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Editorial: Application of Artificial Intelligence Techniques in Production Engineering 社论:人工智能技术在生产工程中的应用
Pub Date : 2023-03-05 DOI: 10.20965/ijat.2023.p0091
K. Nakamoto, Keigo Takasugi
Artificial intelligence (AI) techniques have been behind disruptive innovations in every industry. Based on AI techniques, large amounts of data can be converted into actionable insights and predictions. Manufacturers have frequently faced different kinds of challenges, such as unexpected machinery failures or defective product deliveries. Still, the adoption of AI techniques is expected to improve operational efficiency, enable the launch of new products, customize product designs, and plan future financial actions. Recently, manufacturers have been using AI techniques to improve the quality of their products, achieve greater speed and visibility across supply chains, and optimize inventory management. Given that the attention and interest in AI techniques has been growing rapidly, it is time that the current state of the art of their practical applications be presented. The main aim of this special issue is to bring together the latest AI research and practical case studies of AI techniques in production engineering. This special issue features 10 papers related to not only operation automation but also sophisticated skill transfer in manufacturers. Their subjects cover various advancements, such as failure diagnosis, product estimation, process planning, operation planning, and workpiece fixturing in the area of machining. Moreover, the authors boldly strive to apply AI technologies even to complex systems in manufacturing fields such as laser-assisted incremental forming, injection molded direct joining, and parts assembling. We thank the authors for their interesting papers submitted for this special issue, and we are sure that both general readers and specialists will find the information the authors provide both interesting and informative. Moreover, we deeply appreciate the reviewers for their incisive efforts. Without these contributions, this special issue would not have been possible. We truly hope that this special issue triggers further research on AI techniques in production engineering.
人工智能(AI)技术已经成为每个行业颠覆性创新的背后推手。基于人工智能技术,大量数据可以转化为可操作的见解和预测。制造商经常面临各种各样的挑战,比如意外的机械故障或有缺陷的产品交付。尽管如此,人工智能技术的采用有望提高运营效率,推动新产品的推出,定制产品设计,并规划未来的财务行动。最近,制造商一直在使用人工智能技术来提高产品质量,提高供应链的速度和可见性,并优化库存管理。鉴于对人工智能技术的关注和兴趣一直在迅速增长,现在是时候展示其实际应用的现状了。本期特刊的主要目的是汇集最新的人工智能研究和人工智能技术在生产工程中的实际案例研究。这期特刊收录了10篇论文,不仅涉及操作自动化,还涉及制造商的复杂技能转移。他们的主题涵盖了各种进展,如故障诊断,产品估计,工艺规划,操作计划,以及加工领域的工件夹具。此外,作者大胆地努力将人工智能技术应用于激光辅助增量成形、注塑直连、零件组装等制造领域的复杂系统。我们感谢作者为本期特刊提交的有趣的论文,我们相信普通读者和专家都会发现作者提供的信息既有趣又翔实。此外,我们对审稿人的精辟努力深表感谢。没有这些贡献,就不可能有本期特刊。我们真诚地希望这一特殊问题能够引发对人工智能技术在生产工程中的进一步研究。
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引用次数: 0
Statistical and Artificial Intelligence Analyses of Blast Treatment Condition Effects on Blast-Assisted Injection Molded Direct Joining 喷砂处理条件对喷砂辅助注塑直连影响的统计与人工智能分析
Pub Date : 2023-03-05 DOI: 10.20965/ijat.2023.p0156
Shuohan Wang, Fuminobu Kimura, Shuaijie Zhao, E. Yamaguchi, Yuuka Ito, Yukinori Suzuki, Y. Kajihara
Efficient hybrid joining methods are required for joining metals and plastics in the automobile and airplane industries. Injection molded direct joining (IMDJ) is a direct joining technique that uses metal pretreatment and injection molding of plastic to form joints without using any additional parts. This joining technique has attracted attention from industries for its advantages of high efficiency and low cost in mass production. Blast-assisted IMDJ, an IMDJ technique that employs blasting as the metal pretreatment, has become suitable for the industry because metal pretreatment can be performed during the formation of the metal surface structure without chemicals. To satisfy industry standards, the blast-assisted IMDJ technique needs to be optimized under blasting conditions to improve joining performance. The number of parameters and their interactions make this problem difficult to solve using conventional control variable methods. We propose applying statistical and artificial intelligence analyses to address this problem. We used multiple linear regression and back propagation neural networks to analyze the experimental data. The results elucidated the relationship between the blasting conditions and joining strength. According to the machine learning predicted results, the best joining strength in blast-assisted IMDJ reached 22.3 MPa under optimized blasting conditions. This study provides new insights into similar engineering problems.
