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Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell 一种新型单片式电磁力补偿称重传感器刚度和倾斜灵敏度补偿的调整概念
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-04-07 DOI: 10.5194/jsss-11-109-2022
M. Pabst, M. Darnieder, R. Theska, T. Fröhlich
Abstract. This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.
摘要本文介绍了一种新型平面、单片、高精度电磁力补偿称重单元的调整新概念。该概念允许刚度和倾斜敏感性的顺从机制,是依赖于标称负载的称重盘调整到最佳。根据已建立的力学模型建立和调整新的机构。为了评估这个概念,系统在高精度倾斜台和高真空条件下在市售质量比较器的环境中进行了测试。
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引用次数: 0
A modular adaptive residual generator for a diagnostic system that detects sensor faults on engine test beds 一种用于检测发动机试验台传感器故障诊断系统的模块化自适应残差发生器
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-03-29 DOI: 10.5194/jsss-11-99-2022
M. Wohlthan, G. Pirker, A. Wimmer
Abstract. It is a great challenge to apply a diagnostic system for sensor fault detection to engine test beds. The main problem is that such test beds involve frequent configuration changes or a change in the entire test engine. Therefore, the diagnostic system must be highly adaptable to different types of test engines. This paper presents a diagnostic method consisting of the following steps: residual generation, fault detection and fault isolation. As adaptability can be achieved with residual generation, the focus is on this step. The modular toolbox-based approach combines physics-based and data-driven modeling concepts and, thus, enables highly flexible application to various types of engine test beds. Adaptability and fault detection quality are validated using measurement data from a single-cylinder research engine and a multicylinder diesel engine.
摘要将传感器故障诊断系统应用于发动机试验台是一个巨大的挑战。主要的问题是,这样的测试平台涉及到频繁的配置更改或整个测试引擎的更改。因此,诊断系统必须对不同类型的测试发动机具有高度的适应性。本文提出了一种由残差产生、故障检测和故障隔离三个步骤组成的故障诊断方法。由于残差生成可以实现自适应性,因此重点放在这一步。基于模块化工具箱的方法结合了基于物理和数据驱动的建模概念,因此可以高度灵活地应用于各种类型的发动机试验台。利用单缸研究发动机和多缸柴油机的测量数据验证了该方法的适应性和故障检测质量。
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引用次数: 1
Assembly and interconnection technology for high-temperature bulk acoustic wave resonators 高温体声波谐振器的组装与互连技术
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-03-23 DOI: 10.5194/jsss-11-83-2022
F. Kohler, M. Farina, M. Schulz, H. Fritze, J. Wilde
Abstract. A sensor based on a piezoelectric single crystal enables operation even under harsh environmental conditions. In addition to the sensor element, the packaging technology is crucial for sensor performance. In this paper, a suitable assembly and interconnection technology concept ofCa3TaGa3Si2O14 (CTGS) resonators for high-temperature applications is presented as a platform for future sensor assemblies. The concept described here has already been functionally tested as a temperature sensor (Schulz et al., 2021). The concept includes a sapphire base plate, a housing lid, and a spacer made from aluminium oxide (Al2O3). The substrate is metallised with platinum manufactured into thin film and thick film technology. The ceramic components are fused with glass solder. The connection of the resonator to the conductive tracks is realised by thermosonic bonding with 25 µm platinum wire. Initially, the stability of the metallisation must be investigated before subsequent electrical testing under high temperature. Diffusion processes play a major role in this temperature range, and the stability of the layer is a necessary condition for subsequent investigations. A suitable set of bonding parameters and the strength of the platinum bonds prior to and after thermal load is analysed. Shear tests are used to evaluate the quality of the ceramic materials fused with glass solder after thermal ageing. The dielectrical properties of sapphire and glass solder such as the isolation resistance, the relative permittivity, and the loss factor at high temperatures are evaluated usinginterdigital structures. The loss factor is measured on both bare interdigital structures and the samples coated with glass solder to make an estimation about the conductive behaviour up to 1000 ∘C. A ceramic lid for the sensor housing is attached by a high-temperature stable glass solder. Since platinum conductors are fed through this glass solder connection, the electrical conductivity of the glass solder is characterised at high temperature. Furthermore, the hermeticity of the assemblies is verified by means of helium leakage tests. These investigations are the basis for the implementation of an assembly and interconnection technology that is suitable for reliable operation under extreme temperature conditions. The packaging technology also offers further possibilities for pressure or chemical sensors that can withstand high-temperature loads.
