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Near-infrared LED system to recognize road surface conditions for autonomous vehicles 用于识别自动驾驶汽车路面状况的近红外LED系统
IF 1 Q3 Engineering Pub Date : 2022-06-29 DOI: 10.5194/jsss-11-187-2022
Hongyi Zhang, Shéhérazade Azouigui, R. Sehab, M. Boukhnifer
Abstract. The driving safety of autonomous vehicles will strongly depend on their ability to recognize road surface conditions such as dry, wet, snowy and icy road. Currently, the existing investigations to detect road surface conditions still have limitations in daytime and nighttime conditions. The objective of this paper is to propose and develop a new system with three near-infrared (NIR) LED sources. This choice is based on the advantages of LED sources over laser diodes. They are less sensitive to temperature and have lower costs. Considering these advantages, the feasibility of the LED system to recognize road surface conditions is investigated. For this, the appropriate wavelengths of the LED tri-wavelength source are first computed from experimental data taking into account the specific LED spectral shape. In addition, the effect of the spectral bandwidth of the LED sources on the system performance is theoretically studied. Finally, the NIR LED system with the LED sources at 970, 1450 and 1550 nm is experimentally tested and validated with an incident angle from 78.7 to 86.2∘. According to the results of the experiments, the accuracy of the classification of snow, wet and water can reach 97 %, while the accuracy of the dry and wet road surface conditions is respectively 73 % and 68 %.
摘要自动驾驶汽车的驾驶安全性将在很大程度上取决于它们对干燥、潮湿、下雪和结冰道路等路面状况的识别能力。目前,现有的探测路面状况的调查在白天和夜间情况下仍然存在局限性。本文的目的是提出并开发一个由三个近红外(NIR) LED光源组成的新系统。这种选择是基于LED光源相对于激光二极管的优势。它们对温度不那么敏感,成本也更低。考虑到这些优点,对LED系统识别路面状况的可行性进行了研究。为此,考虑到特定的LED光谱形状,首先根据实验数据计算LED三波长源的适当波长。此外,还从理论上研究了LED光源的光谱带宽对系统性能的影响。最后,对光源为970、1450和1550 nm的近红外LED系统进行了实验测试和验证,入射角为78.7到86.2°。实验结果表明,该方法对雪、湿、水的分类准确率可达97%,对干、湿路面的分类准确率分别为73%和68%。
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引用次数: 2
Acceptance and reverification testing for industrial computed tomography – a simulative study on geometrical misalignments 工业计算机断层扫描的验收和再验证测试——几何错位的模拟研究
IF 1 Q3 Engineering Pub Date : 2022-06-16 DOI: 10.5194/jsss-11-171-2022
F. Wohlgemuth, T. Hausotte, I. Schmidt, W. Kimmig, Karl Dietrich Imkamp
Abstract. Acceptance and reverification testing for industrial X-ray computed tomography (CT) is described in different standards (E DIN EN ISO 10360-11:2021-04, 2021; VDI/VDE 2630 Blatt 1.3, 2011; ASME B89.4.23-2020, 2020). The characterisation and testing of CT system performance are often achieved with test artefacts containing spheres. This simulative study characterises the influence of different geometrical error sources – or geometrical misalignments – on these sphere measurements. The two measurands on which this study focuses are the sphere centre-to-centre distances and the sphere probing form errors. One difference between the current draft of the ISO 10360-11 standard (E DIN EN ISO 10360-11:2021-04, 2021) and the VDI/VDE standard 2630 part 1.3 (VDI/VDE 2630 Blatt 1.3, 2011) as well as the ASME standard B89.4.23 (ASME B89.4.23-2020, 2020) are the differences for the sphere centre-to-centre distances that need to be measured. The VDI/VDE standard and the ASME standard require measurements of these kinds of distances of up to 66 % of the possible maximum distance within the measurement volume, while the ISO draft asks for measurements of up to 85 % of the possible maximum distance. This requirement needs to be considered in connection with the maximum permissible error (MPE) specification for these sphere distance measurements. This MPE should be specified as a linear function of the nominal distance or a constant value or a combination thereof (compare definition 9.2 of ISO 10360-1:2000 + Cor.1:2002 (DIN EN ISO 10360-1:2003-07, 2003)), and thus, the linearity of the length-dependent maximum measurement error of the sphere distance measurements is of interest. This simulative study inspects to what extent this linearity can be observed for CT measurements under the influence of different geometric errors. Further, the question is whether measurement lengths above 66 % necessitate a change in the MPE specification. Thus, an automatic identification of cases that might affect the MPE specification is proposed, and these cases are inspected manually. A second aspect of this study is the impact of geometrical misalignments on the probing form errors of a measured sphere. The probing form error also needs to be specified. Thus, whether and how it is influenced by the misalignments is also of interest. Based on our simulations, we conclude that probing form errors and sphere centre-to-centre distances of up to 66 % of the maximum possible measurement length within the measurement volume are sufficientfor acceptance testing concerning geometrical misalignments – each geometrical misalignment can be detected well with at least one of these two measurands.
