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Self-Rectifying Resistive Switching Characteristics in CsMAFAPbIBr Perovskite-Based Memristor Device 基于 CsMAFAPbIBr 包晶石的自整流电阻开关特性
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-06 DOI: 10.1109/LED.2024.3455372
Jia Cheng Li;Ying Chen Li;Zi Chun Liu;Yuan Xiao Ma;Ye Liang Wang
Self-rectifying memristors have been attracting attentions to suppress sneak current in crossbar without raising integration complexity. In this work, memristors based on Cs0.05(MA0.17FA $_{{0}.{83}}text {)}_{{0}.{95}}$ Pb(I0.83Br $_{{0}.{17}}text {)}_{{3}}$ perovskite film are presented with a high rectification ratio around 514 and an on/off ratio of 1362. The device can continuously operate for $10^{{4}}$ cycles and the retention time is over $10^{{4}}$ seconds at $85~^{circ }$ C. In-depth mechanistic analysis reveals that the resistive-switching behavior originates from the migration of iodide ions, which is accompanied by a high rectification ratio produced by the high barrier at the interface between Au and Cs0.05(MA0.17FA $_{{0}.{83}}text {)}_{{0}.{95}}$ Pb(I0.83Br $_{{0}.{17}}text {)}_{{3}}$ . The maximum effective array size based on the perovskite memristor is up to 1747 with a read margin (RM) of 10%. We believe that this work can pave a way for the development of perovskites thin films in high-density memristive arrays.
在不提高集成复杂度的情况下,自整流忆阻器抑制了交叉条中的潜行电流,因而备受关注。在这项研究中,基于 Cs0.05(MA0.17FA $_{{0}.{83}text {)}_{{0}.{95}}$ Pb(I0.83Br $_{{0}.{17}}text {)}_{{3}}$ 包晶薄膜的忆阻器具有约 514 的高整流比和 1362 的开/关比。该器件可连续工作 10^{{4}}$ 个周期,在 85~^{circ }$ C 下的保持时间超过 10^{{4}}$ 秒。深入的机理分析表明,电阻开关行为源于碘离子的迁移,伴随着金与 Cs0.05(MA0.17FA $_{{0}.{83}text {)}_{{0}.{95}}$ Pb(I0.83Br $_{{0}.{17}}text {)}_{{3}}$ 之间界面的高阻抗所产生的高整流比。基于包晶体忆阻器的最大有效阵列尺寸可达 1747,读取余量(RM)为 10%。我们相信,这项工作能为开发高密度忆阻器阵列中的过氧化物薄膜铺平道路。
{"title":"Self-Rectifying Resistive Switching Characteristics in CsMAFAPbIBr Perovskite-Based Memristor Device","authors":"Jia Cheng Li;Ying Chen Li;Zi Chun Liu;Yuan Xiao Ma;Ye Liang Wang","doi":"10.1109/LED.2024.3455372","DOIUrl":"10.1109/LED.2024.3455372","url":null,"abstract":"Self-rectifying memristors have been attracting attentions to suppress sneak current in crossbar without raising integration complexity. In this work, memristors based on Cs0.05(MA0.17FA\u0000<inline-formula> <tex-math>$_{{0}.{83}}text {)}_{{0}.{95}}$ </tex-math></inline-formula>\u0000Pb(I0.83Br\u0000<inline-formula> <tex-math>$_{{0}.{17}}text {)}_{{3}}$ </tex-math></inline-formula>\u0000 perovskite film are presented with a high rectification ratio around 514 and an on/off ratio of 1362. The device can continuously operate for \u0000<inline-formula> <tex-math>$10^{{4}}$ </tex-math></inline-formula>\u0000 cycles and the retention time is over \u0000<inline-formula> <tex-math>$10^{{4}}$ </tex-math></inline-formula>\u0000 seconds at \u0000<inline-formula> <tex-math>$85~^{circ }$ </tex-math></inline-formula>\u0000C. In-depth mechanistic analysis reveals that the resistive-switching behavior originates from the migration of iodide ions, which is accompanied by a high rectification ratio produced by the high barrier at the interface between Au and Cs0.05(MA0.17FA\u0000<inline-formula> <tex-math>$_{{0}.{83}}text {)}_{{0}.{95}}$ </tex-math></inline-formula>\u0000 Pb(I0.83Br\u0000<inline-formula> <tex-math>$_{{0}.{17}}text {)}_{{3}}$ </tex-math></inline-formula>\u0000. The maximum effective array size based on the perovskite memristor is up to 1747 with a read margin (RM) of 10%. We believe that this work can pave a way for the development of perovskites thin films in high-density memristive arrays.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2106-2109"},"PeriodicalIF":4.1,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Oxidizer Engineering of ALD for Efficient Production of ZrO2 Capacitors in DRAM 利用 ALD 氧化炉工程高效生产 DRAM 中的氧化锆电容器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-06 DOI: 10.1109/LED.2024.3455338
