Dennis Vollberg, P. Gibson, G. Schultes, Hans-Werner Groh, T. Heinze
Abstract. Our approach of a closed-loop combustion control is built on an intensively evaluated robust cylinder pressure sensor with integrated smart electronics and an openly programmed engine control unit. The presented pressure sensor consists of a steel membrane and a highly strain-sensitive thin film with laser-welded electrical contacts. All components are optimized for reliable operation at high temperatures. The sensor setup safely converts the in-cylinder pressure of a combustion engine at temperatures of up to 200 ∘C into the desired electrical values. Furthermore, the embedded smart electronics provides a fast analogue to digital conversion and subsequently computes significant combustion parameters in real time, based on implemented thermodynamic equations, namely the 50 % mass fraction burned, the indicated mean effective pressure, the maximum pressure and a digital value, which represents the intensity of knocking. Only these aggregated parameters – not the running pressure values – are sent to the engine control unit. The data communication between the smart sensor and the engine control unit is based on the controller area network bus system, which is widely spread in the automotive industry and allows a robust data transfer minimizing electrical interferences. The established closed-loop combustion control is able to control the ignition angle in accordance with the 50 % mass fraction burned at a certain crankshaft angle. With this loop, the combustion engine is controlled and run efficiently even if the ignition angle is intentionally incorrectly adjusted. The controlled and automatic correction of simulated ageing effects is demonstrated as well as the self-adjustment of an efficient operation when different fuels are used. In addition, our approach saves the computing capacity of the engine control unit by outsourcing the data processing to the sensor system.
{"title":"Smart in-cylinder pressure sensor for closed-loop combustion control","authors":"Dennis Vollberg, P. Gibson, G. Schultes, Hans-Werner Groh, T. Heinze","doi":"10.5194/jsss-11-1-2022","DOIUrl":"https://doi.org/10.5194/jsss-11-1-2022","url":null,"abstract":"Abstract. Our approach of a closed-loop combustion control is built on an intensively evaluated robust cylinder pressure sensor with integrated smart\u0000electronics and an openly programmed engine control unit. The presented\u0000pressure sensor consists of a steel membrane and a highly strain-sensitive thin film with laser-welded electrical contacts. All components are\u0000optimized for reliable operation at high temperatures. The sensor setup\u0000safely converts the in-cylinder pressure of a combustion engine at\u0000temperatures of up to 200 ∘C into the desired electrical values.\u0000Furthermore, the embedded smart electronics provides a fast analogue to digital conversion and subsequently computes significant combustion parameters in real time, based on implemented thermodynamic equations,\u0000namely the 50 % mass fraction burned, the indicated mean effective\u0000pressure, the maximum pressure and a digital value, which represents the\u0000intensity of knocking. Only these aggregated parameters – not the running\u0000pressure values – are sent to the engine control unit. The data\u0000communication between the smart sensor and the engine control unit is based\u0000on the controller area network bus system, which is widely spread in the\u0000automotive industry and allows a robust data transfer minimizing electrical\u0000interferences. The established closed-loop combustion control is able to control the ignition angle in accordance with the 50 % mass fraction burned\u0000at a certain crankshaft angle. With this loop, the combustion engine is\u0000controlled and run efficiently even if the ignition angle is intentionally\u0000incorrectly adjusted. The controlled and automatic correction of simulated\u0000ageing effects is demonstrated as well as the self-adjustment of an efficient operation when different fuels are used. In addition, our approach saves the computing capacity of the engine control unit by outsourcing the data processing to the sensor system.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2022-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47857693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-13DOI: 10.5194/jsss-10-289-2021
D. Hutzschenreuter, Bernd Müller, Jan Loewe, R. Klobučar
Abstract. The digital transformation in the field of sensors and sensor systems fosters an increasing exchange and interoperation of measurement data by machines. The data of measurement need to be uniformly structured based on The International System of Units (SI) with appropriate information on measurement uncertainty. This work presents a concept for an online validation system that can be used by humans and software to efficiently classify the agreement of XML-structured data with relevant recommendations for measurement data. The system is within the TraCIM (Traceability for Computationally-Intensive Metrology) validation platform which was developed for software validation in metrology where high standards of quality management must be met.
