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A Deep Reinforcement Learning Based Region-Specific Beamformer for Sparse Arrays 3-D Ultrasound Imaging 基于深度强化学习的区域特定波束形成器用于稀疏阵列三维超声成像。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-15 DOI: 10.1109/TUFFC.2025.3560872
Mohamed Tamraoui;Hervé Liebgott;Emmanuel Roux
Sparse arrays offer several advantages over other element reduction techniques for 3-D ultrasound imaging. However, the large interelement spacing in these arrays results in high sidelobe-related artifacts, which significantly degrade image quality and limit their application in 3-D ultrasound imaging. Adaptive beamformers have been proposed to mitigate sidelobe-related artifacts, but they often degrade speckle texture quality, resulting in unnaturally dark images. To overcome these limitations, we propose RSB-Net, a region-specific beamformer based on deep reinforcement learning (DRL). RSB-Net adaptively selects the most suitable beamformer for each pixel of the image, applying adaptive beamforming in regions dominated by sidelobe artifacts and delay-and-sum (DAS) beamforming in regions where speckle texture should be preserved. The effectiveness of RSB-Net was validated on both simulated and experimental synthetic transmit aperture (STA) RF datasets with a newly designed sparse array prototype. On simulated data, RSB-Net achieved significant gains, with improvements of 52.81 dB in contrast ratio (CR) and 0.65 in a generalized contrast-to-noise ratio (gCNR) compared to DAS beamforming. In experimental tissue-mimicking phantom data, RSB-Net demonstrated similar performance, achieving gains of 51.01 dB and 0.64, respectively. These results highlight the potential of RSB-Net as a robust and effective solution for high-quality B-mode 3-D ultrasound imaging using 2-D sparse arrays, advancing the standardization of 3-D ultrasound in clinical settings by enhancing anatomical visualization, reducing operator dependency, and improving measurement accuracy for lesions and calcifications.
稀疏阵列为三维超声成像提供了几个优于其他元素还原技术的优点。然而,这些阵列中较大的单元间距导致高副瓣相关伪影,这大大降低了图像质量,限制了它们在三维超声成像中的应用。自适应波束形成器已被提出以减轻副瓣相关的伪影,但它们经常降低斑点纹理质量,导致不自然的暗图像。为了克服这些限制,我们提出了RSB-Net,一种基于深度强化学习的区域特定波束形成器。rsdb - net自适应地为图像的每个像素选择最合适的波束形成器,在副瓣伪影占主导的区域应用自适应波束形成,在需要保留散斑纹理的区域应用延迟和波束形成。利用新设计的稀疏阵列原型,在模拟和实验合成发射孔径射频数据集上验证了RSB-Net的有效性。在模拟数据上,RSB-Net取得了显著的增益,与DAS波束形成相比,对比度提高了52.81 dB,广义对比度噪声比提高了0.65。在模拟组织的实验数据中,RSB-Net表现出类似的性能,分别获得51.01 dB和0.64 dB的增益。这些结果突出了rbs - net作为使用2D稀疏阵列进行高质量b模式3D超声成像的强大而有效的解决方案的潜力,通过增强解剖可视化,减少对操作员的依赖,提高病变和钙化的测量精度,促进了临床环境中3D超声的标准化。
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引用次数: 0
A High-Frequency Ultrasound Endoscope for Minimally Invasive Spine Surgery 用于微创脊柱手术的高频超声内窥镜。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-10 DOI: 10.1109/TUFFC.2025.3559870
M. Nicole MacMullin;Theresa Gu;Thomas G. Landry;Nicholas Campbell;Sean D. Christie;Jeremy A. Brown
The transition to minimally invasive spinal surgery over traditional open procedures requires the development of imaging techniques that meet the size constraints. Due to size restrictions associated with minimally invasive spine surgery (MISS), current imaging techniques are largely limited to microscopy, which is only capable of line-of-sight imaging of the tissue surface. A miniature, high-resolution ultrasound imaging endoscope has been developed as a potential alternative imaging method that would enable intraoperative guidance. We have designed and developed a 30-MHz miniature, 64-element high-resolution imaging endoscope using PIN-PMT-PT single crystal as the piezoelectric substrate. The packaged probe had cross-sectional dimensions of $3.8times 4.2$ mm and a length of 14 cm. Two editions of the endoscope were created with a forward facing and 40° angle to enable visualization of structures during a medial and lateral approach, respectively. The probe was combined with a custom imaging system that produced real-time images with a field of view ranging between ±32° and an image depth of 15 mm. The two-way axial resolution was measured to be $38~mu $ m based on the -6-dB width of the pulse envelope. The -6-dB lateral resolution was measured to be 113, 131, and $158~mu $ m at steering angles of 0°, 12°, and 25°, respectively, which were close to the simulated values of 106, 118, and $144~mu $ m. Preliminary clinical imaging studies successfully demonstrated the visualization of pertinent spinal anatomy during minimally invasive surgeries. The imaging probe was also able to demonstrate compression and decompression of nerve roots, supporting its potential use as a clinical tool.
