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“M”-Shaped Threshold Voltage Shift Induced by Competitive Positive/Negative Gate Switching Stress in Schottky-Type p-GaN Gate HEMTs schottky型p-GaN栅极hemt中竞争性正/负栅极开关应力诱导的“M”型阈值电压偏移
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3480253
Yunfeng Hu;Liang He;Meng Dong;Xinghuan Chen;Yijun Shi;Zhiyuan He;Zongqi Cai;Yiqiang Ni;Hongyue Wang;Zhizhe Wang;Yuan Li;Xiaoli Lu;Yuan Chen;Yiqiang Chen
This work investigates the threshold voltage ( ${V}_{text {th}}text {)}$ instability in Schottky-type p-GaN gate HEMTs subjected to positive/negative gate switching stress. Under the gate switching stress, a characteristic “M”-shaped ${V}_{text {th}}$ curve with elevated ${V}_{text {GS,ON}}$ is revealed. This pattern is ascribed to the competitive transport of electrons and holes. Considering the condition of reduced ${V}_{text {GS, OFF}}$ , an increasing ${V} _{text {th}}$ has also been observed, which is attributed to the curtailed electron emission while the promoted hole release. Further, with the increasing of the duty cycle, a positive ${V}_{text {th}}$ shift at the lower ${V}_{text {GS, ON}}$ and a negative shift at higher ${V}_{text {GS, ON}}$ are needs to be taken seriously, and it also confirm the competitive mechanism in the abnormal “M”-shaped ${V}_{text {th}}$ instability. The research highlights that the impact of positive/negative gate switching stress on ${V}_{text {th}}$ instability are significant and cannot be neglected.
本文研究了schottky型p-GaN栅极hemt在正/负栅极开关应力作用下的阈值电压(${V}_{text {th}}text{)}$的不稳定性。在栅极开关应力作用下,呈现出${V}_{text {th}}$升高的特征“M”形${V}_{text {GS,ON}}$曲线。这种模式归因于电子和空穴的竞争输运。考虑到${V}_{text {GS, OFF}}$减小的情况,也观察到${V}_{text {th}}$增大,这是由于电子发射减少而空穴释放加快所致。进一步,随着占空比的增大,需要重视${V}_{text {th}}$在较低${V}_{text {GS, ON}}$处的正偏移和较高${V}_{text {GS, ON}}$处的负偏移,这也证实了${V}_{text {th}}$异常“M”形不稳定性中的竞争机制。研究表明,正/负栅极开关应力对${V}_{text {th}}$不稳定性的影响是显著的,不可忽视。
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引用次数: 0
Carbon Ion Implantation-Modified Hafnium Oxide to Construct a RELESIS for pH Sensing 碳离子注入修饰的氧化铪构建pH传感传感器
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3471172
Siwei Cui;Hui Yang;Dongping Wu
The reference-less semiconductor ion sensor (RELESIS) addresses pH sensing by eliminating the need for a reference electrode (RE), offering hope for miniaturized and on-chip integrated ion sensors. The key challenge in large scale preparation of RELESIS lies in fabricating a pair of differential sensitive films that can be formed using CMOS compatible process. In this work, differential sensitive films were fabricated through the transformation of a high sensitivity film into a low sensitivity film via carbon ion implantation. Carbon ion implantation effectively reduced the sensitivity of the HfO2 film, achieving a 89% decrease, from 48.93 mV/pH to 6.7 mV/pH. RELESIS was fabricated with HfO2 and carbon ion-implanted HfO2 films and demonstrated excellent pH performance, exhibiting a high sensitivity of 41.79 mV/pH. Microwave annealing (MWA) further enhanced the sensitivity of RELESIS to 44.71 mV/pH and decreasing the sensitivity degradation rate from 17% to 8.4% over a 20-day period.
