首页 > 最新文献

IEEE Transactions on Electron Devices最新文献

英文 中文
Increasing Efficiency and Extending Lifetime of Red Micro Light-Emitting Diodes Through Sidewall Treatment for Improved Reliability 通过侧壁处理提高红色微型发光二极管的效率并延长其使用寿命,从而改善可靠性
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-15 DOI: 10.1109/TED.2024.3438686
Zhen-Jin Wang;Xin-Liang Ye;Chun-Liang Lin;Wei-Chen Tu;Chih-Chiang Yang;Yan-Kuin Su
The micro light-emitting diodes ( $mu $ LEDs) offer advantages that make it an attractive option for various applications, such as displays, lighting, AR/VR, and consumer electronics. The light output power (LOP) and external quantum efficiency (EQE) of $mu $ LEDs are the crucial parameters that impact the performance and suitability of these devices. Ongoing studies are focused on addressing the issue of $mu $ LEDs. In this study, we propose several treatment strategies to modify the sidewall of $mu $ LEDs and improve the performance of devices. The results show that the $mu $ LEDs treated with citric acid (CA) and ammonium sulfide [(NH $_{{4}}text {)}_{{2}}$ Sx] for 1 h have the best improvement in LOP by 93.3%, and EQE increases by 91.3%. In addition, the reliability of $mu $ LEDs with different sidewall treatments was studied under long-term aging and high-temperature and high-humidity conditions. The treatment method for $mu $ LEDs has made significant contributions to the performance of devices, bringing about advancements in various key areas.
微型发光二极管($mu $ LEDs)的优势使其成为显示器、照明、AR/VR 和消费类电子产品等各种应用中极具吸引力的选择。LED 的光输出功率(LOP)和外部量子效率(EQE)是影响这些设备性能和适用性的关键参数。目前的研究主要集中在解决 $mu $ LED 的问题上。在这项研究中,我们提出了几种处理策略,以改变 $mu $ LED 的侧壁,提高器件的性能。结果表明,用柠檬酸(CA)和硫化铵[(NH $_{{4}}text {)}_{{2}}$ Sx]处理 1 h 的 $mu $ LED 的 LOP 提高了 93.3%,EQE 提高了 91.3%。此外,还研究了不同侧壁处理的 $mu $ LED 在长期老化和高温高湿条件下的可靠性。发光二极管的处理方法对器件的性能做出了重大贡献,在多个关键领域取得了进展。
{"title":"Increasing Efficiency and Extending Lifetime of Red Micro Light-Emitting Diodes Through Sidewall Treatment for Improved Reliability","authors":"Zhen-Jin Wang;Xin-Liang Ye;Chun-Liang Lin;Wei-Chen Tu;Chih-Chiang Yang;Yan-Kuin Su","doi":"10.1109/TED.2024.3438686","DOIUrl":"https://doi.org/10.1109/TED.2024.3438686","url":null,"abstract":"The micro light-emitting diodes (\u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs) offer advantages that make it an attractive option for various applications, such as displays, lighting, AR/VR, and consumer electronics. The light output power (LOP) and external quantum efficiency (EQE) of \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs are the crucial parameters that impact the performance and suitability of these devices. Ongoing studies are focused on addressing the issue of \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs. In this study, we propose several treatment strategies to modify the sidewall of \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs and improve the performance of devices. The results show that the \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs treated with citric acid (CA) and ammonium sulfide [(NH\u0000<inline-formula> <tex-math>$_{{4}}text {)}_{{2}}$ </tex-math></inline-formula>\u0000Sx] for 1 h have the best improvement in LOP by 93.3%, and EQE increases by 91.3%. In addition, the reliability of \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs with different sidewall treatments was studied under long-term aging and high-temperature and high-humidity conditions. The treatment method for \u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000LEDs has made significant contributions to the performance of devices, bringing about advancements in various key areas.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142084503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced Performance of GaN-Based Single Contact Micro-LED Driven by AC Power Utilizing the Tunnel Junction 利用隧道结提高交流电驱动的氮化镓基单触点微型 LED 的性能
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-14 DOI: 10.1109/TED.2024.3435629
Dongqi Zhang;Tao Tao;Ting Zhi;Zhe Zhuang;Feifan Xu;Yimeng Sang;Junchi Yu;Yu Yan;Kangkai Tian;Zi-Hui Zhang;Jiachen Zhang;Bin Liu
The alternating current (ac)-driven GaN-based single contact light-emitting diode (SC-LED) has garnered significant attention due to its unique driving technique and potential applications, especially in areas where direct current-driven (dc-driven) LEDs face limitations. Our previous research emphasizes the importance of reducing the operating voltage of SC-LED. In this study, we have developed and manufactured a novel SC-LED featuring a tunnel junction (TJ) structure, which exhibits a lower breakdown voltage ( ${V} _{text {breakdown}}$ ) compared to conventional LEDs with an ITO contact layer. The simulation and experimental data illustrate a significant performance gap between TJ SC-LED and ITO SC-LED. The working voltage of TJ SC-LED is 34 V, which is 29% lower than that of ITO SC-LED. Specifically, under ac power at 80 V, TJ SC-LED exhibits a current of 0.94 mA and a WPE of 3.22%, both higher than the 0.77 mA and 3.02% values recorded for the ITO SC-LED. This comparison underscores the superior performance of TJ SC-LED over ITO SC-LED. These findings enhance our understanding of SC-LEDs and pave the way for the advancement of new driving techniques in nano-sized displays.
