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Real time analysis for Laser drilling vias of 5G Material with Multiphoton microscopy 5G材料激光打孔孔的多光子显微镜实时分析
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966642
Jyun-Zong Yu, Hsin-Yu Chang, Chien-Jung Huang, Yu-Chung Lin, Chia-Yuan Chang
The ultrafast laser for material processing concentrates the pulse energy into the scale of picosecond or femtosecond temporal duration. The high peak power would induce nonlinear multiphoton fluorescence, material modification and photoablation with higher pulse energy [1]–[3]. With the increase of processing resolution and complexity, we would propose the noninvasive inspection method by integrating with multiphoton excited fluorescence microscopy (MPEFM) to directly monitor the processed structure in specimen for verification and analysis [1]. In this paper, we would show the setup of FPGA-based MPEFM and adopt the single photon counting (SPC) technique for high signal-to-noise (SNR) images. The image spatial resolution is submicron level. To the need of the high bandwidth electrical components and applications in industry, companies are developing different kinds of composite materials and insulators together with the technology of different kinds of laser processing methods and protocols including direct writing, drilling, and modification with etching-assistance. Glass and polyimide (PI) are important materials for the insulation layer in PCB (printed circuit board) design and the narrow electrical routing structures are especially required to be confirmed after processing [4], [5]. We have shown the MPEFM can detect the axial-resolved images of the laser modified surface on the silicon glass and the laser-cut structure on the PI film without damaging the specimen. The mechanism shows the potential for the rapid 3D inspection of the laser processed specimen.
用于材料加工的超快激光器将脉冲能量集中到皮秒或飞秒的时间跨度上。较高的峰值功率会引起非线性多光子荧光、材料修饰和光消融,且脉冲能量较高[1]-[3]。随着处理分辨率和复杂性的提高,我们将提出与多光子激发荧光显微镜(MPEFM)相结合的无创检测方法,直接监测样品中被处理的结构进行验证和分析[1]。在本文中,我们将展示基于fpga的MPEFM的设置,并采用单光子计数(SPC)技术来处理高信噪比(SNR)图像。图像空间分辨率为亚微米级。为了满足高带宽电子元件和工业应用的需要,各公司正在开发各种复合材料和绝缘体,以及各种激光加工方法和工艺技术,包括直写、钻孔和辅助蚀刻修饰。玻璃和聚酰亚胺(PI)是PCB(印刷电路板)设计中重要的绝缘层材料,尤其要求加工后确认窄电走线结构[4],[5]。结果表明,MPEFM可以在不损坏样品的情况下检测出激光修饰硅玻璃表面和激光切割PI膜结构的轴向分辨图像。该机构显示了激光加工样品快速三维检测的潜力。
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引用次数: 1
Interfacial Microstructure Evolution of Indium Jointed with Different Surface Finishes after Thermal Treatments 热处理后不同表面处理的铟连接界面微观结构演变
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966633
Chengyong Chen, Liang-Yih Hung, Yueh Yang Lee, Yu-Po Wang
High performance computing (HPC) products market is growing to meet current and future demands in business, government, engineering, and science. HPC system can process big data and perform complex calculation at high speeds, where the system also generates a lot of heat continuously. The accumulated heat needs to be managed to avoid affecting the performance and lifetime of HPC system. Therefore, a key design and development of HPC products is to achieve high thermal dissipation in electronic devices. The application of thermal interface materials (TIMs) has been a promising thermal dissipation solution for electronic devices. However, the thermal conductivities of current silicone-based TIMs have been insufficient for future products. Indium is a potential candidate for high heat dissipation needs, because the thermal conductivity of pure indium is around 86 W/mK, which is higher than most silicone-based TIMs. When indium has been applied as a metallic TIM and jointed with the metal of surface finish, there is an intermetallic compound (IMC) reaction at the interface of indium joint. The phase and microstructure of IMC depend on the conditions of thermal treatments and the type of surface finish. The interfacial condition of indium joint is the key to heat dissipation performance. Therefore, the interfacial mechanism of indium joints have been investigated by applying different surface finishes and various heat treatments in this study.In this paper, the interfacial reactions of indium jointed with different surface finishes (Au/Ni(V) and Au/Ni) have been investigated, respectively. For studying the interfacial microstructure evolution of the indium joints, they have been treated with different thermal treatments, including reflow process (with 245°C peak temperature) and high temperature storage tests (aging at 100°C, 125°C, and 150°C for 250~1000 hours). The interfacial morphologies of indium joint and the growth behaviors of IMC have been observed, and the interfacial IMC has been identified as Ni28 In72 phase. For Au/Ni(V) surface finish, there is rock shaped IMC grains on the surface of Ni(V) layer, and the grain size of IMC increases with the increase of the reflow cycle. In Ni(V) layer, there is a significant In/Ni inter-diffusion reaction after different thermal treatments. For Au/Ni surface finish, the thickness of IMC increases with the increase of aging time and temperature, and the growth rate of IMC increases with the elevating storage temperature.
