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Direct Extraction of Fowler–Nordheim Tunneling Parameters of Asymmetric Metal-Insulator-Metal Diodes Based on Current-Voltage Measurement 基于电流-电压测量的非对称金属-绝缘子-金属二极管Fowler-Nordheim隧道参数直接提取
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-15 DOI: 10.1109/JEDS.2025.3644310
Wallace Lin;Darsen D. Lu
A method directly solving Fowler-Nordheim tunneling current equations for extracting the effective tunneling area, the barrier heights of the top and bottom electrodes and the electron tunneling effective mass in metal-insulator-metal diodes is demonstrated. Extracted result from the method is comparable with that obtained from the automated Cowell method. The property of the Pt-Al2O3-TiN and Ni-Al2O3-TiN diodes are extracted and analyzed. The effective tunneling area appears to be four to five orders smaller than the drawn device area, suggesting tunneling current flows in very narrow conduction channel(s).
提出了一种直接求解Fowler-Nordheim隧穿电流方程提取金属-绝缘体-金属二极管有效隧穿面积、上下电极势垒高度和电子隧穿有效质量的方法。该方法的提取结果与自动Cowell法的结果具有可比性。提取并分析了Pt-Al2O3-TiN和Ni-Al2O3-TiN二极管的性能。有效隧穿面积似乎比绘制的器件面积小4到5个数量级,表明隧穿电流在非常狭窄的传导通道中流动。
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引用次数: 0
Diffusion Analysis and Impact of RTA on Strained Phosphorous-Doped Si for Advanced SOI Nodes 先进SOI节点中应变掺磷Si的扩散分析及RTA影响
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-11 DOI: 10.1109/JEDS.2025.3642939
Theo Cabaret;Eva Dos Reis;Valerie Lapras;Nicolas Gauthier;Joel Kanyandekwe
Improvement of source/drain regions is necessary to meet the requirements of advanced Fully Depleted Silicon On Insulator (FD-SOI) nodes. The implementation and control of in-situ doped epitaxy while optimizing the dopant diffusion close to the channel is crucial for these architectures. However, few studies have been performed concerning the impact of Rapid Thermal Annealing (RTA) on in-situ doped epitaxial layers for junction optimization. Tensile-strained Si:P (t-Si:P) selective epitaxial growth is being developed for nMOS devices. We evaluate here the impact of temperature and annealing duration on electrical resistivity and diffusion length of P in such t-Si:P layers. We show that the diffusion length can be tuned by selecting the right thermal budget. The diffusion coefficient is otherwise reduced in our in-situ doped samples compared to that in ion implanted ones. Despite a slight tensile strain decrease, maybe due to SixPy cluster dissolution, the t–Si:P resistivity decreased after thermal annealing compared to that just after epitaxy. A right balance between tensile strain preservation and dopant activation was found. We finally evidenced that the active carrier concentration after RTA was in line with the dopant solubility at a given temperature. Higher temperature and shorter anneals might give access to even lower resistivities. The proposed annealing strategy paves the way for the integration of highly doped t-Si:P layers (> $10^{21}$ at/cm3) in the source/drain regions of nMOSFET device.
