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Non-invasive blood sugar detection by cost-effective capacitance spectroscopy 低成本电容光谱无创血糖检测
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2023-01-25 DOI: 10.5194/jsss-12-21-2023
S. Rassel, M. R. Kaysir, Abdulrahman Aloraynan, D. Ban
Abstract. Capacitance spectroscopy is a promising technique for detecting small changes in electrical properties of human blood such as conductivity, permittivity, capacitance, and dielectric constant due to the change of glucose concentration. We studied the capacitance of tissue-mimicking phantoms and the human body, in vitro and in vivo, for detecting blood sugar levels non-invasively by a simple and cost-effective setup. We found that, in tissue-mimicking phantoms, capacitance decreased ∼19 % for glucose concentration increases of 85 % with a correlation coefficient of R2=0.96. In the oral meal tolerance test (OMTT), the body capacitance increased less than 9 % for a 50 % increase in blood sugar level, and it followed the invasive reference with a lag time of ∼25–45 min and semi-invasive reference with a nominal time delay. This lag time is associated with the food digestion time and the diffusion time for the glucose to reach interstitial fluid from blood vessels. We also studied different types of metal pads made of copper, gold-coated copper, and aluminum with various sizes for system optimization. Considering the simplicity, low cost, easy operation, and moderate performance, this capacitive spectroscopy could potentially be a promising technique of detecting blood sugar levels and could be incorporated into other blood sugar detection techniques to reinforce the overall performance.
摘要电容光谱是一种很有前途的技术,用于检测由于葡萄糖浓度变化而引起的人体血液电导率、介电常数、电容和介电常数等电性能的微小变化。我们研究了模拟组织的幽灵和人体的电容,在体外和体内,通过一个简单而经济的设置,无创地检测血糖水平。我们发现,在组织模拟模型中,当葡萄糖浓度增加85%时,电容降低~ 19%,相关系数R2=0.96。在口服膳食耐受试验(OMTT)中,当血糖水平升高50%时,体电容增加不到9%,其滞后时间为25-45分钟,而半侵入对照试验的滞后时间为名义上的延迟时间。这种滞后时间与食物消化时间和葡萄糖从血管到达间质液的扩散时间有关。为了优化系统,我们还研究了不同尺寸的铜、镀金铜和铝金属衬垫。该方法具有简单、低成本、易操作、性能适中等优点,有望成为一种很有前途的血糖检测技术,并可与其他血糖检测技术相结合,提高整体性能。
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引用次数: 0
Resonant photoacoustic cells for laser-based methane detection 用于激光甲烷检测的共振光声电池
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2023-01-25 DOI: 10.5194/jsss-12-37-2023
K. Schmitt, Mara Sendelbach, C. Weber, J. Wöllenstein, T. Strahl
Abstract. Against the background of the steady increase ingreenhouse gases in the atmosphere, a fast and inexpensive method fordetecting methane is required. This applies to the direct measurement of thebackground concentration of methane in the atmosphere and also to thedetection of leaks in natural gas pipelines. Photoacoustic (PA) sensorsoffer the possibility of highly sensitive gas detection andcost-effective design at the same time. In this work, we investigated a photoacoustic sensorfor methane in low concentrations, focusing on a special cell design, theso-called T-cell. Different cylinder geometries of six T-cells and theinfluence on the sensor performance were examined. An interband cascadelaser (ICL) with a central wavelength of 3270 nm was used for excitationand a micro-electromechanical systems (MEMS) microphone as detector. The detection limits achieved were belowthe methane background concentration in air of 1.8 ppm.
摘要在大气中温室气体不断增加的背景下,需要一种快速、廉价的甲烷检测方法。这适用于直接测量大气中甲烷的背景浓度,也适用于天然气管道泄漏的检测。光声(PA)传感器提供了高灵敏度气体检测的可能性,同时也提供了最有效的设计。在这项工作中,我们研究了一种低浓度甲烷的光声传感器,重点是一种特殊的细胞设计,即T细胞。研究了六个T细胞的不同圆柱体几何形状及其对传感器性能的影响。一种中心波长为3270的带间级联激光器(ICL) nm进行激发,并使用微机电系统(MEMS)麦克风作为检测器。达到的检测限值低于空气中甲烷本底浓度1.8 ppm。
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引用次数: 0
Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps 集成质量传感系统的小型差示扫描量热计:第一步
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2023-01-20 DOI: 10.5194/jsss-12-9-2023
Johanna Distler, T. Wöhrl, R. Werner, Michaela Gerlach, M. Gollner, F. Linseis, J. Kita, R. Moos
Abstract. In this paper, the first steps towards integrating a mass sensing systeminto an existing miniaturized ceramic DSC (differential scanningcalorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillatingcantilever. A simulation model reveals that the resolution of themeasurement can be improved by reducing the chip thickness. In this study,different measurement methods (acoustic, optical, and piezoresistive) areinvestigated. Three complete measurement systems are set up and evaluatedwith regard to their integration in the DSC chip. All presented measurementmethods show promising results and already allow mass measurements with aresolution of 100 µg.
