Micromachines最新文献

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m² are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper.

This manuscript highlights the behavior of biodegradable polymers (PLA and HD PLA Green) coated with two distinct bronze alloy powders, Metco 51F-NS (Cu 9.5Al 1.2Fe) and Metco 445 (Cu 9.5Al). The coating was realized on printed samples by using the Atmospheric Plasma Spray (APS) technique. The current investigation will explain the results related to the surface quality, micro-structure, morphology, and thermal and tribological properties. Thus, from a structural point of view, the most uniform deposition was obtained in the case of composite powder Metco 51F-NS. The thermal behavior of the samples coated with copper-based powder achieved stability up to temperatures slightly above 200 °C, with carbonization of the matrix structure taking place around 350 °C. The micro-indentation and scratch analysis responses were significantly influenced by the semicrystalline structure of the samples and the presence of the powder compounds. Based on the increased characteristics of the coated samples, the authors of the present paper consider that parts made of biodegradable polymers and coated with copper microparticles are appropriate for some applications which take place in adverse operating conditions.

A wafer-scale process for fabricating monolithically suspended nano-perforated membranes (NPMs) with integrated support structures into silicon is developed. Existing fabrication methods are suitable for many desired geometries, but face challenges related to mechanical robustness and fabrication complexity. We demonstrate a process that utilizes the cyclic deposit, remove, etch, and multi-step (DREM) process for directional etching of high-aspect-ratio (HAR) 300 nm in diameter nano-pores of 700 nm pitch. Subsequently, a buried cavity beneath the nano-pores is formed by switching to an isotropic etch, which effectively yields a thick NPM. Due to this architecture's flexibility and process robustness, structural parameters such as membrane thickness, diameter, integrated support structures, and cavity height can be adjusted, allowing a wide range of NPM geometries. This work presents NPMs with final thicknesses of 4.5 µm, 6.5 µm, and 12 µm. Detailed steps of this new approach are discussed, including the etching of a through-silicon-via to establish the connection of the NPM to the macro-world. Our approach to fabricating NPMs within single-crystal silicon overcomes some of the limitations of previous methods. Owing to its monolithic design, this NPM architecture permits further enhancements through material deposition, pore size reduction, and surface functionalization, broadening its application potential for corrosive environments, purification and separation processes, and numerous other advanced applications.

The propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO₃/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method analysis was performed using Comsol Multiphysics software to design an optimized multilayer configuration able to achieve an efficient guiding effect of the IAW at the LiNbO₃/overcoat interface. Numerical analysis results showed the following: (i) an overcoat faster than the piezoelectric half-space ensures that the wave propagation is confined mainly close to the surface of the LiNbO₃, although with minimal scattering in the overcoat; (ii) the presence of the SU-8, in addition to performing the essential function of an adhesive layer, can also promote the trapping of the acoustic energy toward the surface of the piezoelectric substrate; and (iii) the electromechanical coupling efficiency of the IAW is very close to that of the surface acoustic wave (SAW) along the bare LiNbO₃ half-space. The numerical predictions were experimentally assessed for some SU-8 layer thicknesses and overcoat material types. The propagation of the IAWs was experimentally measured in LiNbO₃/SU-8/fused silica, LiNbO₃/SU-8/(001)Si, and LiNbO₃/SU-8/c-Al₂O₃ structures for an SU-8 layer about 15 µm thick; the velocities of the IAWs were found in good agreement with the theoretically calculated values. Although the interest in IAWs was born many years ago for packageless applications, it can currently be renewed if thought for applications in microfluidics. Indeed, the IAWs may represent a valid alternative to standing SAWs, which are strongly attenuated when travelling beneath the walls of polydimethylsiloxane (PDMS) microfluidic channels for continuous flow particle manipulation, provided that the channel is excavated into the overcoating.

The short-circuit (SC) robustness of SiC MOSFETs is critical for high-power applications, yet 1.2 kV devices often struggle to meet the industry-standard SC withstand time (SCWT) under practical operating conditions. Despite growing interest in higher voltage classes, no prior study has systematically evaluated the SC performance of 1.7 kV SiC MOSFETs. This study provides the first comprehensive evaluation of commercially available 1.7 kV SiC MOSFETs, analyzing their SC performance under varying electrical stress conditions. Results indicate a clear trade-off between SC withstand time (SCWT) and drain-source voltage (V_DS), with SCWT decreasing from 32 µs at 400 V to 4 µs at 1100 V. Under 600 V, a condition representative of practical use cases in many high-voltage applications, the devices achieved an SCWT of 12 µs, exceeding the industry-standard 10 µs benchmark-a threshold often unmet by 1.2 kV devices under similar conditions. Failure analysis revealed gate dielectric breakdown as the dominant failure mode at V_DS ≤ 600 V, while thermal runaway was observed at higher voltages (V_DS = 800 V and 1100 V). These findings underscore the critical importance of robust gate drive designs and effective thermal management. By surpassing the shortcomings of lower voltage classes, 1.7 kV SiC MOSFETs can be a more reliable, and efficient choice for operating at higher voltages in next-generation power systems.

