Microsystems & Nanoengineering最新文献

Due to the excellent mechanical, chemical, and electrical properties of third-generation semiconductor silicon carbide (SiC), pressure sensors utilizing this material might be able to operate in extreme environments with temperatures exceeding 300 °C. However, the significant output drift at elevated temperatures challenges the precision and stability of measurements. Real-time in situ temperature monitoring of the pressure sensor chip is highly important for the accurate compensation of the pressure sensor. In this study, we fabricate platinum (Pt) thin-film resistance temperature detectors (RTDs) on a SiC substrate by incorporating aluminum oxide (Al₂O₃) as the transition layer and utilizing aluminum nitride (AlN) grooves for alignment through microfabrication techniques. The composite layers strongly adhere to the substrate at temperatures reaching 950 °C, and the interface of the Al₂O₃/Pt bilayer remains stable at elevated temperatures of approximately 950 °C. This stability contributes to the excellent high-temperature electrical performance of the Pt RTD, enabling it to endure temperatures exceeding 850 °C with good linearity. These characteristics establish a basis for the future integration of Pt RTD in SiC pressure sensors. Furthermore, tests and analyses are conducted on the interfacial diffusion, surface morphological, microstructural, and electrical properties of the Pt films at various annealing temperatures. It can be inferred that the tensile stress and self-diffusion of Pt films lead to the formation of hillocks, ultimately reducing the electrical performance of the Pt thin-film RTD. To increase the upper temperature threshold, steps should be taken to prevent the agglomeration of Pt films.

Controllable droplet propulsion on solid surfaces plays a crucial role in various technologies. Many actuating methods have been developed; however, there are still some limitations in terms of the introduction of additives, the versatilities of solid surfaces, and the speed of transportation. Herein, we have demonstrated a universal droplet propulsion method based on dynamic surface-charge wetting by depositing oscillating and opposite surface charges on dielectric films with unmodified surfaces. Dynamic surface-charge wetting propels droplets by continuously inducing smaller front contact angles than rear contact angles. This innovative imbalance is built by alternately storing and spreading opposite charges on dielectric films, which results in remarkable electrostatic forces under large gradients and electric fields. The method exhibits excellent droplet manipulation performance characteristics, including high speed (~130 mm/s), high adaptability of droplet volume (1 μL-1 mL), strong handling ability on non-slippery surfaces with large contact angle hysteresis (CAH) (maximum angle of 35°), significant programmability and reconfigurability, and low mass loss. The great application potential of this method has been effectively demonstrated in programmable microreactions, defogging without gravity assistance, and surface cleaning of photovoltaic panels using condensed droplets.

Research on outdoor, mobile, and self-powered temperature-control devices has always been highly regarded. These devices can reduce energy consumption for cooling and heating, and they have broad market prospects. On this basis, a rotary disc-shaped triboelectric nanogenerator (TENG) with a maximum open-circuit voltage of 6913 V, a maximum short-circuit current of 85 μA, and a maximum transferred charge of 1.3 μC was prepared. We synthesized a ferroelectric ceramic composed of 0.15PbTiO₃-0.85PbSc_0.5Ta_0.5O₃ (0.15PT-0.85PST), which exhibited excellent electrothermal effects at room temperature. By quenching, the electrothermal effect ( $\Delta$ T_max) and energy harvesting properties of the device were 1.574 K and 0.542 J/cm³, respectively. Then, for the first time, we proposed a self-powered temperature quantification control system with a rotary disc-shaped TENG. This device effectively harnessed wind and water energy, in addition to other types of energy. The system consisted of energy collecting cups, a rotating disc-shaped FEP-rabbit fur TENG, a circuit management module, and a ferroelectric ceramic chip array. Through the circuit management module, the system converted external wind energy into a high-voltage electric field at the two ends of the 0.15PT-0.85PST ceramic chip to fully stimulate the electrothermal effect. At a speed of 200 rpm, the temperature change in the insulated cup within 276 s was 0.49 K, and the volume of the insulated cup was 300 times greater than that of the 0.15PT-0.85PST ceramic chip. Compared with the results reported in previous work, the cooling and heating times were both reduced by 31%, and the temperature changes for both cooling and heating increased by 81%. Moreover, the heating and cooling temperatures of the device optimized on this basis were increased to 1.19 K and 0.93 K, respectively. The great improvement in the temperature variation performance confirmed the great potential of the device for commercialization. This research could serve as a reference for reducing energy consumption for cooling and heating, and it meets the international energy policies of carbon dioxide emission peaking and carbon neutrality.

