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2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)最新文献

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Electrical Performances and Physics Based Analysis of 650V E-mode GaN Devices at High Temperatures 高温下650V e模GaN器件的电学性能和物理分析
Chi Zhang, Sheng Li, Siyang Liu, Jiaxing Wei, Wangran Wu, Weifeng Sun
High temperature performances of commercial cascode GaN FET and p-GaN HEMT are investigated and compared in this paper. The differences of device structures lead to quite different high temperatures performances. The p-GaN device shows smaller shifts in threshold voltage but larger increase in gate leakage current at high temperatures than cascode device. Moreover, high temperatures also lead to different variations in dynamic electrical parameters. By using analytical models, it is found that the decrease of electron mobility dominates the variations in switching parameters for p-GaN device, however, the decrease of Vth dominates the variations for cascode device.
本文研究并比较了商用级联GaN FET和p-GaN HEMT的高温性能。器件结构的差异导致其高温性能差异很大。与级联码器件相比,p-GaN器件在高温下的阈值电压变化较小,但栅极泄漏电流增加较大。此外,高温还会导致动态电参数的不同变化。通过分析模型发现,在p-GaN器件中,电子迁移率的降低主导了开关参数的变化,而在级联码器件中,Vth的降低主导了开关参数的变化。
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引用次数: 1
Case Study on Package Level Defect Localization through Optimized Lock-in Thermography Frequency 基于优化锁定热成像频率的封装级缺陷定位实例研究
Carlo M. Casabuena, E. J. de La Cruz
This case study outlines the successful package-level failure site detection by optimizing the Lock-In Thermography (LIT) frequency based on resistance, combined with 3D X-ray for locating the defect and EDX (Energy Dispersive X-ray) for root-cause analysis. By optimizing the lock-in frequency, the exact location of the defect on the package was identified, thus, leading to effective determination of failure mechanism and accurate root cause investigation.
本案例研究通过优化基于电阻的锁定热成像(LIT)频率,结合3D x射线定位缺陷和EDX(能量色散x射线)进行根本原因分析,概述了成功的封装级故障检测。通过优化锁定频率,确定了缺陷在封装上的准确位置,从而有效地确定了失效机理,准确地调查了根本原因。
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引用次数: 1
Si Nano-Crystal Size and Structural Defect Characterization Using Electron Microscopes 硅纳米晶体尺寸及结构缺陷的电子显微镜表征
E. Sebastian, Jie Zhu, Z. Mo
Si nano-crystals (NCs) based flash memory is less susceptible to charge loss in tunnel oxide, allowing tunnel oxide reduction from ~100A to ~50A and therefore lower operating voltage and improved cycling endurance performance. Most critical parameters controlling Si NCs performance include size, size distribution and optimal area density (#/cm2). Objective of this study includes developing an image processing method for large population of Si NCs characterization, evaluating and comparing different electron microscope imaging techniques and studying Si NCs structural defects.
基于硅纳米晶体(NCs)的闪存不易受隧道氧化物中电荷损失的影响,允许隧道氧化物从~100A降至~50A,从而降低工作电压并提高循环续航性能。控制硅纳米材料性能的最关键参数包括尺寸、尺寸分布和最佳面积密度(#/cm2)。本研究的目的包括开发一种针对大量硅纳米管的图像处理方法,对不同的电子显微镜成像技术进行评价和比较,并研究硅纳米管的结构缺陷。
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引用次数: 0
Degradation behaviour of electrical properties of inverted metamorphic four-junction (IMM4J) solar cells under 1 MeV electron irradiation 1mev电子辐照下逆变质四结(IMM4J)太阳能电池电性能的退化行为
Zhang Yanqing, Mao Guoliang, Wang Tianqi, Li Chaoming, Huo Mingxue, Qiao Chunhua
In this study, the degradation effects of inverted metamorphic four-junction (IMM4J) solar cells were investigated after 1 MeV electron irradiation using spectral response and electrical property measurements. The results show that, similar to traditional tri-junction (TJ) GaInP/GaAs/Ge solar cells, the electrical properties (such as Isc, Voc, and Pmax) degrade as a function of logφ, where φ represents the electron fluence. In particular, the degradation of Voc is more serious than that of Isc because of the sum rule for Voc and the limit rule for Isc in IMM4J cells. Analysis of the spectral response curves indicates that, unlike traditional TJ cells, the In0.3Ga0.7As (1.0 eV) sub-cell exhibits the most severe damage in the irradiated IMM4J cells and the In0.58Ga0.42As sub-cell becomes a limits part for the electrical properties of the IMM4J solar cells.