摘要本文介绍了将质量传感系统集成到现有微型陶瓷DSC(差示扫描量热法)芯片中的第一步。基于DSC芯片作为振荡悬臂的质量相关频率变化,开发了一种振动装置。仿真模型表明,减小切屑厚度可以提高测量的分辨率。在这项研究中,研究了不同的测量方法(声学、光学和压阻)。建立了三个完整的测量系统,并对其在DSC芯片中的集成进行了评估。所有提出的测量方法都显示出有希望的结果,并且已经允许质量测量,其分辨率为100 µg。
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引用次数: 0
Simulation-based investigation of the metrological interface structural resolution capability of X-ray computed tomography scanners 基于仿真的X射线计算机断层扫描仪计量界面结构分辨率研究
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2023-01-12 DOI: 10.5194/jsss-12-1-2023
M. Busch, T. Hausotte
Abstract. The miniaturisation of components leads to new demands onmeasurement systems. One of these is the resolution. As a volumetric analysismethod and method of non-destructive testing, industrial X-ray computedtomography (XCT) has the ability to measure geometrical features and theircorresponding dimensions without destroying them and can therefore be used forquality assurance. However, the concept of resolution is not trivial for XCTand has not yet been finally clarified. In particular, the interface structuralresolution, the detectability of two surfaces facing each other aftersurface segmentation, faces a lack of a test specimen, a correspondingmeasurand and a reliable method. Simulation-based XCT investigations of amethod to determine this type of resolution are presented in this articleusing the geometry of a test specimen that contains several radiallyarranged holes of the same size. The borehole diameters correspond to thedistance between the holes to investigate the resolvability of surfaces andinterfaces. The evaluation is based on mean and extreme values of grey valueprofiles between the individual boreholes of the reconstructed volume. It isshown that the geometrical detectability of the test specimen surface andinterface can be extended by a reasonable choice of the threshold value forsurface segmentation within a defined interval. With regard to the resolvingcapability, a distinction is made between assured detectability and possibledetectability, as well as the threshold value used when using the ISO50threshold for surface segmentation and measurement chain completion.
摘要部件的小型化对测量系统提出了新的要求。其中之一就是决议。工业X射线计算机断层扫描(XCT)作为一种体积分析方法和无损检测方法,能够在不破坏几何特征及其相应尺寸的情况下测量几何特征及其对应尺寸,因此可以用于质量保证。然而,决议的概念并不是微不足道的,XCTand还没有最终澄清。特别是界面结构分辨率,即表面分割后两个面对面的可检测性,面临着缺乏试样、相应测量方法和可靠方法的问题。本文介绍了一种基于模拟的XCT研究方法,用于确定这种类型的分辨率,该方法是对包含几个相同尺寸径向排列孔的试样的几何形状进行研究。钻孔直径对应于孔之间的距离,以研究表面和界面的可分辨性。评估基于重建体积的各个钻孔之间的灰色值剖面的平均值和极值。结果表明,通过在规定的区间内合理选择表面分割阈值,可以扩展试样表面和界面的几何可检测性。关于分辨能力,区分了保证的可检测性和可能的可检测能力,以及在使用ISO50阈值进行表面分割和测量链完成时使用的阈值。
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引用次数: 0
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures 电极电导率对高温下压电谐振器质量灵敏度的影响
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-11-15 DOI: 10.5194/jsss-11-299-2022
Sebastian Schlack, H. Wulfmeier, H. Fritze
Abstract. High-temperature stable piezoelectric Ca3TaGa3Si2O14 and La3Ga5SiO14 resonators with keyhole-shaped Pt electrodes are coated with metal oxide films such as TiO2−δ and SnO2 that overlap the Pt electrodes. The resonators are exposed to reducing atmospheres in order to increase the electrical conductivity of the oxide film and then act as extended oxide electrodes. The resulting increase in the effective electrode radius causes an increase in the mass sensitivity of the resonators and, thereby, resonance frequency shifts. In other words, the effective mass of the Pt electrode becomes higher. An electrical circuit model is presented to describe the increase in the effective electrode radius of the resonator, which is used to calculate the related resonance frequency shift. Additionally, an electromechanical model is presented, which subdivides the resonator into two coupled oscillators. One is representing the resonator volume underneath the Pt electrode and the other underneath the oxide electrode at increased electrical conductivity. The model reflects how the oxide electrodes affect the resonance frequency. Furthermore, the impact of increasing oxide electrode conductivity on the resonance frequency is discussed with respect to the application of oxide electrodes and for gas sensing.