高性能计算(HPC)产品市场正在不断增长,以满足当前和未来在商业、政府、工程和科学方面的需求。高性能计算系统可以高速处理大数据和执行复杂的计算,同时系统也会持续产生大量的热量。需要对积累的热量进行管理,以避免影响高性能计算系统的性能和使用寿命。因此,高性能计算产品的设计和开发的关键是在电子器件中实现高散热。热界面材料(TIMs)的应用是一种很有前途的电子器件散热解决方案。然而,目前硅基TIMs的热导率对于未来的产品来说是不够的。铟是高散热需求的潜在候选者,因为纯铟的导热系数约为86 W/mK,高于大多数硅基TIMs。当铟作为金属TIM与表面处理金属连接时,在铟连接界面处会发生金属间化合物(IMC)反应。IMC的相和显微组织取决于热处理条件和表面处理类型。铟接头的界面状态是影响其散热性能的关键。因此,本研究通过不同的表面处理和不同的热处理来研究铟接头的界面机理。本文分别研究了不同表面处理剂(Au/Ni(V)和Au/Ni)与铟的界面反应。为了研究铟接头的界面组织演变,对其进行了不同的热处理,包括回流工艺(峰值温度为245℃)和高温储存试验(在100℃、125℃和150℃时效250~1000小时)。通过对界面形貌和IMC生长行为的观察,确定界面IMC为Ni28 In72相。对于Au/Ni(V)表面光洁度,Ni(V)层表面存在岩石形状的IMC晶粒,且IMC晶粒尺寸随回流循环次数的增加而增大。在Ni(V)层中,经过不同热处理后,存在明显的In/Ni扩散反应。对于Au/Ni表面光洁度,IMC的厚度随时效时间和温度的增加而增加,IMC的生长速率随储存温度的升高而增加。
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引用次数: 0
The impact of Sn-Oxide on the solder wetting of immersion tin and how to overcome possible solderability defects to ensure constant solder wetting performance 研究了锡氧化物对浸渍锡焊料润湿的影响,以及如何克服可能存在的可焊性缺陷,以保证浸渍锡的润湿性能
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966675
B. Schafsteller, Bernhard Schachtner, Anja Streek, Kenneth Lee, H. Mertens, G. Ramos
Immersion tin is a final finish which is widely used in the printed circuit board (PCB) industry. It provides a cost competitive surface protection with excellent corrosion resistance and has the capability for multiple reflow soldering. The tin is deposited on copper by immersion reaction with a typical layer thickness of 0.8 – 1.2 μm. On top of the tin layer an oxide layer is formed, which can influence the properties of the final finish. During the assembly process, an intermetallic compound (IMC) grows connecting the copper substrate and the tin of the solder alloy. The growth of the IMC is a complex function of temp and time. The IMC formation and well distributed pure tin remnants are key factors to obtain a reliable solder joint. With increased aging or reflow of the immersion tin deposit, the role of the tin oxide layer becomes of particular interest influencing properties of solder and immersion tin in liquidus process at reflow step. Due to the IMC formation, the tin layer is facing increasing internal stress which is potentially released via the oxide covered surface. The quality and thickness of the tin oxide layer impacts the solder wetting performance of the final finish, the risk of whisker formation and in particular the stability and appearance of the layer after reflow aging. In this paper, an introduction on typical failure mechanisms and root causes for solder wetting defects of immersion tin will be given. Such defects can become e.g. visible by solder dewetting in certain areas of the soldered pads or by partially shiny appearance of the tin surface after reflow cycles. The mechanisms introduced in this paper are supported by correlating tests to identify possible root causes for the solder wetting defects. Various methods are presented which allow the determination of the tin oxide layer