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Impact of Work-Function Variation in Ferroelectric Field-Effect Transistor 铁电场效应晶体管功函数变化的影响
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-23 DOI: 10.1109/JEDS.2024.3465594
Su Yeon Jung;Hyunwoo Kim;Jongmin Lee;Jang Hyun Kim
We analyzed the impact of work-function variation (WFV) in ferroelectric field-effect transistor (FeFET). To analyze the operation characteristics, we employed the technology computer-aided design (TCAD) simulations. After evaluating ferroelectricity (FE) characteristics and optimizing device model parameters through calibration, we extracted five key parameters from the hysteretic transfer curves of the FeFET: threshold voltage (Vth), on current (Iin), subthreshold swing (SS), off current (Ioff), and gate-induced drain leakage (GIDL). The extracted parameters were compared based on the presence or absence of FE and the ferroelectric thickness. It was confirmed that the presence of FE leads to increased variation due to dipole alignment with WFV, and that the electric field is maintained even with an increase in ferroelectric thickness
我们分析了铁电场效应晶体管(FeFET)中功函数变化(WFV)的影响。为了分析工作特性,我们采用了技术计算机辅助设计(TCAD)模拟。在评估了铁电(FE)特性并通过校准优化了器件模型参数后,我们从铁电场效应晶体管的滞后转移曲线中提取了五个关键参数:阈值电压(Vth)、导通电流(Iin)、亚阈值摆动(SS)、关断电流(Ioff)和栅极诱导漏极泄漏(GIDL)。根据是否存在 FE 和铁电厚度对提取的参数进行了比较。结果证实,FE 的存在会导致偶极对齐与 WFV 的变化增加,而且即使铁电厚度增加,电场也会保持不变。
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引用次数: 0
High-Performance Carbon Nanotube Optoelectronic Transistor With Optimized Process for 3D Communication Circuit Applications 针对 3D 通信电路应用优化工艺的高性能碳纳米管光电晶体管
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-23 DOI: 10.1109/JEDS.2024.3465669
Shuang Liu;Heyi Huang;Yanqing Li;Yadong Zhang;Feixiong Wang;Zhaohao Zhang;Qingzhu Zhang;Jiali Huo;Jiaxin Yao;Jing Wen;Huaxiang Yin
One-dimensionalcarbon nanotube field-effect transistors (CNFETs) have offered a solution for obtaining high transistor performance in a compatible low-temperature BEOL process, enabling monolithic 3D integration benefits for more functional circuits. Currently, CNT transistors need to further improve their performance with a more stable process and explore the most suitable circuit application scene. In this study, we successfully enhanced the performance of CNFETs through special Y2O3 film passivation and vacuum annealing processes. The on-state current of the optimized device was improved by $36.6times $ compared to the device without these processes. Besides, the subthreshold swing (SS) was notably reduced from 259 mV/dec to 215 mV/dec and the threshold voltage was decreased from 2.02 V to 1.79 V due to the reduction of the interface state. Meanwhile, the devices’ optoelectronic characteristics were significantly improved and exhibited a $72times $ increase in $Delta $ Ids under identical illumination. With an improved annealing process, the $Delta $ Ids were further increased to $231times $ compared to the original device because of the reduction of defects within the device. Finally, the tentative Morse code communication applications all by the optimized CNFETs were obtained. These technologies and functional implementations provided a promising approach for future 3D functional communication systems with CNT technology.
