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Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)最新文献

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Ultra-high electron emission efficiency from defect controlled polyimide tunnel cathode 缺陷控制聚酰亚胺隧道阴极的超高电子发射效率
A. Baba, T. Yoshida, T. Asano
In this paper, the ultra-high efficiency (38%) field electron emission was demonstrated from the defect-control polyimide tunnel cathode using the dc-voltage forming method. It was found that the ion irradiation condition of the polyimide film and the dc-forming condition are important to obtain ultra-high electron emission efficiency from the cathode.
本文采用直流电压成形的方法,证明了缺陷控制聚酰亚胺隧道阴极的超高场电子发射效率(38%)。研究发现,聚酰亚胺薄膜的离子辐照条件和直流形成条件对阴极获得超高的电子发射效率至关重要。
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引用次数: 0
Investigation of a planar microtriode fabricated with direct write nanolithography using electron beam induced deposition 电子束诱导沉积直接写入纳米光刻技术制备平面微三极管的研究
J. Sellmair, K. Edinger, H. Koops
A planar micro-triode with field emission cathode is investigated. The metal pattern for coarse and fine voltage feed lines, signal detection lines, and shielding patterns are designed by Computer Aided Design (CAD) and fabricated in 1 /spl mu/m technology. Electron optical performance and field distribution is calculated using numerical electron optics programs for structures in 1 /spl mu/m technology and 0.3 /spl mu/m technology. A silicon chip coated with thick silicon oxide is used as substrate material. The coarse metal pattern is fabricated using an optical contact printer and etching. The fine metal pattern is produced using electron beam lithography exposure and metal lift-off. Finer connecting lines and the field emitter tip as well as extractor structures are fabricated by direct write nanolithography with electron beam induced deposition (EBID). For deposition, a platinum containing precursor is used. Deposition is performed in an experimental mask repair system at very low energies and high placement precision. For prolonged lifetime an ion mirror is incorporated. Emission is observed using a scintillator-anode. Investigations are performed in an UHV system, as well as in high vacuum and in air. Measurements of currents from deposited emitters are performed in a triode arrangement using 3kV anode voltage, grounded extractors and -105 V as cathode potential. The emission current is recorded using a computer controlled recording system with msec resolution to monitor short term variations also in long term measurements. Emission currents of nA are observed without ion mirror in action over several days, and show variations up to 50% due to vacuum conditions.
研究了一种具有场发射阴极的平面微型三极管。粗细馈电线、信号检测线、屏蔽图案的金属图案采用计算机辅助设计(CAD)设计,以1 /spl μ m工艺制作。利用数值电子光学程序计算了1 /spl μ m和0.3 /spl μ m工艺结构的电子光学性能和场分布。硅片上涂有厚厚的氧化硅作为衬底材料。使用光学接触打印机和蚀刻制作粗金属图案。精细的金属图案是利用电子束光刻曝光和金属剥离产生的。采用电子束诱导沉积(EBID)的直接写入纳米光刻技术制备了更细的连接线和场发射极尖端以及提取器结构。沉积时,使用含铂前驱体。沉积是在一个实验性的掩膜修复系统中以非常低的能量和高的放置精度进行的。为了延长使用寿命,还结合了离子镜。发射是用闪烁阳极来观察的。调查在特高压系统中进行,也在高真空和空气中进行。测量来自沉积发射器的电流是在三极管布置中进行的,使用3kV阳极电压,接地提取器和-105 V作为阴极电位。发射电流是用计算机控制的记录系统记录的,具有微秒分辨率,以监测长期测量的短期变化。在没有离子镜作用的情况下观察nA的发射电流数天,并且由于真空条件而显示高达50%的变化。
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引用次数: 0
Pulsed laser deposition of lanthanum sulfide thin films on silicon and indium phosphide substrates: growth, characterization, and field emission properties 硫化镧薄膜在硅和磷化铟衬底上的脉冲激光沉积:生长、表征和场发射特性
M. Cahay, K. Garre, P. Draviam, P. Boolchand, S. Fairchild, J. Jones, X. Wu, D. Poitras, D. J. Lockwood, V. Semet, V. Binh
The growth, characterization, and field emission properties of pulsed laser deposition of lanthanum sulfide thin films on silicon and indium phosphide substrates were studied. X-ray diffraction analysis of fairly thick films (micrometer size) reveals the successful growth of the cubic rocksalt structure with a lattice constant of 5.863(7) angstroms, which is close to the bulk value. High resolution transmission electron microscope images of the films reveal that they are comprised of nanocrystals separated by regions of amorphous materials. Raman spectra and ellipsometry measurements were also performed. It was found that the work function deduced from Fowler-Nordheim plots at room temperature has a mean value of 0.65 eV. Also, a strong dependence of the field emission current with temperature was observed.
