Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805324
J. Han, M. Uchic, T. Saif
We present, for the first time, a MEMS-based test methodology that potentially enables elevated-temperature mechanical tensile testing of nano- and micro-scale samples within a SEM or TEM (T ≫ 500°C). Importantly, the test methodology allows for the samples to be fabricated separately from the MEMS-apparatus, a significant advancement from other test devices developed by some of the present authors [1]. Therefore the test methodology should be applicable to the study of a wide range of materials. Other advancements found in the methodology include a co-fabricated force calibration device, and a built-in thermocouple sensor to measure the stage temperature close to the sample.
{"title":"Novel MEMS Apparatus for in Situ Thermo-Mechanical Tensile Testing of Materials at the Micro- and Nano-Scale","authors":"J. Han, M. Uchic, T. Saif","doi":"10.1109/MEMSYS.2009.4805324","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805324","url":null,"abstract":"We present, for the first time, a MEMS-based test methodology that potentially enables elevated-temperature mechanical tensile testing of nano- and micro-scale samples within a SEM or TEM (T ≫ 500°C). Importantly, the test methodology allows for the samples to be fabricated separately from the MEMS-apparatus, a significant advancement from other test devices developed by some of the present authors [1]. Therefore the test methodology should be applicable to the study of a wide range of materials. Other advancements found in the methodology include a co-fabricated force calibration device, and a built-in thermocouple sensor to measure the stage temperature close to the sample.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126650152","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805320
W.C. Lee, F. Kuypers, Y. Cho, A. Pisano
We present a novel single-cell analyzer, flow-lysometry, to measure cytosolic components in large cell populations. The present flow-lysometry performs and synchronizes three functions (cell-detection, cell-lysis, and component-sensing) in a continuous microfluidic channel, thus achieving high-throughput measurements (20 cells/min) of wide target components. In the experimental study, we measure the cytosolic component (Ca++ ion) from each single RBC and verify population analysis of single cells in mixed cell populations. Thus, this work shows that the present flow-lysometry is useful to characterize complex cell populations, which is required for various biomedical studies.
{"title":"Flow-Lysometry and its Biomedical Application: Cytosolic Analysis of Single Cells in Large Populations","authors":"W.C. Lee, F. Kuypers, Y. Cho, A. Pisano","doi":"10.1109/MEMSYS.2009.4805320","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805320","url":null,"abstract":"We present a novel single-cell analyzer, flow-lysometry, to measure cytosolic components in large cell populations. The present flow-lysometry performs and synchronizes three functions (cell-detection, cell-lysis, and component-sensing) in a continuous microfluidic channel, thus achieving high-throughput measurements (20 cells/min) of wide target components. In the experimental study, we measure the cytosolic component (Ca++ ion) from each single RBC and verify population analysis of single cells in mixed cell populations. Thus, this work shows that the present flow-lysometry is useful to characterize complex cell populations, which is required for various biomedical studies.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125677630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805428
D. Wakui, Naoki Imai, Y. Nagaura, Hironobu Sato, T. Sekiguchi, S. Konishi, S. Shoji, T. Homma
This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.
{"title":"EHD Micro Pump using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes","authors":"D. Wakui, Naoki Imai, Y. Nagaura, Hironobu Sato, T. Sekiguchi, S. Konishi, S. Shoji, T. Homma","doi":"10.1109/MEMSYS.2009.4805428","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805428","url":null,"abstract":"This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127490290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805394
K. Park, H.G. Park, S. Takeuchi
In this study, we fabricate a glass-silicon-glass chip for the generation of a water-droplet array. Using this array, we succeeded in performing polymerase chain reaction (PCR) within the hundreds of trapped water droplets. Then, we selectively retrieve a specific PCR droplet with a bubble formed by heating an aluminum micro pad with an infrared laser.
