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Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives 精密运动系统的磁悬浮技术:回顾与展望
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0386
Lei Zhou, Jingjie Wu
Precision motion systems are the core of a wide range of manufacturing equipment and scientific instruments, and their motion performance directly determines the quality and speed of the associated manufacturing or metrology processes. Magnetically levitated precision motion systems, where the moving target is supported by magnetic forces and without any mechanical contact, provide advantages of frictionless motion, vacuum compatibility, and contamination-free operation. These features endow the magnetic levitation technology with the capability to deliver excellent overall performance for precision positioning systems. Through decades of research and engineering efforts, significant advances have been made in the actuation, sensing, design, and control of magnetically levitated precision motion systems. This paper provides an introduction to the fundamentals of the feedback control, actuation, and sensing for the magnetic levitation technology, and provides a comprehensive literature review of various magnetically levitated precision positioning systems developed over the past three decades. The final part of this paper identifies several challenges in the design and control of today’s precision motion systems using magnetic levitation and provides an outlook on the possible directions for future research and development.
精密运动系统是各种制造设备和科学仪器的核心,它们的运动性能直接决定了相关制造或计量过程的质量和速度。在磁悬浮精密运动系统中,运动目标由磁力支撑,没有任何机械接触,具有无摩擦运动、真空兼容和无污染操作的优点。这些特点使磁悬浮技术能够为精密定位系统提供卓越的整体性能。经过几十年的研究和工程努力,在磁悬浮精密运动系统的驱动、传感、设计和控制方面取得了重大进展。本文介绍了磁悬浮技术的反馈控制、驱动和传感的基本原理,并对近三十年来发展起来的各种磁悬浮精密定位系统进行了全面的文献综述。本文的最后一部分确定了当今使用磁悬浮的精密运动系统的设计和控制中的几个挑战,并对未来研究和发展的可能方向进行了展望。
{"title":"Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives","authors":"Lei Zhou, Jingjie Wu","doi":"10.20965/ijat.2022.p0386","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0386","url":null,"abstract":"Precision motion systems are the core of a wide range of manufacturing equipment and scientific instruments, and their motion performance directly determines the quality and speed of the associated manufacturing or metrology processes. Magnetically levitated precision motion systems, where the moving target is supported by magnetic forces and without any mechanical contact, provide advantages of frictionless motion, vacuum compatibility, and contamination-free operation. These features endow the magnetic levitation technology with the capability to deliver excellent overall performance for precision positioning systems. Through decades of research and engineering efforts, significant advances have been made in the actuation, sensing, design, and control of magnetically levitated precision motion systems. This paper provides an introduction to the fundamentals of the feedback control, actuation, and sensing for the magnetic levitation technology, and provides a comprehensive literature review of various magnetically levitated precision positioning systems developed over the past three decades. The final part of this paper identifies several challenges in the design and control of today’s precision motion systems using magnetic levitation and provides an outlook on the possible directions for future research and development.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"18 1","pages":"386-402"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74949750","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
New Control Parametrization Strategy for Flexible Feed Drives 柔性进给驱动控制参数化新策略
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0403
Natanael Lanz, S. Weikert, K. Wegener
This paper presents a novel parametrization strategy for optimal contouring control of flexible feed drives. The aim of the new strategy is to maximize the structural damping of the drive and counteract the deformations of the structure. Using a simplified flexible multibody model, the analytical relationships for the design of velocity and position control gains were derived. This results in a controller bandwidth increase of up to 20% compared to the previous state-of-the-art in parametrization of standard cascaded controllers. Through analytical and numerical calculations, it was demonstrated that such an increase is feasible without a decrease in structural damping if the position and velocity controller gains are both considered. Furthermore, it is shown that the ratio between the position and velocity loop gains influences the quasistatic deformation between the encoder and tool center point (TCP). A formula for the optimal choice of the ratio was derived to compensate for the error. This leads to a new straightforward step-by-step approach for axis controller setting, which is then applied to a test bench and its simulation model. It can be shown that the new parametrization strategy leads to a significant reduction in path error at the TCP. Importantly, the analytical approach should simplify the task of setting up a standard cascaded controller significantly by avoiding time-consuming iterations.