thickness. Different factors are investigated for their impact on the tin oxide layer formation, and various approaches are studied to modify the thickness of the oxide layer. Based on the test results, the properties of the tin oxide layer could be identified as critical parameters for the immersion tin layer performance. The application of a dedicated post-treatment solution can modify the tin oxide layer and improve the performance of the immersion tin deposit regarding appearance and solderability. This is confirmed by optical inspection, different types of solderability tests and whisker evaluation.
浸锡是一种广泛应用于印刷电路板(PCB)行业的最后处理方法。它提供了具有成本竞争力的表面保护,具有优异的耐腐蚀性,并具有多次回流焊接的能力。采用浸渍法在铜表面沉积锡,锡层厚度为0.8 ~ 1.2 μm。在锡层的顶部形成一氧化层,它可以影响最终涂层的性能。在组装过程中,金属间化合物(IMC)生长连接铜衬底和锡的焊料合金。IMC的生长是温度和时间的复杂函数。IMC的形成和均匀分布的纯锡渣是获得可靠焊点的关键因素。随着浸锡层时效或回流的增加,氧化锡层的作用对回流工序中焊料和浸锡性能的影响变得尤为重要。由于IMC的形成,锡层面临着不断增加的内应力,这些内应力可能通过氧化物覆盖的表面释放出来。氧化锡层的质量和厚度会影响最终成品的焊料润湿性能、晶须形成的风险,尤其是回流时效后氧化锡层的稳定性和外观。本文介绍了浸锡湿焊缺陷的典型失效机理和根本原因。这些缺陷可以通过焊盘某些区域的焊料脱湿或回流循环后锡表面部分有光泽而变得可见。本文所介绍的机理得到了相关试验的支持,以确定焊料润湿缺陷的可能根本原因。提出了测定氧化锡层厚度的各种方法。研究了不同因素对氧化锡层形成的影响,并研究了改变氧化锡层厚度的各种方法。根据试验结果,氧化锡层的性能是影响浸锡层性能的关键参数。应用专用后处理溶液可以修饰氧化锡层,改善浸锡镀层的外观和可焊性。这是通过光学检查、不同类型的可焊性测试和晶须评估来证实的。
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引用次数: 0
A Fluorinated Electronic Grade Coating which can help to Pass ANSI/ISA G3 Corrosion Test for Protecting Outdoor Electronics 一种氟化电子级涂层,可以帮助通过ANSI/ISA G3腐蚀测试,保护户外电子产品
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966667
Dem Lee, Jeffiey Lee, Ricky S. W. Lee, Calvin Lee
The proliferation of Artificial Intelligence (AI), big data, 5G, electric vehicles, Internet of Things (IoT), edge computing, High Performance Computing (HPC) and Electric Vehicle (EV) in recent years has necessitated the increased use of electronics. Therefore, the hardware reliability of electronics has received more attention in the industry. With prevalent environmental pollution, air quality will also directly or indirectly influence the life of electronics in indoor and outdoor applications. In general, the hardware reliability of electronics can be easily affected by corrosive gases, moisture, salts, contaminants and particulate matter, especially in outdoor environments with high sulfur-bearing gaseous contamination. Therefore, next generation electronics required not only high performance but also robustness against harsher environments. A guideline from the International Society for Automation (ISA) standard 71.04-2013 was used to classify the measured corrosion thickness of airbome contaminants into the various severity level rankings by using pure copper and silver coupon exposure. However, some end-customers have asked their Original Design Manufacturers (ODMs) provide the product for passing G2/G3 severity level compliant to 3 years, 5 years, even 10 years through accelerated corrosion methodologies in recent years. Therefore, more and more ODMs have adopted the conformal