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Thermal Performance of Single-Phase and Two-Phase Immersion Cooling in Data Center 数据中心单相和两相浸入式冷却的热性能
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966684
Chun-Kai Liu, Tan-Yi Chang
Thermal management is a key bottleneck of technology development in data center systems. Immersion cooling eliminates the thermal interface material and packaging limitations of conventional cooling methods. Single-phase immersion liquid cooling is limited to lower heat transfer coefficients. However, two-phase immersion cooling has emerged as a potential solution to overcome thermal limitations by boiling the coolant directly from the electronic components, thereby increasing heat convection. In this paper, we study the thermal and flow characteristics of electronic components in single-phase and two-phase immersion cooling by numerical simulation. We simulated the multi-heat sources on PCB with different heating power. Dielectric fluid is used for direct liquid cooling of electronic components. The cooling performance of heat sources with single and two-phase immersion cooling are compared and studied.
热管理是数据中心系统技术发展的关键瓶颈。浸没式冷却消除了传统冷却方法对热界面材料和封装的限制。单相浸没式液体冷却仅限于较低的传热系数。然而,两相浸入式冷却已经成为一种潜在的解决方案,通过直接从电子元件中煮沸冷却剂来克服热限制,从而增加热对流。本文采用数值模拟的方法,研究了电子元件在单相和两相浸没冷却时的热特性和流动特性。在PCB上模拟了不同加热功率的多热源。介质流体用于电子元件的直接液体冷却。对单相浸没冷却和两相浸没冷却热源的冷却性能进行了比较研究。
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引用次数: 1
Low Temperature Fusion Bonding of Glass to Si Using Plasma Activation 等离子体活化玻璃与硅的低温熔接
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966706
Ya-Huei Erica Chang, Dih-Yang Andy Kuo, Jhih Wei Gwako Liang, K. Yamazaki, Jay Zhang, Hitoshi Sakoda, Norio Kamitsubo
Anodic bonding has been extensively used to permanently bond glass to silicon (Si) wafer for MEMS (microelectromechanical systems)-based sensor applications. This approach involves the alkali ion migration (such as Li, Na, and K) under high-temperature, high pressure, and high voltage. Moreover, similar coefficients of thermal expansion (CTE) are required to bond these two heterogeneous substrates over a wide range of temperatures. However, some active or passive devices in MEMS are temperature sensitive and those alkali ions from glass could exhibit undesirable side effects to degrade the device performance when subjected to moisture and heat. The low-temperature direct bonding processes for an alkali-free glass wafer to another Si wafer hence has been studied recently.
阳极键合已广泛应用于基于MEMS(微机电系统)传感器的玻璃与硅(Si)晶圆的永久键合。该方法涉及碱离子(如Li、Na、K)在高温、高压、高压下的迁移。此外,需要相似的热膨胀系数(CTE)来结合这两种非均质衬底在很宽的温度范围内。然而,MEMS中的一些有源或无源器件对温度敏感,玻璃中的碱离子在受潮和受热时可能会表现出不良的副作用,从而降低器件性能。因此,对无碱玻璃晶片与硅晶片的低温直接键合工艺进行了研究。
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引用次数: 0
Copper Surface Roughness Analysis in Mathematical Morphology Algorithm for the Insertion-Loss Validation 铜表面粗糙度分析的数学形态学算法插入损耗验证
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966669
Li-Chi Chang, Yu-Sen Yang, Yu-Tian Lee, Shao-Wei Hsu, Chieh-Sen Lee, Ming-Chuan Chang
Insertion loss of a testing vehicle is widely referred for the material estimation, the differential pair and single-end striplines are generally employed for the high-speed digital applications. In addition to the matte side, the shiny side with the surface treatment of the inner layer is the critical issue for the insertion-loss improvement. In general, the inner-layer roughness is determined by the cross-section scanning electron or optical microscope photo with the manual defining of the average line. Therefore, the tolerance is produced from personal operation or gage repeatability and reproducibility (Gage R and R). In this study, a mathematical morphology algorithm is proposed for automatically detecting the roughness of the striplines. Basing on the algorithm and operating flow, the detected Rz and Rq values of the copper-foil roughness are applied in 3D simulation tool for the insertion-loss validation and comparison.