在汽车和飞机工业中,需要高效的混合连接方法来连接金属和塑料。注射成型直接连接(IMDJ)是一种直接连接技术,通过金属预处理和塑料的注射成型形成连接,而不使用任何额外的零件。这种连接技术以其高效、低成本的优点在批量生产中受到了业界的关注。Blast-assisted IMDJ是一种利用爆破作为金属预处理的IMDJ技术,因为金属预处理可以在金属表面结构形成的过程中进行,而不需要化学药品。为了满足行业标准,需要在爆破条件下对爆破辅助IMDJ技术进行优化,以提高连接性能。参数的数量及其相互作用使得传统的控制变量方法难以解决这一问题。我们建议应用统计和人工智能分析来解决这个问题。我们使用多元线性回归和反向传播神经网络对实验数据进行分析。结果阐明了爆破条件与连接强度之间的关系。根据机器学习预测结果,在优化爆破条件下,爆破辅助IMDJ的最佳连接强度达到22.3 MPa。这项研究为类似的工程问题提供了新的见解。
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引用次数: 0
Automated Generation of Product Assembly Order Based on Geometric Constraints Between Parts 基于零件间几何约束的产品装配订单自动生成
Pub Date : 2023-03-05 DOI: 10.20965/ijat.2023.p0167
Isamu Nishida, Hayato Sawada, K. Shirase
This study proposes a method for automating the determination of assembly order by automating the derivation of the necessary connection relationships between the parts. The proposed method minimizes the information required for the initial conditions and automatically determines the feasible assembly orders. As a general rule, based on the assumption that the assembly order for a product is the reverse of the disassembly order, once the disassembly order is derived based on the 3D CAD model and the connection relationships between the parts, the assembly order can be determined. Until now, however, the relationships between the parts are decided manually by the attendant engineers, thus, hindering the full automation of the determination of the assembly order. To achieve full automation realistically, the connection relationships between the parts should be derived automatically from the 3D CAD model, for which this study proposes an efficient method. The components were extracted from the 3D CAD model, and the bolts were identified. The connection relationships between the parts were derived from the interference conditions determined while moving each part minutely. An association chart diagram was created from the obtained connection relationships, from which multiple assembly order candidates could be derived.
本文提出了一种通过自动推导零件之间的必要连接关系来自动确定装配顺序的方法。该方法使初始条件所需的信息最小化,并自动确定可行的装配顺序。一般来说,在假设产品的装配顺序与拆卸顺序相反的前提下,一旦根据三维CAD模型和零件之间的连接关系推导出拆卸顺序,就可以确定装配顺序。然而,到目前为止,零件之间的关系是由辅助工程师手动决定的,因此,阻碍了组装顺序确定的完全自动化。为了真正实现全自动化,需要从三维CAD模型中自动导出零件之间的连接关系,本研究提出了一种有效的方法。从三维CAD模型中提取零件,并对螺栓进行识别。零件之间的连接关系是根据每个零件在微小运动时确定的干涉条件推导出来的。从获得的连接关系中创建关联图,从中可以导出多个装配顺序候选。
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引用次数: 0
Slurry Conditions for Reaction-Induced Slurry-Assisted Grinding of Optical Glass Lens 反应诱导浆料辅助磨削光学玻璃透镜的浆料条件
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0040
Tappei Kawasato, Hinata Takamaru, Kazuhisa Hamazono, M. Fukuta, Katsuto Tanaka, Yusuke Chiba, Mikinori Nagano, Hidebumi Kato, Y. Kakinuma
The demand for optical glass lenses is rising owing to the increase in image resolution. Optical glass is a hard and brittle material. Thus, an efficient and precise grinding method is required for optical glass to improve lens quality and productivity. There are a few methods of producing crack-free machined surfaces; however, they provide only limited grinding efficiency. To resolve this issue, the authors’ group has proposed the reaction-induced slurry-assisted (RISA) grinding method, which expands the range of ductile-regime grinding by utilizing the chemical–mechanical action of a cerium oxide slurry. In this study, the grinding performance of RISA grinding is experimentally evaluated for different pH levels. The results are compared using Tukey’s test, where surface roughness is considered as the characteristic value and the pH value as the analyzed factor. The result shows that RISA grinding efficiently produces a high-quality surface when the slurry is alkaline. The adhesion of cerium oxide abrasives to the wheel in RISA grinding follows the same mechanism as slurry aggregation. In addition, adhesion is more likely to occur when the alkalization of the slurry promotes aggregation. The tank in the slurry supply unit is replaced with a rotating tank to ensure stable RISA grinding with a highly aggregable slurry while preventing aggregation. The performance evaluation shows that a high-quality surface with a surface roughness of less than 10 nm in most parts is obtained. Moreover, the critical depth of cut stably increases by a factor of 5.8.