摘要具有钥匙孔形Pt电极的高温稳定压电Ca3TaGa3Si2O14和La3Ga5SiO14谐振器涂覆有与Pt电极重叠的金属氧化物膜,如TiO2-δ和SnO2。谐振器暴露于还原性气氛中以增加氧化物膜的导电性,然后充当延伸的氧化物电极。由此产生的有效电极半径的增加导致谐振器的质量灵敏度的增加,从而导致谐振频率偏移。换句话说,Pt电极的有效质量变得更高。提出了一个电路模型来描述谐振器有效电极半径的增加,该模型用于计算相关的谐振频移。此外,还提出了一个机电模型,将谐振器细分为两个耦合振荡器。一个表示Pt电极下方的谐振器体积,另一个表示电导率增加时氧化物电极下方的谐振腔体积。该模型反映了氧化物电极如何影响谐振频率。此外,关于氧化物电极的应用和气体传感,讨论了增加氧化物电极电导率对谐振频率的影响。
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引用次数: 1
In situ monitoring of used-sand regeneration in foundries by impedance spectroscopy 用阻抗谱法原位监测铸造厂旧砂再生
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-10-11 DOI: 10.5194/jsss-11-287-2022
L. Bifano, M. Weider, A. Fischerauer, Gotthard Wolf, G. Fischerauer
Abstract. This work deals with the impedimetric monitoring of used-sand regeneration in the foundry industry. During the regeneration of used sand, a quartz sand similar to new sand is produced from already used molding and core sand, which especially serves to produce new cores. We explore whether the regeneration progress can be assessed in situ based on measured impedance spectra and their features. The impedances of plate capacitors filled with different typical used-sand mixtures, consisting of quartz sand, coal dust, and bentonite, were repeatedly measured in a frequency range from 500 Hz to 1 MHz. The reproducibility of the measurements proved to be sufficient for practical applications. The mean impedances were plotted in Nyquist diagrams. From these plots, systematic impedance–composition correlations could be determined for two of the three component systems. Conclusions about the regeneration state could be drawn from the impedance curves by introducing various features. These were the median, the mean, and the standard deviation of the frequency-dependent resistance and reactance. With these indicators, it was then possible to establish one-to-one relations between the material composition of the molding materials and the impedance measurement. In field measurements on regenerated used sands, this observation was confirmed, and the regeneration progress was observed on the basis of the impedimetrically determined characteristic data.