{"title":"Validation of SI-based digital data of measurement using the TraCIM system","authors":"D. Hutzschenreuter, Bernd Müller, Jan Loewe, R. Klobučar","doi":"10.5194/jsss-10-289-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-289-2021","url":null,"abstract":"Abstract. The digital transformation in the field of sensors and sensor systems fosters an increasing exchange and interoperation of measurement data by machines. The data of measurement need to be uniformly structured based on The International System of Units (SI) with appropriate information on measurement uncertainty. This work presents a concept for an online validation system that can be used by humans and software to efficiently classify the agreement of XML-structured data with relevant recommendations for measurement data. The system is within the TraCIM (Traceability for Computationally-Intensive Metrology) validation platform which was developed for software validation in metrology where high standards of quality management must be met.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42870070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-10DOI: 10.5194/jsss-10-281-2021
Marwa Othmen, Radwen Bahri, Slaheddine Najar, A. Hannachi
Abstract. This article aims to present equipment designed and developed to study the effective thermal conductivity of composite panels. The composite panel used is a rigid polyurethane foam covered with a layer of aluminum on both sides. The panel is mounted in the test chamber equipped with several sensors and actuators connected via an Arduino platform. Tests have been carried out by applying heat to impose various interior temperatures. Sensors at different locations are used to monitor and record temperatures in and around the composite panel during heating and natural cooling. A model, based on the Fourier equations of thermal conduction and natural convection heat transfer for the steady state, was developed to assess the effective thermal conductivity. The performance of the system was confirmed using temperature signals through the panels for thermal characterization of composite materials. The determined effective thermal conductivity obtained was in agreement with the experimental values reported in the technical data sheets with relative deviations of less than 10 %.
{"title":"Monitor and control test room for investigating thermal performance of panels incorporating phase-change material","authors":"Marwa Othmen, Radwen Bahri, Slaheddine Najar, A. Hannachi","doi":"10.5194/jsss-10-281-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-281-2021","url":null,"abstract":"Abstract. This article aims to present equipment designed and\u0000developed to study the effective thermal conductivity of composite panels.\u0000The composite panel used is a rigid polyurethane foam covered with a layer\u0000of aluminum on both sides. The panel is mounted in the test chamber\u0000equipped with several sensors and actuators connected via an Arduino\u0000platform. Tests have been carried out by applying heat to impose\u0000various interior temperatures. Sensors at different locations are used to\u0000monitor and record temperatures in and around the composite panel during\u0000heating and natural cooling. A model, based on the Fourier equations of\u0000thermal conduction and natural convection heat transfer for the\u0000steady state, was developed to assess the effective thermal conductivity.\u0000The performance of the system was confirmed using temperature signals\u0000through the panels for thermal characterization of composite materials. The\u0000determined effective thermal conductivity obtained was in agreement with the\u0000experimental values reported in the technical data sheets with relative\u0000deviations of less than 10 %.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45789009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-11-19DOI: 10.5194/jsss-10-271-2021
M. Schulz, Rezvan Ghanavati, F. Kohler, J. Wilde, H. Fritze
Abstract. A temperature sensor based on piezoelectric single crystals allowing stable operation in harsh environments such as extreme temperatures and highly reducing or oxidizing atmospheres is presented. The temperature dependence of the mechanical stiffness of thickness shear mode resonators is used to determine temperature changes. The sensor is based on catangasite (Ca3TaGa3Si2O14 – CTGS), a member of a langasite crystal family. CTGS exhibits an ordered crystal structure and low acoustic losses, even at 1000 ∘C. The resonance frequency and quality factor of unhoused and of housed CTGS resonators are measured up to about 1030 ∘C. A temperature coefficient of the resonance frequency of about 200 Hz K−1 for a 5 MHz device is found and enables determination of temperature changes as small as 0.04 K. Housed CTGS resonators do not show any significant change in the resonance behavior during a 30 d, long-term test at 711 ∘C.