提出了一种新的柔性进给传动最优轮廓控制参数化策略。新策略的目的是最大化结构阻尼的驱动和抵消结构的变形。利用简化的柔性多体模型,推导了速度增益和位置增益设计的解析关系。与之前最先进的标准级联控制器参数化相比,这导致控制器带宽增加高达20%。通过分析和数值计算表明,在不降低结构阻尼的情况下,同时考虑位置和速度控制器增益是可行的。此外,位置和速度环路增益的比值会影响编码器与刀具中心点之间的准静态变形。为了补偿误差,导出了最佳比率选择公式。这导致了轴控制器设置的一种新的直接的一步一步的方法,然后将其应用于试验台及其仿真模型。结果表明,新的参数化策略显著降低了TCP的路径误差。重要的是,分析方法应该通过避免耗时的迭代来显著简化建立标准级联控制器的任务。
{"title":"New Control Parametrization Strategy for Flexible Feed Drives","authors":"Natanael Lanz, S. Weikert, K. Wegener","doi":"10.20965/ijat.2022.p0403","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0403","url":null,"abstract":"This paper presents a novel parametrization strategy for optimal contouring control of flexible feed drives. The aim of the new strategy is to maximize the structural damping of the drive and counteract the deformations of the structure. Using a simplified flexible multibody model, the analytical relationships for the design of velocity and position control gains were derived. This results in a controller bandwidth increase of up to 20% compared to the previous state-of-the-art in parametrization of standard cascaded controllers. Through analytical and numerical calculations, it was demonstrated that such an increase is feasible without a decrease in structural damping if the position and velocity controller gains are both considered. Furthermore, it is shown that the ratio between the position and velocity loop gains influences the quasistatic deformation between the encoder and tool center point (TCP). A formula for the optimal choice of the ratio was derived to compensate for the error. This leads to a new straightforward step-by-step approach for axis controller setting, which is then applied to a test bench and its simulation model. It can be shown that the new parametrization strategy leads to a significant reduction in path error at the TCP. Importantly, the analytical approach should simplify the task of setting up a standard cascaded controller significantly by avoiding time-consuming iterations.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"27 1","pages":"403-420"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76598566","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Control of Spindle Position and Stiffness of Aerostatic-Bearing-Type Air Turbine Spindle 静压轴承式空气涡轮主轴位置与刚度控制
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0456
Tomohiro Tanaka, Tomonori Kato, T. Otsubo, Atsuhiro Koyama, T. Yazawa
Air turbine spindles with aerostatic bearings are widely used in ultraprecision machining equipment. Ultraprecision grinding processes using air turbine spindles with aerostatic bearings include constant-pressure dry lapping of nano-polycrystalline diamond (NPD) tools and ultraviolet irradiation polishing of chemical vapor deposition diamond films. In the dry lapping of NPD tools, it is necessary to achieve constant-pressure grinding while flexibly adjusting the contact force between the NPD tool and the truer fixed on the end face of the aerostatic spindle to form a nose bite with a cutting-edge rounding radius, R, of 0.1 nm. However, it is common for operators to manually adjust the cut depth and the air pressure supplied to the aerostatic bearing by relying on the noise and rotation speed during machining. Moreover, aerostatic spindles without a control mechanism, such as active bearings, are widely used because of their low costs and versatility. For several years, the authors have been developing a method to control air bearing stiffness by controlling the bearing supply pressure with high speeds and precision using a high-precision quick response regulator for aerostatic spindles without a control mechanism, such as active bearings. In this study, the compliance control (control of spindle position and stiffness) of aerostatic bearings was investigated using the proposed method, and the effectiveness of the method to ultraprecision grinding applications was demonstrated.
空气静压轴承空气涡轮主轴广泛应用于超精密加工设备中。采用空气静压轴承的空气涡轮主轴的超精密磨削工艺包括纳米多晶金刚石(NPD)工具的恒压干研磨和化学气相沉积金刚石膜的紫外线照射抛光。在NPD刀具的干研磨过程中,需要在实现恒压磨削的同时,灵活调节NPD刀具与固定在静压主轴端面上的矫直器之间的接触力,形成尖端圆角半径R为0.1 nm的鼻咬合。然而,操作员通常依靠加工过程中的噪音和转速来手动调整切割深度和提供给空气静压轴承的空气压力。此外,没有控制机构的空气静压主轴,如主动轴承,由于其低成本和多功能性而被广泛使用。几年来,作者一直在开发一种方法,通过使用高精度快速响应调节器来控制轴承供应压力,高速和精确地控制空气轴承刚度,而不需要控制机构,如主动轴承。采用该方法对空气静压轴承的柔度控制(主轴位置和刚度的控制)进行了研究,并验证了该方法在超精密磨削中的有效性。
{"title":"Control of Spindle Position and Stiffness of Aerostatic-Bearing-Type Air Turbine Spindle","authors":"Tomohiro Tanaka, Tomonori Kato, T. Otsubo, Atsuhiro Koyama, T. Yazawa","doi":"10.20965/ijat.2022.p0456","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0456","url":null,"abstract":"Air turbine spindles with aerostatic bearings are widely used in ultraprecision machining equipment. Ultraprecision grinding processes using air turbine spindles with aerostatic bearings include constant-pressure dry lapping of nano-polycrystalline diamond (NPD) tools and ultraviolet irradiation polishing of chemical vapor deposition diamond films. In the dry lapping of NPD tools, it is necessary to achieve constant-pressure grinding while flexibly adjusting the contact force between the NPD tool and the truer fixed on the end face of the aerostatic