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High current density nanofilament cathodes for microwave amplifiers 微波放大器用高电流密度纳米丝阴极
J. Schnell, E. Minoux, L. Gangloff, P. Vincent, P. Legagneux, D. Dieurnegard, J. David, F. Peauger, L. Hudanski, K. Teo, R. Lacerda, M. Chhowalla, D. Hasko, H. Ahmed, G. Amaratunga, W. Milne, L. Vila, L. Dauginet-De Pra, S. Demoustier‐Champagne, E. Ferain, R. Legras, L. Piraux, O. Groening, H. De Raedt, K. Michielsen
We study high current density nanofilament cathodes for microwave amplifiers. Two different types of aligned nanofilament array have been studied: first, metallic nanowires grown by electrodeposition into nanoporous templates at very low temperature (T<100/spl deg/C) on a silicon wafer; second, carbon nanotubes/nanofibers (CNs) grown by catalytic plasma enhanced chemical vapour deposition. The fabrication process and the field emission properties of these two types of cathodes will be presented. Presently, the best results are obtained with CN cathodes. Arrays of 5.8 /spl mu/m height and 50 nm diameter CNs exhibit geometrical enhancement factor (h/r) of 240/spl plusmn/7.5%. Moreover, currents close to 100 /spl mu/A per emitter have been measured using a scanning anode field emission microscope. Due to these properties, 0.5 /spl times/ 0.5 mm/sup 2/ arrays emit a 2 mA current corresponding to 0.8 A/cm/sup 2/, in DC mode. The use of these cold cathodes in microwave triodes delivering 10 to 50 W at 30 GHz will be discussed for future telecommunication applications.
研究了用于微波放大器的高电流密度纳米丝阴极。研究了两种不同类型的排列纳米丝阵列:第一种是在极低温度(T<100/spl℃)下在硅片上电沉积成纳米孔模板的金属纳米线;第二,利用催化等离子体增强化学气相沉积法生长碳纳米管/纳米纤维(CNs)。介绍了这两种阴极的制备工艺和场发射性能。目前,用CN阴极获得了最好的效果。5.8 /spl mu/m高和50 nm直径的cnns阵列几何增强因子(h/r)为240/spl + usmn/7.5%。此外,使用扫描阳极场发射显微镜测量了每个发射极接近100 /spl mu/A的电流。由于这些特性,0.5 /spl倍/ 0.5 mm/sup 2/阵列在直流模式下发出2 mA电流,对应于0.8 a /cm/sup 2/。在未来的电信应用中,将讨论在30 GHz下提供10至50 W的微波三极管中使用这些冷阴极。
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引用次数: 2
Synthesis and field emission properties of carbon nanosheets 碳纳米片的合成及其场发射性能
Jianjun Wang, M. Zhu, R. Outlaw, Xin Zhao, D. Manos, B. Holloway, V. Mammana, M. Ray, J. Dalton
A nanometer edged two-dimensional graphite structure, carbon nanosheet, was synthesized by inductively coupled radio-frequency plasma enhanced chemical vapour deposition on a variety of substrates, including metals, semiconductors and insulators. The carbon nanosheets were characterized by scanning electron microscopy, high resolution transmission electron microscopy and Raman spectroscopy. Edges of nanosheets had a uniform thickness of about 1 nm. Typical nanosheets consisted of only a few atomic layers and had a graphitic structure. The high density of atomic scale vertical graphitic edges are potential sites for electron field emission. The carbon nanosheets had a turn-on (threshold 10/spl mu/A/cm/sup 2/) field of about 5 V//spl mu/m and a metallic behavior based on a linear Fowler-Nordheim plot. This sheet-like carbon nanostructure is expected to be a robust edge emitter.
