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High Breakdown Voltage P-GaN Gate HEMTs With Threshold Voltage of 7.1 V 阈值电压为7.1 V的高击穿电压P-GaN栅极hemt
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-11 DOI: 10.1109/LED.2024.3478819
Siheng Chen;Peng Cui;Xin Luo;Liu Wang;Jiacheng Dai;Kaifa Qi;Tieying Zhang;Handoko Linewih;Zhaojun Lin;Xiangang Xu;Jisheng Han
In this study, we proposed an enhanced mode P-GaN/AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) by combining thermal oxidation treatment of P-GaN with atomic layer deposition (OTALD) prior to gate metal deposition. Due to the thermal oxidation treatment, a smooth oxide interlayer between P-GaN and Al $_{mathbf {{2}}}$ O $_{mathbf {{3}}}$ is formed. Compared with the device without treatment, the P-GaN gate HEMTs with OTALD present increased threshold voltage significantly from 1.8 V to 7.1 V and improved gate breakdown voltage from 18.9 V to 26.9 V. Additionally, the devices maintained a high on/off current ratio above $10^{mathbf {{8}}}$ and a further improvement in off-state breakdown voltage from 1315 V to 1980 V. The record high threshold voltage and breakdown voltage make this technology promising for widespread application in P-GaN power devices.
在这项研究中,我们提出了一种增强模式P-GaN/AlGaN/GaN金属-绝缘体-半导体高电子迁移率晶体管(MIS-HEMTs),将P-GaN的热氧化处理与栅极金属沉积(OTALD)相结合。由于热氧化处理,P-GaN与Al $_{mathbf {{2}}}$ O $_{mathbf{{3}}}$之间形成光滑的氧化中间层。与未经处理的器件相比,经OTALD处理的P-GaN栅极hemt的阈值电压从1.8 V显著提高到7.1 V,栅极击穿电压从18.9 V提高到26.9 V。此外,器件保持了高于$10^{mathbf{{8}}}$的高通断电流比,并进一步提高了断开状态击穿电压,从1315 V提高到1980 V。创纪录的高阈值电压和击穿电压使该技术在P-GaN功率器件中具有广泛的应用前景。
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引用次数: 0
Investigation of Dynamic Eₒₛₛ in p-GaN Gate AlGaN/GaN HEMT p-GaN栅AlGaN/GaN HEMT中动态Eₒₛₛ的研究
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477605
Yifei Huang;Qimeng Jiang;Yixu Yao;Sen Huang;Xinhua Wang;Xinyu Liu
Dynamic ${E}_{text {OSS}}$ of Schottky p-GaN gate GaN devices is investigated by a proposed novel circuit. The easy-to-implement circuit allows for the analysis of dynamic ${E}_{text {OSS}}$ under different stress types, varied stress times and temperatures. It is observed that, the ${E}_{text {OSS}}$ is significantly reduced when the device is under continuous hard-switching stress (HSW) compared to devices subjected to OFF-state high voltage drain stress (HDC) and fresh devices, especially under relatively low bus voltage conditions (e.g., 100 V). These findings, linked to the dynamic change of 2DEG, provide new insights into Schottky p-GaN gate HEMT behavior and application understanding.
