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AC Impedance Compared to DC Characterization for Source-Drain Resistance in Junctionless Gate-All-Around MOSFETs 交流阻抗与直流阻抗在无结栅极全能mosfet中源漏电阻的比较
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-04 DOI: 10.1109/JEDS.2025.3595171
Hung-Hsi Chen;Ching-Lun Wang;Yao-Jen Lee;Wen-Teng Chang
This study investigates the frequency-dependent AC source-drain impedance (ZDS) in p-type junctionless gate-all-around (JLGAA) MOSFETs, and compares it to the DC source-drain resistance (RDS) under various biasing and stress conditions. The analysis focuses on how RDS and ZDS respond to different gate voltages, providing insight into their influence on device performance. While RDS is extracted from the ohmic region of conventional ID-VD measurements, ZDS is obtained directly using impedance analysis to capture frequency-dependent behavior. Results reveal that during turn-on, RDS is slightly lower than ZDS, although ZDS retains a mainly resistive profile. However, after reliability stress and near the quasi turn-off regime, a more pronounced divergence between RDS and ZDS is observed. This is attributed to reduced channel conductivity and increasing frequency-dependent effects. At higher reverse gate bias, ZDS exhibits noticeable capacitive behavior due to enhanced channel depletion, and this effect becomes more significant as the channel length increases. These findings highlight the critical role of ZDS in assessing the dynamic performance of JLGAA FETs. Unlike static RDS characterization, frequency-sensitive impedance measurements offer deeper insight into AC behavior, supporting more accurate modeling and optimization under time-varying or transient operating conditions.
本文研究了p型无结栅极全通(JLGAA) mosfet中频率相关的交流源漏阻抗(ZDS),并将其与不同偏置和应力条件下的直流源漏电阻(RDS)进行了比较。分析的重点是RDS和ZDS如何响应不同的栅极电压,从而深入了解它们对器件性能的影响。RDS是从传统的ID-VD测量的欧姆区提取的,而ZDS是直接通过阻抗分析来获取频率相关行为的。结果表明,在导通过程中,RDS略低于ZDS,但ZDS仍以电阻为主。然而,在可靠性应力之后,接近准关断状态,RDS和ZDS之间的差异更加明显。这归因于通道电导率降低和频率依赖效应增加。在较高的反向栅极偏置下,由于沟道损耗增强,ZDS表现出明显的电容性行为,并且随着沟道长度的增加,这种效应变得更加显著。这些发现强调了ZDS在评估JLGAA场效应管动态性能中的关键作用。与静态RDS特性不同,频率敏感阻抗测量可以更深入地了解交流行为,支持在时变或瞬态工作条件下更准确的建模和优化。
{"title":"AC Impedance Compared to DC Characterization for Source-Drain Resistance in Junctionless Gate-All-Around MOSFETs","authors":"Hung-Hsi Chen;Ching-Lun Wang;Yao-Jen Lee;Wen-Teng Chang","doi":"10.1109/JEDS.2025.3595171","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3595171","url":null,"abstract":"This study investigates the frequency-dependent AC source-drain impedance (ZDS) in p-type junctionless gate-all-around (JLGAA) MOSFETs, and compares it to the DC source-drain resistance (RDS) under various biasing and stress conditions. The analysis focuses on how RDS and ZDS respond to different gate voltages, providing insight into their influence on device performance. While RDS is extracted from the ohmic region of conventional ID-VD measurements, ZDS is obtained directly using impedance analysis to capture frequency-dependent behavior. Results reveal that during turn-on, RDS is slightly lower than ZDS, although ZDS retains a mainly resistive profile. However, after reliability stress and near the quasi turn-off regime, a more pronounced divergence between RDS and ZDS is observed. This is attributed to reduced channel conductivity and increasing frequency-dependent effects. At higher reverse gate bias, ZDS exhibits noticeable capacitive behavior due to enhanced channel depletion, and this effect becomes more significant as the channel length increases. These findings highlight the critical role of ZDS in assessing the dynamic performance of JLGAA FETs. Unlike static RDS characterization, frequency-sensitive impedance measurements offer deeper insight into AC behavior, supporting more accurate modeling and optimization under time-varying or transient operating conditions.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"963-968"},"PeriodicalIF":2.4,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11111677","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144867644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Broadband Noise Characterization of SiGe HBTs Down to 4K 低至4K的SiGe hbt宽带噪声特性
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-04 DOI: 10.1109/JEDS.2025.3595576
Jad Benserhir;Yating Zou;Hung-Chi Han;Yatao Peng;Edoardo Charbon
