Pub Date : 2017-10-20DOI: 10.1504/IJNM.2017.10008413
Ya Li, Alamusi, S. Dong, Jinghe Wang, Haidong Liu
Surface topography of cancer cell is particularly vital since cell frequently changes its shape as interacting with neighbouring cells and extracellular matrix. Atomic force microscope (AFM) has an extraordinary superiority in surface scanning of cells but the scanning consequence depends upon experiment conditions or experience primarily. In our study, a quadratic regression orthogonal rotation combination design was operated to acquire optimal parameters for cell profiling via AFM. By iterative calculation, the optimum AFM scanning of cell can be accomplished at setpoint of 0.61 V, scanning rate of 2.23 Hz and proportional gain of 3.85. Satisfactory surface morphology images of human bronchial epithelium BEAS-2B and pulmonary adenocarcinoma cell A549 were acquired at this calculated scanning condition, in which the details of surface coarse particle and cell junction structure are visible. This emerging insight into cell profiling may encourage the understanding of the underlying mechanism for cellular inner reconstruction during cell migration.
{"title":"AFM-based imaging conditions optimisation of cell topography","authors":"Ya Li, Alamusi, S. Dong, Jinghe Wang, Haidong Liu","doi":"10.1504/IJNM.2017.10008413","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10008413","url":null,"abstract":"Surface topography of cancer cell is particularly vital since cell frequently changes its shape as interacting with neighbouring cells and extracellular matrix. Atomic force microscope (AFM) has an extraordinary superiority in surface scanning of cells but the scanning consequence depends upon experiment conditions or experience primarily. In our study, a quadratic regression orthogonal rotation combination design was operated to acquire optimal parameters for cell profiling via AFM. By iterative calculation, the optimum AFM scanning of cell can be accomplished at setpoint of 0.61 V, scanning rate of 2.23 Hz and proportional gain of 3.85. Satisfactory surface morphology images of human bronchial epithelium BEAS-2B and pulmonary adenocarcinoma cell A549 were acquired at this calculated scanning condition, in which the details of surface coarse particle and cell junction structure are visible. This emerging insight into cell profiling may encourage the understanding of the underlying mechanism for cellular inner reconstruction during cell migration.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"341"},"PeriodicalIF":0.0,"publicationDate":"2017-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45778564","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-10-20DOI: 10.1504/IJNM.2017.10008406
H. He, Zuoli He, Q. Shen
ZnO films doped with Nd contents of 0%-0.81% were deposited by a chemical solution deposition and characterised by X-ray diffraction, field emission scanning electron microscopy, UV-vis and luminescent spectrophotometry and electrical measurement. The experiments revealed that the films have nano-scale particle size that increased with increasing Nd content. The Nd doping resulted in the obvious variations of transmittance in the UV-visible light range, the band gap and resistivity. Thin film showed an optimal optical and electrical properties at Nd content of 0.42%. The films also showed a strong band gap emission and a very weak emission related to intrinsic defect.
{"title":"Optical and electrical properties of Nd-doped ZnO films prepared by sol-gel method","authors":"H. He, Zuoli He, Q. Shen","doi":"10.1504/IJNM.2017.10008406","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10008406","url":null,"abstract":"ZnO films doped with Nd contents of 0%-0.81% were deposited by a chemical solution deposition and characterised by X-ray diffraction, field emission scanning electron microscopy, UV-vis and luminescent spectrophotometry and electrical measurement. The experiments revealed that the films have nano-scale particle size that increased with increasing Nd content. The Nd doping resulted in the obvious variations of transmittance in the UV-visible light range, the band gap and resistivity. Thin film showed an optimal optical and electrical properties at Nd content of 0.42%. The films also showed a strong band gap emission and a very weak emission related to intrinsic defect.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"295"},"PeriodicalIF":0.0,"publicationDate":"2017-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45825790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-10-20DOI: 10.1504/IJNM.2017.10008409
S. Kim, H. Shin, J. Oh, S. Yoo
Carbon fibre reinforced plastics has a lot of merit such as mechanical characteristic, lightweight, and thermal resistance. For using carbon fibre reinforced plastics, the cutting and drilling process is necessary, and the study of optimal cutting conditions is very necessary, too. Generally, CFRP needs the processes of lathe turning, drilling, milling and cutting after moulding. However, these processes cause such problems as sudden abrasion of the tools, heavy surface roughness and defective layer by crack and delamination. Therefore, the study to examine the conditions for the high precision products by minimising these problems is very important. In this study, a sample was made with a CFRP plate to take a drilling test under a set condition with a high speed steel drill. This dissertation is a study on the optimal drilling conditions of CFRP with various drilling condition. The drilling of these various specimens with different machining condition is performed.