本文研究了肖特基p-GaN栅极GaN器件的动态${E}_{text {OSS}}$。易于实现的电路允许在不同应力类型,不同应力时间和温度下分析动态${E}_{text {OSS}}$。研究发现,与处于off状态高压漏极应力(HDC)和新鲜器件相比,器件在连续硬开关应力(HSW)下,特别是在相对较低的母线电压条件下(例如100 V),器件的${E}_{text {OSS}}$显著降低。这些发现与2DEG的动态变化有关,为Schottky p-GaN栅极HEMT行为和应用理解提供了新的见解。
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引用次数: 0
Competing Effects of Doping and Trap Formation in Polymer Semiconductors During Plasma Treatment 等离子体处理过程中聚合物半导体中掺杂和陷阱形成的竞争效应
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477598
Hongquan Yu;Zhenyuan Tang;Min Tu;Yangjiang Wu;Kaihuan Zhang
Plasma treatment has been extensively employed for doping or etching organic semiconductors. Both doping and etching effects occur simultaneously during the plasma treatment. Polymer semiconductors, which contain both crystalline and amorphous phases, exhibit inherent selective etching characteristics. However, the combined effects of doping and selective etching on the electrical properties of polymer semiconductors have not been thoroughly investigated. In this study, we examine the influence of plasma treatment on the surface morphology and electrical properties of organic field-effect transistors utilizing the polymer semiconductor DPP-DTT. A competitive effect between doping and trap formation is observed during plasma treatment, resulting in controllable bidirectional shifts in threshold voltage with acceptable mobility degradation. Under optimal plasma treatment conditions, a 3.45-fold increase in the current response and improved recovery performance were observed in NO2 gas sensing applications, attributed to the formation of trap and the pore structure from selective etching. These results highlight the significant potential of plasma treatment for optimizing polymer-based organic transistors.
等离子体处理已广泛应用于有机半导体的掺杂或蚀刻。在等离子体处理过程中,掺杂和蚀刻效应同时发生。聚合物半导体,包含晶体和非晶相,表现出固有的选择性蚀刻特性。然而,掺杂和选择性蚀刻对聚合物半导体电性能的综合影响尚未得到深入的研究。在这项研究中,我们研究了等离子体处理对利用聚合物半导体DPP-DTT的有机场效应晶体管表面形貌和电学性能的影响。在等离子体处理过程中,观察到掺杂和陷阱形成之间的竞争效应,导致阈值电压的可控双向位移和可接受的迁移率下降。在最佳等离子体处理条件下,由于陷阱的形成和选择性蚀刻的孔隙结构,NO2气敏应用中的电流响应提高了3.45倍,回收性能也得到了改善。这些结果突出了等离子体处理在优化聚合物基有机晶体管方面的巨大潜力。
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引用次数: 0
Enhancement of Device Uniformity in IWO TFTs via RF Magnetron Co-Sputtering of In2O3 and WO3 Targets 通过射频磁控管共溅射靶材 In2O3 和 WO3 提高 IWO TFT 器件的均匀性
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477443
Zihan Wang;Feilian Chen;Mingjun Zhang;Xiaoliang Zhou;Paramasivam Balasubramanian;Yan Yan;Meng Zhang
In this letter, the cause of the poor uniformity in indium tungsten oxide (IWO) thin-film transistors (TFTs) is investigated. The significant fluctuation in tungsten (W) content, which results from the non-uniformity of the IWO target, is responsible. To solve this problem, RF magnetron co-sputtering of In2O3 and WO3 targets is adopted to eliminate the variation of W content, thereby achieving high-uniformity IWO TFTs with enhanced performance. This co-sputtering methodology could shed light on the pathways for mitigating the device uniformity challenges encountered in mass production settings, thus leading to substantial cost reductions.
在这封信中,我们研究了氧化铟钨薄膜晶体管(TFT)均匀性差的原因。IWO 靶材的不均匀性导致钨 (W) 含量大幅波动。为了解决这个问题,采用了 In2O3 和 WO3 靶材的射频磁控管共溅射技术来消除 W 含量的变化,从而获得性能更高的高均匀度 IWO TFT。这种共溅射方法可为缓解大规模生产环境中遇到的器件均匀性难题提供思路,从而大幅降低成本。
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引用次数: 0
Liquid Crystal Displays With Printed Carbon-Based Recyclable Transistor Backplanes 采用碳基可回收晶体管印刷背板的液晶显示器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477434
James L. Doherty;Ye Zhang;Brittany N. Smith;Hansel Alex Hobbie;Ioannis Kymissis;Aaron D. Franklin
We report the first demonstration of displays driven by embedded transistors that were additively manufactured entirely by aerosol jet printing. The backplanes of the liquid crystal displays (LCDs) consist of transistors printed from graphene, carbon nanotubes, and crystalline nanocellulose onto a glass substrate with prepatterned indium tin oxide electrodes. We addressed challenges of integrating fully printed devices into both the crossbar array structure and layered vertical structure required for an LCD, showing successful pixel switching at up to 60 Hz. As these thin-film transistors are printed exclusively from carbon-based recyclable materials, without high temperatures or vacuum processing, they offer a promising means for reducing waste in future display technologies.