{"title":"High-temperature behavior of housed piezoelectric resonators based on CTGS","authors":"M. Schulz, Rezvan Ghanavati, F. Kohler, J. Wilde, H. Fritze","doi":"10.5194/jsss-10-271-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-271-2021","url":null,"abstract":"Abstract. A temperature sensor based on piezoelectric single crystals allowing stable operation in harsh environments such as extreme temperatures and highly reducing or oxidizing atmospheres is presented. The temperature dependence of the mechanical stiffness of thickness shear mode resonators is used to determine temperature changes. The sensor is based on catangasite (Ca3TaGa3Si2O14 – CTGS), a member of a langasite crystal family. CTGS exhibits an ordered crystal structure and low acoustic losses, even at 1000 ∘C. The resonance frequency and quality factor of unhoused and of housed CTGS resonators are measured up to about 1030 ∘C. A temperature coefficient of the resonance frequency of about 200 Hz K−1 for a 5 MHz device is found and enables determination of temperature changes as small as 0.04 K. Housed CTGS resonators do not show any significant change in the resonance behavior during a 30 d, long-term test at 711 ∘C.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45439165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-09-22DOI: 10.5194/jsss-10-247-2021
Martin Lerchen, Julien Schinn, T. Hausotte
Abstract. An increasing number of additive manufacturing (AM) applications leads to rising challenges for the process-accompanying quality assurance. Beside post-processing measurement systems, in situ monitoring systems in particular are currently requested to ensure feedback controlling during AM processes. For data acquisition and subsequent evaluation, a high data quality is of importance. It depends on a high resolution and accuracy of measurement systems, adapted measurement conditions and a reference to the powder bed or component for geometric measurements. Within this scientific study, a new reference system has been implemented into the powder bed to reduce measurement deviations by an abbreviated metrological loop. After data acquisition and image processing layer by layer, the position stability of the reference system has been analysed in relation to the optical measuring system. Based on a contour detection of the reference markers, the evaluation of geometrical process deviations is presented as an essential basis for a closed-loop controlling system. Thermally induced and mechanical drifts within the manufacturing process can be verified by the reference system in the powder bed. As an outlook, two methods are suggested for a process-accompanying referenced detection of the melting pool and resulting contour displacements during additive manufacturing.
{"title":"Referencing of powder bed for in situ detection of lateral layer displacements in additive manufacturing","authors":"Martin Lerchen, Julien Schinn, T. Hausotte","doi":"10.5194/jsss-10-247-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-247-2021","url":null,"abstract":"Abstract. An increasing number of additive manufacturing (AM) applications leads to rising challenges for the process-accompanying quality assurance.\u0000Beside post-processing measurement systems, in situ monitoring systems in particular are currently requested to ensure feedback controlling during AM processes.\u0000For data acquisition and subsequent evaluation, a high data quality is of importance.\u0000It depends on a high resolution and accuracy of measurement systems, adapted measurement conditions and a reference to the powder bed or component for geometric measurements.\u0000Within this scientific study, a new reference system has been implemented into the powder bed to reduce measurement deviations by an abbreviated metrological loop.\u0000After data acquisition and image processing layer by layer, the position stability of the reference system has been analysed in relation to the optical measuring system.\u0000Based on a contour detection of the reference markers, the evaluation of geometrical process deviations is presented as an essential basis for a closed-loop controlling system.\u0000Thermally induced and mechanical drifts within the manufacturing process can be verified by the reference system in the powder bed.\u0000As an outlook, two methods are suggested for a process-accompanying referenced detection of the melting pool and resulting contour displacements during additive manufacturing.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44974202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-08-24DOI: 10.5194/jsss-10-233-2021
T. Dorst, Y. Robin, S. Eichstädt, A. Schütze, T. Schneider
Abstract. Process sensor data allow for not only the control of industrial processes but also an assessment of plant conditions to detect fault conditions and wear by using sensor fusion and machine learning (ML). A fundamental problem is the data quality, which is limited, inter alia, by time synchronization problems. To examine the influence of time synchronization within a distributed sensor system on the prediction performance, a test bed for end-of-line tests, lifetime prediction, and condition monitoring of electromechanical cylinders is considered. The test bed drives the cylinder in a periodic cycle at maximum load, a 1 s period at constant drive speed is used to predict the remaining useful lifetime (RUL). The various sensors for vibration, force, etc. integrated into the test bed are sampled at rates between 10 kHz and 1 MHz. The sensor data are used to train a classification ML model to predict the RUL with a resolution of 1 % based on feature extraction, feature selection, and linear discriminant analysis (LDA) projection. In this contribution, artificial time shifts of up to 50 ms between individual sensors' cycles are introduced, and their influence on the performance of the RUL prediction is investigated. While the ML model achieves good results if no time shifts are introduced, we observed that applying the model trained with unmodified data only to data sets with time shifts results in very poor performance of the RUL prediction even for small time shifts of 0.1 ms. To achieve an acceptable performance also for time-shifted data and thus achieve a more robust model for application, different approaches were investigated. One approach is based on a modified feature extraction approach excluding the phase values after Fourier transformation; a second is based on extending the training data set by including artificially time-shifted data. This latter approach is thus similar to data augmentation used to improve training of neural networks.
