Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426142
H. Wanzenboeck, M. Fischer, S. Mueller, E. Bertagnolli
With a rapid prototyping technique complex sensor structures in the nanometer range have been fabricated within a single, maskless process step, using a focused ion beam (FIB) system. This paper shows that with exemplary structures such as complex channel junction structures, micromixers and cantilevers the potential to fabricate arbitrary 3D structures is confirmed. Results demonstrate the excellent suitability of FIB processing for tailoring microchannels and actuator structures for the desired properties. The FIB approach renders a powerful enhancement to existent fabrication technologies.
{"title":"Custom-tailored microfluidic devices and nanoscaled actuators - on the fast track","authors":"H. Wanzenboeck, M. Fischer, S. Mueller, E. Bertagnolli","doi":"10.1109/ICSENS.2004.1426142","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426142","url":null,"abstract":"With a rapid prototyping technique complex sensor structures in the nanometer range have been fabricated within a single, maskless process step, using a focused ion beam (FIB) system. This paper shows that with exemplary structures such as complex channel junction structures, micromixers and cantilevers the potential to fabricate arbitrary 3D structures is confirmed. Results demonstrate the excellent suitability of FIB processing for tailoring microchannels and actuator structures for the desired properties. The FIB approach renders a powerful enhancement to existent fabrication technologies.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82830889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426432
D. Čiplys, M. Shur, N. Pala, A. Sereika, R. Rimeika, R. Gaska, Q. Fareed
Two types of novel ultraviolet-sensitive III-nitride based surface acoustic wave devices are presented. We demonstrate the Al/sub x/Ga/sub l-x/N-based surface acoustic wave delay-line oscillator, which is applied as an ultraviolet sensor capable of solar-blind operation with remote wireless pickup of the output signal. Also, we report on the SAW-induced high-frequency resistance modulation effect, which is dramatically increased under ultraviolet illumination.
{"title":"Ultraviolet-sensitive AlGaN-based surface acoustic wave devices","authors":"D. Čiplys, M. Shur, N. Pala, A. Sereika, R. Rimeika, R. Gaska, Q. Fareed","doi":"10.1109/ICSENS.2004.1426432","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426432","url":null,"abstract":"Two types of novel ultraviolet-sensitive III-nitride based surface acoustic wave devices are presented. We demonstrate the Al/sub x/Ga/sub l-x/N-based surface acoustic wave delay-line oscillator, which is applied as an ultraviolet sensor capable of solar-blind operation with remote wireless pickup of the output signal. Also, we report on the SAW-induced high-frequency resistance modulation effect, which is dramatically increased under ultraviolet illumination.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89122907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426140
Jian Zhang, Chunyan Wang
In this paper, the design of a sensor array circuit for edge detection is presented. For this design, a new version of edge detection algorithm is proposed to reduce the complexity of inter-pixel connections and to simplify the circuit of each pixel. The processing unit in each pixel consists of current-mode modules and simple logic gates. Compensation procedures are implemented in the analog modules to reduce the effect of device mismatch and charge injection. The simplicity of the circuit makes it easy to be implemented using a digital technology and integrated in detection systems.