我们首次展示了由嵌入式晶体管驱动的显示器,这种显示器完全是通过气溶胶喷射打印技术添加制造的。液晶显示器(LCD)的背板由石墨烯、碳纳米管和结晶纳米纤维素印制在玻璃基板上的晶体管组成,玻璃基板上有预制图案的氧化铟锡电极。我们解决了将全印刷器件集成到液晶显示器所需的横条阵列结构和分层垂直结构中的难题,成功实现了高达 60 Hz 的像素切换。由于这些薄膜晶体管完全由碳基可回收材料印刷而成,无需高温或真空处理,因此为减少未来显示技术中的浪费提供了一种可行的方法。
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引用次数: 0
Low Voltage NIPIN Symmetric and Bi-Directional Diode for System Level ESD Protection 用于系统级ESD保护的低压NIPIN对称和双向二极管
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477747
Jayatika Sakhuja;Udayan Ganguly;Sandip Lashkare
Low voltage (<1V) bi-directional and symmetric electrostatic discharge (ESD) protection devices are essential for system level ESD protection of low voltage electronics such Low voltage GPIO for MCU, Sub-20nm I/O’s, and potentially for next gen interfaces USB3.2 Gen2, Thunderbolt 4. Here, a triangular barrier designed Silicon NIPIN (n+ -i-p+ -i-n+) punch-through diode with variable voltage <0.5V to 2V is proposed for low-voltage system level ESD protection. The NIPIN diode utilizes the sub-bandgap voltage impact ionization to enable the ultra-low voltage breakdown. The control over the breakdown voltage is demonstrated via TCAD simulations by controlling the lengths of intrinsic, and p+ -doped regions and the doping of p+ -doped region. Finally, standoff voltage and clamping voltages are compared with other low voltage protection devices and demonstrate near ideal voltage performance of the NIPIN protection device. Such a low voltage ESD protection with low clamping voltage is a critical development for low-voltage electronics.
低电压(<1V)双向和对称静电放电(ESD)保护装置对于系统级ESD保护是必不可少的,例如用于MCU的低电压GPIO, Sub-20nm I/O,以及潜在的下一代接口USB3.2 Gen2, Thunderbolt 4。本文提出了一种三角形势垒设计的可变电压<0.5V至2V的硅NIPIN (n+ -i-p+ -i-n+)穿孔二极管,用于低压系统级ESD保护。NIPIN二极管利用亚带隙电压冲击电离实现超低电压击穿。通过TCAD仿真证明了通过控制本征区、掺p+区和掺p+区长度来控制击穿电压。最后,通过与其他低压保护器件的定电压和箝位电压的比较,证明了NIPIN保护器件的电压性能接近理想。这种低箝位电压的低电压ESD保护是低压电子技术的重要发展。
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引用次数: 0
Solution-Processed CuSCN Films With Low Toxic and Environmentally Friendly Solvent for Efficient All-Inorganic CuInS₂ Solar Cells 高效全无机CuInS 2太阳能电池用低毒环保溶剂溶液处理CuSCN薄膜
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477430
Jiajin Kuang;Rong Liu;Wenbo Cao;Yang Wang;Chong Chen;Junwei Chen;Mingtai Wang
Indium copper sulfide (CuInS $_{{2}}text {)}$ has attracted considerable attention as an efficient and stable photon-absorbing material for inorganic heterojunction solar cells. Hole transport layer (HTL), serving as a hole extracting material, plays an integral role in determining device performance of solar cells. Here, the high-quality CuSCN film has been prepared successfully by using green mixed solution (dimethyl sulfoxide and dipropyl sulfide) and employed firstly to fabricate efficient CuInS2 planar heterojunction (PHJ) solar cells. The morphology, absorption properties, crystallinity and crystal orientation of CuSCN film are investigated by scanning electron microscopy (SEM), ultraviolet-visible spectroscopy (UV-vis) and X-ray diffraction (XRD) techniques. Results show the CuSCN film layer ( ${T}_{c} = 100~^{text {o}}$ C) suggests good crystallinity and superior transmittance. The champion CuInS2 PHJ solar cell with inorganic CuSCN HTM achieves an inspiring power conversion efficiency ( $eta text {)}$ of 5.0% with the highest fill factor (FF) of 65.66% in the similar photovoltaic devices.
