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2023 IEEE International Memory Workshop (IMW)最新文献

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Demonstration of multilevel multiply accumulate operations for AiMC using engineered a-IGZO transistors-based 2T1C gain cell arrays 使用基于工程a-IGZO晶体管的2T1C增益单元阵列演示AiMC的多级乘法累积操作
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145946
S. Subhechha, S. Cosemans, A. Belmonte, N. Rassoul, S. H. Sharifi, P. Debacker, D. Verkest, R. Delhougne, G. Kar
We report on the first demonstration of multilevel multiply accumulation operations in 2TlC cell arrays based on amorphous IGZO TFTs for efficient analog in memory compute (AiMC) implementation. Device designs for the read and write transistors to meet the target specifications are discussed and implemented. Multilevel operations are realized thanks to the long retention time enabled by the ultra-low offcurrent (<1.5× 1$0^{-19}$A/$mu$m) of the a-IGZO TFTs.
我们报告了基于非晶IGZO TFTs的2TlC细胞阵列中多级乘法积累操作的首次演示,用于高效的内存模拟计算(AiMC)实现。讨论并实现了满足目标规格的读写晶体管的器件设计。由于A - igzo TFTs的超低电流(<1.5× 1$0^{-19}$A/$mu$m),使得保持时间长,从而实现了多电平操作。
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引用次数: 0
Hafnium oxide-based Ferroelectric Memories: Are we ready for Application? 基于氧化铪的铁电存储器:我们准备好应用了吗?
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145945
K. Seidel, D. Lehninger, F. Müller, Y. Raffel, A. Sünbül, Ricardo Revello, R. Hoffmann, S. De, T. Kämpfe, M. Lederer
In this paper we discuss the current research status of ferroelectric memory solutions and reflect it with application requirements. In focus are mainly three promising emerging memory device technologies based on ferroelectric (FE) hafnium oxide: front-end of line (FEoL) implemented FeFET, and the two FE-capacitor based solutions FeRAM and ITIC FeFET. These device technologies are discussed with respect to aspects like scaling opportunity, reliability, and maturity level, reflecting with current and future application requirements as well as conventional memory solutions.
本文讨论了铁电存储解决方案的研究现状,并结合应用需求进行了反映。重点介绍了三种基于铁电(FE)氧化铪的新兴存储器件技术:线前端(FEoL)实现的ffet,以及两种基于FE电容器的解决方案FeRAM和ITIC ffet。这些设备技术在扩展机会、可靠性和成熟度级别等方面进行了讨论,反映了当前和未来的应用程序需求以及传统的内存解决方案。
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引用次数: 1
Enabling 3D NAND Trench Cells for Scaled Flash Memories 为缩放闪存启用3D NAND沟槽单元
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145992
S. Rachidi, S. Ramesh, L. Breuil, Z. Tao, D. Verreck, G. Donadio, A. Arreghini, G. V. D. Bosch, M. Rosmeulen
3D Trench cells with a vertical flat channel have been proposed to increase the cell density over 3D NAND gate-all-around (GAA). In this work, we investigate the device characteristics of Trench cells. In absence of curvature, Trench cells exhibit inferior program and erase in comparison to a GAA reference. However, the memory window of Trench cells is significantly improved with channel width scaling, gate stack engineering and metal gate integration. This study also provides a basis for design and fabrication of future ultradense 3D NAND memories based on the Trench architecture.