{"title":"Generation and Selective Retrieval of Micro Droplets in an Array for Micro-PCR using a Glass-Silicon-Glass Chip","authors":"K. Park, H.G. Park, S. Takeuchi","doi":"10.1109/MEMSYS.2009.4805394","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805394","url":null,"abstract":"In this study, we fabricate a glass-silicon-glass chip for the generation of a water-droplet array. Using this array, we succeeded in performing polymerase chain reaction (PCR) within the hundreds of trapped water droplets. Then, we selectively retrieve a specific PCR droplet with a bubble formed by heating an aluminum micro pad with an infrared laser.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133572866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805540
Taik-Min Lee, Hyun-Cheol Choi, J. Noh, Dong-Soo Kim
This paper presents the electro-luminescence (EL) display lamp which is patterned on a curved surface by the pad printing method. The EL display lamp consists of 5 layers: Bottom electrode; Dielectric layer; Phosphor; Transparent electrode; Bus electrode. For proper pad printing, the ink of each layer was formulated and the pad printing condition was controlled. A PEN film was used first in order to realize the pad printing process condition of each layer. Finally, the EL display lamp was printed on a dish, which has a radius of curvature 80mm.
{"title":"EL Display Printed on Curved Surface","authors":"Taik-Min Lee, Hyun-Cheol Choi, J. Noh, Dong-Soo Kim","doi":"10.1109/MEMSYS.2009.4805540","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805540","url":null,"abstract":"This paper presents the electro-luminescence (EL) display lamp which is patterned on a curved surface by the pad printing method. The EL display lamp consists of 5 layers: Bottom electrode; Dielectric layer; Phosphor; Transparent electrode; Bus electrode. For proper pad printing, the ink of each layer was formulated and the pad printing condition was controlled. A PEN film was used first in order to realize the pad printing process condition of each layer. Finally, the EL display lamp was printed on a dish, which has a radius of curvature 80mm.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116554772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805360
G. E. Perlin, K. Wise
A new approach to microsystem integration to replace conventional area-consuming platform architectures with an overlay integration cable is presented. A parylene cable carrying interconnect lines is used to integrate a 3-D array of silicon microelectrodes with a custom-designed signal conditioning chip to realize a neural recording microsystem in its most compact form. This low-profile integrated front-end was implanted in a guinea pig and used to obtain discriminable neural activity.
{"title":"Ultra-Compact Integration for Fully-Implantable Neural Microsystems","authors":"G. E. Perlin, K. Wise","doi":"10.1109/MEMSYS.2009.4805360","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805360","url":null,"abstract":"A new approach to microsystem integration to replace conventional area-consuming platform architectures with an overlay integration cable is presented. A parylene cable carrying interconnect lines is used to integrate a 3-D array of silicon microelectrodes with a custom-designed signal conditioning chip to realize a neural recording microsystem in its most compact form. This low-profile integrated front-end was implanted in a guinea pig and used to obtain discriminable neural activity.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"99 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131541021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805386
Jinjie Shi, Yuebing Zheng, T. Huang
The nanoparticles redistribution in a microfluidic channel through a dynamic patterning process will locally change the refractive index of the medium around the nanodisk arrays, as well as the LSPR. The dynamic patterning of nanoparticles was achieved by a standing surface acoustic wave (SSAW), from which the acoustic force generated and force the particles to the pressure nodes. The SSAW were formed through two parallel interdigital transducers (IDTs) on a LiNbO3 substrate, on which the gold nanodisk arrays were fabricated through a nanosphere lithography. A PDMS microchannel was aligned with the IDTs and bonded with the substrate to cover the nanodisk arrays. A solution of fluorescent polystyrene beads (diameter: 320 nm) was injected into the channel through a pressure driven flow. When SSAW was on, the original peak (¿=694 nm) is split into two peaks at ¿1= 662 nm and ¿2= 746 nm, respectively.