This paper provides a comprehensive analysis of the DC and RF behavior of HBTs, spanning temperatures from 350 to 3.8 K. It underscores the necessity of detailed studies for the design of RF circuits for quantum computing, including LNAs, VCOs, and mixers, due to the absence of cryogenic models. The DC gain shows betas of 800 at room temperature (RT) and 3000 at 3.8 K. RF characterization indicates a maximum fT of 500 GHz at 3.8 K and 300 GHz at RT. The proposed figure-of-merit, (gm.fT/Ic), typically used in CMOS design, is explored across the temperature range. The study reveals a noise equivalent temperature of sub-1 K at 3.8 K with source matching. The noise behavior of Si/SiGe:C HBTs within $0.13~{mu }$ m BiCMOS technology is characterized over 293 to 4 K and 10 kHz to 12 GHz. The analysis shows a significant increase in the flicker noise coefficient, K, and corner frequency reduction at 4 K. The high frequency parameter fT reaches 500 GHz, demonstrating better performance compared to advanced CMOS nodes. This research supports the modeling of HBTs that are critical for circuits operating at cryogenic temperatures. These models are particularly beneficial for designing classical-to-quantum interfaces.
本文提供了从350到3.8 K温度范围内HBTs的直流和射频行为的综合分析。由于缺乏低温模型,它强调了对量子计算RF电路设计进行详细研究的必要性,包括lna, vco和混频器。直流增益在室温下为800,在3.8 K时为3000。RF特性表明,在3.8 K时最大fT为500 GHz,在rt时最大fT为300 GHz。在整个温度范围内,研究了通常用于CMOS设计的性能因数(gm.fT/Ic)。研究发现,在3.8 K下,源匹配的噪声等效温度低于1 K。在$0.13~{mu}$ m BiCMOS技术范围内,Si/SiGe:C hbt在293 ~ 4 K和10 kHz ~ 12 GHz范围内的噪声特性。分析表明,在4 K时,闪烁噪声系数K和角频率降低显著增加。高频参数fT达到500 GHz,与先进的CMOS节点相比表现出更好的性能。这项研究支持了HBTs的建模,这对于在低温下工作的电路至关重要。这些模型对于设计经典-量子接口特别有用。
{"title":"Broadband Noise Characterization of SiGe HBTs Down to 4K","authors":"Jad Benserhir;Yating Zou;Hung-Chi Han;Yatao Peng;Edoardo Charbon","doi":"10.1109/JEDS.2025.3595576","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3595576","url":null,"abstract":"This paper provides a comprehensive analysis of the DC and RF behavior of HBTs, spanning temperatures from 350 to 3.8 K. It underscores the necessity of detailed studies for the design of RF circuits for quantum computing, including LNAs, VCOs, and mixers, due to the absence of cryogenic models. The DC gain shows betas of 800 at room temperature (RT) and 3000 at 3.8 K. RF characterization indicates a maximum fT of 500 GHz at 3.8 K and 300 GHz at RT. The proposed figure-of-merit, (gm.fT/Ic), typically used in CMOS design, is explored across the temperature range. The study reveals a noise equivalent temperature of sub-1 K at 3.8 K with source matching. The noise behavior of Si/SiGe:C HBTs within <inline-formula> <tex-math>$0.13~{mu }$ </tex-math></inline-formula>m BiCMOS technology is characterized over 293 to 4 K and 10 kHz to 12 GHz. The analysis shows a significant increase in the flicker noise coefficient, K, and corner frequency reduction at 4 K. The high frequency parameter fT reaches 500 GHz, demonstrating better performance compared to advanced CMOS nodes. This research supports the modeling of HBTs that are critical for circuits operating at cryogenic temperatures. These models are particularly beneficial for designing classical-to-quantum interfaces.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"983-996"},"PeriodicalIF":2.4,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11112660","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144904664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Achieving N/P Doping of MoS₂ Through ZnO Interface Engineering in Heterostructures for Semiconductor Devices 半导体器件异质结构中ZnO界面工程实现MoS 2的N/P掺杂
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-01 DOI: 10.1109/JEDS.2025.3594757
Lijun Xu;Guohui Zhan;Kun Luo;Yukun Shi;Pengcong Mu;Yan Liu;Qinzhi Xu;Jiangtao Liu;Zhenhua Wu
The aim of this study is to explore the electronic properties of the MoS2/ZnO heterostructure and their potential applications in semiconductor devices. We analyzed the impact of N/P doping on electronic properties of ZnO structures with different terminations using the Density Functional Theory-Non-Equilibrium Green’s Function (DFT-NEGF). H-passivation treatment significantly affects doping, enabling precise adjustment of interface charge distribution for improved electrical performance. Additionally, the transport properties of doped MoS2 devices have been significantly improved at different spacer lengths. Particularly under ballistic transport conditions, the current of the doped devices has increased by approximately four orders of magnitude compared to the undoped devices. These findings have important theoretical and practical implications for the design and optimization of high-performance electronic devices based on two-dimensional materials.
