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Prediction of Random Telegraph Noise-Induced Threshold Voltage Shift and Its Scaling Dependency Using Machine Learning 利用机器学习预测随机电报噪声诱发的阈值电压偏移及其扩展依赖性
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-01 DOI: 10.1109/JEDS.2024.3471999
Eunseok Oh;Hyungcheol Shin
Random telegraph noise (RTN) shifts the threshold voltage (Vt) of 3D NAND flash memory cells, making it a key factor of the device malfunction. The aim of this study is to predict the distribution of RTN induced ${mathrm { V}}_{mathrm { t}}$ shift in 3D NAND flash memory. Artificial neural network (ANN)-based machine learning (ML) is used for this prediction. With 2000 samples, ANN is trained and tested to predict the ${mathrm { V}}_{mathrm { t}}$ shift of random cells with high reliability. Furthermore, ANN is applied to predict the tendency of RTN-induced ${mathrm { V}}_{mathrm { t}}$ shift in scaled 3D NAND. Compared to prior works which has required far more measurements or simulations, the predictions are shown to shorten the time spent to obtain the distribution. Based on these predictions, the dependency of the decay constant on cell variation is investigated, which is a most critical parameter in analyzing the RTN distribution. This indicates that it is possible to apply ANN-based ML to predict various characteristics of 3D NAND flash memory in a much shorter time and to develop numerical models of related parameters.
随机电报噪声(RTN)会移动三维 NAND 闪存单元的阈值电压(Vt),使其成为设备故障的关键因素。本研究旨在预测三维 NAND 闪存中 RTN 引起的 ${mathrm { V}}_{mmathrm { t}}$ 漂移的分布。该预测采用了基于人工神经网络(ANN)的机器学习(ML)方法。通过对 2000 个样本进行训练和测试,ANN 可以高可靠性地预测随机单元的 ${mathrm { V}}_{mathrm { t}}$ 漂移。此外,ANN 还被应用于预测缩放 3D NAND 中 RTN 引起的 ${mathrm { V}_{mathrm { t}}$ 漂移的趋势。与之前需要进行更多测量或模拟的工作相比,预测结果表明可以缩短获得分布的时间。基于这些预测,研究了衰减常数对单元变化的依赖性,这是分析 RTN 分布的最关键参数。这表明,应用基于 ANN 的 ML 可以在更短的时间内预测 3D NAND 闪存的各种特性,并开发相关参数的数值模型。
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引用次数: 0
A Process-Aware Analytical Gate Resistance Model for Nanosheet Field-Effect Transistors 纳米片场效应晶体管的工艺感知分析栅极电阻模型
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-30 DOI: 10.1109/JEDS.2024.3469917
Junha Suk;Yohan Kim;Jungho Do;Garoom Kim;Woojin Rim;Sanghoon Baek;Seiseung Yoon;Soyoung Kim
In this paper, we propose a process-aware analytical gate resistance model for nanosheet field-effect transistors (NSFETs). The proposed NSFET gate resistance is modeled by applying the distributed resistance coefficient, which can be used when current flows vertically and horizontally. By predicting the direction of current flow, the resistance components are approximated in series with parallel connection of divided segments. The proposed model can reflect changes in structural parameters, making it possible to predict the scaling trend of NSFETs. This is validated through TCAD simulation results. The proposed model can be implemented in general compact models such as the Berkeley short channel IGFET model (BSIM)-common multi-gate (CMG) and can be used to predict circuit performance more accurately.
