to backside power delivery network (BSPDN) interconnect structures: conventional TV, line-type TV (LTV), and frontside connection (FSC). FSC utilizes frontside metal lines with power tap cells (PTCs) for front-to-back connectivity, offering a scalable solution. Through 3D-TCAD simulations, we analyze their cell-level and area-adjusted performance. FSC achieves a + 2.2% higher frequency at the same power (Freq. at $P$ ) and a −4.7% lower power at the same frequency (Power at F) compared to TV, while maintaining consistent performance across cell height (CH) scaling. In contrast, TV and LTV exhibit degradation due to increased resistance and capacitance at reduced CH. FSC’s sweet zone (12–71 CPPs) ensures sufficient margin for PTC insertion, delivering a 1.7% Freq. at $P$ gain at 31 CPPs and 12% area reduction at zero frequency offset. Notably, FSC’s compatibility with nonvertical via profiles (essential for void prevention) further enhances its advantages in real processes. These results demonstrate FSC’s superior power, performance, and area (PPA) characteristics, positioning it as a robust alternative to TV/LTV for CFET architectures. The study provides critical insights for advancing the next-generation logic devices.
互补场效应晶体管(cfet)在下一代逻辑器件中很有前景,但高过孔(tv)面临挑战,包括高电阻、寄生电容和金属空洞缺陷。本研究评估三种源端到后端输电网络(BSPDN)互连结构:传统电视、线路型电视(LTV)和前端连接(FSC)。FSC采用前端金属线与电源分接电池(ptc)进行前后连接,提供可扩展的解决方案。通过3D-TCAD仿真,我们分析了它们的单元级和面积调整性能。与TV相比,FSC在相同功率下实现了+ 2.2%的高频率(频率在$P$)和- 4.7%的低功率(功率在F),同时保持了跨小区高度(CH)比例的一致性能。相比之下,TV和LTV由于降低CH时电阻和电容的增加而表现出退化。FSC的甜蜜区(12-71 CPPs)确保了PTC插入的足够余量,在31 CPPs时提供1.7%的频率增益,在零频率偏移时提供12%的面积减少。值得注意的是,FSC与非垂直通孔型材的兼容性进一步增强了其在实际工艺中的优势。这些结果证明了FSC优越的功率、性能和面积(PPA)特性,使其成为CFET架构中TV/LTV的强大替代品。该研究为推进下一代逻辑器件提供了重要的见解。
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引用次数: 0
Ultraviolet Light-Driven Artificial Neuromorphic Properties in Organic Transistors for Reservoir Computing and Encrypted Communication 用于储层计算和加密通信的有机晶体管的紫外光驱动人工神经形态特性
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-26 DOI: 10.1109/TED.2025.3612316
Muhammad Asghar Khan;Yelim Kang;Muhammad Farooq Khan;Shania Rehman;Min Jong Lee;Sang Heon Lee;Seunghyun Oh;Tae Hyuk Kim;Seon Joong Kim;Hyungju Ahn;Jae Won Shim
Organic semiconductors exhibit significant potential for application in artificial neuromorphic computing because of their unique electrical and optoelectronic properties. In this study, we explore the potential of the nonfullerene Y6 (also known as BTP-4F) organic semiconductor material in optoelectronic neuromorphic computing, image recognition, reservoir computing (RC), and wireless encrypted communication. The organic field-effect transistor (OFET) constructed using the Y6 polymer exhibits n-type semiconductor behavior with a current on–off ( $I_{mathrm{ON}} / I_{mathrm{OFF}}$ ) ratio of approximately $10^{{2}}$ as well as excellent synaptic functionalities under ultraviolet (UV) light. The synaptic plasticity of OFET is demonstrated to be optically controllable using incident light of 220-nm wavelength. Notably, the transition from short-term memory (STM) to long-term memory (LTM) could be modulated by manipulating pulse time, pulse number, and pulse interval. Furthermore, image recognition on the Modified National Institute of Standards and Technology (MNIST) dataset using the fabricated device in conjunction with a convolutional neural network (CNN) is observed to yield an excellent accuracy of 93.4%. Moreover, we demonstrate the application of Y6 OFET in a 4-bit RC for digit classification. Finally, optically encrypted communication is also achieved based on the international Morse code. These findings demonstrate the potential of Y6-based OFETs in neuromorphic computing, RC, and encrypted communication, paving the way for innovations in brain-inspired computing and artificial intelligence (AI) hardware.