spindle to form a nose bite with a cutting-edge rounding radius, R, of 0.1 nm. However, it is common for operators to manually adjust the cut depth and the air pressure supplied to the aerostatic bearing by relying on the noise and rotation speed during machining. Moreover, aerostatic spindles without a control mechanism, such as active bearings, are widely used because of their low costs and versatility. For several years, the authors have been developing a method to control air bearing stiffness by controlling the bearing supply pressure with high speeds and precision using a high-precision quick response regulator for aerostatic spindles without a control mechanism, such as active bearings. In this study, the compliance control (control of spindle position and stiffness) of aerostatic bearings was investigated using the proposed method, and the effectiveness of the method to ultraprecision grinding applications was demonstrated.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"9 1","pages":"456-463"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73881910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography 光刻制束阵组件双极静电卡盘的研制
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0471
Y. Taoka, Kohei Kawabata, P. Hemthavy, Seungman Choi, Kunio Takahashi, S. Saito
This technical paper demonstrates the influence of the probe-tip surface smoothness of a bipolar electrostatic chuck (ESC) on electrostatic force. ESC, which has a silicon-based beam-array microstructure, aims to pick and place a dielectric object with a curved surface owing to the compliance of its elastically deformable beams. The ESC was fabricated using a lithography technique, specifically deep reactive ion etching (DRIE), to smooth the surface of the beam tip. The surface roughness of the beam tips was observed using a field-emission scanning electron microscope (FE-SEM), and the adhesional force was experimentally evaluated. The results show that by the smoothing process, the adhesional force per unit area is significantly increased compared to the previous study reported by Choi (one of the authors). This suggests that the proposed bipolar ESC device has great potential for use in various industries.
本文研究了双极静电卡盘(ESC)探针尖端表面光滑度对静电力的影响。ESC具有硅基波束阵列微观结构,其目标是选择和放置具有弯曲表面的介电物体,因为其弹性可变形的光束具有顺应性。ESC是使用光刻技术制造的,特别是深度反应离子蚀刻(DRIE),以光滑光束尖端的表面。利用场发射扫描电镜(FE-SEM)观察了光束尖端的表面粗糙度,并对附着力进行了实验评估。结果表明,通过平滑处理,单位面积的黏附力比Choi(作者之一)之前报道的研究明显增加。这表明所提出的双极ESC装置在各种行业中具有巨大的应用潜力。
{"title":"Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography","authors":"Y. Taoka, Kohei Kawabata, P. Hemthavy, Seungman Choi, Kunio Takahashi, S. Saito","doi":"10.20965/ijat.2022.p0471","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0471","url":null,"abstract":"This technical paper demonstrates the influence of the probe-tip surface smoothness of a bipolar electrostatic chuck (ESC) on electrostatic force. ESC, which has a silicon-based beam-array microstructure, aims to pick and place a dielectric object with a curved surface owing to the compliance of its elastically deformable beams. The ESC was fabricated using a lithography technique, specifically deep reactive ion etching (DRIE), to smooth the surface of the beam tip. The surface roughness of the beam tips was observed using a field-emission scanning electron microscope (FE-SEM), and the adhesional force was experimentally evaluated. The results show that by the smoothing process, the adhesional force per unit area is significantly increased compared to the previous study reported by Choi (one of the authors). This suggests that the proposed bipolar ESC device has great potential for use in various industries.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"24 1","pages":"471-477"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74322148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Pneumatically-Controlled Linear Actuator Using Pressure-Resistant, Thin-Walled Metal Bellows and its Application 采用耐压薄壁金属波纹管的气动控制线性执行器及其应用
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0427
Yasukazu Sato, Takeyoshi Shimbori
The use of pneumatics has led to the development of a linear actuator that incorporates pressure-resistant metal bellows. This pressure-resistant bellows device is airtight and capable of considerable expansion. Conventional bellows devices are susceptible to bending stresses at the folds because high air pressure tends to crush the curvature of the bellows there. Therefore, their application only uses a 0.1 MPa difference in inner/outer pressure. The pressure-resistance of the bellows device is improved by the installation of viscoelastic rings in its folds, rings which reduce the bending stress caused by the high air pressure at the thin-walled inner folds. As a result, the pressure resistance is increased by 0.7 MPa. This paper uses a theoretical formulation and a finite element analysis approach in reporting the improvement in pressure resistance made by the installation of the viscoelastic rings. Furthermore, the actuator with pressure-resistant, thin-walled metal bellows is used to control the posture and damping force of a vehicle’s active suspension.