{"title":"Design of a sensor array circuit for edge detection","authors":"Jian Zhang, Chunyan Wang","doi":"10.1109/ICSENS.2004.1426140","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426140","url":null,"abstract":"In this paper, the design of a sensor array circuit for edge detection is presented. For this design, a new version of edge detection algorithm is proposed to reduce the complexity of inter-pixel connections and to simplify the circuit of each pixel. The processing unit in each pixel consists of current-mode modules and simple logic gates. Compensation procedures are implemented in the analog modules to reduce the effect of device mismatch and charge injection. The simplicity of the circuit makes it easy to be implemented using a digital technology and integrated in detection systems.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83804839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426381
B. Chorpening, D. Tucker, S. Maley
The primary mission of the National Energy Technology Laboratory (NETL) is to assure U.S. fossil energy resources can meet increasing demand for affordable energy without compromising the quality of life for future generations of Americans. In this mission, NETL has historically focused on the development of advanced technologies as part of or in support of larger programs, such as the Clean Coal Power Initiative, FutureGen, the Solid State Energy Conversion Alliance (SECA), and the Turbines program. Power generation research at NETL covers many areas, including coal and oil gasification and gas cleanup, turbine combustion, high temperature fuel cells, internal combustion engines for stationary power, and hybrid fuel-cell turbine power systems. Advancement in these areas either requires or would benefit from advances in sensor technology for harsh environments. This presentation discusses opportunities for sensors in modern fossil-fuel based power generation, challenges posed by the operating environments, and summarizes research at NETL on a sensor for in-situ monitoring of gas turbine combustors.
{"title":"Sensors applications in 21st century fossil-fuel based power generation","authors":"B. Chorpening, D. Tucker, S. Maley","doi":"10.1109/ICSENS.2004.1426381","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426381","url":null,"abstract":"The primary mission of the National Energy Technology Laboratory (NETL) is to assure U.S. fossil energy resources can meet increasing demand for affordable energy without compromising the quality of life for future generations of Americans. In this mission, NETL has historically focused on the development of advanced technologies as part of or in support of larger programs, such as the Clean Coal Power Initiative, FutureGen, the Solid State Energy Conversion Alliance (SECA), and the Turbines program. Power generation research at NETL covers many areas, including coal and oil gasification and gas cleanup, turbine combustion, high temperature fuel cells, internal combustion engines for stationary power, and hybrid fuel-cell turbine power systems. Advancement in these areas either requires or would benefit from advances in sensor technology for harsh environments. This presentation discusses opportunities for sensors in modern fossil-fuel based power generation, challenges posed by the operating environments, and summarizes research at NETL on a sensor for in-situ monitoring of gas turbine combustors.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83805538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426495
Chao Gong, S. Xia, Kai Deng, Q. Bai, Shaofeng Chen
This paper presents the designs and optimizations of two kinds of novel miniature vibrating electric field sensors (EFS) based on microelectromechanical systems (MEMS) technology. The two kinds of new sensors have different structures and vibrating methods. The volume of the new sensors with operating principle of electron charge induction are much smaller than other types of charge-induced EFS such as field-mills. In miniaturizing, the signal is reduced enormously and a highly sensitive circuit is needed to detect the signal. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Therefore, computer simulations for different structural parameters of the EFS and different vibrating methods have been carried out by the finite element method (FEM). It is proved that the new sensor structure can be implemented and the signal is measurable.
{"title":"Design and simulation of miniature vibrating electric field sensors","authors":"Chao Gong, S. Xia, Kai Deng, Q. Bai, Shaofeng Chen","doi":"10.1109/ICSENS.2004.1426495","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426495","url":null,"abstract":"This paper presents the designs and optimizations of two kinds of novel miniature vibrating electric field sensors (EFS) based on microelectromechanical systems (MEMS) technology. The two kinds of new sensors have different structures and vibrating methods. The volume of the new sensors with operating principle of electron charge induction are much smaller than other types of charge-induced EFS such as field-mills. In miniaturizing, the signal is reduced enormously and a highly sensitive circuit is needed to detect the signal. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Therefore, computer simulations for different structural parameters of the EFS and different vibrating methods have been carried out by the finite element method (FEM). It is proved that the new sensor structure can be implemented and the signal is measurable.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85316599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426107
R. Beigelbeck, B. Jakoby
Piezoelectric thickness-shear-mode resonators are well established as viscosity and chemical liquid sensors. When immersed in the sample liquid, the resonator excites a strongly damped shear-polarized wave as well as spurious compressional waves in the liquid. The latter are scarcely damped, which can lead to disturbing interferences if they are reflected by obstacles close to the sensor. In order to analyze the spurious compressional wave excitation, we developed a three-dimensional mathematical model utilizing solutions of the linearized Navier-Stokes equation in the spatial Fourier-domain, which govern the acoustic field in the liquid. Finally, we discuss the solutions and illustrate the results by considering practical examples.