为了满足先进的全贫绝缘体上硅(FD-SOI)节点的要求,有必要改进源/漏区。实现和控制原位掺杂外延,同时优化靠近通道的掺杂扩散对这些结构至关重要。然而,关于快速热退火(RTA)对原位掺杂外延层结优化的影响的研究很少。拉伸应变Si:P (t-Si:P)选择性外延生长是nMOS器件的发展方向。我们在此评估温度和退火时间对P在这种t-Si:P层中的电阻率和扩散长度的影响。我们证明了扩散长度可以通过选择合适的热收支来调节。与离子注入样品相比,原位掺杂样品的扩散系数有所降低。尽管拉伸应变略有下降,但与外延后相比,热处理后的t-Si:P电阻率有所下降,这可能是由于SixPy团簇的溶解。在拉伸应变保存和掺杂剂活化之间找到了适当的平衡。我们最终证明了RTA后的活性载流子浓度与掺杂剂在一定温度下的溶解度是一致的。更高的温度和更短的退火时间可以获得更低的电阻率。所提出的退火策略为在nMOSFET器件的源极/漏极区域集成高掺杂t-Si:P层(> $10^{21}$ at/cm3)铺平了道路。
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引用次数: 0
Reliability of AlScN/GaN HEMTs Under Pulsed Measurements and HTRB Step-Stress Tests: Experimental and TCAD Insights 脉冲测量和HTRB阶梯应力测试下AlScN/GaN hemt的可靠性:实验和TCAD见解
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-08 DOI: 10.1109/JEDS.2025.3641046
Franco Ercolano;Luigi Balestra;Sebastian Krause;Stefano Leone;Isabel Streicher;Patrick Waltereit;Michael Dammann;Susanna Reggiani
This work investigates the reliability of AlScN/GaN High-Electron-Mobility Transistors (HEMTs) by integrating experimental analyzes with Technology Computer-Aided Design (TCAD) simulations. The study focuses on pulsed I-V measurements and High-Temperature Reverse Bias (HTRB) step-stress tests. The former have been performed under different quiescent conditions highlight short-term transient charge trapping, while the latter reveals long-term threshold voltage $(V_{mathrm {th}})$ , transconductance $(mathrm {gm})$ , saturation drain current $(I_{mathrm {D,ss}})$ and gate leakage $(I_{mathrm {G}})$ shifts. A TCAD model calibrated on experiments is employed to deeply understand the interplay of the different sources of degradation. In pulsed analyzes, iron traps are identified as the primary degradation contributors. In HTRB step-stress regime, trapped charges under the gate at the 2DEG interface are modeled to reproduce the $V_{mathrm {th}}$ shift, while the decreased gm is mostly ascribed to donor-trap detrapping at the SiN passivation interface. The relative $Delta I_{mathrm {D,ss}}[%]$ shift and $I_{mathrm {G}}$ are used to validate the proposed approach. Such insights also provide a net comparison of the degradation phenomena in AlScN-based HEMTs with respect to AlGaN-based counterparts, paving the way for improved technology and device designs.
本工作通过将实验分析与计算机辅助设计(TCAD)模拟相结合,研究了AlScN/GaN高电子迁移率晶体管(hemt)的可靠性。研究重点是脉冲I-V测量和高温反向偏置(HTRB)阶跃应力测试。前者在不同的静态条件下进行,突出了短期瞬态电荷捕获,而后者揭示了长期阈值电压$(V_{mathrm {th}})$、跨导$(mathrm {gm})$、饱和漏极电流$(I_{mathrm {D,ss}})$和栅漏电流$(I_{mathrm {G}})$的位移。采用实验标定的TCAD模型来深入了解不同退化源的相互作用。在脉冲分析中,铁陷阱被确定为主要的降解贡献者。在HTRB阶跃应力状态下,模拟了2DEG界面栅极下的捕获电荷,重现了$V_{ mathm {th}}$位移,而减小的gm主要归因于在SiN钝化界面的供体-陷阱去捕获。使用相对的$Delta I_{mathrm {D,ss}}[%]$ shift和$I_{mathrm {G}}$来验证所提出的方法。这些见解还提供了基于alscn的hemt与基于algan的hemt的降解现象的净比较,为改进技术和设备设计铺平了道路。
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引用次数: 0
Development and Evaluation of SiC LDMOS for High-Temperature Applications 高温应用SiC LDMOS的开发与评价
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-01 DOI: 10.1109/JEDS.2025.3638982
Pengyu Lai;Hui Wang;H. Alan Mantooth;Zhong Chen
This paper proposes and experimentally evaluates SiC laterally diffused metal-oxide-semiconductor (LDMOS) devices fabricated on two full 4H-SiC processes with P-type and N-type epitaxial layers. The devices were characterized from 25 °C to 300 °C in terms of turn-on resistance $(R_{on})$ , breakdown voltage (BV), input capacitance $(C_{iss})$ , and output capacitance $(C_{oss})$ . At 25 °C, $R_{on}$ ranges from 5  $Omega $ /mm2 to 10  $Omega $ /mm2 and BV spans 160 V to 315 V with the device parameter variations. The figure of merit (FOM, i.e., ~14 kW/mm2) is comparable to Si-based LDMOS at room temperature and remains stable up to 300 °C, whereas Si devices degrade rapidly above 150 °C. $C_{iss}$ and $C_{oss}$ of the SiC LDMOS are higher than those of their Si counterparts but exhibit little degradation with increasing temperature. These results demonstrate that the proposed SiC LDMOS devices provide promising performance and strong thermal stability, highlighting their potential for high-voltage and high-temperature integrated circuit applications.