为了提高三维NAND栅极全能(GAA)的密度,提出了具有垂直平坦通道的三维沟槽单元。在这项工作中,我们研究了沟槽电池的器件特性。在没有曲率的情况下,沟槽细胞表现出较差的程序和擦除,与GAA参考相比。然而,沟槽单元的记忆窗口通过通道宽度缩放、栅极堆叠工程和金属栅极集成得到显著改善。该研究也为未来基于Trench架构的超密集3D NAND存储器的设计和制造提供了基础。
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引用次数: 0
Process Improvements for 7th Generation 1Tb Quad-Level Cell 3D NAND Flash Memory in Mass Production 量产第7代1Tb四阶单元3D NAND快闪记忆体的制程改进
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145937
Soochan Chung, Dong-Hyeon Ko, Joonsung Lim, Kyung-Hee Kim, Sejie Takaki, Y. Seo, Byoungil Lee, Sejun Park, Jaeduk Lee, K. Noh, Sungjin Ahn, Sunghoi Hur
Over the past few decades, a greater need for 3D Vertical NAND (V-NAND) flash memory storage capacity has emerged. Compared to its prevailing technical predecessor, a quad-level cell (QLC) NAND flash memory can be a perfect replacement to meet the needs for the higher density and lower cost non-volatile memory market. However, despite these benefits, QLC’s market share has not been growing significantly because of its worse device reliability and slower performance. In this Paper, a new highly mass-producible and highly reliable 1Tb QLC 3D NAND flash memory with 176-word-line (WL) and Cell-Over-Peripheral (COP) architecture along with a number of significant process advancements will be presented.
在过去的几十年里,出现了对3D垂直NAND (V-NAND)闪存存储容量的更大需求。与现有的技术相比,四电平单元(QLC) NAND闪存可以完美地满足高密度和低成本非易失性存储器市场的需求。然而,尽管有这些好处,由于其较差的设备可靠性和较慢的性能,QLC的市场份额并没有显著增长。本文将介绍一种具有176字行(WL)和Cell-Over-Peripheral (COP)架构的新型高量产和高可靠性的1Tb QLC 3D NAND闪存,以及一些重要的工艺进步。
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引用次数: 1
28nm Data Memory with Embedded RRAM Technology in Automotive Microcontrollers 基于嵌入式RRAM技术的28nm数据存储器应用于汽车微控制器
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145951
Alessandro Grossi, M. Coppetta, S. Aresu, A. Kux, T. Kern, R. Strenz
We present features adding extra reliability margin for emerging Non-Volatile Memories adoption in automotive microcontrollers, and discuss experimental data of embedded 28nm RRAM Data Memory on high statistics from a microcontroller demonstrator. The results reported show that 28nm embedded RRAM reached an adequate maturity and is ready for replacement of embedded Flash in automotive applications.
我们介绍了在汽车微控制器中采用新兴非易失性存储器增加额外可靠性裕度的特性,并讨论了嵌入式28nm RRAM数据存储器在微控制器演示器的高统计数据上的实验数据。结果表明,28nm嵌入式RRAM已经足够成熟,可以在汽车应用中取代嵌入式闪存。
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引用次数: 0
A Comprehensive Study on the Pillar Size of OTS-PCM Memory with an Optimized Process and Scaling Trends Down to Sub-10 nm for SCM Applications 基于优化工艺的OTS-PCM存储器柱尺寸的综合研究以及用于SCM应用的低于10nm的缩放趋势
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145816
W. Chien, E. Lai, L. Buzi, C. Cheng, C. Yeh, A. Ray, L. Gignac, N. Gong, H. Cheng, A. Grun, D. Y. Lee, W. Kim, A. Majumdar, Douglas M. Bishop, R. Bruce, D. Daudelin, H. Ho, M. BrightSky, H. Lung
We present a scaling study on phase change memory (PCM)-ovonic threshold switches (OTS) memory cells for storage class memory (SCM) applications. For the first time, the device size effect on the electrical characteristics of OTS-PCM cells is experimentally characterized with simulation support. It is found that the SET threshold voltage (VtS) of OTS-PCM cells increases as the device area scales down because of processinduced defects, as observed from experimental measurements and demonstrated with simulations. An optimized process is proposed and experimentally verified to minimize the VtS shift issue based on wafer level characterization. More importantly, combining the measurements and simulation, the device scaling trends down to sub-10 nanometers are provided for future high density cross-point PCM (XPCM) chips.
