Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426163
S.S. Lee, S. Izuo, K. Inatomi
We have designed and fabricated a micro flow cytometer for application to bacteria detection. In this paper, we present a CAD study which has been done to obtain optimal working conditions of the device. In the simulation, we have investigated flow rate ratios of sample and sheath flow to confirm hydrodynamic focusing at a desired position and proper sample stream width at the detection position. As a result, we could obtain adequate flow rate ratios of sample and sheath flow, which is in the vicinity of 1:5 for our device. A bacteria enumeration experiment has also been carried out, based on the simulation results, and we have achieved hydrodynamic focusing at the expected position and proper sample flow rate.
{"title":"A CAD study on micro flow cytometer and its application to bacteria detection","authors":"S.S. Lee, S. Izuo, K. Inatomi","doi":"10.1109/ICSENS.2004.1426163","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426163","url":null,"abstract":"We have designed and fabricated a micro flow cytometer for application to bacteria detection. In this paper, we present a CAD study which has been done to obtain optimal working conditions of the device. In the simulation, we have investigated flow rate ratios of sample and sheath flow to confirm hydrodynamic focusing at a desired position and proper sample stream width at the detection position. As a result, we could obtain adequate flow rate ratios of sample and sheath flow, which is in the vicinity of 1:5 for our device. A bacteria enumeration experiment has also been carried out, based on the simulation results, and we have achieved hydrodynamic focusing at the expected position and proper sample flow rate.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73326164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426152
S. Baglio, V. Ferrari, A. Ghisla, V. Sacco, N. Savalli, A. Taroni
This paper deals with the development and characterization of a novel mass microsensor with optical output. PZT screen-printed elements, behaving as thickness-mode resonators provide energy to SOI-based micro-resonators. A significant degree of innovation lies in the miniaturization of the system, in the relevant decreasing of operating frequency, in the novel optical sensing strategy based on metal-dielectric (MD) photonic band gap (PBG) structures, and in selective thermal-deposition of polymer which has been predisposed. A signal conditioning architecture based on a closed loop configuration is considered to measure the variation of frequency as a function of the micro-mechanical proof-mass variation. A high benefit is obtained in tracking the resonance condition variations, due to the very high quality factor, which has been experimentally measured. A theoretical sensitivity of 580 (Hz//spl mu/g) have been evaluated for test devices having resonance frequencies less than 10 kHz.
{"title":"Optical SOI micro-gravimeters with bulk PZT excitation","authors":"S. Baglio, V. Ferrari, A. Ghisla, V. Sacco, N. Savalli, A. Taroni","doi":"10.1109/ICSENS.2004.1426152","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426152","url":null,"abstract":"This paper deals with the development and characterization of a novel mass microsensor with optical output. PZT screen-printed elements, behaving as thickness-mode resonators provide energy to SOI-based micro-resonators. A significant degree of innovation lies in the miniaturization of the system, in the relevant decreasing of operating frequency, in the novel optical sensing strategy based on metal-dielectric (MD) photonic band gap (PBG) structures, and in selective thermal-deposition of polymer which has been predisposed. A signal conditioning architecture based on a closed loop configuration is considered to measure the variation of frequency as a function of the micro-mechanical proof-mass variation. A high benefit is obtained in tracking the resonance condition variations, due to the very high quality factor, which has been experimentally measured. A theoretical sensitivity of 580 (Hz//spl mu/g) have been evaluated for test devices having resonance frequencies less than 10 kHz.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73370114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426411
A. Yarai, T. Nakanishi
This paper describes the performance of an optical fiber gas sensor based on thermal lens (TL) spectroscopy. This sensor features an optical absorption path whose length is extremely short compared with other optical spectroscopic techniques. A prototype of a robust sensing head is proposed whose sensitivity is demonstrated. An all-fiber TL gas sensor system built with a fiber ring laser is proposed as a method of dramatic sensitivity enhancement, and its capability is certified.
{"title":"Optical fiber gas sensor based on thermal lens spectroscopy instrument composed of spherical lensed fibers","authors":"A. Yarai, T. Nakanishi","doi":"10.1109/ICSENS.2004.1426411","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426411","url":null,"abstract":"This paper describes the performance of an optical fiber gas sensor based on thermal lens (TL) spectroscopy. This sensor features an optical absorption path whose length is extremely short compared with other optical spectroscopic techniques. A prototype of a robust sensing head is proposed whose sensitivity is demonstrated. An all-fiber TL gas sensor system built with a fiber ring laser is proposed as a method of dramatic sensitivity enhancement, and its capability is certified.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81402746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426212
C. Painter, A. Shkel
In this paper, we study the effect of electrostatic levitation forces on the performance of a MEMS surface micromachined gyroscope. An error model relating the effects of the induced levitation deflections to scale factor and cross axis sensitivity is presented. Simulation and experimental results on a surface micromachined test structure are used to identify deflection versus voltage characteristics. These characteristics are scaled based on typical gyroscope parameters and the findings are that levitation forces can cause more than 50% reduction in scale factor and more than 0.1% increase in undesirable cross-axis sensitivity.
