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Impact of Temperature on Digital Integrated Circuits in a 4H-SiC CMOS Technology 温度对 4H-SiC CMOS 技术中数字集成电路的影响
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3487814
Zewei Dong;Yun Bai;Chengyue Yang;Yidan Tang;Jilong Hao;Xuan Li;Xiaoli Tian;Xinyu Liu
This article reports the influence of temperature on digital ICs fabricated in 4H-SiC CMOS process technology. The performances of CMOS devices were compared and analyzed at different drain voltages from 25 °C to 500 °C. The current-output capability of n-channel MOSFET improves with increasing temperature up to 500 °C, while that of p-channel MOSFET reaches an optimum at nearly 350 °C. The current-output capability of n-channel MOSFET is limited to lower than that of p-channel MOSFET below a temperature point when the drain voltage rises, due to the velocity saturation of electrons. Furthermore, the value of temperature point increases with higher drain voltage. A typical inverter was characterized and analyzed in detail based on the characteristics of CMOS devices. The fall/rise time and high-to-low/low-to-high propagation delay time show a similar temperature characteristic of the drain current of n- and p-channel MOSFETs, respectively. Compared to fall and rise times, the high-to-low and low-to-high propagation delay times intersect at a higher temperature because of the different drain voltages when extracting parameters. The temperature characteristics, including the oscillation frequency of ring oscillators and the output current of gate driver, were also analyzed through the performances of CMOS devices.
本文报道了温度对采用4H-SiC CMOS工艺制作数字集成电路的影响。对比分析了CMOS器件在25 ~ 500℃漏极电压下的性能。n沟道MOSFET的电流输出能力随着温度的升高而提高,最高可达500°C,而p沟道MOSFET的电流输出能力在接近350°C时达到最佳。当漏极电压升高时,由于电子的速度饱和,n沟道MOSFET的电流输出能力被限制在低于p沟道MOSFET的温度点。漏极电压越高,温度点越高。基于CMOS器件的特点,对一种典型逆变器进行了详细的表征和分析。下降/上升时间和从高到低/从低到高的传播延迟时间分别显示出n沟道和p沟道mosfet漏极电流的相似温度特性。与上升时间和下降时间相比,在提取参数时,由于漏极电压的不同,高到低和低到高的传播延迟时间在更高的温度下相交。通过CMOS器件的性能分析了环振的温度特性,包括环振的振荡频率和栅极驱动器的输出电流。
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引用次数: 0
The Trade-Off Between Microwave Frequency and Output Power in SiC Photoconductive Switches Based on Carrier Lifetime 基于载波寿命的SiC光导开关微波频率与输出功率的权衡
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3499936
Ting He;Muyu Yi;Xinyue Niu;Jinmei Yao;Tao Xun;Langning Wang;Ting Shu
The trade-off between microwave frequency and output power in VCSI 4H-silicon carbide (SiC) photoconductive semiconductor switch (PCSSs), based on carrier lifetime is investigated. PCSSs with two different vanadium doping concentrations are fabricated and tested across a frequency range of 0.5–2 GHz. The output power and modulation depth ratio trends with microwave frequency indicate a trade-off between microwave frequency and output power. The two devices exhibit output powers of approximately 40 W (@0.5 GHz) and 160 W (@0.5 GHz), respectively. Employing transient absorption (TA) techniques, the carrier lifetime of the two devices is determined to be 30 and 460 ps, revealing a relationship between longer carrier lifetime and increased output power. Nevertheless, the longer carrier lifetime also leads to a lower modulation depth ratio. Furthermore, when carrier lifetime ceases to be the primary constraining factor for the device’s frequency response, the upper cut-off frequency is constrained by the interstage capacitance.