无参比半导体离子传感器(RELESIS)通过消除对参比电极(RE)的需求来解决pH值传感问题,为小型化和片上集成离子传感器提供了希望。大规模制备RELESIS的关键挑战在于制备一对可以使用CMOS兼容工艺形成的差分敏感薄膜。本文通过碳离子注入将高灵敏度薄膜转化为低灵敏度薄膜,制备了差敏薄膜。碳离子注入有效地降低了HfO2膜的灵敏度,从48.93 mV/pH降低到6.7 mV/pH,降低了89%。采用HfO2和碳离子注入HfO2薄膜制备的RELESIS具有优异的pH性能,灵敏度高达41.79 mV/pH。微波退火(MWA)进一步将RELESIS的灵敏度提高到44.71 mV/pH,并在20天的时间内将灵敏度降解率从17%降低到8.4%。
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引用次数: 0
4.15 kV/4.6 mΩ⋅cm² 4H-SiC Epi-Refilled Super-Junction Schottky Diode With Ring Assisted Super-Junction Termination Extension 4.15 kV/4.6 mΩ⋅cm²4H-SiC外延填充超结肖特基二极管
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3479886
Haoyuan Cheng;Hengyu Wang;Ce Wang;Jiangbin Wan;Chi Zhang;Kuang Sheng
In this letter, 4H-SiC super-junction (SJ) Schottky diodes (SBDs) with hexagonal cell were fabricated by trench etching and epi-regrowth process. Quasi-selective epi-regrowth in hexagonal trenches and high aspect ratio of 6 for P-pillars without voids were achieved. Furthermore, a termination with field limiting ring assisted super-junction termination extension (RA-SJTE) was proposed and adopted to suppress the high electric field around the device edge. With such a termination, the breakdown voltage (BV) significantly increases from 1530 V to 4150 V (92% of the TCAD simulation value). The specific on-resistance ( ${R}_{text {ON,sp}}text {)}$ of the fabricated device is 4.6 m $Omega cdot $ cm2, demonstrating a performance higher than the one-dimensional limit of 4H-SiC unipolar devices. These results show the promising future of high-performance 4H-SiC SJ device for multi-kilovolts application.
采用沟槽刻蚀和外延再生工艺制备了具有六边形电池的4H-SiC超结肖特基二极管(SJ)。在六方沟槽中实现了准选择性外延再生,无孔洞p柱的长径比高达6。在此基础上,提出了一种限场环辅助超结终端延伸(RA-SJTE)方式来抑制器件边缘处的高电场。在这种终止下,击穿电压(BV)从1530 V显著增加到4150 V (TCAD仿真值的92%)。所制备器件的比导通电阻(${R}_{text {ON,sp}}text{)}$为4.6 m $Omega cdot $ cm2,性能高于4H-SiC单极器件的一维极限。这些结果显示了高性能多千伏4H-SiC SJ器件的良好前景。
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引用次数: 0
Mg-Ion-Based Electrochemical Synapse With Superior Retention 具有优异保留率的镁离子基电化学突触
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3479248
Heebum Kang;Kyumin Lee;Seungkwon Hwang;Hyunsang Hwang
We introduce a novel all-solid-state Mg-ion-based electrochemical RAM (Mg-ECRAM) that utilizes a highly stable MgF2 electrolyte known for its high ionic conductivity ( $sigma _{text {ion}}text {)}$ and low electrical conductivity ( $sigma text {)}$ . Additionally, crystalline WO $_{{2}.{8}}$ (C-WO $_{{2}.{8}}text {)}$ is used as the channel material because of its excellent ion diffusivity (D $_{text {ion}}text {)}$ . Comprehensively, our findings reveal nearly perfect weight update linearity and exceptional retention capabilities, lasting approximately six years. These results indicate that Mg-ions are suitable for ECRAM systems, offering desirable and dependable synaptic properties. Moreover, the physical intercalation of Mg-ions into the WO $_{{2}.{8}}$ channel is confirmed in real-time by the sequential modulation of Raman peaks, which correspond to the levels of potentiation or depression.