有机半导体由于其独特的电学和光电子特性,在人工神经形态计算中表现出巨大的应用潜力。在这项研究中,我们探索了非富勒烯Y6(也称为BTP-4F)有机半导体材料在光电神经形态计算、图像识别、储层计算(RC)和无线加密通信方面的潜力。使用Y6聚合物构建的有机场效应晶体管(OFET)具有n型半导体性能,电流开关($I_{ mathm {ON}} / $I_{ mathm {OFF}}}$)比约为$10^{{2}}$,并且在紫外线(UV)光下具有优异的突触功能。利用220 nm波长的入射光,证明了OFET的突触可塑性是光学可控的。值得注意的是,从短期记忆(STM)到长期记忆(LTM)的转变可以通过控制脉冲时间、脉冲数和脉冲间隔来调节。此外,在修改后的美国国家标准与技术研究所(MNIST)数据集上,使用制造的设备与卷积神经网络(CNN)相结合,观察到图像识别的准确率达到了93.4%。此外,我们还演示了Y6 OFET在4位RC中的数字分类应用。最后,在国际摩尔斯电码的基础上实现了光加密通信。这些发现证明了基于y6的ofet在神经形态计算、RC和加密通信方面的潜力,为大脑启发计算和人工智能(AI)硬件的创新铺平了道路。
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引用次数: 0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications 《IEEE电子器件学报:用于射频、功率和光电子应用的超宽带隙半导体器件》特刊征文
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3608842
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引用次数: 0
IEEE Transactions on Electron Devices Information for Authors IEEE电子器件信息汇刊
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3608844
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引用次数: 0
Extreme EOT Scaling in Tungsten-Doped In2O3 MOSFETs for Enhanced Stability and Drive Current 钨掺杂In2O3 mosfet的极端EOT缩放以增强稳定性和驱动电流
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3612345
Hyeonwoo Park;Sharadindu Gopal Kirtania;Eknath Sarkar;Dyutimoy Chakraborty;Chengyang Zhang;Hyun Jae Lee;Jaewon Shin;Shimeng Yu;Asif Khan;H. Kim;C. Im;M. J. Hong;Daewon Ha;Suman Datta
Gate oxide scaling is essential for enhancing the performance of amorphous oxide semiconductor (AOS) field-effect transistors, yet it remains limited by charge trapping and interface quality. In this work, we demonstrate tungsten-doped In2O3 indium–tungsten oxide (IWO) MOSFETs incorporating an amorphous HfO2/ZrO2/HfO2 (HZH) trilayer gate dielectric that achieves an equivalent oxide thickness (EOT) as low as $3~unicode{0x00C5}$ . The transistors exhibit near-ideal subthreshold swing (SS) (75 mV/decade), high on-state current ( $gt 240~{mu }$ A/ $mu $ m), and suppressed gate leakage even at this extreme limit of EOT scaling. Positive bias-stress (PBS) tests reveal improved reliability in HZH compared with conventional HfO2, with minimal threshold voltage shift. Through density-gradient-based numerical modeling and analytical stress-recovery simulations, we show that these improvements originate from spatial and energetic redistribution of oxygen vacancy induced traps into the ZrO2-rich region, away from the channel interface. The consequent reduction in the density of acceptor-like subgap states collectively improves carrier mobility and mitigates trap-limited conduction (TLC). These results highlight the potential of targeted gate-stack engineering in extending conventional EOT scaling benefits to AOS transistors.
