Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993979
Yu-Chieh Huang, Po-Tsang Huang, Yu-Chen Hu, Shang-Lin Wu, Y. You, Yung-Kuei Wang, J. Duann, Tzai-Wen Chiu, W. Hwang, Kuan-Neng Chen, C. Chuang, J. Chiou
To enhance the signal integrity of high-density neural-sensing signals, this work presents an implantable high spatial resolution μ-probe array with through-silicon via (TSV) 2.5D integration technology that realizes a miniaturized implantable device on flexible printed circuit (FPC) interposer. The proposed microsystem was composed of two 32-channel neural sensing chips and one radio frequency chip for neural signal processing. The μ-probe array can achieve better signal-to-noise ratio with neural-signal acquisition and processing circuit composed of a pseudo-resistor-based analog front-end amplifier. Moreover, a receiving antenna is also implemented on the backside of FPC for wireless data and power transmission. The feasibility of the proposed μ-probe array, Tx and Rx antenna, 32-channel neural sensing circuits in the 64-channel wireless microsystem have been successfully demonstrated for future integration and animal experiments.
{"title":"A 64-channel wireless neural sensing microsystem with TSV-embedded micro-probe array for neural signal acquisition","authors":"Yu-Chieh Huang, Po-Tsang Huang, Yu-Chen Hu, Shang-Lin Wu, Y. You, Yung-Kuei Wang, J. Duann, Tzai-Wen Chiu, W. Hwang, Kuan-Neng Chen, C. Chuang, J. Chiou","doi":"10.1109/TRANSDUCERS.2017.7993979","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993979","url":null,"abstract":"To enhance the signal integrity of high-density neural-sensing signals, this work presents an implantable high spatial resolution μ-probe array with through-silicon via (TSV) 2.5D integration technology that realizes a miniaturized implantable device on flexible printed circuit (FPC) interposer. The proposed microsystem was composed of two 32-channel neural sensing chips and one radio frequency chip for neural signal processing. The μ-probe array can achieve better signal-to-noise ratio with neural-signal acquisition and processing circuit composed of a pseudo-resistor-based analog front-end amplifier. Moreover, a receiving antenna is also implemented on the backside of FPC for wireless data and power transmission. The feasibility of the proposed μ-probe array, Tx and Rx antenna, 32-channel neural sensing circuits in the 64-channel wireless microsystem have been successfully demonstrated for future integration and animal experiments.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130271760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994159
Qiugu Wang, D. Mao, Peng Liu, Liang Dong
This paper reports on a nanoelectromechanical systems-based tunable IR metamaterial realized by embedding nanocantilevers into complementary split ring resonator structures suspended over individual wells. The optical field confined in the air gap of c-SRR is strongly modulated by electromechanical deflection of the nanocantilever, thus modulating the reflection spectrum of the metamaterial. With the easy-to-implement tunable meta-atom design, the NEMS-enabled metamaterial provides an ultrahigh mechanical modulation frequency of 32.26 MHz and 38% optical signal modulation at a wavelength of 2.1 μm. We envision a compact, efficient, and high-speed electro-optic modulation platform in the IR region using this tunable metamaterial technology.
{"title":"Nanoelectromechanical systems-enabled tunable metamaterials","authors":"Qiugu Wang, D. Mao, Peng Liu, Liang Dong","doi":"10.1109/TRANSDUCERS.2017.7994159","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994159","url":null,"abstract":"This paper reports on a nanoelectromechanical systems-based tunable IR metamaterial realized by embedding nanocantilevers into complementary split ring resonator structures suspended over individual wells. The optical field confined in the air gap of c-SRR is strongly modulated by electromechanical deflection of the nanocantilever, thus modulating the reflection spectrum of the metamaterial. With the easy-to-implement tunable meta-atom design, the NEMS-enabled metamaterial provides an ultrahigh mechanical modulation frequency of 32.26 MHz and 38% optical signal modulation at a wavelength of 2.1 μm. We envision a compact, efficient, and high-speed electro-optic modulation platform in the IR region using this tunable metamaterial technology.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126031230","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994402
C. Gosse, J. Frederick, C. Blot, S. Lefrançois, S. Swaraj, S. Stanescu, R. Belkhou, P. Guenoun, C. Chevallard
We introduce an observation chamber dedicated to image, at the nanoscale, the kinetics of reactions taking place at the liquid/solid interface. The assembly of this microfluidic cell is straightforward and, most importantly, its design allow the operator to precisely regulate the hydrodynamic flow and control the concentration in reagents at the observation window.
