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Revised models for the underlying physics and mitigations of laser induced filamentation damage in large aperture laser optics 修正了大口径激光光学中激光诱导成丝损伤的基本物理模型和缓解方法
Pub Date : 2019-12-17 DOI: 10.1117/12.2536688
E. Feigenbaum, J. Di Nicola, J. Bude
The necessity for durable optics for higher laser fluences and intensities grows as new technological advancements allow for increased peak powers of laser systems. This has motivated a substantial effort in the last decades to better understand laser induced damage mechanisms and their mitigation. One major damage mechanism limitation to laser systems at high peak intensities is filamentation in fused silica glass, due to Kerr self-focusing of the light [1], that has been motivating an on-going effort for the last few decades [2]. The past studies had led to a set of simplified rules that allows for the operation of laser system below the onset point for this mechanism to take place, namely what is known as the IL rule (intensity times the collapse distance before filamenting equals some empirical constant) and the Bespalov-Talanov (BT) perturbation growth theory [3-6]. The need to increase the laser beam intensities and optimize the throughput, closer to the point where the optical propagation length in the material is comparable to the predicted filamentation distance, requires revisiting and improving our understanding of the current rule set. This is especially emphasized by the shortcomings of these two highly useful yet under-justified models for the relevant situations of large aperture beams where the contrast perturbations on the beam are the seed for the filamentations (i.e., and not whole beam collapse).
随着新技术的进步,激光系统的峰值功率越来越高,需要耐用的光学器件来实现更高的激光影响和强度。在过去的几十年里,这激发了人们为更好地理解激光诱导损伤机制及其缓解措施所做的大量努力。激光系统在高峰值强度下的一个主要损伤机制限制是熔融石英玻璃中的灯丝,由于光的克尔自聚焦,这在过去的几十年里一直在推动着持续的努力。过去的研究已经得出了一套简化的规则,允许激光系统在该机制发生的起始点以下运行,即所谓的IL规则(强度乘以成丝前的坍缩距离等于某个经验常数)和Bespalov-Talanov (BT)微扰生长理论[3-6]。需要增加激光束强度和优化吞吐量,更接近于材料中的光传播长度与预测的成丝距离相当的点,需要重新审视和改进我们对当前规则集的理解。对于大孔径光束的相关情况,这两个非常有用但不合理的模型的缺点特别强调了这一点,其中光束上的对比扰动是细丝的种子(即,而不是整个光束崩溃)。
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引用次数: 0
Direct comparison of laser-induced damage threshold testing protocols on dielectric mirrors: effect of nanosecond laser pulse shape at NIR and UV wavelengths 介质反射镜激光损伤阈值测试方案的直接比较:近红外和紫外波长纳秒激光脉冲形状的影响
Pub Date : 2019-12-17 DOI: 10.1117/12.2536456
Rūta Pakalnytė, E. Pupka, A. Melninkaitis
As a rule of thumb, laser-induced damage threshold (LIDT) is often reported in terms of a single number, without even mentioning the testing details. However, meaning of reported LIDT numbers could be different depending on the testing protocol used. Such differences are not always obvious to practitioners that are designing or building laser systems (users of LIDT numbers). Furthermore, the properties of laser sources used for LIDT testing could also be very different among various testing laboratories. Thus, in order to exemplify possible effects of LIDT testing details on reported values an experimental study is conducted, where direct comparison of the most popular testing protocols, namely 1-on-1, S-on-1, R-on-1, and Raster Scan, is made. Experiments were organized in such a way that all the tests for the wavelength of interest were done on the same sample (conventional high-reflectivity HR mirror) by using both injection-seeded pulses (single longitudinal mode) as well as non-seeded (multimode) pulses with comparable effective pulse duration. Two sufficiently large dielectric mirrors were tested. Experiments were conducted for fundamental- (1064 nm) and third- (355 nm) harmonic wavelengths of Nd:YAG laser. The LIDTs obtained by using distinct testing protocols as well as pertinent damage morphologies are directly compared and discussed.
