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Novel Gate Fabrication Process Enhancing High-Frequency Operation in AlGaN/GaN HEMTs for Ka-Band Applications 新型栅极制造工艺增强了ka波段应用中AlGaN/GaN hemt的高频工作
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-07-01 DOI: 10.1109/JEDS.2025.3584809
Neng-Da Li;Yueh-Chin Lin;Kai-Wen Chen;Heng-Tung Hsu;Yi-Fan Tsao;Edward Yi Chang
In this study, AlGaN/GaN high-electron-mobility-transistor (HEMTs) with a small gate length were fabricated using a stepper. Additionally, a novel gate fabrication process was conducted to shrink the gate head, thus reducing the parasitic capacitance of the device to achieve high-power amplifier performance. The device performance in the research demonstrated a steady-state current density (Idss) of 975 mA/mm and a maximum transconductance (gm) of 369 mS/mm at a 20 V bias. Moreover, the cut-off frequency (fT) reached 50.6 GHz, and the maximum oscillation frequency (fmax) achieved 161 GHz as measured by S-parameter measurement. In the load-pull system, the frequency operation is under 28 GHz. For the $2times 50~mu $ m device at a drain bias of 20 V, it exhibits a maximum output power density (Pout) of 2.83 W/mm with a maximum 24.97% power-added efficiency (PAE). Additionally, for the $8times 50~mu $ m device at a drain bias of 32V, it achieves a $mathrm { P_{out}}$ of 1.27 W (3.18 W/mm). This work demonstrates that the novel gate fabrication process of shrinking gate head by using $mathrm { SiN_{x}}$ shield achieves high-frequency and high-output power characteristics for Ka-band application.
在本研究中,采用步进技术制备了具有小栅极长度的AlGaN/GaN高电子迁移率晶体管(hemt)。此外,提出了一种新颖的栅极制造工艺,以缩小栅极头,从而降低器件的寄生电容,从而实现高功率放大器性能。该器件在20v偏置下的稳态电流密度(Idss)为975 mA/mm,最大跨导(gm)为369 mS/mm。s参数测量的截止频率(fT)达到50.6 GHz,最大振荡频率(fmax)达到161 GHz。在负载-拉动系统中,频率工作在28ghz以下。在漏极偏置为20 V时,该器件的最大输出功率密度(Pout)为2.83 W/mm,最大功率附加效率(PAE)为24.97%。此外,对于漏极偏置为32V的8 × 50 μ m器件,其输出功率为1.27 W (3.18 W/mm)。本文的研究表明,采用$ mathm {SiN_{x}}$屏蔽的缩门头制门新工艺可实现ka波段应用的高频高输出功率特性。
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引用次数: 0
Optimization of Guard Ring Structures for Superior Dark Current Reduction and Improved Quantum Efficiency in InGaAs/InP APDs InGaAs/InP apd中保护环结构的优化及暗电流减小和量子效率的提高
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-27 DOI: 10.1109/JEDS.2025.3583669
Zefang Xu;Yu Chang;Kai Qiao;Liyu Liu;Linmeng Xu;Mengyan Fang;Chang Su;Fei Yin;Jieying Wang;Tianye Liu;Ming Li;Dian Wang;Lizhi Sheng;Xing Wang
Avalanche photodiodes (APDs) based on InGaAs/InP are pivotal for applications in low-light detection, yet their performance is often hindered by edge breakdown and high dark currents. This study systematically optimizes guard ring structures to address these challenges, focusing on attached guard rings (AGRs) and floating guard rings (FGRs) through a synergistic approach combining simulation-guided design, fabrication, and experimental validation. We analyze the impact of Zn diffusion depth, AGR/FGR geometries, and electric field distribution on device performance. Experimental results demonstrate that optimized AGR structures reduce dark currents by 70% and enhance quantum efficiency (QE) by 43%, while FGR structures achieve an order-of-magnitude reduction in dark current and a 90% QE improvement compared to non-guarded devices. The breakdown voltage increases by 2.5 V (AGR) and 4 V (FGR), leading to enhanced gain. These advancements highlight the critical role of guard ring optimization in effectively mitigating edge breakdown, offering a pathway to high-sensitivity InGaAs/InP APDs for photon detection technologies.