{"title":"Surface Acoustic Wave-Driven Active Plasmonicsbased on Dynamic Patterning of Nanoparticles in Microfluidic Channels","authors":"Jinjie Shi, Yuebing Zheng, T. Huang","doi":"10.1109/MEMSYS.2009.4805386","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805386","url":null,"abstract":"The nanoparticles redistribution in a microfluidic channel through a dynamic patterning process will locally change the refractive index of the medium around the nanodisk arrays, as well as the LSPR. The dynamic patterning of nanoparticles was achieved by a standing surface acoustic wave (SSAW), from which the acoustic force generated and force the particles to the pressure nodes. The SSAW were formed through two parallel interdigital transducers (IDTs) on a LiNbO3 substrate, on which the gold nanodisk arrays were fabricated through a nanosphere lithography. A PDMS microchannel was aligned with the IDTs and bonded with the substrate to cover the nanodisk arrays. A solution of fluorescent polystyrene beads (diameter: 320 nm) was injected into the channel through a pressure driven flow. When SSAW was on, the original peak (¿=694 nm) is split into two peaks at ¿1= 662 nm and ¿2= 746 nm, respectively.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132567391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805330
Z. Guo, L.T. Lin, Q. Zhao, J. Cui, X. Chi, Z.C. Yang, G. Yan
In this paper, a bulk micromachined lateral axis TFG (tuning fork gyroscope) with torsional sensing comb capacitors is presented. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Novel driving comb capacitors are used to electrically decouple the mechanical coupling from sensing mode to driving mode. The process for this gyroscope is also compatible with z-axis gyroscope, which makes it potentially to realize low coast monolithic MIMU (miniature inertial measurement unit) without vacuum packaging. The TFG was fabricated and tested at atmosphere. The sensitivity is 17.8mV/°/s while the nonlinearity is 0.6%. The bias stability is 0.05°/s (1¿) and the noise floor is 0.02°/s/Hz1/2
{"title":"An Electrically Decoupled Lateral-Axis Tuning Fork Gyroscope Operating at Atmospheric Pressure","authors":"Z. Guo, L.T. Lin, Q. Zhao, J. Cui, X. Chi, Z.C. Yang, G. Yan","doi":"10.1109/MEMSYS.2009.4805330","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805330","url":null,"abstract":"In this paper, a bulk micromachined lateral axis TFG (tuning fork gyroscope) with torsional sensing comb capacitors is presented. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Novel driving comb capacitors are used to electrically decouple the mechanical coupling from sensing mode to driving mode. The process for this gyroscope is also compatible with z-axis gyroscope, which makes it potentially to realize low coast monolithic MIMU (miniature inertial measurement unit) without vacuum packaging. The TFG was fabricated and tested at atmosphere. The sensitivity is 17.8mV/°/s while the nonlinearity is 0.6%. The bias stability is 0.05°/s (1¿) and the noise floor is 0.02°/s/Hz1/2","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134365046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805314
T. Metz, G. Birkle, R. Zengerle, P. Koltay
In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.
{"title":"StarJet: Pneumatic Dispensing of Nano- to Picoliter Droplets of Liquid Metal","authors":"T. Metz, G. Birkle, R. Zengerle, P. Koltay","doi":"10.1109/MEMSYS.2009.4805314","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805314","url":null,"abstract":"In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134538744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805363
H. Zeng, Y. Zhao
Blood viscosity is an important hematological parameter which is widely used for the diagnosis of atherosclerosis, thrombosis and stroke. Currently used Couette rheometer drives the blood flow at a certain shear rate and measures the viscosity from the resistance toque towards the rotational shaft. Although effective, conventional rheometer is limited due to the complex configuration and the relatively large sample volume. More important, the rotating components hinder the miniaturization for point-of-care and unattended diagnosis. To address this, a microchip is reported for measuring the blood viscosity from the electrical impedances of the blood flowing inside a microchannel. This microdevice is advantageous over rotational viscometers in less sample consumption, rapid response and simple configuration. Considering the vital role of blood viscosity in cardiovascular disorders, this microchip provides a promising start point for on-chip hematological diagnosis.
{"title":"On-Chip Blood Viscometer Towards Point-of-Care Hematological Diagnosis","authors":"H. Zeng, Y. Zhao","doi":"10.1109/MEMSYS.2009.4805363","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805363","url":null,"abstract":"Blood viscosity is an important hematological parameter which is widely used for the diagnosis of atherosclerosis, thrombosis and stroke. Currently used Couette rheometer drives the blood flow at a certain shear rate and measures the viscosity from the resistance toque towards the rotational shaft. Although effective, conventional rheometer is limited due to the complex configuration and the relatively large sample volume. More important, the rotating components hinder the miniaturization for point-of-care and unattended diagnosis. To address this, a microchip is reported for measuring the blood viscosity from the electrical impedances of the blood flowing inside a microchannel. This microdevice is advantageous over rotational viscometers in less sample consumption, rapid response and simple configuration. Considering the vital role of blood viscosity in cardiovascular disorders, this microchip provides a promising start point for on-chip hematological diagnosis.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134576228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：