一维碳纳米管场效应晶体管(CNFET)为在兼容的低温 BEOL 工艺中获得高晶体管性能提供了一种解决方案,可实现单片三维集成,从而实现更多功能电路。目前,碳纳米管晶体管需要通过更稳定的工艺进一步提高性能,并探索最适合的电路应用场景。在本研究中,我们通过特殊的 Y2O3 薄膜钝化和真空退火工艺,成功提高了 CNFET 的性能。与未采用这些工艺的器件相比,优化器件的导通电流提高了 36.6 倍。此外,由于界面状态的降低,阈下摆幅(SS)从 259 mV/dec 显著降低到 215 mV/dec,阈值电压从 2.02 V 降低到 1.79 V。同时,器件的光电特性也得到了显著改善,在相同的光照条件下,器件的Ids增加了72倍。通过改进退火工艺,由于器件内部缺陷的减少,与原始器件相比,$Delta $ Ids 进一步增加到 $231times$。最后,经过优化的 CNFET 获得了初步的莫尔斯电码通信应用。这些技术和功能实现为未来采用 CNT 技术的三维功能通信系统提供了一种前景广阔的方法。
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引用次数: 0
Kr-Plasma Process for Conductance Control of MFSFET With FeND-HfO₂ Gate Insulator 等离子体克尔工艺用于带有 FeND-HfO2 栅极绝缘体的 MFSFET 的电导控制
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-18 DOI: 10.1109/JEDS.2024.3462930
S. Ohmi;M. Tanuma;J.W. Shin
In this work, we have investigated the conductance control of the metal-ferroelectrics-Si field-effect transistor (MFSFET) utilizing 5 nm thick ferroelectric nondoped $rm HfO_{2}$ (FeND-HfO2) gate insulator. The Kr-plasma process is effective to decrease the plasma damage compared to the Ar-plasma process during the in-situ deposition of FeND-HfO2 and Pt gate electrode by RF-magnetron sputtering. The precise control such as less than 20 mV was realized which led to the conductance control for 10 states from 0 to $0.6~mu $ S/ $mu $ m both for potentiation and depression operations with the input pulses of $mathbf {pm 3}$ V/100 ns.
在这项研究中,我们利用 5 nm 厚的铁电非掺杂 $rm HfO_{2}$ (FeND-HfO2) 栅极绝缘体研究了金属-铁电-硅场效应晶体管 (MFSFET) 的电导控制。在通过射频-磁控溅射原位沉积 FeND-HfO2 和铂栅电极的过程中,Kr-等离子体工艺比 Ar-等离子体工艺能有效减少等离子体损伤。实现了小于 20 mV 的精确控制,从而在 $mathbf {pm 3}$ V/100 ns 的输入脉冲下,对 10 个状态(从 0 到 $0.6~mu $ S/ $mu $ m)进行了电导控制,包括电位和抑制操作。
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引用次数: 0
Fully Integrated GaN-on-Silicon Power-Rail ESD Clamp Circuit Without Transient Leakage Current During Normal Power-on Operation 完全集成的硅基氮化镓(GaN)电源轨静电放电钳位电路在正常上电操作期间不会产生瞬态泄漏电流
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-17 DOI: 10.1109/JEDS.2024.3462590
Wei-Cheng Wang;Ming-Dou Ker
When more circuit functions are integrated into a single chip fabricated by the GaN-on-Silicon process, the need for on-chip electrostatic discharge (ESD) protection design becomes crucial to safeguard GaN integrated circuits (ICs). In this work, the power-rail ESD clamp circuit with gate-coupled design, fabricated in a GaN-on-Silicon process, was investigated. By increasing the gate-coupled capacitance, ESD level of the power-rail ESD clamp circuit can be significantly improved. However, the increased capacitance induces transient leakage current during normal power-on operation. To overcome this issue, a new detection circuit was proposed, which can differentiate between the ESD event and the normal power-on transient operation. Therefore, incorporating this new proposed detection circuit with the gate-coupled design allows for good ESD robustness, while also preventing transient leakage current during normal power-on condition.