本文研究了倒置变质四结(IMM4J)太阳能电池在1 MeV电子辐照后的降解效应,并对其进行了光谱响应和电学性能测量。结果表明,与传统的三结(TJ) GaInP/GaAs/Ge太阳能电池类似,电学性能(如Isc, Voc和Pmax)随logφ的变化而降低,其中φ表示电子影响。特别是,由于IMM4J细胞中Voc的总和规则和Isc的极限规则,Voc的降解比Isc的降解更严重。光谱响应曲线分析表明,与传统的TJ电池不同,辐照后的IMM4J电池中,In0.3Ga0.7As (1.0 eV)亚电池损伤最严重,In0.58Ga0.42As亚电池成为影响IMM4J太阳能电池电性能的限制部分。
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引用次数: 0
Electrical field accelerated GND corrosion of copper wire in high humidity conditions 在高湿环境下,电场加速铜线的GND腐蚀
Xuanlong Chen, Jianming Fang, Wenfeng Huang, Yong Wei, Chengcheng Chen
Galvanic corrosion of copper wire in high humidity conditions has been widely studied. Cu-Al system in water forms a battery cell and Al is corroded. The commonly known factors that accelerate the corrosion include humidity, ions, pH, etc. In a real case failure analysis and biased high humidity test, an accelerated corrosion was observed to be related with bias or current direction. The GND copper wire terminal disconnection was proved to be easier to occur, and electrochemical reactions identified as electrolytic cells played a dominant role. The failure mechanism is hard to be recognized sometimes for carbonized molding compound surrounded around the pad, which will lead to an improper conclusion of electrical overstress (EOS). Electrical field accelerated corrosion is a degradation process which might not cause a sudden failure.
高湿条件下铜线的电偶腐蚀问题得到了广泛的研究。Cu-Al系统在水中形成电池芯,铝被腐蚀。众所周知,加速腐蚀的因素包括湿度、离子、pH值等。在实际故障分析和偏置高湿试验中,观察到加速腐蚀与偏置或电流方向有关。结果表明,GND铜线端子更容易发生断线,电解电池的电化学反应起主导作用。碳化成型复合材料在焊盘周围的破坏机理有时难以识别,会导致电超应力(EOS)的错误结论。电场加速腐蚀是一种不会引起突然失效的降解过程。
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引用次数: 0
Soft Defect Localization (SDL) of Temperature Dependent Failure using NI-PXI Test Platform in DALS System 基于NI-PXI测试平台的DALS系统温度相关故障软缺陷定位
Jed Paolo Deligente
Temperature dependent failures have always presented challenges in failure analysis of advanced mixed signal integrated circuits. Soft defect localization (SDL) has been proven a reliable fault isolation technique however, reliable capture of pass/fail signal conditions, temperature characterization and laser synchronization are vital in having an effective SDL result. This paper presents a case study which demonstrates how NI-PXI system was utilized as a test and synchronization platform with DALS module of Hamamatsu iPHEMOS.
温度相关故障一直是先进混合信号集成电路失效分析的难点。软缺陷定位(SDL)已被证明是一种可靠的故障隔离技术,然而,可靠的捕获合格/失败信号条件,温度表征和激光同步对于获得有效的SDL结果至关重要。本文通过一个实例,演示了NI-PXI系统如何与滨松iphonos的DALS模块作为测试和同步平台。
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引用次数: 0
CPB fcCSP BGA Package Reliability assessment via the study of Bump Cross Section Morphology after Product Realiability stress testing CPB fcCSP BGA封装可靠性评估——产品可靠性应力测试后碰撞截面形貌研究
H. Hamed, V. Wang
In this paper we study and assess fine-pitch CPB fcCSP BGA package reliability via the study of bump cross section morphology after product reliability stress testing. The IMC formation and progression in copper pillar bump was studied in Mass Production destined SoC Controller to predict the health and life time left for the CPB. In particular we are interested in the reliability of fine-pitch oblong copper pillar bumps arranged in Omni-directional patterns. During product reliability testing, CPB cross-section analysis (Via P-FIB) was performed on CPB bumps strategically located in different sections of the fcCSP BGA package after each reliability test read point. JEDEC standard suite of package related tests were performed. IMC formation and progression under the effect of abovementioned environmental stresses as well as different assembly line variations and materials, including molding compound and substrate, were taken into account. We also compare IMC formation from two different bumping technologies. By assessing the various IMC, void and crack formations, we propose that the product reliability engineer should consider verifying health of product physically in addition to ATE final test. This paper also provides feedback to package technology development from product reliability point of view.