摘要工业X射线计算机断层扫描(CT)的验收和再验证测试在不同的标准中有描述(E DIN EN ISO 10360-11:2021-042021;VDI/VDE 2630 Blatt 1.32011;ASME B89.4.23-20202020)。CT系统性能的表征和测试通常通过包含球体的测试伪像来实现。这项模拟研究描述了不同几何误差源(或几何错位)对这些球体测量的影响。本研究关注的两个测量是球体中心到中心的距离和球体探测形状误差。ISO 10360-11标准(E DIN EN ISO 10360-11:2021-042021)的当前草案与VDI/VDE标准2630第1.3部分(VDI/VDE 2630 Blatt 1.32011)以及ASME标准B89.4.23(ASME B89.4.23-20202020)之间的一个差异是需要测量的球体中心到中心距离的差异。VDI/VDE标准和ASME标准要求测量此类距离,最大可达66 % 测量体积内可能的最大距离,而ISO草案要求测量高达85 % 可能的最大距离。这一要求需要结合这些球面距离测量的最大允许误差(MPE)规范来考虑。该MPE应规定为标称距离的线性函数或常数值或其组合(比较ISO 10360-1:2000的定义9.2 + Cor.1:2002(DIN EN ISO 10360-1:2003-072003)),因此,球面距离测量的与长度相关的最大测量误差的线性是令人感兴趣的。这项模拟研究考察了在不同几何误差的影响下,CT测量可以在多大程度上观察到这种线性。此外,问题是测量长度是否超过66 % 需要改变MPE规范。因此,提出了可能影响MPE规范的情况的自动识别,并且手动检查这些情况。本研究的第二个方面是几何失准对测量球体的探测形状误差的影响。还需要指定探测形式错误。因此,它是否以及如何受到错位的影响也是令人感兴趣的。基于我们的模拟,我们得出结论,探测形状误差和球体中心到中心的距离高达66 % 测量体积内的最大可能测量长度足以进行几何未对准的验收测试——每一个几何未对准都可以通过这两个被测量中的至少一个很好地检测到。
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引用次数: 0
Precise characterization of VCSEL in the 1550 nm band having a wavelength tuning range of 12 nm within 10 µs as light sources for fast sensor systems 在1550 nm波段精确表征VCSEL,在10µs内波长调谐范围为12 nm,作为快速传感器系统的光源
IF 1 Q3 Engineering Pub Date : 2022-06-15 DOI: 10.5194/jsss-11-161-2022
R. Kruglov, G. Saur, R. Engelbrecht
Abstract. A wavelength tuning range up to 12 nm has been achievedover 12 µs pump current pulses within a usable time of 10 µsapplied to VCSELs operating in the near infrared around 1550 nm. Theinstantaneous optical frequency shift has been measured with aninterferometric setup; the overall tuning range has then been verified withan optical spectrum analyzer. The repetition rate of the current pulses canbe as high as 20 kHz with almost no influence on the sweep parameters. Theseresults can be used for fast spectroscopic gas analysis or for rapidinterferometric swept-source distance sensors.