{"title":"A study on the prediction of tool wear in drilling the carbon fibre reinforced plastic","authors":"S. Kim, H. Shin, J. Oh, S. Yoo","doi":"10.1504/IJNM.2017.10008409","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10008409","url":null,"abstract":"Carbon fibre reinforced plastics has a lot of merit such as mechanical characteristic, lightweight, and thermal resistance. For using carbon fibre reinforced plastics, the cutting and drilling process is necessary, and the study of optimal cutting conditions is very necessary, too. Generally, CFRP needs the processes of lathe turning, drilling, milling and cutting after moulding. However, these processes cause such problems as sudden abrasion of the tools, heavy surface roughness and defective layer by crack and delamination. Therefore, the study to examine the conditions for the high precision products by minimising these problems is very important. In this study, a sample was made with a CFRP plate to take a drilling test under a set condition with a high speed steel drill. This dissertation is a study on the optimal drilling conditions of CFRP with various drilling condition. The drilling of these various specimens with different machining condition is performed.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"321"},"PeriodicalIF":0.0,"publicationDate":"2017-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48909540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005580
A. Vivek, Akshay Chavan, B. Shivaraj, H. Murthy, M. Krishna, B. Sathyanarayana
This work studies the influence of spin coating process parameters on grain size and surface roughness of zinc oxide (ZnO) thin films by sol gel using Taguchi method. ZnO thin films were prepared using zinc acetate dehydrate (ZAD), methanol and diethanolamine (DEA) as the starting material, solvent and stabilising agent respectively. The coating parameters such as precursor concentration of ZAD (0.5, 0.6 and 0.7 M), spin speed (1,500, 2,500 and 3,500 rpm) and annealing temperature (300,400 and 500 °c) was selected and the influence of these parameters on grain size and surface roughness was studied using X-ray diffraction (XRD) and atomic force microscopy (AFM). ANOVA results showed that annealing temperature had 53% effect on grain size and chuck rotation speed had 40% effect on the surface roughness of the film. Using Grey relation technique the optimised parameters was found to be 0.5 M, 2,500 rpm and 400°C. The grain size decreased from 18.054 nm to 16.97 nm and roughness of film decreased from 230.47 nm to 223.5 nm.