Xinyi Tang;Yuanbiao Li;Songming Miao;Xiao Chen;Guangwei Xu;Di Lu;Shibing Long
This manuscript aims to enhance the production efficiency while maintaining the electric properties of the dynamic random-access memory capacitor dielectric ZrO2 by optimizing its growth processes. This is achieved through oxidizer engineering by increasing the O3 flux (1k sccm to 10k sccm) and using an extremely fast pulse time (1.5 s) during the atomic layer deposition of ZrO2. This “short pulse - high oxidizer flux” method elevates the k value, effectively reduces leakage, and cuts off the growth time. The application of this method yields ZrO2-based capacitors of low leakage current densities ( ${2}times {10}^{-{8}}$ A/cm2) and low equivalent oxide thicknesses of 0.55 nm (at 0.5 V, 10k sccm O3 flux), holding significant potential as a key facilitator for future ultra-high-density DRAM systems.
本手稿旨在通过优化动态随机存取存储器电容器电介质 ZrO2 的生长过程,在提高生产效率的同时保持其电气特性。在 ZrO2 的原子层沉积过程中,通过增加 O3 通量(1k sccm 至 10k sccm)和使用极快的脉冲时间(1.5 秒)来实现氧化剂工程。这种 "短脉冲-高氧化剂通量 "方法提高了 k 值,有效减少了泄漏,并缩短了生长时间。应用这种方法制备的基于 ZrO2 的电容器漏电流密度低({2}times {10}^{-{8}}$ A/cm2 ),等效氧化物厚度低至 0.55 nm(在 0.5 V、10k sccm O3 通量条件下),极有可能成为未来超高密度 DRAM 系统的关键推动因素。
{"title":"Oxidizer Engineering of ALD for Efficient Production of ZrO2 Capacitors in DRAM","authors":"Xinyi Tang;Yuanbiao Li;Songming Miao;Xiao Chen;Guangwei Xu;Di Lu;Shibing Long","doi":"10.1109/LED.2024.3455338","DOIUrl":"10.1109/LED.2024.3455338","url":null,"abstract":"This manuscript aims to enhance the production efficiency while maintaining the electric properties of the dynamic random-access memory capacitor dielectric ZrO2 by optimizing its growth processes. This is achieved through oxidizer engineering by increasing the O3 flux (1k sccm to 10k sccm) and using an extremely fast pulse time (1.5 s) during the atomic layer deposition of ZrO2. This “short pulse - high oxidizer flux” method elevates the k value, effectively reduces leakage, and cuts off the growth time. The application of this method yields ZrO2-based capacitors of low leakage current densities (\u0000<inline-formula> <tex-math>${2}times {10}^{-{8}}$ </tex-math></inline-formula>\u0000 A/cm2) and low equivalent oxide thicknesses of 0.55 nm (at 0.5 V, 10k sccm O3 flux), holding significant potential as a key facilitator for future ultra-high-density DRAM systems.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2114-2117"},"PeriodicalIF":4.1,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-Order Mode Suppression in Traveling Wave Tube Based on Conformally Loaded Metasurface Filter 基于共形加载元面滤波器的行波管高阶模式抑制技术
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-06 DOI: 10.1109/LED.2024.3455336
Gaoli Xiang;Zhigang Lu;Peng Gao;Jingrui Duan;Yuan Zheng;Zhanliang Wang;Shaomeng Wang;Huarong Gong;Yubin Gong
In order to address the high-order mode (HOM) oscillation that may affect the stability of traveling wave tubes (TWTs), a new strategy called conformally loaded metasurface filter (MF) has been proposed. By loading MF into the waveguide type slow wave structure (SWS), the frequency-selective transmission properties of MF can confine the operating mode in the SWS, while the nonoperating modes are transmitted out. Therefore, the amplitude of HOMs is limited, even if synchronization conditions are met, thereby, the risk of HOM oscillation is reduced. Taking the staggered double grating slow wave structure (SDG-SWS) as an example, the effectiveness of the strategy was verified. In addition, MF is easy to manufacture, which makes it have promising applications in high-power and high-frequency THz amplifiers.