The first-order antisymmetric (A1) mode lamb wave resonator (LWR) based on Z-cut LiNbO₃ thin films has attracted significant attention and is widely believed to be a candidate for next-generation reconfigurable filters with high frequency and large bandwidth (BW). However, it is challenging for traditional interdigitated electrodes (IDTs) based LWR filters to meet the requirement of a clean frequency spectrum response and enough out-of-band (OoB) rejection. To solve the problem, we propose LWRs with checker-shaped IDTs for the design of filters that meet the Wi-Fi 6E standard. By taking advantage of checker-shaped IDTs with unparalleled boundaries, the fabricated 6-GHz resonators successfully suppress higher-order A1 spurious modes, demonstrating a spurious-free impedance response and a high figure-of-merit (FOM) up to 104. Based on the demonstrated checker-shaped electrode design, the filter features a center frequency (f₀) of more than 6 GHz, a 3 dB BW exceeding 620 MHz, and an excellent OoB rejection >25 dB, consistent with the acoustic-electric-electromagnetic (EM) multi-physics simulations. Furthermore, through the capacitance-inductance matching network technology, the filter’s voltage standing wave ratio (VSWR) is successfully reduced below 2, showing an excellent 50 Ω impedance matching. This study lays a foundation for ultra-high-frequency and ultra-wideband filters for the Wi-Fi 6/6E application.

Strain gauge plays vital roles in various fields as structural health monitoring, aerospace engineering, and civil infrastructure. However, traditional flexible strain gauge inevitably brings the pseudo-signal caused by the substrate temperature effect and determines its accuracy. Here, we present an anisotropic composite substrate designed to modify the thermal expansion performance via Micro-electro-mechanical System (MEMS) technology, which facilitates the development of strain gauges that are minimally affected by substrate temperature-induced effect. Compared to the isotropic flexible substrate, the simulated expansion displacement in the thermal insensitive direction is reduced by 53.6% via introducing an anisotropic thermal expansion structure. The developed strain gauge exhibits significantly reduced sensitivity to temperature-induced effect, with a temperature coefficient of resistance decreasing from 87.3% to 10%, along with a notable 47.1% improvement in TCR stability. In addition, the strain gauge displays a sensitivity of 1.99 and boasts a wide strain operational range of 0–6000 µε, while maintaining excellent linearity. Furthermore, stress response conducted on a model of an aircraft wing illustrates the rapid monitoring of the strain gauge, which can detect strain as low as 100 µε. This study strongly highlights the potential applicability of the developed strain gauge in the aircraft, ships, and bridges for monitoring stress.

Wearable ultrasound imaging technology has become an emerging modality for the continuous monitoring of deep-tissue physiology, providing crucial health and disease information. Fast volumetric imaging that can provide a full spatiotemporal view of intrinsic 3D targets is desirable for interpreting internal organ dynamics. However, existing 1D ultrasound transducer arrays provide 2D images, making it challenging to overcome the trade-off between the temporal resolution and volumetric coverage. In addition, the high driving voltage limits their implementation in wearable settings. With the use of microelectromechanical system (MEMS) technology, we report an ultrasonic phased-array transducer, i.e., a 2D piezoelectric micromachined ultrasound transducer (pMUT) array, which is driven by a low voltage and is chip-compatible for fast 3D volumetric imaging. By grouping multiple pMUT cells into one single drive channel/element, we propose an innovative cell–element–array design and operation of a pMUT array that can be used to quantitatively characterize the key coupling effects between each pMUT cell, allowing 3D imaging with 5-V actuation. The pMUT array demonstrates fast volumetric imaging covering a range of 40 mm × 40 mm × 70 mm in wire phantom and vascular phantom experiments, achieving a high temporal frame rate of 11 kHz. The proposed solution offers a full volumetric view of deep-tissue disorders in a fast manner, paving the way for long-term wearable imaging technology for various organs in deep tissues.