硫化铟铜(CuInS $_{{2}}text{)}}$作为一种高效稳定的无机异质结太阳能电池光子吸收材料受到了广泛关注。空穴传输层(HTL)作为一种空穴提取材料,在太阳能电池器件性能中起着不可或缺的作用。本文采用绿色混合溶液(二甲基亚砜和二丙基硫化物)制备了高质量的CuSCN薄膜,并首次用于制备高效的CuInS2平面异质结(PHJ)太阳能电池。采用扫描电子显微镜(SEM)、紫外可见光谱(UV-vis)和x射线衍射(XRD)技术对CuSCN薄膜的形貌、吸收性能、结晶度和晶体取向进行了研究。结果表明,CuSCN薄膜层(${T}_{c} = 100~^{text {o}}$ c)结晶度好,透光性好。无机CuSCN HTM的冠军CuInS2 PHJ太阳能电池实现了令人鼓舞的5.0%的功率转换效率($eta text{)}$,在同类光伏器件中最高的填充因子(FF)为65.66%。
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引用次数: 0
Rapid On-Wafer Quality Screening of AlGaN/GaN Superlattice Castellated Field Effect Transistors Using Short-Term Stress and Electroluminescence 利用短期应力和电致发光技术快速筛选AlGaN/GaN超晶格巢状场效应晶体管的片上质量
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3478073
Bazila Parvez;Akhil S. Kumar;James W. Pomeroy;Matthew D. Smith;Robert S. Howell;Martin Kuball
A electroluminescence (EL) based methodology has been devised to screen AlGaN/GaN Super-Lattice Castellated Field Effect Transistors (SLCFETs). EL intensity captured during off-state stressing has been correlated with an increase in gate leakage current after stress. Two off-state constant-voltage stress conditions were used, both applied over a stress time ( ${mathrm {t}}_{text {stress}}$ ) of 90 seconds: (a) ${mathrm{V}}_{text {GS}} = -12$ V, ${mathrm{V}}_{text {DS}} = 12$ V, and (b) ${mathrm{V}}_{text {GS}} = -12$ V, ${mathrm{V}}_{text {DS}} = 14$ V. The integrated EL intensity was found to scale with the ratio of off-state gate leakage current before and after the stress. The results were verified using step-stress tests to find the breakdown voltage (BV) of the gate dielectric of the stressed devices. BV was again found to scale with the measured integrated EL intensity for both the stress conditions. The results show that a short duration off-state stress in conjunction with EL can be a beneficial tool for quick assessment of the quality of gate dielectric across the wafer without incurring any significant damage to the devices. This becomes especially useful for rapid on-wafer device screening during large-scale production.