摘要波长调谐范围可达12 nm已经达到12 µs泵浦电流脉冲,可用时间为10 µ应用于1550附近近红外工作的VCSEL nm。用干涉仪测量了瞬时光学频移;然后用光谱分析仪验证了整个调谐范围。电流脉冲的重复率可以高达20 kHz,而对扫描参数几乎没有影响。这些结果可用于快速光谱气体分析或用于快速干涉扫频源距离传感器。
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引用次数: 2
Precision measurement of the application-dependent current consumption of a wireless transceiver chip in the time and frequency domain 无线收发器芯片应用相关电流消耗的时域和频域精确测量
IF 1 Q3 Engineering Pub Date : 2022-06-13 DOI: 10.5194/jsss-11-149-2022
T. Doebbert, C. Cammin, G. Scholl
Abstract. Modern production concepts generate a demand for reliable, energy-efficient, fast, and secure wireless communication solutions. Therefore, the current consumption should not increase substantially due to additional cryptographic operations. This paper shows a principle current measurement method that is exemplary of a transceiver for the IO-Link Wireless protocol. Low-pass filtering and single-sided amplitude spectrum analysis are used to evaluate the main information of the current measurement. An uncertainty estimation is realized using statistical measurement data and considering the measurement setup in order to approximate the combined standard uncertainty. The results show that the current consumption only increases slightly when using additional cryptographic operations. This can be measured with acceptable uncertainty.
摘要现代生产理念产生了对可靠、节能、快速和安全的无线通信解决方案的需求。因此,电流消耗不应该由于额外的加密操作而显著增加。本文展示了一种原理电流测量方法,该方法是IO链路无线协议收发器的示例。低通滤波和单边幅度谱分析用于评估电流测量的主要信息。使用统计测量数据并考虑测量设置来实现不确定度估计,以近似组合的标准不确定度。结果表明,当使用额外的加密操作时,电流消耗仅略有增加。这可以用可接受的不确定度进行测量。
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引用次数: 1
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films 提高高压阻镍碳传感器薄膜的电学和结构稳定性
IF 1 Q3 Engineering Pub Date : 2022-05-06 DOI: 10.5194/jsss-11-137-2022
G. Schultes, M. Cerino, A. Lellig, M. Koch
Abstract. The family of sputter deposited granular metal-basedcarbon-containing sensor films is known for their high sensitivitytransforming force-dependent strain into electrical resistance change. Amongthem nickel–carbon thin films possess a gauge factor of up to 30, comparedto only 2 for traditional sensor films of metal alloys. This highsensitivity is based on disordered interparticle tunneling through barriersof graphite-like carbon walls between metal–carbon particles of columnarshape. Force and pressure sensors would benefit a lot from the elevatedpiezoresistivity. A disadvantage, however, is a disturbing temporal creepand drift of the resistance under load and temperature. This contributionshows how to stabilize such sensor films. A significant stabilization isachieved by partially replacing nickel with chromium, albeit at the expenseof sensitivity. The more chromium used in these NixCr1−x-C layers,the higher the optimum annealing temperature can be selected and the betterthe electrical stabilization. A good compromise while maintainingsensitivities well above the standard of 2 is identified for films withx=0.5 to 0.9, stabilized by optimized temperature treatments. Thestabilizing effect of chromium is revealed by transmission electronmicroscopy with elemental analysis. The post-annealing drives segregationprocesses in the layer material. While the interior of the layer is depletedof chromium and carbon, boundary layers are formed. Chromium is enrichednear the surface boundary, oxidized in air and forms chromium-rich oxidesub-layers, which are chemically very stable and protect against furtherreactions and corrosion. As a result, creep and drift errors are greatlyreduced, so that the optimized sensor coatings are now suitable forwidespread use.