{"title":"Development of a fluidic cell to image precipitation reactions by x-ray microscopy","authors":"C. Gosse, J. Frederick, C. Blot, S. Lefrançois, S. Swaraj, S. Stanescu, R. Belkhou, P. Guenoun, C. Chevallard","doi":"10.1109/TRANSDUCERS.2017.7994402","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994402","url":null,"abstract":"We introduce an observation chamber dedicated to image, at the nanoscale, the kinetics of reactions taking place at the liquid/solid interface. The assembly of this microfluidic cell is straightforward and, most importantly, its design allow the operator to precisely regulate the hydrodynamic flow and control the concentration in reagents at the observation window.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133825541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993978
Hyunkyu Moon, T. Comi, Sage J. B. Dunham, B. Kwon, J. Sweedler, W. King
This paper reports improvements of atomic force microscopy (AFM) mass spectrometry (MS), in which ∼1 attoliter of analyte is desorbed by a heated AFM cantilever tip and analyzed with a mass spectrometer. Decoupling the AFM sampling apparatus from the MS system enabled analysis of the microscale transport physics independent of analyte ionization efficiency. Using this approach, we find that the transport efficiency is governed by the air velocity during sampling, and not mass flow rate as reported in the literature. We also find that an unheated sampling tube results in higher efficiency compared to a heated tube. Optimization of the transport parameters improved the system efficiency by 2.5-fold over the state of the art.
{"title":"Microscale transport physics during atomic force microscopy mass spectrometry and improved sampling efficiency","authors":"Hyunkyu Moon, T. Comi, Sage J. B. Dunham, B. Kwon, J. Sweedler, W. King","doi":"10.1109/TRANSDUCERS.2017.7993978","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993978","url":null,"abstract":"This paper reports improvements of atomic force microscopy (AFM) mass spectrometry (MS), in which ∼1 attoliter of analyte is desorbed by a heated AFM cantilever tip and analyzed with a mass spectrometer. Decoupling the AFM sampling apparatus from the MS system enabled analysis of the microscale transport physics independent of analyte ionization efficiency. Using this approach, we find that the transport efficiency is governed by the air velocity during sampling, and not mass flow rate as reported in the literature. We also find that an unheated sampling tube results in higher efficiency compared to a heated tube. Optimization of the transport parameters improved the system efficiency by 2.5-fold over the state of the art.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134414550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993987
Feng Cao, Hirotaka Sato
We demonstrated the remote walking control of a live beetle (Mecynorrhina torquata) by using a miniature muscle stimulation system with wireless communication capability. The wireless backpack consisted of eight muscle stimulation channels and was programmed to elicit the leg motions in different predefined sequences. With regard to the strategies adopted by voluntary walking insects to change their step frequency and hence to achieve the desired walking speed, walking control protocol was then designed and applied to the insect-computer hybrid robot. Similar to voluntary walking insects, a directly proportional relationship between the elicited step frequency and the walking speed had been achieved. This is first demonstration of remotely controlled insect-computer hybrid robot via sequential stimulation of leg muscles, and the first demonstration of walking control of an insect-computer hybrid robot to achieve directly proportional relationship between the step frequency and walking speed.