{"title":"Influence of synchronization within a sensor network on machine learning results","authors":"T. Dorst, Y. Robin, S. Eichstädt, A. Schütze, T. Schneider","doi":"10.5194/jsss-10-233-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-233-2021","url":null,"abstract":"Abstract. Process sensor data allow for not only the control of industrial processes but also an assessment of plant conditions to detect fault conditions and wear by using sensor fusion and machine learning (ML). A fundamental problem is the data quality, which is limited, inter alia, by time synchronization problems. To examine the influence of time synchronization within a distributed sensor system on the prediction performance, a test bed for end-of-line tests, lifetime prediction, and condition monitoring of electromechanical cylinders is considered. The test bed drives the cylinder in a periodic cycle at maximum load, a 1 s period at constant drive speed is used to predict the remaining useful lifetime (RUL). The various sensors for vibration, force, etc. integrated into the test bed are sampled at rates between 10 kHz and 1 MHz. The sensor data are used to train a classification ML model to predict the RUL with a resolution of 1 % based on feature extraction, feature selection, and linear discriminant analysis (LDA) projection. In this contribution, artificial time shifts of up to 50 ms between individual sensors' cycles are introduced, and their influence on the performance of the RUL prediction is investigated. While the ML model achieves good results if no time shifts are introduced, we observed that applying the model trained with unmodified data only to data sets with time shifts results in very poor performance of the RUL prediction even for small time shifts of 0.1 ms. To achieve an acceptable performance also for time-shifted data and thus achieve a more robust model for application, different approaches were investigated. One approach is based on a modified feature extraction approach excluding the phase values after Fourier transformation; a second is based on extending the training data set by including artificially time-shifted data. This latter approach is thus similar to data augmentation used to improve training of neural networks.","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":"112 1","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-08-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"70626810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-07-26DOI: 10.5194/jsss-10-185-2021
B. Bierer, D. Grgic, O. Yurchenko, L. Engel, H. Pernau, M. Jägle, L. Reindl, J. Wöllenstein
Abstract. The detection of flammable gases is necessary to avoid explosive atmospheres. For this reason, low-cost pellistors are frequently used. However, such commercial pellistors require an operation temperature of 450 ∘C or more for the detection of methane and a correspondingly high power consumption. We present a novel wireless low-power catalytic gas sensor system based on non-precious metal catalyst for the detection of methane and propane operated at 350 ∘C. The combination of a microelectromechanical system (MEMS)-based sensor with a low-power radio system provides the opportunity to monitor complex infrastructure without using a power grid as power supply. The sensor system has been characterised extensively under the exposure to methane and propane at concentrations between 2000 and 8000 ppm, as these gases are the common test gases for pellistors in industry. Methane is the main component of natural gas; propane is an important component of liquified petroleum gas (LPG). In addition, the influence of changes in humidity on the sensor response to methane was examined in more detail. Due to the planned operation of the sensor and radio system in different application scenarios, short (3 s) and long (60 s) sampling rates were used for investigations.