本文通过对产品可靠性应力测试后碰撞截面形貌的研究,对细间距CPB fcCSP BGA封装可靠性进行了研究和评估。在量产专用SoC控制器上研究了铜柱凸块中IMC的形成和发展,以预测CPB的健康和剩余寿命。我们对以全向模式排列的细间距长方形铜柱凸点的可靠性特别感兴趣。在产品可靠性测试期间,在每个可靠性测试读取点之后,对位于fcCSP BGA封装不同部分的CPB凸起进行了CPB截面分析(通过P-FIB)。执行JEDEC标准套件包装相关测试。在上述环境应力的影响下,以及不同的装配线变化和材料(包括成型化合物和基材)的影响下,IMC的形成和发展都被考虑在内。我们还比较了两种不同碰撞技术下IMC的形成。通过评估各种IMC、空洞和裂纹的形成,我们建议产品可靠性工程师除了考虑ATE最终测试外,还应考虑物理验证产品的健康性。本文还从产品可靠性的角度对封装技术的发展提供了反馈。
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引用次数: 0
Application of Laser Deprocessing Technique in Physical Failure Analysis on Memory Bit-counting 激光预处理技术在内存计数物理失效分析中的应用
Yanlin Pan, Yuzhe Zhao, P. K. Tan, P. Khoo, P. Y. Yeo, Siong Luong TING, H. Tan, C. Chen
With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessing technique (LDT). This LDT assisted new method is more cost-effective and efficient in the PFA on memory bit-counting in terms of shortening the total FA cycle time and lowering the requirements for the experimental equipment, which leads to the increase of PFA throughput in memory devices especially for high technology nodes.
随着半导体器件技术规模的不断扩大,传统的物理失效分析(PFA)技术随着晶体管和层堆叠数量的增加而变得越来越具有挑战性。提出了一种基于激光去处理技术(LDT)的PFA存储位计数新方法。这种LDT辅助的PFA方法在内存位计数的PFA中具有更高的成本效益和效率,缩短了总FA周期时间,降低了对实验设备的要求,从而提高了存储器件特别是高技术节点的PFA吞吐量。
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引用次数: 0
Fault Localization Using Dynamic Optical-beam Induced Current Variation Mapping 基于动态光束感应电流变化映射的故障定位
M.H. Thor, S. Goh, B. Yeoh, H. Hao, Y. Chan, Zhao Lin
In this paper, we report a new dynamic laser stimulation technique based on optical beam-induced current (OBIC) variation mapping for global fault localization. A production tester exercised the chip dynamically whilst a 1064 nm wavelength laser rasters the region of interest through the silicon substrate. The OBIC variation with test cycles is recorded for every scanned pixel and translated into a current profile for pattern matching to determine the suspected defect location. Unlike laser-assisted device-alteration (LADA) which uses the same laser, this technique applies to hard defects. Four case studies successfully demonstrated the feasibility of this technique.
本文报道了一种新的基于光束感应电流(OBIC)变化映射的动态激光激励技术,用于故障全局定位。当1064nm波长的激光光栅通过硅衬底照射感兴趣的区域时,生产测试人员动态地运行芯片。OBIC随测试周期的变化被记录为每个扫描像素,并被转换为当前的轮廓,用于模式匹配,以确定可疑的缺陷位置。与使用相同激光的激光辅助设备改造(LADA)不同,该技术适用于硬缺陷。四个案例研究成功地证明了该技术的可行性。
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引用次数: 2
The Application of Thermal Sensor to Locate IC Defects in Failure Analysis 热传感器在IC失效分析中缺陷定位中的应用
Kuan-Chieh Huang, Yi-Chen Lin
Precise defect positioning by EFA has become critically important for yield improvement due to the reduction in CMOS size and the increase in complexity. Some kind of leakage current caused by metal defects could not be detected by conventional Photo emission microscope (like InGaAs EMMI), because the InGaAs detector responds to near-infrared light (NIR); therefore, the Lock-in thermography (LIT) equipped with the InSb camera is used for the detection of mid-infrared wavelength (MIR), and has better sensitivity in the heat dissipation. The LIT system has been proven to be very useful in 3D packaging or PCBs failure analysis. In this article, we utilize the sensitivity of LIT system and compare the emission differences between EMMI and LIT in three different cases. By understanding the characteristics of the LIT system in IC detection, we realized the emission differences it represents and have succeeded in positioning the defect location and finding the real reason for failure.
由于CMOS尺寸的减小和复杂性的增加,EFA的精确缺陷定位对良率的提高至关重要。传统的光电发射显微镜(如InGaAs EMMI)无法检测到金属缺陷引起的某种泄漏电流,因为InGaAs探测器响应近红外光(NIR);因此,配备InSb相机的锁定热像仪(LIT)用于中红外波长(MIR)的检测,在散热方面具有更好的灵敏度。该系统已被证明是非常有用的3D封装或pcb失效分析。在本文中,我们利用LIT系统的灵敏度,比较了EMMI和LIT在三种不同情况下的发射差异。通过了解LIT系统在集成电路检测中的特点,我们了解了它所代表的发射差异,并成功地定位了缺陷位置,找到了故障的真正原因。
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引用次数: 1
期刊
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
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