由于图像分辨率的提高,光学玻璃透镜的需求正在上升。光学玻璃是一种又硬又脆的材料。因此,为了提高光学玻璃的透镜质量和生产率,需要一种高效、精确的磨削方法。有几种方法可以产生无裂纹的加工表面;然而,它们只能提供有限的磨削效率。为了解决这个问题,作者小组提出了反应诱导浆料辅助(RISA)研磨方法,该方法利用氧化铈浆料的化学-机械作用扩大了延性研磨的范围。在本研究中,实验评估了不同pH水平下RISA研磨的研磨性能。使用Tukey的测试对结果进行比较,其中表面粗糙度作为特征值,pH值作为分析因素。结果表明,当料浆为碱性时,RISA研磨可有效地获得高质量的表面。在RISA磨削中,氧化铈磨料与砂轮的粘附遵循与料浆聚集相同的机理。此外,当浆料的碱化促进团聚时,粘连更容易发生。浆料供应单元中的储罐被替换为旋转储罐,以确保稳定的RISA研磨具有高聚合性的浆料,同时防止聚集。性能评价表明,在大多数零件中获得了表面粗糙度小于10 nm的高质量表面。临界切割深度稳定地增加了5.8倍。
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引用次数: 0
Research on the Positioning and Recognition of an Intelligent Inspection Robot in Substations 变电站智能巡检机器人的定位与识别研究
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0065
Liyun Xing
The substation inspection robot follows the set path when working autonomously, and accurate positioning of the robot while moving is required to ensure that the route does not deviate. This study briefly introduces a substation inspection robot, an odometer-based positioning algorithm, radio frequency identification (RFID), and a machine vision-based positioning algorithm, and improves the former algorithm by RFID. Subsequently, the three positioning algorithms were compared. The results showed that the RFID+machine vision-based positioning algorithm exhibited the highest accuracy among the three algorithms tested under the same cycle number, and its positioning error remained stable as the cycle number increased.
变电站巡检机器人在自主工作时遵循设定的路径,移动时需要对机器人进行准确定位,保证路径不偏离。本研究简要介绍了变电站巡检机器人、基于里程表的定位算法、射频识别(RFID)和基于机器视觉的定位算法,并通过RFID对前者算法进行改进。随后,对三种定位算法进行了比较。结果表明,在相同循环次数下,基于RFID+机器视觉的定位算法在三种被测算法中精度最高,且定位误差随循环次数的增加保持稳定。
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引用次数: 1
Three-Dimensional Evaluation of Microscopic Wheel Surface Topography in Creep Feed Grinding Using Ceramics Grinding Wheel 陶瓷砂轮蠕变进给磨削细观砂轮表面形貌的三维评价
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0014
M. Fujimoto, M. Fujita
The surface topography of ceramic grinding wheels used in creep feed grinding is examined in this study. Creep feed grinding experiments are performed using seeded gel (SG) grinding wheels. The three-dimensional surface of the grinding wheel is observed using a two-dimensional high-definition laser displacement sensor, and the effective cutting-edge number is calculated based on three-dimensional surface observations. Microscopic wear behaviors of grain cutting edges are examined based on scanning electron microscope (SEM) images. The cutting-edge area percentage is calculated based on SEM images via the discriminant analysis method. Results show that the micro self-sharpening phenomenon can be evaluated quantitatively. Micro sharp cutting edges on grains and normal grinding forces are suppressed. Subsequently, the relationship between the grinding characteristics and behaviors of the SG wheel working surface is investigated.