研究了基于载流子寿命的VCSI 4h -碳化硅(SiC)光导半导体开关(pcss)中微波频率与输出功率之间的权衡关系。制备了两种不同钒掺杂浓度的pcss,并在0.5-2 GHz的频率范围内进行了测试。输出功率和调制深度比随微波频率的变化趋势表明微波频率和输出功率之间存在权衡关系。这两种器件的输出功率分别约为40w (@0.5 GHz)和160w (@0.5 GHz)。采用瞬态吸收(TA)技术,确定了两个器件的载流子寿命分别为30和460 ps,揭示了载流子寿命延长与输出功率增加之间的关系。然而,较长的载波寿命也导致较低的调制深度比。此外,当载波寿命不再是器件频率响应的主要限制因素时,上截止频率受到级间电容的限制。
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引用次数: 0
A Structural Impact Study and Process Optimization of FinFET Parasitic Capacitance FinFET寄生电容的结构影响研究及工艺优化
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3496446
Yi Gu;Chengkang Tang;Xianghui Li;Qingqing Sun;David Wei Zhang;Hao Zhu
While excelling in device density and driving capability, the fin field-effect transistor (FinFET) development has highlighted the increasing impact of parasitic capacitance on high-frequency performance. Here, we report a comprehensive impact study of FinFET structures and key process on the parasitic capacitance, particularly the gate-source/drain (S/D) capacitance ( ${C} _{text {G-SD}}$ ). By TCAD simulation, the optimal structural parameters of the fin and S/D geometry have been identified with improved dc performance as well as ${C} _{text {G-SD}}$ characteristics. The parasitic ${C} _{text {G-SD}}$ is further suppressed by optimized high-k/metal gate (HKMG) critical process steps. Enhanced ac performance is experimentally achieved realizing over 20% improvement in cutoff frequency ( ${f} _{text {T}}$ ) and maximum oscillation frequency ( ${f} _{max }$ ) as compared to baseline (320.4-GHz ${f} _{text {T}}$ and 362.2-GHz ${f} _{max }$ for nMOS and 393-GHz ${f} _{text {T}}$ and 168-GHz ${f} _{max }$ for pMOS). The results demonstrate practical potential in both device-level and circuit-level engineering toward advanced FinFET-based high-frequency applications.
在器件密度和驱动能力方面表现优异的同时,翅片场效应晶体管(FinFET)的发展也凸显出寄生电容对高频性能的影响越来越大。在这里,我们报告了FinFET结构和关键工艺对寄生电容的全面影响研究,特别是栅源/漏极(S/D)电容(${C} _{text {G-SD}}}$)。通过TCAD仿真,确定了最优的翅片结构参数和S/D几何形状,提高了直流性能和${C} _{text {G-SD}}$特性。通过优化的高k/金属栅(HKMG)关键工艺步骤进一步抑制了寄生的${C} _{text {G-SD}}$。与基线(nMOS为320.4 ghz ${f} _{text {T}}$和362.2 ghz ${f} _{max}$, pMOS为393 ghz ${f} _{text {T}}$和168 ghz ${f} _{max}$)相比,在截止频率(${f} _{text {T}}$)和最大振荡频率(${f} _{max}$)方面提高了20%以上。结果表明,在器件级和电路级工程中,基于finfet的先进高频应用具有实际潜力。
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引用次数: 0
Interface Optimization and Temperature Reliability Estimation of ErₓYyO/Si Gate Stacks by ALD-Derived AlN Passivation Layer 基于ald衍生AlN钝化层的ErₓYyO/Si栅极堆界面优化及温度可靠性评估
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3499948
Li Cheng;Gang He;Can Fu;Shanshan Jiang;Zebo Fang
A detailed investigation into the effects of atomic layer deposition (ALD)-derived AlN passivation layer on the interface chemistry, temperature stability, and leakage current conduction mechanism (LCCM) of ErxYyO/Si gate stacks has been carried out in this work. The findings have indicated that ALD-driven AlN passivation layer significantly suppresses the diffusion of substrate elements, thereby enhancing the quality of the interface. X-ray photoelectron spectroscopy (XPS) analysis revealed that the low valence oxides of silicon decrease with the increase of the passivation period, thus improving the interface state. Electrical characterizations demonstrated that the samples treated with 40 cycles of passivation exhibited the best electrical properties, including a high dielectric constant (17.69) and a low leakage current density of $7.16times 10^{-{8}}$ A/cm2. The interfacial