气动的使用导致了线性执行器的发展,其中包括耐压金属波纹管。这种耐压波纹管装置是气密的,能够相当大的膨胀。传统的波纹管设备在褶皱处容易受到弯曲应力的影响,因为高压往往会压碎那里的波纹管的曲率。因此,它们的应用仅使用0.1 MPa的内/外压力差。波纹管装置的抗压性通过在波纹管褶皱处安装粘弹性环而得到改善,粘弹性环减少了薄壁内褶皱处高气压引起的弯曲应力。因此,耐压性能提高了0.7 MPa。本文采用理论公式和有限元分析方法报道了安装粘弹性环后对耐压性能的改善。此外,带有耐压薄壁金属波纹管的执行器用于控制车辆主动悬架的姿态和阻尼力。
{"title":"Pneumatically-Controlled Linear Actuator Using Pressure-Resistant, Thin-Walled Metal Bellows and its Application","authors":"Yasukazu Sato, Takeyoshi Shimbori","doi":"10.20965/ijat.2022.p0427","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0427","url":null,"abstract":"The use of pneumatics has led to the development of a linear actuator that incorporates pressure-resistant metal bellows. This pressure-resistant bellows device is airtight and capable of considerable expansion. Conventional bellows devices are susceptible to bending stresses at the folds because high air pressure tends to crush the curvature of the bellows there. Therefore, their application only uses a 0.1 MPa difference in inner/outer pressure. The pressure-resistance of the bellows device is improved by the installation of viscoelastic rings in its folds, rings which reduce the bending stress caused by the high air pressure at the thin-walled inner folds. As a result, the pressure resistance is increased by 0.7 MPa. This paper uses a theoretical formulation and a finite element analysis approach in reporting the improvement in pressure resistance made by the installation of the viscoelastic rings. Furthermore, the actuator with pressure-resistant, thin-walled metal bellows is used to control the posture and damping force of a vehicle’s active suspension.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"33 1","pages":"427-435"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83732235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features 一种用于测量纳米尺度侧壁特征的尖端l形触头的研制
Pub Date : 2022-07-05 DOI: 10.20965/ijat.2022.p0489
Kosuke Uchiyama, H. Murakami, A. Katsuki, T. Sajima
This paper presents a system for measuring nanoscale sidewall features using an L-shaped stylus with a sharp tip. By sharpening the tip of the stylus to the nanometer scale, it is possible to measure nanoscale sidewall features. The stylus shaft is deflected when the sharpened stylus tip contacts the measured surface, and this deflection is measured optically. In this study, we develop the fabrication method of an L-shaped sharpened stylus 20 μm in diameter and 4 mm in length by etching, CO2 laser processing, and bonding. Then, the measurement accuracy and repeatability are examined by measuring V-grooves with nanoscale features. The results clarify that the pitch is approximately 0.3 μm, which is almost the same as the value measured using the photographic image, but the depths measured by the styli fabricated by CO2 laser processing and bonding are approximately 0.15 and 0.07 μm, respectively. The depth measured by the stylus fabricated by bonding is smaller than that measured from the image (approximately 0.16 μm), presumably because of the morphological filter. The maximum repeatability errors for 10 measurements using the styli fabricated by CO2 laser processing and bonding are within ±0.056 and ±0.022 μm in scanning mode, respectively. It is also confirmed that the stylus tip exhibits minimal wear even after 500 measurements.
本文提出了一种利用尖端为l形的触控笔测量纳米级侧壁特征的系统。通过将笔尖锐化到纳米尺度,可以测量纳米尺度的侧壁特征。当锐化的触控笔尖端接触被测表面时,触控笔轴发生偏转,这种偏转是光学测量的。本研究采用蚀刻、CO2激光加工和键合的方法制备了直径为20 μm、长度为4 mm的l形尖笔。然后,通过测量具有纳米尺度特征的v型沟槽,验证了测量精度和重复性。实验结果表明,柱间距约为0.3 μm,与照相测量值基本一致,而CO2激光加工和键合的柱深度分别约为0.15 μm和0.07 μm。通过键合制作的触针测量的深度比从图像测量的深度小(约0.16 μm),可能是由于形态滤波器的原因。在扫描模式下,采用CO2激光加工和键合制作的测针10次测量的最大重复性误差分别在±0.056和±0.022 μm以内。这也证实,即使在500次测量后,手写笔尖端也显示出最小的磨损。
{"title":"Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features","authors":"Kosuke Uchiyama, H. Murakami, A. Katsuki, T. Sajima","doi":"10.20965/ijat.2022.p0489","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0489","url":null,"abstract":"This paper presents a system for measuring nanoscale sidewall features using an L-shaped stylus with a sharp tip. By sharpening the tip of the stylus to the nanometer scale, it is possible to measure nanoscale sidewall features. The stylus shaft is deflected when the sharpened stylus tip contacts the measured surface, and this deflection is measured optically. In this study, we develop the fabrication method of an L-shaped sharpened stylus 20 μm in diameter and 4 mm in length by etching, CO2 laser processing, and bonding. Then, the measurement accuracy and repeatability are examined by measuring V-grooves with nanoscale features. The results clarify that the pitch is approximately 0.3 μm, which is almost the same as the value measured using the photographic image, but the depths measured by the styli fabricated by CO2 laser processing and bonding are approximately 0.15 and 0.07 μm, respectively. The depth measured by the stylus fabricated by bonding is smaller than that measured from the image (approximately 0.16 μm), presumably because of the morphological filter. The maximum repeatability errors for 10 measurements using the styli fabricated by CO2 laser processing and bonding are within ±0.056 and ±0.022 μm in scanning mode, respectively. It is also confirmed that the stylus tip exhibits minimal wear even after 500 measurements.