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Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)最新文献

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Electric field induced alignment of carbon nanotubes grown by CVD CVD法生长碳纳米管的电场诱导排列
A. Obraztsov, A. Zolotukhin, A. Volkov, V.V. Rodaatis, A. Chakhovskoi
In this report, results of the experiments devoted to developing of the method for controllable growth of CNT aligned in different directions were presented. For this purpose the usual setup for CVD was modified to provide shielding of the substrate from electric field existing between the cathode and the anode when the high voltage is applied to activate dc discharge. A mesh mask is used as the electrostatic shield. Similar to the standard CVD process, generation of C/sub 2/ species occurs in the plasma, and then these species are deposited on the substrate surface via the holes in the mask. With appropriate conditions, CNT growth was obtained on various substrates (Ni plate, quartz substrate patterned with Ni thin film stripes). An application of bias voltage between the Ni stripes allows for the partial alignment of CNT along the direction of the electric field between the stripes. This result confirms a possibility to achieve controllable growth of the CNTs.
本文介绍了不同方向排列碳纳米管可控生长方法的实验结果。为此,对CVD通常的设置进行了修改,以便在施加高压激活直流放电时,对阴极和阳极之间存在的电场提供衬底的屏蔽。静电屏蔽采用网状口罩。与标准CVD工艺类似,在等离子体中产生C/亚2/物质,然后这些物质通过掩膜中的孔沉积在衬底表面。在适当的条件下,碳纳米管可以在不同的衬底上生长(Ni板、带有Ni薄膜条纹的石英衬底)。在Ni条纹之间施加偏置电压可以使碳纳米管沿条纹之间电场的方向部分对齐。这一结果证实了实现碳纳米管可控生长的可能性。
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引用次数: 0
Numerical analysis of carbon nanotube field emitter arrays with embedded electron beam focusing structure 嵌入式电子束聚焦结构碳纳米管场发射阵列的数值分析
Pi Jun, H. Uh, Byungkwan Kwak, Hyung Wook Noh, S. Park, Sungwook Ko, E. Cho, J. Lee
A new structure of triode-type carbon nanotube-field emitter arrays (CNT-FEAs) is proposed whose extraction gate is surrounded by CNT emitters. 3-dimensional numerical calculations of electrostatic potential for the proposed CNT-FEA was carried out using the finite element method and the results were compare with those of conventional CNT-FEAs.
提出了一种新的三极管型碳纳米管场发射极阵列(CNT- feas)结构,其提取栅被碳纳米管发射极包围。采用有限元法对所提出的碳纳米管有限元进行了静电势的三维数值计算,并与传统碳纳米管有限元的结果进行了比较。
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引用次数: 0
A novel light emitting device based on Si nanostructures and tunneling injection of carriers 一种基于硅纳米结构和载流子隧穿注入的新型发光器件
H. Wong, V. Filip, P. Chu
Silicon was not used for light emitting devices (LEDs) as it is an indirect bandgap material and has very low radiative recombination rate and short photon lifetime. This fundamental material property limitation has been overcome. Recent efforts have demonstrated that the light emitting efficiency can be enhanced greatly and lasing effect is also possible with the low-dimensional (LD) silicon materials. In this work, a novel light- emitting device structure based on Si/SiO/sub 2//LD Si/Si/sub 3/N/sub 4//Si system is proposed. The low-dimensional Si governed the photon generation efficiency and energy spectrum whereas the asymmetry barrier heights formed by the SiO/sub 2/ and Si/sub 3/N/sub 4/ provide high efficiency carrier injection based on direct tunneling and maximizes the recombination events taking place in the LD Si region. Quantum calculations on the charge transports, including the direct tunneling carrier injection at the Si/SiO/sub 2/ interface and band-to-band recombination of in the LD Si, were conducted.