栅极氧化标度是提高非晶氧化物半导体(AOS)场效应晶体管性能的必要条件,但它仍然受到电荷俘获和界面质量的限制。在这项工作中,我们展示了掺杂钨的In2O3氧化铟钨(IWO) mosfet,其中包含非晶HfO2/ZrO2/HfO2 (HZH)三层栅极电介质,其等效氧化物厚度(EOT)低至$3~unicode{0x00C5}$。该晶体管表现出接近理想的亚阈值摆幅(SS) (75 mV/ 10年),高导通电流($gt 240~{mu}$ A/ $mu $ m),即使在EOT标度的极限下也能抑制栅极泄漏。正偏置应力(PBS)试验表明,与传统的HfO2相比,HZH的可靠性得到了提高,阈值电压偏移最小。通过基于密度梯度的数值模拟和应力恢复分析模拟,我们发现这些改善源于氧空位诱导的圈闭在远离通道界面的富zro2区域的空间和能量重新分配。因此,受体类亚隙态密度的降低共同提高了载流子迁移率并减轻了陷阱限制传导(TLC)。这些结果突出了目标栅极堆栈工程在将传统EOT缩放优势扩展到AOS晶体管方面的潜力。
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引用次数: 0
A Compact Wireless Passive Pressure Sensor With High Sensitivity and Resolution Based on MEMS–FPCB Integration 基于MEMS-FPCB集成的小型高灵敏度、高分辨率无线无源压力传感器
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3609307
Xiaolei Zhang;Jiahao Lin;Chuandu Zhang;Wei Xu
The accurate monitoring of low-range pressure variations is crucial in many biomedical and wearable sensing applications, where abnormal pressure levels can indicate potential health risks. This brief presents a passive wireless inductor–capacitor (LC) pressure sensor, developed using MEMS and flexible printed circuit board (FPCB) technologies for low-range pressure monitoring. The sensor comprises a 16.2- $mu $ m-thick MEMS layer with a 2-mm circular electrode, a bottom electrode with an integrated spiral inductor on the FPCB, and a 50- $mu $ m laser-cut polyimide (PI) intermediate layer forming the capacitive structure. Simulations and experimental evaluations in a controlled low-pressure water environment confirmed stable performance and close agreement between theoretical and measured responses over the 100–5000-Pa range. By accounting for parasitic capacitance effects from water environments and interlayer interactions, the sensor still achieves a high average sensitivity of 5.15 MHz/kPa, a fine resolution of 25 Pa, and a low-temperature coefficient of frequency (TCF) of 173 ppm/°C. With its compact, flexible, and wireless design, the proposed sensor holds strong potential for continuous physiological pressure monitoring.