测试车辆的插入损耗被广泛用于材料估计,差分对和单端带状线通常用于高速数字应用。除哑光面外,对有光泽面进行内层表面处理是改善插入损耗的关键问题。一般来说,内层粗糙度是通过扫描电子或光学显微镜照片的横截面来确定的,并手动确定平均线。因此,公差是由个人操作或量具的重复性和再现性(量具R和R)产生的。在本研究中,提出了一种数学形态学算法来自动检测带状线的粗糙度。根据算法和操作流程,将检测到的铜箔粗糙度Rz和Rq值应用到三维仿真工具中进行插损验证和比较。
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引用次数: 0
Research on the Thermal Cycle Test Performance Improving in Automotive R-F PCB 提高汽车R-F PCB热循环测试性能的研究
Pub Date : 2022-10-26 DOI: 10.1109/impact56280.2022.9966639
Chen-xi Xie, Jie-Guo, Mei-Juan Kuang
With the invention and development of PCB and FPC, Rigidflexible (referred as R-F in the following text) board was designed and realized naturally by engineers. We combine flex and rigid materials by laminating with certain stack-up, these materials contain FCCL, CVL, LF PP, CCL and so on. Due to the great difference of CTE (coefficient of thermal expansion) between these materials, the defect of hole copper crack happens frequently during thermal cycle test (as known as TCT) for R-F board. Normally rigid PCB can survive after more than 1000 cycles of TCT test with condition of - 40°/30min to 125°/30min, however the R-F board will fail within 600 ~ 700 cycles. After a change of resistance more than 10% detected, engineers will find out the crack of copper mainly in the contact surface of LF PP and PI layer of FCCL, which is resulted from the obvious difference between CTE of LF PP and PI. This paper mainly starts from three factors, different kinds of PP with different CTE, through hole copper thickness and copper elongation, to research how these factors affect the life of R-F board enduring TCT with DOE method. Through this paper, we hope to give some suggestions to engineers who wants to enhance the cycles of TCT test of R-F board in PCB industry.
随着PCB和FPC的发明和发展,Rigidflexible(下文简称R-F)板自然被工程师们设计和实现。我们通过一定的层叠将柔性和刚性材料组合在一起,这些材料包括FCCL, CVL, LF PP, CCL等。由于两种材料的热膨胀系数(CTE)差异较大,R-F板在热循环试验(TCT)中经常出现孔铜裂纹缺陷。通常,刚性PCB在- 40°/30min至125°/30min的条件下进行1000多次TCT测试后可以存活,但R-F板在600 ~ 700次循环内就会失效。在检测到电阻变化超过10%后,工程师会发现铜的裂纹主要出现在FCCL的LF PP和PI层的接触面,这是由于LF PP的CTE和PI的CTE存在明显差异造成的。本文主要从不同CTE的不同PP、通孔铜厚度和铜伸长率三个因素入手,用DOE法研究了这些因素对耐久TCT的R-F板寿命的影响。通过本文的研究,我们希望对PCB行业中希望提高R-F板TCT测试周期的工程师们提供一些建议。
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引用次数: 1
Firewall Design for High Quality Electroplating Redistribution Layers on 600mm Panel 600mm高质量电镀再分配层的防火墙设计
Pub Date : 2022-10-26 DOI: 10.1109/impact56280.2022.9966726
Boyin Wu, M. Kuo, Y. Chiang, Jeffrey Yang, Jen-Kuang Fang
The quality of redistribution layer (RDL) dominates the electrical performance of semiconductor package. Theoretically, the RDL thickness uniformity control becomes more challenge as increasing the substrate size, especially on the 600mm panel platform. In this study, the dummy pattern around and across the panel, called as firewall, have been used to influence the electrical distribution, to overcome the electroplating copper thickness uniformity problem around the blank area, which is used to develop the high-quality fan-out panel level packaging (FOPLP). The experiment results show the RDL thickness non-uniformity can be improved by 21% and 30% by tuning the area and the metal density of firewall, respectively. This firewall tuning technology is useful to diminish the RDL thickness difference among all dies within the panel, which can be adopted in any high-performance large size panel level packaging.