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"34 1","pages":"489-496"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81110928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Fabrication of Micro Gripper Using Functional Fluid Power 基于功能流体动力的微型夹持器的设计与制造
Pub Date : 2022-07-05 DOI: 10.1299/jsmemecj.2021.s117-02
Yutaka Tanaka, Ryuta X. Suzuki, K. Edamura, S. Yokota
Gripping and holding mechanism of automated systems in manufacturing and distribution industries are required to flexibly accommodate various product shapes. In recent years, the gripping and holding mechanisms using jamming transition have been attracting attention because they can grasp objects of various shapes. The jamming gripping mechanism generally requires a mechanical vacuum pump to adjust the internal pressure of the gripping part, and it is difficult to miniaturize the system. An electro-conjugate fluid (ECF), a type of functional fluid, can generate a strong jet flow by applying a high DC voltage between the positive and negative electrodes. The ECF jet flow has a great potential to realize micro fluid power sources. In this paper, we proposed and prototyped a new type of small gripping and holding mechanism that uses the jet flow generated by the ECF and the jamming of granular material. A prototyped micro gripper had an outer diameter of 14 mm, a total length of 40 mm, and a tip diameter of 10 mm for gripping. A mathematical model of the micro gripper was derived by deformation of an elastic membrane and volume and pressure changes. It was verified by the mathematical model that the supplied pressure of the ECF hydraulic power source was large enough to realize gripping performance of the prototyped jamming gripper. The performance of the prototype micro gripper was numerically and experimentally evaluated the mathematical model. It was experimentally clarified that a maximum holding force of the prototyped jamming gripper was shown under the condition that filling rate of granular material was 50%. It was also clarified that the micro gripper with a built-in vacuum pump using the ECF hydraulic power source had a gripping force of up to 93 mN at an applied DC voltage of 4 kV.
制造和分销行业自动化系统的夹持机构需要灵活地适应各种产品形状。近年来,利用干扰过渡的夹持机构因能抓取各种形状的物体而受到人们的关注。夹紧机构一般需要机械真空泵来调节夹紧部分的内部压力,系统小型化困难。电共轭流体(ECF)是一种功能流体,通过在正极和负极之间施加高直流电压,可以产生强烈的射流。ECF射流具有实现微流体动力源的巨大潜力。在本文中,我们提出了一种新型的小型夹持机构,该机构利用ECF产生的射流和颗粒材料的干扰进行了原型设计。微型夹持器的原型外径为14 mm,总长度为40 mm,夹持尖端直径为10 mm。根据弹性膜的变形、体积和压力的变化,建立了微夹持器的数学模型。通过数学模型验证了ECF液压动力源的供给压力足够大,能够实现原型卡爪的夹持性能。利用数学模型对原型微夹持器的性能进行了数值和实验评价。实验结果表明,当颗粒物料的填充率为50%时,原型卡爪的握持力最大。此外,在施加4 kV直流电压的情况下,内置真空泵的微型夹持器的夹持力可达93 mN。
{"title":"Design and Fabrication of Micro Gripper Using Functional Fluid Power","authors":"Yutaka Tanaka, Ryuta X. Suzuki, K. Edamura, S. Yokota","doi":"10.1299/jsmemecj.2021.s117-02","DOIUrl":"https://doi.org/10.1299/jsmemecj.2021.s117-02","url":null,"abstract":"Gripping and holding mechanism of automated systems in manufacturing and distribution industries are required to flexibly accommodate various product shapes. In recent years, the gripping and holding mechanisms using jamming transition have been attracting attention because they can grasp objects of various shapes. The jamming gripping mechanism generally requires a mechanical vacuum pump to adjust the internal pressure of the gripping part, and it is difficult to miniaturize the system. An electro-conjugate fluid (ECF), a type of functional fluid, can generate a strong jet flow by applying a high DC voltage between the positive and negative electrodes. The ECF jet flow has a great potential to realize micro fluid power sources. In this paper, we proposed and prototyped a new type of small gripping and holding mechanism that uses the jet flow generated by the ECF and the jamming of granular material. A prototyped micro gripper had an outer diameter of 14 mm, a total length of 40 mm, and a tip diameter of 10 mm for gripping. A mathematical model of the micro gripper was derived by deformation of an elastic membrane and volume and pressure changes. It was verified by the mathematical model that the supplied pressure of the ECF hydraulic power source was large enough to realize gripping performance of the prototyped jamming gripper. The performance of the prototype micro gripper was numerically and experimentally evaluated the mathematical model. It was experimentally clarified that a maximum holding force of the prototyped jamming gripper was shown under the condition that filling rate of granular material was 50%. It was also clarified that the micro gripper with a built-in vacuum pump using the ECF hydraulic power source had a gripping force of up to 93 mN at an applied DC voltage of 4 kV.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"75 1","pages":"448-455"},"PeriodicalIF":0.0,"publicationDate":"2022-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88287693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Forming of Multiple Straight Convex Shapes on Aluminum Sheet Using Impulsive Water Pressure 脉冲水压在铝板上形成多个直凸形状