从传统的开放手术过渡到微创脊柱手术,需要满足尺寸限制的成像技术的发展。由于与微创脊柱手术相关的尺寸限制,目前的成像技术主要局限于显微镜,它只能对组织表面进行视线成像。一种微型、高分辨率超声成像内窥镜已经被开发出来,作为一种潜在的替代成像方法,可以实现术中引导。我们设计并开发了一种30 MHz微型,64元件,高分辨率成像内窥镜,使用PIN-PMT-PT单晶作为压电衬底。封装探头的横截面尺寸为3.8 mm x 4.2 mm,长度为14 cm。内窥镜的两个版本分别具有正面和40⁰角度,以便在内侧和外侧入路期间分别实现结构的可视化。该探头与定制成像系统相结合,产生实时图像,视场范围在±32⁰之间,图像深度为15 mm。基于-6 dB的脉冲包络宽度,测量出双向轴向分辨率为38 μm。在0⁰、12⁰和25⁰的转向角度下,测量到的-6 dB横向分辨率分别为113 μm、131 μm和158 μm,接近106 μm、118 μm和144 μm的模拟值。初步的临床影像学研究成功地证明了在微创手术中相关脊柱解剖的可视化。成像探针还能够显示神经根的压迫和减压,支持其作为临床工具的潜在用途。
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引用次数: 0
Respiratory Motion Effects and Mitigation Strategies on Boiling Histotripsy in Porcine Liver and Kidney 猪肝脏和肾脏沸腾组织的呼吸运动效应及缓解策略。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-09 DOI: 10.1109/TUFFC.2025.3559458
Ekaterina M. Ponomarchuk;Gilles P. L. Thomas;Minho Song;Yak-Nam Wang;Stephanie Totten;George R. Schade;Vera A. Khokhlova;Tatiana D. Khokhlova
Boiling histotripsy (BH) is a pulsed high-intensity focused ultrasound (HIFU)-based method of extracorporeal nonthermal tissue disintegration under real-time ultrasound (US) guidance. Respiratory motion in abdominal targets can affect BH precision and completeness. This study compares two motion mitigation strategies based on pulse/echo US motion tracking: robotic arm-based unidirectional motion compensation by HIFU transducer manipulation and BH pulse gating during expiratory pause. BH ablations were generated in the liver and kidney of anesthetized pigs with 2–10-ms pulses using a 256-element 1.5-MHz HIFU array. A coaxial US imaging probe was used for targeting, tracking skin surface, and monitoring real-time bubble activity. The axial [anterior-posterior (AP)] displacement of the skin surface was found to be synchronous with liver and kidney motion in both cranio-caudal (CC) and AP directions. BH lesions were produced either with no motion mitigation, or with pulse gating, or with 1-D motion compensation. Dimensions of completely fractionated and affected tissue areas were measured histologically. In liver, gating and motion compensation improved fractionation completeness within targeted volumes and reduced off-target tissue damage in AP direction versus no motion mitigation; only gating reduced off-target damage in CC direction. In kidney, gating improved BH completeness in both directions versus no mitigation, but did not affect off-target damage due to lower displacement amplitudes in the kidney comparable with gating tolerance limits. In both liver and kidney, gating increased treatment time by 24%. These results suggest that BH pulse gating using US-based AP skin surface tracking is an adequate approach for treating organs with pronounced 3-D respiratory motion.