对蠕变进给磨削用陶瓷砂轮的表面形貌进行了研究。采用种子凝胶(SG)砂轮进行了蠕变进给磨削试验。利用二维高清激光位移传感器对砂轮三维表面进行观测,并根据三维表面观测结果计算有效尖端数。基于扫描电子显微镜(SEM)图像,研究了晶粒切削刃的微观磨损行为。基于扫描电镜图像,采用判别分析方法计算尖端面积百分比。结果表明,微自锐现象可以定量评价。晶粒上的微锐切削刃和正常磨削力被抑制。在此基础上,研究了SG砂轮工作表面磨削特性与磨削行为之间的关系。
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引用次数: 3
Finishing Speed Improvement Using Side Cover Plates in Gyro Finishing 利用侧盖板提高陀螺精加工速度
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0047
Y. Hashimoto, Yugo Nakayama, T. Furumoto, Akihito Sekiya, Tetsuya Yamada, Tatsuki Kawahara, A. Hosokawa
Gyro finishing is a mass-finishing process in which fixed workpieces are finished by contact with the flow of abrasive media owing to the rotation of the barrel. The process is used to finish large complex-shaped workpieces, such as large gears and parts constructed using additive manufacturing. In our previous study, we proposed a cover plate positioned above a workpiece to restrict the upward motion of abrasive media after contact with the workpiece, thereby improving the finishing speed. In this study, plates were added at the side of the workpiece to restrict the flow of the abrasive media toward the side of the workpiece and further improve the finishing speed. First, we evaluated the effect of the side plates using a simple-shaped workpiece. The difference in the surface roughness during a 5 min process was evaluated under certain conditions of the side cover plates. We confirmed that the finishing speed can be increased by using a side cover plate whose front was positioned behind the workpiece center because of the restriction of motion of the abrasive media. In contrast, the finishing speed decreased when a side cover plate whose front was positioned in front of the workpiece center was used because of the interruption in the transmission of force from the barrel wall to the abrasive media near the workpiece, owing to the side cover plates. Subsequently, the effect of the side cover plates placed at a suitable position was evaluated based on variations in the surface roughness during the process. We confirmed that the finishing speed increased by approximately a factor of 1.5 when the side cover plates were used owing to restrictions in the motion of the abrasive media. Finally, a spur gear was finished with cover plates, as a sample of practical workpieces. The finishing speed was determined based on the difference in the surface roughness of the gear teeth during the process. The finishing speed increased when a side cover plate whose front was positioned behind the workpiece center was used. Therefore, it can be concluded that the use of side cover plates is an effective technique to improve the finishing speed in gyro finishing.
陀螺精加工是一种质量精加工工艺,在这种工艺中,由于滚筒的旋转,固定工件与磨料介质的流动接触,从而完成加工。该工艺用于完成大型复杂形状的工件,例如使用增材制造构建的大型齿轮和零件。在我们之前的研究中,我们提出了在工件上方放置盖板,以限制磨料介质与工件接触后向上运动,从而提高精加工速度。在本研究中,在工件侧面增加了板材,以限制磨料介质向工件侧面的流动,进一步提高了精加工速度。首先,我们使用一个简单形状的工件评估了侧板的效果。在一定条件下,评估了侧面盖板在5min过程中的表面粗糙度差异。由于磨料介质运动的限制,采用前置于工件中心后方的侧盖板可以提高精加工速度。而采用前置工件中心前的侧盖板时,由于侧盖板的存在,会中断从筒壁到工件附近磨料介质的力传递,导致精加工速度下降。随后,根据加工过程中表面粗糙度的变化,评估了在合适位置放置侧盖板的效果。我们确认,由于磨料介质运动的限制,当使用侧盖板时,精加工速度增加了大约1.5倍。最后,对一个正齿轮进行了盖板加工,作为实际工件的样品。根据加工过程中齿轮齿面粗糙度的差异确定精加工速度。采用前置于工件中心后方的侧盖板可提高精加工速度。因此,在陀螺精加工中,使用侧盖板是提高精加工速度的有效方法。
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引用次数: 0
Influence of the Impact Angle on Machining in Powder Jet Processing 粉末射流加工中冲击角对加工的影响
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0005
Chieko Kuji, Kuniyuki Izumita, K. Shimada, M. Mizutani, K. Sasaki, T. Kuriyagawa