{"title":"Optimisation of spin coating parameters for the preparation of ZnO thin films by Grey-Taguchi method","authors":"A. Vivek, Akshay Chavan, B. Shivaraj, H. Murthy, M. Krishna, B. Sathyanarayana","doi":"10.1504/IJNM.2017.10005580","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005580","url":null,"abstract":"This work studies the influence of spin coating process parameters on grain size and surface roughness of zinc oxide (ZnO) thin films by sol gel using Taguchi method. ZnO thin films were prepared using zinc acetate dehydrate (ZAD), methanol and diethanolamine (DEA) as the starting material, solvent and stabilising agent respectively. The coating parameters such as precursor concentration of ZAD (0.5, 0.6 and 0.7 M), spin speed (1,500, 2,500 and 3,500 rpm) and annealing temperature (300,400 and 500 °c) was selected and the influence of these parameters on grain size and surface roughness was studied using X-ray diffraction (XRD) and atomic force microscopy (AFM). ANOVA results showed that annealing temperature had 53% effect on grain size and chuck rotation speed had 40% effect on the surface roughness of the film. Using Grey relation technique the optimised parameters was found to be 0.5 M, 2,500 rpm and 400°C. The grain size decreased from 18.054 nm to 16.97 nm and roughness of film decreased from 230.47 nm to 223.5 nm.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"197"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48681087","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005594
Jianzhong Zhou, Zheng Yang, Shu Huang, J. Sheng, W. Tan
To investigate the influence of hydrogen atoms on the surface integrity and the phase transformation of type 316L stainless steel after laser peening, specimens of laser peened 316L austenitic stainless steel were cathodic hydrogen charged. The surface residual stress of samples subjected to laser peening, the metallurgical structures and the microhardness were studied. The result shows that compressive residual stress is induced by laser peening. The compressive residual stress is 35.55 MPa, 46 MPa and 72 MPa, respectively, when the laser energy is 2 J, 5 J and 8 J. Meanwhile, laser peening refines the grain size, and the surface microhardness reveals that laser peening suppress the increase of microhardness caused by hydrogen atoms. Compared with unimpacted specimens, the amount of hydrogen attacked holes on impacted samples is decreased. The X-ray diffraction reveals that hydrogen charging is responsible for the martensite formed on the surface and the laser peening suppress the formation of martensite.
{"title":"Influence of hydrogen on surface integrity and phase transformation of laser peened 316L stainless steel","authors":"Jianzhong Zhou, Zheng Yang, Shu Huang, J. Sheng, W. Tan","doi":"10.1504/IJNM.2017.10005594","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005594","url":null,"abstract":"To investigate the influence of hydrogen atoms on the surface integrity and the phase transformation of type 316L stainless steel after laser peening, specimens of laser peened 316L austenitic stainless steel were cathodic hydrogen charged. The surface residual stress of samples subjected to laser peening, the metallurgical structures and the microhardness were studied. The result shows that compressive residual stress is induced by laser peening. The compressive residual stress is 35.55 MPa, 46 MPa and 72 MPa, respectively, when the laser energy is 2 J, 5 J and 8 J. Meanwhile, laser peening refines the grain size, and the surface microhardness reveals that laser peening suppress the increase of microhardness caused by hydrogen atoms. Compared with unimpacted specimens, the amount of hydrogen attacked holes on impacted samples is decreased. The X-ray diffraction reveals that hydrogen charging is responsible for the martensite formed on the surface and the laser peening suppress the formation of martensite.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"257"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47049224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005599
Y. Niu, Yi-fan Dai
Curved optics of monocrystalline silicon plays an important role in high power laser system and its form accuracy and subsurface damage (SSD) have a significant impact on the performance of the laser system. In order to improve grinding accuracy and control the depth of SSD, the ultra-precision grinding (UPG) process of Si is studied. Firstly, the grinding theory is introduced and the relationships among the depth of cutting, the depth of subsurface cracks and the load of single particle are analysed. Then the influence of different process parameters on the surface quality of Si was investigated by some process experiments. Based on the result of process experiments, the processing of a 195 mm-diameter parabolic mirror of Si was carried out. The results show that the form accuracy of peak-valley value is promoted up to 3.77 μm from 21.4 μm and Rms value of the roughness is improved up to 0.11 μm from 0.625 μm.