本文针对纳米片场效应晶体管(NSFET)提出了一种工艺感知分析栅极电阻模型。建议的 NSFET 栅极电阻模型采用分布式电阻系数,当电流垂直和水平流动时均可使用。通过预测电流流动的方向,电阻分量可近似为串联与并联的分段。所提出的模型可以反映结构参数的变化,从而可以预测 NSFET 的扩展趋势。TCAD 仿真结果验证了这一点。提出的模型可以在伯克利短沟道 IGFET 模型 (BSIM) - 普通多门 (CMG) 等一般紧凑模型中实现,并可用于更准确地预测电路性能。
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引用次数: 0
Computationally Efficient Band Structure-Based Approach for Accurately Determining Electrostatics and Source-to-Drain Tunneling Current in UTB MOSFETs 基于能带结构的高效计算方法,用于准确确定UTB MOSFET 的静电和源极至漏极隧道电流
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-27 DOI: 10.1109/JEDS.2024.3469398
Nalin Vilochan Mishra;Aditya Sankar Medury
The ability of Ultra-Thin-Body (UTB) MOS devices to enable channel length scaling can only be realistically assessed by accurately taking key physical effects such as Quantum Confinement effects (QCEs) and Short channel effects (SCEs) into account. QCEs can accurately be considered only through a full band structure-based approach, which tends to be computationally inefficient, particularly at higher channel thicknesses, and is further exacerbated when required to be used to calculate 2-D channel electrostatics. Therefore, in this work, we propose a methodology to efficiently simulate the channel electrostatics of a UTB Double Gate MOSFET by solving the 1-D band structure with the 2-D Poisson’s equation self consistently, determined by using the $sp^{3}d^{5}s^{*}$ semi-empirical tight-binding approach only over those k-points that are likely to have a significant effect on the electrostatics. By showing that determining the 1-D Band structure at the source-channel junction is adequate to accurately determine the 2-D channel electrostatics, we show that this approach remains computationally tractable even at higher channel lengths. By following this approach, we obtain the 2-D profile of important device parameters such as electron density and channel potential, which, in turn, enables the determination of the thermionic current density and source-to-drain tunneling current density for a wide range of device parameters using Tsu-Esaki and WKB formalism respectively. Furthermore, the effect of phonon scattering, which is likely to manifest at longer channel lengths, is also incorporated in the drain current calculation, thus making this approach widely applicable.
只有准确考虑量子约束效应 (QCE) 和短沟道效应 (SCE) 等关键物理效应,才能真实评估超薄体 (UTB) MOS 器件实现沟道长度扩展的能力。只有通过基于全带结构的方法才能准确地考虑 QCE,而这种方法往往计算效率低下,尤其是在沟道厚度较高的情况下,当需要用于计算 2-D 沟道静电时,计算效率会进一步降低。因此,在这项工作中,我们提出了一种方法,通过使用 $sp^{3}d^{5}s^{*}$ 半经验紧约束方法,仅在可能对静电产生重大影响的 k 点上求解 1-D 带结构与 2-D 泊松方程自洽,从而高效地模拟 UTB 双栅极 MOSFET 的沟道静电。通过证明确定源-沟道交界处的一维带状结构足以精确确定二维沟道静电,我们表明即使在更高的沟道长度上,这种方法仍然具有可计算性。通过采用这种方法,我们获得了电子密度和沟道电势等重要器件参数的二维剖面图,进而可以使用 Tsu-Esaki 和 WKB 形式分别确定宽器件参数范围内的热离子电流密度和源漏隧穿电流密度。此外,在计算漏极电流时还纳入了声子散射效应,这种效应可能会在较长的沟道长度上表现出来,从而使这种方法具有广泛的适用性。
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引用次数: 0
Correlation Between Quantum Confinement Effect and Characteristics of Thin-Film Transistors in Solution-Processed Oxide-Based Thin-Films 溶液加工氧化物薄膜中的量子约束效应与薄膜晶体管特性之间的相关性
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-26 DOI: 10.1109/JEDS.2024.3468300
Jinyeong Lee;Jaewook Jeong
In this paper, the photoluminescence characteristics of solution-processed amorphous ZnO and related compounds of InZnO and GaZnO thin films were comparatively analyzed. Depending on the molarity of the precursor solution, PL emission peaks ranging from 382.4 nm to 384.8 nm were observed for the ZnO thin films. The PL emission peaks were closely related to the surface morphology of the thin films, which were clearly observed when isolated, nano-sized particles of quantum dot structure were present, leading to quantum confinement effect in the ZnO and GaZnO thin films. When uniform thin films formed, the PL emission peaks disappeared due to the increase of electrical and morphological connectivity, which reveals that the analysis of PL emission peak can be used to evaluate the film quality and the performance of thin-film transistors (TFTs) in solution-processed oxide-based materials.