本研究的目的是探索MoS2/ZnO异质结构的电子特性及其在半导体器件中的潜在应用。利用密度泛函理论-非平衡格林函数(DFT-NEGF)分析了N/P掺杂对不同端部ZnO结构电子性能的影响。h -钝化处理显著影响掺杂,能够精确调整界面电荷分布以改善电学性能。此外,在不同的间隔长度下,掺杂二硫化钼器件的输运特性得到了显著改善。特别是在弹道输运条件下,与未掺杂器件相比,掺杂器件的电流增加了大约四个数量级。这些发现对基于二维材料的高性能电子器件的设计和优化具有重要的理论和实践意义。
{"title":"Achieving N/P Doping of MoS₂ Through ZnO Interface Engineering in Heterostructures for Semiconductor Devices","authors":"Lijun Xu;Guohui Zhan;Kun Luo;Yukun Shi;Pengcong Mu;Yan Liu;Qinzhi Xu;Jiangtao Liu;Zhenhua Wu","doi":"10.1109/JEDS.2025.3594757","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3594757","url":null,"abstract":"The aim of this study is to explore the electronic properties of the MoS2/ZnO heterostructure and their potential applications in semiconductor devices. We analyzed the impact of N/P doping on electronic properties of ZnO structures with different terminations using the Density Functional Theory-Non-Equilibrium Green’s Function (DFT-NEGF). H-passivation treatment significantly affects doping, enabling precise adjustment of interface charge distribution for improved electrical performance. Additionally, the transport properties of doped MoS2 devices have been significantly improved at different spacer lengths. Particularly under ballistic transport conditions, the current of the doped devices has increased by approximately four orders of magnitude compared to the undoped devices. These findings have important theoretical and practical implications for the design and optimization of high-performance electronic devices based on two-dimensional materials.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"976-982"},"PeriodicalIF":2.4,"publicationDate":"2025-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11106822","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144880519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Gaussian-Based Analytical Model for Temperature-Dependent I-V Characteristics of GaN HEMTs GaN hemt温度相关I-V特性的高斯分析模型
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-01 DOI: 10.1109/JEDS.2025.3594767
Zhao Li;Shaohua Zhou
In this paper, an analytical temperature-dependent I-V model of gallium nitride (GaN) highelectron- mobility transistors (HEMTs) is established by using the Gaussian function. Compared with Curtice, Angelov, and their improved models in the literature, the I-V model proposed in this paper has the characteristics of high modeling accuracy and fast modeling speed. For example, the 3rd order (Gm3) derivative modeling accuracy of the modified Curtice at -45 °C, 75 °C, and 175 °C is 13.81%, 12.09%, and 6.44%, respectively, while at the same temperature, the Gm3 modeling accuracy of the proposed I-V model is 0.77%, 0.52%, and 1.04%, respectively.
