Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426100
J. H. Nieuwenhuis, A. Jachimowicz, P. Svasek, M. Vellekoop
In this paper dielectrophoretic particle sorters are experimentally analysed. The sorters have novel electrode configurations, optimised for high-speed sorting. Increased performance has been achieved by applying plane electrodes instead of line electrodes to increase the dielectrophoretic force. The performance has been further increased by applying a larger number of outlets, to decrease the required particle displacement. Measurements were performed for four different electrode configurations. The best structures achieve more than three times the performance of the classical line electrodes.
{"title":"High-speed integrated particle sorters based on dielectrophoresis","authors":"J. H. Nieuwenhuis, A. Jachimowicz, P. Svasek, M. Vellekoop","doi":"10.1109/ICSENS.2004.1426100","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426100","url":null,"abstract":"In this paper dielectrophoretic particle sorters are experimentally analysed. The sorters have novel electrode configurations, optimised for high-speed sorting. Increased performance has been achieved by applying plane electrodes instead of line electrodes to increase the dielectrophoretic force. The performance has been further increased by applying a larger number of outlets, to decrease the required particle displacement. Measurements were performed for four different electrode configurations. The best structures achieve more than three times the performance of the classical line electrodes.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77689595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426250
Inseob Song, Byeungleul Lee
The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.
{"title":"MEMS-based angular rate sensors","authors":"Inseob Song, Byeungleul Lee","doi":"10.1109/ICSENS.2004.1426250","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426250","url":null,"abstract":"The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80521562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426282
P. Tobias, Hui Hu, M. Koochesfahani, R. Ghosh
We present a new apparatus for measuring the response times of a gas sensor with millisecond resolution, while also capturing the slower components of the response such as the steady state value. Laser induced fluorescence (LIF) imaging was used to quantify the exchange rate of the sensor's ambient gas. The millisecond response of high temperature (up to 950 K) field effect SiC sensors for detection of hydrogen containing gases was characterized.
{"title":"Millisecond response time measurements of high temperature gas sensors","authors":"P. Tobias, Hui Hu, M. Koochesfahani, R. Ghosh","doi":"10.1109/ICSENS.2004.1426282","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426282","url":null,"abstract":"We present a new apparatus for measuring the response times of a gas sensor with millisecond resolution, while also capturing the slower components of the response such as the steady state value. Laser induced fluorescence (LIF) imaging was used to quantify the exchange rate of the sensor's ambient gas. The millisecond response of high temperature (up to 950 K) field effect SiC sensors for detection of hydrogen containing gases was characterized.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79066270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426389
N. Barié, M. Rapp
We present a new electronic nose system for discrimination of chemically related analytes and complex mixtures. The system employs a miniaturized array of eight polymer coated surface acoustic wave (SAW) sensors and a small preconcentration unit ('trap'). A GC column with atmospheric pressure air as the carrier gas is implemented as a separation unit. Design considerations are made with particular emphasis on the necessities arising from the interplay between sensors, coatings, trap, column, gas fluidics, and pattern recognition software. The system was tested against alkane homologues and hexane isomers. It successfully identifies n-hexane from other alkanes, even at very small concentrations (<1 ppm).
{"title":"Discrimination of aliphatic homologues and isomers using trap and GC enhanced SAW based electronic noses","authors":"N. Barié, M. Rapp","doi":"10.1109/ICSENS.2004.1426389","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426389","url":null,"abstract":"We present a new electronic nose system for discrimination of chemically related analytes and complex mixtures. The system employs a miniaturized array of eight polymer coated surface acoustic wave (SAW) sensors and a small preconcentration unit ('trap'). A GC column with atmospheric pressure air as the carrier gas is implemented as a separation unit. Design considerations are made with particular emphasis on the necessities arising from the interplay between sensors, coatings, trap, column, gas fluidics, and pattern recognition software. The system was tested against alkane homologues and hexane isomers. It successfully identifies n-hexane from other alkanes, even at very small concentrations (<1 ppm).","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81556910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426104
F. Greve, J. Lichtenberg, A. Hierlemann
This work presents a novel approach to trapping and placing a defined number of living cells on a microchip for biosensing and drug-screening applications. Cells are attracted from a liquid suspension by pneumatic anchoring through small orifices (3 /spl mu/m) on the chip surface, which allow for applying suction from the backside of the chip. In contrast to other cell handling techniques, pneumatic anchoring is a very mild, physical technique, which allows for permanent cell immobilization in a parallel fashion. In most cases, pressure needs only to be applied during cell placement, as they afterwards adhere to the protein-conditioned surface and remain at their position. The chip is fabricated using silicon-on-insulator (SOI) wafers by using combined front- and backside etching. Pneumatic particle handling has been studied using polymer beads and living cells suspended in physiological buffer solutions.