state density, as determined by the conductivity method, indicated that the passivation treatment was effective in controlling the interfacial quality, demonstrating the lowest interfacial state density ( $3.79times 10^{{12}}$ eV $^{-{1}}cdot $ cm−2) observed for the S2 sample. Temperature stability studies have demonstrated that high temperature leads to the decrease device stability, which can be mitigated by the AlN passivation layer. LCCM analysis has revealed that Schottky emission (SE) dominates at low electric fields, while Poole-Frenkel (PF) emission dominates at medium to high electric fields, and Fowler-Nordheim (FN) tunneling is exhibited at high electric fields. These findings suggest that the ErxYyO gate dielectric treated with AlN passivation layer exhibits excellent electrical properties and improved interface quality. Consequently, ALD-processed AlN may be a promising candidate for the passivation layer of metal-oxide–semiconductor (MOS) devices in the future.
本文详细研究了原子层沉积(ALD)引发的AlN钝化层对ErxYyO/Si栅极堆界面化学、温度稳定性和漏电流传导机制(LCCM)的影响。结果表明,ald驱动的AlN钝化层显著抑制了衬底元素的扩散,从而提高了界面质量。x射线光电子能谱(XPS)分析表明,随着钝化时间的延长,硅的低价氧化物减少,从而改善了界面状态。电学表征表明,经过40次钝化循环处理的样品具有最佳的电学性能,包括高介电常数(17.69)和低漏电流密度(7.16 × 10^{-{8}}$ a /cm2)。电导率法测定的界面态密度表明,钝化处理对控制界面质量是有效的,S2样品的界面态密度最低($3.79乘以10^{{12}}$ eV $^{-{1}}cdot $ cm−2)。温度稳定性研究表明,高温会导致器件稳定性下降,这可以通过AlN钝化层来缓解。LCCM分析表明,低电场条件下以肖特基发射(SE)为主,中、高电场条件下以普尔-弗伦克尔(PF)发射为主,高电场条件下以Fowler-Nordheim (FN)隧穿为主。这些结果表明,经过AlN钝化层处理的ErxYyO栅极电介质具有优异的电学性能和改善的界面质量。因此,ald处理的AlN可能是未来金属氧化物半导体(MOS)器件钝化层的有希望的候选者。
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引用次数: 0
Highly Robust All-Oxide Transistors Toward Vertical Logic and Memory 面向垂直逻辑和存储器的高鲁棒全氧化物晶体管
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3495632
Zehao Lin;Zhuocheng Zhang;Chang Niu;Hongyi Dou;Ke Xu;Mir Md Fahimul Islam;Jian-Yu Lin;Changhyuck Sung;Minji Hong;Daewon Ha;Haiyan Wang;Muhammad Ashraful Alam;Peide. D. Ye
In this work, we report atomic-layer-deposited (ALD) based all-oxide transistors toward vertically stacked high-density logic and memory for 3-D integration. This structure utilizes thick degenerated ALD In2O3 as the conducting gate, and ALD In2O3 thin film itself serves as source/drain contacts to the ALD In2O3 channel without metal contacts and gate formation. The all-oxide field-effect transistors (AOFETs) not only survived under high-temperature annealing over $400~^{circ }$ C but also gained a boosted on-/off-ratio over $10^{{7}}$ with subthreshold swing (SS) close to 60 mV/dec at room temperature. AOFETs present high uniformity and very robust reliability with a threshold voltage instability ( $boldsymbol {Delta } {V}_{text {TH}}text {)}$ of −5 and −50 mV under positive bias stress (PBS) and negative bias stress (NBS) tests for $10^{{4}}$ s. The vertical AOFETs (V-AOFETs) demonstrate good gate modulation from sidewall In2O3 with thickness as well as gate length ( ${T}_{text {IO,{g}}}text {)}$ of 10 nm, achieving on-/off-ratio over $10^{{5}}$ and maximum current ( ${I}_{max }text {)}$ over $160~boldsymbol {mu } $ A/ $boldsymbol {mu } $ m. Vertical all-oxide ferroelectric FETs (V-AO-FeFETs) show a memory window (MW) of 1.85 V, with endurance and retention extended to $10^{{12}}$ cycles and ten years at room temperature, respectively. These findings illustrate that the vertical-channel all-oxide devices based on ALD oxide semiconductors (OS) are promising candidates for future high-density logic and memory applications in 3-D integration.