当硅基氮化镓工艺制造的单个芯片中集成了更多电路功能时,片上静电放电(ESD)保护设计对于保护氮化镓集成电路(IC)变得至关重要。在这项工作中,研究了采用硅基氮化镓工艺制造的、具有栅极耦合设计的电源轨静电放电箝位电路。通过增加栅极耦合电容,电源轨 ESD 夹钳电路的 ESD 电平可得到显著提高。然而,增加的电容会在正常上电操作期间产生瞬态漏电流。为了克服这一问题,我们提出了一种新的检测电路,它可以区分 ESD 事件和正常上电瞬态操作。因此,将这一新的检测电路与栅极耦合设计结合在一起,既能实现良好的 ESD 鲁棒性,又能防止正常通电条件下的瞬态漏电流。
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引用次数: 0
Combining Intelligence With Rules for Device Modeling: Approximating the Behavior of AlGaN/GaN HEMTs Using a Hybrid Neural Network and Fuzzy Logic Inference System 器件建模的智能与规则相结合:利用混合神经网络和模糊逻辑推理系统逼近 AlGaN/GaN HEMT 的行为
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-16 DOI: 10.1109/JEDS.2024.3461169
Ahmad Khusro;Saddam Husain;Mohammad S. Hashmi
This paper uses the Adaptive Neuro-Fuzzy Inference System (ANFIS) to investigate and propose a new alternative behavioral modeling technique for microwave power transistors. Utilizing measured I-V characteristics, associated parameters like transconductance $(g_{text {m}})$ and output conductance $(g_{text {ds}})$ , etc., S-parameters characteristics, and RF performance parameters such as unity current gain frequency $(f_{text {T}})$ , maximum unilateral gain frequency $(f_{max })$ , ANFIS-based behavioral models are developed for Gallium Nitride (GaN) High Electron Mobility Transistors (HEMTs) and validated. The models have been developed using two distinct devices with dimensions of $10times 200~mu m$ and $10times 250~mu m$ for multi-bias conditions and over a broad frequency range (0.5 to 43.5 GHz). Subsequently, the proposed model performance is validated on devices with geometries of $10times 220~mu m$ , $4times 100~mu m$ , and $2times 200~mu m$ to examine the interpolation accuracy, extrapolation potential, and scalability. Here, ANFIS utilizes the subtractive clustering method to process the measurement characteristics by computing the clusters and opts for the best-performing model using error and number of fuzzy rules as criteria. The parameters involved in the fuzzy representation are trained using neural network algorithms, namely gradient-descent and least squares estimate. The proposed models are subsequently incorporated in a commercial circuit simulator (Keysight’s ADS) and the class-F power amplifier’s gain and stability characteristics are computed and studied.
本文利用自适应神经模糊推理系统(ANFIS)研究并提出了一种新的微波功率晶体管替代行为建模技术。利用测量的 I-V 特性、相关参数,如跨导 $(g_{text {m}}$ 和输出电导 $(g_{text {ds}}$ 等、针对氮化镓(GaN)高电子迁移率晶体管(HEMT)开发了基于 ANFIS 的行为模型,并进行了验证。这些模型是在多偏压条件和宽频率范围(0.5 至 43.5 GHz)内使用两个不同的器件开发的,这两个器件的尺寸分别为 10/times 200~mu m$ 和 10/times 250~mu m$。随后,在几何尺寸为 $10times 220~mu m$ 、 $4times 100~mu m$ 和 $2times 200~mu m$ 的器件上验证了所提出的模型性能,以检查插值精度、外推潜力和可扩展性。在这里,ANFIS 利用减法聚类方法,通过计算聚类来处理测量特征,并以误差和模糊规则数量为标准,选择表现最佳的模型。使用神经网络算法,即梯度下降和最小二乘估计,对模糊表示所涉及的参数进行训练。随后,将提出的模型纳入商用电路模拟器(Keysight 的 ADS),并计算和研究 F 类功率放大器的增益和稳定性特征。
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引用次数: 0
Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach 使用神经紧凑建模方法分析应变对 3 纳米以下栅极全方位 CMOS 逻辑电路性能的影响
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-13 DOI: 10.1109/JEDS.2024.3459872
Ji Hwan Lee;Kihwan Kim;Kyungjin Rim;Soogine Chong;Hyunbo Cho;Saeroonter Oh
Impact of strain of sub-3 nm gate-all-around (GAA) CMOS transistors on the circuit performance is evaluated using a neural compact model. The model was trained using 3D technology computer-aided design (TCAD) device simulation data of GAA field-effect transistors (FETs) subjected to both tensile and compressive strain in nMOS and pMOS devices. Strain was induced into the channel via lattice mismatch between the channel and source/drain epitaxial regions, as simulated by 3D TCAD process simulator. The transport models were calibrated against advanced Monte Carlo simulations to ensure accuracy. The resulting neural compact model demonstrated a close approximation to the original simulation results, achieving a minimal error of 1%. To assess the strain effect on circuit-level performance, SPICE simulations were conducted for a 5-stage ring oscillator and a 2-input NAND gate using the neural compact model. The propagation delay of the 5-stage ring oscillator improved from 3.60 ps to 2.85 ps when implementing strained GAA FETs. Also, strain enhanced the power-delay product of the 2-input NAND gate by 13.8% to 15.5%, depending on the input voltage sequence.