采用电感耦合射频等离子体增强化学气相沉积技术,在金属、半导体和绝缘体等多种衬底上合成了一种纳米边缘二维石墨结构——碳纳米片。采用扫描电镜、高分辨率透射电镜和拉曼光谱对碳纳米片进行了表征。纳米片的边缘厚度均匀,约为1 nm。典型的纳米片仅由几个原子层组成,具有石墨结构。高密度的原子尺度垂直石墨边缘是电子场发射的潜在位点。碳纳米片具有约5 V//spl mu/ a /cm/sup 2/的导通(阈值10/spl mu/ a /cm/sup 2/)场和基于线性Fowler-Nordheim图的金属行为。这种片状碳纳米结构有望成为坚固的边缘发射器。
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引用次数: 0
Multilayer planar nanostructured SSE cathodes 多层平面纳米结构SSE阴极
V. Semet, V. Binh, J.P. Zhang, J. Yang, M.A. Khan, R. Tsu
Multilayer planar nanostructured solid-state field-controlled emission (SSE) are studied. SSE is an approach to control the effective surface barrier for electron emission by monitoring the space charge value of an ultra-thin layer at the surface, or in other terms to lower the effective surface barrier by modifying the electronic properties of the underneath surface layer. A 0.15 /spl mu/m-thick Si-doped AlGaN layer with Al-content graded from 40% to 15% was deposited on a SiC substrate. It served as the conducting buffer layer. The finished surface was characterized to be atomically smooth by atomic force microscope. The I-V measurements were performed with a scanning anode field emission microscope (SAFEM). Two mechanisms were found to be present, first is tunneling field emission through a lowering work function. The electrons are emitted by a field emission mechanism from the quantized sub-bands inside the GaN quantum well, given a current density J/sub FN/. The second mechanism occurs for elevated temperatures, i.e. k/sub B/T > 0.8 eV, when hot electrons can jump over the first barrier located between the conductive substrate and the Al/sub 0.5/Ga/sub 0.5/N ultra-thin layer. As the second barrier at the surface is lower (less than 0.5 eV due to space charge) these electrons will emit directly. This first barrier controls the variation of the emitted current J/sub TH/ with temperature. In this dual-barrier model, the measured total emission current, J/sub mes/, will be the sum of both contributions, J/sub mes/ = J/sub FN/ + J/sub TH/.
研究了多层平面纳米结构固体场控发射(SSE)。SSE是通过监测表面超薄层的空间电荷值来控制电子发射的有效表面势垒,或者通过改变下表层的电子性质来降低有效表面势垒。在SiC衬底上沉积了一层厚度为0.15 /spl mu/m的掺硅AlGaN层,al含量为40% ~ 15%。它起到导电缓冲层的作用。利用原子力显微镜对加工后的表面进行了原子光滑的表征。使用扫描阳极场发射显微镜(SAFEM)进行I-V测量。发现存在两种机制,第一种是通过降低功函数来隧穿场发射。给定电流密度J/sub FN/,电子通过场发射机制从GaN量子阱内部的量子化子带发射。第二种机制发生在温度升高时,即k/sub B/T > 0.8 eV,此时热电子可以跳过位于导电衬底和Al/sub 0.5/Ga/sub 0.5/N超薄层之间的第一个势垒。由于表面的第二势垒较低(由于空间电荷小于0.5 eV),这些电子将直接发射。这第一个势垒控制发射电流J/sub TH/随温度的变化。在这个双势垒模型中,测量的总发射电流J/sub mes/将是两个贡献的总和,J/sub mes/ = J/sub FN/ + J/sub TH/。
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引用次数: 0
Nonlinear dielectric properties of Ba(Ti,Zr)O/sub 3/ thin films for tunable microwave device applications Ba(Ti,Zr)O/sub 3/薄膜的非线性介电特性
X. Tang, L. Chan
Nano-structured barium zirconate titanate Ba(Ti/sub 1-x/Zr/sub x/)O/sub 3/ (BTZ, x=0.20, 0.25,0.30 and 0.35, abbreviated as BTZ20, BTZ25, BTZ30, and BTZ35, respectively) thin films on Pt/Ti/SiO/sub 2//Si(100) substrates have been prepared by pulse laser deposition (PLD) using a KrF Excimer Laser, lambda Physik Complex (/spl lambda/= 248 nm, 650 mJ, 25 ns). The targets are BTZ20, BTZ25, BTZ30 and BTZ35. The films were deposited at a laser repetition rate of 10 Hz and pulse laser energy of 300 mJ. The deposition rate was 20 nm/min. The oxygen pressure was an important factor and was kept 200 mTorr. Finally, the thin films were crystallized in situ at 650/spl deg/C in 400 mTorr of oxygen for 20 min and cooled down slowly to room temperature. The thin films were characterized using XRD and SEM. Dielectric measurements revealed that the thin films a relaxor behavior and have a diffuse phase transition when the Zr content of x increased from 0.20 to 0.35. The tunability decreased and figure of merit increased when the Zr content of x increased from 0.20 to 0.35, respectively for BTZ the thin films. Both of BTZ thin films with Zr content of 0.30 and 0.35 have low dielectric constant and high figure of merit. Therefore, the BTZ thin film is an attractive candidate for microwave tunable device applications.