在这项工作中,我们报告了基于原子层沉积(ALD)的全氧化物晶体管,用于垂直堆叠高密度逻辑和三维集成存储器。该结构利用厚的退化ALD In2O3作为导电栅极,ALD In2O3薄膜本身作为ALD In2O3通道的源极/漏极触点,没有金属触点和栅极形成。全氧化物场效应晶体管(aofet)不仅在高温退火下存活下来 $400~^{circ }$ C,但也获得了提高开/关比 $10^{{7}}$ 在室温下,亚阈值摆幅(SS)接近60 mV/dec。aofet具有高均匀性和非常稳健的可靠性,但阈值电压不稳定( $boldsymbol {Delta } {V}_{text {TH}}text {)}$ 在正偏置应力(PBS)和负偏置应力(NBS)试验下,为- 5和- 50 mV $10^{{4}}$ 5 .垂直型aofet (v - aofet)表现出良好的栅极调制,从侧壁In2O3的厚度和栅极长度( ${T}_{text {IO,{g}}}text {)}$ 10nm,实现开/关比超过 $10^{{5}}$ 最大电流( ${I}_{max }text {)}$ 结束 $160~boldsymbol {mu } $ a / $boldsymbol {mu } $ m.垂直全氧化铁电场效应管(V- ao - fefet)的记忆窗口(MW)为1.85 V,其续航时间和保持时间延长至 $10^{{12}}$ 在室温下分别是周期和十年。这些发现表明,基于ALD氧化物半导体(OS)的垂直通道全氧化物器件是未来高密度逻辑和三维集成存储应用的有希望的候选者。
{"title":"Highly Robust All-Oxide Transistors Toward Vertical Logic and Memory","authors":"Zehao Lin;Zhuocheng Zhang;Chang Niu;Hongyi Dou;Ke Xu;Mir Md Fahimul Islam;Jian-Yu Lin;Changhyuck Sung;Minji Hong;Daewon Ha;Haiyan Wang;Muhammad Ashraful Alam;Peide. D. Ye","doi":"10.1109/TED.2024.3495632","DOIUrl":"https://doi.org/10.1109/TED.2024.3495632","url":null,"abstract":"In this work, we report atomic-layer-deposited (ALD) based all-oxide transistors toward vertically stacked high-density logic and memory for 3-D integration. This structure utilizes thick degenerated ALD In2O3 as the conducting gate, and ALD In2O3 thin film itself serves as source/drain contacts to the ALD In2O3 channel without metal contacts and gate formation. The all-oxide field-effect transistors (AOFETs) not only survived under high-temperature annealing over \u0000<inline-formula> <tex-math>$400~^{circ }$ </tex-math></inline-formula>\u0000 C but also gained a boosted on-/off-ratio over \u0000<inline-formula> <tex-math>$10^{{7}}$ </tex-math></inline-formula>\u0000 with subthreshold swing (SS) close to 60 mV/dec at room temperature. AOFETs present high uniformity and very robust reliability with a threshold voltage instability (\u0000<inline-formula> <tex-math>$boldsymbol {Delta } {V}_{text {TH}}text {)}$ </tex-math></inline-formula>\u0000 of −5 and −50 mV under positive bias stress (PBS) and negative bias stress (NBS) tests for \u0000<inline-formula> <tex-math>$10^{{4}}$ </tex-math></inline-formula>\u0000 s. The vertical AOFETs (V-AOFETs) demonstrate good gate modulation from sidewall In2O3 with thickness as well as gate length (\u0000<inline-formula> <tex-math>${T}_{text {IO,{g}}}text {)}$ </tex-math></inline-formula>\u0000 of 10 nm, achieving on-/off-ratio over \u0000<inline-formula> <tex-math>$10^{{5}}$ </tex-math></inline-formula>\u0000 and maximum current (\u0000<inline-formula> <tex-math>${I}_{max }text {)}$ </tex-math></inline-formula>\u0000 over \u0000<inline-formula> <tex-math>$160~boldsymbol {mu } $ </tex-math></inline-formula>\u0000 