使用神经紧凑模型评估了 3 纳米以下全栅极 (GAA) CMOS 晶体管应变对电路性能的影响。该模型是利用三维技术计算机辅助设计(TCAD)器件仿真数据进行训练的,这些数据是在 nMOS 和 pMOS 器件中承受拉伸和压缩应变的 GAA 场效应晶体管(FET)。应变通过沟道与源极/漏极外延区之间的晶格失配诱导到沟道中,由三维 TCAD 过程模拟器进行模拟。传输模型根据先进的蒙特卡罗模拟进行了校准,以确保准确性。结果显示,神经网络模型与原始模拟结果非常接近,误差最小为 1%。为了评估应变对电路级性能的影响,我们使用神经精简模型对 5 级环形振荡器和 2 输入 NAND 栅极进行了 SPICE 仿真。当采用应变 GAA FET 时,5 级环形振荡器的传播延迟从 3.60 ps 缩短到 2.85 ps。此外,应变还将 2 输入 NAND 栅极的功率延迟乘积提高了 13.8% 至 15.5%,具体取决于输入电压序列。
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引用次数: 0
A Novel Parallel In-Memory Logic Array Based on Programmable Diodes 基于可编程二极管的新型并行内存逻辑阵列
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-10 DOI: 10.1109/JEDS.2024.3457021
Jiabao Ye;Junyu Zhu;Jifang Cao;Haoxiong Bi;Yong Ding;Bing Chen
Computing-In-Memory (CIM) is widely applied in neural networks due to its unique capability to perform multiply-and-accumulate operations within a circuit array. This process directly obtains the current value through the product of voltage and conductance, accumulating it on the bit line, thus realizing storage and computing functionalities simultaneously within a single array. This significantly reduces the power consumption and time delay in data processing. Unfortunately, implementing general-purpose logic computations in large-scale memory arrays with CIM remains a challenge. This paper introduced a novel device concept, the programmable diode—a special type of memristor with a high switching window, ideally suited for memory arrays to reduce power consumption. A compact SPICE model was developed to enable circuit-level simulations in EDA tools. We also proposed a method to efficiently control the programmable diode for logic operations in memory arrays, and in this way, we constructed a parallel 8-bit full adder to verify the feasibility of the proposed method. Finally, based on the 8-bit full adder, we built a 5KB in-memory logic array capable of executing logic computations and simulated it using EDA tools. The simulation results demonstrated that the 5KB in-memory logic array can perform fundamental Boolean logic and arithmetic operations with high repeatability and parallelism, perfectly realizing the functionality of in-memory logic computation. Our work can provide a feasible scheme for realizing large-scale general logic computation systems based on CIM.