本文提出并实验评价了两种全4H-SiC工艺制备的具有p型外延层和n型外延层的SiC横向扩散金属氧化物半导体(LDMOS)器件。器件在25°C至300°C范围内的导通电阻$(R_{on})$、击穿电压(BV) $、输入电容$(C_{iss})$和输出电容$(C_{oss})$进行了表征。在25°C时,随着器件参数的变化,$R_{on}$的范围为5 $Omega $ /mm2至10 $Omega $ /mm2, BV范围为160 V至315 V。性能值(FOM,即~14 kW/mm2)在室温下与Si基LDMOS相当,并且在300°C下保持稳定,而Si器件在150°C以上会迅速降解。SiC LDMOS的$C_{iss}$和$C_{oss}$高于Si LDMOS的$C_{iss}$,但随着温度的升高几乎没有降解。这些结果表明,所提出的SiC LDMOS器件具有良好的性能和强大的热稳定性,突出了它们在高压和高温集成电路应用中的潜力。
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引用次数: 0
Interfacial Reactions and Electrical Properties of Co / GeSn Contacts Co / GeSn触点的界面反应及电学性能
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-25 DOI: 10.1109/JEDS.2025.3636591
Lucas Badeau;Nicolas Coudurier;Patrice Gergaud;Jean-Michel Hartmann;Vincent Reboud;Philippe Rodriguez
We have investigated Co / GeSn contacts as a promising alternative to the conventional Ni / GeSn system. While cobalt has been widely studied for silicide and germanide formation, its interaction with GeSn has not been probed yet. Using X-ray diffraction (XRD), we obtained the following phase formation sequence: cobalt was consumed at low temperatures to form CoGe near 300 °C, followed by the appearance of Co5Ge7 between 400-500 °C, and its transformation into stable CoGe2 at higher temperatures. Transient CoSnx compounds were also identified in the 350-500 °C range, likely linked to tin segregation above 350 °C. The electrical behavior of Co / n-doped Ge0.94Sn0.06 contacts was also characterized with an ohmic behavior from the as-deposited state up to 500 °C. Notably, low specific contact resistivity values were achieved, with $rho {}_{text {c}}$ as low as $8.8times 10^{-6}~Omega {}$ .cm2. Cobalt was thus shown to be a viable metallization candidate for n-doped GeSn films.
我们研究了Co / GeSn触点作为传统Ni / GeSn体系的一个有希望的替代品。虽然钴已被广泛研究用于硅化物和锗化物的形成,但其与GeSn的相互作用尚未被探索。通过x射线衍射(XRD),我们得到了以下相形成顺序:钴在300℃附近低温消耗形成CoGe,在400 ~ 500℃之间出现Co5Ge7,在较高温度下转变为稳定的CoGe2。在350-500°C范围内也发现了瞬态CoSnx化合物,可能与350°C以上的锡偏析有关。Co / n掺杂Ge0.94Sn0.06触点的电学行为也表现为从沉积态到500°C的欧姆行为。值得注意的是,获得了较低的比接触电阻率值,$rho {}_{text {c}}$低至$8.8times 10^{-6}~Omega {}$ .cm2。因此,钴被证明是一种可行的n掺杂GeSn薄膜的金属化候选者。
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引用次数: 0
Improved On-Resistance Characteristics in P-GaN/AlGaN/GaN HEMTs via Sputtered Boron Nitride Dielectric Film 溅射氮化硼介质膜改善P-GaN/AlGaN/GaN hemt的导通电阻特性
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-14 DOI: 10.1109/JEDS.2025.3632845
Jun-Hyeok Yim;Jinhyeok Pyo;Myeongsu Chae;Sangyeon Pak;Hyungtak Kim;Ho-Young Cha
This study reports the fabrication and characterization of a p-GaN/AlGaN/GaN heterostructure field-effect transistor (HFET) incorporating a boron nitride (BN) film. The BN film was deposited at room temperature via RF sputtering (RT-RF sputtering) onto a SiOx passivation layer. A dual-layer passivation scheme—comprising the SiOx layer and the room-temperature-deposited BN film—was proposed to enhance interface quality and improve the on-resistance characteristics. The RT-RF sputtering BN film was found to increase the 2DEG density at the AlGaN/GaN interface without degrading the overall device performance. As a result, the on-resistance was reduced by 30%.