我们提出了一种用于存储类存储器(SCM)应用的相变存储器(PCM)-卵形阈值开关(OTS)存储单元的标度研究。首次在模拟支持下,实验表征了器件尺寸对OTS-PCM电池电特性的影响。实验测量和模拟结果表明,由于工艺缺陷导致器件面积缩小,OTS-PCM电池的SET阈值电压(VtS)增加。提出并实验验证了一种优化工艺,以最小化基于晶圆级表征的VtS移位问题。更重要的是,结合测量和模拟,为未来的高密度交叉点PCM (XPCM)芯片提供了器件缩小到10纳米以下的趋势。
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引用次数: 0
Ferroelectric HfO2/ZrO2 Superlattices with Improved Leakage at Bias and Temperature Stress 具有改善偏置和温度应力下漏损的铁电HfO2/ZrO2超晶格
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145927
D. Lehninger, A. Sünbül, R. Olivo, T. Kämpfe, K. Seidel, M. Lederer
Abstract-Many modern applications require fast, reliable, and energy-efficient non-volatile memories. Ferroelectric memories like the ferroelectric field effect transistor (FeFET) and the ferroelectric random access memory (FeRAM) are promising to meet these requirements. In particular, the automotive sector places additional high demands in terms of reliability at high operation temperatures up to 150°C. Ferroelectric superlattices consisting of a periodic arrangement of HfO2 and ZrO2 sublayers are promising to meet these requirements. Herein, such superlattices of various sublayer thicknesses and a constant total thickness of $10 mathrm{~nm}$ were embedded into metal-ferroelectricmetal (MFM) capacitors and electrically characterized regarding compliance with the desired ambient temperature specifications of the automotive market. It is shown that superlattices with relatively thick sublayers ($geq 1 mathrm{~nm}$) significantly outperform standard $10 mathrm{~nm}(mathrm{Hf}, mathrm{Zr}) mathrm{O}_{2}$ reference films in terms of leakage resistance at demanding bias and temperature stress conditions.
许多现代应用需要快速、可靠和节能的非易失性存储器。铁电存储器如铁电场效应晶体管(FeFET)和铁电随机存取存储器(FeRAM)有望满足这些要求。特别是,汽车行业在高达150°C的高温下对可靠性提出了额外的高要求。由HfO2和ZrO2亚层的周期性排列组成的铁电超晶格有望满足这些要求。在这里,这种具有不同亚层厚度和恒定总厚度$10 mathrm{~nm}$的超晶格被嵌入到金属-铁电金属(MFM)电容器中,并根据汽车市场所需的环境温度规范进行电学表征。结果表明,在要求偏置和温度应力条件下,具有相对厚的子层的超晶格($geq 1 mathrm{~nm}$)在泄漏电阻方面明显优于标准$10 mathrm{~nm}(mathrm{Hf}, mathrm{Zr}) mathrm{O}_{2}$参考薄膜。
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引用次数: 1
SLC and MLC In-Memory-Approximate-Search Solutions in Commercial 48-layer and 96-layer 3D-NAND Flash Memories 商用48层和96层3D-NAND闪存中的SLC和MLC内存近似搜索解决方案
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145964
P. Tseng, Tian-Cig Bo, Yu-Hsuan Lin, Yu-Chao Lin, Jhe-Yi Liao, F. Lee, Yu-Yu Lin, Ming-Hsiu Lee, K. Hsieh, Keh-Chung Wang, Chih-Yuan Lu
We proposed a novel in-memory-approximate-search (IMAS) method from single-level cell (SLC) to multi-level cell (MLC) based on our commercial 48-layer (48L) and 96-layer (96L) 3D-NAND flash technology. The method with word-line input as search word provides ultra-high parallel searching capability with the database stored in high-density 3D NAND-flash IMAS chip(s). The input search word can be compared with $128mathrm{~K}$ data words in just one read cycle, where the Hamming distance (HD) computation (for SLC approach) or similarity computation (for MLC approach) can be carried out within the memory array. Latest 96L 3D-NAND IMAS chip with CMOS under array (CuA) technology provides small chip size, long search/data word, excellent output resolution, and wide matching criteria for the tolerance on sensing current variation. Application on Memory-Augmented Neural Network (MANN) was demonstrated on VGGface2 dataset, with the comparisons between the 48L and 96L SLC 3D-NAND IMAS technologies.