重分布层(RDL)的质量决定着半导体封装的电气性能。从理论上讲,随着基板尺寸的增加,特别是在600mm面板平台上,RDL厚度均匀性控制变得更加困难。在本研究中,利用面板周围和面板上的虚拟图案(称为防火墙)来影响电气分布,以克服空白区周围电镀铜厚度均匀性问题,从而开发出高质量的扇形面板级封装(FOPLP)。实验结果表明,调整防火墙面积和金属密度可使RDL厚度不均匀性分别提高21%和30%。这种防火墙调优技术有助于减小面板内所有模具之间的RDL厚度差异,可用于任何高性能大尺寸面板级封装。
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引用次数: 0
Effect of Package Singulation Parameters on Dual Flat Non-leaded Package Delamination 封装仿真参数对双平面无铅封装分层的影响
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966629
Siying Wu, Shwu Miin Tan, J. Xue, Cheong Huat Ng, Zhigang Li
With the evolution of electronic and automotive field, the reliability requirement of package is getting stringent. The package is required to withstand the extreme conditions while maintaining good electrical performance. Interfacial delamination is one of the key factors that impacts the reliability of electronic package. When the delamination occurs between lead frame (LF) and epoxy molding compound (EMC), the moisture will ingress into the package and cause bond pad or wedge corrosion, which leads to electrical failure.To verify the robustness of Dual Flat Non-leaded (DFN) package, the effects of package singulation parameters on package delamination performance were investigated in this study, dicing blade types, saw method, spindle speed, feed speed, and cooling water flow rate. As the result shown, the blade with small grit size had better cutting quality and induced less stress than large grit size blade. Reducing the cutting stress was beneficial to improve the delamination performance. And the cutting methods also influenced on delamination performance. The chopper cut and normal cut method were used in the same type of package to compare the delamination performance. The results of C-SAM shown the normal cut had better delamination performance than chopper cut. In addition, the delamination performance deteriorated with increasing spindle speed, which was related to the adverse impact of blade at high spindle speed and heat generation of friction. And the feed rate also had a small effect on delamination. Besides, hundred-degree celsius temperature of heat will be generated during blade cutting, which will reduce the adhesion strength and cause the expand and contract of EMC and LF. Therefore, cooling the blade with high cooling water rate could help in delamination.In summary, the effect of package singulation on delamination defects was investigated in this paper. The delamination performance could be optimized by selecting suitable EMC, LF surface treatment & design, dicing blade, cutting method and singulation parameters.
随着电子和汽车领域的发展,对封装的可靠性要求越来越高。该包装要求能够承受极端条件,同时保持良好的电气性能。界面分层是影响电子封装可靠性的关键因素之一。当引线框架(LF)和环氧成型化合物(EMC)之间发生分层时,湿气将进入封装并导致键垫或楔腐蚀,从而导致电气故障。为了验证双平面无铅(DFN)封装的稳健性,本研究考察了封装仿真参数、切割刀片类型、锯切方式、主轴转速、进给速度和冷却水流量对封装分层性能的影响。结果表明,与大粒度叶片相比,小粒度叶片具有更好的切削质量和更小的应力。减小切削应力有利于提高分层性能。切削方式对分层性能也有影响。采用斩波切割法和普通切割法对同一类型封装进行分层性能比较。C-SAM结果表明,正常切割比斩波切割具有更好的分层性能。此外,分层性能随主轴转速的增加而恶化,这与主轴转速高时叶片的不利影响和摩擦产生热量有关。进料速率对分层的影响较小。此外,刀片切割过程中会产生摄氏百度的高温,会降低粘接强度,造成EMC和LF的膨胀和收缩。因此,采用高冷却水率冷却叶片有利于分层。综上所述,本文研究了封装模拟对分层缺陷的影响。选择合适的电磁兼容、LF表面处理与设计、切片刀片、切割方式和仿真参数可以优化其分层性能。
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引用次数: 0
Edgebond adhesive enhances the reliability of low-temperature solder in board-level assembly (IMPACT 2022) Edgebond粘合剂提高了板级组装中低温焊料的可靠性(IMPACT 2022)
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966643
S. Chang, Tae-Kyu Lee, Wei Li, K. Loh, E. Ibe, Simon Wang
Low melting temperature solder, which enables a lower temperature assembly process comes with significant benefits for less warpage and lower component defect risk, but at a cost of a potentially inferior thermal cycling performance due to higher creep rate at an elevated temperature environment.The creep rate can be reduced by dispensing underfill between BGA and PCB to lower thermal stress concentrated on the corner. Thus, the thermal cycling performance would be improved. However, this would increase difficulty when replacing the BGA. For this reason, applying edgebond on the peripheral of the BGA in the assembly process makes it easier to operate on during the rework process. Additionally, it will reduce material consumption dramatically for big BGAs.In this study, we evaluate the reliability of low-temperature solders, Sn-58Bi, used in the BGA, 12mm*12mm, assembly without edgebond and with edgebond. Comparing the characteristic life cycle number of 3328 cycles with Sn-58Bi solder, the full edgebond BGAs’ does not show any failures up to the test completion at 4050 cycles.To extend edgebond applications for the strong need for extra-large BGA in today’s electronics industry, we use simulation methods to compare the thermal stress of the solder joints when BGA size increases from 12mm by 12mm to 70mm by 70mm, and up to 100*100mm. These include the BGA assembly without edgebond and with edgebond. As thermal stress increases, the thermal cycle reliability shortens. From simulated thermal stress results, we can predict the edgebond’s significant benefit for the thermal cycling reliability of extra-large BGA on the board level assembly.
