In this study, we proposed an enhanced mode P-GaN/AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) by combining thermal oxidation treatment of P-GaN with atomic layer deposition (OTALD) prior to gate metal deposition. Due to the thermal oxidation treatment, a smooth oxide interlayer between P-GaN and Al $_{mathbf {{2}}}$