根据经验,激光诱导损伤阈值(LIDT)通常以单个数字报告,甚至没有提及测试细节。然而,根据所使用的测试方案,报告的LIDT数字的含义可能会有所不同。对于设计或建造激光系统的从业者(LIDT号码的用户)来说,这种差异并不总是显而易见的。此外,用于LIDT测试的激光源的特性在不同的测试实验室之间也可能有很大的不同。因此,为了举例说明LIDT测试细节对报告值的可能影响,进行了一项实验研究,其中直接比较了最流行的测试协议,即1对1,s对1,r对1和光栅扫描。实验的组织方式是,通过使用具有相当有效脉冲持续时间的注入种子脉冲(单纵模)和非种子脉冲(多模),在同一样品(传统高反射率HR镜)上进行所有感兴趣波长的测试。测试了两个足够大的介电镜。对Nd:YAG激光器的基频(1064 nm)和三频(355 nm)波长进行了实验。采用不同的测试方案和相关的损伤形态得到的lidt进行了直接比较和讨论。
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引用次数: 0
Influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings 基材清洗过程中超声波频率对增透涂层抗激光性能的影响
Pub Date : 2019-11-20 DOI: 10.1117/12.2536442
T. Gischkat, D. Schachtler, Z. Balogh-Michels, R. Botha, André Mocker, B. Eiermann, Sven Günther
Cleaning of substrates prior to optical coating is an important step in the manufacturing of high performance optical components. It is well known that the ultra-sonic frequency used during substrate cleaning has a strong influence on the quality of the cleaning process and the number of remaining particles on the surface. Therefore, we have investigated the influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings. For this purpose, a SiO2 / Ta2O5 AR-coating for a normal angle of incidence at 1064 nm was deposited onto fused silica substrates. Prior to deposition, the substrates were cleaned with cleaning processes. The applied ultra-sonic frequencies were 40, 80, 120 and 500 kHz. After deposition the LIDT was measured using a 1064 nm ns-pulsed laser test bench. It turned out that the different ultra-sonic-cleaning processes have a strong influence on the number of remaining particles on the surface of the cleaned samples. The counted number of particles with sizes greater < 83 nm were between 1320 and 12 particles for the different applied ultra-sonic frequencies. In consequence the different cleaned and AR-coated samples show different laser damage behavior. Nevertheless the measured particle density does not totally explain the differences in laser resistance.
光学镀膜前的基片清洗是制造高性能光学元件的重要步骤。众所周知,基材清洗时使用的超声波频率对清洗过程的质量和表面残留颗粒的数量有很大的影响。因此,我们研究了基材清洗过程中超声波频率对增透涂层抗激光性能的影响。为此,在熔融二氧化硅衬底上沉积了一层法向入射角为1064 nm的SiO2 / Ta2O5 ar涂层。在沉积之前,用清洗工艺清洗衬底。应用的超声波频率分别为40、80、120和500 kHz。沉积后,利用1064 nm脉冲激光试验台测量LIDT。结果表明,不同的超声波清洗工艺对清洗样品表面残留颗粒的数量有很大的影响。在不同的超声波频率下,粒径< 83 nm的粒子数在1320 ~ 12个之间。因此,不同的清洁和ar涂层样品表现出不同的激光损伤行为。然而,测量的粒子密度并不能完全解释激光电阻的差异。
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引用次数: 2
Third harmonic (TH) generation: a tool to study dielectric material properties near the laser induced damage threshold (LIDT) 三次谐波(TH)产生:研究激光诱导损伤阈值(LIDT)附近介电材料特性的工具
Pub Date : 2019-11-20 DOI: 10.1117/12.2536440
Amir Khabbazi Oskouei, L. Emmert, M. Steinecke, M. Jupé, D. Ristau, L. Jensen, W. Rudolph
Third harmonic generation (THG) in dielectric films with femtosecond laser pulses is used to study properties of dielectric thin films and stacks thereof below and above the 1-on-1 laser damage threshold. Deviations from the ideal cubic relationship between third-harmonic signal and incident fundamental fluence are a result of several fundamental processes. Their relative contributions are assessed by comparing results from LIDT and conversion efficiency measurements as well as beam profile and pump-probe studies.
利用飞秒激光脉冲介质薄膜中的三次谐波(THG),研究了介质薄膜及其在1对1激光损伤阈值以下和以上的特性。三次谐波信号与入射基流之间的理想三次关系的偏离是几个基本过程的结果。它们的相对贡献是通过比较LIDT和转换效率测量的结果以及光束剖面和泵-探针研究来评估的。
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引用次数: 0
Monte Carlo analysis of ISO and raster scan laser damage protocols 蒙特卡罗分析ISO和光栅扫描激光损伤协议
Pub Date : 2019-11-20 DOI: 10.1117/12.2536443
C. Stolz, R. Negres, J. Arenberg
The typical measurement error reported for laser damage tests is the fluence uncertainty due to inaccuracies in measuring the laser beam energy and its diameter. However, the inherent uncertainty of the testing protocol should also be included in the reported laser damage threshold error bars. Underestimating measurement errors can lead to false conclusions about the impact of process changes on laser damage resistance. In this study, four different laser damage precursor fluence distributions were created from randomly generated numbers and then evaluated using the ISO and raster scan laser damage test protocols to determine a laser damage threshold. Measurement errors are determined for flat top test beams for multiple cases. To add real world relevance, the impact of Gaussian test beams with beam pointing instability was modeled for the lowest accuracy laser damage precursor distribution. The impact of damage test area compared to optic dimension is also examined. The measurement error for the raster scan test ranged from 8% to 24% depending on the test beam spatial profile (flat top or Gaussian) and beam pointing stability. ISO measurement errors ranged from 4% to 250% for a simulated 10 J/cm2 test and was much more sensitive to the laser damage precursor distribution as well as the spatial profile and pointing of the test beam. Both testing protocols poorly predicted the laser damage resistance of large areas with Gaussian precursor laser damage distributions.