基于InGaAs/InP的雪崩光电二极管(apd)在低光检测应用中至关重要,但其性能经常受到边缘击穿和高暗电流的阻碍。本研究系统地优化了保护环结构以应对这些挑战,重点研究了附着保护环(agr)和浮动保护环(fgr),通过结合仿真指导设计、制造和实验验证的协同方法。我们分析了锌扩散深度、AGR/FGR几何形状和电场分布对器件性能的影响。实验结果表明,优化后的AGR结构减少了70%的暗电流,提高了43%的量子效率(QE),而FGR结构与非保护器件相比,暗电流减少了一个数量级,量子效率提高了90%。击穿电压增加2.5 V (AGR)和4 V (FGR),导致增益增强。这些进展突出了保护环优化在有效减轻边缘击穿方面的关键作用,为光子探测技术的高灵敏度InGaAs/InP apd提供了一条途径。
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引用次数: 0
Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors 揭示铪铁电电容器疲劳的起源
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-27 DOI: 10.1109/JEDS.2025.3583931
Hyeon-Seo Do;Ik-Jyae Kim;Jiwoung Choi;Jang-Sik Lee
This study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in device performance. The application of a high-voltage recovery pulse effectively reverses the charge state of these vacancies from positive to neutral and redistributes them uniformly across the device, restoring its performance. This recovery process is analogous to the ‘wake-up’ state of the device, demonstrating its potential to restore electrical performance. The results of this study emphasize the importance of controlling the charge state and distribution of oxygen vacancies in the central region to enhance the durability and functionality of ferroelectric devices. This work provides a pathway for the broader and more effective application of ferroelectric materials in advanced semiconductor devices.
本文研究了带正电的氧空位在铁电电容器中部的作用及其对疲劳的影响。研究发现,在疲劳过程中,带正电的氧空位在中心区域积累,导致器件性能显著下降。高压恢复脉冲的应用有效地将这些空位的电荷状态从正电荷逆转为中性电荷,并将它们均匀地重新分布在器件上,从而恢复其性能。这个恢复过程类似于设备的“唤醒”状态,展示了其恢复电气性能的潜力。本研究结果强调了控制中心区域氧空位的电荷状态和分布对于提高铁电器件的耐用性和功能性的重要性。这项工作为铁电材料在先进半导体器件中更广泛、更有效的应用提供了一条途径。
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引用次数: 0
Evaluation of p-GaN-gate All-GaN Cascode HEMT on SiC Substrate: DC Characteristics and Switching Performance SiC衬底上p- gan栅极全gan级联HEMT的评价:直流特性和开关性能
IF 2.4 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-24 DOI: 10.1109/JEDS.2025.3582342
Dian-Ying Wu;Chih-Yung Hsieh;Yi-Xian Huang;Yu-Chen Liu;Wen-Ching Hsu;Ci-Ze Li;Jia-Zhe Liu;Cheng-Yeu Wu;Meng-Chyi Wu
This article compares p-GaN-gate all-GaN cascode devices with standalone E-mode HEMTs on SiC substrates, with a focus on double pulse testing (DPT), a critical method for evaluating switching performance under realistic operating conditions. The all-GaN cascode, featuring a gate width of 85 mm, demonstrates a current rating of 15.6 A, an on-resistance of 7.7 m $Omega $ -cm2, a breakdown voltage of 970 V, and turn-on/off times of 71/52 ns, respectively. Additionally, it exhibits switching energy losses of 17/ $8.2~mu $ J at $V_{DS} ,, {=} ,, 400$ V and $I_{DS} ,, {=} ,, 1$ A. Its dynamic RDS,on is measured at $0.7~Omega $ at $V_{DS} ,, {=} ,, 300$ V and $I_{DS} ,, {=} ,, 1$ A. The experimental results indicate a significant improvement compared to the standalone E-mode HEMT. This highlights the advantages of the all-GaN cascode in reducing dynamic resistance and enhancing switching efficiency, making it an excellent choice for high-performance applications.