交流电(ac)驱动的氮化镓基单触点发光二极管(SC-LED)因其独特的驱动技术和潜在应用而备受关注,尤其是在直流电驱动(dc-driven)发光二极管面临限制的领域。我们之前的研究强调了降低 SC-LED 工作电压的重要性。在本研究中,我们开发并制造了一种具有隧道结(TJ)结构的新型 SC-LED,与带有 ITO 接触层的传统 LED 相比,它具有更低的击穿电压(${V} _{text {breakdown}}$ )。仿真和实验数据表明,TJ SC-LED 与 ITO SC-LED 之间存在明显的性能差距。TJ SC-LED 的工作电压为 34 V,比 ITO SC-LED 低 29%。具体来说,在 80 V 交流电源下,TJ SC-LED 的电流为 0.94 mA,WPE 为 3.22%,均高于 ITO SC-LED 的 0.77 mA 和 3.02%。这一对比强调了 TJ SC-LED 优于 ITO SC-LED 的性能。这些发现加深了我们对 SC-LED 的理解,并为纳米尺寸显示器中新驱动技术的发展铺平了道路。
{"title":"Enhanced Performance of GaN-Based Single Contact Micro-LED Driven by AC Power Utilizing the Tunnel Junction","authors":"Dongqi Zhang;Tao Tao;Ting Zhi;Zhe Zhuang;Feifan Xu;Yimeng Sang;Junchi Yu;Yu Yan;Kangkai Tian;Zi-Hui Zhang;Jiachen Zhang;Bin Liu","doi":"10.1109/TED.2024.3435629","DOIUrl":"https://doi.org/10.1109/TED.2024.3435629","url":null,"abstract":"The alternating current (ac)-driven GaN-based single contact light-emitting diode (SC-LED) has garnered significant attention due to its unique driving technique and potential applications, especially in areas where direct current-driven (dc-driven) LEDs face limitations. Our previous research emphasizes the importance of reducing the operating voltage of SC-LED. In this study, we have developed and manufactured a novel SC-LED featuring a tunnel junction (TJ) structure, which exhibits a lower breakdown voltage (\u0000<inline-formula> <tex-math>${V} _{text {breakdown}}$ </tex-math></inline-formula>\u0000) compared to conventional LEDs with an ITO contact layer. The simulation and experimental data illustrate a significant performance gap between TJ SC-LED and ITO SC-LED. The working voltage of TJ SC-LED is 34 V, which is 29% lower than that of ITO SC-LED. Specifically, under ac power at 80 V, TJ SC-LED exhibits a current of 0.94 mA and a WPE of 3.22%, both higher than the 0.77 mA and 3.02% values recorded for the ITO SC-LED. This comparison underscores the superior performance of TJ SC-LED over ITO SC-LED. These findings enhance our understanding of SC-LEDs and pave the way for the advancement of new driving techniques in nano-sized displays.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142050477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Diode-Like Field Emission Devices Fabricated by Standard 0.35-μm CMOS MEMS Process 采用标准 0.35μm CMOS MEMS 工艺制造的类二极管场发射装置
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-14 DOI: 10.1109/TED.2024.3436032
Wen-Teng Chang;An-De Xu;Shao-Ping Huang;Sin-Rong Liu;Ting-Yi Wu
This research presents a new method for manufacturing field emission devices (FEDs) using a standard 0.35- $mu $ m CMOS MEMS fabrication process, allowing the devices to function in normal air conditions. To enable nanoscale electrode gaps and atmospheric pressure operation, the FED’s layout is strategically modified to function as a diode, deliberately bypassing certain design rules for low-voltage capability. The SEM images suggest that the actual gap distance separating the electrodes is typically smaller than the initially intended dimensions. Measurements reveal an inverse relationship between the diode-like FEDs’ threshold voltages and the designed electrode spacing. These diode-like FEDs exhibit gentle rectification behavior, especially those with lower threshold voltages. This approach drastically simplifies FED fabrication, demonstrating the feasibility of integrating FEDs with CMOS technology. While the current 0.35- $mu $ m CMOS MEMS process employs aluminum metal stacks, this material choice may compromise reliability, especially when exposed to high-frequency alternating voltages.
