Microsystems & Nanoengineering最新文献

The reliability of through-glass via (TGV) interconnects is critical for advanced semiconductor packaging. This work investigates microstructural and mechanical evolution in electroplated TGV-Cu subjected to long-term aging at 250 °C. TGV samples were fabricated via laser-induced etching and double-sided copper electroplating, then aged for up to 1008 h. Nanoindentation revealed region-dependent reductions in hardness (from 2.0-2.5 GPa to below 0.5 GPa) and modulus (from 110-130 GPa to 40-90 GPa), with surface-near regions most affected. The glass substrate maintained stable mechanical properties until microcracks formed after 1008 h. EBSD quantification showed grain-size enlargement from 0.46 µm to 1.86 µm and a concurrent decrease in dislocation density. Molecular dynamics simulations of 3, 4, 5 nm grains corroborated the inverse relationship between grain size and micro-mechanical properties. A hybrid Potts-phase field model further linked grain coarsening to stress relaxation and elastic-energy minimization, revealing that as grains grow, the overall von Mises stress in the structure decreases; high-modulus grains retain relatively higher local stresses, while low-modulus, low-stress grains exhibit faster growth rates. Electrical I-V measurements confirmed stable ohmic behavior, despite a drop in insulation resistance. These integrated experimental and computational insights provide theoretical guidance for optimizing TGV interposer design and ensuring long-term operational reliability in heterogeneous integration technologies.

Surface plasmon resonance (SPR) biosensoris a new type of high sensitivity, real-time, label-free detection technology, which plays an increasingly important role in the biomedicine field. Considering the urgent requirement of trace detection, especially for diagnosing early-stage diseases, the demand for high detection sensitivity of sensors is increasing. In recent years, various nanostructures have been proposed to design SPR biosensors. By constructing composite nanostructures, the detection sensitivity has been significantly enhanced, which has become a promising solution to expand the application of SPR biosensors. This review systematically summarized the basic principle, fabrication and illustrative application of SPR biosensors based on versatile nanostructures. Firstly, the mechanisms of various nanostructures to enhance the detection sensitivity of SPR biosensors were clarified. Then, the preparation strategies of various nanostructures were comprehensively illustrated. In addition, this review also summarized the latest applications of SPR biosensors with different structures. Finally, this review carefully highlighted the current challenges and possible development directions in future.

Recent innovations in skin microphysiological systems (MPSs) have gained momentum following regulatory advances such as the FDA Modernization Act 2.0 and the global shift toward alternatives to animal testing. This review highlights the development of three major technologies-3D bioprinting, skin organoids, and skin-on-a-chip-and their roles in replicating human skin physiology for research and preclinical applications. We examine how these platforms model complex skin functions, including epidermal barrier formation, vascular and immune interactions, and disease phenotypes such as psoriasis, atopic dermatitis, melanoma, and viral infections. In addition to summarizing their utility in toxicological screening and therapeutic evaluation, we explore how current OECD test guidelines may guide future validation efforts. Finally, we discuss emerging strategies for integrating automation and machine learning-based image analysis to enable scalable, high-content screening of skin MPS models across diverse applications.

State-of-the-art high-density multielectrode arrays enable the recording of simultaneous spiking activity from hundreds of neurons. Although significant efforts have been dedicated to enhancing neural recording devices and developing more efficient sorting algorithms, there has been relatively less focus on the allocation of microelectrodes-a factor that undeniably affects spike sorting effectiveness and ultimately the total number of detected neurons. Here, we systematically examined the relationship between optimal electrode spacing and spike sorting efficiency by creating virtual sparser layouts from high-density recordings through spatial downsampling. We assessed spike sorting performance by comparing the quantity of well-isolated single units per electrode in sparse configurations across various brain regions (neocortex and thalamus), species (rat, mouse, and human) and various spike-sorting algorithms. Enabling the theoretical estimation of optimal electrode arrangements, we complement experimental results with a geometrical modeling framework. Contrary to the general assumption that higher electrode density inherently leads to more efficient sorting, both our theoretical and experimental results reveal a clear optimum for electrode spacing specific to species and regions. We demonstrate that carefully choosing optimal electrode distances could yield a total of 1.7-3.75 times increase in spike sorting efficiency. These findings emphasize the necessity of species- and region-specific microelectrode design optimization.

