Pub Date : 2024-09-23DOI: 10.1109/JEDS.2024.3465594
Su Yeon Jung;Hyunwoo Kim;Jongmin Lee;Jang Hyun Kim
We analyzed the impact of work-function variation (WFV) in ferroelectric field-effect transistor (FeFET). To analyze the operation characteristics, we employed the technology computer-aided design (TCAD) simulations. After evaluating ferroelectricity (FE) characteristics and optimizing device model parameters through calibration, we extracted five key parameters from the hysteretic transfer curves of the FeFET: threshold voltage (Vth), on current (Iin), subthreshold swing (SS), off current (Ioff), and gate-induced drain leakage (GIDL). The extracted parameters were compared based on the presence or absence of FE and the ferroelectric thickness. It was confirmed that the presence of FE leads to increased variation due to dipole alignment with WFV, and that the electric field is maintained even with an increase in ferroelectric thickness
我们分析了铁电场效应晶体管(FeFET)中功函数变化(WFV)的影响。为了分析工作特性,我们采用了技术计算机辅助设计(TCAD)模拟。在评估了铁电(FE)特性并通过校准优化了器件模型参数后,我们从铁电场效应晶体管的滞后转移曲线中提取了五个关键参数:阈值电压(Vth)、导通电流(Iin)、亚阈值摆动(SS)、关断电流(Ioff)和栅极诱导漏极泄漏(GIDL)。根据是否存在 FE 和铁电厚度对提取的参数进行了比较。结果证实,FE 的存在会导致偶极对齐与 WFV 的变化增加,而且即使铁电厚度增加,电场也会保持不变。
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One-dimensionalcarbon nanotube field-effect transistors (CNFETs) have offered a solution for obtaining high transistor performance in a compatible low-temperature BEOL process, enabling monolithic 3D integration benefits for more functional circuits. Currently, CNT transistors need to further improve their performance with a more stable process and explore the most suitable circuit application scene. In this study, we successfully enhanced the performance of CNFETs through special Y2O3 film passivation and vacuum annealing processes. The on-state current of the optimized device was improved by $36.6times $