摘要基于压电单晶的传感器即使在恶劣的环境条件下也能工作。除了传感器元件外,封装技术对传感器的性能也至关重要。本文提出了一种适合高温应用的ca3taga3si2o14 (CTGS)谐振器的组装和互连技术概念,作为未来传感器组装的平台。这里描述的概念已经作为温度传感器进行了功能测试(Schulz et al., 2021)。这个概念包括一个蓝宝石底座,一个外壳盖和一个由氧化铝(Al2O3)制成的间隔。衬底用铂金属化制成薄膜和厚膜技术。陶瓷元件用玻璃焊料熔合。谐振器与导电轨道的连接是通过25 μ m铂线的热超声键合实现的。首先,在随后的高温下的电气测试之前,必须研究金属化的稳定性。扩散过程在此温度范围内起主要作用,层的稳定性是后续研究的必要条件。分析了一组合适的键合参数和热负荷前后铂键的强度。采用剪切试验对玻璃焊料熔接陶瓷材料热老化后的质量进行了评价。蓝宝石和玻璃焊料的介电性能,如隔离电阻,相对介电常数,以及在高温下的损耗因子评估使用数字间结构。损耗系数是在裸露的指间结构和涂有玻璃焊料的样品上测量的,以估计其在1000°C下的导电性能。传感器外壳的陶瓷盖由高温稳定的玻璃焊料连接。由于铂导体通过这种玻璃焊料连接,因此玻璃焊料的导电性在高温下具有特征。此外,通过氦气泄漏试验验证了组件的密封性。这些研究是实现适合在极端温度条件下可靠运行的组装和互连技术的基础。该封装技术还为能够承受高温载荷的压力或化学传感器提供了进一步的可能性。
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引用次数: 4
Structure of digital metrological twins as software for uncertainty estimation 作为不确定度估计软件的数字计量孪生结构
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-03-09 DOI: 10.5194/jsss-11-75-2022
I. Poroskun, C. Rothleitner, D. Heißelmann
Abstract. Ongoing digitalization in metrology and the ever-growing complexity of measurement systems have increased the effort required to create complex software for uncertainty estimation. To address this issue, a general structure for uncertainty estimation software will be presented in this work. The structure was derived from the Virtual Coordinate Measuring Machine (VCMM), which is a well-established tool for uncertainty estimation in the field of coordinate metrology. To make it easy to apply the software structure to specific projects, a supporting software library was created. The library is written in a portable and extensible way using the C++ programming language. The software structure and library proposed can be used in different domains of metrology. The library provides all the components necessary for uncertainty estimation (i.e., random number generators and GUM S1-compliant routines). Only the project-specific parts of the software must be developed by potential users. To verify the usability of the software structure and the library, a Virtual Planck-Balance, which is the digital metrological twin of a Kibble balance, is currently being developed.
摘要计量学的持续数字化和测量系统的不断增长的复杂性增加了创建复杂的不确定度估计软件的工作量。为了解决这个问题,本文将介绍不确定性估计软件的一般结构。该结构来源于虚拟坐标测量机(VCMM), VCMM是坐标测量领域中公认的不确定度估计工具。为了便于将软件结构应用于特定的项目,创建了一个支持的软件库。该库是使用c++编程语言以可移植和可扩展的方式编写的。所提出的软件结构和库可用于不同的计量领域。该库提供了不确定性估计所需的所有组件(例如,随机数生成器和符合GUM s1的例程)。只有软件的特定项目部分必须由潜在用户开发。为了验证软件结构和库的可用性,目前正在开发一个虚拟普朗克天平,它是基布尔天平的数字计量双胞胎。
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引用次数: 0
Particularities of pyroelectric detectors in absolute measurements of chopped radiation shown for the example of a spectral responsivity calibration in the near- and mid-infrared spectral range at two primary radiometric standards 热电探测器在斩波辐射绝对测量中的特殊性,以两个主要辐射标准下近红外和中红外光谱范围内的光谱响应度校准为例
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-02-23 DOI: 10.5194/jsss-11-61-2022
T. Pohl, P. Meindl, J. Hollandt, U. Johannsen, L. Werner
Abstract. The Physikalisch-Technische Bundesanstalt (PTB) expanded its capabilities for the calibration of the spectral responsivity s(λ) in the spectral range between 1.5 µm and 14 µm, traceable to the International System of Units (SI), with pyroelectric detectors as transfer standards. The pyroelectric transfer standards were calibrated absolutely against two independent primary radiometric standards, regarding their spectral responsivity s(λ). The first approach uses infrared laser sources at one of the PTB's cryogenic substitution radiometer facilities, which is a primary detector standard for the measurement of radiant power. The second approach uses a blackbody radiator with a temperature of about 1200 K, whose radiation can be calculated by Planck's law and is, in addition, spectrally selected by accurately characterized optical bandpass filters. Due to their measurement principle, pyroelectric detectors can only measuretemporal changes in the input radiant power