Pub Date : 2022-05-05 DOI: 10.20965/ijat.2022.p0367
M. Yamashita, Haruki Saito, M. Nikawa
Several types of multiple straight convex shapes were formed on a thin aluminum sheet with a grooved die using impulsive water pressure. The maximum pressure was 160 MPa in the high-speed forming, wherein a drop hammer testing machine was used, whereas it was 100 MPa in the low-speed forming because of the limitations of the press machine. The effects of the forming speed, cross-sectional shape, and pitch of the grooves on the deformation behavior were investigated. The increase in the impulsive water pressure was found to be affected significantly by the compressibility of water. The symmetricity of the convex shape in the cross-section decreased at both ends for a smaller pitch because of the imbalance of the material flow at both peripheries of the groove. The concave surface profile of the pressure side was more rounded in the high-speed forming than that in the low-speed forming when semicircular and rectangular grooved dies were used. This may be attributed to the fact that the plastic deformation becomes more uniform owing to the positive strain rate sensitivity of the test material. In the forming with rectangular grooves, fracture occurred under the low- and high-speed conditions, wherein the maximum pressure was set to 100 MPa. However, the material did not fracture during high-speed forming with a pressure of 160 MPa, where the convex shape was higher and the material contacted the bottom of the groove. This behavior may be because the dislocation density of the material did not increase rapidly owing to the strain rate being maintained high until the material suddenly stopped deforming in the latter condition. In forming with a trapezoidal grooved die, the formed profiles were considerably similar under all conditions because the strain was considerably smaller than that with the other grooves.
利用冲激水压在薄铝板上形成了多种直凸形状。高速成形时最大压力为160 MPa,采用落锤试验机,低速成形时由于压力机的限制,最大压力为100 MPa。研究了成形速度、沟槽横截面形状、沟槽节距对成形性能的影响。研究发现,水的可压缩性对脉冲水压力的增大有显著影响。随着节距的减小,沟槽两端物料流动的不平衡导致了沟槽两端凸形的对称性减小。采用半圆沟槽模具和矩形沟槽模具时,高速成形时压力侧凹面轮廓比低速成形时更圆润。这可能是由于试验材料的正应变率敏感性使塑性变形变得更加均匀。在矩形槽成形中,在低速和高速条件下,最大压力设置为100 MPa,发生断裂。而在160 MPa的高速成形过程中,材料未发生断裂,此时的凸形较高,材料接触槽底。这种行为可能是由于应变率一直保持在较高水平,直到材料在后一种状态下突然停止变形,材料的位错密度才会迅速增加。在梯形沟槽模具成形中,由于应变比其他沟槽小得多,因此在所有条件下成形的轮廓都相当相似。
{"title":"Forming of Multiple Straight Convex Shapes on Aluminum Sheet Using Impulsive Water Pressure","authors":"M. Yamashita, Haruki Saito, M. Nikawa","doi":"10.20965/ijat.2022.p0367","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0367","url":null,"abstract":"Several types of multiple straight convex shapes were formed on a thin aluminum sheet with a grooved die using impulsive water pressure. The maximum pressure was 160 MPa in the high-speed forming, wherein a drop hammer testing machine was used, whereas it was 100 MPa in the low-speed forming because of the limitations of the press machine. The effects of the forming speed, cross-sectional shape, and pitch of the grooves on the deformation behavior were investigated. The increase in the impulsive water pressure was found to be affected significantly by the compressibility of water. The symmetricity of the convex shape in the cross-section decreased at both ends for a smaller pitch because of the imbalance of the material flow at both peripheries of the groove. The concave surface profile of the pressure side was more rounded in the high-speed forming than that in the low-speed forming when semicircular and rectangular grooved dies were used. This may be attributed to the fact that the plastic deformation becomes more uniform owing to the positive strain rate sensitivity of the test material. In the forming with rectangular grooves, fracture occurred under the low- and high-speed conditions, wherein the maximum pressure was set to 100 MPa. However, the material did not fracture during high-speed forming with a pressure of 160 MPa, where the convex shape was higher and the material contacted the bottom of the groove. This behavior may be because the dislocation density of the material did not increase rapidly owing to the strain rate being maintained high until the material suddenly stopped deforming in the latter condition. In forming with a trapezoidal grooved die, the formed profiles were considerably similar under all conditions because the strain was considerably smaller than that with the other grooves.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"92 1","pages":"367-373"},"PeriodicalIF":0.0,"publicationDate":"2022-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75633039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multi-Objective Approach with a Distance Metric in Genetic Programming for Job Shop Scheduling 作业车间调度遗传规划中的多目标距离度量方法