这项研究提出了一种使用标准 0.35- $mu $ m CMOS MEMS 制造工艺制造场发射器件 (FED) 的新方法,使器件能够在正常空气条件下工作。为了实现纳米级电极间隙和大气压操作,FED 的布局经过了战略性修改,以发挥二极管的功能,有意绕过了低压能力的某些设计规则。扫描电子显微镜图像显示,电极之间的实际间隙距离通常小于最初设计的尺寸。测量结果显示,类二极管 FED 的阈值电压与设计的电极间距之间存在反比关系。这些类二极管 FED 表现出温和的整流行为,尤其是那些阈值电压较低的 FED。这种方法大大简化了 FED 的制造,证明了将 FED 与 CMOS 技术相结合的可行性。虽然目前 0.35- $mu $ m CMOS MEMS 工艺采用铝金属叠层,但这种材料选择可能会影响可靠性,尤其是在暴露于高频交变电压时。
{"title":"Diode-Like Field Emission Devices Fabricated by Standard 0.35-μm CMOS MEMS Process","authors":"Wen-Teng Chang;An-De Xu;Shao-Ping Huang;Sin-Rong Liu;Ting-Yi Wu","doi":"10.1109/TED.2024.3436032","DOIUrl":"https://doi.org/10.1109/TED.2024.3436032","url":null,"abstract":"This research presents a new method for manufacturing field emission devices (FEDs) using a standard 0.35-\u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000m CMOS MEMS fabrication process, allowing the devices to function in normal air conditions. To enable nanoscale electrode gaps and atmospheric pressure operation, the FED’s layout is strategically modified to function as a diode, deliberately bypassing certain design rules for low-voltage capability. The SEM images suggest that the actual gap distance separating the electrodes is typically smaller than the initially intended dimensions. Measurements reveal an inverse relationship between the diode-like FEDs’ threshold voltages and the designed electrode spacing. These diode-like FEDs exhibit gentle rectification behavior, especially those with lower threshold voltages. This approach drastically simplifies FED fabrication, demonstrating the feasibility of integrating FEDs with CMOS technology. While the current 0.35-\u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000m CMOS MEMS process employs aluminum metal stacks, this material choice may compromise reliability, especially when exposed to high-frequency alternating voltages.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142045106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design Space Exploration of FeRAM Bit Cell for DRAM Application 用于 DRAM 应用的 FeRAM 位单元设计空间探索
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-12 DOI: 10.1109/TED.2024.3435630
Hyungrock Oh;Yang Xiang;Fernando Garcia Redondo;Mohit Kumar Gupta;Manu Perumkunnil;Marie Garcia Bardon;Amit Dhiman;Sathisha Nanjunde Gowda;Amey Walke;Andrea Fantini;Farrukh Yasin;Gouri Sankar Kar;Geert Hellings;Wim Dehaene
HfOx-based ferroelectric random access memories (FeRAMs) have been proposed as a promising candidate to further dynamic random access memory (DRAM) scaling. This article presents a bitcell design space exploration of HfZrOx-based FeRAM based on a 2T1C testbench representative of a 64-kb 1T1C subarray at 40-nm CMOS technology. We first explore the impact of ferroelectric capacitor (FeCAP) sizing on the read sensing margin (SM) and speed with eight different blocks in the subarray, supported by a hardware-calibrated FeCAP compact model. We identify the capacitance ratio ( ${C} _{text {R}}$ ) between the bitline parasitic capacitance ( ${C} _{text {BL}}$ ) and the FeCAP capacitance ( ${C} _{text {FE}}$ ) as the critical design parameter for bitcell SM optimization, with a maximum ${C} _{text {R}}$ of 41 permitted for the given FeCAP technology. Furthermore, we investigate the impact of FeCAP sizing on ferro-grain granularity (FGG)-induced variability. Our findings clarify that SM variability worsens with increasing FeCAP size but does not significantly affect the readability overall. Additionally, we examine the consequences of FeCAP sizing on disturbance effects during write operations, concluding that larger FeCAPs help mitigate write disturbances by reducing voltage transfer to half-selected (HS) cells.
基于氧化铪的铁电随机存取存储器(FeRAM)被认为是进一步扩展动态随机存取存储器(DRAM)的理想候选器件。本文介绍了基于 HfZrOx 的铁电随机存取存储器的位元设计空间探索,其基础是 40 纳米 CMOS 技术下代表 64-kb 1T1C 子阵列的 2T1C 测试平台。在硬件校准的 FeCAP 紧凑型模型的支持下,我们首先探讨了铁电电容器 (FeCAP) 大小对子阵列中八个不同区块的读取感应裕量 (SM) 和速度的影响。我们将位线寄生电容(${C} _{text {BL}}$)与 FeCAP 电容(${C} _{text {FE}}$)之间的电容比(${C} _{text {R}}$)确定为优化位元组 SM 的关键设计参数,最大值为${C} _{text {FE}}$。对于给定的 FeCAP 技术,允许的最大 ${C} _{text {R}}$ 为 41。此外,我们还研究了 FeCAP 大小对铁晶粒度 (FGG) 引起的变异性的影响。我们的研究结果表明,SM 变异会随着 FeCAP 尺寸的增大而恶化,但不会对整体可读性产生显著影响。此外,我们还研究了铁磁晶粒尺寸对写入操作期间干扰效应的影响,得出的结论是,较大的铁磁晶粒尺寸有助于减少半选 (HS) 单元的电压传递,从而减轻写入干扰。