本文利用高斯函数建立了氮化镓(GaN)高电子迁移率晶体管(HEMTs)的解析温度依赖I-V模型。与Curtice、Angelov及其改进的文献模型相比,本文提出的I-V模型具有建模精度高、建模速度快的特点。例如,改进的Curtice在-45℃、75℃和175℃下的三阶(Gm3)导数建模精度分别为13.81%、12.09%和6.44%,而在相同温度下,所提出的I-V模型的Gm3建模精度分别为0.77%、0.52%和1.04%。
{"title":"Gaussian-Based Analytical Model for Temperature-Dependent I-V Characteristics of GaN HEMTs","authors":"Zhao Li;Shaohua Zhou","doi":"10.1109/JEDS.2025.3594767","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3594767","url":null,"abstract":"In this paper, an analytical temperature-dependent I-V model of gallium nitride (GaN) highelectron- mobility transistors (HEMTs) is established by using the Gaussian function. Compared with Curtice, Angelov, and their improved models in the literature, the I-V model proposed in this paper has the characteristics of high modeling accuracy and fast modeling speed. For example, the 3rd order (Gm3) derivative modeling accuracy of the modified Curtice at -45 °C, 75 °C, and 175 °C is 13.81%, 12.09%, and 6.44%, respectively, while at the same temperature, the Gm3 modeling accuracy of the proposed I-V model is 0.77%, 0.52%, and 1.04%, respectively.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"954-962"},"PeriodicalIF":2.4,"publicationDate":"2025-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11106827","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144867645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Editorial for the JEDS Special Issue for EDTM 2024 EDTM 2024 JEDS特刊社论
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-01 DOI: 10.1109/JEDS.2025.3564856
Nihar Ranjan Mohapatra;Shree Prakash Tiwari;Shubham Sahay;Deleep Nair;Saptarshi Das;Gauri Karve;Nagarajan Raghavan;Abu Sebastian;Tomoya Sanuki
{"title":"Editorial for the JEDS Special Issue for EDTM 2024","authors":"Nihar Ranjan Mohapatra;Shree Prakash Tiwari;Shubham Sahay;Deleep Nair;Saptarshi Das;Gauri Karve;Nagarajan Raghavan;Abu Sebastian;Tomoya Sanuki","doi":"10.1109/JEDS.2025.3564856","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3564856","url":null,"abstract":"","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"659-660"},"PeriodicalIF":2.4,"publicationDate":"2025-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11106516","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144758334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Characterization and Modeling of SH in Multi-Finger RF LDMOS Transistors Using BSIM-BULK Model 基于BSIM-BULK模型的多指RF LDMOS晶体管SH特性与建模
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-28 DOI: 10.1109/JEDS.2025.3593056
Ayushi Sharma;Shivendra Singh Parihar;Anirban Kar;Weike Wang;Kimihiko Imura;Yogesh Singh Chauhan
In this work, we present self-heating (SH) characterization and modeling of 130 nm Bipolar-CMOS-DMOS (BCD) technology node multi-finger Laterally Diffused Metal-Oxide-Semiconductor (LDMOS) transistors using extensive DC and S-parameter measurements. To accurately capture the impact of SH across a wide frequency range, we use a fourth-order thermal network within the industry-standard Berkeley Short-channel IGFET (BSIM)-BULK model framework. Additionally, we analyze the frequency behavior of RF bulk multi-finger LDMOS transistors and capture parasitic effects due to substrate and gate network. Our findings provide significant insights into LDMOS transistors. In particular, increasing the finger count reduces thermal resistance (by 6.6 ° C/Watt). Understanding how thermal resistance varies with finger count allows designers to optimize LDMOS layouts and mitigate SH effects. This leads to improved thermal management and more efficient, reliable RF devices.