{"title":"Analytical 3D-analysis of compressional wave excitation by thickness-shear-mode resonators","authors":"R. Beigelbeck, B. Jakoby","doi":"10.1109/ICSENS.2004.1426107","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426107","url":null,"abstract":"Piezoelectric thickness-shear-mode resonators are well established as viscosity and chemical liquid sensors. When immersed in the sample liquid, the resonator excites a strongly damped shear-polarized wave as well as spurious compressional waves in the liquid. The latter are scarcely damped, which can lead to disturbing interferences if they are reflected by obstacles close to the sensor. In order to analyze the spurious compressional wave excitation, we developed a three-dimensional mathematical model utilizing solutions of the linearized Navier-Stokes equation in the spatial Fourier-domain, which govern the acoustic field in the liquid. Finally, we discuss the solutions and illustrate the results by considering practical examples.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86584631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426444
A. Vergara, E. Llobet, J. Brezmes, X. Vilanova, M. Stankova, I. Gràcia, C. Cané, X. Correig
We demonstrate, for the first time, how it is possible to optimize a multi-frequency signal to be used in the modulation of the operating temperature of an integrated gas sensor microarray. In the first step, a multilevel pseudo-random sequence (MPRS), which allows for modulating the operating temperature of the sensors in a wide frequency range, is used to obtain an estimate of the impulse response of each microsensor-gas system. In the second step, by analyzing the spectral components of the impulse response estimates, the modulating frequencies that better help in discriminating the gases and gas mixtures considered are found. Finally, by selecting a subset of the best modulating frequencies (e.g., up to 5 frequencies), an optimized multi-frequency temperature-modulating signal can be synthesized. The method is illustrated by analyzing different concentrations of NH/sub 3/, NO/sub 2/ and their mixtures using a microarray of WO/sub 3/-based gas sensors.
{"title":"Optimized multi-frequency temperature modulation of microhotplate gas sensors","authors":"A. Vergara, E. Llobet, J. Brezmes, X. Vilanova, M. Stankova, I. Gràcia, C. Cané, X. Correig","doi":"10.1109/ICSENS.2004.1426444","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426444","url":null,"abstract":"We demonstrate, for the first time, how it is possible to optimize a multi-frequency signal to be used in the modulation of the operating temperature of an integrated gas sensor microarray. In the first step, a multilevel pseudo-random sequence (MPRS), which allows for modulating the operating temperature of the sensors in a wide frequency range, is used to obtain an estimate of the impulse response of each microsensor-gas system. In the second step, by analyzing the spectral components of the impulse response estimates, the modulating frequencies that better help in discriminating the gases and gas mixtures considered are found. Finally, by selecting a subset of the best modulating frequencies (e.g., up to 5 frequencies), an optimized multi-frequency temperature-modulating signal can be synthesized. The method is illustrated by analyzing different concentrations of NH/sub 3/, NO/sub 2/ and their mixtures using a microarray of WO/sub 3/-based gas sensors.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76730813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426466
F. Sauser, Chunyan Li, R. Azizkhan, C. Ahn, I. Papautsky
A pressure microsensing catheter for neonatal care has been developed to measure intravascular blood pressure. The design uses polymer flip-chip bonding on a flexible Kapton film for mounting silicon pressure microsensors into the 5 French dual lumen neonatal catheters (1.67 mm o.d.). While other groups have mounted MEMS sensors on guide wires, our dual-lumen approach permits one lumen of the catheter to contain a packaged pressure sensor while the other lumen retains the catheter functionality. The packaged sensors were characterized in nitrogen and water environments, both statically and dynamically.