coating solution. Conformal coating is a popular solution which can protect the board and component to prevent the sulfur corrosion occurrence, especially in edge computing and outdoor infrastructure. In this research, Flower of Sulfur (FoS) testing method was adopted to validate the anti-corrosion capability of bare copper Printed Circuit Board (PCB) with different conformal coating materials, including typical silicon-based and electronic grade fluorine-based conformal coating, and also benchmarked them against the bare copper PCB without conformal coating. Besides, this corrosion test can be satisfied ANSI/ISA G3 severity level compliant to 5 years exposure. Several analytical methods were used in this research, including, Optical Microscope (OM) Inspection, Coulometric Reduction (CR), Scanning Electron Microscopy (SEM) and Energy-Dispersive X-ray spectroscopy (EDX). Finally, we found that fluorine-based conformal coating from 3MTMNovecTM has robust corrosion resistance that can enhance the specific protectively of outdoor electronics application.
近年来,人工智能(AI)、大数据、5G、电动汽车、物联网(IoT)、边缘计算、高性能计算(HPC)和电动汽车(EV)的激增,使得电子产品的使用越来越多。因此,电子产品的硬件可靠性问题越来越受到业界的重视。随着环境污染的普遍存在,空气质量也将直接或间接地影响电子产品在室内和室外应用的寿命。一般来说,电子产品的硬件可靠性很容易受到腐蚀性气体、湿气、盐类、污染物和颗粒物的影响,特别是在高含硫气体污染的室外环境中。因此,下一代电子产品不仅需要高性能,还需要对恶劣环境的鲁棒性。根据国际自动化学会(ISA)标准71.04-2013的指导方针,通过使用纯铜和银的接触面暴露,将测量的空气污染物腐蚀厚度分为不同的严重程度等级。然而,近年来,一些终端客户要求其原始设计制造商(odm)通过加速腐蚀方法,提供符合3年、5年甚至10年G2/G3严重等级的产品。因此,越来越多的odm采用保形涂层解决方案。保形涂层是一种流行的解决方案,它可以保护电路板和组件,防止硫腐蚀的发生,特别是在边缘计算和室外基础设施中。本研究采用硫之花(FoS)测试方法,对裸铜印制电路板(PCB)采用不同保形涂层材料,包括典型硅基保形涂层和电子级氟基保形涂层的防腐性能进行了验证,并与未采用保形涂层的裸铜印制电路板(PCB)进行了基准测试。此外,该腐蚀试验可以满足5年暴露的ANSI/ISA G3严重等级。本研究采用了光学显微镜(OM)、库仑还原(CR)、扫描电镜(SEM)和能量色散x射线光谱(EDX)等分析方法。最后,我们发现3MTMNovecTM的氟基保形涂层具有强大的耐腐蚀性,可以增强户外电子应用的特定保护。
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引用次数: 0
Failure Analysis for Package of Gold Wire Bonding from Practical Case 从实际案例分析金丝焊包的失效
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966671
Ander Hsieh, Mike Huang, Johnny Ch Chen, Michael Yeh
A practical case related to package failure from field was presented in this paper, traditional equipment (cross-section, oven, SEM) was used to reveal 2 of mixed factors that may trigger failure of package. In the final conclusion, we considered the failure was strongly related to crack between gold wire ball & pad and concave molding of package when using 1~1.5 years from field. Another purpose of this paper is that author would like to draw industry’s attention regarding to quality standard of wire bonding. In current standard only stated the pull strength of wire bonding, but it did not control the structure quality of wire bonding, bad connection of electrical property may result in temporal failure of electronic product and not easy to find out the root cause of failure, this situation may influence different level of product, e.g. military, satellite, medical instrument, air industry, server, personal computer.