Capsule endoscopy has revolutionized gastrointestinal (GI) diagnosis but is limited to imaging, often requiring invasive procedures for subsequent therapy. This work presents a magnetically actuated robotic capsule endoscope (MARCE) that integrates controllable magnetic navigation, real-time visualization, and targeted drug delivery via microneedle patches to bridge the gap between diagnosis and therapy. The MARCE features a retractable micro-camera for continuous monitoring of the GI tract, dual-layer hyaluronic acid microneedle patches enabling multi-point drug administration, and an electrothermally triggered protective cover to prevent premature dissolution in GI fluids. Sized similarly to conventional clinical capsules (11.8 mm in diameter and 21.5 mm in length), the MARCE demonstrates controlled epinephrine release from its microneedle patches (up to 0.4 mg) and provides sufficient magnetic actuation force (~0.58 N) and torque (~18.4 N mm) for intestine locomotion and penetration. Driven by a custom-developed electromagnetic actuation system, the MARCE achieves precise 3D locomotion with an average positional error <1.5 mm controlled microneedles penetration (with a peak force of 0.15 N), and successful drug delivery across multiple lesions in ex-vivo porcine intestinal tissue. This integrated platform streamlines diagnostic-therapeutic workflows, offering a minimally invasive solution for GI disorders such as bleeding, with potential to enhance patient comfort and treatment precision.

Cell therapy products are rapidly transforming clinical practice, but their short shelf-lives and inability to undergo terminal sterilization create major challenges for sterility testing. Conventional rapid microbiological methods (RMMs) are hindered by the dense cellular background of therapeutic samples, which masks rare microbial contaminants and necessitates pre-analytical processing. Efficient separation of microorganisms from high-density cell suspensions is therefore a critical prerequisite for enabling real-time, in-process sterility assurance. Here, we systematically elucidate the Dean flow-dominated migration mechanism and determine its effective range for continuous, label-free separation of non-typical contaminants ≤ 5 μm in microchannels exceeding 40 μm in height. We demonstrate that particles with ap/h < 0.05 undergo exclusive Dean-induced lateral migration, while those near the inertial focusing threshold (ap/h ≈ 0.07) exhibit a Reynolds number-dependent transition between unfocused and centerline-focused streams. Leveraging these principles, we designed optimized channel geometries that achieved > 95% separation efficiency and > 96% purity of T cells versus three morphologically distinct bacteria at 10⁵ bacteria/mL. At ultra-low loads (< 10 CFU/mL), culture-based assays confirmed 100% detection for inocula > 1 CFU/mL. Our findings validate Dean migration as a governing mechanism for submicron particle separation and provide a path toward integrating microfluidic modules into closed CAR-T manufacturing platforms, advancing real-time microbial quality control in cell therapy production.

Continuous glucose monitoring (CGM) is vital for diabetes care, but current invasive electrochemical sensors of blood glucose often cause potential infection and skin irritation. Non-invasive sensors in sweat glucose are promising alternatives but limited by low sensitivity and poor compatibility with complex sweat environments, because the sweat glucose has concentrations of 20 - 600 μmol/L and are 100-fold more dilute than the blood glucose. Here, we report a portable optical sensing system that integrates an optical watch prototype with functionalized plasmonic silver-coated silicon nanopillars substrate for non-invasive and label-free glucose detection in sweat. The nanopillar sensor with wide-range plasmonic hot spots is functionalized with 4-mercaptophenylboronic acid for selective glucose capture and optical signal transduction through both Raman scattering and plasmonic detection. The optical watch system has a compact LED illumination at 623-660 nm and wireless transmission of data to a smartphone application. Significantly, the whole system demonstrated excellent sensitivity down to 22 μmol/L and high selectivity in detecting glucose in artificial sweat, which were validated by human sweat samples to confirm its applicability in real-life scenarios. Our study offers a promising portable and non-invasive alternative to traditional CGM and highlights the potential of integrating nanophotonic sensors with wearable platforms for continuous health monitoring and personalized medicine.