摘要溅射沉积的基于颗粒金属的含碳传感器膜家族以其将力相关应变转化为电阻变化的高灵敏度而闻名。其中,镍-碳薄膜的应变系数高达30,而传统的金属合金传感器薄膜只有2。这种高灵敏度是基于无序的颗粒间隧道穿过圆柱形金属-碳颗粒之间的类石墨碳壁屏障。力和压力传感器将从提高的压阻率中受益匪浅。然而,缺点是在负载和温度下电阻的时间蠕变和漂移令人不安。这一贡献展示了如何稳定这种传感器薄膜。通过用铬部分取代镍实现了显著的稳定性,尽管代价是灵敏度。在这些NixCr1−x-C层中使用的铬越多,可以选择的最佳退火温度就越高,并且电稳定性就越好。对于x=0.5至0.9的薄膜,在保持灵敏度远高于2的标准的同时,通过优化的温度处理进行稳定,这是一个很好的折衷方案。透射电镜结合元素分析揭示了铬的稳定作用。后退火驱动层材料中的偏析过程。当该层内部的铬和碳耗尽时,就会形成边界层。铬在表面边界富集,在空气中氧化,形成富含铬的氧化层,其化学性质非常稳定,可防止进一步反应和腐蚀。结果,蠕变和漂移误差都大大减小,因此优化后的传感器涂层适合广泛使用。
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引用次数: 0
An algorithmic method for the identification of wood species and the classification of post-consumer wood using fluorescence lifetime imaging microscopy 利用荧光寿命成像显微镜识别木材种类和消费后木材分类的算法方法
IF 1 Q3 Engineering Pub Date : 2022-05-03 DOI: 10.5194/jsss-11-129-2022
Nina Leiter, M. Wohlschläger, M. Versen, C. Laforsch
Abstract. In this contribution the frequency domain fluorescence lifetime imaging microscopy (FD-FLIM) technique is evaluated for post-consumer wood sorting. The fluorescence characteristics of several wood samples were determined, whereby two excitation wavelengths (405 and 488 nm) were used. The measured data were processed using algorithmic methods to identify the wood species and post-consumer wood category. With the excitation wavelength of 405 nm, 16 out of 19 samples could be correctly assigned to the corresponding post-consumer wood category by means of the fluorescence lifetimes. Thus, the experimental results revealed the high potential of the FD-FLIM technique for automated post-consumer wood sorting.
摘要在这一贡献的频域荧光寿命成像显微镜(FD-FLIM)技术评估后消费木材分选。采用两种激发波长(405 nm和488 nm)测定了几种木材样品的荧光特性。使用算法对测量数据进行处理,以确定木材种类和消费后木材类别。当激发波长为405 nm时,19个样品中有16个可以通过荧光寿命正确地分配到相应的消费后木材类别。因此,实验结果揭示了FD-FLIM技术用于自动消费后木材分选的高潜力。
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引用次数: 4
Acoustophoresis in suspensions with local and time-discrete sound fields based on the time reversal technique 基于时间反转技术的局部声场和时间离散声场悬架的声阻抗
IF 1 Q3 Engineering Pub Date : 2022-04-08 DOI: 10.5194/jsss-11-117-2022
P. Hörnlein, S. Wöckel, H. Arndt, J. Auge
Abstract. In this paper, a new approach of three-dimensional acoustic particle manipulation (acoustophoresis) in closed and liquid-filled vessels based on the time reversal technique is discussed. Based on simulation studies, this work investigates the technical prerequisites to achieve appropriate acoustic radiation forces (ARFs) for the manipulation of small particles with the time reversal method by utilizing multiple reflections in a closed vessel. The time-discrete and localized acoustic pressure field required for this purpose is generated by a time reversal mirror composed of 24 piezoceramic transducers. The paper also gives an outlook on practical evaluation of the simulation results based on a demonstrator setup.