研究了脉冲激光在硅衬底和磷化铟衬底上沉积硫化镧薄膜的生长、表征和场发射特性。对相当厚的薄膜(微米尺寸)进行x射线衍射分析,成功生长出立方岩盐结构,晶格常数为5.863(7)埃,接近体积值。薄膜的高分辨率透射电子显微镜图像显示,它们是由非晶材料区域隔开的纳米晶体组成的。并进行了拉曼光谱和椭偏测量。在室温下,由Fowler-Nordheim图得到的功函数均值为0.65 eV。此外,还观察到场发射电流与温度有很强的相关性。
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引用次数: 0
New mechanism of cluster field evaporation in rf breakdown 射频击穿中簇场蒸发的新机制
Z. Insepov, J. Norem, A. Hassanein
The mechanism of "cold-emission" caused by high electric field gradients typical of future linacs is studied. The mechanism was studied by molecular dynamics (MD) simulation of a nanoscale copper tip on a surface of an rf-cavity electrode that is capable of revealing temperature effects. In this MD method, the equations of motion of interacting particles are solved numerically and appropriate initial and boundary conditions are applied. According to the results, the vacuum inside the high-gradient rf cavity should contain a noticeable presence of nanometer-size chunks that evaporated from various intrusions that exist on the real cavity surface by an rf field. A critical electrical evaporation field was obtained for temperatures that range from room up to the melting point of bulk Cu. The simulation results were compared with available data on FIM tip fracture in a dc electric field.
研究了未来直线电机典型的高电场梯度引起“冷发射”的机理。通过分子动力学(MD)模拟了能够揭示温度效应的射频腔电极表面的纳米级铜尖的机理。该方法对相互作用粒子的运动方程进行数值求解,并采用适当的初始条件和边界条件。根据结果,高梯度射频腔内的真空应包含明显存在的纳米级块,这些块是由存在于真实腔表面的各种侵入物通过射频场蒸发而成的。在从室温到大块铜熔点的温度范围内,得到了临界电蒸发场。并将模拟结果与已有的直流电场作用下薄膜薄膜尖端断裂数据进行了比较。
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引用次数: 19
Simulations of electronic transport in single-wall and multi-wall carbon nanotubes 单壁和多壁碳纳米管中电子输运的模拟
A. Mayer
We present simulations of electronic transport in single-wall and multi-wall carbon nanotubes, which are placed between two metallic contacts. The carbon atoms are represented by a local pseudopotential, and a transfer-matrix technique is used to solve the Schrodinger equation. Results show that electrons continuously propagate in the shell in which they are initially injected, with transfers to other tubes hardly exceeding one percent of the whole current even when micron-long distances are considered. The conductance and repartition of the current are traced to the band structure of the nanotube. These simulations thus show that provided one can prepare the electrons to enter a given shell of multi-wall nanotubes, it may be possible to use them as independent conduction channels.