{"title":"Design Space Exploration of FeRAM Bit Cell for DRAM Application","authors":"Hyungrock Oh;Yang Xiang;Fernando Garcia Redondo;Mohit Kumar Gupta;Manu Perumkunnil;Marie Garcia Bardon;Amit Dhiman;Sathisha Nanjunde Gowda;Amey Walke;Andrea Fantini;Farrukh Yasin;Gouri Sankar Kar;Geert Hellings;Wim Dehaene","doi":"10.1109/TED.2024.3435630","DOIUrl":"https://doi.org/10.1109/TED.2024.3435630","url":null,"abstract":"HfOx-based ferroelectric random access memories (FeRAMs) have been proposed as a promising candidate to further dynamic random access memory (DRAM) scaling. This article presents a bitcell design space exploration of HfZrOx-based FeRAM based on a 2T1C testbench representative of a 64-kb 1T1C subarray at 40-nm CMOS technology. We first explore the impact of ferroelectric capacitor (FeCAP) sizing on the read sensing margin (SM) and speed with eight different blocks in the subarray, supported by a hardware-calibrated FeCAP compact model. We identify the capacitance ratio (\u0000<inline-formula> <tex-math>${C} _{text {R}}$ </tex-math></inline-formula>\u0000) between the bitline parasitic capacitance (\u0000<inline-formula> <tex-math>${C} _{text {BL}}$ </tex-math></inline-formula>\u0000) and the FeCAP capacitance (\u0000<inline-formula> <tex-math>${C} _{text {FE}}$ </tex-math></inline-formula>\u0000) as the critical design parameter for bitcell SM optimization, with a maximum \u0000<inline-formula> <tex-math>${C} _{text {R}}$ </tex-math></inline-formula>\u0000 of 41 permitted for the given FeCAP technology. Furthermore, we investigate the impact of FeCAP sizing on ferro-grain granularity (FGG)-induced variability. Our findings clarify that SM variability worsens with increasing FeCAP size but does not significantly affect the readability overall. Additionally, we examine the consequences of FeCAP sizing on disturbance effects during write operations, concluding that larger FeCAPs help mitigate write disturbances by reducing voltage transfer to half-selected (HS) cells.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142084490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polycrystalline-Silicon CMOS Thin-Film Transistors With T-Shaped Gate and Lightly Doped Drain 具有 T 形栅极和轻掺杂漏极的多晶硅 CMOS 薄膜晶体管
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-12 DOI: 10.1109/TED.2024.3433833
Cheng-Kuei Lee;Hsun-Lin Chang;Kun-Mung Chen;Guo-Wei Huang;Chien-Nan Kuo;Pei-Wen Li;Horng-Chih Lin
We report the implementation of both n- and p-channel polycrystalline-silicon (poly-Si) thin-film transistors (TFTs) with features of T-shaped gate (T-gate) of n+ poly-Si in combination with lightly doped drain (LDD) structure. The inclusion of the T-gate and LDD structures improves both the on-state current ( ${I}_{text {on}}$ ) and off-state leakage ( ${I}_{text {off}}$ ) of n-channel TFTs significantly in comparison to the conventional TFTs. For p-channel poly-Si TFTs, the LDD structure mitigates ${I}_{text {off}}$ but leads to an ${I}_{text {on}}$ degradation due to a potential barrier at the source junction underneath the T-gate’s wing. An additional boron channel doping not only improves ${I}_{text {on}}$ but also adjusts the threshold voltage of p-channel TFTs. Based on our proposed poly-Si TFTs, the fabricated T-gate devices demonstrate full-swing switching of CMOS inverters.
我们报告了 n+ 多晶硅 T 型栅极(T-gate)与轻掺杂漏极(LDD)结构相结合的 n 沟道和 p 沟道多晶硅薄膜晶体管(TFT)的实现情况。与传统 TFT 相比,加入 T 形栅极和 LDD 结构后,n 沟道 TFT 的导通电流(${I}_{text{on}}$)和关断漏电流(${I}_{text{off}}$)都得到了显著改善。对于 p 沟道多晶硅 TFT 而言,LDD 结构可以减少 ${I}_{text {off}}$,但由于 T 栅极翼下的源结处存在势垒,会导致 ${I}_{text {on}}$下降。额外的硼沟道掺杂不仅能提高{I}_{text {on}$,还能调整 p 沟道 TFT 的阈值电压。基于我们提出的多晶硅 TFT,制造出的 T 栅极器件实现了 CMOS 逆变器的全摆动开关。
