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Multi-Chiplet Placement Design for 3D Integration 3D集成的多芯片放置设计
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966719
Mak Hoi Chau, Chung-Long Pan, Yu-Jung Huang
The main development trend of modern microelectronics is to continuously reduce product mass and dimension, and also increase their performance and reliability. The wide application of multichiplet architecture in high-performance computing clusters has aroused great interest. The multi-chiplet placement can influence the signal transmission behavior in a 3D integration architecture. Interchip communication has remained a major design factor due to the diverse traffic requirements in heterogeneous multi-chiplet systems. In general, to exploit the capabilities of a multi-chiplet architecture without I/O bottlenecks, dense vertical connections in stacked chips become of increasing importance in modern semiconductor technology. Consider a heterogeneous or homogeneous multi-chiplet architecture with a dense vertical connection system that gains a performance per energy benefit from fast state migration between these chiplets. In this paper, we study the effects of signal transmission on different chiplet placement designs, in which wirelessly connected multi-chiplets modules are proposed. The inter-chip wireless heterogeneous or homogeneous multi-chiplet architecture is modeled using a high-frequency structure simulator, in particular, the placement effect of the side differential vertical signal transmission is analyzed.
现代微电子技术的主要发展趋势是不断减小产品的质量和尺寸,同时提高产品的性能和可靠性。多芯片架构在高性能计算集群中的广泛应用引起了人们的极大兴趣。在三维集成体系结构中,多芯片的放置会影响信号的传输行为。由于异构多芯片系统中不同的流量需求,芯片间通信仍然是一个主要的设计因素。一般来说,为了利用无I/O瓶颈的多芯片架构的能力,堆叠芯片中的密集垂直连接在现代半导体技术中变得越来越重要。考虑一个具有密集垂直连接系统的异构或同构多晶片架构,通过这些晶片之间的快速状态迁移获得每能量的性能优势。在本文中,我们研究了信号传输对不同芯片放置设计的影响,其中提出了无线连接的多芯片模块。利用高频结构模拟器对芯片间无线异构或均匀多芯片架构进行了建模,重点分析了侧面差分垂直信号传输的放置效果。
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引用次数: 0
Wire Boning Process Failure Risk Estimation of the Cu/low-k Structure using the Transient Finite Element 基于瞬态有限元的Cu/低k结构焊丝过程失效风险评估
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966720
J.Y. Wang, Cadmus C.A. Yuan, K. Chiang
This research establishes a set of transient finite element models to represent the mechanical impacts during the w/b process [1]. Moreover, a finite element model of the BEOL structure, which consisted of 7 layers of copper metal stacks and an aluminum pad to represent the current frequent-used technology, is established to investigate the stress pattern. The results show that both the Cu/low-k design and the w/b process parameters, including the free-air ball (FAB) size and w/b capillary, influence the maximum stress of the Cu/low-k structure. It is suggested that the w/b process of Cu/low-k structure should be precisely controlled, compared to the conventional w/b process of the Al/SiO4 structure, to maintain the low stress level of the Cu/low-k structure.
本研究建立了一套瞬态有限元模型来表示w/b过程中的力学冲击[1]。此外,建立了BEOL结构的有限元模型,研究了BEOL结构的应力分布规律,BEOL结构由7层铜金属堆和代表当前常用技术的铝衬垫组成。结果表明,Cu/低k设计和w/b工艺参数,包括自由空气球(FAB)尺寸和w/b毛细,都影响Cu/低k结构的最大应力。与Al/SiO4结构的常规w/b过程相比,Cu/low-k结构的w/b过程应得到精确控制,以保持Cu/low-k结构的低应力水平。
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引用次数: 0
The numerical study of mechanical improvement of the metal annealing process during the manufacturing of the IC backend Damascene structure. IC后端大马士革结构制造过程中金属退火工艺力学改进的数值研究。
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966686
P. Y. Sun, Yuan Cadmus C.A., K. Chiang
This research establishes a set of transient finite element models to represent the mechanical impacts during the w/b process. Moreover, a finite element model of the BEOL structure, which consisted of 7 layers of copper metal stacks and an aluminum pad to represent the current frequent-used technology, is established to investigate the stress pattern. The results show that the Cu/low-k system produces larger stress levels in the column structure and induces a larger amount of deformation than the Al/TEOS system, and different annealing temperatures can affect the deformation behavior of the Cu stack.