本文介绍了一个与现场包装失效相关的实际案例,利用传统的设备(横断面、烘箱、扫描电镜)揭示了可能引发包装失效的混合因素中的两个。在最后的结论中,我们认为在现场使用1~1.5年的时间里,失效与金丝球与衬垫之间的裂纹和封装的凹成型密切相关。本文的另一个目的是希望引起业界对焊线质量标准的重视。现行标准只规定了焊线的拉拔强度,而没有对焊线的结构质量进行控制,电气性能连接不良可能导致电子产品暂时失效,且不容易找出失效的根本原因,这种情况可能影响到不同层次的产品,如军事、卫星、医疗仪器、航空工业、服务器、个人电脑等。
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引用次数: 0
Laser Drilling & Plasma Descum Employed In The Process of Wafer-Level Chip Scale Package(WLCSP) 激光打孔&等离子体剥离在晶圆级芯片规模封装(WLCSP)工艺中的应用
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966690
Jack Huang
Laser drilling is widely employed for PCB/FPCB production, especially for ABF/RDL substrates used for 5G telecommunication. Compared with the mechanical drilling which is usually used for the via diameter over 200um, laser drilling can fulfill the smaller via diameter amid 15um and 200um. Plasma descum and wet cleaning are the common post-processes after the laser drilling to obtain the better via quality by removing drilling residue and debris. But traditional nano-second/pico-second lasers used in laser drilling may not drill well on the protective layer or redistribution layer(RDL) of the wafer-level chip-scale-package(WLCSP). Challenges including: (1) Bottom metal layer damaged or insulation layer peeling from the metal layer attributed to the severe heat-affected-zone(HAZ). (2) Via diameter smaller than 30um is unachievable. (3) Positional error below 5um can’t be secured while drilling at the faster speed. This paper will demonstrate using the femto-second laser with the inherent feature of cold ablation to drill vias on the ABF layer and then carrying out the post-treatment of plasma descum to fulfill the requirements of higher taper angle and faster throughput. Advantages include: (1) Flesible drilling capability, via diameter is programmable in the range of 15um to 200um. (2) Undamaged and residue-free on the bottom metal layer. (3) Smooth via sidewall. (4) Continuous drilling can reach the speed of 3000 via/sec.