高阶模式(HOM)振荡可能会影响行波管(TWT)的稳定性,为了解决这一问题,有人提出了一种新策略,即保形加载元表面滤波器(MF)。通过在波导型慢波结构(SWS)中加载 MF,MF 的频率选择传输特性可以将工作模式限制在 SWS 中,而将非工作模式传输出去。因此,即使满足同步条件,HOM 的振幅也会受到限制,从而降低 HOM 震荡的风险。以交错双光栅慢波结构(SDG-SWS)为例,验证了该策略的有效性。此外,MF 易于制造,因此在大功率和高频太赫兹放大器中具有广阔的应用前景。
{"title":"High-Order Mode Suppression in Traveling Wave Tube Based on Conformally Loaded Metasurface Filter","authors":"Gaoli Xiang;Zhigang Lu;Peng Gao;Jingrui Duan;Yuan Zheng;Zhanliang Wang;Shaomeng Wang;Huarong Gong;Yubin Gong","doi":"10.1109/LED.2024.3455336","DOIUrl":"10.1109/LED.2024.3455336","url":null,"abstract":"In order to address the high-order mode (HOM) oscillation that may affect the stability of traveling wave tubes (TWTs), a new strategy called conformally loaded metasurface filter (MF) has been proposed. By loading MF into the waveguide type slow wave structure (SWS), the frequency-selective transmission properties of MF can confine the operating mode in the SWS, while the nonoperating modes are transmitted out. Therefore, the amplitude of HOMs is limited, even if synchronization conditions are met, thereby, the risk of HOM oscillation is reduced. Taking the staggered double grating slow wave structure (SDG-SWS) as an example, the effectiveness of the strategy was verified. In addition, MF is easy to manufacture, which makes it have promising applications in high-power and high-frequency THz amplifiers.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2189-2192"},"PeriodicalIF":4.1,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multi-Domain Dynamics and Ultimate Scalability of CMOS-Compatible FeFETs CMOS 兼容型 FeFET 的多域动力学和终极可扩展性
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-05 DOI: 10.1109/LED.2024.3454638
Nilesh Pandey;Yogesh Singh Chauhan;Leonard F. Register;Sanjay K. Banerjee
Recent research on CMOS-compatible FETs aims at aggressive scaling, targeting advanced performance nodes (7 nm - 14 nm), with the ultimate scalability limit posed by direct source-to-drain tunneling (DSDT). This letter investigates the impact of multi-domain dynamics in the ferroelectric gate dielectric on FeFET scalability. Coupled solutions of 2-D Poisson’s equation with the ferroelectric’s 2-D thermodynamics model (depolarizing energy + gradient energy + free energy) are the basis of a phase-field model. Varying ferroelectric and dielectric layer thicknesses can be used to engineer domain density. Minimal DSDT, maximum ON/OFF current ratio, and maximum memory window (MW) are possible when a single domain wall (domain density = 2) is located near the mid-channel. Additional domain walls increase DSDT. Furthermore, the drain electric field shifts the domain wall towards the source, increasing DSDT. Spatial gradient in polarization drastically impacts DSDT, with hard domain walls exhibiting lower DSDT due to increased polarization gradient. Our study predicts an optimal physical gate length of 12 nm (domain density = 2) with I $_{textit {ON}}$ /I $_{textit {OFF}}~sim ~{1}times {10} ^{{6}}$ and subthreshold slope $sim ~100$ mV/dec.