硅没有用于发光器件(led),因为它是一种间接带隙材料,具有非常低的辐射复合率和很短的光子寿命。这个基本的材料性能限制已经被克服了。近年来的研究表明,低维硅材料可以大大提高发光效率,也可以实现激光效应。本文提出了一种基于Si/SiO/sub 2//LD、Si/Si/sub 3/N/sub 4//Si体系的新型发光器件结构。低维Si控制了光子产生效率和能谱,而SiO/sub 2/和Si/sub 3/N/sub 4/形成的不对称势垒高度提供了基于直接隧穿的高效载流子注入,并最大化了发生在LD Si区域的复合事件。对Si/SiO/sub - 2/界面处的直接隧道载流子注入和LD Si的带间复合等电荷输运进行了量子计算。
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引用次数: 2
Screen printed carbon nanotube field emitter array for lighting source application 用于照明光源的丝网印刷碳纳米管场发射阵列
Jae-Hong Park, J. Moon, Jae-Hee Han, A. Berdinsky, J. Yoo, J. Nam, J. Park, C.G. Lee, D. Choi, Byeong Kyoo Shon, H. Chung, S. Kwon
Photosensitive carbon nanotube (CNT) paste was synthesized with spin on glass (SOG) as inorganic binder. The field emission characteristics of this CNT paste was studied. CNT field emitter arrays (FEAs) was then fabricated using screen-printing method, photolithography and vacuum-in-line sealing technology. It is concluded that the diode type FEA using CNT paste with SOG can be used for lighting system applications such as the back light unit in TFT-LCD.
以玻璃自旋(SOG)为无机粘结剂合成了光敏碳纳米管(CNT)浆料。研究了该碳纳米管浆料的场发射特性。采用丝网印刷、光刻和真空在线密封技术制备了碳纳米管场发射极阵列。结果表明,采用碳纳米管粘贴SOG的二极管型有限元分析可用于TFT-LCD背光单元等照明系统应用。
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引用次数: 37
Pressure dependence and current stability of field emission from carbon nanotubes on porous alumina 多孔氧化铝上碳纳米管场发射的压力依赖性和电流稳定性
D. Lysenkov, G. Muller, J. Engstler, J. J. Schneider
Carbon nanotubes are synthesized by CVD using source precursors of metallocene related structures both on commercial and home made electrochemically etched porous alumina membranes of different thickness (60-200 /spl mu/m) and pore diameter (50-200 nm). AFM, SEM, EDX and TEM investigations showed that the tubular structures formed within the pores of the alumina membranes are composed of pyrolytic carbon in which nanoscaled metallic particles are incorporated. Long-term processing effects in the pressure range resulted in both irreversible degradation and reversible activation of some emitters.
利用茂金属相关结构的源前驱体,在不同厚度(60-200 /spl μ m)和孔径(50-200 nm)的电化学蚀刻多孔氧化铝膜上,采用气相沉积法制备了碳纳米管。原子力显微镜(AFM)、扫描电镜(SEM)、电子能谱(EDX)和透射电镜(TEM)研究表明,氧化铝膜孔内形成的管状结构是由热解碳组成的,其中含有纳米级金属颗粒。在压力范围内的长期处理效应导致一些发射器的不可逆降解和可逆活化。
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引用次数: 1
Low temperature burnable CNT paste component for CNT-field emitter backlight unit 低温可燃碳纳米管粘贴组件,用于碳纳米管场发射器背光装置
Sora Lee, D. Jeon
New component of CNT paste is explored to develop a carbon nanotube field emitter backlight unit (CNT-FE BLU) by screen printing method. To reduce the remnant of organic binder materials on the surface of SWCNT, P(MMA-co-BMA) random block copolymer as the new binder materials is developed. The weight of the remnant materials after burning process at 350/spl deg/C was measured by TGA. The measured field emission property demonstrated that the developed P(MMA-co-BMA) was effective to reduce the remnant on surface of CNT, which is critically important for improving the field emission property of CNT-FE BLU fabricated by screen printing method.
探索了碳纳米管浆料的新组分,采用丝网印刷方法制备了碳纳米管场发射体背光单元(CNT- fe BLU)。为了减少有机粘结材料在swcnts表面的残留,开发了P(MMA-co-BMA)无规嵌段共聚物作为新型粘结材料。用热重分析仪测定了在350/spl℃下燃烧后残余材料的重量。场发射性能测试表明,所制备的P(MMA-co-BMA)能有效减少碳纳米管表面的残留物,这对提高网印法制备的碳纳米管- fe BLU的场发射性能至关重要。
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引用次数: 0
Robust and regenerable integrally gated carbon nanotube field emitter arrays 鲁棒可再生集成门控碳纳米管场发射阵列
D. Hsu, J. Shaw
Multiwalled carbon nanotubes (cNTs) in both the gated cNT-on-Si post and the cNT-in-open configurations were used in this study. Large increases in field emission current were observed when operating cNTs in substantial pressures of hydrogen, especially after the nanotubes have been contaminated with oxygen. Emission degradation was likely due to surface contamination with oxygen and was removed by reaction with hydrogen (atoms). Exposure of the emitters to molecular hydrogen or oxygen when the arrays are not emitting has no effect on the emission produced once the gases are removed, suggesting that the nanotubes are inert to the molecular forms of hydrogen and oxygen and that the atomic forms, which are created by electron dissociation, react with surface groups. The requirement for relatively high pressures of hydrogen also suggests that atomic hydrogen was responsible for the large enhancement and regeneration effects. The ability to regenerate emission from contaminated cNT can prolong emitter device lifetimes and save cost.