在这项工作中,我们通过广泛的直流和s参数测量,介绍了130 nm双极cmos - dmos (BCD)技术节点多指横向扩散金属氧化物半导体(LDMOS)晶体管的自热(SH)表征和建模。为了在宽频率范围内准确捕获SH的影响,我们在行业标准伯克利短通道IGFET (BSIM)-BULK模型框架内使用了四阶热网络。此外,我们还分析了射频块体多指LDMOS晶体管的频率特性,并捕获了由于衬底和栅极网络造成的寄生效应。我们的发现为LDMOS晶体管提供了重要的见解。特别是,增加手指数量可以减少热阻(6.6°C/瓦特)。了解热阻随手指数的变化,可以帮助设计人员优化LDMOS布局并减轻SH效应。这将改善热管理,提高射频器件的效率和可靠性。
{"title":"Characterization and Modeling of SH in Multi-Finger RF LDMOS Transistors Using BSIM-BULK Model","authors":"Ayushi Sharma;Shivendra Singh Parihar;Anirban Kar;Weike Wang;Kimihiko Imura;Yogesh Singh Chauhan","doi":"10.1109/JEDS.2025.3593056","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3593056","url":null,"abstract":"In this work, we present self-heating (SH) characterization and modeling of 130 nm Bipolar-CMOS-DMOS (BCD) technology node multi-finger Laterally Diffused Metal-Oxide-Semiconductor (LDMOS) transistors using extensive DC and S-parameter measurements. To accurately capture the impact of SH across a wide frequency range, we use a fourth-order thermal network within the industry-standard Berkeley Short-channel IGFET (BSIM)-BULK model framework. Additionally, we analyze the frequency behavior of RF bulk multi-finger LDMOS transistors and capture parasitic effects due to substrate and gate network. Our findings provide significant insights into LDMOS transistors. In particular, increasing the finger count reduces thermal resistance (by 6.6 ° C/Watt). Understanding how thermal resistance varies with finger count allows designers to optimize LDMOS layouts and mitigate SH effects. This leads to improved thermal management and more efficient, reliable RF devices.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"1243-1251"},"PeriodicalIF":2.4,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11098471","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145778167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Silicon Dioxide Ring Innovations in TSV Structures: Analysis of Thermal-Mechanical and Signal Integrity for 3-D Chip Applications 二氧化硅环在TSV结构中的创新:三维芯片应用的热机械和信号完整性分析
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-28 DOI: 10.1109/JEDS.2025.3592893
Kaihong Hou;Zhengwei Fan;Yonggui Chen;Shufeng Zhang;Yashun Wang;Xun Chen
Through-silicon via (TSV) as a crucial interconnection microstructure in three-dimensional (3D) chip, have significantly enhanced device performance and reliability. However, the increasing interconnect density and operating frequency now pose substantial threats to TSVs’ thermal-mechanical and signal transmission reliability, leading to a reduction in the overall reliability of 3D chip. In this study, a novel TSV with silicon dioxide ring (SDR) structure is proposed, its anti-current leakage performance and transmission performance are proved to be superior than traditional TSV and their derivative. On the basis, the equivalent circuit model of the proposed TSV is established, and the influence of the location, height and thickness of SDR on the thermal-mechanical performance and signal integrity of the new TSV is deeply investigated through thermomechanical analysis, electromagnetic analysis and field-circuit collaborative analysis. Results show that SDR’s position, thickness, and height mainly affect TSV’s thermal stress distribution by changing the area enclosed by the SDR and the volume of the SDR itself, transverse thermal conductivity, and the heat storage capacity. A moderate increase in the distance between SDR and the Cu column can enhance insertion loss in direct current (DC) condition. The inner diameter, thickness and height of SDR have different influence mechanisms on the integrity of TSV. These findings provide valuable guidance for TSV optimization and reliability analysis.
透硅通孔(TSV)作为三维(3D)芯片中至关重要的互连结构,具有显著提高器件性能和可靠性的作用。然而,随着互连密度和工作频率的增加,tsv的热机械可靠性和信号传输可靠性受到了严重威胁,导致3D芯片的整体可靠性下降。本文提出了一种具有二氧化硅环(SDR)结构的新型TSV,其抗漏电流性能和传输性能优于传统TSV及其衍生产品。在此基础上,建立了新型TSV的等效电路模型,并通过热力学分析、电磁分析和场路协同分析,深入研究了SDR的位置、高度和厚度对新型TSV热力学性能和信号完整性的影响。结果表明,SDR的位置、厚度和高度主要通过改变SDR所包围的面积和SDR本身的体积、横向导热系数和蓄热能力来影响TSV的热应力分布。在直流条件下,适当增加SDR与Cu柱之间的距离会增加插入损耗。SDR的内径、厚度和高度对TSV的完整性有不同的影响机制。研究结果为TSV优化和可靠性分析提供了有价值的指导。