近期有关 CMOS 兼容型场效应晶体管的研究以先进的性能节点(7 纳米 - 14 纳米)为目标,积极进行扩展,最终的可扩展性限制是直接源极到漏极隧道效应(DSDT)。这封信研究了铁电栅极电介质中的多域动力学对 FeFET 可扩展性的影响。二维泊松方程与铁电二维热力学模型(去极化能 + 梯度能 + 自由能)的耦合解是相场模型的基础。不同的铁电层和介电层厚度可用于设计畴密度。当单个畴壁(畴密度 = 2)位于中通道附近时,可实现最小 DSDT、最大导通/关断电流比和最大存储窗口 (MW)。额外的畴壁会增加 DSDT。此外,漏极电场会将畴壁移向源极,从而增加 DSDT。极化的空间梯度对 DSDT 有很大影响,由于极化梯度增加,硬畴壁的 DSDT 更低。根据我们的研究预测,最佳物理栅极长度为 12 nm(畴密度 = 2),I $_{textit {ON}}$ /I $_{textit {OFF}}~sim ~{1}times {10}。^{{6}}$ 和阈下斜率 $sim ~100$ mV/dec。
{"title":"Multi-Domain Dynamics and Ultimate Scalability of CMOS-Compatible FeFETs","authors":"Nilesh Pandey;Yogesh Singh Chauhan;Leonard F. Register;Sanjay K. Banerjee","doi":"10.1109/LED.2024.3454638","DOIUrl":"10.1109/LED.2024.3454638","url":null,"abstract":"Recent research on CMOS-compatible FETs aims at aggressive scaling, targeting advanced performance nodes (7 nm - 14 nm), with the ultimate scalability limit posed by direct source-to-drain tunneling (DSDT). This letter investigates the impact of multi-domain dynamics in the ferroelectric gate dielectric on FeFET scalability. Coupled solutions of 2-D Poisson’s equation with the ferroelectric’s 2-D thermodynamics model (depolarizing energy + gradient energy + free energy) are the basis of a phase-field model. Varying ferroelectric and dielectric layer thicknesses can be used to engineer domain density. Minimal DSDT, maximum ON/OFF current ratio, and maximum memory window (MW) are possible when a single domain wall (domain density = 2) is located near the mid-channel. Additional domain walls increase DSDT. Furthermore, the drain electric field shifts the domain wall towards the source, increasing DSDT. Spatial gradient in polarization drastically impacts DSDT, with hard domain walls exhibiting lower DSDT due to increased polarization gradient. Our study predicts an optimal physical gate length of 12 nm (domain density = 2) with I\u0000<inline-formula> <tex-math>$_{textit {ON}}$ </tex-math></inline-formula>\u0000/I\u0000<inline-formula> <tex-math>$_{textit {OFF}}~sim ~{1}times {10} ^{{6}}$ </tex-math></inline-formula>\u0000 and subthreshold slope \u0000<inline-formula> <tex-math>$sim ~100$ </tex-math></inline-formula>\u0000 mV/dec.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2098-2101"},"PeriodicalIF":4.1,"publicationDate":"2024-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
γ-Ray-Induced Effects in Al:HfO₂-Based Memristor Devices for Memory and Sensor Applications 用于存储器和传感器应用的基于 Al:HfO2 的晶闸管器件中的γ射线诱导效应
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454294
Om Kumar Prasad;Sridhar Chandrasekaran;Mari Napari;Irwan Purnama;Asep Nugroho;Dimitra G. Georgiadou;Chin-Han Chung;Kow-Ming Chang;Firman M. Simanjuntak
We observe that $gamma $ -ray radiation affects the formation of the conducting bridge in Ag/Ti/Al:HfO2/Pt devices. We suggest that the $gamma $ -ray breaks Hf-O bonds and affects the properties of metal/insulator interfaces. The radiation-induced interfacial layers promote the transition from write-once-read-many times (WORM) to reversible switching memories. The devices that undergo a higher radiation exposure exhibit a higher forming voltage that we could exploit to sense radiation; an electrical circuit to harness this phenomenon is also proposed. We also observe that the devices exhibit self-healing behavior, where the forming behavior restores once the radiation energy is released. The switching mechanism is explained and proposed to elucidate this phenomenon. This study not only provides insight into the development of memristor devices for space application but also their potential as multipurpose elements for reconfigurable circuits.