{"title":"Low-power sensor node for the detection of methane and propane","authors":"B. Bierer, D. Grgic, O. Yurchenko, L. Engel, H. Pernau, M. Jägle, L. Reindl, J. Wöllenstein","doi":"10.5194/jsss-10-185-2021","DOIUrl":"https://doi.org/10.5194/jsss-10-185-2021","url":null,"abstract":"Abstract. The detection of flammable gases is necessary to avoid explosive atmospheres. For this reason, low-cost pellistors are frequently used. However, such commercial pellistors require an operation temperature of 450 ∘C or more for the detection of methane and a correspondingly high power consumption. We present a novel wireless low-power catalytic gas sensor system based on non-precious metal catalyst for the detection of methane and propane operated at 350 ∘C. The combination of a microelectromechanical system (MEMS)-based sensor with a low-power radio system provides the opportunity to monitor complex infrastructure without using a power grid as power supply. The sensor system has been characterised extensively under the exposure to methane and propane at concentrations between 2000 and 8000 ppm, as these gases are the common test gases for pellistors in industry. Methane is the main component of natural gas; propane is an important component of liquified petroleum gas (LPG). In addition, the influence of changes in humidity on the sensor response to methane was examined in more detail. Due to the planned operation of the sensor and radio system in different application scenarios, short (3 s) and long (60 s) sampling rates were used for investigations.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48316926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-07-21DOI: 10.5194/JSSS-10-179-2021
H. Budzier, G. Gerlach
Abstract. In thermometry, the displayed temperature value of an object depends on the size of the object. This behaviour, also known as the size-of-source effect (SSE), might be a major cause of measurement uncertainty in a thermoscene. The SSE is caused by diffraction, scattering, reflection, aberration and digitization in the optoelectronic propagation path. The influence of diffraction and digitization (sampling and pixelization) can be described advantageously with the modulation transfer function MTF. The system MTF of an uncooled camera is determined by the diffraction in the lens (optical MTF) and the averaging of the radiation over the pixel area (pixel MTF). If the system MTF is known, the contrast reduction and, thus, the SSE can be calculated. Especially with very small objects, e.g. hotspots creating an image covering less than 4 pixel × 4 pixel on the focal plane, the displayed temperatures are much too low. When imaging large objects, such as area blackbodies, not only the edge areas are affected, but also the entire image. Finally, the contrast reduction by the MTF is explained by means of a complex scene (Siemens star).
{"title":"The size-of-source effect in thermography","authors":"H. Budzier, G. Gerlach","doi":"10.5194/JSSS-10-179-2021","DOIUrl":"https://doi.org/10.5194/JSSS-10-179-2021","url":null,"abstract":"Abstract. In thermometry, the displayed temperature value of an object depends on the size of the object. This behaviour, also known as the size-of-source effect (SSE), might be a major cause of measurement uncertainty in a thermoscene. The SSE is caused by diffraction, scattering, reflection, aberration and digitization in the optoelectronic propagation path. The influence of diffraction and digitization (sampling and pixelization) can be described\u0000advantageously with the modulation transfer function MTF. The system MTF of an uncooled camera is determined by the diffraction in\u0000the lens (optical MTF) and the averaging of the radiation over the pixel area (pixel MTF). If the system MTF is known,\u0000the contrast reduction and, thus, the SSE can be calculated. Especially with very small objects, e.g. hotspots creating an image covering less than\u00004 pixel × 4 pixel on the focal plane, the displayed temperatures are much too low. When imaging large objects, such as area blackbodies,\u0000not only the edge areas are affected, but also the entire image. Finally, the contrast reduction by the MTF is explained by means of a complex scene (Siemens star).\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48685213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-07-15DOI: 10.5194/JSSS-10-171-2021
Yiting Wu, E. Wirthmann, U. Klöpzig, T. Hausotte
Abstract. This article presents a new metrological atomic force microscope (MAFM) head with a new beam alignment and a combined one-beam detection of the cantilever deflection. An interferometric measurement system is used for the determination of the position of the cantilever, while a quadrant photodiode measures the bending and torsion of the cantilever. To improve the signal quality and reduce disturbing interferences, the optical design was revised in comparison to the systems of others (Dorozhovets et al., 2006; Balzer et al., 2011; Hausotte et al., 2012). The integration of the MAFM head in a nanomeasuring machine (NMM-1) offers the possibility of large-scale measurements over a range of 25mm×25mm×5 mm with sub-nanometre resolution. A large number of measurements have been performed by this MAFM head in combination with the NMM-1. This paper presents examples of the measurements for the determination of step height and pitch and areal measurement.