摘要本工作涉及铸造工业中旧砂再生的阻抗监测。在旧砂再生过程中,由已经使用过的型砂和芯砂生产出类似于新砂的石英砂,特别是用于生产新芯。我们探索了是否可以根据测量的阻抗谱及其特征原位评估再生进展。在500的频率范围内,反复测量了填充有不同典型用过的沙子混合物(包括石英砂、煤尘和膨润土)的平板电容器的阻抗 Hz至1 MHz。测量的再现性被证明足以用于实际应用。平均阻抗绘制在奈奎斯特图中。根据这些图,可以确定三个组成系统中的两个组成系统的系统阻抗-成分相关性。通过引入各种特征,可以从阻抗曲线中得出再生状态的结论。这些是频率相关电阻和电抗的中值、平均值和标准偏差。有了这些指标,就有可能在成型材料的材料组成和阻抗测量之间建立一对一的关系。在再生旧砂的现场测量中,证实了这一观察结果,并根据阻抗测定的特征数据观察了再生过程。
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引用次数: 1
En route to automated maintenance of industrial printing systems: digital quantification of print-quality factors based on induced printing failure 在工业印刷系统自动化维护的道路上:基于诱导印刷故障的印刷质量因素的数字量化
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-09-16 DOI: 10.5194/jsss-11-277-2022
Peter Bischoff, A. Carreiro, C. Kroh, C. Schuster, T. Härtling
Abstract. Tracking and tracing are a key technology for production process optimization and subsequent cost reduction. However, several industrial environments (e.g. high temperatures in metal processing) are challenging for most part-marking and identification approaches. A method for printing individual part markings on metal components (e.g. data matrix codes (DMCs) or similar identifiers) with high temperatures and chemical resistance has been developed based on drop-on-demand (DOD) print technology and special ink dispersions with submicrometer-sized ceramic and glass particles. Both ink and printer are required to work highly reliably without nozzle clogging or other failures to prevent interruptions of the production process in which the printing technology is used. This is especially challenging for the pigmented inks applied here. To perform long-term tests with different ink formulations and to assess print quality over time, we set up a test bench for inkjet printing systems. We present a novel approach for monitoring the printhead's state as well as the print-quality degradation. This method does not require measuring and monitoring, e.g. electrical components or drop flight, as it is done in the state of the art and instead uses only the printed result. By digitally quantifying selected quality factors within the printed result and evaluating their progression over time, several non-stationary measurands were identified. Some of these measurands show a monotonic trend and, hence, can be used to measure print-quality degradation. These results are a promising basis for automated printing system maintenance.
摘要跟踪和追溯是生产过程优化和后续成本降低的关键技术。然而,一些工业环境(例如金属加工中的高温)对大多数零件标记和识别方法具有挑战性。基于按需滴(DOD)打印技术和具有亚微米尺寸的陶瓷和玻璃颗粒的特殊油墨分散体,开发了一种在高温和耐化学性的金属部件(例如数据矩阵代码(DMCs)或类似标识符)上打印单个部件标记的方法。油墨和打印机都需要高度可靠地工作,没有喷嘴堵塞或其他故障,以防止使用印刷技术的生产过程中断。这对于这里使用的颜料墨水来说尤其具有挑战性。为了使用不同的油墨配方进行长期测试,并评估长期的打印质量,我们建立了一个喷墨打印系统的测试台。我们提出了一种监测打印头状态以及打印质量退化的新方法。这种方法不需要测量和监控,例如电气元件或下降飞行,因为它是在最先进的状态下完成的,而是只使用打印结果。通过数字量化印刷结果中选定的质量因素并评估其随时间的进展,确定了几个非平稳测量。其中一些测量显示单调趋势,因此可用于测量印刷质量退化。这些结果为自动化打印系统维护提供了有希望的基础。
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引用次数: 3
Influence of the operation strategy on the energy consumption of an autonomous sensor node 操作策略对自主传感器节点能耗的影响
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-08-26 DOI: 10.5194/jsss-11-263-2022
F. Schösser, F. Schmitt, E. Kirchner, Richard Breimann
Abstract. Motivated by the application of industry 4.0 and Internet of Things (IoT) technologies, the development of cyber physical systems (CPS) is gaining momentum. As CPS require multiple measurement technologies to drive the intended function, e.g., condition monitoring and in situ measurement, the integration of measurement systems into industrial processes or individual products becomes a critical activity within the development process. Development methods like the V-Model support developers with methodological guidelines, but the related methods and models do not provide sufficient information regarding the energy supply of embedded systems. If the measurement system, consisting of sensor, calculation and communication unit is integrated inside an either sealed or moveable system, e.g., in a gearbox, ensuring a reliable communication and energy supply is a challenging task. This contribution therefore focuses on the energy supply, in particular the electric power consumption of autarchic measurement systems, referred to as sensor nodes. Based on a literature review of existing physical principles determining the energy consumption of semiconductors, a simple estimation model is derived. Estimation models in the current literature mainly focus on the effects of source code or software in general without analyzing a possible impact of operation strategies, such as generic data processing logics in practical applications. The model presented in this contribution is therefore used to identify the energy consumption of sensor nodes influenced by ambient and operating conditions of sensor nodes. Strategies are examined experimentally using an exemplary sensor node, a climatic chamber and a sensor-integrated gearbox as the system to be observed. An analysis of the conducted experiments leads to a more precise model, which is evaluated regarding its significance for predicting the energy consumption and the underlying simplifications. Finally, general relations influencing the energy consumption are presented and necessary research suggested.