我们观察到,伽马射线会影响 Ag/Ti/Al:HfO2/Pt 器件中导电桥的形成。我们认为,伽马射线打破了 Hf-O 键,影响了金属/绝缘体界面的特性。辐射诱导的界面层促进了从一次写入-多次读取(WORM)到可逆开关存储器的过渡。受到较高辐射照射的器件显示出较高的形成电压,我们可以利用这种电压来感应辐射;我们还提出了一种利用这种现象的电路。我们还观察到,这些器件表现出自愈行为,一旦辐射能量释放,成型行为就会恢复。为阐明这一现象,我们解释并提出了开关机制。这项研究不仅为开发用于太空应用的忆阻器器件提供了深入的见解,还为其作为可重构电路的多用途元件提供了潜力。
{"title":"γ-Ray-Induced Effects in Al:HfO₂-Based Memristor Devices for Memory and Sensor Applications","authors":"Om Kumar Prasad;Sridhar Chandrasekaran;Mari Napari;Irwan Purnama;Asep Nugroho;Dimitra G. Georgiadou;Chin-Han Chung;Kow-Ming Chang;Firman M. Simanjuntak","doi":"10.1109/LED.2024.3454294","DOIUrl":"10.1109/LED.2024.3454294","url":null,"abstract":"We observe that \u0000<inline-formula> <tex-math>$gamma $ </tex-math></inline-formula>\u0000-ray radiation affects the formation of the conducting bridge in Ag/Ti/Al:HfO2/Pt devices. We suggest that the \u0000<inline-formula> <tex-math>$gamma $ </tex-math></inline-formula>\u0000-ray breaks Hf-O bonds and affects the properties of metal/insulator interfaces. The radiation-induced interfacial layers promote the transition from write-once-read-many times (WORM) to reversible switching memories. The devices that undergo a higher radiation exposure exhibit a higher forming voltage that we could exploit to sense radiation; an electrical circuit to harness this phenomenon is also proposed. We also observe that the devices exhibit self-healing behavior, where the forming behavior restores once the radiation energy is released. The switching mechanism is explained and proposed to elucidate this phenomenon. This study not only provides insight into the development of memristor devices for space application but also their potential as multipurpose elements for reconfigurable circuits.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2082-2085"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222896","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Achieving High Yield of Perpendicular SOT-MTJ Manufactured on 300 mm Wafers 实现在 300 毫米晶圆上制造垂直 SOT-MTJ 的高产量
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454609
Wenlong Yang;Zhenghui Ji;Yang Gao;Kaiyuan Zhou;Qijun Guo;Dinggui Zeng;Shasha Wang;Ming Wang;Lijie Shen;Guilin Chen;Yihui Sun;Enlong Liu;Shikun He
The large-scale fabrication of three-terminal magnetic tunnel junctions (MTJs) with high yield is becoming increasingly crucial, especially with the growing interest in spin-orbit torque (SOT) magnetic random access memory (MRAM) as the next generation of MRAM technology. To achieve high yield and consistent device performance in MTJs with perpendicular magnetic anisotropy, an integration flow has been developed that incorporates special MTJ etching technique and other CMOS-compatible processes on a 300 mm wafer manufacturing platform. Systematic studies have been conducted on device performance and statistical uniformity, encompassing magnetic properties, electrical switching behavior, and reliability. Achievements include a switching current of $680~mu $ A at 2 ns, a TMR as high as 119%, ultra-high endurance (over $10^{{12}}$ cycles), and excellent uniformity in the fabricated SOT-MTJ devices, with a yield of up to 99.6%. The proposed integration process, featuring high yield, is anticipated to streamline the mass production of SOT-MRAM.
大规模制造高产量的三端磁隧道结(MTJ)正变得越来越重要,特别是随着自旋轨道力矩(SOT)磁性随机存取存储器(MRAM)作为下一代 MRAM 技术受到越来越多的关注。为了在具有垂直磁各向异性的 MTJ 中实现高产量和稳定的器件性能,我们在 300 毫米晶圆制造平台上开发了一种集成流程,其中集成了特殊的 MTJ 刻蚀技术和其他 CMOS 兼容工艺。对器件性能和统计均匀性进行了系统研究,包括磁性能、电气开关行为和可靠性。所取得的成果包括:2 ns 时的开关电流为 680~mu $ A、TMR 高达 119%、超高耐用性(超过 10^{{12}}$ 周期),以及所制造的 SOT-MTJ 器件具有出色的均匀性,良品率高达 99.6%。所提出的集成工艺具有高良率的特点,有望简化 SOT-MRAM 的大规模生产。
{"title":"Achieving High Yield of Perpendicular SOT-MTJ Manufactured on 300 mm Wafers","authors":"Wenlong Yang;Zhenghui Ji;Yang Gao;Kaiyuan Zhou;Qijun Guo;Dinggui Zeng;Shasha Wang;Ming Wang;Lijie Shen;Guilin Chen;Yihui Sun;Enlong Liu;Shikun He","doi":"10.1109/LED.2024.3454609","DOIUrl":"10.1109/LED.2024.3454609","url":null,"abstract":"The large-scale fabrication of three-terminal magnetic tunnel junctions (MTJs) with high yield is becoming increasingly crucial, especially with the growing interest in spin-orbit torque (SOT) magnetic random access memory (MRAM) as the next generation of MRAM technology. To achieve high yield and consistent device performance in MTJs with perpendicular magnetic