{"title":"Polycrystalline-Silicon CMOS Thin-Film Transistors With T-Shaped Gate and Lightly Doped Drain","authors":"Cheng-Kuei Lee;Hsun-Lin Chang;Kun-Mung Chen;Guo-Wei Huang;Chien-Nan Kuo;Pei-Wen Li;Horng-Chih Lin","doi":"10.1109/TED.2024.3433833","DOIUrl":"https://doi.org/10.1109/TED.2024.3433833","url":null,"abstract":"We report the implementation of both n- and p-channel polycrystalline-silicon (poly-Si) thin-film transistors (TFTs) with features of T-shaped gate (T-gate) of n+ poly-Si in combination with lightly doped drain (LDD) structure. The inclusion of the T-gate and LDD structures improves both the on-state current (\u0000<inline-formula> <tex-math>${I}_{text {on}}$ </tex-math></inline-formula>\u0000) and off-state leakage (\u0000<inline-formula> <tex-math>${I}_{text {off}}$ </tex-math></inline-formula>\u0000) of n-channel TFTs significantly in comparison to the conventional TFTs. For p-channel poly-Si TFTs, the LDD structure mitigates \u0000<inline-formula> <tex-math>${I}_{text {off}}$ </tex-math></inline-formula>\u0000 but leads to an \u0000<inline-formula> <tex-math>${I}_{text {on}}$ </tex-math></inline-formula>\u0000 degradation due to a potential barrier at the source junction underneath the T-gate’s wing. An additional boron channel doping not only improves \u0000<inline-formula> <tex-math>${I}_{text {on}}$ </tex-math></inline-formula>\u0000 but also adjusts the threshold voltage of p-channel TFTs. Based on our proposed poly-Si TFTs, the fabricated T-gate devices demonstrate full-swing switching of CMOS inverters.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142084507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low-Temperature Processed Ni/GeSn Optimal Contacts for Junctionless GeSn-on-Si FinFETs 用于无结 GeSn$_{text{-on-}}$Si FinFET 的低温加工 Ni/GeSn 最佳触点
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-09 DOI: 10.1109/TED.2024.3430244
Sumit Choudhary;Daniel Schwarz;Hannes S. Funk;Satinder K. Sharma;Jörg Schulze
For junctionless FETs (JLFETs), an optimal ohmic contact is needed to achieve maximum drive current. The scaling of the source/drain (S/D) contact area impacts the contact resistivity ( $rho _{c}$ ) of FETs, which limits theiron current and switching speed. Minimizing the S/D series resistance along with ohmic contacts is the critical factor in JLFET design due to moderate doping levels at S/D. The Ni and Ge contacts optimized at a low temperature of $350~^{circ }$ C by forming gas annealing (FGA) process and the computed contact resistance ( ${R}_{c}$ ), sheet resistance ( ${R}_{text {sh}}$ ), and contact resistivity ( $rho _{c}$ ) for Ni/p-GeSn contacts are $2.04times 10^{-{3}}~Omega cdot text {cm}$ , $63.96~Omega $ /□, and $6.18times 10^{-{8}}~Omega cdot text {cm}^{{2}}$ , respectively. The impact of capping metal resistance ( ${R}_{m}$ ) is analytically examined for Ni/p-GeSn contacts using the modified circular transmission line model (cTLM). Furthermore, to study the metal cap resistance ( ${R}_{m}$ ) effect pragmatically, the optimized GeSn channel FinFET with width/length (W/L) 20/90 nm is analyzed by incorporating an extra metal cap at contacts and its electrical characteristics were compared with the control sample. The result demonstrate that the effect of metal resistance is very significant in low sheet resistance ( ${R}_{text {sh}}$ ) materials, where ${R}_{text {sh}}$ is close to ${R}_{m}$ .
对于无结型场效应晶体管(JLFET)来说,要获得最大驱动电流,需要一个最佳的欧姆接触。源极/漏极 (S/D) 接触面积的缩放会影响 FET 的接触电阻率($rho _{c}$),从而限制其导通电流和开关速度。由于 S/D 的掺杂水平适中,最大限度地减小 S/D 的串联电阻和欧姆触点是 JLFET 设计的关键因素。通过成型气体退火(FGA)工艺,在350~^{circ }$ C的低温下对镍和锗触点进行了优化,计算得出的镍/钯-锗-硒触点的接触电阻({R}_{c}$)、薄片电阻({R}_{text {sh}}$)和接触电阻率(rho _{c}$)为2.0^{-{3}}~Omega cdot text {cm}$ 、 $63.96~Omega $ /□ 和 $6.18/times 10^{-{8}}~Omega cdot text {cm}^{2}}$ 。利用改进的环形传输线模型(cTLM)分析了镍/钯-锗-硒触点的盖帽金属电阻({R}_{m}$)的影响。此外,为了务实地研究金属帽电阻({R}_{m}$ )的影响,通过在触点处加入额外的金属帽,分析了宽度/长度(W/L)为 20/90 nm 的优化 GeSn 沟道 FinFET,并将其电气特性与对照样品进行了比较。结果表明,在低薄片电阻(${R}_{text {sh}}$)材料中,金属电阻的影响非常显著,其中${R}_{text {sh}}$接近于${R}_{m}$。
{"title":"Low-Temperature Processed Ni/GeSn Optimal Contacts for Junctionless GeSn-on-Si FinFETs","authors":"Sumit Choudhary;Daniel Schwarz;Hannes S. Funk;Satinder K. Sharma;Jörg Schulze","doi":"10.1109/TED.2024.3430244","DOIUrl":"10.1109/TED.2024.3430244","url":null,"abstract":"For junctionless FETs (JLFETs), an optimal ohmic contact is needed to achieve maximum drive current. The scaling of the source/drain (S/D) contact area impacts the contact resistivity (\u0000<inline-formula> <tex-math>$rho _{c}$ </tex-math></inline-formula>\u0000) of FETs, which limits their\u0000<sc>on</small>\u0000 current and switching speed. Minimizing the S/D series resistance along with ohmic contacts is the critical factor in JLFET design due to moderate doping levels at S/D. The Ni and Ge contacts optimized at a low temperature of \u0000<inline-formula> <tex-math>$350~^{circ }$ </tex-math></inline-formula>\u0000C