本研究报道了氮化硼(BN)薄膜的p-GaN/AlGaN/GaN异质结构场效应晶体管(HFET)的制备和表征。在室温下通过射频溅射(RT-RF溅射)将BN薄膜沉积在SiOx钝化层上。提出了一种由SiOx层和室温沉积BN膜组成的双层钝化方案,以提高界面质量和改善导通电阻特性。发现RT-RF溅射BN膜在不降低器件整体性能的情况下增加了AlGaN/GaN界面处的2DEG密度。结果,导通电阻降低了30%。
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引用次数: 0
Gate Voltage Dependence of MOSFET Random Telegraph Noise Amplitude at Room and Cryogenic Temperatures 室温和低温下MOSFET随机电报噪声幅值的栅极电压依赖性
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-13 DOI: 10.1109/JEDS.2025.3632306
Kiyoshi Takeuchi;Tomoko Mizutani;Takuya Saraya;Hiroshi Oka;Takahiro Mori;Masaharu Kobayashi;Toshiro Hiramoto
Random telegraph noise (RTN) in 65 nm technology bulk CMOS devices was measured at both 300 K and 1.5 K, and the dependence of noise amplitude on gate voltage was analyzed. Considering the highly random nature of RTN, 1,024 devices of both nMOS and pMOS types were measured using addressable transistor arrays to obtain statistically meaningful results. It was confirmed that the single-trap RTN amplitude is in good agreement with the number-plus-correlated-mobility fluctuation model at both 1.5 K and 300 K for both device types. It is shown that, from the extracted model parameters, it is possible to gain information on trap location and single charge scattering behavior. The effects of series resistance on the model are also discussed.
在300 K和1.5 K下测量了65 nm工艺CMOS器件的随机电报噪声(RTN),并分析了噪声幅值与栅极电压的关系。考虑到RTN的高度随机性,使用可寻址晶体管阵列测量了1,024种nMOS和pMOS类型的器件,以获得具有统计学意义的结果。结果表明,在1.5 K和300 K时,两种器件类型的单阱RTN振幅都与数字+相关迁移率波动模型非常吻合。结果表明,从提取的模型参数中,可以获得陷阱位置和单电荷散射行为的信息。讨论了串联电阻对模型的影响。
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引用次数: 0
Novel Production Concept of CH2F-Molecular-Ion Implanted Si Epitaxial Wafer for Highly Sensitive 3-D-Stacked CMOS Image Sensors 用于高灵敏度三维堆叠CMOS图像传感器的cch2f -分子离子注入硅外延片的新生产概念
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/JEDS.2025.3631002
Ryo Hirose;Koji Kobayashi;Kazunari Kurita;Takeshi Kadono;Sho Nagatomo
We have developed a novel molecular-ion implantation technique and a molecular-ion-implanted silicon epitaxial wafer for highly sensitive CMOS image sensors. This implantation technique is characterized by the use of molecular-ions consisting of carbon, hydrogen, and fluorine. In this paper, we investigate the formation of CH2F+ molecular-ion beams and conduct a fundamental study on the implantation behavior of CH2F+ molecular-ions and the characteristics of CH2F+-implanted silicon epitaxial wafers. We expect that this technique can contribute to the mass production of highly sensitive CMOS image sensors.