多壁碳纳米管(cNTs)在门控碳纳米管-硅柱和碳纳米管-开放结构中都被用于这项研究。当碳纳米管在氢气压力下工作时,特别是在碳纳米管被氧气污染后,可以观察到场发射电流的大幅增加。排放物降解很可能是由于表面被氧污染,并通过与氢原子反应而被去除。当阵列不发射时,将发射器暴露在氢分子或氧分子中,对气体移除后产生的发射没有影响,这表明纳米管对氢和氧的分子形式是惰性的,而由电子解离产生的原子形式与表面基团发生反应。对相对高压的氢的要求也表明原子氢是造成大的增强和再生效果的原因。从受污染的碳纳米管中再生辐射的能力可以延长发射极器件的使用寿命并节省成本。
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引用次数: 12
Emission characteristics of printed CNT cathodes after laser treatment 激光处理后碳纳米管阴极的发射特性
A. Hosono, T. Shiroishi, F. Abe, Z. Shen, S. Nakata, S. Okuda
The printed carbon nanotubes (CNTs) on the substrate were stood erect by the laser treatment and they worked as emission sites. The emission characteristics was improved drastically by the laser treatment up to the turn-on voltage 2 V//spl mu/m and the current density 4 mA/cm/sup 2/, approximately. A certain level of height of CNT (approximately 3 /spl mu/m) is necessary to lower the turn-on voltage and reduce emission variation effectively.
通过激光处理,将打印出来的碳纳米管竖立在衬底上,作为发射点。在导通电压为2 V//spl μ m,电流密度约为4 mA/cm/sup 2/时,激光处理大大改善了材料的发射特性。为了有效降低导通电压和减小发射变化,需要一定的碳纳米管高度(约3 /spl mu/m)。
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引用次数: 2
Triode emitters with well-structure cathode 结构良好的阴极三极管发射体
Sungil Bae, K. Park, Soonil Lee, K. Koh
The suppression of gate current was realized by introducing an extra conducting layer between gate-insulators and cathode layers. A new type of triode emitters were fabricated, in which carbon emitter layers were positioned at the central part of the well bottom formed in silicon well structures. The silicon well structure was formed using reactive ion etching (RIE). Because of the favorable field distribution using heavily doped /spl eta/-type silicon, we were able to suppress the gate current almost completely.
栅极电流的抑制是通过在栅极绝缘体和阴极层之间引入额外的导电层来实现的。制备了一种新型的三极管发射体,将碳发射体层置于硅井结构中形成的井底中央。采用反应离子刻蚀法(RIE)形成硅井结构。由于使用大量掺杂/spl的eta/型硅的有利场分布,我们能够几乎完全抑制栅极电流。
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引用次数: 0
Observation of electron emission pattern from nano-split emitter fabricated using beam assisted process 束辅助工艺制备纳米分裂发射极的电子发射模式观察
K. Murakami, N. Yamasaki, S. Abo, F. Wakaya, M. Takai
The possibility of interference of electrons from a nano-split emitter fabricated using beam assisted processes has been investigated. With the gap size of 16 nm, the emission pattern with two spots was observed at a gate voltage close to the turn-on voltage. At the higher gate voltages, two spots become overlapped but no interference fringes were observed at room temperature.
研究了用光束辅助工艺制备的纳米劈裂发射极中电子干扰的可能性。当间隙尺寸为16 nm时,在接近导通电压的栅极电压下观察到两个光斑的发射模式。在较高的栅极电压下,两个光斑重叠,但在室温下没有观察到干涉条纹。
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引用次数: 5
期刊
Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)
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