A/\u0000<inline-formula> <tex-math>$boldsymbol {mu } $ </tex-math></inline-formula>\u0000 m. Vertical all-oxide ferroelectric FETs (V-AO-FeFETs) show a memory window (MW) of 1.85 V, with endurance and retention extended to \u0000<inline-formula> <tex-math>$10^{{12}}$ </tex-math></inline-formula>\u0000 cycles and ten years at room temperature, respectively. These findings illustrate that the vertical-channel all-oxide devices based on ALD oxide semiconductors (OS) are promising candidates for future high-density logic and memory applications in 3-D integration.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"71 12","pages":"7984-7991"},"PeriodicalIF":2.9,"publicationDate":"2024-11-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142789055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-Efficient Memristor-Based Bayesian Convolutional Neural Networks for Out-of-Distribution Detection by Uncertainty Estimation 基于忆阻器的高效贝叶斯卷积神经网络不确定性估计的分布外检测
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3497917
Yudeng Lin;Qingtian Zhang;Bin Gao;Jianshi Tang;Han Zhao;Qi Qin;Ze Wang;He Qian;Huaqiang Wu
By using the nonvolatile and stochastic properties of memristor, memristors crossbar arrays can efficiently accelerate Bayesian neural networks (BNNs). However, Bayesian convolutional neural networks (BCNNs), one of the representative algorithms of Bayesian deep learning, have not yet been implemented using memristors. The unique attribute of local weight connection of convolutional kernels poses a challenge in constructing Gaussian weights. In this work, a highly energy-efficient implementation method of probabilistic convolutional kernels in memristor-based BCNN is developed, which takes advantage of both the write and read variations of devices. Meanwhile, a Bayesian-based hardware-aware ex-situ training method for memristor-based BCNNs is proposed for further deployment on large-scale BCNNs. Incorporating HfOx-based memristor’s parameters, memristor BCNNs are used to demonstrate classification task and out-of-distribution detection (OOD) by estimating uncertainty for the first time. The two memristor BCNNs achieved accuracies of 98.67% on MNIST and 87.81% on CIFAR10 and area under the ROC curve (AUC) of 0.96 and 0.83, indicating comparable classification and OOD detection performance to the digital floating-point implementation. After analyzing the impact of various effects at the device and array level, including the read variation, write variation, retention, conductance weight level, and ADC bit widths, the proposed method shows high robustness. Moreover, compared with CMOS-based GPUs, our memristor-based system achieved a 12-fold speed increase and a 335-fold energy efficiency improvement during the prediction cycle.