激光损伤测试报告的典型测量误差是由于测量激光束能量及其直径的不准确性而引起的影响不确定度。然而,测试方案的固有不确定性也应包括在报告的激光损伤阈值误差条中。低估测量误差会导致错误的结论,即工艺变化对激光损伤抗力的影响。在这项研究中,从随机生成的数字中创建了四种不同的激光损伤前体通量分布,然后使用ISO和光栅扫描激光损伤测试方案进行评估,以确定激光损伤阈值。测量误差确定了平顶测试梁的多种情况。为了增加现实世界的相关性,对最低精度激光损伤前体分布进行了高斯测试光束指向不稳定性的影响建模。研究了损伤试验面积对光学尺寸的影响。光栅扫描测试的测量误差范围从8%到24%,这取决于测试光束的空间轮廓(平顶或高斯)和光束指向稳定性。对于模拟的10 J/cm2测试,ISO测量误差范围为4%至250%,并且对激光损伤前驱体分布以及测试光束的空间轮廓和指向更加敏感。两种测试方案都不能很好地预测高斯前驱体激光损伤分布的大面积激光损伤抗力。
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引用次数: 0
The direct absorption measurement of fused silica, CaF2, MgF2, and sapphire at VUV and IR region 熔融二氧化硅、CaF2、MgF2和蓝宝石在紫外和红外区的直接吸收测量
Pub Date : 2019-11-20 DOI: 10.1117/12.2536388
K. Kato, C. Higashimura, S. Niisaka
The absorption of fused silica, CaF2, MgF2, and sapphire at VUV region (193.4 nm) and IR region (1070 nm) were measured. For this measurement, LID (Laser Induced Deflection) method was used because of its high sensitivity. We report the degradation behavior of materials by comparison of absorption before and after ArF laser irradiation, and also the ultra-minute absorption at IR wavelength. At each wavelength, the absorption of low OH fused silica before the laser irradiation showed the smallest. At ArF wavelength, sapphire and CaF2 showed higher laser durability than MgF2 and fused silica. At IR wavelength, VUV-transmissive sapphire showed a lower absorption compared to general sapphire.
测定了熔融二氧化硅、CaF2、MgF2和蓝宝石在VUV区(193.4 nm)和IR区(1070 nm)的吸收。由于激光诱导偏转(LID)测量方法灵敏度高,因此采用了该方法。我们通过比较ArF激光照射前后材料的吸收,以及红外波长的超微小吸收,报道了材料的降解行为。在各个波长,激光照射前低OH熔融石英的吸收最小。在ArF波长下,蓝宝石和CaF2表现出比MgF2和熔融二氧化硅更高的激光耐久性。在红外波段,紫外透射蓝宝石的吸收比普通蓝宝石低。
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引用次数: 1
Damage performance of fused silica debris shield at the National Ignition Facility 国家点火装置熔融硅碎片屏蔽的损伤性能
Pub Date : 2019-11-20 DOI: 10.1117/12.2536452
Z. Liao, C. Carr, D. Cross, C. Miller, P. Miller, M. Monticelli, B. Olejniczak, R. Raman, D. VanBlarcom, B. Welday, P. Whitman, L. Wong, T. Suratwala
The final optics in the National Ignition Facility (NIF) are protected from target debris by sacrificial (disposable) debris shields (DDS) comprised of 3-mm thick Borofloat. While relatively inexpensive, Borofloat has been found to have bulk inclusions which, under UV illumination, damage, grow, and occasional erupt though the surface of the DDS. We have shown previously that debris generated from Input Surface Bulk Eruptions (ISBE) are a significant source of damage on NIF. Inclusion-free fused silica debris shield (FSDS) have been installed in between the DDS and the final optics on some NIF beam lines to test their efficacy in mitigating damage initiation. We will show results of the damage performance of the FSDS and its role in protecting the final optics. These results will help in our economic analysis of the potential benefits of using FSDS to protect NIF final optics.