anisotropy, an integration flow has been developed that incorporates special MTJ etching technique and other CMOS-compatible processes on a 300 mm wafer manufacturing platform. Systematic studies have been conducted on device performance and statistical uniformity, encompassing magnetic properties, electrical switching behavior, and reliability. Achievements include a switching current of \u0000<inline-formula> <tex-math>$680~mu $ </tex-math></inline-formula>\u0000A at 2 ns, a TMR as high as 119%, ultra-high endurance (over \u0000<inline-formula> <tex-math>$10^{{12}}$ </tex-math></inline-formula>\u0000 cycles), and excellent uniformity in the fabricated SOT-MTJ devices, with a yield of up to 99.6%. The proposed integration process, featuring high yield, is anticipated to streamline the mass production of SOT-MRAM.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2094-2097"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222894","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synergistic Carbonyl and Cyano Passivation for Efficient Blade-Coated Perovskite Solar Cells 羰基和氰基协同钝化,实现高效叶片涂层包覆型太阳电池
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454522
Xinxin Li;Long Zhou;Qianyu Chen;Yunlong Zhang;Xinyuan Feng;Yuanbo Du;Dazheng Chen;Weidong Zhu;He Xi;Jincheng Zhang;Chunfu Zhang;Yue Hao
Homogeneous and defect-minimized perovskite films are critical for efficient perovskite solar cells (PSCs). Herein, we introduce a small molecule with electron-rich carbonyl and cyano groups in the perovskite films to regulate the crystallization process and passivate defects. The electron-rich carbonyl and cyano groups of the FDP molecules could coordinate with Pb $^{{2}+}$ dangling bonds and reduce the density of VPb. The synergistic effect of crystallization modulation and defect passivation could significantly improve film quality and suppress carrier nonradiative recombination. As a result, the champion devices realize an increased efficiency of 23.39% for small areas (0.08 cm $^{{2}}text {)}$ and a high efficiency of 20.69% for larger areas (1 cm $^{{2}}text {)}$ . The inverted perovskite modules with an aperture area of 45 cm2 obtain a champion efficiency of 20.38%, indicating a teeny efficiency loss of 1.5% from 1 to 45 cm2. These findings provide an innovative avenue to achieve high-efficiency perovskite modules and facilitate the commercialization of large-area PSCs.
均质和缺陷最小化的包晶体薄膜是高效包晶体太阳能电池(PSCs)的关键。在此,我们在包晶体薄膜中引入了一种富含电子羰基和氰基的小分子,以调节结晶过程并钝化缺陷。FDP 分子中富含电子的羰基和氰基可以与 Pb $^{{2}+}$ 悬键配位,降低 VPb 的密度。结晶调制和缺陷钝化的协同效应可以显著提高薄膜质量,抑制载流子非辐射重组。因此,小面积(0.08 cm $^{{{2}}text {)}$冠军器件的效率提高了 23.39%,大面积(1 cm $^{{{2}}text {)}$冠军器件的效率高达 20.69%。孔径面积为 45 平方厘米的倒置过氧化物模块获得了 20.38% 的冠军效率,这表明从 1 平方厘米到 45 平方厘米的效率损失仅为 1.5%。这些发现为实现高效率的透辉石模块提供了一条创新途径,促进了大面积聚光太阳能电池的商业化。
{"title":"Synergistic Carbonyl and Cyano Passivation for Efficient Blade-Coated Perovskite Solar Cells","authors":"Xinxin Li;Long Zhou;Qianyu Chen;Yunlong Zhang;Xinyuan Feng;Yuanbo Du;Dazheng Chen;Weidong Zhu;He Xi;Jincheng Zhang;Chunfu Zhang;Yue Hao","doi":"10.1109/LED.2024.3454522","DOIUrl":"10.1109/LED.2024.3454522","url":null,"abstract":"Homogeneous and defect-minimized perovskite films are critical for efficient perovskite solar cells (PSCs). Herein, we introduce a small molecule with electron-rich carbonyl and cyano groups in the perovskite films to regulate the crystallization process and passivate defects. The electron-rich carbonyl and cyano groups of the FDP molecules could coordinate with Pb\u0000<inline-formula> <tex-math>$^{{2}+}$ </tex-math></inline-formula>\u0000 dangling bonds and reduce the density of VPb. The synergistic effect of crystallization modulation and defect passivation could significantly improve film quality and suppress carrier nonradiative recombination. As a result, the champion devices realize an increased efficiency of 23.39% for small areas (0.08 cm\u0000<inline-formula> <tex-math>$^{{2}}text {)}$ </tex-math></inline-formula>\u0000 and a high efficiency of 20.69% for larger areas (1 cm\u0000<inline-formula> <tex-math>$^{{2}}text {)}$ </tex-math></inline-formula>\u0000. The inverted perovskite modules with an aperture area of 45 cm2 obtain a champion efficiency of 20.38%, indicating a teeny efficiency loss of 1.5% from 1 to 45 cm2. These findings provide an innovative avenue to achieve high-efficiency perovskite modules and facilitate the commercialization of large-area PSCs.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2162-2165"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Novel Dual-Sheet-Beam Backward Wave Oscillator Based on Sub-Terahertz Band V-Shaped Orthogonal Grating Waveguide 基于亚太赫兹波段 V 形正交光栅波导的新型双板束后向波振荡器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454508