利用忆阻器的非易失性和随机性,忆阻器交叉棒阵列可以有效地加速贝叶斯神经网络(BNNs)。然而,贝叶斯卷积神经网络(BCNNs)作为贝叶斯深度学习的代表算法之一,尚未使用忆阻器实现。卷积核局部权值连接的独特属性给高斯权值的构造带来了挑战。在这项工作中,开发了一种高效节能的基于记忆电阻器的BCNN概率卷积核实现方法,该方法充分利用了器件的写入和读取变化。同时,提出了一种基于贝叶斯的基于记忆电阻器的bcnn的硬件感知非原位训练方法,以便在大规模的bcnn上进一步部署。结合基于hfox的忆阻器参数,首次将忆阻器bcnn应用于分类任务和预估不确定性的out- distribution detection (OOD)。这两种忆阻器bcnn在MNIST和CIFAR10上的准确率分别为98.67%和87.81%,ROC曲线下面积(AUC)分别为0.96和0.83,表明分类和OOD检测性能与数字浮点实现相当。在分析了器件和阵列层面的各种影响(包括读变化、写变化、保持、电导权重水平和ADC位宽度)后,所提出的方法具有较高的鲁棒性。此外,与基于cmos的gpu相比,我们基于忆阻器的系统在预测周期内实现了12倍的速度提升和335倍的能效提升。
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引用次数: 0
Investigating the Role of Reduced Graphene Oxide on the Structural and Transport Properties of LaMnO3 还原氧化石墨烯对LaMnO3结构和输运性能影响的研究
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-25 DOI: 10.1109/TED.2024.3496654
Karuna Kumari;Subhasmita Kar;Saurav Kumar;Soumya Jyoti Ray
The present work highlights the effect of reduced graphene oxide (rGO) on structural and charge transport properties of ( ${1} {-} {x}$ ) lanthanum manganite (LaMnO3). (x) rGO nanocomposites. The presence of dual phases within the nanocomposite specimens was well-established through comprehensive analysis employing characterization techniques, such as X-ray diffraction (XRD), Raman spectroscopy, and field-effect scanning electron microscopy (FESEM) etc. Furthermore, two distinct lattice spacings were identified by high-resolution transmission electron microscopy (HRTEM) measurements. Notably, the current versus voltage (I–V) profiles of the nanocomposites unveiled a distinctive bipolar resistive switching (RS) behavior. It was found that the increased concentration of rGO instigated an oxygen-deficient region, a phenomenon conclusively corroborated through X-ray photoelectron spectroscopy (XPS) analysis. Consequently, oxygen vacancies and ions alter the RS behavior of LaMnO3. Remarkably, the sample with ${x} =0.001$ exhibited superior RS characteristics when compared to ${x} =0.002$ and 0.005 samples. The conduction mechanism was found to be primarily governed by Ohmic and Schottky emission phenomena. The experimentally observed effect of rGO on RS property was also corroborated through first-principles-based calculations to offer a good degree of agreement. An increase in rGO concentration (x) reduces the bandgap, which brings about a semiconductor-to-metallic transition in the host material.