and are, therefore, operated with a chopper wheel to chop the incident radiation. The detector signal, which is typically measured with a lock-in amplifier, depends not only on the amplitude but also on the temporal shape of the chopped radiant power. It is shown that the calculation of the radiant power used for the determination of the spectral responsivity must be based on an accurate approximation of the temporal shape of the chopped radiant flux at the detector. This shape is different for both applied primary methods. It is further shown that the particularities of the lock-in-technique have to be considered in the calculation of the spectral responsivity, including the correct calculation of the detector signal. The results of the calibration with both approaches are consistent, and therealized measurement uncertainty is in the range between 1 % and 14 %.The pyroelectric detectors were thereby established as transfer detectorsfor the SI traceable measurement of radiant power in the near-infrared (NIR) and mid-infrared (MIR).
摘要德国物理技术研究所(PTB)扩展了其在1.5µm至14µm光谱范围内光谱响应度s(λ)的校准能力,可追溯到国际单位制(SI),使用热释电探测器作为转换标准。根据其光谱响应率s(λ),对热释电转移标准物进行了绝对校准。第一种方法是在PTB的低温替代辐射计设施之一使用红外激光源,这是测量辐射功率的主要探测器标准。第二种方法使用温度约为1200k的黑体辐射体,其辐射可以通过普朗克定律计算,并通过精确表征的光学带通滤波器进行光谱选择。由于其测量原理,热释电探测器只能测量输入辐射功率的时间变化,因此,使用斩波轮来切割入射辐射。探测器信号通常是用锁相放大器测量的,它不仅取决于振幅,还取决于斩波辐射功率的时间形状。结果表明,用于测定光谱响应率的辐射功率的计算必须基于探测器处切碎辐射通量的时间形状的精确近似。这种形状对于应用的两种主要方法是不同的。进一步表明,在计算光谱响应度时,必须考虑锁定技术的特殊性,包括正确计算探测器信号。两种方法的校准结果一致,实现的测量不确定度在1% ~ 14%之间。因此,热释电探测器被建立为近红外(NIR)和中红外(MIR)辐射功率的SI可追溯测量的传递探测器。
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引用次数: 1
In situ analysis of hydration and ionic conductivity of sulfonated poly(ether ether ketone) thin films using an interdigitated electrode array and a nanobalance 用叉指电极阵列和纳米天平原位分析磺化聚醚酮薄膜的水合作用和离子导电性
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-02-23 DOI: 10.5194/jsss-11-51-2022
H. Wulfmeier, Niklas Warnecke, L. Pasquini, H. Fritze, P. Knauth
Abstract. Proton-conducting polymers, such as sulfonated poly(ether ether ketone) (SPEEK), are of great industrial interest. Such protonexchange membranes show high tendencies for water and water vapor uptake.The incorporation of water not only leads to mass and dimensional changes,but also to changes in conductivity by several orders of magnitude. Bothproperties highly impact the potential application of the materials and,therefore, have to be known precisely. As hydration is diffusion controlled,thin films may behave differently to bulk specimens. However, thedetermination of small mass changes occurring in thin-film samples is verychallenging. In this work, a new measurement setup is presented to simultaneouslycharacterize the mass change and the conductivity of thin polymer films. Themass change is measured by resonant piezoelectric spectroscopy (RPS) with ananobalance, which is based on high-precision piezoelectric resonators operating in thickness-shear mode (TSM). The mass resolution of thisnanobalance is ±7.9 ng. Electrochemical impedance spectroscopy andan interdigitated electrode array are used for conductivity measurements.The approach is validated by comparing two SPEEK films with differentdegrees of sulfonation (DS). The relative humidity (RH) in the measurement setup was changed stepwise within the range ∼ 2 % < RH < ∼ 85 %. For both material compositions,DS = 0.5 and DS = 0.9, the mass uptake, the hydration number and theproton conductivity are presented and discussed depending on RH. This newly designed experimental setup allows for in situ characterization of theproperties mentioned above; it can monitor not only the data for thestationary state, but also the dynamics of the hydration. To the authors'knowledge this is the first simultaneous and in situ measurement device forsimultaneously sensing mass and conductivity change due to hydration ofpolymeric thin-film materials.