内存计算(CIM)因其在电路阵列中执行乘法和累加运算的独特能力而被广泛应用于神经网络。这一过程通过电压和电导的乘积直接获得电流值,并将其累加到位线上,从而在单个阵列中同时实现存储和计算功能。这大大降低了数据处理的功耗和时间延迟。遗憾的是,利用 CIM 在大规模存储器阵列中实现通用逻辑运算仍是一项挑战。本文介绍了一种新型器件概念--可编程二极管--一种具有高开关窗口的特殊类型忆阻器,非常适合用于降低功耗的存储器阵列。我们开发了一个紧凑的 SPICE 模型,以便在 EDA 工具中进行电路级仿真。我们还提出了一种在存储器阵列中有效控制可编程二极管进行逻辑运算的方法,并以此构建了一个并行 8 位全加法器来验证所提方法的可行性。最后,在 8 位全加法器的基础上,我们构建了一个能够执行逻辑运算的 5KB 内存逻辑阵列,并使用 EDA 工具对其进行了仿真。仿真结果表明,5KB 内存逻辑阵列能以高重复性和并行性执行基本的布尔逻辑和算术运算,完美地实现了内存逻辑运算的功能。我们的工作为实现基于 CIM 的大规模通用逻辑计算系统提供了可行方案。
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引用次数: 0
Wafer-Scale Monolithic Integration of LEDs with p-GaN-Depletion MOSFETs on a GaN LED Epitaxial Layer 晶圆级单片集成 LED 与 GaN LED 外延层上的 p-GaN 损耗 MOSFET
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-06 DOI: 10.1109/JEDS.2024.3455256
Boseong Son;Huijin Kim;Young-Woong Lee;Purusottam Reddy Bommireddy;Si-Hyun Park
We developed a monolithically integrated device consisting of a single GaN LED and two p-GaN-depletion MOSFETs on a GaN LED epitaxial layer. The p-GaN-depletion MOSFETs exhibited a subthreshold slope of 1 V/decade and a threshold voltage of –2 V, whereas the LED exhibited a forward voltage of 3.5 V at 1 mA and an electroluminescence peak of 445 nm. The device could be controlled by the scan voltage, with $V_{DD}$ ranging from 1 to 2 V, and cut off the total current with an applied scan voltage greater than 3 V. This work represents an important step towards the monolithic integration of LED and transistors for use in active-matrix micro-LED displays.
我们开发了一种单片集成器件,包括一个氮化镓发光二极管和两个位于氮化镓发光二极管外延层上的p-氮化镓损耗MOSFET。对氮化镓损耗 MOSFET 的阈下斜率为 1 V/decade,阈值电压为 -2 V,而 LED 在 1 mA 电流下的正向电压为 3.5 V,电致发光峰值为 445 nm。该器件可由扫描电压控制,$V_{DD}$范围为 1 至 2 V,并可在扫描电压大于 3 V 时切断总电流。
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引用次数: 0
Negative Activation Energy of Gate Reliability in Schottky-Gate p-GaN HEMTs: Combined Gate Leakage Current Modeling and Spectral Electroluminescence Investigation 肖特基栅p-GaN HEMT中栅极可靠性的负活化能:栅极漏电流建模与光谱电致发光调查相结合
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-04 DOI: 10.1109/JEDS.2024.3454334
Manuel Fregolent;Mirco Boito;Michele Disarò;Carlo De Santi;Matteo Buffolo;Eleonora Canato;Michele Gallo;Cristina Miccoli;Isabella Rossetto;Giansalvo Pizzo;Alfio Russo;Ferdinando Iucolano;Gaudenzio Meneghesso;Enrico Zanoni;Matteo Meneghini
For the first time, we use electrical characterization, spectrally-resolved electroluminescence measurements and degradation tests to explain the negative activation energy of gate reliability in power GaN HEMTs with p-GaN Schottky gate. First, the origin of gate leakage current was modeled. The results indicate that the gate leakage current originates from three different mechanisms: (i) thermionic emission of electrons from the uid-GaN layer across the AlGaN barrier, for gate voltages below threshold $(V_{G} lt V_{TH})$ , (ii) thermionic emission of electrons from the channel to the p-GaN layer $(V_{TH} lt V_{G} lt 4.5 V)$ and (iii) trap-assisted-tunneling of holes at the Schottky metal for higher gate voltages. Then, the analysis of the reliability as function of gate bias demonstrated a negative activation energy (longer lifetime at high temperature). By analyzing the electroluminescence spectra under high positive bias, the improved time to failure at high temperatures was ascribed to the increased hole injection and recombination, that reduces the overall number of electrons that undergo avalanche multiplication, leading to the breakdown. Finally, the model was validated by comparing the electrical properties and conduction model of the devices pre- and post-stress.