{"title":"Study on the technological method of ultra-precision grinding for parabolic mirror of monocrystalline silicon","authors":"Y. Niu, Yi-fan Dai","doi":"10.1504/IJNM.2017.10005599","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005599","url":null,"abstract":"Curved optics of monocrystalline silicon plays an important role in high power laser system and its form accuracy and subsurface damage (SSD) have a significant impact on the performance of the laser system. In order to improve grinding accuracy and control the depth of SSD, the ultra-precision grinding (UPG) process of Si is studied. Firstly, the grinding theory is introduced and the relationships among the depth of cutting, the depth of subsurface cracks and the load of single particle are analysed. Then the influence of different process parameters on the surface quality of Si was investigated by some process experiments. Based on the result of process experiments, the processing of a 195 mm-diameter parabolic mirror of Si was carried out. The results show that the form accuracy of peak-valley value is promoted up to 3.77 μm from 21.4 μm and Rms value of the roughness is improved up to 0.11 μm from 0.625 μm.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"283"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49347500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005591
N. Balashanmugam, K. Naveen, P. Krishna, G. C. M. Kumar
Conventional wet electrodes used in bio-potential measurement like EEG, ECG, etc., require the need for conductivity gel application on skin to wet the surface so that more contact area exist between skin and electrode resulting in better signal acquisition. Wet electrodes have certain drawbacks like the gel tends to underperform within one to two hours after application due to reasons like body heat. To overcome this drawbacks, dry electrodes are being developed which can be classified into two types; one penetrating skin and the other not. Both this type of electrodes has the advantages and limitations. The major drawback of filament type non-penetrating dry electrodes is that if the interest is in acquiring signals during motion, these electrodes tend to move relative to the skin resulting in noisy signal where as the microneedle can overcome this drawback by being continuously in contact with skin in all circumstances. In present work we have used micromachining technique to fabricate PMMA microneedle array. The study involves design of microneedle array, fabrication and mechanical testing of microneedles for skin insertion. It was found that for skin insertion upto 150 μm microneedles 7.5 N load was required and microneedles were structurally stable at this load.
{"title":"Design and development of microneedle array-based electrode for bio-potential measurement","authors":"N. Balashanmugam, K. Naveen, P. Krishna, G. C. M. Kumar","doi":"10.1504/IJNM.2017.10005591","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005591","url":null,"abstract":"Conventional wet electrodes used in bio-potential measurement like EEG, ECG, etc., require the need for conductivity gel application on skin to wet the surface so that more contact area exist between skin and electrode resulting in better signal acquisition. Wet electrodes have certain drawbacks like the gel tends to underperform within one to two hours after application due to reasons like body heat. To overcome this drawbacks, dry electrodes are being developed which can be classified into two types; one penetrating skin and the other not. Both this type of electrodes has the advantages and limitations. The major drawback of filament type non-penetrating dry electrodes is that if the interest is in acquiring signals during motion, these electrodes tend to move relative to the skin resulting in noisy signal where as the microneedle can overcome this drawback by being continuously in contact with skin in all circumstances. In present work we have used micromachining technique to fabricate PMMA microneedle array. The study involves design of microneedle array, fabrication and mechanical testing of microneedles for skin insertion. It was found that for skin insertion upto 150 μm microneedles 7.5 N load was required and microneedles were structurally stable at this load.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"221"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41779335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005597
Zhang Gaofeng, Yijiang Zeng, Wenbo Zhang
A stress field model was built to study the effects of pre-stressing value, normal and tangential load on the three principal stresses and maximum shear stress when the silicon carbide (SiC) ceramics were scratched under two dimensional pre-stressing, and the scratching tests of SiC ceramic were conducted by using a Rockwell diamond indenter at different pre-stress values and normal loads. Scratching induced damage was assessed and characterised via destructive inspection techniques and progressive lapping techniques combined with the digital microscope. Acoustic emission (AE) technology was also used for the online monitoring of the damage. The results showed that, for a given scratching load, the amplitude of AE signals was reduced as the pre-stress values increasing, and surface/subsurface damage of SiC ceramics induced by two dimensional pre-stress scratching was less than that by conventional scratching. So one can believe that the two dimensional pre-stress method can contribute to decreasing the machining damage of brittle materials.