{"title":"Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system","authors":"Yiting Wu, E. Wirthmann, U. Klöpzig, T. Hausotte","doi":"10.5194/JSSS-10-171-2021","DOIUrl":"https://doi.org/10.5194/JSSS-10-171-2021","url":null,"abstract":"Abstract. This article presents a new metrological atomic force microscope (MAFM) head with a new beam alignment and a combined one-beam detection of the cantilever deflection. An interferometric measurement system is used for the determination of the position of the cantilever, while a quadrant photodiode measures the bending and torsion of the cantilever. To improve the signal quality and reduce disturbing interferences, the optical design was revised in comparison to the systems of others (Dorozhovets et al., 2006; Balzer et al., 2011; Hausotte et al., 2012). The integration of the MAFM head in a nanomeasuring machine (NMM-1) offers the possibility of large-scale measurements over a range of 25mm×25mm×5 mm with sub-nanometre resolution. A large number of measurements have been performed by this MAFM head in combination with the NMM-1. This paper presents examples of the measurements for the determination of step height and pitch and areal measurement.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45247528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-07-07DOI: 10.5194/JSSS-10-163-2021
R. Gaur, H. M. Padhy, M. Elayaperumal
Abstract. In this short communication, we propose a surface plasmon resonance (SPR) sensor based on a ZnO / Au hybrid thin-film material structure and experimentally investigate its sensitivity improvement. The Kretschmann-based SPR sensor utilizes ZnO thin films and nanostructures for performance enhancement. The advancement in SPR technology relies on a low-cost, high-sensitivity, and high-selectivity sensor. Metal oxide (MO) has been incorporated into the SPR sensor to be used for detection of biological and chemical compounds. ZnO as one of the metal oxides is an attractive material due to its unique physical and optical properties. Numerous techniques for fabrication and characterization of ZnO on SPR gold substrate have been studied. The mechanism for gas and biomolecule detection depends on their interaction with the ZnO surface, which is mainly attributed to the high isoelectric point of ZnO. There are several types of ZnO nanostructures which have been employed for SPR application based on the Kretschmann configuration. In the future, the thin film and nanostructures of ZnO could be a potential application for miniature design, robust, high sensitivity, and a low-cost portable type of SPR biosensor to be used for on-site testing in a real-time and label-free manner. The present work includes the application of a developed SPR setup for gas sensing at room temperature using a specially designed gas cell. The change in the optical properties of dielectric layers (ZnO) with adsorption of gases (NO2) in order to develop an optical sensor has been presented. The obtained results emphasize the applications of an SPR setup for the study of interaction of adsorbed gas molecules, with dielectrics and gas sensing.
{"title":"Surface plasmon assisted toxic chemical NO2 gas sensor by Au ∕ ZnO functional thin films","authors":"R. Gaur, H. M. Padhy, M. Elayaperumal","doi":"10.5194/JSSS-10-163-2021","DOIUrl":"https://doi.org/10.5194/JSSS-10-163-2021","url":null,"abstract":"Abstract. In this short communication, we propose a surface plasmon resonance (SPR) sensor based on a ZnO / Au hybrid thin-film material structure and experimentally investigate its sensitivity improvement. The Kretschmann-based SPR sensor utilizes ZnO thin films and nanostructures for performance enhancement. The advancement in SPR technology relies on a low-cost, high-sensitivity, and high-selectivity sensor. Metal oxide (MO) has been incorporated into the SPR sensor to be used for detection of biological and\u0000chemical compounds. ZnO as one of the metal oxides is an attractive material due to its unique physical and optical properties. Numerous techniques for\u0000fabrication and characterization of ZnO on SPR gold substrate have been\u0000studied. The mechanism for gas and biomolecule detection depends on their interaction with the ZnO surface, which is mainly attributed to the high\u0000isoelectric point of ZnO. There are several types of ZnO nanostructures\u0000which have been employed for SPR application based on the Kretschmann\u0000configuration. In the future, the thin film and nanostructures of ZnO could be a potential application for miniature design, robust, high sensitivity, and\u0000a low-cost portable type of SPR biosensor to be used for on-site testing in a real-time and label-free manner. The present work includes the application of a developed SPR setup for gas sensing at room temperature using a specially designed gas cell. The change in the optical properties of dielectric layers\u0000(ZnO) with adsorption of gases (NO2) in order to develop an optical\u0000sensor has been presented. The obtained results emphasize the applications\u0000of an SPR setup for the study of interaction of adsorbed gas molecules, with dielectrics and gas sensing.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":"1 1","pages":""},"PeriodicalIF":1.0,"publicationDate":"2021-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42043675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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