本文比较了p- gan栅极全gan级联器件与SiC衬底上的独立E-mode hemt,重点介绍了双脉冲测试(DPT),这是在实际工作条件下评估开关性能的关键方法。该全氮化镓级联码的栅极宽度为85 mm,额定电流为15.6 a,导通电阻为7.7 m $Omega $ -cm2,击穿电压为970 V,通断时间为71/52 ns。此外,在$V_{DS} ,, {=} ,, 400$ V和$I_{DS} ,, {=} ,, 1$ a处,它的开关能量损失为17/ $8.2~mu $ J,在$V_{DS} ,, {=} ,, 300$ V和$I_{DS} ,, {=} ,, 1$ a处,它的动态RDS为$0.7~Omega $,实验结果表明,与独立的e模HEMT相比,它有显著的改善。这凸显了全氮化镓级联码在降低动态电阻和提高开关效率方面的优势,使其成为高性能应用的绝佳选择。
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引用次数: 0
Electrical Tunability in 3-Gated Reconfigurable Transistor for Analog/RF Applications 模拟/射频应用中3门可重构晶体管的电可调性
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-20 DOI: 10.1109/JEDS.2025.3581677
Chinmayi Adoni;Sandeep Semwal;Manish Gupta;Jean-Pierre Raskin;Abhinav Kranti
The potential of electrical tunability in a 3-gated (3G) Reconfigurable Field Effect Transistor (RFET) for analog/RF applications is investigated through four distinct configurations (R ${}_{text {2-IG-LVT}}$ , R ${}_{text {1-IG-Ambi}}$ , R ${}_{text {3-IG-LVT}}$ , and R ${}_{text {2-IG-HVT}}$ ). The electrical connections through two program gates (PG) and one control gate (CG) in 3G-RFET supports the implementation of configurations suitable for low-VTH (R ${}_{text {2-IG-LVT}}$ and R ${}_{text {3-IG-LVT}}$ ) and high-VTH (R ${}_{text {2-IG-HVT}}$ ), phase follower/reversal (R ${}_{text {2-IG-LVT}}$ ), frequency doubler (R ${}_{text {1-IG-Ambi}}$ ), high gain (R ${}_{text {3-IG-LVT}}$ ), lower parasitic capacitance (R ${}_{text {2-IG-LVT}}$ and R ${}_{text {3-IG-LVT}}$ ), and higher linearity (R ${}_{text {3-IG-LVT}}$ ) applications. Results showcase electrical tunability as an opportunity to realize many analog/RF features–in–one nanoscale 3G-RFET.