我们首次利用电气特性分析、光谱分辨电致发光测量和降解测试来解释具有 p-GaN 肖特基栅极的功率 GaN HEMT 栅极可靠性的负活化能。首先,对栅极漏电流的起源进行了建模。结果表明,栅极漏电流源于三种不同的机制:(i) 当栅极电压低于阈值 $(V_{G} lt V_{TH})$ 时,电子从 uid-GaN 层穿过 AlGaN 势垒的热离子发射;(ii) 电子从沟道到 p-GaN 层的热离子发射 $(V_{TH} lt V_{G} lt 4.5 V);(iii) 在更高的栅极电压下,肖特基金属上的空穴阱辅助隧道。然后,通过分析可靠性与栅极偏压的函数关系,证明了负活化能(高温下寿命更长)。通过分析高正偏压下的电致发光光谱,高温下失效时间延长的原因是空穴注入和重组增加,从而减少了发生雪崩倍增并导致击穿的电子总数。最后,通过比较应力前后器件的电气特性和传导模型,验证了该模型。
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引用次数: 0
Highly Uniform Low Gray AMOLED Pixel Using Stable Circuit and Duty Ratio Modulation Driving 利用稳定电路和占空比调制驱动高度均匀的低灰度 AMOLED 像素
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-02 DOI: 10.1109/JEDS.2024.3452753
Chanjin Park;Hee-Ok Kim;Jong-Heon Yang;Jae-Eun Pi;Yong-Duck Kim;Chun-Won Byun;Kyeong-Soo Kang;Ji-Hwan Park;Minji Kim;Hyoungsik Nam;Soo-Yeon Lee
In this paper, a new pixel circuit for active matrix organic light-emitting diode (AMOLED) display that can achieve high uniformity in low gray levels and its driving method are proposed. The proposed circuit compensates for threshold voltage variation of thin-film-transistors (TFTs), with the structure that minimizes the loss of sensed threshold voltage. However, the high current error rate in extremely low gray level is unavoidable, as the driving TFT (DRT) operates in subthreshold region, where the current difference caused by the threshold voltage variation can be severe. To suppress high error rates in low gray levels, the operation region of DRT is restricted to the saturation region, by adopting duty ratio modulation (DRM) method. With the DRM method, low gray is expressed with high current value and short emission time. The viability of the proposed circuit and its operation are analyzed with HSPICE. Compared to the conventional driving method, DRM significantly reduces the current error rate in low gray area. The proposed circuit is fabricated within 220 $mu {mathrm {m}} times 440 mu {mathrm {m}}$ . The measurement of the circuit also verified the capability of the proposed circuit and the DRM method.
本文提出了一种用于有源矩阵有机发光二极管(AMOLED)显示屏、可在低灰度级实现高均匀性的新型像素电路及其驱动方法。所提出的电路可补偿薄膜晶体管(TFT)的阈值电压变化,其结构可最大限度地减少感应阈值电压的损失。然而,由于驱动 TFT(DRT)工作在亚阈值区,阈值电压变化造成的电流差可能非常大,因此在极低灰度级时不可避免地会出现高电流误差率。为了抑制低灰度级的高错误率,通过采用占空比调制 (DRM) 方法,将 DRT 的工作区域限制在饱和区域。通过 DRM 方法,低灰度可以用高电流值和短发射时间来表示。我们利用 HSPICE 分析了拟议电路的可行性及其运行情况。与传统驱动方法相比,DRM 大大降低了低灰度区域的电流误差率。所提出的电路可在 220 $mu {mathrm {m} 内制作完成。}440 次。电路的测量也验证了所提电路和 DRM 方法的能力。
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引用次数: 0
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IEEE Journal of the Electron Devices Society
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