摘要质子导电聚合物,如磺化聚醚醚酮(SPEEK),具有很大的工业价值。这种质子交换膜显示出吸收水和水蒸气的高趋势。水的加入不仅会导致质量和尺寸的变化,还会导致电导率的几个数量级的变化。Bothproperty对材料的潜在应用有很大影响,因此必须精确了解。由于水合作用受到扩散控制,薄膜的行为可能与大块试样不同。然而,确定薄膜样品中发生的小质量变化是非常具有挑战性的。在这项工作中,提出了一种新的测量装置来同时表征聚合物薄膜的质量变化和电导率。基于在厚度剪切模式(TSM)下工作的高精度压电谐振器,利用具有纳米探针的谐振压电光谱(RPS)测量了质量变化。这种纳米天平的质量分辨率为±7.9 电化学阻抗谱和叉指电极阵列用于电导率测量。通过比较两种不同磺化度(DS)的SPEEK薄膜,验证了该方法。测量设置中的相对湿度(RH)在~2的范围内逐步变化 % < RH < ∼ 85 %. 对于两种材料组成,DS = 0.5和DS = 0.9,给出并讨论了质量吸收、水合数和质子电导率随RH的变化。这种新设计的实验装置允许对上述性质进行原位表征;它不仅可以监测静态数据,还可以监测水合过程的动力学。据作者所知,这是第一个同时原位测量装置,用于同时传感聚合物薄膜材料水合引起的质量和电导率变化。
{"title":"In situ analysis of hydration and ionic conductivity of sulfonated poly(ether ether ketone) thin films using an interdigitated electrode array and a nanobalance","authors":"H. Wulfmeier, Niklas Warnecke, L. Pasquini, H. Fritze, P. Knauth","doi":"10.5194/jsss-11-51-2022","DOIUrl":"https://doi.org/10.5194/jsss-11-51-2022","url":null,"abstract":"Abstract. Proton-conducting polymers, such as sulfonated poly(ether ether ketone) (SPEEK), are of great industrial interest. Such proton\u0000exchange membranes show high tendencies for water and water vapor uptake.\u0000The incorporation of water not only leads to mass and dimensional changes,\u0000but also to changes in conductivity by several orders of magnitude. Both\u0000properties highly impact the potential application of the materials and,\u0000therefore, have to be known precisely. As hydration is diffusion controlled,\u0000thin films may behave differently to bulk specimens. However, the\u0000determination of small mass changes occurring in thin-film samples is very\u0000challenging. In this work, a new measurement setup is presented to simultaneously\u0000characterize the mass change and the conductivity of thin polymer films. The\u0000mass change is measured by resonant piezoelectric spectroscopy (RPS) with a\u0000nanobalance, which is based on high-precision piezoelectric resonators operating in thickness-shear mode (TSM). The mass resolution of this\u0000nanobalance is ±7.9 ng. Electrochemical impedance spectroscopy and\u0000an interdigitated electrode array are used for conductivity measurements.\u0000The approach is validated by comparing two SPEEK films with different\u0000degrees of sulfonation (DS). The relative humidity (RH) in the measurement setup was changed stepwise within the range ∼ 2 % < RH < ∼ 85 %. For both material compositions,\u0000DS = 0.5 and DS = 0.9, the mass uptake, the hydration number and the\u0000proton conductivity are presented and discussed depending on RH. This newly designed experimental setup allows for in situ characterization of the\u0000properties mentioned above; it can monitor not only the data for the\u0000stationary state, but also the dynamics of the hydration. To the authors'\u0000knowledge this is the first simultaneous and in situ measurement device for\u0000simultaneously sensing mass and conductivity change due to hydration of\u0000polymeric thin-film materials.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2022-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46627219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Method and experimental investigation of surface heat dissipation measurement using 3D thermography 三维热像仪测量表面散热的方法及实验研究
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-02-11 DOI: 10.5194/jsss-11-41-2022
R. Schmoll, S. Schramm, Tom Breitenstein, A. Kroll
Abstract. Three-dimensional thermography describes the fusion of geometry- and temperature-related sensor data. In the resulting 3D thermogram, thermal and spatial information of the measured object is available in one single model. Besides the simplified visualization of measurement results, the question arises how the additional data can be used to get further information. In this work, the Supplement information is used to calculate the surface heat dissipation caused by thermal radiation and natural convection. For this purpose, a 3D thermography system is presented, the calculation of the heat dissipation is described, and the first results for simply shaped measurement objects are presented.