Pub Date : 2022-05-05 DOI: 10.20965/ijat.2022.p0296
S. Salama, T. Kaihara, N. Fujii, D. Kokuryo
The goal of the Fourth Industrial Revolution is to develop smart factories that ensure flexibility and adaptability in complex production environments, without human intervention. Smart factories are based on three main pillars: integration through digitalization, employment of flexible structures, and the use of artificial intelligence (AI) methods. Genetic programming (GP) is one of the most promising AI approaches used in the automated design of production-scheduling rules. However, promoting diversity and controlling the bloating effect are major challenges to the success of GP algorithms in developing production-scheduling rules that deliver high-quality solutions. Therefore, we introduced a multi-objective technique to increase the diversity among GP individuals while considering the program length as an objective to avoid the bloating effect. The proposed approach employs a new diversity metric to measure the distance between GP individuals and the best rule in the current generation. Subsequently, the non-dominated sorting genetic algorithm II (NSGA-II) was used to select individuals based on three objectives: solution quality, similarity value, and program length. To assess the effectiveness of the proposed approach, we compare the two versions with three GP methods in the literature in terms of automatically generating dispatching rules on 10 benchmark instances of the job-shop scheduling problem. The experimental results show that the proposed distance measure enhances the phenotypic diversity of individuals, resulting in improved fitness values without the need for additional fitness assessments. In addition, the integration of NSGA-II with the GP algorithm facilitates the evolution of superior job shop dispatching rules with high diversity and shorter lengths under the makespan and mean tardiness objectives.
第四次工业革命的目标是开发智能工厂,确保在复杂的生产环境中具有灵活性和适应性,而无需人为干预。智能工厂基于三个主要支柱:数字化集成,灵活结构的使用以及人工智能(AI)方法的使用。遗传规划(GP)是用于生产调度规则自动化设计的最有前途的人工智能方法之一。然而,促进多样性和控制膨胀效应是GP算法在制定高质量解决方案的生产调度规则方面取得成功的主要挑战。因此,我们引入了一种多目标技术,以增加GP个体之间的多样性,同时考虑程序长度作为目标,以避免腹胀效应。该方法采用一种新的多样性度量来衡量GP个体与当前代最佳规则之间的距离。随后,采用非支配排序遗传算法II (non- dominant sorting genetic algorithm II, NSGA-II),根据解质量、相似度值和程序长度三个目标进行个体选择。为了评估所提出方法的有效性,我们将这两个版本与文献中的三种GP方法在10个作业车间调度问题基准实例上自动生成调度规则方面进行了比较。实验结果表明,所提出的距离度量增强了个体的表型多样性,从而在不需要额外适应度评估的情况下提高了适应度值。此外,将NSGA-II与GP算法相结合,有利于在最大完工时间和平均延迟目标下演化出多样性高、长度短的优作业车间调度规则。
{"title":"Multi-Objective Approach with a Distance Metric in Genetic Programming for Job Shop Scheduling","authors":"S. Salama, T. Kaihara, N. Fujii, D. Kokuryo","doi":"10.20965/ijat.2022.p0296","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0296","url":null,"abstract":"The goal of the Fourth Industrial Revolution is to develop smart factories that ensure flexibility and adaptability in complex production environments, without human intervention. Smart factories are based on three main pillars: integration through digitalization, employment of flexible structures, and the use of artificial intelligence (AI) methods. Genetic programming (GP) is one of the most promising AI approaches used in the automated design of production-scheduling rules. However, promoting diversity and controlling the bloating effect are major challenges to the success of GP algorithms in developing production-scheduling rules that deliver high-quality solutions. Therefore, we introduced a multi-objective technique to increase the diversity among GP individuals while considering the program length as an objective to avoid the bloating effect. The proposed approach employs a new diversity metric to measure the distance between GP individuals and the best rule in the current generation. Subsequently, the non-dominated sorting genetic algorithm II (NSGA-II) was used to select individuals based on three objectives: solution quality, similarity value, and program length. To assess the effectiveness of the proposed approach, we compare the two versions with three GP methods in the literature in terms of automatically generating dispatching rules on 10 benchmark instances of the job-shop scheduling problem. The experimental results show that the proposed distance measure enhances the phenotypic diversity of individuals, resulting in improved fitness values without the need for additional fitness assessments. In addition, the integration of NSGA-II with the GP algorithm facilitates the evolution of superior job shop dispatching rules with high diversity and shorter lengths under the makespan and mean tardiness objectives.