煮沸组织切片法(BH)是一种在实时超声(US)引导下基于脉冲高强度聚焦超声(HIFU)的体外非热组织崩解方法。腹部目标的呼吸运动可影响BH的精度和完整性。本研究比较了两种基于脉冲/回波US运动跟踪的运动缓解策略:基于机械臂的HIFU换能器操作的单向运动补偿和呼气暂停时的BH脉冲门控。采用256单元1.5 mhz HIFU阵列,以2-10ms脉冲在麻醉猪的肝脏和肾脏产生BH消融。同轴US成像探头用于定位、跟踪皮肤表面并实时监测气泡活动。发现皮肤表面的轴向(前后,AP)位移与肝脏和肾脏在颅尾(CC)和AP方向的运动是同步的。BH病变要么没有运动缓解,要么有脉冲门控,要么有一维运动补偿。组织学上测量完全分离和受影响组织区域的尺寸。在肝脏中,门控和运动补偿改善了靶体积内的分割完整性,减少了AP方向的脱靶组织损伤,而没有运动缓解;只有门控降低了CC方向的脱靶伤害。在肾脏中,门控在两个方向上都改善了BH的完整性,而不是没有缓解,但由于与门控公差限制相比,肾脏的位移幅度更低,因此对脱靶损伤没有影响。在肝脏和肾脏中,门控使治疗时间延长了24%。这些结果表明,使用基于美国AP皮肤表面跟踪的BH脉冲门控是治疗具有明显3D呼吸运动的器官的适当方法。
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引用次数: 0
Adaptive Color Doppler for Axial Velocity Imaging of Microvessel Networks 微血管网络轴向速度自适应彩色多普勒成像。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-09 DOI: 10.1109/TUFFC.2025.3559238
Yang Liu;Yongchao Wang;Pakpong Chirarattananon;Jianbo Tang
Directional filtering has been applied to distinguish between the ascending and descending flows in functional ultrasound imaging; however, it can lead to incorrect measurement of the flow speed and direction when using the directional filtering-based improved directional color Doppler ultrasound (iCD_US) velocimetry. Specifically, in cases where the frequency spectrum bandwidth of a unidirectional flow extends into both negative and positive frequency domains, directional filtering may erroneously produce bidirectional velocities. Here, we propose an adaptive color Doppler ultrasound (aCD_US) technique, which addresses this issue by analyzing the envelope of the Doppler spectrum and then adaptively using the whole spectrum integration or directional filtering-based approach to estimate the flow velocity. The proposed aCD_US was validated through numerical simulations and phantom experiments under various flow conditions, demonstrating superior performance in estimating axial velocities of unidirectional, bidirectional, and horizontal flows. Notably, numerical simulations showed that aCD_US achieved over 90% directional accuracy and less than 15% velocity deviation at signal-to-noise ratios (SNRs) larger than −1 dB. In vivo, experiments on mouse cerebral blood flow further highlighted its advantages, with aCD_US surpassing conventional color Doppler velocimetry and iCD_US in reconstructing axial flow velocity maps. The quantitative comparison between aCD_US and vULM shows a strong overall correlation in their axial velocity measurements, with a Pearson correlation coefficient of 0.760 ( ${p} =0.000$ ). These results demonstrate the advantage of aCD_US in precise microvessel network velocity quantification and its potential to advance microvascular imaging accuracy in both research and clinical applications.