by forming gas annealing (FGA) process and the computed contact resistance (\u0000<inline-formula> <tex-math>${R}_{c}$ </tex-math></inline-formula>\u0000), sheet resistance (\u0000<inline-formula> <tex-math>${R}_{text {sh}}$ </tex-math></inline-formula>\u0000), and contact resistivity (\u0000<inline-formula> <tex-math>$rho _{c}$ </tex-math></inline-formula>\u0000) for Ni/p-GeSn contacts are \u0000<inline-formula> <tex-math>$2.04times 10^{-{3}}~Omega cdot text {cm}$ </tex-math></inline-formula>\u0000, \u0000<inline-formula> <tex-math>$63.96~Omega $ </tex-math></inline-formula>\u0000/□, and \u0000<inline-formula> <tex-math>$6.18times 10^{-{8}}~Omega cdot text {cm}^{{2}}$ </tex-math></inline-formula>\u0000, respectively. The impact of capping metal resistance (\u0000<inline-formula> <tex-math>${R}_{m}$ </tex-math></inline-formula>\u0000) is analytically examined for Ni/p-GeSn contacts using the modified circular transmission line model (cTLM). Furthermore, to study the metal cap resistance (\u0000<inline-formula> <tex-math>${R}_{m}$ </tex-math></inline-formula>\u0000) effect pragmatically, the optimized GeSn channel FinFET with width/length (W/L) 20/90 nm is analyzed by incorporating an extra metal cap at contacts and its electrical characteristics were compared with the control sample. The result demonstrate that the effect of metal resistance is very significant in low sheet resistance (\u0000<inline-formula> <tex-math>${R}_{text {sh}}$ </tex-math></inline-formula>\u0000) materials, where \u0000<inline-formula> <tex-math>${R}_{text {sh}}$ </tex-math></inline-formula>\u0000 is close to \u0000<inline-formula> <tex-math>${R}_{m}$ </tex-math></inline-formula>\u0000.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141941837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Monte Carlo Study of Gunn Oscillations in Geometrically Shaped Planar Gunn Diodes Based on Doped GaN: Influence of Geometry, Intervalley Energy, and Temperature 基于掺杂氮化镓的几何形状平面贡恩二极管中贡恩振荡的蒙特卡罗研究:几何形状、间隔能量和温度的影响
IF 3.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-09 DOI: 10.1109/ted.2024.3438114
Sergio García-Sánchez, Ignacio Íñiguez-de-la-Torre, Susana Pérez, Tomás González, Javier Mateos
{"title":"Monte Carlo Study of Gunn Oscillations in Geometrically Shaped Planar Gunn Diodes Based on Doped GaN: Influence of Geometry, Intervalley Energy, and Temperature","authors":"Sergio García-Sánchez, Ignacio Íñiguez-de-la-Torre, Susana Pérez, Tomás González, Javier Mateos","doi":"10.1109/ted.2024.3438114","DOIUrl":"https://doi.org/10.1109/ted.2024.3438114","url":null,"abstract":"","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":3.1,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141941840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process 采用商用 XBAW 工艺制造的高品质因数、19-GHz 周期极化 AlScN BAW 谐振器
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-09 DOI: 10.1109/TED.2024.3435175
Izhar;Merrilyn M. A. Fiagbenu;Xingyu Du;Pariasadat Musavigharavi;Yang Deng;Akhil Gunda;Jeff Leathersich;Craig Moe;Abhay Kochhar;Eric A. Stach;Ramakrishna Vetury;Roy H. Olsson
This article presents 19-GHz bulk acoustic wave (BAW) resonators realized in a periodically poled piezoelectric film (P3F) microfabricated in a commercial XBAW process. The polarization of the three layers comprising the P3F film are realized via a combination of as-grown (two-layer) and electrically poled (one-layer) aluminum scandium nitride (AlScN). To improve the series ( ${Q}_{s}$ ) and maximum ( ${Q}_{max }$ ) quality factors, the device is constructed by connecting two-BAW resonators in series, which lowers the effect of the via resistance when compared with a traditional single BAW. Resonators achieved ${Q}_{max }$ of 531 (with ${Q}_{s}$ of 348 and ${Q}_{p}$ of 264) and ${text {FoM}}_{{os}}$ (defined as ${text {FoM}}_{{os}} = {{f}_{{s},{p}} {Q}}_{{s},{p}} times {{10}}^{-{9}}$ , where ${Q}_{{s},{p}}$ is the quality factor at series ( ${f}_{s}$ ) or parallel ( ${f}_{p}$ ) resonance frequency) of 6542 at 18.8-GHz frequency, which is higher than most of the state-of-the-art piezoelectric BAW resonators operating at similar and higher frequencies. The experimental results indicate that the P3F BAW resonators are promising for applications in emerging RF communication systems.