我们介绍了一种新型的全固态mg离子基电化学RAM (Mg-ECRAM),它利用高度稳定的MgF2电解质,以其高离子电导率($sigma _{text {ion}}text{)}$和低电导率($sigma text{)}$而闻名。此外,结晶WO $_{{2}。{2}}$ (c - o $ {{2};{8}}text{)}$被用作通道材料是因为它具有优异的离子扩散率(D $_{text {ion}}text{)}$。综合而言,我们的研究结果揭示了近乎完美的权重更新线性和卓越的保留能力,持续了大约六年。这些结果表明,镁离子适合于ECRAM系统,提供理想和可靠的突触特性。此外,mmg离子在WO ${{2}中的物理插层。{8}}$通道通过拉曼峰的顺序调制实时确认,这些拉曼峰对应于增强或抑制的水平。
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引用次数: 0
Low-Cost High-Performance p-GaSe/i-GeSn/n-GOI Heterojunction Photodiode for Visible to Short-Wave Infrared Multispectral Detection 用于可见光至短波红外多光谱检测的低成本高性能 p-GaSe/i-GeSn/n-GOI 异质结光电二极管
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3480361
Jiaxin Qin;Xinwei Cai;Huiling Pan;Tianwei Yang;Songyan Chen;Wei Huang;Guangyang Lin;Cheng Li
In this work, a low-cost and high-performance p-GaSe/i-GeSn/n-Ge-on-insulator van der Waals (vdW) heterojunction photodetector (PD) is demonstrated with a Sn-composition-graded i-GeSn absorption region. Featuring a sputtering-grown Ge0.848 Sn0.152 top layer, the PD extends its cutoff wavelength beyond 2400 nm, simultaneously boosting its response to visible (VIS) light. This enhancement is achieved through using wide bandgap GaSe flake as the p-type region, resulting in a flat broadband photo-response spectrum from VIS to short-wave infrared (SWIR) bands. Moreover, an ultralow dark current density of 0.55 mA/cm2 is achieved owing to the large bandgap of GaSe and graded barriers within the GeSn layers. The specific detectivity at 2000 nm reaches ${3.5}times {10}^{{10}}$ Jones, alongside a rapid response time of $49.5mu $ s under −1 V bias at room temperature. These outcomes highlight the potential of the mixed-dimensional GeSn vdW heterojunction PD as a new pathway for low-cost multispectral detection ranging from VIS to SWIR wavelengths.
在这项研究中,我们展示了一种低成本、高性能的 p-GaSe/i-GeSn/n-Ge-on-insulator 范德瓦耳斯(vdW)异质结光电探测器(PD),它具有锡沉积分级 i-GeSn 吸收区。该光电二极管采用溅射生长的 Ge0.848 Sn0.152 顶层,将其截止波长扩展到 2400 纳米以上,同时增强了对可见光(VIS)的响应。这种增强是通过使用宽带隙片状 GaSe 作为 p 型区实现的,从而产生了从 VIS 到短波红外 (SWIR) 波段的平坦宽带光响应光谱。此外,由于 GaSe 的大带隙和 GeSn 层内的分级势垒,实现了 0.55 mA/cm2 的超低暗电流密度。在室温 -1 V 偏置下,2000 nm 的比检测率达到 ${3.5}times {10}^{{10}$ Jones,快速响应时间为 $49.5mu $ s。这些成果凸显了混合维 GeSn vdW 异质结 PD 作为从 VIS 到 SWIR 波长的低成本多光谱检测新途径的潜力。
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引用次数: 0
Bottom-Gate Poly-Si Thin Film Transistors Fabricated by Blue Laser Diode Annealing and Their Reliability Under DC and AC Bias Stresses 用蓝色激光二极管退火法制造的底栅多晶硅薄膜晶体管及其在直流和交流偏压下的可靠性
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-14 DOI: 10.1109/LED.2024.3480123
Mohammad Masum Billah;Seongbok Kang;Jin Jang;Moath Alathbah
We investigate the electrical reliability of inverted staggered low-temperature poly-Si (LTPS) thin-film transistors (TFT) under direct and alternate current (DC and AC gate pulses) operations fabricated by blue laser diode annealing (BLDA). From scanning electron microscopy (SEM), and atomic force microscopy (AFM) images, smaller grain sizes (~70 nm) and smoother poly-Si surface (~1.18 nm) are achieved for solid-phase crystallization (SPC) by BLDA crystallization. However, partial melting (PM) of the silicon active layer exhibits a large grain size (~200 nm) with comparatively taller surface roughness (~7.73 nm). As compared to SPC devices, PM devices exhibit more electrical degradation including drain current (I $_{text {DS}}text {)}$ instability and threshold voltage shift ( $Delta $ V $_{text {Th}}text {)}$ under AC stress. Although, PM TFTs exhibit higher IDS, and field-effect mobility ( $mu _{text {FE}}text {)}$ , the protruded poly-Si layer causes severe carrier trapping/detrapping at grain boundary (GB) under AC stress. Besides, both the devices show stable electrical behavior under negative bias temperature stress (NBTS). We performed the technology computer-aided design (TCAD) simulation to validate the physical mechanism.