本研究建立了一套瞬态有限元模型来表征水/水过程中的力学影响。此外,建立了BEOL结构的有限元模型,研究了BEOL结构的应力分布规律,BEOL结构由7层铜金属堆和代表当前常用技术的铝衬垫组成。结果表明:Cu/低k体系比Al/TEOS体系在柱状结构中产生更大的应力水平和更大的变形,不同的退火温度会影响Cu堆叠的变形行为;
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引用次数: 0
INTELLIGENT EXPLOSION-PROOF GAS MONITORING AND EARLY WARNING SYSTEM WITH SEMICONDUCTOR PLANT As DISASTER PRVENTION TARGET 以半导体工厂为防灾目标的智能防爆气体监测预警系统
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966677
Fu-Hsiang Chang, Kuo-Chi Chang, Hsiao-Chuan Wang
The semiconductor factory itself has a large amount of flammable and explosive gases, chemicals, etc., which have great harm to the safety of production equipment and personal safety. When the abnormal system fails, it may lead to inevitable gas leakage risks. In the past, many fire and explosion accidents and toxic gases happened in Taiwan. The leakage has seriously affected the operation of Taiwan's semiconductor supply chain. Especially now that Taiwan has become the world's leading semiconductor manufacturing center, it is particularly important. Therefore, the importance of monitoring and early warning of flammable and explosive dangerous gases is extremely important. Now that the era of Industry 4.0 has arrived, the intelligent production of semiconductor companies is undoubtedly an inevitable trend. Only by realizing the intelligence of explosion-proof gas monitoring and early warning can meet and adapt to the production needs of the era of Industry 4.0. ESP32 is a family of low-cost, low-power single-chip microcontrollers that integrate Wi-Fi and dual-mode Bluetooth. It uses the Tensilica Xtensa LX6 microprocessor and includes dual-core and single-core variants with built-in antenna switches, RF converters, power amplifiers, low noise receiver amplifiers, f2ilters and power management modules. This research takes ESP3 as the core, and the system is designed according to the scene of the semiconductor factory. This intelligent explosion-proof gas monitoring and early warning system includes: sensing and detection system; data communication system; data processing system; comprehensive systems such as early warning, semiconductor factory engineers can real-time monitoring of dangerous gases, according to the intuitive results such as data and status generated by the system, and the trend of gas status changes can be obtained by analyzing the data and status information stored in the database, and the potential threats of safety hazards can be stifled in the cradle as soon as possible. So as to ensure the safety, continuity, and efficiency of the real-time wafer production process.