基于我们的商用48层(48L)和96层(96L) 3D-NAND闪存技术,我们提出了一种新的内存近似搜索(IMAS)方法,从单级单元(SLC)到多级单元(MLC)。该方法以字行输入作为检索词,将数据库存储在高密度3D NAND-flash IMAS芯片中,提供了超高的并行检索能力。输入的搜索词可以在一个读取周期内与$128 mathm {~K}$数据词进行比较,其中可以在内存数组内进行汉明距离(HD)计算(用于SLC方法)或相似性计算(用于MLC方法)。最新的96L 3D-NAND IMAS芯片采用阵列下CMOS (CuA)技术,芯片尺寸小,搜索/数据字长,输出分辨率高,感应电流变化公差匹配标准宽。在VGGface2数据集上演示了记忆增强神经网络(MANN)的应用,并对48L和96L SLC 3D-NAND IMAS技术进行了比较。
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引用次数: 0
Eliminating Capacitive Sneak Paths in Associative Capacitive Networks based on Complementary Resistive Switches for In-Memory Computing 基于互补电阻开关的内存计算关联电容网络中电容潜行路径的消除
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145947
Tobias Ziegler, Leon Brackmann, T. Hennen, C. Bengel, S. Menzel, D. Wouters
Shifting computations from the central processing unit to the memory is a promising approach to lower the stress on the Von-Neumann bottleneck and to reduce the total energy consumption spend on data transfer. One promising concept for in-memory computations is the associative capacitive network introduced by Kavehei et al.. The digital information is stored in complementary resistive switches which can be read using a non-destructive read out scheme. Simulation results based on the JART VCM vlb model demonstrate the working principle of the original input encoding and the existence of capacitive sneak path currents is identified. A new input encoding is proposed in this work which not only prevents capacitive sneak paths but also improves the voltage difference between Hamming Distances (HD).
将计算从中央处理单元转移到存储器是一种很有前途的方法,可以降低对冯-诺伊曼瓶颈的压力,并减少数据传输的总能耗。一个很有前途的内存计算概念是由Kavehei等人介绍的联想电容网络。数字信息存储在互补电阻开关中,该开关可以使用非破坏性读出方案读取。基于JART VCM模型的仿真结果验证了原始输入编码的工作原理,并识别了电容性潜径电流的存在。本文提出了一种新的输入编码方法,既可以防止电容性潜径,又可以提高汉明距离(HD)之间的电压差。
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引用次数: 0
Towards Improving Ionizing Radiation Tolerance of 3-D NAND Flash Memory 提高3-D NAND快闪记忆体的电离辐射耐受性
Pub Date : 2023-05-01 DOI: 10.1109/IMW56887.2023.10145957
B. Ray, Matchima Buddhanoy, Mondol Anik Kumar
In this paper we present characterization results of total ionizing dose (TID) effects on commercial 3-D NAND memory. We show the TID induced threshold voltage shift and bit error rate of the memory array. Based on the characterization results we present four system-level techniques that can mitigate TID effects of the commercial 3-D NAND memory.
在本文中,我们提出了总电离剂量(TID)效应对商用3-D NAND存储器的表征结果。我们展示了TID诱导的阈值电压偏移和存储阵列的误码率。基于表征结果,我们提出了四种系统级技术,可以减轻商用3-D NAND存储器的TID效应。
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引用次数: 0
期刊
2023 IEEE International Memory Workshop (IMW)
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