摘要本文讨论了一种基于时间反转技术的封闭充液容器中三维声粒子操纵的新方法。本文在模拟研究的基础上,探讨了利用密闭容器内的多次反射,利用时间反转方法获得适当的声辐射力(arf)来操纵小粒子的技术前提。此目的所需的时间离散和局部声压场由24个压电换能器组成的时间反转镜产生。本文还展望了基于演示装置的仿真结果的实际评估。
{"title":"Acoustophoresis in suspensions with local and time-discrete sound fields based on the time reversal technique","authors":"P. Hörnlein, S. Wöckel, H. Arndt, J. Auge","doi":"10.5194/jsss-11-117-2022","DOIUrl":"https://doi.org/10.5194/jsss-11-117-2022","url":null,"abstract":"Abstract. In this paper, a new approach of three-dimensional acoustic particle manipulation (acoustophoresis) in closed and liquid-filled vessels based on the time reversal technique is discussed. Based on simulation studies, this work investigates the technical prerequisites to achieve appropriate acoustic radiation forces (ARFs) for the manipulation of small particles with the time reversal method by utilizing multiple reflections in a closed vessel. The time-discrete and localized acoustic pressure field required for this purpose is generated by a time reversal mirror composed of 24 piezoceramic transducers. The paper also gives an outlook on practical evaluation of the simulation results based on a demonstrator setup.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2022-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48362470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell 一种新型单片式电磁力补偿称重传感器刚度和倾斜灵敏度补偿的调整概念
IF 1 Q3 Engineering Pub Date : 2022-04-07 DOI: 10.5194/jsss-11-109-2022
M. Pabst, M. Darnieder, R. Theska, T. Fröhlich
Abstract. This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.
摘要本文介绍了一种新型平面、单片、高精度电磁力补偿称重单元的调整新概念。该概念允许刚度和倾斜敏感性的顺从机制,是依赖于标称负载的称重盘调整到最佳。根据已建立的力学模型建立和调整新的机构。为了评估这个概念,系统在高精度倾斜台和高真空条件下在市售质量比较器的环境中进行了测试。
{"title":"Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell","authors":"M. Pabst, M. Darnieder, R. Theska, T. Fröhlich","doi":"10.5194/jsss-11-109-2022","DOIUrl":"https://doi.org/10.5194/jsss-11-109-2022","url":null,"abstract":"Abstract. This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.\u0000","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2022-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42065989","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A modular adaptive residual generator for a diagnostic system that detects sensor faults on engine test beds 一种用于检测发动机试验台传感器故障诊断系统的模块化自适应残差发生器
IF 1 Q3 Engineering Pub Date : 2022-03-29 DOI: 10.5194/jsss-11-99-2022
M. Wohlthan, G. Pirker, A. Wimmer
Abstract. It is a great challenge to apply a diagnostic system for sensor fault detection to engine test beds. The main problem is that such test beds involve frequent configuration changes or a change in the entire test engine. Therefore, the diagnostic system must be highly adaptable to different types of test engines. This paper presents a diagnostic method consisting of the following steps: residual generation, fault detection and fault isolation. As adaptability can be achieved with residual generation, the focus is on this step. The modular toolbox-based approach combines physics-based and data-driven modeling concepts and, thus, enables highly flexible application to various types of engine test beds. Adaptability and fault detection quality are validated using measurement data from a single-cylinder research engine and a multicylinder diesel engine.