半导体工厂本身存在大量易燃易爆气体、化学品等,对生产设备的安全及人身安全危害极大。当系统出现异常故障时,可能导致不可避免的气体泄漏风险。过去,台湾发生过许多火灾、爆炸和有毒气体事故。此次泄漏严重影响了台湾半导体供应链的运作。特别是现在台湾已经成为世界领先的半导体制造中心,这一点尤为重要。因此,对易燃易爆危险气体进行监测预警的重要性是极其重要的。如今工业4.0时代已经到来,半导体企业的智能化生产无疑是必然趋势。只有实现防爆气体监控预警的智能化,才能满足和适应工业4.0时代的生产需求。ESP32是一款低成本、低功耗的单芯片微控制器,集成了Wi-Fi和双模蓝牙。它使用Tensilica Xtensa LX6微处理器,包括双核和单核变体,内置天线开关、RF转换器、功率放大器、低噪声接收器放大器、f2滤波器和电源管理模块。本研究以ESP3为核心,根据半导体工厂的场景进行系统设计。本智能防爆气体监控预警系统包括:传感检测系统;数据通信系统;数据处理系统;综合预警等系统,半导体工厂工程师可以实时监控危险气体,根据系统产生的数据和状态等直观结果,通过分析数据库中存储的数据和状态信息,获得气体状态变化的趋势,尽快将安全隐患的潜在威胁扼杀在摇篮中。从而保证实时晶圆生产过程的安全性、连续性和高效性。
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引用次数: 0
The Study of the Influence on Heat Dissipation Effectiveness of the Pin-Fin Angle and Spacing in a Liquid Cooling Module 液冷模块中引脚角和间距对散热效果影响的研究
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966696
Yung-Sheng Kuo, Bud Tseng, Nhlakanipho Sikhondze
This research discusses the thermal influence of the pin-fin angle and spacing of a liquid cooling module, and uses CFD simulation software for validation. When the pin-fin angle was increased, the junction temperature became higher. Although the junction temperature rose slowly, it was still above the maximum operating junction temperature of an IGBT module. Furthermore, when the pin-fin spacing was increased from 1mm to 8mm, the junction temperature rose at a faster rate. Therefore, the results from this study suggest that the pin-fin angle should be, or close to, 0° (perpendicular to fluid flow direction) and the spacing between pin-fins should be as small as possible when designing liquid cooling thermal dissipation module.
研究了某型液冷模块的翅片角度和间距对散热的影响,并利用CFD仿真软件进行了验证。随着引脚角的增大,结温升高。虽然结温上升缓慢,但仍高于IGBT模块的最高工作结温。此外,当引脚间距从1mm增加到8mm时,结温上升速度更快。因此,本研究结果表明,在设计液冷散热模块时,钉片角度应等于或接近0°(垂直于流体流动方向),且钉片间距应尽可能小。
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引用次数: 0
A Study of JEDEC Board-Level Drop Test Performance Prediction Trend of BGA Package with SAC1205 Under Different Key Factors 不同关键因素下SAC1205 BGA封装JEDEC板级跌落测试性能预测趋势研究
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966688
Chih-Min Cheng, Hsi-Wei Chao, Chu-Chiao Yen, Kun-Ting Chiang, Wei-Yao Chang, Chia-Wen Chang, Ya-Ping Chen, Hsien-Wei Ho, Chun-Yu Ko, Chun-Liang Kuo
With the rapid development of technology, the number and demand for handheld devices are increasing, and the new technology product development and launch are getting faster and faster. Also, handheld devices need to withstand various movements, fall-down situations, and even regular use in different temperature environments. Therefore, solder joint reliability is decidedly crucial for handheld devices. Moreover, how to seize the critical factors during the design development phase and fulfill market demands are also significant. According to the definition of JESD22-B111 [1], the drop test requires that the board should be horizontal with the package facing in the downward direction (-Z) during the experiment. Therefore, under the influence of the acceleration of gravity, the weight of the ball grid array(BGA) package, the number of balls, solder ball material, and the solder ball pad size in the drop test are recognized as important factors affecting the board-level reliability of the drop test. This study will explore these key factors and how they affect the board-level reliability of the drop test.