在功能超声成像中,定向滤波已被用于区分上升和下降的血流,然而,在使用基于定向滤波的彩色多普勒超声测速仪(iCD_US)时,它可能导致血流速度和方向的测量不正确。具体来说,在单向流动的频谱带宽同时延伸到负频域和正频域的情况下,定向滤波可能会错误地产生双向速度。本文提出了一种自适应彩色多普勒超声技术(aCD_US),该技术通过分析多普勒频谱的包络,然后自适应地使用全谱积分或基于方向滤波的方法来估计血流速度,从而解决了这一问题。通过数值模拟和各种流动条件下的模拟实验验证了所提出的aCD_US,在估计单向、双向和水平流动的轴向速度方面表现出优异的性能。值得注意的是,数值模拟表明,在大于-1 dB的信噪比下,aCD_US的方向精度超过90%,速度偏差小于15%。小鼠脑血流的体内实验进一步凸显了其优势,aCD_US在重建轴向血流速度图方面优于传统的彩色多普勒测速仪和iCD_US。aCD_US和vULM之间的定量比较显示,它们的轴向速度测量具有很强的整体相关性,Pearson相关系数为0.760 (p = 0.000)。这些结果证明了aCD_US在精确微血管网络速度量化方面的优势,以及它在研究和临床应用中提高微血管成像精度的潜力。
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引用次数: 0
A Contrast-Enhanced Null Subtraction Imaging Method Using Dynamic DC Bias in Ultrafast Ultrasound Imaging 一种利用动态直流偏置进行超快超声成像的对比度增强零差成像方法。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-04 DOI: 10.1109/TUFFC.2025.3558017
Xin Yan;Xiaodong Yang;Lingling Jing;Wei Guo;Yingqi Wang;Xinwei Su;Yuanyuan Wang
Enhancing the resolution and contrast of ultrafast ultrasound imaging is imperative for the accuracy of clinical diagnostics. Null subtraction imaging (NSI) is a nonlinear beamforming technique capable of significantly enhancing lateral resolution. However, it suffers from issues of low-quality speckle pattern and poor contrast performance. To address this issue, we propose a novel contrast-enhanced NSI method that utilizes dynamic dc bias. Innovatively, we construct the dynamic dc bias using a generalized coherence factor (GCF) and a sigmoid transformation function that adapts the dc value based on the signal characteristics of different imaging regions. Furthermore, a normalization scheme is proposed to optimize the beamforming output, ensuring uniform pixel intensity throughout the final image. Simulation, phantom, and in vivo data are utilized for ultrasound beamforming to evaluate the performance of the proposed method. Quantitative results show that the proposed method significantly enhances the contrast ratio (CR) by 197%, the contrast-to-noise ratio (CNR) by 341%, the speckle signal-to-noise ratio (sSNR) by 302%, and the generalized CNR (gCNR) by 106% compared to the original NSI (in phantom). Point target imaging results indicate that the proposed method achieves a main lobe width slightly wider than the original NSI method, but much narrower than those of delay and sum (DAS) and GCF. These findings confirm that the proposed method significantly enhances imaging contrast while preserving high resolution, which is of great significance for the further clinical application of ultrafast ultrasound imaging.