{"title":"Pressure microsensing catheters for neonatal care","authors":"F. Sauser, Chunyan Li, R. Azizkhan, C. Ahn, I. Papautsky","doi":"10.1109/ICSENS.2004.1426466","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426466","url":null,"abstract":"A pressure microsensing catheter for neonatal care has been developed to measure intravascular blood pressure. The design uses polymer flip-chip bonding on a flexible Kapton film for mounting silicon pressure microsensors into the 5 French dual lumen neonatal catheters (1.67 mm o.d.). While other groups have mounted MEMS sensors on guide wires, our dual-lumen approach permits one lumen of the catheter to contain a packaged pressure sensor while the other lumen retains the catheter functionality. The packaged sensors were characterized in nitrogen and water environments, both statically and dynamically.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77963369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426185
C. Cantalini, L. Valentini, J. Kenny, L. Lozzi, S. Santucci
CNT thin film sensors have been prepared by PECVD techniques on Si/Si/sub 3/N/sub 4/ micromachined substrates. The role of the preparation conditions on the intrinsic electrical properties of the CNTs (i.e. metallic or semiconductor nature) the role of the structural defects on the CNT gas response (i.e. sensitivity, selectivity and stability) the interaction mechanisms of oxidizing and reducing molecules with the CNT surface (i.e physisorption or chemisorption), are analysed and discussed by means of experimental measurements (microstructural and electrical characterizations) and theoretical simulations (density functional calculations). CNT films demonstrated their fitness for oxidizing gases monitoring (NO/sub 2/ and O/sub 3/), had good selectivity when water vapor and reducing gases are the interfering species, and good stability. Surface modifications and hybrid CNT structures are presented as possible routes to improve gas response.
{"title":"Carbon nanotubes gas sensors: current status and future prospects","authors":"C. Cantalini, L. Valentini, J. Kenny, L. Lozzi, S. Santucci","doi":"10.1109/ICSENS.2004.1426185","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426185","url":null,"abstract":"CNT thin film sensors have been prepared by PECVD techniques on Si/Si/sub 3/N/sub 4/ micromachined substrates. The role of the preparation conditions on the intrinsic electrical properties of the CNTs (i.e. metallic or semiconductor nature) the role of the structural defects on the CNT gas response (i.e. sensitivity, selectivity and stability) the interaction mechanisms of oxidizing and reducing molecules with the CNT surface (i.e physisorption or chemisorption), are analysed and discussed by means of experimental measurements (microstructural and electrical characterizations) and theoretical simulations (density functional calculations). CNT films demonstrated their fitness for oxidizing gases monitoring (NO/sub 2/ and O/sub 3/), had good selectivity when water vapor and reducing gases are the interfering species, and good stability. Surface modifications and hybrid CNT structures are presented as possible routes to improve gas response.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78083387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426177
Jin-hwan Lee, R. R. Myers, A. Jang, P. Bhadri, F. Beyette, W. Timmons, P. Bishop, I. Papautsky
A new breed of microelectrode sensor arrays for oxidation-reduction potential (ORP) measurements in situ at environmental sites has been successfully developed. The microelectrodes were fabricated from glass using a two-step, HF-based meniscus etching process, and demonstrated electrochemical performance nearly identical to that of the commercial millielectrode, with significantly faster response times.
{"title":"Potentiometric microelectrode sensors for in situ environmental monitoring","authors":"Jin-hwan Lee, R. R. Myers, A. Jang, P. Bhadri, F. Beyette, W. Timmons, P. Bishop, I. Papautsky","doi":"10.1109/ICSENS.2004.1426177","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426177","url":null,"abstract":"A new breed of microelectrode sensor arrays for oxidation-reduction potential (ORP) measurements in situ at environmental sites has been successfully developed. The microelectrodes were fabricated from glass using a two-step, HF-based meniscus etching process, and demonstrated electrochemical performance nearly identical to that of the commercial millielectrode, with significantly faster response times.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75021475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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