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"16 1 1","pages":"296-308"},"PeriodicalIF":0.0,"publicationDate":"2022-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77892640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Performance Evaluation of Low-Cost Vibration Sensors in Industrial IoT Applications 低成本振动传感器在工业物联网应用中的性能评估
Pub Date : 2022-05-05 DOI: 10.20965/ijat.2022.p0329
A. Iqbal, N. S. Mian, A. Longstaff, S. Fletcher
The recent development of low-cost accelerometers, driven by the Industrial Internet of Things (IIoT) revolution, provides an opportunity for their application in precision manufacturing. Sensor data is often of the highest consideration in any precision machining process. While high-cost vibration sensors have traditionally been employed for vibration measurements in industrial manufacturing, the measurement uncertainty affecting the accuracy of low-cost vibration sensors has not been explored and requires performance evaluation. This research focuses on the characterization of measurements from low-cost tri-axial micro electro-mechanical systems (MEMS) accelerometers in terms of identifying the parameters that induce uncertainties in measured data. Static and dynamic calibration was conducted on a calibration test bench using a range of frequencies while establishing traceability according to the ISO 16063 series and the IEEE-STD-1293-2018 standards. Moreover, comparison tests were performed by installing the sensors on machine tools for reliability evaluation in terms of digital transmission of recorded data. Both tests further established the relationship between the baseline errors originating from the sensors and their influence on the data obtained during the dynamic performance profile of the machine tools. The outcomes of this research will foresee the viability offered by such low-cost sensors in metrological applications enabling Industry 4.0.
最近在工业物联网(IIoT)革命的推动下,低成本加速度计的发展为其在精密制造中的应用提供了机会。在任何精密加工过程中,传感器数据通常是最重要的考虑因素。在工业制造中,传统上采用高成本振动传感器进行振动测量,但影响低成本振动传感器精度的测量不确定度尚未得到探讨,需要进行性能评估。本研究的重点是低成本三轴微机电系统(MEMS)加速度计的测量特性,以确定测量数据中引起不确定性的参数。根据ISO 16063系列和IEEE-STD-1293-2018标准,在校准试验台上使用一系列频率进行静态和动态校准,并建立可追溯性。此外,通过将传感器安装在机床上进行比较试验,以评估记录数据的数字传输的可靠性。这两项测试都进一步确定了传感器产生的基线误差与它们对机床动态性能剖面中获得的数据的影响之间的关系。这项研究的结果将预见这种低成本传感器在计量应用中的可行性,从而实现工业4.0。
{"title":"Performance Evaluation of Low-Cost Vibration Sensors in Industrial IoT Applications","authors":"A. Iqbal, N. S. Mian, A. Longstaff, S. Fletcher","doi":"10.20965/ijat.2022.p0329","DOIUrl":"https://doi.org/10.20965/ijat.2022.p0329","url":null,"abstract":"The recent development of low-cost accelerometers, driven by the Industrial Internet of Things (IIoT) revolution, provides an opportunity for their application in precision manufacturing. Sensor data is often of the highest consideration in any precision machining process. While high-cost vibration sensors have traditionally been employed for vibration measurements in industrial manufacturing, the measurement uncertainty affecting the accuracy of low-cost vibration sensors has not been explored and requires performance evaluation. This research focuses on the characterization of measurements from low-cost tri-axial micro electro-mechanical systems (MEMS) accelerometers in terms of identifying the parameters that induce uncertainties in measured data. Static and dynamic calibration was conducted on a calibration test bench using a range of frequencies while establishing traceability according to the ISO 16063 series and the IEEE-STD-1293-2018 standards. Moreover, comparison tests were performed by installing the sensors on machine tools for reliability evaluation in terms of digital transmission of recorded data. Both tests further established the relationship between the baseline errors originating from the sensors and their influence on the data obtained during the dynamic performance profile of the machine tools. The outcomes of this research will foresee the viability offered by such low-cost sensors in metrological applications enabling Industry 4.0.","PeriodicalId":13583,"journal":{"name":"Int. J. Autom. Technol.","volume":"14 1","pages":"329-339"},"PeriodicalIF":0.0,"publicationDate":"2022-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81982458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Int. J. Autom. Technol.
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