随着科技的飞速发展,手持设备的数量和需求不断增加,新技术产品的开发和推出也越来越快。此外,手持设备需要承受各种移动、跌落情况,甚至在不同温度环境下的常规使用。因此,焊点的可靠性对手持设备来说至关重要。此外,如何在设计开发阶段抓住关键因素,满足市场需求也很重要。根据JESD22-B111[1]的定义,跌落试验要求试验时板与封装面朝下(-Z)方向水平。因此,在重力加速度的影响下,球栅阵列(BGA)封装的重量、球数、焊球材料、焊球垫尺寸等被认为是影响跌落试验板级可靠性的重要因素。本研究将探讨这些关键因素,以及它们如何影响板级跌落试验的信度。
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引用次数: 0
RDL Copper Plating Process for Panel Level Packaging Application 面板级封装用RDL镀铜工艺
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966645
Maddux Sy, Sean Fleuriel, Confesol Rodriguez, Kesheng Feng, Robert Moon, Dolores Cruz, J. Hander
Advanced packaging suppliers are having two primary challenges during IC substrate fabrication, meeting the requirements on copper plating performance and reducing the cost from manufacturing process. The requirements on plating performance include high resolution and strict height uniformity within a die (WID) and within a panel (WIP), consistent deposit grain structure, and robust physical properties to meet reliability requirements. The plated features include fine lines, trenches, and vias, whose top shape and coplanarity are critical to the product quality. A non-planar surface could result in signal transmission loss and introduce weak points in the connections. Therefore, copper plating solutions providing uniform, planar structures, without any special post treatment are highly desirable features from RDL plating processes. The copper plating solution can also reduce cost by plating two or three types of features in a single electrolyte, this flexibility allows fabricators to save on space and equipmentIn this paper, an electroplating package, Systek UVF 200, is introduced to plate RDL under different current densities in vertical continuous platers (VCP) and a high-speed panel plater. The plating uniformity was evaluated on a panel level in a high-speed plater, AMSPT NEXX P500.The Systek UVF 200 package offered excellent coplanarity within a pattern unit or die for RDL plating. The variation in the plated height (or thickness) between fine lines (as low as 9 μm in width) and pads, was below 2.0 μm when using a current density below 5.0 ASD to obtain the plated copper thickness around 12 μm. For 14 μm wide lines, the plated copper thickness variation can be below 1.2 μm. The variation of plated thickness across 510 mm x 515 mm panels was below 5%. The tops of the fine lines have defined, slightly domed shapes, these types of profiles have excellent conductivity.Physical properties of the plated copper deposit are essential for the reliability of the finished product. A few key physical properties are tensile strength, elongation %, and internal stress. These properties show the tolerance of the deposit to withstand thermal stress and warpage. The additives (wetter, brightener, and leveler) strongly influence the physical properties of the deposit. Copper deposited with the Systek UVF 200 package has tensile strength above 40,000 psi, elongation % above 18%, and internal stress below 1.0 Kg/mm2. The physical properties of the deposited copper did not change under different current density, showing that the package has stable performance.