设计了一种基于电致发光(EL)的方法来筛选AlGaN/GaN超晶格巢状场效应晶体管(slcfet)。在非状态应力期间捕获的EL强度与应力后栅漏电流的增加相关。采用两种断态恒压应力条件,均施加90秒的应力时间(${mathrm{t}}_{text {stress}}$):(a) ${mathrm{V}}_{text {GS}} = -12$ V, ${mathrm{V}}_{text {DS}} = 12$ V, (b) ${mathrm{GS}} = -12$ V, ${mathrm{V}}_{text {DS}} = 14$ V。综合EL强度与应力前后断态栅漏电流的比值成正比。通过阶跃应力测试,得到了受应力器件栅介质的击穿电压(BV)。在两种应力条件下,BV再次发现与测量的综合EL强度成比例。结果表明,结合EL的短时间非状态应力可以作为快速评估晶圆上栅极介电质量的有益工具,而不会对器件造成任何重大损害。这对于大规模生产过程中快速筛选晶圆上器件特别有用。
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引用次数: 0
Effective Interface Channel Control in IGZO/ITO Heterostructure-Channel Thin Film Transistors IGZO/ITO 异质结构沟道薄膜晶体管中的有效界面沟道控制
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477438
Jie Luo;Yanyu Yang;Yupeng Lu;Yunjiao Bao;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo
During the investigation of amorphous oxide semiconductor thin film transistors (TFTs), researchers found that TFTs containing a heterostructure-channel demonstrate exceptional mobility. This study focuses on the physical insights into the interfacial channel formation and modulating the device performance. The InGaZnO / InSnO heterostructure-channel TFTs were utilized. The band structure of their interface channel was elucidated by Ultraviolet Photoelectron Spectroscopy and Reflection Electron Energy Loss Spectroscopy. Through the examination of the band structures of heterostructure -channel TFTs, we have discovered that the thickness of the InSnO layer can modify the interface band-edge via the quantum confinement effect. By that, the threshold voltage of the heterostructure-channel TFT was altered.
在对非晶氧化物半导体薄膜晶体管(TFT)的研究过程中,研究人员发现含有异质结构沟道的 TFT 具有优异的迁移率。本研究的重点是对界面沟道形成和器件性能调制的物理洞察。研究采用了 InGaZnO / InSnO 异质结构沟道 TFT。利用紫外光电子能谱和反射电子能量损失能谱阐明了其界面沟道的能带结构。通过研究异质结构沟道 TFT 的带状结构,我们发现 InSnO 层的厚度可以通过量子约束效应改变界面带边。由此,异质结构沟道 TFT 的阈值电压发生了变化。
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引用次数: 0
A Magnetic-Free RF Circulator Based on Spatiotemporal Modulated LN/SiO2/Sapphire Surface Acoustic Wave Delay Lines 基于时空调制LN/SiO2/蓝宝石表面声波延迟线的无磁射频环行器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-10 DOI: 10.1109/LED.2024.3477505
Ya-Ching Yu;Chia-Hsien Tsai;Zhi-Qiang Lee;Chin-Yu Chang;Cheng-Chien Lin;Yi-Cheng Liao;Tzu-Hsuan Hsu;Ming-Huang Li
In this study, we explore the design and implementation of a magnetic-free radio frequency (RF) circulator using spatiotemporal modulated thin film surface acoustic wave delay lines. The four-port circulator is designed based on two tightly packed low-propagation loss acoustic delay lines (ADLs) on a single LN/SiO2/sapphire (LNOS) chip with sequentially-switched delay line (SSDL) topology, complemented by two external switch modules composed of commercially available RF switches. The ADLs are characterized by a low insertion loss (IL) of 5.54 dB, a wide 3-dB bandwidth of 5.45%, and a large group delay of 110 ns at 880 MHz, operating in shear horizontal (SH) mode. The implemented circulator achieves a nonreciprocal contrast of 18.2 dB and 20.8 dB between IL of 10.8 dB and isolation of 29 dB (port 3 to port 1) and 31.6 dB (port 4 to port 1) over an isolation bandwidth of 6% (53.6 MHz), with a low modulation frequency of 2.27 MHz.
在这项研究中,我们探索了使用时空调制薄膜表面声波延迟线设计和实现无磁射频(RF)环行器。该四端口环行器设计基于两个紧密封装的低传播损耗声学延迟线(adl),该延迟线位于单个LN/SiO2/蓝宝石(LNOS)芯片上,具有顺序切换延迟线(SSDL)拓扑,并辅以两个由市售射频开关组成的外部开关模块。adl具有5.54 dB的低插入损耗(IL)、5.45%的宽3db带宽和880 MHz时110 ns的大群延迟,工作在剪切水平(SH)模式。所实现的环行器在隔离带宽为6% (53.6 MHz),调制频率为2.27 MHz的情况下,在IL为10.8 dB,隔离度为29 dB(端口3到端口1)和31.6 dB(端口4到端口1)之间实现了18.2 dB和20.8 dB的非倒数对比度。
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引用次数: 0
期刊
IEEE Electron Device Letters
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