{"title":"Silicon Dioxide Ring Innovations in TSV Structures: Analysis of Thermal-Mechanical and Signal Integrity for 3-D Chip Applications","authors":"Kaihong Hou;Zhengwei Fan;Yonggui Chen;Shufeng Zhang;Yashun Wang;Xun Chen","doi":"10.1109/JEDS.2025.3592893","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3592893","url":null,"abstract":"Through-silicon via (TSV) as a crucial interconnection microstructure in three-dimensional (3D) chip, have significantly enhanced device performance and reliability. However, the increasing interconnect density and operating frequency now pose substantial threats to TSVs’ thermal-mechanical and signal transmission reliability, leading to a reduction in the overall reliability of 3D chip. In this study, a novel TSV with silicon dioxide ring (SDR) structure is proposed, its anti-current leakage performance and transmission performance are proved to be superior than traditional TSV and their derivative. On the basis, the equivalent circuit model of the proposed TSV is established, and the influence of the location, height and thickness of SDR on the thermal-mechanical performance and signal integrity of the new TSV is deeply investigated through thermomechanical analysis, electromagnetic analysis and field-circuit collaborative analysis. Results show that SDR’s position, thickness, and height mainly affect TSV’s thermal stress distribution by changing the area enclosed by the SDR and the volume of the SDR itself, transverse thermal conductivity, and the heat storage capacity. A moderate increase in the distance between SDR and the Cu column can enhance insertion loss in direct current (DC) condition. The inner diameter, thickness and height of SDR have different influence mechanisms on the integrity of TSV. These findings provide valuable guidance for TSV optimization and reliability analysis.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"937-946"},"PeriodicalIF":2.4,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11098466","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144852700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Response Frequency of Interface Traps Using a Dual-Frequency Charge-Pumping Method and Its Correlation With 1/f Noise 双频电荷泵浦法界面阱的响应频率及其与1/f噪声的相关性
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-28 DOI: 10.1109/JEDS.2025.3593374
Yi Jiang;Luping Wang;Kai Chen;Rui Su;Luyu Yang;Dawei Gao;Junkang Li;Ran Cheng;Rui Zhang
This study shows a novel dual-frequency charge-pumping method, developed to quantitatively characterize the frequency response characteristics of interface traps at the HfO2/Si interface. The response frequency of the interface traps ( $f_{it}$ ), or their capture/emission time, has been accurately evaluated in the range of 5-100 MHz across different energy levels by modulating the charge-pumping voltage waveforms. The analysis of $f_{it}$ provides valuable insights into the 1/f noise behavior of MOS devices, as confirmed by the observed correlation between 1/f noise and $f_{it}$ in the typical HfO2/Si n-MOSFETs. Additionally, it was found that the gate oxide traps are predominantly generated at a distance of 0.45 nm away from the HfO2/Si interface, and at an energy of 0.33 eV below conduction band minimum ( $E_{c}$ ), under a PBTI stress.
本研究展示了一种新的双频电荷泵送方法,用于定量表征HfO2/Si界面上界面陷阱的频率响应特性。通过调制电荷泵浦电压波形,在5-100 MHz的不同能级范围内精确地评估了界面阱的响应频率($f_{it}$)或捕获/发射时间。f_{it}$的分析为MOS器件的1/f噪声行为提供了有价值的见解,正如在典型的HfO2/Si n- mosfet中观察到的1/f噪声与$f_{it}$之间的相关性所证实的那样。此外,发现在PBTI应力下,栅极氧化物陷阱主要在距HfO2/Si界面0.45 nm处产生,能量低于导带最小值($E_{c}$) 0.33 eV。
{"title":"The Response Frequency of Interface Traps Using a Dual-Frequency Charge-Pumping Method and Its Correlation With 1/f Noise","authors":"Yi Jiang;Luping Wang;Kai Chen;Rui Su;Luyu Yang;Dawei Gao;Junkang Li;Ran Cheng;Rui Zhang","doi":"10.1109/JEDS.2025.3593374","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3593374","url":null,"abstract":"This study shows a novel dual-frequency charge-pumping method, developed to quantitatively characterize the frequency response characteristics of interface traps at the HfO2/Si interface. The response frequency of the interface traps (<inline-formula> <tex-math>$f_{it}$ </tex-math></inline-formula>), or their capture/emission time, has been accurately evaluated in the range of 5-100 MHz across different energy levels by modulating the charge-pumping voltage waveforms. The analysis of <inline-formula> <tex-math>$f_{it}$ </tex-math></inline-formula> provides valuable insights into the 1/f noise behavior of MOS devices, as confirmed by the observed correlation between 1/f noise and <inline-formula> <tex-math>$f_{it}$ </tex-math></inline-formula> in the typical HfO2/Si n-MOSFETs. Additionally, it was found that the gate oxide traps are predominantly generated at a distance of 0.45 nm away from the HfO2/Si interface, and at an energy of 0.33 eV below conduction band minimum (<inline-formula> <tex-math>$E_{c}$ </tex-math></inline-formula>), under a PBTI stress.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"947-953"},"PeriodicalIF":2.4,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11098707","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144853509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Retention Characteristics and DMP Efficiency in V-NAND With Dimple Structure 凹槽结构V-NAND的保留特性和DMP效率