本文重点研究了还原氧化石墨烯(rGO)对(${1}{-}{x}$)锰酸镧(LaMnO3)结构和电荷输运性质的影响。(x)氧化石墨烯纳米复合材料。通过x射线衍射(XRD)、拉曼光谱(Raman spectroscopy)、场效应扫描电镜(FESEM)等表征技术的综合分析,确定了纳米复合材料样品中存在双相。此外,通过高分辨率透射电子显微镜(HRTEM)测量确定了两个不同的晶格间距。值得注意的是,纳米复合材料的电流与电压(I-V)曲线揭示了独特的双极电阻开关(RS)行为。通过x射线光电子能谱(XPS)分析发现,rGO浓度的增加引发了一个缺氧区。因此,氧空位和离子改变了LaMnO3的RS行为。值得注意的是,与${x} =0.002$和${x} = 0.005 $相比,${x} =0.001$的样本表现出更好的RS特征。发现导电机制主要受欧姆和肖特基发射现象支配。通过基于第一性原理的计算也证实了实验观察到的rGO对RS性能的影响,提供了很好的一致性。还原氧化石墨烯浓度(x)的增加减小了带隙,从而使主体材料从半导体转变为金属。
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引用次数: 0
Evaluation of Funnel Models on Calculation of Ion-Induced Collected Charge 漏斗模型在离子诱导电荷计算中的评价
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-22 DOI: 10.1109/TED.2024.3497927
Vitor A. P. Aguiar;Nilberto H. Medina;Nemitala Added;Saulo G. Alberton;Eduardo L. A. Macchione;Marcilei A. Guazzelli;Marco A. A. Melo;Juliano A. Oliveira;Renato C. Giacomini;Fernando R. Aguirre;Paula R. P. Allegro;Hellen C. S. Zaggato;Isaac J. Sayeg
Charge funneling is a widely used description of charge collection dynamics in semiconductor devices struck by ion irradiation, but it still relies on semiempirical parameters heavily dependent upon available data, which impacts its use for device or circuit-level simulations. The objective of this article is to analyze a comprehensive dataset from low-energy heavy-ion irradiations on a p-MOSFET, varying both the linear energy transfer (LET) and ion penetration depth within the device. A novel methodology is proposed to achieve this goal by analyzing devices without prior knowledge of their parameters, using data from light ion irradiations. Statistical analysis of the data and comparisons to simulated values showed that a LET-dependent funnel length is a more accurate description of the phenomenon than the conventional constant-length approach. A new, lower value for the funnel model’s shielding parameter k was identified, and the method also allowed for determining the metal and passivation layer thicknesses of the device. These results strengthen the reliability of the funnel model, making it a more robust tool for simulation applications.
电荷漏斗是一种广泛使用的描述离子辐照下半导体器件电荷收集动力学的方法,但它仍然依赖于半经验参数,严重依赖于可用数据,这影响了其在器件或电路级模拟中的使用。本文的目的是分析p-MOSFET低能重离子辐照的综合数据集,改变器件内的线性能量转移(LET)和离子穿透深度。提出了一种新的方法来实现这一目标,通过分析器件而不事先知道其参数,使用光离子照射的数据。对数据的统计分析和与模拟值的比较表明,与let相关的漏斗长度比传统的恒定长度方法更准确地描述了这一现象。确定了漏斗模型屏蔽参数k的一个新的较低值,并且该方法还允许确定器件的金属和钝化层厚度。这些结果增强了漏斗模型的可靠性,使其成为仿真应用的更健壮的工具。
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引用次数: 0
Study on a High-Power W -Band Extended Interaction Klystron With Efficiency Toward 44% 效率接近44%的大功率W波段扩展相互作用速调管的研究
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-22 DOI: 10.1109/TED.2024.3499943
Z. Zhang;J. C. Cai;P. C. Yin;Z. X. Su;X. K. Zhang;C. Zhang;L. Zeng;J. Xu;L. N. Yue;H. R. Yin;Y. Xu;G. Q. Zhao;W. X. Wang;Y. Y. Wei
In order to overcome the low efficiency (usually less than 25%) of millimeter-wave and terahertz (MMW/THz) klystrons, an exploratory study is conducted to improve the efficiency in the design of W-band extended interaction klystrons (EIKs). In this article, fast large-signal simulations using KlyC code are comprehensively used for the first time to accurately conduct full-scale parameterization of EIK, it is found that the upper limit of terahertz klystron efficiency is no longer solely dominated via the beam perveance, but rather restricted by various factors, including effective impedance, ohmic loss, cavity arrangement, and so on. The physical mechanism involved is so complex that the preliminary parametric sortation is mandatory to achieve very high efficiency (HE). Particle-in-cell (PIC) simulation results verified our theoretical evaluations, demonstrating that the W-band EIK proposed and optimized in this article could deliver up to 44.5% electronic efficiency and 39.2% RF efficiency around 100 GHz, with operating beam voltage of 50 kV and beam current of 2 A. The output power and saturation gain could achieve 39.2 kW and 65.5 dB, respectively, in which no instability is observed. In addition, a novel beam optics system (BOS) based on hybrid permanent magnets is proposed. Such compact BOS is exclusively developed to deal with the challenge induced by severe radial beam expansion in this EIK, which is the side-effect of the high intensity of beam-wave interactions. This study on high-power (HP) HE compact W-band EIK reveals the true potential of such types of devices in the MMW/THz regime.