Human exhaled gas is rich in biomarker information that could be used for early diagnosis of disease. With the development of nanotechnology and the Internet of Medical Things (IoMT), AI-assisted nano gas sensor arrays as a non-invasive exhaled gas detection platform brings fascinating technological solutions to the field of breath detection. Herein, we designed a new heterojunction sensing array by anchoring n-GaN nanoparticles on MOF-derived p-MO_x porous nanosheets. The gas sensor arrays demonstrated remarkable response speed (10 s), excellent repeatability, and extreme anti-humidity with a lower detection limit of 1 ppb at room temperature. Energy band structure combined with density functional theory (DFT) calculations were used to analyze the entire gas sensing process. Furthermore, we developed a new breath detection device and successfully performed clinical patient exhaled gas detection. With the assistance of ensemble learning, the recognition accuracy of lung cancer patients and healthy volunteers can reach 95.8%. This work provides an innovative technology for the construction of heterojunction sensor arrays and exhaled gas detection device, which has a promising application prospect in the field of early disease diagnosis and IoMT.

Controllable droplet manipulation is essential for applications from biochemical analysis to soft robotics. Despite significant advances, existing methods struggle to achieve broadly tunable, asynchronous control of multiple droplets, limiting their efficiency in three-dimensional and dynamic environments. Here, we introduce a droplet ultrasonic tweezer (DUT), which leverages broadly tunable acoustic control to enable three-dimensional multi-droplet manipulation and enhance condensing surface renewal. The DUT generates a twin-trap acoustic field from a single phased-array focal point, allowing droplet coalescence and confinement at five specific trapping positions. Leveraging this capability, we demonstrate synchronous directional transport of three droplets and asynchronous control of their relative positions. Moreover, the DUT's vertically extensible twin trap enables synchronous manipulation of droplets across double-layer surfaces. Beyond transport, programmable spatial modulation of the acoustic field enhances microdroplet coalescence and suppresses merged-droplet detachment, increasing the droplet detachment size and expanding the swept area for more effective surface renewal. Our results establish a robust paradigm for applications in optical surface self-cleaning, condensation heat transfer, and atmospheric water harvesting, offering a scalable solution for precise droplet control.

Despite its huge potential, such as in biomedical research for bioparticle sorting and sensing, near-field optical trapping suffers from limited trapping efficiency due to the weak evanescent field accompanied by shallow penetration depth (~100 nm). Moreover, such optical trapping approaches are susceptible to perturbations from trapped particles, making them less robust and impractical. Here, we demonstrate, for the first time, a thin-walled hollow microbottle resonator with gradient-wall thickness to realize large-scale and robust optical trapping based on mode field strength antinodes, instead of the evanescent field. The microbottle resonator combined with off-equatorial fiber taper coupling collaboratively enables the excitation of axial high-order Whispering Gallery Modes (WGMs). In addition, the unique feature of the gradient-wall thickness design mitigates the adverse impact of the perturbation from trapped particles on mode field distributions, making the gradient-thickness protected (GTP) microbottle resonator more robust and stable. This enables large-scale optical trapping over an axial span exceeding 195 μm, with a threshold power of 0.198 mW for 500-nm-radius polystyrene particles. The GTP WGM microbottle resonator also achieves tunable localized optical trapping. This work demonstrates a scalable optical manipulation framework for applications in single-particle analysis, bioparticle manipulation, and label-free sensing.