激光打孔广泛应用于PCB/FPCB的生产,特别是用于5G电信的ABF/RDL基板。相对于机械钻孔通常用于200um以上的通径,激光钻孔可以完成15um - 200um之间较小的通径。等离子脱屑和湿式清洗是激光钻孔后常见的后处理工序,目的是去除钻孔残留物和碎屑,获得较好的通孔质量。但传统的纳秒/皮秒激光在圆片级芯片级封装(WLCSP)的保护层或重分布层(RDL)上钻孔效果不佳。挑战包括:(1)由于严重的热影响区(HAZ),底部金属层损坏或绝缘层从金属层脱落。(2)无法实现直径小于30um的通孔。(3)钻孔速度越快,定位误差不能保证在5um以下。本文将演示利用具有冷烧蚀固有特性的飞秒激光在ABF层上钻孔,然后对等离子体碎片进行后处理,以满足更高的锥角和更快的吞吐量要求。优点包括:(1)钻进能力灵活,通径可在15um至200um范围内可编程。(2)底层金属层无破损、无残留物。(3)光滑通径侧壁。(4)连续钻孔速度可达3000孔/秒。
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引用次数: 0
System Level IR Drop Impact on Chip Power Performance Signoff for RISC-V System on Chip RISC-V片上系统级IR下降对芯片功耗性能的影响
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966707
K. Yong, Chin Theng Lim, Wei Khoon Teng
Understanding of how a chip power performance is impacted by the IR drop of a power delivery network (PDN) enables system operating conditions to be optimized. It allows IR drop impacts to a silicon chip to be identified and fixed early during design phases. Conventionally, the static and dynamic IR drop analysis for a silicon chip only considers the impact of silicon level power switching gates and metal routing. Such an analysis approach assumes the power supply from voltage regulator module (VRM) to silicon bumps is noise-free and steady, without taking the impacts of system level components into considerations [1]–[4]. In our opinions, such an analysis approach is unduly optimistic and causes IR drop signoff to be less reliable. This paper uses a RISC-V CPU as a case study to illustrate the importance of the external components in an IR drop analysis. The characterization results show that an IR drop of 100mV caused by PDN impedance can result in the targeted clock speed to be reduced by up to 500MHz, which is equivalent to a 50% performance degradation for a 1GHz CPU and is significant. Then, the impact of system level IR drop caused by package, board and VRM to a silicon chip power performance is further shown. A comparison between the conventional Redhawk chip IR drop simulation and our approach is presented. Our modelling methodology, which uses a system-level distributed PDN to increase IR drop analysis accuracy has also been described in detail. It is shown that external factors including package, board and VRM can induce up to 5.8% additional IR drop, or, 0. 058V for a 1V power supply. This may cause the targeted clock speed to be reduced by up to 250MHz in the actual silicon. It is demonstrated that the intrinsic resistance and impedance of PDN if not being managed properly could negate the power delivery efficiency and impacting silicon performance.
了解芯片电源性能如何受到电力输送网络(PDN)的IR下降的影响,可以优化系统运行条件。它允许在设计阶段早期识别和修复IR跌落对硅芯片的影响。传统上,对硅芯片的静态和动态红外降分析只考虑硅级功率开关门和金属路由的影响。这种分析方法假设从稳压模块(VRM)到硅凸起的电源是无噪声且稳定的,而不考虑系统级组件的影响[1]-[4]。在我们看来,这种分析方法过于乐观,导致IR下降信号不太可靠。本文以RISC-V CPU为例,说明了外部组件在红外下降分析中的重要性。表征结果表明,由PDN阻抗引起的100mV IR下降可导致目标时钟速度降低高达500MHz,这相当于1GHz CPU性能下降50%,并且是显著的。然后,进一步展示了封装、电路板和VRM引起的系统级IR下降对硅芯片功耗性能的影响。将传统的红鹰芯片红外跌落仿真与我们的方法进行了比较。我们的建模方法,它使用系统级分布式PDN来提高红外跌落分析的准确性也被详细描述。结果表明,包括封装、主板和VRM在内的外部因素可导致高达5.8%的额外IR下降,即0.0%。058V为1V电源。这可能会导致目标时钟速度在实际硅中降低高达250MHz。研究表明,PDN的固有电阻和阻抗如果管理不当,将会降低功率输出效率,影响硅的性能。
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引用次数: 1
Measurement of Laser Drilling Shift for Opaque Build-up Film by Infrared Microscope 用红外显微镜测量不透明堆积膜的激光钻孔位移
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966681
Chung-Yu Ke, Liang-Pin Chen