国家点火装置(NIF)的最终光学系统由3毫米厚的硼浮子组成的牺牲(一次性)碎片护盾(DDS)保护。虽然相对便宜,但人们发现硼浮子有大块的内含物,在紫外线照射下,它们会破坏、生长,偶尔会从DDS表面喷发出来。我们之前已经表明,输入面大块喷发(ISBE)产生的碎片是NIF的一个重要破坏来源。在一些NIF波束线上,在DDS和最终光学器件之间安装了无夹杂物熔融硅碎片屏蔽(FSDS),以测试其减轻损伤的有效性。我们将展示FSDS的损伤性能结果及其在保护最终光学器件中的作用。这些结果将有助于我们对使用FSDS保护NIF最终光学器件的潜在效益进行经济分析。
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引用次数: 1
1064-nm, nanosecond laser mirror thin film damage competition 1064nm,纳秒激光反射薄膜损伤竞赛
Pub Date : 2019-11-20 DOI: 10.1117/12.2531861
R. Negres, C. Stolz, Michael D. Thomas, M. Caputo
This year’s competition aimed to survey state-of-the-art near-IR high reflectors. The requirements of the coatings were a minimum reflection of 99.5% at 0 degrees incidence angle light at 1064-nm. The choice of coating materials, design, and deposition method were left to the participants. Laser damage testing was performed at a single testing facility using the ISO standard protocol with a 3-ns pulse length laser system operating at 5 Hz in a multi-longitudinal mode. A double blind test assured sample and submitter anonymity. The damage performance results (LIDT) and sample rankings are compared to last year’s competition results where raster scanning test protocol was involved. In addition, details of the deposition processes, coating materials and substrate cleaning method are also shared. We found that hafnia/silica multilayer coatings deposited by e-beam are the most damage resistant under the test conditions. LIDT differences between testing protocols were up to 38 J/cm2, with ISO-reported LIDT results generally higher than those determined by raster scanning.
今年的竞赛旨在调查最先进的近红外高反射器。对涂层的要求是在1064纳米的0度入射角光线下的最低反射率为99.5%。涂层材料、设计和沉积方法的选择留给了参与者。激光损伤测试采用ISO标准协议,在单个测试设备上使用3ns脉冲长度的激光系统,在多纵向模式下以5hz的频率工作。双盲测试保证了样本和提交者的匿名性。损伤性能结果(LIDT)和样本排名与去年使用光栅扫描测试协议的比赛结果进行了比较。此外,还分享了沉积工艺,涂层材料和基材清洁方法的细节。结果表明,电子束沉积的半氟硅/二氧化硅多层涂层在实验条件下的抗损伤能力最强。测试方案之间的LIDT差异高达38 J/cm2, iso报告的LIDT结果通常高于光栅扫描确定的结果。
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引用次数: 1
Removal of laser-induced contamination on ALADIN laser optics by UV/ozone cleaning 紫外/臭氧清洗去除ALADIN激光光学器件上的激光诱导污染
Pub Date : 2019-11-20 DOI: 10.1117/12.2535772
N. Bartels, P. Allenspacher, W. Riede, H. Schröder, D. Wernham
The ESA satellite Aeolus was successfully launched into space in August 2018 and measures global wind profiles using the Atmospheric Laser Doppler Instrument (ALADIN). ALADIN features a high-power UV laser source emitting nanosecond pulses at a wavelength of 355 nm. A crucial step in the development of ALADIN was the mitigation of laser-induced contamination (LIC). In this work we assess the opportunity of removing LIC deposits using UV/ozone cleaning with a mercury lamp. We find that UV/ozone cleaning is a very effective tool for removing laser-induced molecular contamination induced by the volatile components of a material mix representative of the ALADIN laser. Furthermore, we show that optical surfaces on which a contamination is removed via UV/ozone cleaning behave similar to pristine optical surfaces with respect to their susceptibility to subsequent LIC as well as laser-induced damage. These results demonstrate that UV/ozone cleaning is a useful and safe way of cleaning optical surfaces after ground-based thermal vacuum/lifetime testing.