利用KrF准分子激光,λ Physik配合物(/spl λ /= 248 nm, 650 mJ, 25 ns),采用脉冲激光沉积(PLD)技术在Pt/Ti/SiO/sub 2//Si(100)衬底上制备了纳米结构的锆钛酸钡Ba(Ti/sub 1-x/Zr/sub x/)O/sub 3/ (BTZ, x=0.20, 0.25,0.30和0.35,分别简称为BTZ20, BTZ25, BTZ30和BTZ35)薄膜。目标是BTZ20、BTZ25、BTZ30和BTZ35。激光重复频率为10 Hz,脉冲激光能量为300 mJ。沉积速率为20 nm/min。氧压是一个重要因素,维持在200 mTorr。最后,薄膜在650/spl℃、400 mTorr的氧气条件下原位结晶20 min,缓慢冷却至室温。采用XRD和SEM对薄膜进行了表征。电介质测量结果表明,当Zr含量从0.20增加到0.35时,薄膜具有弛豫特性,并发生扩散相变。当x的Zr含量从0.20增加到0.35时,BTZ薄膜的可调性降低,优值增加。Zr含量为0.30和0.35的BTZ薄膜具有低介电常数和高品质系数。因此,BTZ薄膜是微波可调谐器件应用的一个有吸引力的候选者。
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引用次数: 0
Growth of gold nanowires by dielectrophoresis for field-emission display applications 用介质电泳法生长用于场发射显示的金纳米线
D. Garner, N.Z. Mohd Zamin
In the reported work, gold nanowires have been grown between two coplanar electrodes on an insulating substrate, with the resulting gold nanowires lying along the insulating substrate. It was found that there was a complicated relationship between the dielectrophoresis (DEP) parameters (AC supply voltage and frequency, electrolyte and colloid concentration) and the shape and growth rate of the resulting wires. These were optimised to give slower growth rates such that shorter, sturdier wires could be formed which did not collapse on washing and drying of the sample. Despite the high aspect ratio of the wires, field-emission characteristics were not encouraging, the wires displaying an emission current of 1 /spl mu/A/cm/sup 2/ at macroscopic electric fields ranging between 20 to 100 V//spl mu/m, depending upon the sample tested.
在报道的工作中,金纳米线在绝缘衬底上的两个共面电极之间生长,所得的金纳米线沿着绝缘衬底生长。结果表明,双向电泳(DEP)参数(交流电源电压和频率、电解质和胶体浓度)与所得线的形状和生长速度之间存在复杂的关系。这些被优化以提供较慢的生长速率,这样就可以形成更短、更坚固的金属丝,在洗涤和干燥样品时不会崩溃。尽管电线的宽高比很高,但场发射特性并不令人鼓舞,根据测试样品的不同,在20至100 V//spl mu/m的宏观电场范围内,电线的发射电流为1 /spl mu/A/cm/sup 2/。
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引用次数: 0
Field emission of clean and oxidized Mo<110> microtips 清洁氧化Mo微针尖的场发射
X. Zhao, R. Outlaw, R. Champion, J.J. Wang, D. Manos, B. Holloway
In this paper, measurements of field emission taken on a molybdenum<110> microtip under ultrahigh vacuum conditions and as a function of oxygen exposure were reported. Auger electron spectroscopy (AES) was used to examine the clean and oxygen saturated surface of the Mo surface and the peak-to-peak ratio of O (KLL) to Mo (LMM) as a function of oxygen exposure.
本文报道了在超高真空条件下钼微针尖上的场发射及其与氧暴露的关系。利用俄歇电子能谱(AES)研究了Mo表面的清洁和氧饱和表面,以及O (KLL)与Mo (LMM)的峰峰比与氧暴露的关系。
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引用次数: 0
Usefulness of nanocrystalline silicon ballistic emitter for operation in either low-vacuum or atmospheric pressure 在低真空或常压下工作的纳米晶硅弹道发射极的实用性
N. Koshida, A. Kojima, T. Ichihara, T. Komoda
The nc-Si emitter operates as a ballistic cold cathode in low vacuum and as a negative ion source in atmospheric pressure. This usefulness is consistent with the ballistic emission model that energetic electrons are generated in nc-Si chains interconnected via thin oxides. The present result indicates further potential of this emitter for various applications in a wide range of pressure and gas ambient.