With the development of smart phones, the developing direction of Application Chip (AP) is to be thinner and lighter. FOPOP (Fan-Out Package On Package) is the mainstream packaging mode to cope with the ever-increasing layout density [1] [2]. In the mobile phone market where a hundred schools of thought contend, to cope with mobile phone APs of different brands and performances, the structure of without memory stacking has gradually become the mainstream of the FOPOP structure. The FOPOP without memory stacking, in order to complete the memory stacking of different brands and the application of mobile phones at high frequencies, there are strict requirements on the material of the connection surface. Among them, Build-up Film, due to its low dielectric constant (Dk), low dielectric loss and low coefficient of thermal expansion (CTE) at high frequencies, can solve problems such as transmission loss and package warpage [3] [4]. In order to achieve memory stacking, we used the laser drilling technology on the Build-up Film to reveal the pattern that connected to the Memory, and fill the solder into the drill hole in advance, which is convenient for the end product to stack the Memory. The shift of the laser drilling will directly affect the difficulty of stacking the Memory, which will eventually lead to the opening of the circuit. Hence, the shift of the laser drilling is one of the necessary inspection items. However, Build-up Film is a non-traditional transparent film, by laser microscope, we cannot know the position of the pattern under the Build-up Film, and cannot measure the shift. The Infrared (IR) Microscope is generally used to detect backside and side wall cracks in silicon die. The purpose of detection is achieved through the characteristics of IR long wavelengths that easily penetrate silicon. Relatively, the red light laser microscope that most commonly used in the production line cannot penetrate the Build-up Film due to the short wavelength of red light. Hence, we use long-wavelength IR to penetrate the Build-up Film, and use a correction sheet to correct the length to ensure the accuracy of the length measurement. The measurement of laser drilling shift is achieved, to ensure the quality of laser drilling. Finally, we confirmed that the error between IR Microscope measurement result and cross-section & SEM is within 2.14μm, so IR Microscope is a feasible measurement tool for laser drilling shift of Build-up Film.
随着智能手机的发展,应用芯片(AP)的发展方向是更薄、更轻。FOPOP (Fan-Out Package On Package)是应对日益增长的布局密度[1]b[2]的主流封装模式。在百家争抢的手机市场,为了应对不同品牌、不同性能的手机ap,无内存堆叠的结构逐渐成为FOPOP结构的主流。没有内存堆叠的FOPOP,为了完成不同品牌的内存堆叠和手机在高频下的应用,对连接面的材质有严格的要求。其中,积聚膜由于其在高频下具有低介电常数(Dk)、低介电损耗和低热膨胀系数(CTE),可以解决传输损耗和封装翘曲[3][4]等问题。为了实现存储器的堆叠,我们在堆积膜上使用激光钻孔技术,将连接到存储器的图案显示出来,并提前将焊料填充到钻孔中,方便最终产品堆叠存储器。激光打孔的移位会直接影响Memory的堆叠难度,最终导致电路的打开。因此,激光打孔的位移是必要的检测项目之一。然而,堆积膜是一种非传统的透明薄膜,通过激光显微镜,我们无法知道图案在堆积膜下的位置,也无法测量位移。红外显微镜通常用于检测硅模具的背面和侧壁裂纹。探测的目的是通过红外长波容易穿透硅的特性来实现的。相对而言,生产线上最常用的红光激光显微镜由于红光波长短,无法穿透堆积膜。因此,我们使用长波长的IR来穿透堆积膜,并使用校正片来校正长度,以确保长度测量的准确性。实现了激光打孔位移的测量,保证了激光打孔质量。最后,我们证实了红外显微镜测量结果与横截面和扫描电镜的误差在2.14μm以内,因此红外显微镜是激光钻削堆积膜位移的一种可行的测量工具。
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引用次数: 0
Effects of Corner/Edge Bond and Side-fill for Automotive MCM Applications 角/边粘合和边填充对汽车MCM应用的影响
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966634
Kuo-Hua Heish, Chao-Chieh Chan, Ming-Jhe Wu, Chih-Yang Weng, Yu-Da Dong, Chun-Jen Cheng