欧洲航天局的Aeolus卫星于2018年8月成功发射升空,使用大气激光多普勒仪(ALADIN)测量全球风廓线。ALADIN具有高功率紫外激光源,发射波长为355nm的纳秒脉冲。ALADIN发展的关键一步是减轻激光诱导污染(LIC)。在这项工作中,我们评估了使用汞灯紫外线/臭氧清洗去除LIC沉积物的机会。我们发现紫外/臭氧清洗是一种非常有效的工具,用于去除激光诱导的分子污染,这些污染是由代表ALADIN激光的材料混合物的挥发性成分引起的。此外,我们表明,通过紫外线/臭氧清洗去除污染的光学表面在对随后的LIC和激光诱导损伤的敏感性方面与原始光学表面相似。这些结果表明,通过地面热真空/寿命测试,紫外/臭氧清洗是一种有效且安全的光学表面清洗方法。
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引用次数: 3
Laser damage characteristics of indium-tin-oxide film and polyimide film irradiated by 1064nm high power lasers 1064nm高功率激光辐照铟锡氧化膜和聚酰亚胺膜的激光损伤特性
Pub Date : 2019-11-20 DOI: 10.1117/12.2536330
Xiaofeng Liu, Liping Peng, Xi Wang, Xiaoshuang Wang, Da-wei Li, Yuanan Zhao, J. Shao
The damage characteristics of the indium-tin-oxide (ITO) layer and the polyimide (PI) layer, which are two constituent components of a LCD, induced by a high-peak-power laser and a high-average-power laser are investigated. The PI alignment layer is pinned on the ITO film to imitate the structure of the LCD as much as possible in our study. Under the irradiation of the high-peak-power laser, the damage process of the PI/ITO/SUB sample involves thermally induced plastic deformation, followed by cooling when the irradiation fluence is near the LIDT, and rupture when the irradiation fluence is higher. High-average-power laser irradiation results in damaged morphologies of the bulge for the PI/ITO/SUB sample. The temperature distributions induced by the pulsed laser and the high-repetition-rate laser are investigated. The damage is attributed to the intrinsic heat absorption of the ITO films. Under the irritation of the high-peak-power laser, the temperature rises rapidly to a high degree at very short time because of the instant strong absorption in ITO layer, and resulted in vaporization of ITO layer consequently. Subsequently, the vaporized ITO breaks through the surface PI and develops the visible damage. However, under the irritation of high-average-power laser, ITO layer absorbs laser energy, resulting in a slow temperature rise and a small temperature gradient.
研究了高峰值功率激光和高平均功率激光对液晶显示器组成部分ITO层和PI层的损伤特性。在我们的研究中,为了尽可能地模仿LCD的结构,我们将PI对准层固定在ITO薄膜上。在峰值功率激光的照射下,PI/ITO/SUB样品的损伤过程为热致塑性变形,当辐照强度接近LIDT时试样发生冷却,当辐照强度较高时试样发生破裂。高平均功率激光照射导致PI/ITO/SUB样品的凸起形态受损。研究了脉冲激光和高重复率激光诱导的温度分布。这种损伤是由于ITO薄膜的固有吸热造成的。在峰值功率激光的刺激下,由于ITO层瞬间的强吸收,温度在很短的时间内迅速上升到很高的程度,从而导致ITO层汽化。随后,蒸发的ITO突破表面PI并形成可见的损伤。然而,在高平均功率激光的刺激下,ITO层吸收激光能量,导致温升缓慢,温度梯度小。
{"title":"Laser damage characteristics of indium-tin-oxide film and polyimide film irradiated by 1064nm high power lasers","authors":"Xiaofeng Liu, Liping Peng, Xi Wang, Xiaoshuang Wang, Da-wei Li, Yuanan Zhao, J. Shao","doi":"10.1117/12.2536330","DOIUrl":"https://doi.org/10.1117/12.2536330","url":null,"abstract":"The damage characteristics of the indium-tin-oxide (ITO) layer and the polyimide (PI) layer, which are two constituent components of a LCD, induced by a high-peak-power laser and a high-average-power laser are investigated. The PI alignment layer is pinned on the ITO film to imitate the structure of the LCD as much as possible in our study. Under the irradiation of the high-peak-power laser, the damage process of the PI/ITO/SUB sample involves thermally induced plastic deformation, followed by cooling when the irradiation fluence is near the LIDT, and rupture when the irradiation fluence is higher. High-average-power laser irradiation results in damaged morphologies of the bulge for the PI/ITO/SUB sample. The temperature distributions induced by the pulsed laser and the high-repetition-rate laser are investigated. The damage is attributed to the intrinsic heat absorption of the ITO films. Under the irritation of the high-peak-power laser, the temperature rises rapidly to a high degree at very short time because of the instant strong absorption in ITO layer, and resulted in vaporization of ITO layer consequently. Subsequently, the vaporized ITO breaks through the surface PI and develops the visible damage. However, under the irritation of high-average-power laser, ITO layer absorbs laser energy, resulting in a slow temperature rise and a small temperature gradient.","PeriodicalId":202227,"journal":{"name":"Laser Damage","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114659983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Laser Damage
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