我们研究了通过蓝色激光二极管退火(BLDA)制造的倒置交错低温多晶硅(LTPS)薄膜晶体管(TFT)在直流和交流栅极脉冲操作下的电气可靠性。从扫描电子显微镜(SEM)和原子力显微镜(AFM)图像来看,通过 BLDA 结晶实现了更小的晶粒尺寸(约 70 nm)和更光滑的多晶硅表面(约 1.18 nm)。然而,硅活性层的部分熔化(PM)则表现出较大的晶粒尺寸(约 200 nm)和相对较高的表面粗糙度(约 7.73 nm)。与 SPC 器件相比,PM 器件在交流应力作用下表现出更多的电学劣化,包括漏极电流(I $_{text {DS}}text {)}$ 不稳定和阈值电压偏移($Delta $ V $_{text {Th}}text {)}$。虽然 PM TFT 表现出更高的 IDS 和场效应迁移率($mu _{text {FE}}text {)}$,但在交流应力作用下,突出的多晶硅层会导致晶界(GB)处出现严重的载流子捕获/逸出现象。此外,这两种器件在负偏压温度应力(NBTS)下都表现出稳定的电气性能。我们进行了技术计算机辅助设计(TCAD)仿真,以验证物理机制。
{"title":"Bottom-Gate Poly-Si Thin Film Transistors Fabricated by Blue Laser Diode Annealing and Their Reliability Under DC and AC Bias Stresses","authors":"Mohammad Masum Billah;Seongbok Kang;Jin Jang;Moath Alathbah","doi":"10.1109/LED.2024.3480123","DOIUrl":"https://doi.org/10.1109/LED.2024.3480123","url":null,"abstract":"We investigate the electrical reliability of inverted staggered low-temperature poly-Si (LTPS) thin-film transistors (TFT) under direct and alternate current (DC and AC gate pulses) operations fabricated by blue laser diode annealing (BLDA). From scanning electron microscopy (SEM), and atomic force microscopy (AFM) images, smaller grain sizes (~70 nm) and smoother poly-Si surface (~1.18 nm) are achieved for solid-phase crystallization (SPC) by BLDA crystallization. However, partial melting (PM) of the silicon active layer exhibits a large grain size (~200 nm) with comparatively taller surface roughness (~7.73 nm). As compared to SPC devices, PM devices exhibit more electrical degradation including drain current (I\u0000<inline-formula> <tex-math>$_{text {DS}}text {)}$ </tex-math></inline-formula>\u0000 instability and threshold voltage shift (\u0000<inline-formula> <tex-math>$Delta $ </tex-math></inline-formula>\u0000V\u0000<inline-formula> <tex-math>$_{text {Th}}text {)}$ </tex-math></inline-formula>\u0000 under AC stress. Although, PM TFTs exhibit higher IDS, and field-effect mobility (\u0000<inline-formula> <tex-math>$mu _{text {FE}}text {)}$ </tex-math></inline-formula>\u0000, the protruded poly-Si layer causes severe carrier trapping/detrapping at grain boundary (GB) under AC stress. Besides, both the devices show stable electrical behavior under negative bias temperature stress (NBTS). We performed the technology computer-aided design (TCAD) simulation to validate the physical mechanism.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 12","pages":"2415-2418"},"PeriodicalIF":4.1,"publicationDate":"2024-10-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142736658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multiple Host Materials Engineering Boosts the Light-Emitting Diodes Performance of Metal Nanocluster 多主体材料工程提高金属纳米团簇发光二极管性能
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-11 DOI: 10.1109/LED.2024.3478309
Yi Yang;Fujun Zhang;Yu Liu;Feng Jiang;Tingxuan Li;Kunyu Wang;Min Lu;Yuan Zhong;Xiaomei Chai;Zhennan Wu;Yu Zhang;Xue Bai