{"title":"Remote radio controlled insect-computer hybrid legged robot","authors":"Feng Cao, Hirotaka Sato","doi":"10.1109/TRANSDUCERS.2017.7993987","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993987","url":null,"abstract":"We demonstrated the remote walking control of a live beetle (Mecynorrhina torquata) by using a miniature muscle stimulation system with wireless communication capability. The wireless backpack consisted of eight muscle stimulation channels and was programmed to elicit the leg motions in different predefined sequences. With regard to the strategies adopted by voluntary walking insects to change their step frequency and hence to achieve the desired walking speed, walking control protocol was then designed and applied to the insect-computer hybrid robot. Similar to voluntary walking insects, a directly proportional relationship between the elicited step frequency and the walking speed had been achieved. This is first demonstration of remotely controlled insect-computer hybrid robot via sequential stimulation of leg muscles, and the first demonstration of walking control of an insect-computer hybrid robot to achieve directly proportional relationship between the step frequency and walking speed.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115149121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994515
Robert W. Reger, P. Clews, Gwendolyn M. Bryan, Casey Keane, M. Henry, B. Griffin
With the advent of the internet-of-things, sensors that are constantly alert yet consuming near-zero power are desired. Remote sensing applications where sensor replacement is costly or hazardous would also benefit. Piezoelectric micro-electro-mechanical systems (MEMS) convert mechanical or acoustic energy into electrical signals while consuming zero power. When coupled with low-power complementary metal-oxide-semiconductor (CMOS) circuits, a near-zero power sensing system is formed. This work describes piezoelectric MEMS microphones based on aluminum nitride (AlN). The microphones operate as passive acoustic filters by placing their resonant response within bandwidths of interest. Devices are demonstrated with operational frequencies from 430 Hz to greater than 10 kHz with quality factors as large as 3,000 and open-circuit voltages exceeding 600 mV/Pa.
{"title":"Aluminum nitride piezoelectric microphones as zero-power passive acoustic filters","authors":"Robert W. Reger, P. Clews, Gwendolyn M. Bryan, Casey Keane, M. Henry, B. Griffin","doi":"10.1109/TRANSDUCERS.2017.7994515","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994515","url":null,"abstract":"With the advent of the internet-of-things, sensors that are constantly alert yet consuming near-zero power are desired. Remote sensing applications where sensor replacement is costly or hazardous would also benefit. Piezoelectric micro-electro-mechanical systems (MEMS) convert mechanical or acoustic energy into electrical signals while consuming zero power. When coupled with low-power complementary metal-oxide-semiconductor (CMOS) circuits, a near-zero power sensing system is formed. This work describes piezoelectric MEMS microphones based on aluminum nitride (AlN). The microphones operate as passive acoustic filters by placing their resonant response within bandwidths of interest. Devices are demonstrated with operational frequencies from 430 Hz to greater than 10 kHz with quality factors as large as 3,000 and open-circuit voltages exceeding 600 mV/Pa.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115705566","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994319
Wei-Chih Lin, Chieh-Shan Wu, I. Yeh
The biocompatible PCL2b200 nanofibre mesh and beads containing epidermal growth factor (EGF) were fabricated separately by using our developed electrospinning and electrospray process for the tissue regeneration applications. The drug release behaviours of two fabricated EGF nano-scaffolds were characterized for 448 hours. The EGF nanofibre mesh performed the quicker released speed and higher release amount than beads. Due to the influence of released EGF, nanofibre mesh also reveals a better proliferation and cell viability than beads that was proved by using the MTT assay.
{"title":"Development of epidermal growth factor-polycaprolactone nanofiber mesh and bead for wound healing","authors":"Wei-Chih Lin, Chieh-Shan Wu, I. Yeh","doi":"10.1109/TRANSDUCERS.2017.7994319","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994319","url":null,"abstract":"The biocompatible PCL2b200 nanofibre mesh and beads containing epidermal growth factor (EGF) were fabricated separately by using our developed electrospinning and electrospray process for the tissue regeneration applications. The drug release behaviours of two fabricated EGF nano-scaffolds were characterized for 448 hours. The EGF nanofibre mesh performed the quicker released speed and higher release amount than beads. Due to the influence of released EGF, nanofibre mesh also reveals a better proliferation and cell viability than beads that was proved by using the MTT assay.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116173119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994245
M. Schwerter, Marcel Gäding, M. Leester-Schädel, A. Dietzel
This work reports on a foil integrated, flexible pressure- and hot-film sensor system for measuring flows over curved surfaces. The miniaturized rigid silicon piezoresistive pressure transducer with enclosed reference cavity allows absolute pressure sensing. Together with a foil-based hot-film transducer both transducers are embedded in a combination of thin epoxy resin with polyimide. This in-foil sensor system is surface passive and waterproof and can be bent to a radius of 20 mm while maintaining full functionality.