在许多生物医学和可穿戴传感应用中,准确监测低压变化是至关重要的,在这些应用中,异常的压力水平可能表明潜在的健康风险。本文介绍了一种无源无线电感-电容(LC)压力传感器,该传感器采用MEMS和柔性印刷电路板(FPCB)技术开发,用于低压监测。该传感器包括16.2- $mu $ m厚的MEMS层和2 mm圆形电极,FPCB上带有集成螺旋电感的底电极,以及50- $mu $ m激光切割聚酰亚胺(PI)中间层,形成电容结构。在受控的低压水环境中进行的模拟和实验评估证实了其稳定的性能,并且在100 - 5000 pa范围内的理论响应和测量响应之间具有密切的一致性。考虑到水环境和层间相互作用的寄生电容效应,该传感器仍然达到5.15 MHz/kPa的高平均灵敏度,25 Pa的精细分辨率和173 ppm/°C的低温频率系数(TCF)。由于其紧凑、灵活和无线设计,该传感器具有持续生理压力监测的巨大潜力。
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引用次数: 0
Synaptic Plasticity and Learning Behavior Emulated in CuI-ITO Transistors 在CuI-ITO电晶体中模拟突触可塑性与学习行为
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3609305
Yuling Peng;Wei Dou;Jiangyun Lei;Pengfei Chen;Xiaodong Xu;Dongsheng Tang
Synaptic transistors are fabricated using chitosan as the gate dielectric and CuI with sputtered ITO as the channel. Surface charge-transfer doping from the ITO enhanced the performance and operational stability of the devices. Meanwhile, the application of voltage pulses enables the devices to emulate synaptic characteristics, including excitatory postsynaptic currents (EPSCs), inhibitory postsynaptic currents (IPSCs), paired-pulse facilitation (PPF), short-term plasticity (STP), and spike-frequency-dependent plasticity (SFDP). Furthermore, the transistors exhibit the capacity to modulate synaptic weights bidirectionally by realizing both long-term potentiation (LTP) and long-term depression (LTD), with good repeatability. The biomimetic synaptic properties of the devices enable them to emulate the learning behaviors observed in biological systems. These findings highlight the potential of CuI-ITO transistors in neuromorphic applications that demand adaptive learning and real-time signal processing, thereby offering a promising pathway toward the advancement of artificial intelligence systems.
以壳聚糖为栅极电介质,以CuI为栅极电介质,以溅射ITO为通道制备突触晶体管。ITO表面电荷转移掺杂提高了器件的性能和工作稳定性。同时,电压脉冲的应用使设备能够模拟突触特性,包括兴奋性突触后电流(EPSCs)、抑制性突触后电流(IPSCs)、成对脉冲促进(PPF)、短期可塑性(STP)和峰值频率依赖性可塑性(SFDP)。此外,晶体管通过实现长时程增强(LTP)和长时程抑制(LTD)表现出双向调节突触权重的能力,具有良好的可重复性。这些装置的仿生突触特性使它们能够模拟在生物系统中观察到的学习行为。这些发现突出了gui - ito晶体管在需要自适应学习和实时信号处理的神经形态应用中的潜力,从而为人工智能系统的发展提供了一条有希望的途径。
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引用次数: 0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Reliability of Advanced Nodes 《IEEE电子设备学报:高级节点的可靠性》特刊征文
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TED.2025.3608840
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引用次数: 0
A Gate-All-Around Oxide Semiconductor FETs With Selectively Crystallized InGaOₓ Channel for Performance and Reliability Improvement 一种具有选择性结晶InGaOₓ通道的栅极全能氧化物半导体场效应管,用于性能和可靠性的改善
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-17 DOI: 10.1109/TED.2025.3605574
Ki-Woong Park;Anlan Chen;Kota Sakai;Sunbin Hwang;Xingyu Huang;Takuya Saraya;Toshiro Hiramoto;Takanori Takahashi;Mutsunori Uenuma;Yukiharu Uraoka;Masaharu Kobayashi
In this article, we report performance enhancement and reliability improvement of oxide semiconductor FETs (OS FETs) by polycrystalline Ga-doped InOx (poly-IGO). Atomic layer deposition (ALD) and post-deposition annealing (PDA) were employed to achieve crystallization of IGO. A systematic study of bottom-gate (BG) FETs with varied Ga concentrations and film thicknesses identified optimized conditions yielding a mobility up to 81 cm2/V $cdot $ s. Low-temperature measurements were conducted to physically understand the mobility improvement. The carrier transport mechanisms were discussed. Then, we developed a novel selective crystallization method in the OS stack for process integration and device operation of gate-all-around (GAA) nanosheet (NS) IGO FETs. The fabricated GAA IGO FETs showed normally-off operation, high on-current of $326~mu $ A/ $mu $ m, and a steep subthreshold slope of 68 mV/dec. In addition, GAA NS FETs exhibited further improved bias stress stability. This work provides a scalable strategy of poly-OS channels for monolithic 3-D (M3D) integration and 3-D memory such as 3-D DRAM and 3-D NAND.