Metal nanoclusters (NCs) with a metal core consisting of a few to hundreds of metal atoms that are protected by organic ligands, can be regarded as the candidate materials for the emission material of the light-emitting diode (LED), due to their excellent properties, such as high electrical conductivity, high photoluminescence quantum yield, and good solution processability, etc. However, unbalanced carrier transport, inadequate energy transfer, and poor film-forming quality hinder the development of NC-based LEDs (NC-LEDs). In this regard, we employed a multiple host system composed of an exciplex system with electron transport material 2,2’-(1,3-Phenylene)-bis[5-(4-tert-butylphenyl)-1,3,4-oxadiazole] (OXD-7), providing an efficient energy transfer, constructing the flatness films, and balancing carrier transport. As a result, the modified NC-LED achieved a maximum brightness of 4932 cd m−2 and a peak external quantum efficiency (EQE) of 5.29%.
金属纳米团簇(NCs)具有高导电性、高光致发光量子产率、良好的溶液加工性等优异的性能,其金属核由几个到几百个金属原子组成,并受到有机配体的保护,可作为发光二极管(LED)发射材料的候选材料。然而,载流子输运不平衡、能量传递不充分、成膜质量差等问题阻碍了nc基led (NC-LEDs)的发展。在这方面,我们采用了由电子传输材料2,2 ' -(1,3-苯基)-双[5-(4-叔丁基苯基)-1,3,4-恶二唑](OXD-7)组成的激合体系组成的多宿主体系,提供了有效的能量传递,构建了平面膜,并平衡了载流子传输。结果表明,改进后的NC-LED的最大亮度为4932 cd m−2,峰值外量子效率(EQE)为5.29%。
{"title":"Multiple Host Materials Engineering Boosts the Light-Emitting Diodes Performance of Metal Nanocluster","authors":"Yi Yang;Fujun Zhang;Yu Liu;Feng Jiang;Tingxuan Li;Kunyu Wang;Min Lu;Yuan Zhong;Xiaomei Chai;Zhennan Wu;Yu Zhang;Xue Bai","doi":"10.1109/LED.2024.3478309","DOIUrl":"https://doi.org/10.1109/LED.2024.3478309","url":null,"abstract":"Metal nanoclusters (NCs) with a metal core consisting of a few to hundreds of metal atoms that are protected by organic ligands, can be regarded as the candidate materials for the emission material of the light-emitting diode (LED), due to their excellent properties, such as high electrical conductivity, high photoluminescence quantum yield, and good solution processability, etc. However, unbalanced carrier transport, inadequate energy transfer, and poor film-forming quality hinder the development of NC-based LEDs (NC-LEDs). In this regard, we employed a multiple host system composed of an exciplex system with electron transport material 2,2’-(1,3-Phenylene)-bis[5-(4-tert-butylphenyl)-1,3,4-oxadiazole] (OXD-7), providing an efficient energy transfer, constructing the flatness films, and balancing carrier transport. As a result, the modified NC-LED achieved a maximum brightness of 4932 cd m−2 and a peak external quantum efficiency (EQE) of 5.29%.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 12","pages":"2467-2470"},"PeriodicalIF":4.1,"publicationDate":"2024-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142753803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Atomic Layer Deposited ZnO Negative Capacitance Thin-Film Transistors With Hf0.5Zr0.5O2-Based Ferroelectric Gates 原子层沉积氧化锌负电容薄膜晶体管与基于 Hf0.5Zr0.5O2 的铁电栅极
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-11 DOI: 10.1109/LED.2024.3478316
Kun Wang;Sizhe Li;Liwei Ji;Jiaxian Wan;Zexin Tu;Hao Wu;Chang Liu