Powder jet machining is a blast machining process in which micrometer-order particles are projected onto a workpiece at near-supersonic speeds, to remove the workpiece (abrasive jet machining (AJM)) or to deposit the particles (powder jet deposition (PJD)). We report a novel dental treatment method for powder jet machining using hydroxyapatite, which is the main component of teeth, as deposited particles. The surfaces and interdental spaces of human teeth are not only flat, but also have complex groove structures. However, PJD and AJM exhibit impact-angle-dependent machining phases. Therefore, it is necessary to investigate the effect of the particle impact angle on machining, before dental treatment. Furthermore, because machining interacts not only with the particle impact angle but also with the particle impact velocity, a comprehensive investigation of the effects of the machining parameters is required, for delineating the phase-transition conditions. Accordingly, in this study, we conducted machining experiments using hydroxyapatite particles (particle diameter, 2.16 μm) and four different blasting angles of 30°, 45°, 60°, and 90°, to infer the machining amount. Machining efficiency was evaluated based on the amount of machining. The impact angles and velocities of the particles were calculated using computational fluid dynamics (CFD). Three-dimensional process mapping was performed using the machining amount, particle impact angle, and particle impact velocity, obtained from the experiments and CFD calculations. The results showed that PJD crossed to AJM at the impact angle of approximately 60°. Moreover, PJD exhibited high processing efficiency for impact angles above 60° and impact velocities in the 280–310 m/s range. In contrast, AJM exhibited high processing efficiency for impact angles below approximately 35° and impact velocities above 310 m/s.
粉末射流加工是一种喷射加工过程,其中微米级的颗粒以接近超音速的速度投射到工件上,以去除工件(磨料射流加工(AJM))或沉积颗粒(粉末射流沉积(PJD))。本文报道了一种利用羟基磷灰石(牙齿的主要成分)作为沉积颗粒进行粉末射流加工的新型牙齿治疗方法。人类牙齿的表面和齿间空间不仅是平坦的,而且有复杂的凹槽结构。然而,PJD和AJM表现出与冲击角相关的加工阶段。因此,有必要在牙科治疗前研究颗粒撞击角对加工的影响。此外,由于加工不仅与颗粒的冲击角相互作用,而且与颗粒的冲击速度相互作用,因此需要对加工参数的影响进行全面的研究,以描述相变条件。因此,在本研究中,我们利用羟基磷灰石颗粒(粒径为2.16 μm)和30°、45°、60°和90°4种不同的爆破角度进行加工实验,推断加工量。根据加工量来评价加工效率。利用计算流体力学(CFD)计算了颗粒的碰撞角和速度。利用实验和CFD计算得到的加工量、颗粒撞击角度和颗粒撞击速度进行三维工艺制图。结果表明,PJD与AJM的碰撞角约为60°。此外,PJD在60°以上的冲击角度和280 ~ 310 m/s的冲击速度范围内具有较高的处理效率。相比之下,AJM在冲击角度小于约35°,冲击速度大于310 m/s时具有较高的处理效率。
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引用次数: 0
Effects of Bit Shape of Electroplated Diamond Tool Used for Drilling Small Diameter Holes in Glass Plate on Machining Fluid Flow and Chip Discharge 玻璃板小直径钻孔电镀金刚石刀具钻头形状对加工液流动和切屑放电的影响
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0032
Tappei Oyamada, A. Mizobuchi, T. Ishida
Our laboratory has been exploring the development of tools for drilling holes in glass plates, and the drilling techniques to be adopted for it. A devised tool shape that could prevent the occurrence of cracks at the exit holes achieved high quality through hole drilling of 100 holes or more using only the drilling cycle. However, crack-free drilling beyond this number of holes cannot be performed. This is due to the adhesion of the residual chip on the tool surface when the number of holes increases. Therefore, further improvement of chip discharge is needed to achieve crack-free drilling. In this report, we consider that chip discharge results from the flow of the machining fluid. To investigate the cause of chip discharge, we analyzed the flow of the machining fluid in the hole using computational fluid dynamics and the supposed chip discharge conditions. The results obtained in this study are summarized as follows. (1) In the case of a cylindrical tool, the Z-axis directional flow of the machining fluid did not occur in the hole. This is because the tool does not have bumps to agitate the fluid on the side, and the gap between the tool and the inner surface of the hole is narrow. (2) The plate side widened the gap between the tool and inner surface of the hole. Therefore, the fluid was likely to flow in the Z-axis direction in the hole. (3) For the tool with the plane side bit, the flow entered the hole from one plane side and exited the hole from the other plane side. (4) When the tool end is spherical, the Z-axis directional flow of the fluid occurs at the tool end. (5) The fluid flow of the devised tool weakened as the drilling depth increased. To improve the chip discharge performance of the designed tool, the Z-axis directional flow of the machining fluid must occur in an area deeper than 2 mm.