在本文中,我们报道了用多晶掺ga的InOx (poly-IGO)提高氧化物半导体场效应管(OS fet)的性能和可靠性。采用原子层沉积(ALD)和沉积后退火(PDA)实现IGO的结晶。对不同Ga浓度和薄膜厚度的底栅场效应管(BG)进行了系统研究,确定了迁移率高达81 cm2/V的优化条件。通过低温测量来物理理解迁移率的改善。讨论了载流子输运机理。然后,我们在OS堆栈中开发了一种新的选择性结晶方法,用于栅极全方位(GAA)纳米片(NS) IGO场效应管的工艺集成和器件操作。所制备的GAA IGO场效应管具有正常关断、高导通电流($326~mu $ A/ $mu $ m)和高亚阈值斜率($ 68 mV/dec)的特点。此外,GAA NS fet表现出进一步改善的偏置应力稳定性。这项工作为单片3-D (M3D)集成和3-D DRAM和3-D NAND等3-D存储器提供了一种可扩展的多操作系统通道策略。
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引用次数: 0
Gate-Tunable Synaptic Transistors Based on P-Type SnO for Complementary Neuromorphic System 互补神经形态系统中基于p型SnO的门可调谐突触晶体管
IF 3.2 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TED.2025.3605320
Yuzhuo Yuan;Guangshun Li;Daohui Ge;Tingting Liu;Qian Xin;Aimin Song
Neuromorphic system may overcome von Neumann bottleneck and achieve higher computational efficiency. Among various approaches, oxide-based synaptic transistors have gained significant attention due to their tunable physical properties and compatibility with large-area industrial manufacturing. However, most reported artificial synapses are n-type, while p-type remain scarce. In this article, p-type tin monoxide (SnO) transistor with high hysteresis current of 1157.5 nA is realized by optimizing the annealing condition. Both excitatory and inhibitory plasticity can be realized within a single thin-film transistor (TFT) device, enhancing its functionality for neuromorphic applications. The observed linear dependence of postsynaptic current on the spike voltage simplifies computation complexity and enhancing efficiency. Additionally, essential synaptic functions including spike-duration dependent plasticity (SDDP), paired-pulse facilitation (PPF), paired-pulse depression (PPD), AtkinsonShiffrin memory mode, high-pass filter, spike-timingdependent plasticity (STDP), and anti-STDP are also successfully simulated. Furthermore, the p-type SnO material demonstrates low cytotoxicity. The synaptic plasticity of p-type SnO-based synaptic transistor effectively mimics biological synapse behavior, highlighting its potential to construct high-performance complementary neuromorphic systems.
神经形态系统可以克服冯·诺依曼瓶颈,实现更高的计算效率。在各种方法中,基于氧化物的突触晶体管由于其可调谐的物理特性和与大面积工业制造的兼容性而受到了极大的关注。然而,大多数报道的人工突触是n型的,而p型的仍然很少。本文通过优化退火条件,实现了高滞后电流为1157.5 nA的p型氧化锡(SnO)晶体管。兴奋性和抑制性可塑性可以在单个薄膜晶体管(TFT)器件内实现,增强了其在神经形态应用中的功能。突触后电流与尖峰电压呈线性关系,简化了计算复杂度,提高了计算效率。此外,基本的突触功能包括脉冲持续依赖性可塑性(SDDP)、配对脉冲促进(PPF)、配对脉冲抑制(PPD)、atkinson - shiffrin记忆模式、高通滤波器、脉冲时间依赖性可塑性(STDP)和反STDP也被成功模拟。此外,p型SnO材料具有较低的细胞毒性。p型sno基突触晶体管的突触可塑性有效地模拟了生物突触行为,突出了其构建高性能互补神经形态系统的潜力。
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引用次数: 0
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IEEE Transactions on Electron Devices
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