Human pluripotent stem cells (hPSCs) represent an excellent cell source for regenerative medicine and tissue engineering applications. However, there remains a need for robust and scalable differentiation of stem cells into functional adult tissues. In this paper, we sought to address this challenge by developing magnetic microcapsules carrying hPSC spheroids. A co-axial flow-focusing microfluidic device was employed to encapsulate stem cells in core-shell microcapsules that also contained iron oxide magnetic nanoparticles (MNPs). These microcapsules exhibited excellent response to an external magnetic field and could be held at a specific location. As a demonstration of utility, magnetic microcapsules were used for differentiating hPSC spheroids as suspension cultures in a stirred bioreactor. Compared to standard suspension cultures, magnetic microcapsules allowed for more efficient media change and produced improved differentiation outcomes. In the future, magnetic microcapsules may enable better and more scalable differentiation of hPSCs into adult cell types and may offer benefits for cell transplantation.

Patient-derived tumor organoids have emerged as promising models for predicting personalized drug responses in cancer therapy, but they typically lack immune components. Preserving the in vivo association between tumor cells and endogenous immune cells is critical for accurate testing of cancer immunotherapies. Mechanical dissection of tumor specimens into tumor fragments, as opposed to enzymatic digestion into single cells, is essential for maintaining these native tumor-immune cell spatial relationships. However, conventional mechanical dissection relying on manual mincing is time-consuming and irreproducible. This study describes two microdissection devices, the µDicer and µGrater, to facilitate the generation of intact tumor fragments from mouse B16 melanoma, a common model of human melanoma. The µDicer- and µGrater-cut tumor fragments were used to generate air‒liquid interface (ALI) organoids that copreserve tumor cells with infiltrating immune subsets without artificial reconstitution. The µDicer, consisting of a hexagonal array of silicon microblades, was employed to investigate the effect of organoid size. The viability of ALI organoid immune cells appeared insensitive to organoid sizes exceeding ~400 µm but diminished in organoids ~200 µm in size. The µGrater, consisting of an array of submillimeter holes in stainless steel, was employed to accelerate dissection. For the samples studied, the µGrater was 4.5 times faster than manual mincing. Compared with those generated by manual mincing, ALI organoids generated by the µGrater demonstrated similar viability, immune cell composition, and responses to anti-PD-1 immunotherapy. With further optimization, the µGrater holds potential for integration into clinical workflows to support the advancement of personalized cancer immunotherapy.

Over the last two decades, platinum group metals (PGMs) and their alloys have dominated as the materials of choice for electrodes in long-term implantable neurostimulation and cardiac rhythm management devices due to their superior conductivity, mechanical and chemical stability, biocompatibility, corrosion resistance, radiopacity, and electrochemical performance. Despite these benefits, PGM manufacturing processes are extremely costly, complex, and challenging with potential health hazards. Additionally, the volatility in PGM prices and their high supply risk, combined with their scarce concentration of approximately 0.01 ppm in the earth’s upper crust and limited mining geographical areas, underscores their classification as critical raw materials, thus, their effective recovery or substitution worldwide is of paramount importance. Since postmortem recovery from deceased patients and/or refining of PGMs that are used in the manufacturing of the electrodes and microelectrode arrays is extremely rare, challenging, and highly costly, therefore, substitution of PGM-based electrodes with other biocompatible materials that can yield electrochemical performance values equal or greater than PGMs is the only viable and sustainable solution to reduce and ultimately substitute the use of PGMs in long-term implantable neurostimulation and cardiac rhythm management devices. In this article, we demonstrate for the first time how the novel technique of “reactive hierarchical surface restructuring” can be utilized on titanium—that is widely used in many non-stimulation medical device and implant applications—to manufacture biocompatible, low-cost, sustainable, and high-performing neurostimulation and cardiac rhythm management electrodes. We have shown how the surface of titanium electrodes with extremely poor electrochemical performance undergoes compositional and topographical transformations that result in electrodes with outstanding electrochemical performance.