High-performance ZnO thin-film transistors (TFTs) with Hf $_{{0}.{5}}$ Zr $_{{0}.{5}}$ O2 (HZO)-based ferroelectric gates have been designed and fabricated. In order to increase the thickness of HZO without sacrificing their ferroelectric properties and reducing the leakage current of the devices, multilayer nanolaminate structure was designed, which allows the HZO dielectric layer to still have a high remnant polarization ( $2{P}_{text {r}}= 50.2~mu $ C/cm $^{{2}}text {)}$ at a thickness of 30 nm. By introducing multilayer nanolaminate HZO film, the devices exhibit excellent performance, including an ultralow subthreshold swing (SS) of 96.4 mV/dec at room temperature, which is only 47% of the SS of conventional TFTs under the same process conditions, a large ${I}_{text {ON}}$ / ${I}_{text {OFF}}$ ratio of $10^{{8}}$ , a high field-effect mobility of 16.3 cm2V $^{-{1}}$ s $^{-{1}}$ and a proper threshold voltage of 0.5 V. Our results demonstrate the feasibility of augmenting switching speed and reducing the power consumption of ZnO TFTs by introducing HZO ferroelectric gates.
我们设计并制造了具有基于 Hf $_{{0}.{5}}$ Zr $_{{0}.{5}}$ O2 (HZO) 铁电栅极的高性能 ZnO 薄膜晶体管 (TFT)。为了增加 HZO 的厚度而不牺牲其铁电特性并降低器件的漏电流,设计了多层纳米层压结构,这使得 HZO 介电层在厚度为 30 nm 时仍具有较高的残余极化(2{P}_{text{r}}= 50.2~mu $ C/cm $^{{2}}text {)}$。通过引入多层纳米层状 HZO 薄膜,器件表现出卓越的性能,包括室温下 96.4 mV/dec 的超低阈下摆幅(SS)。4 mV/dec,仅为相同工艺条件下传统 TFT SS 的 47%;${I}_{text {ON}}$/${I}_{text {OFF}}$比值高达 $10^{{8}}$;场效应迁移率高达 16.3 cm2V $^{-{1}}$ s $^{-{1}}$;阈值电压为 0.5 V。我们的研究结果证明了通过引入 HZO 铁电栅极来提高 ZnO TFT 开关速度和降低功耗的可行性。
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引用次数: 0
Prototype of Flexible Digital X-Ray Imaging Detector 柔性数字x射线成像探测器样机
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-11 DOI: 10.1109/LED.2024.3478777
Seyeoul Kwon;Charles Andrew Parker;Kristofer Paetow;Hunter Reed;Sara Chahid;Geun Jo Han;Agus Widjaja;Jinhui Cho;Kevin Cadena;Kevin Granaas;Jerome Crocco
This letter presents the development of a flexible digital X-ray imaging detector based on flat panel display manufacturing principles. The detector array was fabricated using amorphous silicon thin-film transistors (a-Si TFTs) on flexible polyimide (PI) substrate. The TFT characteristics of the flexible detector array show comparable performance to the glass substrate detector array. The field effect mobility ( $mu $ ) of a-Si TFT on flexible substrate was 0.66 cm2/V $cdot $ s, the thresholder voltage (VT) was 4.21 V, the subthreshold slops (SS) was 0.42 V/decade, and the off-current (IOFF) was about $6.5times 10^{-{14}}$ A. The X-ray image was 161 mm $times$ 215 mm in size. The environmental reliability of the flexible detector were tested using thermal and conditions of 65°C at a relative humidity (RH) of 70%. Furthermore, temperature cycling between −20°C/+60°C was used to test the flexible detectors and which also shown acceptable passing results for commercialization. The preliminary studying results demonstrate the feasibility of a flexible X-ray imaging detector, which could have significant implications for the medical imaging industry.