摘要三维热成像描述了几何和温度相关传感器数据的融合。在得到的3D热谱图中,被测物体的热信息和空间信息在一个模型中可用。除了测量结果的简化可视化之外,还出现了如何使用附加数据来获得进一步信息的问题。在这项工作中,补充信息用于计算由热辐射和自然对流引起的表面散热。为此,提出了一个三维热成像系统,描述了散热的计算,并给出了简单形状测量对象的第一个结果。
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引用次数: 2
An in-hive soft sensor based on phase space features for Varroa infestation level estimation and treatment need detection 一种基于相空间特征的蜂房内软传感器用于瓦罗华侵扰程度估计和治疗需求检测
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-01-20 DOI: 10.5194/jsss-11-29-2022
A. König
Abstract. Bees are recognized as an indispensable link in the human food chain and general ecological system.Numerous threats, from pesticides to parasites, endanger bees, enlarge the burden on hive keepers, and frequently lead to hive collapse.The Varroa destructor mite is a key threat to bee keeping, and the monitoring of hive infestation levels isof major concern for effective treatment. Continuous and unobtrusive monitoring of hive infestation levels along with other vital bee hive parameters is coveted, although there is currently no explicit sensor for this task. This problem is strikingly similar to issues such ascondition monitoring or Industry 4.0 tasks, and sensors and machine learning bear the promise of viable solutions (e.g., creating a soft sensor for the task).In the context of our IndusBee4.0 project, following a bottom-up approach, a modular in-hive gas sensing system, denoted as BeE-Nose, based on commonmetal-oxide gas sensors (in particular, the Sensirion SGP30 and the Bosch Sensortec BME680) was deployed for a substantial part of the 2020bee season in a single colony for a single measurement campaign. The ground truth of the Varroa population size was determined by repeated conventional method application.This paper is focused on application-specific invariant feature computation for daily hive activity characterization.The results of both gas sensors for Varroa infestation level estimation (VILE) and automated treatment need detection (ATND), as a thresholded or two-class interpretation of VILE, in the order of up to 95 % are presented.Future work strives to employ a richer sensor palette and evaluation approaches for several hives over a bee season.
摘要蜜蜂被认为是人类食物链和整个生态系统中不可或缺的一环。从杀虫剂到寄生虫,许多威胁都会危及蜜蜂,增加养蜂人的负担,并经常导致蜂巢倒塌。瓦螨是养蜂的主要威胁,监测蜂箱侵扰程度是有效治疗的主要问题。尽管目前还没有明确的传感器来完成这项任务,但对蜂箱侵扰程度以及其他重要的蜂箱参数进行持续而不引人注目的监测是令人垂涎的。这个问题与条件监测或工业4.0任务等问题惊人地相似,传感器和机器学习有望提供可行的解决方案(例如,为任务创建软传感器)。在我们的Indus Bee4.0项目中,遵循自下而上的方法,基于常见金属氧化物气体传感器(特别是Sensionon SGP30和Bosch Sensortec BME680)的模块化蜂箱内气体传感系统(称为BeE Nose)在2020年蜜蜂季节的大部分时间里部署在一个蜂群中,用于一次测量活动。Varroa种群规模的基本事实是通过重复常规方法应用来确定的。本文的重点是应用特定的不变特征计算来表征日常蜂箱活动。Varroa侵扰水平估计(VILE)和自动治疗需求检测(ATND)的气体传感器的结果,作为VILE的阈值或两类解释,最高可达95 % 呈现。未来的工作将努力在一个蜜蜂季节为几个蜂箱采用更丰富的传感器调色板和评估方法。
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引用次数: 1
Design of a dual electrochemical quartz crystal microbalance with dissipation monitoring 具有耗散监测功能的双电化学石英晶体微量天平的设计
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-01-18 DOI: 10.5194/jsss-11-21-2022
R. Ecker, N. Doppelhammer, B. Jakoby, E. Reichel
Abstract. The design and fabrication of a dual electrochemical quartz crystal microbalance sensor unit with dissipation monitoring (EQCMD) for in situ monitoring of crystallization processes, such as the formation of zeolites from liquid media, is reported. The integrated temperature unit is based on Peltier elements and precision temperature sensors with accurate and fast temperature control. In this design, two thickness-shear mode quartz disk resonators are oppositely arranged, enabling the application of an electric field through the sample while concurrently being able to monitor the resonance frequencies and quality factors of both resonators. As demonstrated experimentally, this allows for the characterization of the sample by means of the viscosity, via the acoustic impedance, and the electrical conductivity. Monitoring zeolite formation based on these parameters, however, turned out to be challenging, mainly because the electrodes suffered from severe corrosion. Despite the use of chemically resistant materials and insulating coatings, the electrodes were attacked by the reaction medium, presumably due to surface defects. Furthermore, air bubbles, which developed over time and adhered persistently to the quartzsurfaces, also had a negative influence on the measurement. Despite theencountered issues, we want to communicate our sensor design, as its basicfunctionality, including the dedicated electronics and software performwell, and reporting the observed issues will enable further progress in this field.