通过四种不同的配置(R ${}_{text {2-IG-LVT}}$、R ${}_{text {1-IG-Ambi}}$、R ${}_{text {3-IG-LVT}}$和R ${}_{text {2-IG-HVT}}$),研究了用于模拟/RF应用的3门控(3G)可重构场效应晶体管(RFET)的电可调谐电位。在3G-RFET中,通过两个程序门(PG)和一个控制门(CG)的电气连接支持实现适合低vth (R ${}_{text {2-IG-LVT}}$和R ${}_{text {3-IG-LVT}}$)和高vth (R ${}_{text {2-IG-LVT}}$)、相位跟踪/反转(R ${}_{text {1- ig - lvt}}$)、倍频器(R ${}_{text {1-IG-Ambi}}$)、高增益(R ${}_{text {3-IG-LVT}}$)、较低的电容(R ${}_{text {2-IG-LVT}}$和R ${}} {text {3-IG-LVT}}$)、和更高线性度(R ${}_{text {3-IG-LVT}}$)应用。结果表明,电可调性是实现许多模拟/射频功能于一体的纳米级3G-RFET的机会。
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引用次数: 0
Impact of Defects on the Low-Field Electron Mobility in GaN-on-Si HEMTs GaN-on-Si hemt中缺陷对低场电子迁移率的影响
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-11 DOI: 10.1109/JEDS.2025.3577260
Ran Zhou;D. J. Gravesteijn;R. J. E. Hueting
In this work, we investigate the field and temperature dependence of the electron mobility in aluminum-gallium-nitride/gallium-nitride (AlGaN/GaN) high electron mobility transistors (HEMTs) realized on GaN-on-silicon (Si) substrates. For this purpose we employ an extraction method to eliminate parasitic and fringing effects. Our results show that especially at low fields the temperature dependence of the mobility, and consequently that of the specific on-resistance, is strongly affected by stress-induced charged dislocation scattering. For explaining the mobility behaviour at low fields, the subthreshold operation regime of the HEMTs has also been analyzed. An interface trap density at the AlGaN/GaN interface $(N_{textrm {it}})$ of $sim ~6.9times 10^{10}$ cm−2 has been extracted independent of the temperature which is close to the extracted dislocation density from mobility measurements. This suggests that the relatively high dislocation density in the GaN layer, which is a consequence of the still imperfect buffer layer in the GaN-on-Si substrate that is used to accommodate the strain difference, has an impact on $N_{textrm {it}}$ , thus subthreshold swing, in addition to the mobility reduction.
在这项工作中,我们研究了在GaN-on-silicon (Si)衬底上实现的铝-氮化镓/氮化镓(AlGaN/GaN)高电子迁移率晶体管(HEMTs)中电子迁移率的场和温度依赖关系。为此,我们采用了一种提取方法来消除寄生和边缘效应。我们的研究结果表明,特别是在低场下,迁移率的温度依赖性以及相应的比导通电阻的温度依赖性受到应力诱导的带电位错散射的强烈影响。为了解释在低场下的迁移行为,我们还分析了hemt的阈下工作机制。在与温度无关的AlGaN/GaN界面$(N_{textrm {it}})$ ($sim ~6.9 × 10^{10}$ cm−2)处提取出的界面陷阱密度与从迁移率测量中提取的位错密度接近。这表明,除了迁移率降低外,GaN层中相对较高的位错密度(这是GaN-on- si衬底中用于容纳应变差的缓冲层仍然不完善的结果)对$N_{textrm {it}}$产生影响,从而产生亚阈值振荡。
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引用次数: 0
Reliability of Gap-Type Thin Film Transistors Under Low Illumination for Imaging Sensing Applications 低照度下成像传感用间隙型薄膜晶体管的可靠性研究
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-11 DOI: 10.1109/JEDS.2025.3578547
Ya-Hsiang Tai;Chih-Chung Tu;Chi-Hao Lin;Chi-Fan Lu
In large-area image sensing applications, such as under-display fingerprint sensors, amorphous silicon (a-Si) gap-type thin-film transistors (TFTs) are favored due to their simple fabrication process and high sensing current. These applications typically involve device operation under low-light illumination conditions. Despite these advantages, the recovery behavior of performance parameters after exposure to stress factors, including bias stress and photo-stress, has not been comprehensively explored, particularly in relation to reliability recovery. This study systematically investigates the impact of fixed-bias and pulsed-stress operations under low-light conditions. The experimental findings are further analyzed using Technology Computer-Aided Design (TCAD) simulations to elucidate the underlying mechanisms. Results indicate that long-term bias stress induces significant variations in the photocurrent characteristics of the devices. However, the introduction of pulsed operations in sensing applications markedly enhances the operational lifetime of the devices, offering a promising pathway to improving their reliability.