这封信介绍了基于平板显示器制造原理的柔性数字x射线成像探测器的发展。探测器阵列采用非晶硅薄膜晶体管(a-Si TFTs)在柔性聚酰亚胺(PI)衬底上制备。柔性探测器阵列的TFT特性显示出与玻璃基板探测器阵列相当的性能。柔性衬底上a-Si TFT的场效应迁移率($mu $)为0.66 cm2/V $cdot $ s,阈值电压(VT)为4.21 V,亚阈值斜率(SS)为0.42 V/decade,关断电流(IOFF)约为6.5 × 10^{-{14}}$ a, x射线图像尺寸为161 mm × 21.5 mm。在温度和相对湿度(RH)为70%、温度为65℃的条件下,对柔性探测器的环境可靠性进行了测试。此外,在- 20°C/+60°C之间的温度循环用于测试柔性探测器,并且也显示出可接受的商业化通过结果。初步研究结果证明了柔性x射线成像探测器的可行性,这可能对医学成像行业产生重大影响。
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引用次数: 0
Effect of Ag Nanoparticle Texturing on Al₂O₃ Nanowires for Improved Photodetection 银纳米颗粒纹理对改进光电探测的铝纳米线的影响
IF 4.1 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-11 DOI: 10.1109/LED.2024.3478387
Abhijit Das;Avijit Dalal;Aniruddha Mondal;Laishram Robindro Singh;Mitra Barun Sarkar
This work utilized the glancing angle deposition (GLAD) method to grow an Al2O3 nanowires (NW) device and an Ag nanoparticles (NP) textured Al2O3 NW device on an n-Si substrate. The growth of the proposed nanostructures is facilitated by virtue of the shadowing effect of the GLAD process. The polycrystalline crystal structure was determined through independent crystallographic investigations. After Ag NP texturing on Al2O3 NW, an improvement in optical absorption and Raman emission was observed. Ag texturing on Al2O3 NW considerably improved the most important photodetection parameters, including photosensitivity, responsivity, quantum efficiency, detectivity, and noise equivalent of power (NEP). This overall improvement in the photodetection parameters is primarily due to the enhancement in the photocurrent by localized surface plasmon resonance (LSPR) exhibited by Ag NP. The proposed device with Ag NP also exhibited an ultrafast photo response. Therefore, the finding reveals that the Ag NP textured Al2O3 NW device is a feasible option for high-speed photodetection applications.
这项研究利用闪烁角沉积(GLAD)方法,在正硅衬底上生长出 Al2O3 纳米线(NW)器件和银纳米粒子(NP)纹理 Al2O3 NW 器件。GLAD 工艺的阴影效应促进了拟议纳米结构的生长。通过独立的晶体学研究确定了多晶晶体结构。在 Al2O3 NW 上制备 Ag NP 后,观察到其光学吸收和拉曼发射均有所改善。在 Al2O3 NW 上进行银制备大大提高了最重要的光检测参数,包括光敏度、响应度、量子效率、检测度和噪声功率等效(NEP)。光检测参数的整体改善主要归功于 Ag NP 通过局部表面等离子体共振(LSPR)增强了光电流。使用 Ag NP 的拟议器件还表现出了超快的光响应。因此,研究结果表明,Ag NP 纹理的 Al2O3 NW 器件是高速光电检测应用的可行选择。
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引用次数: 0
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