{"title":"Scratching of SiC ceramics at two dimensional pre-stressing","authors":"Zhang Gaofeng, Yijiang Zeng, Wenbo Zhang","doi":"10.1504/IJNM.2017.10005597","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005597","url":null,"abstract":"A stress field model was built to study the effects of pre-stressing value, normal and tangential load on the three principal stresses and maximum shear stress when the silicon carbide (SiC) ceramics were scratched under two dimensional pre-stressing, and the scratching tests of SiC ceramic were conducted by using a Rockwell diamond indenter at different pre-stress values and normal loads. Scratching induced damage was assessed and characterised via destructive inspection techniques and progressive lapping techniques combined with the digital microscope. Acoustic emission (AE) technology was also used for the online monitoring of the damage. The results showed that, for a given scratching load, the amplitude of AE signals was reduced as the pre-stress values increasing, and surface/subsurface damage of SiC ceramics induced by two dimensional pre-stress scratching was less than that by conventional scratching. So one can believe that the two dimensional pre-stress method can contribute to decreasing the machining damage of brittle materials.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"270"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41339642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005584
Lin Sun, Shuming Yang, Pu Zhao, Jianjun Ding, Xingyuan Long, Zhuangde Jiang
We have designed a precision machine for the manufacture of large-scale optical aspheric mirrors. The beam is one key component of the machine and it has a feature of three steps with the length of 3,100 mm. The technique driven at the centre of gravity has been used in the beam design. This feature makes a contribution to optimise force distribution, increase stiffness and reduce deformation so as to realise high accuracy.
{"title":"Optimal design and simulation of the stepped beam of a large-scale ultra-precision optical aspheric machine","authors":"Lin Sun, Shuming Yang, Pu Zhao, Jianjun Ding, Xingyuan Long, Zhuangde Jiang","doi":"10.1504/IJNM.2017.10005584","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005584","url":null,"abstract":"We have designed a precision machine for the manufacture of large-scale optical aspheric mirrors. The beam is one key component of the machine and it has a feature of three steps with the length of 3,100 mm. The technique driven at the centre of gravity has been used in the beam design. This feature makes a contribution to optimise force distribution, increase stiffness and reduce deformation so as to realise high accuracy.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"210"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48382162","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-07-17DOI: 10.1504/IJNM.2017.10005593
Pan Jisheng, Guoming Li, Q. Yan, Xiaowei Zhang
To solve the fracture problem of ultrathin, soft-brittle and large warp SrTiO3 ceramic substrates, a new anti-broken two-sided lapping method was proposed. With this new method, the materials at the convex peak of the substrate surface which thinnest thickness is only 0.19 mm but warp up to 0.6 mm were removed firstly. Then more and more materials were removed and a flat SrTiO3 substrate without broken was obtained ultimately. The main material removal method of SrTiO3 substrate was the fracture of the crystallites rolled by abrasive, while some crystallites were pulled out. As the material was removed, the substrate surface became higher density. Using 1.5 μm Al2O3 slurry, a surface with Ra 0.0285 μm was obtained by using this method. An ultra-smooth surface with Ra 0.0038 m was achieved by cluster magnetorheological polishing, the grain boundary and coarse grain structure on the surface could be seen clearly.
{"title":"Processing characteristics of ultrathin SrTiO3 ceramic substrates","authors":"Pan Jisheng, Guoming Li, Q. Yan, Xiaowei Zhang","doi":"10.1504/IJNM.2017.10005593","DOIUrl":"https://doi.org/10.1504/IJNM.2017.10005593","url":null,"abstract":"To solve the fracture problem of ultrathin, soft-brittle and large warp SrTiO3 ceramic substrates, a new anti-broken two-sided lapping method was proposed. With this new method, the materials at the convex peak of the substrate surface which thinnest thickness is only 0.19 mm but warp up to 0.6 mm were removed firstly. Then more and more materials were removed and a flat SrTiO3 substrate without broken was obtained ultimately. The main material removal method of SrTiO3 substrate was the fracture of the crystallites rolled by abrasive, while some crystallites were pulled out. As the material was removed, the substrate surface became higher density. Using 1.5 μm Al2O3 slurry, a surface with Ra 0.0285 μm was obtained by using this method. An ultra-smooth surface with Ra 0.0038 m was achieved by cluster magnetorheological polishing, the grain boundary and coarse grain structure on the surface could be seen clearly.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"13 1","pages":"247"},"PeriodicalIF":0.0,"publicationDate":"2017-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45355953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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