High-precision, low-power MEMS accelerometers are extensively utilized across civilian applications. Closed-loop accelerometers employing switched-capacitor (SC) circuit topologies offer notable advantages, including low power consumption, high signal-to-noise ratio (SNR), and excellent linearity. Addressing the critical demand for high-precision, low-power MEMS accelerometers in modern geophones, this work focuses on the design and implementation of closed-loop interface ASICs (Application-Specific Integrated Circuits). The proposed interface circuit, based on switched-capacitor modulation technology, incorporates a low-noise charge amplifier, sample-and-hold circuit, integrator, and clock divider circuit. To minimize average power consumption, a switched operational amplifier (op-amp) technique is adopted, which temporarily disconnects idle op-amps from the power supply. Additionally, a class-AB output stage is employed to enhance the dynamic range of the circuit. The design was realized using a standard 0.35 μm CMOS process, culminating in the completion of layout design and small-scale engineering fabrication. The performance of the MEMS accelerometers was evaluated under a 3.3 V power supply, achieving a power consumption of 3.3 mW, an accelerometer noise density below 1 μg/√Hz, a sensitivity of 1.65 V/g, a measurement range of ±1 g, a nonlinearity of 0.15%, a bandwidth of 300 Hz, and a bias stability of approximately 36 μg. These results demonstrate the efficacy of the proposed design in meeting the stringent requirements of high-precision MEMS accelerometer applications.

Microfluidic-based cell-stretching devices are vital for studying the molecular pathways involved in cellular responses to mechanobiological processes. Accurate evaluation of these responses requires detailed observation of cells cultured in this cell-stretching device. This study aimed to develop a method for preparing microscope slides to enable high-magnification imaging of cells in these devices. The key innovation is creating a peelable bond between the cell culture membrane and the upper channel, allowing for easy removal of the upper layer and precise cutting of the membrane for high-magnification microscopy. Using the fabricated device, OP9 cells (15,000 cells/channel) were stretched, and the effects of focal adhesion proteins and the intracellular distribution of YAP1 were examined under a fluorescence microscope with 100× and 60× objectives. Stretch stimulation increased integrinβ1 expression and promoted integrin-vinculin complex formation by approximately 1.4-fold in OP9 cells. Furthermore, YAP1 nuclear localization was significantly enhanced (approximately 1.3-fold) during stretching. This method offers a valuable tool for researchers using microfluidic-based cell-stretching devices. The advancement of imaging techniques in microdevice research is expected to further drive progress in mechanobiology research.

Chronic lymphocytic leukemia (CLL), the most common type of leukemia, remains incurable with conventional therapy. Despite advances in therapies targeting Bruton's tyrosine kinase and anti-apoptotic protein BCL-2, little is known about their effect on red blood cell (RBC) aggregation in blood flow. In this study, we applied a microfluidic device and a newly developed Software Image Flow Analysis to assess the extent of RBC aggregation in CLL patients and to elucidate the hemorheological effects of the commonly applied therapeutics Obinutuzumab/Venetoclax and Ibrutinib. The results revealed that, in RBC samples from untreated CLL patients, complex 3D clusters of large RBC aggregates are formed, and their number is significantly increased compared to healthy control samples. The application of the Obinutuzumab/Venetoclax combination did not affect this aspect of RBCs' rheological behavior. In contrast, targeted therapy with Ibrutinib preserves the aggregation state of CLL RBCs to levels seen in healthy controls, demonstrating that Ibrutinib mitigates the alterations in the rheological properties of RBCs associated with CLL. Our findings highlight the alterations in RBC aggregation in CLL and the impact of different targeted therapies on RBCs' rheological properties, which is critical for predicting the potential complications and side effects of CLL treatments, particularly concerning blood flow dynamics.

A Hz level narrow linewidth all-optical microwave oscillator based on the torsional radial acoustic modes (TR_2,m) of a single-mode fiber (SMF) is proposed and validated. The all-optical microwave oscillator consists of a 20 km SMF main ring cavity and a 5 km SMF sub ring cavity. The main ring cavity provides forward stimulated Brillouin scattering gain and utilizes a nonlinear polarization rotation effect to achieve TR_2,7 mode locking. By combining the sub ring cavity with the main ring cavity and utilizing the Vernier effect, the TR_2,7 mode microwave photonic single longitudinal mode (SLM) output can be ensured. Meanwhile, the 6.281 Hz narrow linewidth of the TR_2,7 mode is achieved by reducing the intrinsic linewidth of the passive resonant cavity. The acoustic mode suppression ratio and side mode suppression ratio of the TR_2,7 mode were 43 dB and 54 dB, respectively. The power and frequency fluctuations of within 40 min were approximately ±0.49 dB and ±0.187 kHz, indicating good stability. At a frequency offset of 10 kHz, the TR_2,7 mode had a low phase noise value of -110 dBc/Hz. This solution can be used in various fields, such as high-precision radar detection, long-distance optical communication, and high-performance fiber optic sensing.

Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone bridge, the sensor can measure the uniaxial stress magnitude by simple calibration of the stress against the output voltage and detect the bidirectional stress magnitude and direction in a micro-zone by simple rotation. The theoretical sensitivity obtained from simulation is 0.087 mV/V·MPa when the X-bridge is stressed in the X-direction under 1 V of excitation, and the test sensitivity of the X-bridge prepared in this paper is 0.1 mV/V·MPa. The design is structurally and procedurally simple, exhibits better temperature stability, and reduces interface requirements, making it suitable for the health monitoring of multi-chip microsystem chips.