{"title":"Effect of levitation forces on the performance of surface micromachined MEMS gyroscopes","authors":"C. Painter, A. Shkel","doi":"10.1109/ICSENS.2004.1426212","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426212","url":null,"abstract":"In this paper, we study the effect of electrostatic levitation forces on the performance of a MEMS surface micromachined gyroscope. An error model relating the effects of the induced levitation deflections to scale factor and cross axis sensitivity is presented. Simulation and experimental results on a surface micromachined test structure are used to identify deflection versus voltage characteristics. These characteristics are scaled based on typical gyroscope parameters and the findings are that levitation forces can cause more than 50% reduction in scale factor and more than 0.1% increase in undesirable cross-axis sensitivity.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78971459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426303
D. Goustouridis, G. Kaltsas, A. Nassiopoulou
A Si thermal accelerometer without solid proof mass has been developed and characterized. The device is CMOS compatible and consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick porous silicon (PS) layer assures thermal isolation from the Si substrate. The operating principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which is caused by the movement of the hot air on top of the heater relative to the sensor die. The porous silicon thermal accelerometer (PSTA) was tested in a specially designed vibration system for different frequencies and accelerations. In each case, the response was compared to a commercial accelerometer. Appropriate read out electronics were fabricated in order to reduce the noise of the thermopiles and to amplify the signal. The dependence of the response on applied power and the surrounding environment was also studied.
{"title":"A CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation","authors":"D. Goustouridis, G. Kaltsas, A. Nassiopoulou","doi":"10.1109/ICSENS.2004.1426303","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426303","url":null,"abstract":"A Si thermal accelerometer without solid proof mass has been developed and characterized. The device is CMOS compatible and consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick porous silicon (PS) layer assures thermal isolation from the Si substrate. The operating principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which is caused by the movement of the hot air on top of the heater relative to the sensor die. The porous silicon thermal accelerometer (PSTA) was tested in a specially designed vibration system for different frequencies and accelerations. In each case, the response was compared to a commercial accelerometer. Appropriate read out electronics were fabricated in order to reduce the noise of the thermopiles and to amplify the signal. The dependence of the response on applied power and the surrounding environment was also studied.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76379199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426166
F. Tojo, S. Hirakawa, T. Toyoda, K. Yamagata, M. Itoh
The measurement of thickness of various sheets, such as foamed, multi-layered, composited, and perforated sheets has increased in many different applications. The present authors have developed a system in which a magnetic sensor and an optical sensing system are used to measure the thickness of various sheets. However, it is important to precisely measure the thickness of sheets during the manufacturing process. In the present study, a new system for inspecting the sheet thickness is realized which results in accurate measurements. With the use of a calibration gauge, it was found that the thickness measuring system drastically improved the inspection of sheet thickness without use of a standard sheet, resulting in a precision of /spl plusmn/0.5% or less for a composited sheet thickness of 730 /spl mu/m during the manufacturing process.
{"title":"New method of sheet thickness inspection: improvement in the accuracy of the thickness measuring system during the manufacturing process","authors":"F. Tojo, S. Hirakawa, T. Toyoda, K. Yamagata, M. Itoh","doi":"10.1109/ICSENS.2004.1426166","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426166","url":null,"abstract":"The measurement of thickness of various sheets, such as foamed, multi-layered, composited, and perforated sheets has increased in many different applications. The present authors have developed a system in which a magnetic sensor and an optical sensing system are used to measure the thickness of various sheets. However, it is important to precisely measure the thickness of sheets during the manufacturing process. In the present study, a new system for inspecting the sheet thickness is realized which results in accurate measurements. With the use of a calibration gauge, it was found that the thickness measuring system drastically improved the inspection of sheet thickness without use of a standard sheet, resulting in a precision of /spl plusmn/0.5% or less for a composited sheet thickness of 730 /spl mu/m during the manufacturing process.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76421681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426469
R. Jachowicz, J. Weremczuk, D. Paczesny, P. Rapiejko
A new fast semiconductor dew point hygrometer for laryngological applications is presented in the report. The hygrometer construction based on integration into the single semiconductor sensor structure the impedance dew detector, the thermoresistor and the heater is described in the paper. The experimental results of the dew point hygrometer tests in laryngological measurements (during patient respiration cycle) are shown and discussed.