我们模拟了单壁和多壁碳纳米管中的电子输运,它们被放置在两个金属触点之间。碳原子用局部伪势表示,用传递矩阵法求解薛定谔方程。结果表明,电子在它们最初被注入的壳层中持续传播,即使考虑到微米长的距离,转移到其他管的电流也几乎不超过整个电流的1%。电导和电流的再分配可以追溯到纳米管的能带结构。因此,这些模拟表明,只要能使电子进入给定的多壁纳米管壳层,就有可能将它们用作独立的传导通道。
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引用次数: 0
Reduction of the work function on Mo(100) surface covered with ZrO/sub 2/ ZrO/sub / 2/覆盖Mo(100)表面功函数的减小
H. Nakane, S. Satoh, H. Adachi
The work function of the Mo(100) surface has a relatively high value of 4.3 eV, it can be reduced to 2.1 eV by heating with slight layer of zirconium oxide. The field emission electrons are dominantly extracted from a (100) surface of a molybdenum sharp needle emitter.
Mo(100)表面的功函数值较高,为4.3 eV,稍加氧化锆层加热后可降至2.1 eV。场发射电子主要是从钼尖针发射器的(100)表面提取的。
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引用次数: 0
Development of counter-streaming multi-beam oscillator based on cold cathode 基于冷阴极的逆流多束振荡器的研制
Y. Shin, S.T. Han, S. Jeon, K. Jang, J. So, G. Park
We propose a novel oscillator, so called "Counter-Streaming Multi-Beam Oscillator (CSMBO)," using the interaction between two electron beams reversely traveling for high frequency application, particularly millimeter/sub-millimeter region. The basic idea of the device is that the electron beams traveling in the opposite direction can mutually interact with one another through coupled-cavity. The coupled-cavities in the oscillator are playing a role in not only giving rise to inherent feedback network but also combining the output power generated from the electron beams. Based on the new feedback mechanism, modified counter-streaming beam oscillators using multi-cavity or multi-beam to minimize the start-oscillation current and to enlarge the electronic efficiency are also challenged for terahertz application.
我们提出了一种新型振荡器,即所谓的“逆流多束振荡器(CSMBO)”,利用两束反向移动的电子束之间的相互作用,用于高频应用,特别是毫米/亚毫米区域。该装置的基本思想是,沿相反方向运动的电子束可以通过耦合腔相互作用。振荡器内的耦合腔不仅产生了固有的反馈网络,而且对电子束产生的输出功率进行了组合。基于新的反馈机制,利用多腔或多波束来减小启动振荡电流和提高电子效率的改进逆流电子束振荡器也面临着太赫兹应用的挑战。
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引用次数: 0
STM observations of hafnium carbide thin films as a field emission material 场发射材料碳化铪薄膜的STM观测
T. Sato, M. Saida, K. Horikawa, M. Nagao, S. Kanemaru, T. Matsukawa, J. Itoh, S. Yamamoto, M. Sasaki
We examine microscopic behaviors of work function and topography with scanning tunneling microscopy (STM). Hafnium carbide thin films were deposited on an n-type Si flat substrate by inductively coupled plasma (ICP) assisted magnetron sputtering at the argon pressure of 0.1 Pa. The surface of the films was cleaned by in-situ argon ion sputtering before STM observations. The ion current, duration and acceleration voltage were set at 3.0 /spl mu/A, 10 min, and 0.5 keV or 1.0 keV, respectively. The microscopic work function distribution was evaluated from the local tunneling barrier height (LBH) obtained with an STM apparatus. We adopted the tip-modulation method to evaluate LBH where we can obtain topograph and LBH images simultaneously. We also measured the macroscopic work function of these sample surfaces by a Kelvin probe. The work function of the 1.0 keV sputtered surface is 0.4 eV higher than that of the 0.5 keV sputtered surface.