{"title":"A flexible sensor system in foil for combined absolute pressure and flow velocity measurements","authors":"M. Schwerter, Marcel Gäding, M. Leester-Schädel, A. Dietzel","doi":"10.1109/TRANSDUCERS.2017.7994245","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994245","url":null,"abstract":"This work reports on a foil integrated, flexible pressure- and hot-film sensor system for measuring flows over curved surfaces. The miniaturized rigid silicon piezoresistive pressure transducer with enclosed reference cavity allows absolute pressure sensing. Together with a foil-based hot-film transducer both transducers are embedded in a combination of thin epoxy resin with polyimide. This in-foil sensor system is surface passive and waterproof and can be bent to a radius of 20 mm while maintaining full functionality.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126301503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994201
Sung-Yueh Wu, Ching-Chih Lin, D. Lin, An-Li Chen, C. Chuang, Wei-Chin Huang, Sung-Ho Liu
This work presents a novel "smart screw" with built-in electrical circuit for sensing. Comparing to conventional screw for industrial application, the designed smart screw contains an inductor-capacitor resonant circuit, of which the resonance frequency is determined by the gap of the structure inside the smart screw. As the gap is changed due to external force or the deformation of the smart screw, the resonance frequency will shift or vanish and be detected wirelessly by an inductive reader in real-time. As a proof-of-concept, M24 smart screws were fabricated by metallic three-dimensional printing. The LC circuit, formed by selective-laser-melting of titanium together with the screw body, is found to have the initial resonance frequency 162.77 MHz. It showed −2.7% and 10.5% frequency shifts during compression and bending tests, respectively. As the deformation exceeded certain level, the resonance even vanished. Both the shift and vanishment of resonance are sensing indicators. This work enables an innovative scheme for wireless built-in sensing application for high-value mechanical components.
{"title":"3D printed \"smart screw\" with built-in LC sensing circuit for wireless monitoring","authors":"Sung-Yueh Wu, Ching-Chih Lin, D. Lin, An-Li Chen, C. Chuang, Wei-Chin Huang, Sung-Ho Liu","doi":"10.1109/TRANSDUCERS.2017.7994201","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994201","url":null,"abstract":"This work presents a novel \"smart screw\" with built-in electrical circuit for sensing. Comparing to conventional screw for industrial application, the designed smart screw contains an inductor-capacitor resonant circuit, of which the resonance frequency is determined by the gap of the structure inside the smart screw. As the gap is changed due to external force or the deformation of the smart screw, the resonance frequency will shift or vanish and be detected wirelessly by an inductive reader in real-time. As a proof-of-concept, M24 smart screws were fabricated by metallic three-dimensional printing. The LC circuit, formed by selective-laser-melting of titanium together with the screw body, is found to have the initial resonance frequency 162.77 MHz. It showed −2.7% and 10.5% frequency shifts during compression and bending tests, respectively. As the deformation exceeded certain level, the resonance even vanished. Both the shift and vanishment of resonance are sensing indicators. This work enables an innovative scheme for wireless built-in sensing application for high-value mechanical components.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121561698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994253
M. Futagawa, Shin Ogasahara, Tatsumi Ito, M. Komatsu, Y. Fuwa, H. Hirano, I. Akita, K. Kusano, M. Watanabe
A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.
{"title":"Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics","authors":"M. Futagawa, Shin Ogasahara, Tatsumi Ito, M. Komatsu, Y. Fuwa, H. Hirano, I. Akita, K. Kusano, M. Watanabe","doi":"10.1109/TRANSDUCERS.2017.7994253","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994253","url":null,"abstract":"A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122107233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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