本文介绍了在商用 XBAW 工艺微加工的周期性极化压电薄膜 (P3F) 中实现的 19-GHz 体声波 (BAW) 谐振器。组成 P3F 薄膜的三层极化是通过原生长(两层)和电极化(一层)氮化铝钪(AlScN)的组合实现的。为了提高串联(${Q}_{s}$)和最大(${Q}_{max }$)品质因数,该器件通过串联两个 BAW 谐振器来构建,与传统的单 BAW 相比,降低了通路电阻的影响。谐振器的${Q}_{max }$达到了531(其中${Q}_{s}$为348,${Q}_{p}$为264),${text {FoM}}_{os}}$ (定义为${text {FoM}}_{os}} = {{f}_{s},{p}}{Q}}_{s},{p}}其中,${Q}_{s},{p}}$ 为串联(${f}_{s}$)或并联(${f}_{p}$)共振频率下的品质因数),在 18.8 GHz 频率下为 6542,高于大多数工作在类似或更高频率下的先进压电声表面波谐振器。实验结果表明,P3F 声表面波谐振器有望应用于新兴的射频通信系统。
{"title":"A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process","authors":"Izhar;Merrilyn M. A. Fiagbenu;Xingyu Du;Pariasadat Musavigharavi;Yang Deng;Akhil Gunda;Jeff Leathersich;Craig Moe;Abhay Kochhar;Eric A. Stach;Ramakrishna Vetury;Roy H. Olsson","doi":"10.1109/TED.2024.3435175","DOIUrl":"https://doi.org/10.1109/TED.2024.3435175","url":null,"abstract":"This article presents 19-GHz bulk acoustic wave (BAW) resonators realized in a periodically poled piezoelectric film (P3F) microfabricated in a commercial XBAW process. The polarization of the three layers comprising the P3F film are realized via a combination of as-grown (two-layer) and electrically poled (one-layer) aluminum scandium nitride (AlScN). To improve the series (\u0000<inline-formula> <tex-math>${Q}_{s}$ </tex-math></inline-formula>\u0000) and maximum (\u0000<inline-formula> <tex-math>${Q}_{max }$ </tex-math></inline-formula>\u0000) quality factors, the device is constructed by connecting two-BAW resonators in series, which lowers the effect of the via resistance when compared with a traditional single BAW. Resonators achieved \u0000<inline-formula> <tex-math>${Q}_{max }$ </tex-math></inline-formula>\u0000 of 531 (with \u0000<inline-formula> <tex-math>${Q}_{s}$ </tex-math></inline-formula>\u0000 of 348 and \u0000<inline-formula> <tex-math>${Q}_{p}$ </tex-math></inline-formula>\u0000 of 264) and \u0000<inline-formula> <tex-math>${text {FoM}}_{{os}}$ </tex-math></inline-formula>\u0000 (defined as \u0000<inline-formula> <tex-math>${text {FoM}}_{{os}} = {{f}_{{s},{p}} {Q}}_{{s},{p}} times {{10}}^{-{9}}$ </tex-math></inline-formula>\u0000, where \u0000<inline-formula> <tex-math>${Q}_{{s},{p}}$ </tex-math></inline-formula>\u0000 is the quality factor at series (\u0000<inline-formula> <tex-math>${f}_{s}$ </tex-math></inline-formula>\u0000) or parallel (\u0000<inline-formula> <tex-math>${f}_{p}$ </tex-math></inline-formula>\u0000) resonance frequency) of 6542 at 18.8-GHz frequency, which is higher than most of the state-of-the-art piezoelectric BAW resonators operating at similar and higher frequencies. The experimental results indicate that the P3F BAW resonators are promising for applications in emerging RF communication systems.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142050458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stochastic Resonance in HfO₂-Based Memristors: Impact of External Noise on the Binary STDP Protocol 基于 HfO$_{text{2}}$ 的 Memristors 中的随机共振:外部噪声对二进制 STDP 协议的影响
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-09 DOI: 10.1109/TED.2024.3435173
E. Salvador;R. Rodriguez;E. Miranda;J. Martin-Martinez;A. Rubio;V. Ntinas;G. Ch. Sirakoulis;A. Crespo-Yepes;M. Nafria
This article deals with the stochastic resonance (SR) phenomenon experimentally observed in HfO2-based memristors. The SR impact on the binary spike time-dependent plasticity (STDP) protocol at the device level was investigated. We demonstrate that the two extreme conductance states of the device that represent the synaptic weights in neuromorphic systems can be better distinguished with the incorporation of Gaussian noise into the bias signal. This technique allows setting the memristor conductance which is directly related to the overlap between the pre- and postsynaptic pulses. The study is reproduced in the LTSPICE simulator using the dynamic memdiode model (DMM) for memristors.