本文比较分析了溶液法无定形氧化锌以及相关化合物 InZnO 和 GaZnO 薄膜的光致发光特性。根据前驱体溶液摩尔浓度的不同,ZnO 薄膜可观察到 382.4 nm 至 384.8 nm 的 PL 发射峰。聚光发射峰与薄膜的表面形貌密切相关,当存在孤立的纳米级量子点结构颗粒时,聚光发射峰清晰可见,这导致了氧化锌和氧化镓薄膜的量子束缚效应。当形成均匀的薄膜时,由于电学和形态连通性的增加,PL 发射峰消失了,这表明 PL 发射峰的分析可用于评估溶液加工氧化物基材料的薄膜质量和薄膜晶体管(TFT)的性能。
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引用次数: 0
Performance Enhancement of Indium Zinc Oxide Thin-Film Transistors Through Process Optimizations 通过优化工艺提高氧化铟锌薄膜晶体管的性能
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-24 DOI: 10.1109/JEDS.2024.3466956
Mingjun Zhang;Jinyang Huang;Zihan Wang;Paramasivam Balasubramanian;Yan Yan;Ye Zhou;Su-Ting Han;Lei Lu;Meng Zhang
The device performance of indium zinc oxide (IZO) thin-film transistors (TFTs) is optimized through process optimizations. By jointly adjusting the annealing condition, the channel thickness and the sputtering atmosphere, the roughness and oxygen vacancies (Vos) are precisely regulated. The optimized IZO TFTs can achieve the highest field effect mobility of ~71.8 cm2/Vs with a threshold voltage of ~-0.6 V. Reliability of IZO TFTs under positive/negative bias stress is also examined. The interface quality and the Vo are two key factors influencing the device performance and reliability, confirmed by X-ray photoelectron spectroscopy and atomic force microscopy analysis.
氧化铟锌(IZO)薄膜晶体管(TFT)的器件性能是通过工艺优化实现的。通过联合调整退火条件、沟道厚度和溅射气氛,可以精确调节粗糙度和氧空位(Vos)。优化后的 IZO TFT 的场效应迁移率最高可达 ~71.8 cm2/Vs,阈值电压为 ~-0.6 V。此外,还考察了 IZO TFT 在正/负偏压应力下的可靠性。X 射线光电子能谱和原子力显微镜分析证实,界面质量和 Vo 是影响器件性能和可靠性的两个关键因素。
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引用次数: 0
High-Performance Carbon Nanotube Optoelectronic Transistor With Optimized Process for 3D Communication Circuit Applications 针对 3D 通信电路应用优化工艺的高性能碳纳米管光电晶体管
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-23 DOI: 10.1109/JEDS.2024.3465669
Shuang Liu;Heyi Huang;Yanqing Li;Yadong Zhang;Feixiong Wang;Zhaohao Zhang;Qingzhu Zhang;Jiali Huo;Jiaxin Yao;Jing Wen;Huaxiang Yin
One-dimensionalcarbon nanotube field-effect transistors (CNFETs) have offered a solution for obtaining high transistor performance in a compatible low-temperature BEOL process, enabling monolithic 3D integration benefits for more functional circuits. Currently, CNT transistors need to further improve their performance with a more stable process and explore the most suitable circuit application scene. In this study, we successfully enhanced the performance of CNFETs through special Y2O3 film passivation and vacuum annealing processes. The on-state current of the optimized device was improved by $36.6times $ compared to the device without these processes. Besides, the subthreshold swing (SS) was notably reduced from 259 mV/dec to 215 mV/dec and the threshold voltage was decreased from 2.02 V to 1.79 V due to the reduction of the interface state. Meanwhile, the devices’ optoelectronic characteristics were significantly improved and exhibited a $72times $ increase in $Delta $ Ids under identical illumination. With an improved annealing process, the $Delta $ Ids were further increased to $231times $ compared to the original device because of the reduction of defects within the device. Finally, the tentative Morse code communication applications all by the optimized CNFETs were obtained. These technologies and functional implementations provided a promising approach for future 3D functional communication systems with CNT technology.