提高超快超声成像的分辨率和对比度对临床诊断的准确性至关重要。零相减成像(NSI)是一种能够显著提高横向分辨率的非线性波束形成技术。然而,它存在低质量斑点图案和对比度差的问题。为了解决这个问题,我们提出了一种利用动态直流偏置的对比度增强NSI方法。创新地,我们使用广义相干因子(GCF)和基于不同成像区域的信号特征自适应DC值的s型变换函数来构建动态DC偏置。此外,提出了一种优化波束形成输出的归一化方案,以确保最终图像中的像素强度均匀。仿真、模拟和体内数据被用于超声波束成形来评估所提出的方法的性能。定量结果表明,与原始NSI(在幻影中)相比,该方法显著提高了对比度(CR) 197%,噪比(CNR) 341%,散斑信噪比(sSNR) 302%,广义噪比(gCNR) 106%。点目标成像结果表明,该方法获得的主瓣宽度比原NSI方法略宽,但比DAS和GCF方法窄得多。以上结果证实了该方法在保持高分辨率的同时,显著增强了成像对比度,对超快超声成像的进一步临床应用具有重要意义。
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引用次数: 0
Computational Ultrasound Carotid Artery Imaging With a Few Transceivers: An Emulation Study 计算超声颈动脉成像与几个收发器:仿真研究。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-04 DOI: 10.1109/TUFFC.2025.3557374
Yuyang Hu;Didem Dogan;Michael Brown;Geert Leus;Antonius F. W. van der Steen;Pieter Kruizinga;Johannes G. Bosch
Ultrasonography could allow operator-independent examination and continuous monitoring of the carotid artery (CA) but normally requires complex and expensive transducers, especially for 3-D. By employing computational ultrasound imaging (cUSi), using an aberration mask and model-based reconstruction, a monitoring device could be constructed with a more affordable simple transducer design comprising only a few elements. We aim to apply the cUSi concept to create a CA monitoring system. The system’s possible configurations for the 2-D imaging case were explored using a linear array setup emulating a cUSi device in silico, followed by in vitro testing and in vivo CA imaging. Our study shows enhanced reconstruction performance with the use of an aberrating mask, improved lateral resolution through proper choice of the mask delay variation, and more accurate reconstructions using least-squares with QR (LSQR) decomposition compared to matched filtering (MF). Together, these advancements enable B-mode reconstruction and power Doppler imaging (PDI) of the CA with sufficient quality for monitoring using a configuration of 12 transceivers coupled with a random aberration mask with a maximum delay variation of four wave periods (WPs).
超声检查可以实现对颈动脉的独立检查和连续监测,但通常需要复杂而昂贵的换能器,尤其是3D换能器。通过使用计算超声成像(cUSi),使用像差掩模和基于模型的重建,可以构建一个更经济的监测设备,简单的传感器设计只包含几个元素。我们的目标是应用cUSi概念来创建颈动脉监测系统。利用模拟cUSi装置的线性阵列装置探索了该系统在二维成像情况下的可能配置,随后进行了体外测试和体内颈动脉成像。我们的研究表明,使用像差掩模可以增强重建性能,通过适当选择掩模延迟变化可以提高横向分辨率,并且与匹配滤波相比,使用最小二乘QR分解(LSQR)可以更准确地重建。总之,这些进步使颈动脉的b模式重建和功率多普勒成像具有足够的监测质量,使用12个收发器加上随机畸变掩膜,最大延迟变化为4个波周期。
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引用次数: 0
Chirp-Coded Subharmonic Imaging With Volterra Filtering: Histotripsy Bubble Cloud Assessment In Vitro and Ex Vivo 沃尔泰拉滤波的啁啾编码次谐波成像:体外和离体组织泡沫云评估。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-03 DOI: 10.1109/TUFFC.2025.3556030
Vishwas V. Trivedi;Katia Flores Basterrechea;Kenneth B. Bader;Himanshu Shekhar
Histotripsy is a noninvasive focused ultrasound therapy that liquifies tissue via bubble activity. Conventional ultrasound imaging is used in current clinical practice to monitor histotripsy. Developing surrogate imaging metrics for successful treatment outcomes remains an unmet clinical need. The goal of this work was twofold. First, we investigated whether histotripsy bubble clouds detected with nonlinear imaging (chirp-coded subharmonic imaging with and without Volterra filtering) could be used to assess the ablation zone in vitro. Second, we evaluated the feasibility of improving bubble cloud contrast with this approach in ex vivo porcine kidney. Histotripsy bubble clouds were generated in red blood cell-doped agarose phantoms and imaged with a curvilinear ultrasound probe. The ablation zone was assessed based on images collected with a digital camera. The relationship between the bubble cloud area and the ablation area was assessed using receiver operating characteristic (ROC) analysis, F1 score, accuracy, and Matthews correlation coefficient. Histotripsy bubble clouds were also generated in ex vivo porcine tissue and the ability to improve bubble cloud contrast to tissue was evaluated. Implementing chirp-coded subharmonic imaging with the third-order Volterra filter enhanced contrast-to-tissue ratio (CTR) by up to $40.06~pm ~0.70$ dB relative to standard imaging in vitro. Furthermore, subharmonic imaging combined with Volterra filtering estimated bubble cloud areas that best matched the ablation zone area based on the analysis metrics. Furthermore, ex vivo studies showed CTR improvement of up to $26.95~pm ~6.49$ dB. Taken together, these findings advance image guidance and monitoring approaches for histotripsy.