本文论述了在基于二氧化铪的忆阻器中实验观察到的随机共振(SR)现象。我们研究了随机共振在器件层面对二进制尖峰时间可塑性(STDP)协议的影响。我们证明,通过在偏置信号中加入高斯噪声,可以更好地区分代表神经形态系统中突触权重的器件的两种极端电导状态。这种技术可以设置忆阻器电导,而忆阻器电导与突触前脉冲和突触后脉冲之间的重叠直接相关。这项研究在 LTSPICE 模拟器中使用动态忆阻器模型(DMM)重现。
{"title":"Stochastic Resonance in HfO₂-Based Memristors: Impact of External Noise on the Binary STDP Protocol","authors":"E. Salvador;R. Rodriguez;E. Miranda;J. Martin-Martinez;A. Rubio;V. Ntinas;G. Ch. Sirakoulis;A. Crespo-Yepes;M. Nafria","doi":"10.1109/TED.2024.3435173","DOIUrl":"10.1109/TED.2024.3435173","url":null,"abstract":"This article deals with the stochastic resonance (SR) phenomenon experimentally observed in HfO2-based memristors. The SR impact on the binary spike time-dependent plasticity (STDP) protocol at the device level was investigated. We demonstrate that the two extreme conductance states of the device that represent the synaptic weights in neuromorphic systems can be better distinguished with the incorporation of Gaussian noise into the bias signal. This technique allows setting the memristor conductance which is directly related to the overlap between the pre- and postsynaptic pulses. The study is reproduced in the LTSPICE simulator using the dynamic memdiode model (DMM) for memristors.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10632173","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141941838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability of Quasi-vertical GaN on Silicon Schottky Barrier Diodes With SiO₂ Passivation Layer Under On-State Stress Bias 带 SiO$_{text{2}}$ 钝化层的硅基肖特基势垒准垂直氮化镓二极管在通态应力偏压下的可靠性
IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-08 DOI: 10.1109/TED.2024.3433310
Ya-Xun Lin;Der-Sheng Chao;Jenq-Horng Liang;Yao-Luen Shen;Chih-Fang Huang;Steve Hall;Ivona Z. Mitrovic
On-state stress induced device degradation of gallium nitride quasivertical Schottky barrier diode (SBD) with SiO2 passivation layer was investigated in this article. The devices were stressed at room temperature by biasing them separately at three distinct voltages for 500 s. The longer-term degradation was seen to be dominated predominantly by electron trapping in the oxide passivation layer. Less-severe degradation was observed in passivated devices in comparison with control devices without SiO2 passivation. The control devices were found to exhibit degradation due to the influence of bulk traps near to the metal/GaN interface. Moreover, the anode was held at zero voltage for 500 s to analyse the electron de-trapping mechanism during the recovery phase of SBDs. Current-voltage characteristics of the SBDs were measured to monitor the evolution of forward voltage and barrier height through periodic interruption under stress and recovery. A power-law model and universal recovery function were utilized to evaluate the parameter shifts with respect to time for each phase, respectively. The results demonstrate that border and bulk oxide traps associated with the passivation layer lead to the trapping and de-trapping of electrons. Furthermore, long-time constant bulk oxide traps are thought to be the contributing factor in the partial recovery, indicating that few electrons emit from these traps in the short-term recovery phase.
本文研究了带有二氧化硅钝化层的氮化镓准垂直肖特基势垒二极管(SBD)在状态应力诱导下的器件降解。在室温下,通过在三个不同的电压下分别对器件施加 500 秒的偏压,对器件进行了应力测试。与未进行二氧化硅钝化的对照器件相比,钝化器件的降解程度较轻。由于金属/氮化镓界面附近的块状陷阱的影响,对照器件出现了降解。此外,阳极在零电压下保持 500 秒,以分析 SBD 恢复阶段的电子去陷阱机制。测量了 SBD 的电流-电压特性,以监测在应力和恢复条件下周期性中断时正向电压和势垒高度的演变。利用幂律模型和通用恢复函数分别评估了每个阶段参数随时间的变化。结果表明,与钝化层相关的边界和体氧化物陷阱导致了电子的捕获和去捕获。此外,长时间不变的块状氧化物陷阱被认为是部分恢复的促成因素,这表明在短期恢复阶段很少有电子从这些陷阱中发射出来。
{"title":"Reliability of Quasi-vertical GaN on Silicon Schottky Barrier Diodes With SiO₂ Passivation Layer Under On-State Stress Bias","authors":"Ya-Xun Lin;Der-Sheng Chao;Jenq-Horng Liang;Yao-Luen Shen;Chih-Fang Huang;Steve Hall;Ivona Z. Mitrovic","doi":"10.1109/TED.2024.3433310","DOIUrl":"10.1109/TED.2024.3433310","url":null,"abstract":"On-state stress induced device degradation of gallium nitride quasivertical Schottky barrier diode (SBD) with SiO2 passivation layer was investigated in this article. The devices were stressed at room temperature by biasing them separately at three distinct voltages for 500 s. The longer-term degradation was seen to be dominated predominantly by electron trapping in the oxide passivation layer. Less-severe degradation was observed in passivated devices in comparison with control devices without SiO2 passivation. The control devices were found to exhibit degradation due to the influence of bulk traps near to the metal/GaN interface. Moreover, the anode was held at zero voltage for 500 s to analyse the electron de-trapping mechanism during the recovery phase of SBDs. Current-voltage characteristics of the SBDs were measured to monitor the evolution of forward voltage and barrier height through periodic interruption under stress and recovery. A power-law model and universal recovery function were utilized to evaluate the parameter shifts with respect to time for each phase, respectively. The results demonstrate that border and bulk oxide traps associated with the passivation layer lead to the trapping and de-trapping of electrons. Furthermore, long-time constant bulk oxide traps are thought to be the contributing factor in the partial recovery, indicating that few electrons emit from these traps in the short-term recovery phase.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9,"publicationDate":"2024-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141941839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
IEEE Transactions on Electron Devices
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1