在大面积图像传感应用中,非晶硅(a-Si)隙型薄膜晶体管(TFTs)因其制作工艺简单和传感电流大而受到青睐。这些应用通常涉及在低光照明条件下的设备操作。尽管有这些优点,但暴露于应力因素(包括偏置应力和光应力)后性能参数的恢复行为尚未得到全面探索,特别是与可靠性恢复有关。本研究系统地研究了在弱光条件下固定偏置和脉冲应力操作的影响。利用计算机辅助设计(TCAD)模拟技术对实验结果进行了进一步分析,以阐明潜在的机制。结果表明,长期偏置应力会引起器件光电流特性的显著变化。然而,在传感应用中引入脉冲操作显着提高了器件的使用寿命,为提高其可靠性提供了一条有希望的途径。
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引用次数: 0
Erratum to “Charge-Based Compact Modeling of OECTs for Neuromorphic Applications” “神经形态应用中基于电荷的oect紧凑建模”的勘误表
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-10 DOI: 10.1109/JEDS.2025.3572172
Ghader Darbandy;Malte Koch;Lukas M. Bongartz;Karl Leo;Hans Kleemann;Alexander Kloes
Presents corrections to the paper, (Erratum to “Charge-Based Compact Modeling of OECTs for Neuromorphic Applications”).
提出了对论文的更正,(对“神经形态应用中基于电荷的OECTs紧凑建模”的勘误)。
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引用次数: 0
IEEE ELECTRON DEVICES SOCIETY 电子器件学会
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-05 DOI: 10.1109/JEDS.2025.3576507
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引用次数: 0
Enabling Selective and Tunable Weight Updates in All-InGaZnO 3-Transistor 1-Capacitor Synaptic Circuits for On-Chip Training 在All-InGaZnO 3-晶体管1-电容突触电路中实现选择性和可调谐的权重更新,用于片上训练
IF 2 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-06-05 DOI: 10.1109/JEDS.2025.3576795
Minseung Kang;Mingi Kim;Jaehyeon Kang;Jongun Won;Hyeong Jun Seo;Changhoon Joe;Youngchae Roh;Yeaji Park;Sangbum Kim
Capacitor-based analog synaptic circuit arrays proposed so far typically required more than three transistors per synapse to enable selective updates for parallel backpropagation updates. For the first time, an innovative update scheme that enables selective updating without requiring additional transistors is demonstrated. This approach is experimentally validated through an all-InGaZnO (IGZO) thin-film transistor (TFT) 3-transistor 1-capacitor (3T1C) synaptic circuit. IGZO TFTs are specifically chosen for their ability to extend retention times due to extremely low leakage currents and their simplified fabrication processes at low temperatures. Fundamental synaptic operations, including controllable weight updates, long data retention, and stable programming endurance, are confirmed experimentally. Additionally, optimizing operational voltage conditions improves weight update behavior, which enhances network training performance. System-level analysis using a neural network hardware simulator with a derived weight update model demonstrates high training accuracy on the MNIST handwritten digit dataset and achieves maximum accuracy over 98%. With the proposed selection method and tunable weight updates, 3T1C synaptic circuit is a promising candidate for scalable large-scale deep neural network accelerators based on analog compute-in-memory technology.
目前提出的基于电容的模拟突触电路阵列通常需要每个突触三个以上的晶体管来实现并行反向传播更新的选择性更新。首次展示了一种创新的更新方案,该方案可以在不需要额外晶体管的情况下进行选择性更新。该方法通过全ingazno (IGZO)薄膜晶体管(TFT) 3晶体管1电容器(3T1C)突触电路进行了实验验证。由于极低的泄漏电流和在低温下简化的制造工艺,IGZO tft具有延长保持时间的能力,因此特别选择了IGZO tft。基本的突触操作,包括可控制的权重更新,长时间的数据保留,和稳定的编程耐力,被实验证实。此外,优化操作电压条件可以改善权重更新行为,从而提高网络训练性能。系统级分析使用神经网络硬件模拟器和派生的权重更新模型,在MNIST手写数字数据集上显示出很高的训练精度,最高准确率超过98%。基于所提出的选择方法和可调的权重更新,3T1C突触电路是基于模拟内存计算技术的可扩展大规模深度神经网络加速器的理想选择。
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引用次数: 0
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IEEE Journal of the Electron Devices Society
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