低熔点焊料可以实现更低温度的组装工艺,具有更少翘曲和更低组件缺陷风险的显着优势,但其代价是在高温环境下由于较高的蠕变率而导致潜在的较差的热循环性能。通过在BGA和PCB之间添加下填料,可以降低集中在边角的热应力,从而降低蠕变速率。从而提高热循环性能。然而,这将增加更换BGA的难度。因此,在装配过程中对BGA外设应用边键可以使其在返工过程中更容易操作。此外,它将大大减少大型BGAs的材料消耗。在这项研究中,我们评估了低温焊料Sn-58Bi用于BGA, 12mm*12mm,无边键和带边键组装的可靠性。与Sn-58Bi焊料的3328个周期的特征生命周期数进行比较,在4050个周期的测试完成时,全边缘键合BGAs没有显示任何故障。为了扩展边缘键合应用,以满足当今电子行业对超大BGA的强烈需求,我们使用模拟方法来比较当BGA尺寸从12mm × 12mm增加到70mm × 70mm以及增加到100 × 100mm时焊点的热应力。这些包括不带边键和带边键的BGA组件。随着热应力的增大,热循环可靠性变短。从模拟的热应力结果中,我们可以预测边键对板级组件上超大BGA的热循环可靠性有显著的好处。
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引用次数: 0
Adhesion and Reliability Study of Different EMC and Pre-plated Leadframe Surface Combination for Au and Cu Wire Bonded Leadless Package 金、铜线键合无铅封装不同电磁兼容及预镀引线框架表面组合的附着性及可靠性研究
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966695
April Joy H. Garete, Shwu Miin Tan, Weimei Cai, Zhiwen Li
In this study, different molding compounds and pre-plated leadframe surface combinations were characterized in terms of adhesion and its impact on package delamination. Furthermore, Au and Cu wire bonded devices assembled using different EMC and leadframe surface treatment combinations were also assessed to evaluate the quality and reliability performance of these BOM as packaging materials for a DFN package. Key features of the different molding compound materials investigated in this study includes advanced formulation for improved delamination resistance, better fluidity, and copper wire compatibility. Full material characterization was conducted to compare the physical and thermo-mechanical properties of the EMCs. Button shear test on standard and rough pre-plated lead frame surfaces and tab pull test on PPF, Au and Cu substrates were performed to compare the interfacial adhesion performance and typical shear failure modes of various molding compounds. Adhesion data was further supported by subjecting the assembled of DFN package with different BOM combination to Moisture Sensitivity Level 1 (MSLI). Scanning Acoustic Microscopy (SAM) was then used to check the delamination performance on all mold interfaces at zero hour and after MSLI. The delamination level difference between samples built with different EMC types and pre-plated leadframe combinations were summarized in this study. A 23um diameter Au-wire and Cu-wire bonded transistor was used as test vehicle to evaluate the material reliability performance on package level. Moldability check was done to inspect any external voids, incomplete fill, or wire sweep occurrence for all BOM combinations. Reliability performance was assessed by subjecting the assembled units to 1000 cycles Temperature Cycling Test (TCT), 96 hours Highly Accelerated Stress Test (HAST), and 1000 hours High Temperature Reverse Bias (HTRB) at a junction temperature of 150°C. Overall, the material study was able to successfully assess the adhesion, moldability, delamination and reliability performance of different molding compounds and pre-plated leadframe combinations on Au-wire and Cu-wire bonded DFN package.