一维碳纳米管场效应晶体管(CNFET)为在兼容的低温 BEOL 工艺中获得高晶体管性能提供了一种解决方案,可实现单片三维集成,从而实现更多功能电路。目前,碳纳米管晶体管需要通过更稳定的工艺进一步提高性能,并探索最适合的电路应用场景。在本研究中,我们通过特殊的 Y2O3 薄膜钝化和真空退火工艺,成功提高了 CNFET 的性能。与未采用这些工艺的器件相比,优化器件的导通电流提高了 36.6 倍。此外,由于界面状态的降低,阈下摆幅(SS)从 259 mV/dec 显著降低到 215 mV/dec,阈值电压从 2.02 V 降低到 1.79 V。同时,器件的光电特性也得到了显著改善,在相同的光照条件下,器件的Ids增加了72倍。通过改进退火工艺,由于器件内部缺陷的减少,与原始器件相比,$Delta $ Ids 进一步增加到 $231times$。最后,经过优化的 CNFET 获得了初步的莫尔斯电码通信应用。这些技术和功能实现为未来采用 CNT 技术的三维功能通信系统提供了一种前景广阔的方法。
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引用次数: 0
Impact of Work-Function Variation in Ferroelectric Field-Effect Transistor 铁电场效应晶体管功函数变化的影响
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-23 DOI: 10.1109/JEDS.2024.3465594
Su Yeon Jung;Hyunwoo Kim;Jongmin Lee;Jang Hyun Kim
We analyzed the impact of work-function variation (WFV) in ferroelectric field-effect transistor (FeFET). To analyze the operation characteristics, we employed the technology computer-aided design (TCAD) simulations. After evaluating ferroelectricity (FE) characteristics and optimizing device model parameters through calibration, we extracted five key parameters from the hysteretic transfer curves of the FeFET: threshold voltage (Vth), on current (Iin), subthreshold swing (SS), off current (Ioff), and gate-induced drain leakage (GIDL). The extracted parameters were compared based on the presence or absence of FE and the ferroelectric thickness. It was confirmed that the presence of FE leads to increased variation due to dipole alignment with WFV, and that the electric field is maintained even with an increase in ferroelectric thickness
我们分析了铁电场效应晶体管(FeFET)中功函数变化(WFV)的影响。为了分析工作特性,我们采用了技术计算机辅助设计(TCAD)模拟。在评估了铁电(FE)特性并通过校准优化了器件模型参数后,我们从铁电场效应晶体管的滞后转移曲线中提取了五个关键参数:阈值电压(Vth)、导通电流(Iin)、亚阈值摆动(SS)、关断电流(Ioff)和栅极诱导漏极泄漏(GIDL)。根据是否存在 FE 和铁电厚度对提取的参数进行了比较。结果证实,FE 的存在会导致偶极对齐与 WFV 的变化增加,而且即使铁电厚度增加,电场也会保持不变。
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引用次数: 0
Kr-Plasma Process for Conductance Control of MFSFET With FeND-HfO₂ Gate Insulator 等离子体克尔工艺用于带有 FeND-HfO2 栅极绝缘体的 MFSFET 的电导控制
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-18 DOI: 10.1109/JEDS.2024.3462930
S. Ohmi;M. Tanuma;J.W. Shin
In this work, we have investigated the conductance control of the metal-ferroelectrics-Si field-effect transistor (MFSFET) utilizing 5 nm thick ferroelectric nondoped $rm HfO_{2}$ (FeND-HfO2) gate insulator. The Kr-plasma process is effective to decrease the plasma damage compared to the Ar-plasma process during the in-situ deposition of FeND-HfO2 and Pt gate electrode by RF-magnetron sputtering. The precise control such as less than 20 mV was realized which led to the conductance control for 10 states from 0 to $0.6~mu $ S/ $mu $ m both for potentiation and depression operations with the input pulses of $mathbf {pm 3}$ V/100 ns.
在这项研究中,我们利用 5 nm 厚的铁电非掺杂 $rm HfO_{2}$ (FeND-HfO2) 栅极绝缘体研究了金属-铁电-硅场效应晶体管 (MFSFET) 的电导控制。在通过射频-磁控溅射原位沉积 FeND-HfO2 和铂栅电极的过程中,Kr-等离子体工艺比 Ar-等离子体工艺能有效减少等离子体损伤。实现了小于 20 mV 的精确控制,从而在 $mathbf {pm 3}$ V/100 ns 的输入脉冲下,对 10 个状态(从 0 到 $0.6~mu $ S/ $mu $ m)进行了电导控制,包括电位和抑制操作。
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引用次数: 0
Fully Integrated GaN-on-Silicon Power-Rail ESD Clamp Circuit Without Transient Leakage Current During Normal Power-on Operation 完全集成的硅基氮化镓(GaN)电源轨静电放电钳位电路在正常上电操作期间不会产生瞬态泄漏电流
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-17 DOI: 10.1109/JEDS.2024.3462590
Wei-Cheng Wang;Ming-Dou Ker
When more circuit functions are integrated into a single chip fabricated by the GaN-on-Silicon process, the need for on-chip electrostatic discharge (ESD) protection design becomes crucial to safeguard GaN integrated circuits (ICs). In this work, the power-rail ESD clamp circuit with gate-coupled design, fabricated in a GaN-on-Silicon process, was investigated. By increasing the gate-coupled capacitance, ESD level of the power-rail ESD clamp circuit can be significantly improved. However, the increased capacitance induces transient leakage current during normal power-on operation. To overcome this issue, a new detection circuit was proposed, which can differentiate between the ESD event and the normal power-on transient operation. Therefore, incorporating this new proposed detection circuit with the gate-coupled design allows for good ESD robustness, while also preventing transient leakage current during normal power-on condition.