我们开发了一种新的分子离子注入技术和用于高灵敏度CMOS图像传感器的分子离子注入硅外延片。这种注入技术的特点是使用由碳、氢和氟组成的分子离子。本文研究了CH2F+分子离子束的形成,并对CH2F+分子离子的注入行为和CH2F+注入硅外延片的特性进行了基础研究。我们期望这项技术可以为高灵敏度CMOS图像传感器的大规模生产做出贡献。
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引用次数: 0
Memriscapacitor Consisting of a Memristor and Capacitor — The First Proposal and Fabrication With Validation of Multiply-Accumulate Calculation 由忆阻器和电容组成的忆阻电容器——第一个方案和制作及乘法累加计算的验证
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/JEDS.2025.3630670
Kenta Yachida;Kazuki Sawai;Tokiyoshi Matsuda;Hidenori Kawanishi;Mutsumi Kimura
A “memriscapacitor” consisting of a memristor and capacitor has been proposed and actually fabricated. The advantages are the wide dynamic ranges and low power consumption achieved simultaneously. First, the device structure is quite simple, namely, an amorphous Ga-Sn-O thin film between electrodes acts as a memristor, whereas a SiO2 film acts as a capacitor. Next, the hysteresis characteristic of the memristor is observed. Finally, it is validated that the multiply-accumulate calculation is realized as desired by the memriscapacitor.
提出并实际制作了一种由忆阻器和电容组成的“忆阻电容器”。其优点是同时实现了宽动态范围和低功耗。首先,器件结构非常简单,即电极之间的非晶Ga-Sn-O薄膜作为忆阻器,而SiO2薄膜作为电容器。其次,观察了忆阻器的磁滞特性。最后,验证了记忆电容能按要求实现乘法累加运算。
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引用次数: 0
Low Power Logic Functions in Non-Planar Oxide Metal–Insulator–Semiconductor Tunnel Diodes via Tunneling–Coupling Current Competition 基于隧道耦合电流竞争的非平面氧化物金属-绝缘体-半导体隧道二极管的低功耗逻辑功能
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-10 DOI: 10.1109/JEDS.2025.3631061
Yu-Che Tsai;Jenn-Gwo Hwu
A compact logic-configurable device based on a concentric structure with a non-planar oxide structure is demonstrated. The implementation of a non-planar oxide structure minimizes leakage current paths, leading to a reduction in total current. The device maintains stable and different current levels over 100 repeated switching cycles for center biased at + 1 V and rings between flat-band voltage ( $approx $ –0.9 V) and 0 V, demonstrating excellent reliability and suitability for multi-state computing in AI applications. When the center was biased at a selected negative bias, the output current polarity at the center electrode is determined by the interplay between tunneling and coupling effects. By adjusting the center bias, multiple logic functions of OR, MAJ, and AND can be realized within a single device by detecting current polarity. The proposed structure exhibits stable operation over 1000 cycles. Notably, the use of a non-planar oxide leads to a dramatic reduction in power consumption, reaching nearly two orders of magnitude improvement with respect to planar oxide structure. TCAD simulations confirm its scalability down to the nanoscale, underscoring its potential for energy-efficient compute-in-memory applications.
介绍了一种基于同心结构和非平面氧化物结构的紧凑逻辑可配置器件。非平面氧化物结构的实施使漏电流路径最小化,导致总电流的减少。该器件在+ 1v中心偏置和平带电压($约$ $ 0.9 V)和0 V之间的环之间保持稳定和不同的电流水平超过100个重复开关周期,在人工智能应用中的多状态计算中表现出出色的可靠性和适用性。当中心偏置在选定的负偏置时,中心电极的输出电流极性由隧道效应和耦合效应的相互作用决定。通过调节中心偏置,通过检测电流极性,可在单个器件内实现OR、MAJ、and等多种逻辑功能。该结构在1000次循环中稳定运行。值得注意的是,使用非平面氧化物可以显著降低功耗,与平面氧化物结构相比,达到近两个数量级的改进。TCAD模拟证实了它的可扩展性可以达到纳米级,强调了它在高效节能的内存计算应用中的潜力。
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引用次数: 0
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IEEE Journal of the Electron Devices Society
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