在这项研究中,不同的成型化合物和预镀引线框架表面组合在附着力及其对封装分层的影响方面进行了表征。此外,还对采用不同EMC和引线框架表面处理组合组装的Au和Cu线键合器件进行了评估,以评估这些BOM作为DFN封装材料的质量和可靠性性能。本研究中研究的不同成型复合材料的主要特点包括先进的配方,可改善分层阻力,更好的流动性和铜线兼容性。进行了全面的材料表征,比较了EMCs的物理和热机械性能。通过对标准和粗糙预镀引线框架表面进行按钮剪切试验,以及对PPF、Au和Cu基底进行标签拉拔试验,比较不同成型化合物的界面粘附性能和典型剪切破坏模式。通过对不同BOM组合的DFN封装进行1级湿气敏感性(MSLI)测试,进一步支持附着力数据。然后使用扫描声学显微镜(SAM)检查在零小时和MSLI后所有模具界面上的分层性能。本研究总结了不同电磁兼容类型和预镀引线框架组合构建样品的分层水平差异。以直径23um的金铜键合晶体管为试验载体,在封装级上对材料可靠性性能进行了评价。可塑性检查是为了检查所有BOM组合的任何外部空洞、不完整填充或钢丝扫线现象。通过在结温为150°C的条件下进行1000次温度循环测试(TCT)、96小时高加速应力测试(HAST)和1000小时高温反向偏置(HTRB),评估了组装单元的可靠性性能。总体而言,材料研究能够成功评估不同成型化合物和预镀引线框架组合在金线和铜线粘合DFN封装上的粘附性、可塑性、分层和可靠性性能。
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引用次数: 0
Predict the Reliability Life of Wafer Level Packaging using K-Nearest Neighbors algorithm with Cluster Analysis 基于聚类分析的k近邻算法预测晶圆级封装的可靠性寿命
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966711
H. L. Chen, B. Chen, K. Chiang
Moore’s law was proposed by Gordon Earle Moore, who believes that the number of transistors that can be accommodated on an integrated circuit would double about every 18 months. Since it is approaching the physical limit, Moore’s law is no longer applicable. Packaging technology becomes more important in the post Moore era. The development of electronic packaging can be roughly divided into five stages, namely TO-CAN, DIP (Dual In-line Package), PQFP (Plastic Quad Flat Pack), PBGA (Plastic Ball Grid Array) and the CSP (Chip Scale Package) used in this research. The evolutions are to improve signal transmission speed, storage capacity and the pursuit of higher packaging density. The reliability of packages is very important. Different sizes or manufacturing methods will affect their lifetime. Before these packages are put on the market, they must be tested and experimented to ensure their reliability. However, it will waste a lot of resources and time costs, resulting in less profit.Finite element analysis is a numerical method that can subdivide a large physical system into a finite number of smaller and simpler elements. The study uses ANSYS to simulate WLCSP (Wafer Level Chip Scale Packaging) through thermal cycling test, and used empirical formulas to estimate the lifetime of solder balls. Also, the mesh size at the maximum DNP (Distance from Neutral Point) is fixed. Make the simulation closer to the experiment results. After the verification of simulation and experimental data, the feasibility of the model is established, thereby saving the huge time cost of packaging testing and experimentation.However, finite element analysis will produce different results depending on the researcher. In order to avoid this factor and save the time spent in constructing the model, this research introduces artificial intelligence and combines supervised learning and unsupervised learning to estimate the solder ball lifetime. In this study, we used the verified finite element model to obtain different lifetime according to different sizes, and then introduced a large amount of data into AI algorithms [1] to achieve the purpose of quickly predicting the reliability of the package.The algorithm used in this study is KNN (K-Nearest Neighbors) which can be used for classification and regression, and uses different data numbers, different preprocessing methods, different distance definitions, and different weighting methods to compare the impact of the algorithm’s predictions on the lifetime of our packages. In addition, we combine unsupervised learning methods like K-means to assign data of the same characteristic into each cluster. Try to simplify the complexity of the model, save calculation time and improve the performance of KNN.