摘要将传感器故障诊断系统应用于发动机试验台是一个巨大的挑战。主要的问题是,这样的测试平台涉及到频繁的配置更改或整个测试引擎的更改。因此,诊断系统必须对不同类型的测试发动机具有高度的适应性。本文提出了一种由残差产生、故障检测和故障隔离三个步骤组成的故障诊断方法。由于残差生成可以实现自适应性,因此重点放在这一步。基于模块化工具箱的方法结合了基于物理和数据驱动的建模概念,因此可以高度灵活地应用于各种类型的发动机试验台。利用单缸研究发动机和多缸柴油机的测量数据验证了该方法的适应性和故障检测质量。
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引用次数: 1
Assembly and interconnection technology for high-temperature bulk acoustic wave resonators 高温体声波谐振器的组装与互连技术
IF 1 Q3 Engineering Pub Date : 2022-03-23 DOI: 10.5194/jsss-11-83-2022
F. Kohler, M. Farina, M. Schulz, H. Fritze, J. Wilde
Abstract. A sensor based on a piezoelectric single crystal enables operation even under harsh environmental conditions. In addition to the sensor element, the packaging technology is crucial for sensor performance. In this paper, a suitable assembly and interconnection technology concept ofCa3TaGa3Si2O14 (CTGS) resonators for high-temperature applications is presented as a platform for future sensor assemblies. The concept described here has already been functionally tested as a temperature sensor (Schulz et al., 2021). The concept includes a sapphire base plate, a housing lid, and a spacer made from aluminium oxide (Al2O3). The substrate is metallised with platinum manufactured into thin film and thick film technology. The ceramic components are fused with glass solder. The connection of the resonator to the conductive tracks is realised by thermosonic bonding with 25 µm platinum wire. Initially, the stability of the metallisation must be investigated before subsequent electrical testing under high temperature. Diffusion processes play a major role in this temperature range, and the stability of the layer is a necessary condition for subsequent investigations. A suitable set of bonding parameters and the strength of the platinum bonds prior to and after thermal load is analysed. Shear tests are used to evaluate the quality of the ceramic materials fused with glass solder after thermal ageing. The dielectrical properties of sapphire and glass solder such as the isolation resistance, the relative permittivity, and the loss factor at high temperatures are evaluated usinginterdigital structures. The loss factor is measured on both bare interdigital structures and the samples coated with glass solder to make an estimation about the conductive behaviour up to 1000 ∘C. A ceramic lid for the sensor housing is attached by a high-temperature stable glass solder. Since platinum conductors are fed through this glass solder connection, the electrical conductivity of the glass solder is characterised at high temperature. Furthermore, the hermeticity of the assemblies is verified by means of helium leakage tests. These investigations are the basis for the implementation of an assembly and interconnection technology that is suitable for reliable operation under extreme temperature conditions. The packaging technology also offers further possibilities for pressure or chemical sensors that can withstand high-temperature loads.
摘要基于压电单晶的传感器即使在恶劣的环境条件下也能工作。除了传感器元件外,封装技术对传感器的性能也至关重要。本文提出了一种适合高温应用的ca3taga3si2o14 (CTGS)谐振器的组装和互连技术概念,作为未来传感器组装的平台。这里描述的概念已经作为温度传感器进行了功能测试(Schulz et al., 2021)。这个概念包括一个蓝宝石底座,一个外壳盖和一个由氧化铝(Al2O3)制成的间隔。衬底用铂金属化制成薄膜和厚膜技术。陶瓷元件用玻璃焊料熔合。谐振器与导电轨道的连接是通过25 μ m铂线的热超声键合实现的。首先,在随后的高温下的电气测试之前,必须研究金属化的稳定性。扩散过程在此温度范围内起主要作用,层的稳定性是后续研究的必要条件。分析了一组合适的键合参数和热负荷前后铂键的强度。采用剪切试验对玻璃焊料熔接陶瓷材料热老化后的质量进行了评价。蓝宝石和玻璃焊料的介电性能,如隔离电阻,相对介电常数,以及在高温下的损耗因子评估使用数字间结构。损耗系数是在裸露的指间结构和涂有玻璃焊料的样品上测量的,以估计其在1000°C下的导电性能。传感器外壳的陶瓷盖由高温稳定的玻璃焊料连接。由于铂导体通过这种玻璃焊料连接,因此玻璃焊料的导电性在高温下具有特征。此外,通过氦气泄漏试验验证了组件的密封性。这些研究是实现适合在极端温度条件下可靠运行的组装和互连技术的基础。该封装技术还为能够承受高温载荷的压力或化学传感器提供了进一步的可能性。
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引用次数: 4
期刊
Journal of Sensors and Sensor Systems
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