摘要在工业4.0和物联网(IoT)技术应用的推动下,网络物理系统(CPS)的发展势头越来越大。由于CPS需要多种测量技术来驱动预期功能,例如状态监测和现场测量,因此将测量系统集成到工业过程或单个产品中成为开发过程中的一项关键活动。像V模型这样的开发方法为开发人员提供了方法指南,但相关的方法和模型没有提供足够的关于嵌入式系统能量供应的信息。如果由传感器、计算和通信单元组成的测量系统集成在密封或可移动系统内,例如齿轮箱中,则确保可靠的通信和能源供应是一项具有挑战性的任务。因此,这一贡献侧重于能源供应,特别是被称为传感器节点的自主测量系统的电力消耗。基于对决定半导体能耗的现有物理原理的文献综述,导出了一个简单的估计模型。当前文献中的估计模型主要关注源代码或软件的影响,而没有分析操作策略的可能影响,例如实际应用中的通用数据处理逻辑。因此,本贡献中提出的模型用于识别受传感器节点的环境和操作条件影响的传感器节点的能量消耗。使用示例性传感器节点、气候室和传感器集成齿轮箱作为待观察系统,对策略进行了实验检查。对所进行的实验进行分析,得出了一个更精确的模型,并对其在预测能源消耗和潜在简化方面的重要性进行了评估。最后,提出了影响能源消耗的一般关系,并提出了必要的研究建议。
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引用次数: 0
Design of a CMOS memristor emulator-based, self-adaptive spiking analog-to-digital data conversion as the lowest level of a self-x hierarchy 基于CMOS忆阻器仿真器的自适应尖峰模数数据转换的设计,作为自x层的最低层
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-08-10 DOI: 10.5194/jsss-11-233-2022
H. Abd, A. König
Abstract. The number of sensors used in modern devices is rapidly increasing, and the interaction with sensors demands analog-to-digital data conversion (ADC). A conventional ADC in leading-edge technologies faces many issues due to signal swings, manufacturing deviations, noise, etc. Designers of ADCs are moving to the time domain and digital designs techniques to deal with these issues. This work pursues a novel self-adaptive spiking neural ADC (SN-ADC) design with promising features, e.g., technology scaling issues, low-voltage operation, low power, and noise-robust conditioning. The SN-ADC uses spike time to carry the information. Therefore, it can be effectively translated to aggressive new technologies to implement reliable advanced sensory electronic systems. The SN-ADC supports self-x (self-calibration, self-optimization, and self-healing) and machine learning required for the internet of things (IoT) and Industry 4.0. We have designed the main part of SN-ADC, which is an adaptive spike-to-digital converter (ASDC). The ASDC is based on a self-adaptive complementary metal–oxide–semiconductor (CMOS) memristor. It mimics the functionality of biological synapses, long-term plasticity, and short-term plasticity. The key advantage of our design is the entirely local unsupervised adaptation scheme. The adaptation scheme consists of two hierarchical layers; the first layer is self-adapted, and the second layer is manually treated in this work. In our previous work, the adaptation process is based on 96 variables. Therefore, it requires considerable adaptation time to correct the synapses' weight. This paper proposes a novel self-adaptive scheme to reduce the number of variables to only four and has better adaptation capability with less delay time than our previous implementation. The maximum adaptation times of our previous work and this work are 15 h and 27 min vs. 1 min and 47.3 s. The current winner-take-all (WTA) circuits have issues, a high-cost design, and no identifying the close spikes. Therefore, a novel WTA circuit with memory is proposed. It used 352 transistors for 16 inputs and can process spikes with a minimum time difference of 3 ns. The ASDC has been tested under static and dynamic variations. The nominal values of the SN-ADC parameters' number of missing codes (NOMCs), integral non-linearity (INL), and differential non-linearity (DNL) are no missing code, 0.4 and 0.22 LSB, respectively, where LSB stands for the least significant bit. However, these values are degraded due to the dynamic and static deviation with maximum simulated change equal to 0.88 and 4 LSB and 6 codes for DNL, INL, and NOMC, respectively. The adaptation resets the SN-ADC parameters to the nominal values. The proposed ASDC is designed using X-FAB 0.35 µm CMOS technology and Cadence tools.