摩尔定律是由戈登·厄尔·摩尔提出的,他认为集成电路上可以容纳的晶体管数量大约每18个月翻一番。由于它正在接近物理极限,摩尔定律不再适用。封装技术在后摩尔时代变得更加重要。电子封装的发展大致可以分为五个阶段,分别是TO-CAN、DIP (Dual in -line Package)、PQFP (Plastic Quad Flat Pack)、PBGA (Plastic Ball Grid Array)和CSP (Chip Scale Package)。这些发展是为了提高信号传输速度、存储容量和追求更高的封装密度。包装的可靠性非常重要。不同的尺寸或制造方法会影响它们的使用寿命。在这些包装投放市场之前,必须对其进行测试和试验,以确保其可靠性。但是,它会浪费大量的资源和时间成本,导致利润减少。有限元分析是一种数值方法,它可以将一个大的物理系统细分为有限数量的更小、更简单的单元。本研究利用ANSYS对WLCSP (Wafer Level Chip Scale Packaging,晶圆级芯片规模封装)进行热循环模拟,并运用经验公式估算焊球寿命。同时,最大DNP(到中性点的距离)处的网格尺寸是固定的。使仿真结果更接近实验结果。经过仿真和实验数据的验证,建立了模型的可行性,从而节省了包装测试和实验的巨大时间成本。然而,有限元分析将产生不同的结果取决于研究者。为了避免这一因素,节省构建模型所花费的时间,本研究引入人工智能,结合监督学习和无监督学习对焊锡球寿命进行估计。在本研究中,我们使用经过验证的有限元模型,根据不同的尺寸获得不同的寿命,然后将大量数据引入AI算法[1],以达到快速预测封装可靠性的目的。本研究使用的算法是KNN (K-Nearest Neighbors),可用于分类和回归,并使用不同的数据数量、不同的预处理方法、不同的距离定义和不同的加权方法来比较算法预测对我们的包的寿命的影响。此外,我们结合了K-means等无监督学习方法,将具有相同特征的数据分配到每个聚类中。尽量简化模型的复杂性,节省计算时间,提高KNN的性能。
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引用次数: 0
Cyber-Physical System of laser micro processing for semiconductor package fabrication 半导体封装激光微加工的信息物理系统
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966708
Y. Kobayashi, H. Tamaru, K. Sakaue, H. Sakurai, Kohei Shimahara, Tsubasa Endo, S. Tani
The process rule of a semiconductor is getting smaller and smaller. Accordingly, the size of a via hole or line and space in a package is also becoming smaller. In addition, yearly evolving materials are being tested as substrate materials for the next-generation higher-frequency circuit boards or buildup substrates. The laser micro-hole drilling is a key technology for realizing these demands, and development of lasers with higher output power and shorter wavelengths is being vigorously conducted in order to drill smaller holes at higher speeds. On the other hand, significant challenges exist for drilling small holes in newly emerging materials. Depending on the parameters, drilling can damage the copper film behind the hole or chip the material due to its own brittleness. Therefore, it is necessary to optimize various processing parameters such as laser pulse width, pulse energy, repetition frequency, irradiation time, wavelength, and beam trajectory according to the required design, including hole diameter, aspect ratio, and pitch. Currently, parameter optimization is being done manually in a trial- and-error manner, which could take several months or even years for new materials or designs. The time required for feasibility testing can slow down the design process, and also forces material manufacturers to spend a great deal of time examining what kind of material composition will actually be used.
半导体的制程规则越来越小。因此,封装中的通孔或线的尺寸和空间也变得越来越小。此外,每年发展的材料正在测试作为下一代高频电路板或累积基板的基板材料。激光微孔钻削是实现这些需求的关键技术,为了以更高的速度钻削更小的孔,人们正在大力开发输出功率更高、波长更短的激光器。另一方面,在新兴材料上钻小孔存在着重大挑战。根据参数的不同,钻孔可能会损坏孔后的铜膜或由于其自身的脆性而使材料切屑。因此,有必要根据需要的设计优化激光脉冲宽度、脉冲能量、重复频率、照射时间、波长、光束轨迹等各种加工参数,包括孔径、纵横比、节距等。目前,参数优化是通过人工试错的方式完成的,对于新材料或新设计,这可能需要几个月甚至几年的时间。可行性测试所需的时间会拖慢设计过程,也会迫使材料制造商花费大量时间检查实际使用的材料成分。
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