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-16 DOI: 10.1109/JEDS.2025.3589680
Seongwoo Kim;Gunwook Yoon;Seungjae Baik;Myounggon Kang
In this paper, we analyze the retention characteristics of vertical NAND(V-NAND) with dimpled (convex and concave) structures considering the impact of adjacent cell states. Additionally, we assess the efficiency of the previously proposed dummy cell program (DMP) in improving retention characteristics. Our results indicate that when the adjacent cell is in the erased state, the retention characteristics of the target cell are affected by conduction band $(E_{C})$ variations due to trapped electrons. The concave structure shows the best retention characteristics, whereas the convex structure shows the most degradation. This difference becomes even more pronounced when the adjacent cell is in the programmed state. However, when DMP is applied to the convex structure, which exhibits the most degraded retention characteristics, the greatest improvement is observed due to significant changes in channel potential $(V_{ch})$ caused by the fast-programming speed.
在本文中,我们考虑相邻单元状态的影响,分析了具有凹槽(凸和凹)结构的垂直NAND(V-NAND)的保留特性。此外,我们评估了先前提出的假细胞程序(DMP)在改善保留特性方面的效率。结果表明,当相邻细胞处于擦除状态时,靶细胞的保留特性受到捕获电子引起的导带$(E_{C})$变化的影响。凹结构的保留性能最好,凸结构的退化最严重。当相邻细胞处于编程状态时,这种差异变得更加明显。然而,当DMP应用于表现出最退化的保留特性的凸结构时,由于快速编程速度引起的通道电位$(V_{ch})$的显著变化,观察到最大的改进。
{"title":"Retention Characteristics and DMP Efficiency in V-NAND With Dimple Structure","authors":"Seongwoo Kim;Gunwook Yoon;Seungjae Baik;Myounggon Kang","doi":"10.1109/JEDS.2025.3589680","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3589680","url":null,"abstract":"In this paper, we analyze the retention characteristics of vertical NAND(V-NAND) with dimpled (convex and concave) structures considering the impact of adjacent cell states. Additionally, we assess the efficiency of the previously proposed dummy cell program (DMP) in improving retention characteristics. Our results indicate that when the adjacent cell is in the erased state, the retention characteristics of the target cell are affected by conduction band <inline-formula> <tex-math>$(E_{C})$ </tex-math></inline-formula> variations due to trapped electrons. The concave structure shows the best retention characteristics, whereas the convex structure shows the most degradation. This difference becomes even more pronounced when the adjacent cell is in the programmed state. However, when DMP is applied to the convex structure, which exhibits the most degraded retention characteristics, the greatest improvement is observed due to significant changes in channel potential <inline-formula> <tex-math>$(V_{ch})$ </tex-math></inline-formula> caused by the fast-programming speed.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"655-658"},"PeriodicalIF":2.4,"publicationDate":"2025-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11082327","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144758208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance Optimization of β-Ga₂O₃-Based Solar-Blind Photodetector by Introducing an Ultra-Thin Sn-Doped High Conductivity Layer 引入超薄掺锡高导层优化β-Ga₂O₃基太阳盲光电探测器性能
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-16 DOI: 10.1109/JEDS.2025.3583305
Bin Yin;Weizhe Cui;Chuanhan Lin;Shihao Fu;Aidong Shen;Bingsheng Li
The metal/semiconductor (M/S) contact plays a crucial role in carrier collection efficiency and is a key factor in photoelectric conversion. To optimize the M/S contact of Al and $beta $ -Ga2O3, several annealing procedures were explored, including low-temperature annealing, direct Sn layer deposition, and face-to-face annealing. Among these methods, the $beta $ -Ga2O3-based solar-blind photodetector fabricated using face-to-face annealing—incorporating an ultra-thin Sn-doped high-conductivity layer—demonstrated superior performance. This device achieved an exceptionally high light-to-dark current ratio of $1.71times 10{^{{8}}}$ , with a responsivity of 14.13 A/W and a detectivity of $1.87times 10^{16}$ Jones at a 10 V bias under 255 nm irradiation ( $23.75~mu $ w/cm2 light intensity). Additionally, it is capable of providing quick signal feedback, with a decay time of 2.81 ms/72.46 ms. The enhanced performance of the face-to-face annealing method is attributed to the formation of a more uniform ultra-thin Sn-doped conductive layer. This layer effectively lowers the barrier height at the M/S interface, improves carrier migration, and reduces contact resistance. These findings highlight that interface engineering through Sn-doped conductive layers is a promising strategy for optimizing the performance of $beta $ -Ga2O3-based photodetectors.