我们实验室一直在探索开发用于在玻璃板上钻孔的工具,以及采用的钻孔技术。设计了一种可以防止出口孔出现裂纹的工具形状,仅使用一个钻孔周期就可以实现100孔或更多的高质量通孔钻孔。然而,超过这个孔数的无裂纹钻孔是无法进行的。这是由于当孔数增加时,残留的切屑粘附在刀具表面。因此,要实现无裂纹钻进,还需进一步提高出屑量。在本报告中,我们认为切屑放电是加工液流动的结果。为了探讨切屑放电的原因,利用计算流体力学方法和假设的切屑放电条件,对加工液在孔内的流动进行了分析。本研究所得结果总结如下:(1)在圆柱刀具的情况下,加工液在孔内不发生z轴定向流动。这是因为该工具在侧面没有颠簸来搅动流体,并且工具与孔内表面之间的间隙很窄。(2)板侧加宽了刀具与孔内表面的间隙。因此,流体很可能在井内沿z轴方向流动。(3)对于平面侧钻头的刀具,气流从一个平面侧进入孔内,从另一个平面侧流出孔内。(4)当刀端为球形时,流体在刀端发生z轴定向流动。(5)随着钻井深度的增加,所设计工具的流体流动减弱。为了提高所设计刀具的排屑性能,加工流体的z轴定向流动必须发生在深度大于2mm的区域内。
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引用次数: 0
Development of High-Speed Rotation Polishing System with Slurry Confinement and Friction-State Control 基于料浆约束和摩擦状态控制的高速旋转抛光系统的研制
Pub Date : 2023-01-05 DOI: 10.20965/ijat.2023.p0055
K. Yoshitomi, Yoshinori Shimada, A. Une
An increased removal rate is required to improve the production efficiency during the polishing of ultrahard-to-process materials. The rotational speed of the polishing pad is increased to increase the removal rate. However, research has not been extensively conducted on polishing with a high-speed rotation because slurry is rarely supplied to a polishing area by the centrifugal force generated through polishing pad rotation. In this study, we developed a high-speed rotational polishing system with slurry confinement and friction-state control. The casing and spiral groove of the polishing pad were designed to confine the slurry in a polishing area, and friction-state control was adopted to maintain the spindle torque generated by friction between the pad and wafer at the target spindle torque. Based on the experiments investigating the supply efficiency, the developed polishing method can supply sufficient slurry to the polishing area by the optimized spiral groove pattern and perform polishing without slurry shortage at a high-speed pad rotation of 10000 min-1. In addition, the results of polishing experiments for a sapphire wafer revealed that friction-state control and wafer rotation could stabilize the polishing state effectively. The proposed polishing system can achieve a higher removal rate than the conventional polishing system.
在超难加工材料的抛光过程中,需要提高去除率以提高生产效率。提高抛光垫的转速,提高去除率。然而,由于抛光垫旋转产生的离心力很少能将抛光液提供给抛光区域,因此高速旋转抛光的研究并不广泛。在这项研究中,我们开发了一种具有浆液约束和摩擦状态控制的高速旋转抛光系统。抛光垫的壳体和螺旋槽设计将抛光浆限制在抛光区域内,并采用摩擦状态控制使抛光垫与晶片摩擦产生的主轴转矩保持在目标主轴转矩上。通过对抛光效率的实验研究,所提出的抛光方法能够以优化的螺旋槽型为抛光区域提供充足的抛光液,在高速旋转10000 min-1的转速下实现抛光液不短缺。此外,蓝宝石晶圆的抛光实验结果表明,摩擦状态控制和晶圆旋转可以有效地稳定抛光状态。该抛光系统比常规抛光系统具有更高的去除率。
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引用次数: 0
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Int. J. Autom. Technol.
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