Xinlun Xie;Guoxiang Shu;Jiacai Liao;Huaxing Pan;Shaochen Ma;Jiawei Tang;Siyuan Liu;Mingze Li;Wenlong He
A sub-terahertz band dual-sheet-beam backward wave oscillator (BWO) highlighted with wide tunable bandwidth and enhanced radiation power is presented in this letter. This design includes two key innovations: 1) a novel V-shaped orthogonal grating waveguide (VOGW) operating in TM $_{{21}}^{text {++}}$ high-order mode (++ represents the electric field vectors within two beam tunnel regions are in-phase) is proposed, which exhibits higher coupling impedance compared with the traditional OGW; 2) a novel E-plane L-bend overmoded coupler with a tapered transition is designed for efficient power extraction of the TM $_{{21}}^{text {++}}$ mode. For verification, an interaction circuit made of 40-period VOGW and two identical couplers was fabricated, and the measured results agreed well with simulation predictions having considered conduct loss and assembly errors. PIC simulation for this innovative BWO predicts a stable radiation power of 182.4-317.5 W across 246.8-265.6 GHz, demonstrating a power increment of up to 43 W (~15%) in comparison to the OGW based BWO.
本信介绍了一种亚太赫兹波段双片光束后向波振荡器(BWO),该振荡器具有宽可调带宽和更强的辐射功率。该设计包括两项关键创新:1)提出了一种工作在 TM $_{{21}}^{text {++}$高阶模式(++表示两个波束隧道区域内的电场矢量同相)的新型 V 形正交光栅波导(VOGW),与传统的 OGW 相比,它具有更高的耦合阻抗;2)设计了一种具有锥形过渡的新型 E 平面 L 弯过编码耦合器,用于高效提取 TM $_{{21}}^{text {++}$模式的功率。为了进行验证,制作了一个由 40 周期 VOGW 和两个相同耦合器组成的相互作用电路,测量结果与考虑了传导损耗和装配误差的仿真预测结果非常吻合。针对这种创新型 BWO 的 PIC 仿真预测,在 246.8-265.6 GHz 频率范围内的稳定辐射功率为 182.4-317.5 W,与基于 OGW 的 BWO 相比,功率增加了 43 W(约 15%)。
{"title":"A Novel Dual-Sheet-Beam Backward Wave Oscillator Based on Sub-Terahertz Band V-Shaped Orthogonal Grating Waveguide","authors":"Xinlun Xie;Guoxiang Shu;Jiacai Liao;Huaxing Pan;Shaochen Ma;Jiawei Tang;Siyuan Liu;Mingze Li;Wenlong He","doi":"10.1109/LED.2024.3454508","DOIUrl":"10.1109/LED.2024.3454508","url":null,"abstract":"A sub-terahertz band dual-sheet-beam backward wave oscillator (BWO) highlighted with wide tunable bandwidth and enhanced radiation power is presented in this letter. This design includes two key innovations: 1) a novel V-shaped orthogonal grating waveguide (VOGW) operating in TM\u0000<inline-formula> <tex-math>$_{{21}}^{text {++}}$ </tex-math></inline-formula>\u0000 high-order mode (++ represents the electric field vectors within two beam tunnel regions are in-phase) is proposed, which exhibits higher coupling impedance compared with the traditional OGW; 2) a novel E-plane L-bend overmoded coupler with a tapered transition is designed for efficient power extraction of the TM\u0000<inline-formula> <tex-math>$_{{21}}^{text {++}}$ </tex-math></inline-formula>\u0000 mode. For verification, an interaction circuit made of 40-period VOGW and two identical couplers was fabricated, and the measured results agreed well with simulation predictions having considered conduct loss and assembly errors. PIC simulation for this innovative BWO predicts a stable radiation power of 182.4-317.5 W across 246.8-265.6 GHz, demonstrating a power increment of up to 43 W (~15%) in comparison to the OGW based BWO.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2201-2204"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spatial Electron-Spin Splitter Based on Rashba Spin-Orbit-Coupling Modulated Layered-Semiconductor Quantum Microstructure 基于拉什巴自旋轨道耦合调制层状半导体量子微结构的空间电子-自旋分离器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454235
Mao-Wang Lu;Sai-Yan Chen;Xue-Li Cao;An-Qi Zhang
Goos-Hänchen effect of electrons in a layered semiconductor quantum microstructure is explored. Thanks to Rashba spin-orbit coupling, GH shifts depend obviously on electron spins, causing the dynamic spin polarization in the spatial domain. Besides, this spin polarization can be modulated by the interfacial electric field or the layer thickness. These interesting findings may be helpful for design of the spatial electron-spin splitter.