金属/半导体(M/S)接触对载流子收集效率起着至关重要的作用,是光电转换的关键因素。为了优化Al与$beta $ -Ga2O3的M/S接触,研究了低温退火、直接沉积Sn层和面对面退火等退火工艺。在这些方法中,采用面对面退火制备的$beta $ - ga2o3基太阳盲光电探测器(包含超薄掺杂锡的高导电性层)表现出优异的性能。该器件实现了极高的明暗电流比$1.71times 10{^{{8}}}$,响应率为14.13 a /W,在255 nm照射($23.75~mu $ W /cm2光强)下,10v偏置下的探测率为$1.87times 10^{16}$ Jones。此外,它能够提供快速的信号反馈,衰减时间为2.81 ms/72.46 ms。面对面退火方法的性能增强是由于形成了更均匀的超薄掺杂锡导电层。该层有效降低了M/S界面的势垒高度,促进了载流子迁移,降低了接触电阻。这些发现突出表明,通过掺锡导电层进行界面工程是优化$beta $ - ga2o3光电探测器性能的一种很有前途的策略。
{"title":"Performance Optimization of β-Ga₂O₃-Based Solar-Blind Photodetector by Introducing an Ultra-Thin Sn-Doped High Conductivity Layer","authors":"Bin Yin;Weizhe Cui;Chuanhan Lin;Shihao Fu;Aidong Shen;Bingsheng Li","doi":"10.1109/JEDS.2025.3583305","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3583305","url":null,"abstract":"The metal/semiconductor (M/S) contact plays a crucial role in carrier collection efficiency and is a key factor in photoelectric conversion. To optimize the M/S contact of Al and <inline-formula> <tex-math>$beta $ </tex-math></inline-formula>-Ga2O3, several annealing procedures were explored, including low-temperature annealing, direct Sn layer deposition, and face-to-face annealing. Among these methods, the <inline-formula> <tex-math>$beta $ </tex-math></inline-formula>-Ga2O3-based solar-blind photodetector fabricated using face-to-face annealing—incorporating an ultra-thin Sn-doped high-conductivity layer—demonstrated superior performance. This device achieved an exceptionally high light-to-dark current ratio of <inline-formula> <tex-math>$1.71times 10{^{{8}}}$ </tex-math></inline-formula>, with a responsivity of 14.13 A/W and a detectivity of <inline-formula> <tex-math>$1.87times 10^{16}$ </tex-math></inline-formula> Jones at a 10 V bias under 255 nm irradiation (<inline-formula> <tex-math>$23.75~mu $ </tex-math></inline-formula>w/cm2 light intensity). Additionally, it is capable of providing quick signal feedback, with a decay time of 2.81 ms/72.46 ms. The enhanced performance of the face-to-face annealing method is attributed to the formation of a more uniform ultra-thin Sn-doped conductive layer. This layer effectively lowers the barrier height at the M/S interface, improves carrier migration, and reduces contact resistance. These findings highlight that interface engineering through Sn-doped conductive layers is a promising strategy for optimizing the performance of <inline-formula> <tex-math>$beta $ </tex-math></inline-formula>-Ga2O3-based photodetectors.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"577-581"},"PeriodicalIF":2.0,"publicationDate":"2025-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11082297","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144687625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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IEEE Journal of the Electron Devices Society
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