为了克服毫米波和太赫兹(MMW/THz)速调管效率低(通常低于25%)的问题,对提高w波段扩展相互作用速调管(EIKs)的设计效率进行了探索性研究。本文首次全面利用KlyC代码进行快速大信号模拟,准确地对EIK进行了全尺寸参数化,发现太赫兹速调管效率的上限不再仅仅由波束性能决定,而是受到多种因素的制约,包括有效阻抗、欧姆损耗、腔体布置等。所涉及的物理机制非常复杂,为了实现非常高的效率(HE),必须进行初步的参数分选。粒子池(PIC)仿真结果验证了我们的理论评估,表明本文提出和优化的w波段EIK在100 GHz左右可以提供高达44.5%的电子效率和39.2%的射频效率,工作波束电压为50 kV,波束电流为2 A。输出功率和饱和增益分别达到39.2 kW和65.5 dB,无不稳定性。此外,提出了一种基于混合永磁体的新型光束光学系统(BOS)。这种紧凑的BOS是专门为处理EIK中严重的径向光束膨胀引起的挑战而开发的,这是高强度波束相互作用的副作用。这项关于高功率(HP) HE紧凑型w波段EIK的研究揭示了这类器件在毫米波/太赫兹波段的真正潜力。
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引用次数: 0
Enhance Electrical Performance and Stability of InSnMgO Thin-Film Transistors by Optimizing Carrier Concentration via Mg Doping 通过Mg掺杂优化载流子浓度提高InSnMgO薄膜晶体管的电性能和稳定性
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-21 DOI: 10.1109/TED.2024.3499949
Shi Zong;Lei Xu;Ruyu Liang;Zengcai Song;Junming Li;Zhihua Zhu;Shijun Luo
In this work, a low-temperature co-sputtering method was employed to fabricate high-performance amorphous InSnMgO (ITMO) thin film transistors (TFTs) with ultrathin channels. The effects of different Mg content on the electrical properties and bias stability of ITMO TFTs were studied by various characterization methods. As a result, when the sputtering power of MgO was set to 80 W, the field effect mobility ( $mu _{text {FE}}$ ) reached 52.5 cm2/V $cdot $ s, the low threshold voltage ( ${V}_{text {th}}$ ) of −0.28 V, and the subthreshold swing (SS) was as low as 0.239 V/decade. The super performance of the device is attributed to the reduction of oxygen vacancy concentration and the optimization of carrier concentration in the channel due to the doping of Mg. This study confirms the potential application of ITMO TFTs in the field of transparent flexible electronic devices and is expected to become a promising material for the next generation of high-resolution, low-power flat panel displays.
本文采用低温共溅射法制备了具有超薄沟道的高性能非晶InSnMgO (ITMO)薄膜晶体管。采用不同的表征方法研究了不同Mg含量对ITMO tft电学性能和偏置稳定性的影响。结果表明,当MgO溅射功率为80 W时,场效应迁移率($mu _{text {FE}}$)达到52.5 cm2/V $cdot $ s,低阈值电压(${V}_{text {th}}$)为- 0.28 V,亚阈值摆幅(SS)低至0.239 V/decade。该器件的优异性能是由于Mg的掺杂降低了氧空位浓度和优化了通道中的载流子浓度。这项研究证实了ITMO tft在透明柔性电子器件领域的潜在应用,并有望成为下一代高分辨率、低功耗平板显示器的有前途的材料。
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引用次数: 0
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IEEE Transactions on Electron Devices
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