For the high reliability and harsh environment applications such as automotive grade MCM (multi-chip modules) or SiP (System in Package), normally requires under-fill to achieve the needed thermal cycles, mechanical shock and vibration reliability. And, these high reliability applications often incorporate high process cost, spending on module ilux cleaning, baking, plasma treatment even under-fill capillary time consuming. Despite of that, the extra environmental regulation compliance issues of energy saving and wastes disposal also challenge the manufacturer to consider more cost effective and environment friendly manufacturing processes with moderate reliability to meet modern automotive industrial requirements. This study focus on non-cleaning side-fill and corner / edge bond (hereafter be cited within the text as CEB) reinforcement techniques including material selection, verification, and dispensing process design to improve the solder-joint reliability of BGAs or BTC in MCM or SiP to meet the minimum automotive industrial standards (AECQ104 Failure Mechanism Based Stress Test Qualification for Multichip Modules in Automotive Applications). The reliability testing protocol used here, included pre-conditioning(3X multi-reflow) and thermal cycling ($-40^{circ}C-85^{circ}C$). Four adhesive materials (commercially available) were studied with test vehicles including wafer glass attachment and BGA packages with plans to expand the study on WLCSP BGAs. For side-fill and CEB processing, establishing side-fill adhesion and edge bond that maximizes adhesion/bond area with proper fillet height without encapsulating the solder balls is key success to prevent the process quality issues as well as to reliability improvements.
对于高可靠性和恶劣环境应用,如汽车级MCM(多芯片模块)或SiP(系统封装),通常需要下填充以实现所需的热循环,机械冲击和振动可靠性。而且,这些高可靠性应用通常包含高工艺成本,在模块ilux清洗,烘烤,等离子体处理甚至欠填充毛细管上花费时间。尽管如此,节能和废物处理等额外的环境法规合规问题也挑战制造商考虑更具成本效益和环境友好型制造工艺,并具有中等可靠性,以满足现代汽车工业的要求。本研究的重点是非清洁边填充和角/边粘合(下文称为CEB)加固技术,包括材料选择、验证和点胶工艺设计,以提高MCM或SiP中BGAs或BTC的焊点可靠性,以满足最低的汽车工业标准(AECQ104汽车应用中多芯片模块基于失效机制的应力测试资格)。这里使用的可靠性测试方案包括预处理(3X多重回流)和热循环($-40^{circ}C-85^{circ}C$)。通过测试车辆研究了四种粘结材料(市售),包括晶圆玻璃附着和BGA封装,并计划扩大WLCSP BGA的研究。对于侧填充和CEB加工,在不封装焊球的情况下,建立侧填充粘合和边缘粘合,以适当的圆角高度最大化粘合/粘合面积,是成功防止工艺质量问题以及提高可靠性的关键。
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引用次数: 0
Solar Cell Boost Converter with Adaptive PD Controller 具有自适应PD控制器的太阳能电池升压变换器
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966727
Chao-Ting Chu, Z. Lin, Shih-Ting Dai
This paper proposes solar cell boost converter with adaptive PD controller. Solar power generation systems use sunlight to generate electricity mainly. The same technology as integrated circuits that collect electric energy through solar panel to achieve boost converter. In this paper, we proposed an adaptive PD controller adjusts adaptive law real time that according to load changes and light changes. The adaptive laws used Lyaponuv function to derivation that ensure the convergence stable. Experimental results are shown output voltage stable when input voltage and load change. Therefore, the adaptive laws adjusted real time to achieve the robustness in the system.
提出了一种带有自适应PD控制器的太阳能电池升压变换器。太阳能发电系统主要利用太阳光发电。与集成电路相同的技术,通过太阳能电池板收集电能,实现升压变换器。本文提出了一种自适应PD控制器,可根据负载变化和光照变化实时调整自适应律。自适应律采用Lyaponuv函数求导,保证了收敛稳定。实验结果表明,当输入电压和负载发生变化时,输出电压稳定。因此,自适应律可以实时调整,以达到系统的鲁棒性。
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引用次数: 0
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