摘要现代设备中使用的传感器数量正在迅速增加,与传感器的交互需要模数数据转换(ADC)。前沿技术中的传统ADC由于信号波动、制造偏差、噪声等而面临许多问题。ADC的设计者正转向时域和数字设计技术来处理这些问题。这项工作追求一种新的自适应尖峰神经ADC(SN-ADC)设计,该设计具有很好的特点,例如技术缩放问题、低电压操作、低功率和噪声鲁棒调节。SN-ADC使用尖峰时间来携带信息。因此,它可以有效地转化为积极的新技术,以实现可靠的先进传感电子系统。SN-ADC支持物联网(IoT)和工业4.0所需的self-x(自校准、自优化和自我修复)和机器学习。我们设计了SN-ADC的主要部分,它是一个自适应尖峰到数字转换器(ASDC)。ASDC基于自适应互补金属氧化物半导体(CMOS)忆阻器。它模仿生物突触的功能,长期可塑性和短期可塑性。我们设计的关键优势是完全局部无监督的自适应方案。自适应方案由两个层次结构层组成;第一层是自适应的,第二层是手动处理的。在我们之前的工作中,适应过程基于96个变量。因此,纠正突触的重量需要相当长的适应时间。本文提出了一种新的自适应方案,将变量数量减少到只有四个,并且与以前的实现相比,具有更好的自适应能力和更少的延迟时间。我们之前的工作和本次工作的最大适应时间为15 h和27 最小值与1 最小值和47.3 s.目前的赢家通吃(WTA)电路存在问题,设计成本高,并且无法识别闭合尖峰。因此,提出了一种新型的带存储器的WTA电路。它使用352个晶体管作为16个输入,可以处理最小时间差为3的尖峰 ns。ASDC已经在静态和动态变化下进行了测试。SN-ADC参数的漏码数(NOMC)、积分非线性(INL)和微分非线性(DNL)的标称值分别为0.4和0.22 LSB,其中LSB代表最低有效位。然而,这些值由于动态和静态偏差而降低,最大模拟变化等于0.88和4 分别用于DNL、INL和NOMC的LSB和6个代码。自适应将SN-ADC参数重置为标称值。所提出的ASDC是使用X-FAB 0.35设计的 µm CMOS技术和Cadence工具。
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引用次数: 3
Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing 中红外吸收传感集成多晶硅波导的研制
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-08-09 DOI: 10.5194/jsss-11-225-2022
G. Stocker, C. Consani, P. Thakkar, C. Fleury, A. Tortschanoff, Khaoula-Farah Ourak, G. Pühringer, R. Jannesari, P. Saeidi, E. Aschauer, U. Bartl, Christoph Kovatsch, T. Grille, B. Jakoby
Abstract. The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air quality monitoring or leakage detection is one of the prominent applications. However, even though there are many different systems already available, the trend goes towards smaller and rather inconspicuous sensors which are embedded in the environment. We present the fabrication and characterization of integrated waveguides, which constitute an interesting platform for absorption spectroscopy in the mid-infrared (mid-IR) using the evanescent field of guided modes interacting with the analyte, thus leading to the absorption-induced attenuation of the mode. Corresponding simulations, characterizing the efficiency of the desired interaction, predict values for the confinement factor Γ and the intrinsic damping D for a waveguide geometry, which is then characterized by measurements. Furthermore, we discuss how these waveguides could be part of an integrated, non-dispersive, mid-IR sensor system fully integrated on a single chip. In this context, we present a way to maintain the quality of waveguides throughout the entire workflow needed to integrate a pyroelectric IR detector based on aluminum nitride (AlN).
摘要为了方便和安全,配备传感器的环境越来越普及,例如在智能家居、温室或现代汽车内部,需要各种传感器系统。在这方面,在空气质量监测或泄漏检测的意义上感测环境气体是突出的应用之一。然而,尽管已经有许多不同的系统可用,但趋势是嵌入环境中的更小且不显眼的传感器。我们介绍了集成波导的制造和表征,它构成了一个有趣的中红外(mid-IR)吸收光谱平台,使用与分析物相互作用的引导模式的倏逝场,从而导致模式的吸收诱导衰减。相应的模拟,表征了所需相互作用的效率,预测了波导几何结构的约束因子Γ和固有阻尼D的值,然后通过测量来表征。此外,我们还讨论了这些波导如何成为完全集成在单个芯片上的集成、非色散、中红外传感器系统的一部分。在这种情况下,我们提出了一种在集成基于氮化铝(AlN)的热电红外探测器所需的整个工作流程中保持波导质量的方法。
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引用次数: 0
期刊
Journal of Sensors and Sensor Systems
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