组织活检是一种非侵入性聚焦超声治疗,通过气泡活动液化组织。常规超声成像在目前的临床实践中用于监测组织切片。开发替代成像指标的成功治疗结果仍然是一个未满足的临床需求。这项工作的目标是双重的。首先,我们研究了用非线性成像(带或不带Volterra滤波的啁啾编码次谐波成像)检测到的组织层状气泡云是否可以用于体外评估消融区。其次,我们评估了这种方法在离体猪肾脏中改善气泡云对比的可行性。在红细胞掺杂琼脂糖的幻影中产生了组织分层的气泡云,并用曲线超声探头成像。根据数码相机采集的图像对消融区进行评估。利用受者工作特征分析、f1评分和Intersection over Union评分评估气泡云面积与消融面积的关系。在离体猪组织中也产生了组织分层气泡云,并评估了改善气泡云与组织对比度的能力。与体外标准成像相比,使用三阶Volterra滤波器实现啁啾编码次谐波成像可使组织对比度提高40.06±0.70 dB。此外,亚谐波成像结合Volterra滤波,根据分析指标估计出与烧蚀区最匹配的气泡云区域。此外,离体研究表明,组织比提高高达26.95±6.49 dB。综上所述,这些发现促进了组织切片术的图像引导和监测方法。
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引用次数: 0
Directional Coherence Factor for Volumetric Ultrasound Imaging With Matrix Arrays 矩阵阵列体积超声成像的定向相干系数。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-04-03 DOI: 10.1109/TUFFC.2025.3557519
Xiaochuan Wu;Wei-Ning Lee
Matrix arrays with small apertures limit spatial and contrast resolutions of volumetric ultrasound imaging. Coherence-based beamformers are prevalent for sidelobe suppression and resolution improvement. While the spatial coherence of a matrix array is fundamentally a 2-D function, conventional coherence factor (CF) methods neglect the directional variation of an ${M} times {N}$ matrix array when calculating volumetric coherence. We hereby propose a projection-based directional CF (DCF) to exploit the 2-D nature of volumetric coherence function. Instead of computing the coherent and incoherent summations across the entire 2-D aperture, DCF projects aperture data onto azimuthal, elevational, diagonal, and anti-diagonal directions and subsequently calculates the CFs for each direction separately. The orthogonal coherence pairs, i.e., azimuth and elevation, and diagonal and anti-diagonal, are multiplied to obtain DCFRC and DCFDiag, respectively. The Jaccard similarity of DCFRC and DCFDiag is used to derive the final DCF to weigh the reconstructed images. We evaluated the performance of DCF beamforming in point-target simulations, multipurpose phantom experiments, and in vivo muscle imaging and compared it to delay-and-sum (DAS) and CF beamformers. Our DCF achieved sidelobe reduction throughout the entire volume compared to conventional CF. Moreover, diagonal weighting significantly improved, on average, the azimuthal resolution by 41.3% versus DAS and 7.35% versus CF as well as the elevational resolution by 40.4% versus DAS and 38.7% versus CF. Our proposed DCF offers a practical solution for resolution and contrast enhancement of volumetric imaging in 2-D matrix array configurations.