纳米硅发射极在低真空条件下作为弹道冷阴极,在常压条件下作为负离子源。这种有用性与弹道发射模型是一致的,即高能电子是在通过薄氧化物连接的nc-Si链中产生的。目前的结果表明,该发射器在各种压力和气体环境中的应用具有进一步的潜力。
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引用次数: 0
Edge-shaped diamond field emission arrays 边形金刚石场发射阵列
R. Takalkar, J. Davidson, W. Kang, A. Wisitsora-at, D. Kerns
The fabrication and field emission behavior of micro-patterned polycrystalline edge-shaped diamond field emission arrays is reported. The edge-shaped diamond field emission arrays were fabricated on a silicon substrate utilizing conventional silicon patterning and etching techniques, and CVD diamond deposition via a mold transferring technique. The mold was filled with diamond using a PECVD process. The silicon was back etched to expose the diamond edges. Edge sharpening was achieved by introducing a silicon oxidation step in the mold fabrication process before the diamond deposition step. The oxide grown was /spl sim/3/spl mu/m thick. This oxidation process not only sharpened the edge but also served as a gate dielectric for the triode device. Each edge was 125/spl mu/m in length and 2/spl mu/m in width. The deposited diamond film was characterized using Raman spectroscopy. The fabricated diamond edge emitter arrays were tested in vacuum (10/sup -6/ Torr). A self-aligned gated edge emitter triode from a silicon-on-insulator (SOI) substrate was also fabricated.
报道了微图像化多晶边形金刚石场发射阵列的制备及其场发射性能。利用传统的硅图案化和蚀刻技术在硅衬底上制备了边缘形金刚石场发射阵列,并通过模具转移技术制备了CVD金刚石沉积。模具是用PECVD工艺填充金刚石。硅被反向蚀刻,露出钻石的边缘。在金刚石沉积步骤之前,通过在模具制造过程中引入硅氧化步骤来实现边缘锐化。所生长的氧化物厚度为/ sp1 μ m/3/ sp1 μ m/ m。这种氧化过程不仅使边缘锐化,而且还作为三极管器件的栅极电介质。每个边长125/亩/米,宽2/亩/米。利用拉曼光谱对沉积的金刚石膜进行了表征。在真空(10/sup -6/ Torr)条件下对制备的金刚石边缘发射极阵列进行了测试。在绝缘体上硅(SOI)衬底上制备了自对准门控边缘发射极三极管。
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引用次数: 8
Screen printed carbon nanotube field emitter array for lighting source application 用于照明光源的丝网印刷碳纳米管场发射阵列
Jae-Hong Park, J. Moon, Jae-Hee Han, A. Berdinsky, J. Yoo, J. Nam, J. Park, C.G. Lee, D. Choi, Byeong Kyoo Shon, H. Chung, S. Kwon
Photosensitive carbon nanotube (CNT) paste was synthesized with spin on glass (SOG) as inorganic binder. The field emission characteristics of this CNT paste was studied. CNT field emitter arrays (FEAs) was then fabricated using screen-printing method, photolithography and vacuum-in-line sealing technology. It is concluded that the diode type FEA using CNT paste with SOG can be used for lighting system applications such as the back light unit in TFT-LCD.
以玻璃自旋(SOG)为无机粘结剂合成了光敏碳纳米管(CNT)浆料。研究了该碳纳米管浆料的场发射特性。采用丝网印刷、光刻和真空在线密封技术制备了碳纳米管场发射极阵列。结果表明,采用碳纳米管粘贴SOG的二极管型有限元分析可用于TFT-LCD背光单元等照明系统应用。
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引用次数: 37
Numerical analysis of carbon nanotube field emitter arrays with embedded electron beam focusing structure 嵌入式电子束聚焦结构碳纳米管场发射阵列的数值分析
Pi Jun, H. Uh, Byungkwan Kwak, Hyung Wook Noh, S. Park, Sungwook Ko, E. Cho, J. Lee
A new structure of triode-type carbon nanotube-field emitter arrays (CNT-FEAs) is proposed whose extraction gate is surrounded by CNT emitters. 3-dimensional numerical calculations of electrostatic potential for the proposed CNT-FEA was carried out using the finite element method and the results were compare with those of conventional CNT-FEAs.
提出了一种新的三极管型碳纳米管场发射极阵列(CNT- feas)结构,其提取栅被碳纳米管发射极包围。采用有限元法对所提出的碳纳米管有限元进行了静电势的三维数值计算,并与传统碳纳米管有限元的结果进行了比较。
{"title":"Numerical analysis of carbon nanotube field emitter arrays with embedded electron beam focusing structure","authors":"Pi Jun, H. Uh, Byungkwan Kwak, Hyung Wook Noh, S. Park, Sungwook Ko, E. Cho, J. Lee","doi":"10.1109/IVNC.2004.1354912","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354912","url":null,"abstract":"A new structure of triode-type carbon nanotube-field emitter arrays (CNT-FEAs) is proposed whose extraction gate is surrounded by CNT emitters. 3-dimensional numerical calculations of electrostatic potential for the proposed CNT-FEA was carried out using the finite element method and the results were compare with those of conventional CNT-FEAs.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129877486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)
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