我们用扫描隧道显微镜(STM)研究了功函数和形貌的微观行为。在0.1 Pa的氩气压力下,采用电感耦合等离子体(ICP)辅助磁控溅射技术在n型Si平面衬底上沉积了碳化铪薄膜。在STM观察之前,用原位氩离子溅射对薄膜表面进行了清洗。离子电流、持续时间和加速电压分别设定为3.0 /spl mu/A、10 min和0.5 keV或1.0 keV。利用STM装置获得的局部隧道势垒高度(LBH)计算了微观功函数分布。我们采用尖端调制方法来评估LBH,可以同时获得地形和LBH图像。我们还用开尔文探针测量了这些样品表面的宏观功函数。1.0 keV溅射表面的功函数比0.5 keV溅射表面的功高0.4 eV。
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引用次数: 0
Fabrication and field emission characteristics of high density carbon nanotubes microarrays 高密度碳纳米管微阵列的制备及其场发射特性
C. Chuang, J.H. Huang, C. Lee, Y. Chang
High density carbon nanotube field emitter arrays (CNT-FEA) in both triode and diode structures on Si were fabricated. The carbon nanotubes were synthesized using a microwave-heated CVD process. The emission image of a diode-type CNT-FEA demonstrated a brightness of /spl sim/1800 cd/m/sup 2/ and a homogeneous emission quality. The cross-sectional SEM image of a triode-type emitter showed that CNTs in triode structures were shorter and less dense than CNTs in the diode-type emitters, though almost identical growth conditions of CNTs were utilized. The rough surface morphology of the emitter zone indicated the formation of chromium-silicide that could enhance the conductivity of Si substrates. Emission characteristics of the triode CNT-FEA showed that with a 1-/spl mu/m SiO/sub 2/ as the spacer, very low operating voltage could be applied to the gate. Therefore, high density CNT field emitter arrays with low turn-on voltage and large emission current were successfully fabricated.
在硅基上制备了三极管和二极管结构的高密度碳纳米管场发射极阵列(CNT-FEA)。采用微波加热CVD工艺合成了碳纳米管。二极管型碳纳米管有限元分析的发射图像显示亮度为/spl sim/1800 cd/m/sup /,发射质量均匀。三极管型发射极的SEM横截面图显示,尽管采用了几乎相同的生长条件,但三极管结构中的碳纳米管比二极管型发射极中的碳纳米管更短,密度更低。发射极区的粗糙表面形貌表明硅化铬的形成可以增强硅衬底的导电性。三极管的发射特性表明,以1-/spl μ m SiO/sub - 2/作为间隔片,栅极可以施加极低的工作电压。因此,成功地制备了具有低导通电压和大发射电流的高密度碳纳米管场发射极阵列。
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引用次数: 7
In-situ post-treatment for field emission improvement of carbon nanofibers in inductively coupled plasma system 电感耦合等离子体系统中碳纳米纤维场发射改善的原位后处理
C. Weng, Y.Y. Lin, C. Tung, H. Wei, K. Leou, C. Tsai
Here we investigate in situ post-treatment of carbon nanofibers in inductively coupled plasma system for field emission improvements. The nanofibers were characterized using SEM, TEM, energy dispersive spectroscopy, micro-Raman spectroscopy and various FE measurements including typical emission current density-electric field (J-E) curves, large-area uniformity of luminance, and long-time stability of emission currents. Certain structural transformations were observed and significantly enhanced FE was achieved. The mechanism of the structural transformations and the corresponding FE enhancement were also investigated.
本文研究了碳纳米纤维在电感耦合等离子体系统中的原位后处理,以改善场发射。利用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、能量色散光谱(energy色散光谱)、微拉曼光谱(microraman spectroscopy)以及典型的发射电流密度-电场(J-E)曲线、大面积发光均匀性和发射电流长时间稳定性对纳米纤维进行了表征。观察到一定的结构转变,显著提高了FE。并对结构转变的机理和相应的有限元强化进行了研究。
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引用次数: 0
期刊
Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)
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