摘要报道了一种带耗散监测的双电化学石英晶体微天平传感器单元(EQCMD)的设计和制造,用于原位监测结晶过程,如液体介质中沸石的形成。集成温度单元基于Peltier元件和精确的温度传感器,具有精确快速的温度控制。在这种设计中,两个厚度剪切模式石英盘谐振器相对布置,使得能够通过样品施加电场,同时能够监测两个谐振器的谐振频率和质量因子。如实验所示,这允许通过粘度、声阻抗和电导率来表征样品。然而,基于这些参数监测沸石的形成是具有挑战性的,主要是因为电极受到严重腐蚀。尽管使用了耐化学性材料和绝缘涂层,电极还是受到了反应介质的攻击,可能是由于表面缺陷。此外,随着时间的推移而形成并持续粘附在石英表面的气泡也对测量产生了负面影响。尽管存在未解决的问题,但我们希望沟通我们的传感器设计,作为其基本功能,包括专用的电子设备和软件性能,并报告观察到的问题将使该领域取得进一步进展。
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引用次数: 0
Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide 基于铟锡氧化物的等离子体狭缝波导红外气体传感器的数值分析
IF 1 Q4 INSTRUMENTS & INSTRUMENTATION Pub Date : 2022-01-14 DOI: 10.5194/jsss-11-15-2022
P. Saeidi, B. Jakoby, G. Pühringer, A. Tortschanoff, G. Stocker, J. Spettel, T. Grille, R. Jannesari
Abstract. Plasmonic waveguides have attracted much attention owingto the associated high field intensity at the metal–dielectric interface andtheir ability to confine the modes at the nanometer scale. At the same time,they suffer from relatively high propagation loss, which is due to thepresence of metal. Several alternative materials have been introduced toreplace noble metals, such as transparent conductive oxides (TCOs). Aparticularly popular TCO is indium tin oxide (ITO), which is compatible withstandard microelectromechanical systems (MEMS) technology. In this work, the feasibility of ITO as analternative plasmonic material is investigated for infrared absorption sensingapplications: we numerically design and optimize an ITO-basedplasmonic slot waveguide for a wavelength of 4.26 µm, which is the absorptionline of CO2. Our optimization is based on a figure of merit (FOM), whichis defined as the confinement factor divided by the imaginary part of the effective modeindex (i.e., the intrinsic damping of the mode). The obtained optimal FOM is3.2, which corresponds to 9 µm and 49 % for the propagation length(characterizing the intrinsic damping) and the confinement factor,respectively.
摘要等离子体波导由于其在金属-介电界面处的高场强和在纳米尺度上限制模式的能力而受到广泛关注。同时,由于金属的存在,它们遭受相对较高的传播损耗。已经引入了几种替代材料来取代贵金属,例如透明导电氧化物(tco)。特别流行的TCO是氧化铟锡(ITO),它与标准微机电系统(MEMS)技术兼容。在这项工作中,研究了ITO作为等离子体材料替代红外吸收传感应用的可行性:我们数值设计和优化了一个基于ITO的等离子体缝隙波导,波长为4.26µm,这是CO2的吸收线。我们的优化是基于优值图(FOM),它被定义为约束因子除以有效模态指数的虚部(即模态的固有阻尼)。得到的最优FOM为3.2,对应于传输长度(表征本征阻尼)为9µm,约束因子为49%。
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引用次数: 1
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Journal of Sensors and Sensor Systems
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