当硅基氮化镓工艺制造的单个芯片中集成了更多电路功能时,片上静电放电(ESD)保护设计对于保护氮化镓集成电路(IC)变得至关重要。在这项工作中,研究了采用硅基氮化镓工艺制造的、具有栅极耦合设计的电源轨静电放电箝位电路。通过增加栅极耦合电容,电源轨 ESD 夹钳电路的 ESD 电平可得到显著提高。然而,增加的电容会在正常上电操作期间产生瞬态漏电流。为了克服这一问题,我们提出了一种新的检测电路,它可以区分 ESD 事件和正常上电瞬态操作。因此,将这一新的检测电路与栅极耦合设计结合在一起,既能实现良好的 ESD 鲁棒性,又能防止正常通电条件下的瞬态漏电流。
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引用次数: 0
Combining Intelligence With Rules for Device Modeling: Approximating the Behavior of AlGaN/GaN HEMTs Using a Hybrid Neural Network and Fuzzy Logic Inference System 器件建模的智能与规则相结合:利用混合神经网络和模糊逻辑推理系统逼近 AlGaN/GaN HEMT 的行为
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-16 DOI: 10.1109/JEDS.2024.3461169
Ahmad Khusro;Saddam Husain;Mohammad S. Hashmi
This paper uses the Adaptive Neuro-Fuzzy Inference System (ANFIS) to investigate and propose a new alternative behavioral modeling technique for microwave power transistors. Utilizing measured I-V characteristics, associated parameters like transconductance $(g_{text {m}})$ and output conductance $(g_{text {ds}})$ , etc., S-parameters characteristics, and RF performance parameters such as unity current gain frequency $(f_{text {T}})$ , maximum unilateral gain frequency $(f_{max })$ , ANFIS-based behavioral models are developed for Gallium Nitride (GaN) High Electron Mobility Transistors (HEMTs) and validated. The models have been developed using two distinct devices with dimensions of $10times 200~mu m$ and $10times 250~mu m$ for multi-bias conditions and over a broad frequency range (0.5 to 43.5 GHz). Subsequently, the proposed model performance is validated on devices with geometries of $10times 220~mu m$ , $4times 100~mu m$ , and $2times 200~mu m$ to examine the interpolation accuracy, extrapolation potential, and scalability. Here, ANFIS utilizes the subtractive clustering method to process the measurement characteristics by computing the clusters and opts for the best-performing model using error and number of fuzzy rules as criteria. The parameters involved in the fuzzy representation are trained using neural network algorithms, namely gradient-descent and least squares estimate. The proposed models are subsequently incorporated in a commercial circuit simulator (Keysight’s ADS) and the class-F power amplifier’s gain and stability characteristics are computed and studied.
本文利用自适应神经模糊推理系统(ANFIS)研究并提出了一种新的微波功率晶体管替代行为建模技术。利用测量的 I-V 特性、相关参数,如跨导 $(g_{text {m}}$ 和输出电导 $(g_{text {ds}}$ 等、针对氮化镓(GaN)高电子迁移率晶体管(HEMT)开发了基于 ANFIS 的行为模型,并进行了验证。这些模型是在多偏压条件和宽频率范围(0.5 至 43.5 GHz)内使用两个不同的器件开发的,这两个器件的尺寸分别为 10/times 200~mu m$ 和 10/times 250~mu m$。随后,在几何尺寸为 $10times 220~mu m$ 、 $4times 100~mu m$ 和 $2times 200~mu m$ 的器件上验证了所提出的模型性能,以检查插值精度、外推潜力和可扩展性。在这里,ANFIS 利用减法聚类方法,通过计算聚类来处理测量特征,并以误差和模糊规则数量为标准,选择表现最佳的模型。使用神经网络算法,即梯度下降和最小二乘估计,对模糊表示所涉及的参数进行训练。随后,将提出的模型纳入商用电路模拟器(Keysight 的 ADS),并计算和研究 F 类功率放大器的增益和稳定性特征。
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引用次数: 0
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IEEE Journal of the Electron Devices Society
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