先进封装供应商在IC基板制造过程中面临着两个主要挑战,即满足镀铜性能的要求和降低制造过程中的成本。对电镀性能的要求包括高分辨率和严格的模具内(WID)和面板内(WIP)高度均匀性,一致的沉积颗粒结构,以及满足可靠性要求的坚固的物理性能。镀的特征包括细线,沟槽和通孔,其顶部形状和共平面度对产品质量至关重要。非平面表面可能导致信号传输损失,并在连接中引入弱点。因此,提供均匀的平面结构的镀铜溶液,无需任何特殊的后处理,是RDL镀工艺非常理想的特征。镀铜解决方案还可以通过在单一电解质中镀两种或三种类型的特征来降低成本,这种灵活性使制造商节省了空间和设备。在本文中,介绍了一种电镀封装系统UVF 200,用于在垂直连续镀板(VCP)和高速面板镀板中在不同电流密度下镀RDL。在高速镀板AMSPT NEXX P500的面板水平上评估镀层均匀性。systemk UVF 200封装在RDL电镀的图案单元或模具内提供了出色的共平面性。当电流密度低于5.0 ASD,镀铜厚度约为12 μm时,细线(低至9 μm)与焊盘之间的镀高(或厚度)变化小于2.0 μm。对于14 μm宽的线,镀铜厚度变化可小于1.2 μm。在510毫米x 515毫米面板上镀厚度的变化小于5%。细线的顶部有明确的,略带圆顶的形状,这些类型的型材具有优异的导电性。镀铜镀层的物理性能对成品的可靠性至关重要。一些关键的物理性能是抗拉强度、伸长率和内应力。这些特性显示了沉积层对热应力和翘曲的耐受性。添加剂(润湿剂、增白剂和匀平剂)对镀层的物理性质有很大影响。采用systemk UVF 200封装的铜的抗拉强度超过40000 psi,伸长率超过18%,内应力低于1.0 Kg/mm2。在不同的电流密度下,沉积铜的物理性质没有发生变化,表明该封装具有稳定的性能。
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引用次数: 0
An Innovative Customized PCB Surface Printing for Performance Enhancement 一个创新的定制PCB表面印刷的性能增强
Pub Date : 2022-10-26 DOI: 10.1109/IMPACT56280.2022.9966636
J. Hsu, Ryan Chang, Xiaoning Ye, T. Su, Zoe Liu
In this paper, a novel and effective approach by the innovative customized PCB surface printing was proposed to reduce far-end crosstalk (FEXT) in multiple microstrip lines. A new type of solder mask with higher dielectric constant up to 8, instead of the conventional one with around 4, was developed for PCB surface printing. The test coupons with the proposed customized solder mask are built and validated, and the measured FEXT was significantly reduced. The design strategy with the optimized structures was clearly addressed, and this innovation can effectively enhance the microstrip electrical performance for high-speed application.
本文提出了一种新颖有效的定制PCB表面印刷方法来减少多微带线中的远端串扰(FEXT)。研制了一种新型阻焊材料,其介电常数可达8,取代了传统的介电常数约为4的阻焊材料。构建并验证了具有所提出的定制阻焊片的测试片,测量的FEXT显着降低。明确了优化结构的设计策略,这一创新可以有效地提高微带电路在高速应用中的电性能。
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引用次数: 0
IMPACT 2022 Cover Page IMPACT 2022封面
Pub Date : 2022-10-26 DOI: 10.1109/impact56280.2022.9966723
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引用次数: 0
Thermal Design of SiC Power Module for EV/HEV Applications 用于EV/HEV应用的SiC功率模块的热设计
Pub Date : 2022-10-26 DOI: 10.1109/impact56280.2022.9966722
Chun-Kai Liu, Chiu Po-Kai, Yuan-Cheng Huang, J. Syu, Yao-Shun Chen, Yu-An Chou, Kuang-Hung Wu, Wen-Yang Pan
Silicon-Carbide semiconductor device has the benefits of higher breakdown voltage, higher current, higher operating temperature, higher switching speed, and lower switching loss over Si devices. It offers system-level benefits of high efficiency and power density to EV/HEV powertrain. However, thermal management solutions face new challenges in mitigating the increased heat flux in powertrain due to increased power density. High heat flux can raise the temperature of power devices and ICs, which reduces reliability and efficiency, and can lead to failure. In this paper, we studied the thermal design of the 1200 V, 400A SiC power module for EV/HEV applications by numerical simulation and experimental measurement. The effects of powering conditions, inlet temperature, and liquid flow rate are studied comprehensively.
碳化硅半导体器件与硅器件相比具有更高的击穿电压、更高的电流、更高的工作温度、更高的开关速度和更低的开关损耗等优点。它为EV/HEV动力系统提供了高效率和功率密度的系统级优势。然而,由于功率密度的增加,热管理解决方案在缓解动力系统中增加的热流方面面临着新的挑战。高热流可以提高功率器件和集成电路的温度,降低可靠性和效率,并可能导致故障。本文通过数值模拟和实验测量,对用于EV/HEV的1200v, 400A SiC功率模块的热设计进行了研究。综合研究了动力条件、进口温度、液体流量等因素的影响。
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引用次数: 0
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