{"title":"Fast dew-point hygrometer for laryngology applications","authors":"R. Jachowicz, J. Weremczuk, D. Paczesny, P. Rapiejko","doi":"10.1109/ICSENS.2004.1426469","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426469","url":null,"abstract":"A new fast semiconductor dew point hygrometer for laryngological applications is presented in the report. The hygrometer construction based on integration into the single semiconductor sensor structure the impedance dew detector, the thermoresistor and the heater is described in the paper. The experimental results of the dew point hygrometer tests in laryngological measurements (during patient respiration cycle) are shown and discussed.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76064914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426207
C. Bonomo, L. Fortuna, P. Giannone, S. Graziani
In this paper, an integrated motion sensor-actuator system is presented. The innovative system consists of a couple of ionic polymer metal composite (IPMC) strips working respectively as a sensor and as an actuator, showing the capability of this material to realize smart devices. Although a number of applications have been proposed to show that IPMCs can work both as actuator or as sensor, none has been produced that exploits both properties in one application. The developed system is composed of a sensor that monitors the vibrations of a membrane under the effects of external disturbances. The sensor output is manipulated and sent to the actuator to reduce vibrations of the membrane itself. Experimental results show that the vibrations of the system are reduced when the control loop is closed.
{"title":"A sensor-actuator integrated system based on IPMCs [ionic polymer metal composites]","authors":"C. Bonomo, L. Fortuna, P. Giannone, S. Graziani","doi":"10.1109/ICSENS.2004.1426207","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426207","url":null,"abstract":"In this paper, an integrated motion sensor-actuator system is presented. The innovative system consists of a couple of ionic polymer metal composite (IPMC) strips working respectively as a sensor and as an actuator, showing the capability of this material to realize smart devices. Although a number of applications have been proposed to show that IPMCs can work both as actuator or as sensor, none has been produced that exploits both properties in one application. The developed system is composed of a sensor that monitors the vibrations of a membrane under the effects of external disturbances. The sensor output is manipulated and sent to the actuator to reduce vibrations of the membrane itself. Experimental results show that the vibrations of the system are reduced when the control loop is closed.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88356338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426229
Karl Crowley, June Frisby, Steve Edwards, Séamus Murphy, M. Roantree, Dermot Diamond
A system for autonomous temperature logging of fish catches is described. The system is completely wireless and is comprised of a number of loggers, in individual fish boxes, and a base station, assigned to a particular trawler. The temperature of the fish is monitored by the loggers, which contain a thermistor and RF transmitter circuitry. The data is sent at fixed intervals (usually 5 minutes) to the base station. Through a GSM modem, the base station communicates the collected data to the shore where a server uploads the temperature-time information to a database. The database and controlling software are completely Web-based and can be accessed by an Internet-enabled PC, laptop or PDA. This allows remote initiation and control of the system, in addition to querying of the database. To date, successful trials have been conducted for salmon, mackerel and whelk fishing off the Irish coast.
{"title":"Wireless temperature logging technology for the fishing industry","authors":"Karl Crowley, June Frisby, Steve Edwards, Séamus Murphy, M. Roantree, Dermot Diamond","doi":"10.1109/ICSENS.2004.1426229","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426229","url":null,"abstract":"A system for autonomous temperature logging of fish catches is described. The system is completely wireless and is comprised of a number of loggers, in individual fish boxes, and a base station, assigned to a particular trawler. The temperature of the fish is monitored by the loggers, which contain a thermistor and RF transmitter circuitry. The data is sent at fixed intervals (usually 5 minutes) to the base station. Through a GSM modem, the base station communicates the collected data to the shore where a server uploads the temperature-time information to a database. The database and controlling software are completely Web-based and can be accessed by an Internet-enabled PC, laptop or PDA. This allows remote initiation and control of the system, in addition to querying of the database. To date, successful trials have been conducted for salmon, mackerel and whelk fishing off the Irish coast.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86299208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426110
S. Baglio, S. Castorina, V. Sacco, N. Savalli, C. Tringali
In this work we present the development of relative humidity (RH) microsensors in standard CMOS technology and bulk micromachining. Miniaturization of RH sensors allows reducing size, response times, power consumption and costs. Our device makes use of dew-point temperature detection approach, to achieve simple operation and high reproducibility. It is based on a suspended plate, anchored to the substrate by means of four arms. The thermoelectric Peltier effect is exploited to cool the plate until an interdigitated capacitor on top of the plate detects moisture and triggers the temperature measurements by means of thermocouples. By measuring dew-point and ambient temperatures, RH can be calculated through psycrometric charts. We report here the modeling, simulation, design and experimental characterization of CMOS RH microsensors.
{"title":"Dew-point relative humidity CMOS microsensors","authors":"S. Baglio, S. Castorina, V. Sacco, N. Savalli, C. Tringali","doi":"10.1109/ICSENS.2004.1426110","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426110","url":null,"abstract":"In this work we present the development of relative humidity (RH) microsensors in standard CMOS technology and bulk micromachining. Miniaturization of RH sensors allows reducing size, response times, power consumption and costs. Our device makes use of dew-point temperature detection approach, to achieve simple operation and high reproducibility. It is based on a suspended plate, anchored to the substrate by means of four arms. The thermoelectric Peltier effect is exploited to cool the plate until an interdigitated capacitor on top of the plate detects moisture and triggers the temperature measurements by means of thermocouples. By measuring dew-point and ambient temperatures, RH can be calculated through psycrometric charts. We report here the modeling, simulation, design and experimental characterization of CMOS RH microsensors.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86201766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：