小孔径矩阵阵列限制了体积超声成像的空间和对比度分辨率。基于相干的波束形成器在抑制旁瓣和提高分辨率方面非常流行。虽然矩阵阵列的空间相干性基本上是一个二维函数,但传统的相干因子(CF)方法在计算体积相干性时忽略了M × N矩阵阵列的方向变化。我们在此提出了一种基于投影的定向相干因子(DCF)来利用体积相干函数的二维特性。DCF不是计算整个二维孔径的相干和非相干总和,而是将孔径数据投影到方位角、仰角、对角线和反对角线方向,然后分别计算每个方向的相干系数。将正交相干对(方位角和仰角、对角和反对角)相乘,分别得到DCFRC和DCFDiag。利用dfrc和DCFDiag的Jaccard相似度推导出最终的DCF,对重构图像进行加权。我们评估了DCF波束形成在点目标模拟、多用途幻影实验和体内肌肉成像中的性能,并将其与延迟和(DAS)和CF波束形成进行了比较。与传统的CF相比,我们的DCF在整个体积中实现了旁瓣的减少。此外,对角线加权显著提高,平均而言,方位角分辨率比DAS高41.3%,比CF高7.35%,高度分辨率比DAS高40.4%,比CF高38.7%。我们提出的DCF为二维矩阵阵列配置的体积成像分辨率和对比度增强提供了一个实用的解决方案。
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引用次数: 0
Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing 局域退火焦耳加热薄膜压电MEMS谐振器的频率微调能力及性能增强研究。
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-03-31 DOI: 10.1109/TUFFC.2025.3556305
Ugur Guneroglu;Adnan Zaman;Abdulrahman Alsolami;Ivan F. Rivera;Jing Wang
This article deliberately explores the frequency trimming and performance enhancement of piezoelectric MEMS resonators through localized annealing induced by Joule heating. Targeting the effective postfabrication treatment of thin-film piezoelectric-on-silicon (TPoS) resonators, we employ a novel annealing approach that modifies the silicon resonator body-bottom electrode interface to enable meticulous resonance frequency trimming and enhanced overall performance. By applying a controlled dc current directly through the resonator’s body, precise resonance frequency shifts on the order of 0.1%–0.4% and significant increase in quality factor, from 981 to 2155, from 8214 to 9362, have been realized for rectangular-plate and disk-shaped resonators, respectively. Furthermore, this localized annealing process reduces the motional impedance from 3.43 to 1.65 k $Omega $ for a rectangular-plate resonator and from 1.79 to 1.58 k $Omega $ for a disk-shaped resonator, thus demonstrating its viability as a postfabrication treatment technique for a wide variety of MEMS devices. These results highlight the great potential of Joule heating-induced localized annealing in advancing RF systems that demand high precision, reliable filtering, and stable timing functions. This work provides new insights into the thermal annealing effects on MEMS resonators and lays a foundation for future innovations in related microsystem technologies.
本文探讨了利用焦耳加热局部退火对压电MEMS谐振器进行频率微调和性能提升的方法。针对薄膜压电硅(TPoS)谐振器的有效后期处理,我们采用了一种新颖的退火方法来修改硅谐振器的体底电极界面,以实现细致的谐振频率修剪和增强整体性能。通过控制直流电流直接通过谐振腔体,实现了精确的谐振频率漂移0.1% ~ 0.4%,质量因子从981提高到2155,从8214提高到9362。此外,这种局部退火工艺将矩形板谐振器的运动阻抗从3.43 kΩ降低到1.65 kΩ,将盘形谐振器的运动阻抗从1.79 kΩ降低到1.58 kΩ,从而证明了其作为各种MEMS器件的制造后处理技术的可行性。这些结果突出了焦耳加热诱导局部退火在推进射频系统方面的巨大潜力,这些系统需要高精度、可靠的滤波和稳定的定时功能。这项工作为MEMS谐振器的热退火效应提供了新的见解,并为相关微系统技术的未来创新奠定了基础。
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引用次数: 0
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Publication Information IEEE超音波学、铁电学与频率控制论文集
IF 3 2区 工程技术 Q1 ACOUSTICS Pub Date : 2025-03-29 DOI: 10.1109/TUFFC.2025.3569143
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IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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