本文探讨了层状半导体量子微结构中电子的古斯-海因效应。由于拉什巴自旋轨道耦合,GH偏移明显取决于电子自旋,从而导致空间域的动态自旋极化。此外,这种自旋极化还可以受到界面电场或层厚度的调制。这些有趣的发现可能有助于空间电子自旋分离器的设计。
{"title":"Spatial Electron-Spin Splitter Based on Rashba Spin-Orbit-Coupling Modulated Layered-Semiconductor Quantum Microstructure","authors":"Mao-Wang Lu;Sai-Yan Chen;Xue-Li Cao;An-Qi Zhang","doi":"10.1109/LED.2024.3454235","DOIUrl":"10.1109/LED.2024.3454235","url":null,"abstract":"Goos-Hänchen effect of electrons in a layered semiconductor quantum microstructure is explored. Thanks to Rashba spin-orbit coupling, GH shifts depend obviously on electron spins, causing the dynamic spin polarization in the spatial domain. Besides, this spin polarization can be modulated by the interfacial electric field or the layer thickness. These interesting findings may be helpful for design of the spatial electron-spin splitter.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2066-2069"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanically Tunable Broadband Electric Field Enhancement Resonator for Quantum Microwave Measurements 用于量子微波测量的机械可调谐宽带电场增强谐振器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/LED.2024.3454356
Zhiqian Wan;Yi Lin;Kai Yang;Yunqi Fu
Quantum microwave measurement based on Rydberg atoms is a novel microwave measurement technique. To improve its measurement sensitivity over a broadband, this letter presents a mechanically tunable electric field enhancement device, loaded on the the vapor cell. By adjusting the length of the split ring resonator, an electric field enhancement capability of more than 30 dB over a bandwidth of 0.52 GHz to 1.54 GHz is realized in simulation. The experimental results show that its resonance frequency covers from 0.52 GHz to 1.86 GHz with a relative bandwidth of 113%, exhibiting excellent broadband performance. This broadband electric field enhancement device is expected to further improve the performance of quantum microwave measurements.
基于雷德贝格原子的量子微波测量是一种新型微波测量技术。为了提高其宽带测量灵敏度,这封信提出了一种机械可调的电场增强装置,装在蒸发池上。通过调整分裂环谐振器的长度,模拟实现了在 0.52 GHz 至 1.54 GHz 带宽内超过 30 dB 的电场增强能力。实验结果表明,其谐振频率覆盖 0.52 GHz 至 1.86 GHz,相对带宽为 113%,表现出卓越的宽带性能。这种宽带电场增强装置有望进一步提高量子微波测量的性能。
{"title":"Mechanically Tunable Broadband Electric Field Enhancement Resonator for Quantum Microwave Measurements","authors":"Zhiqian Wan;Yi Lin;Kai Yang;Yunqi Fu","doi":"10.1109/LED.2024.3454356","DOIUrl":"10.1109/LED.2024.3454356","url":null,"abstract":"Quantum microwave measurement based on Rydberg atoms is a novel microwave measurement technique. To improve its measurement sensitivity over a broadband, this letter presents a mechanically tunable electric field enhancement device, loaded on the the vapor cell. By adjusting the length of the split ring resonator, an electric field enhancement capability of more than 30 dB over a bandwidth of 0.52 GHz to 1.54 GHz is realized in simulation. The experimental results show that its resonance frequency covers from 0.52 GHz to 1.86 GHz with a relative bandwidth of 113%, exhibiting excellent broadband performance. This broadband electric field enhancement device is expected to further improve the performance of quantum microwave measurements.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2237-2240"},"PeriodicalIF":4.1,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142222895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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IEEE Electron Device Letters
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