{"title":"Precise cell placement by pneumatic anchoring","authors":"F. Greve, J. Lichtenberg, A. Hierlemann","doi":"10.1109/ICSENS.2004.1426104","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426104","url":null,"abstract":"This work presents a novel approach to trapping and placing a defined number of living cells on a microchip for biosensing and drug-screening applications. Cells are attracted from a liquid suspension by pneumatic anchoring through small orifices (3 /spl mu/m) on the chip surface, which allow for applying suction from the backside of the chip. In contrast to other cell handling techniques, pneumatic anchoring is a very mild, physical technique, which allows for permanent cell immobilization in a parallel fashion. In most cases, pressure needs only to be applied during cell placement, as they afterwards adhere to the protein-conditioned surface and remain at their position. The chip is fabricated using silicon-on-insulator (SOI) wafers by using combined front- and backside etching. Pneumatic particle handling has been studied using polymer beads and living cells suspended in physiological buffer solutions.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85051937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426446
D. Dinulovic, H. Gatzen
The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.
{"title":"Microfabricated inductive linear micro positioning sensor","authors":"D. Dinulovic, H. Gatzen","doi":"10.1109/ICSENS.2004.1426446","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426446","url":null,"abstract":"The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85199158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426464
J. Piera, R. Quesada, A. Manuel-Lazaro, R. J. Del, S. Shariat Panahi, G. Olivar
The analysis of high-resolution CTD vertical profiles (conductivity, temperature and depth) is a common method for characterizing environmental turbulent fluid dynamics. One of the objectives in analyzing high-resolution CTD profiles is to identify turbulent regions (patches) within the flow. Due to the instrumental noise of CTD measurements, the previous methods for turbulent patch identification, reported in the literature, are usually unable to identify patches at low-density gradient. Here we proposed a new method that significantly improves patch detection at low-density gradients. The method is based on a wavelet-denoising procedure and a theoretical analysis of the error in data obtained from the CTD sensors. The high percentage of validating patches, obtained in numerical and field tests, indicates that the method is a powerful tool for fluid dynamics characterization, and can be applied in a wide range of environmental monitoring applications.
{"title":"Wavelet denoising technique for high-resolution CTD data. Characterization of turbulent oceanic flow","authors":"J. Piera, R. Quesada, A. Manuel-Lazaro, R. J. Del, S. Shariat Panahi, G. Olivar","doi":"10.1109/ICSENS.2004.1426464","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426464","url":null,"abstract":"The analysis of high-resolution CTD vertical profiles (conductivity, temperature and depth) is a common method for characterizing environmental turbulent fluid dynamics. One of the objectives in analyzing high-resolution CTD profiles is to identify turbulent regions (patches) within the flow. Due to the instrumental noise of CTD measurements, the previous methods for turbulent patch identification, reported in the literature, are usually unable to identify patches at low-density gradient. Here we proposed a new method that significantly improves patch detection at low-density gradients. The method is based on a wavelet-denoising procedure and a theoretical analysis of the error in data obtained from the CTD sensors. The high percentage of validating patches, obtained in numerical and field tests, indicates that the method is a powerful tool for fluid dynamics characterization, and can be applied in a wide range of environmental monitoring applications.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85888359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426374
A. Andrei, C. Malhaire, S. Brida, D. Barbier
This paper presents a study on the thermal drift and long term stability of AlTi (with a TiW diffusion barrier) metal lines, polysilicon gauges and metal on polysilicon contact resistances for piezoresistive pressure sensors operating in harsh environments. Test structures have been exposed at 150/spl deg/C for a cumulated time of almost six months. All metal lines structures show a relative resistance decrease of around 4/spl times/10/sup -3/. On the other hand, polysilicon resistivity variations were not observable except for a few samples that showed a relative increase up to 7/spl times/10/sup -3/. Polysilicon contact resistance showed no particular trend with aging time. The impact of these results on the overall sensor reliability has also been discussed.
{"title":"Reliability study of AlTi/TiW, polysilicon and ohmic contacts for piezoresistive pressure sensors applications","authors":"A. Andrei, C. Malhaire, S. Brida, D. Barbier","doi":"10.1109/ICSENS.2004.1426374","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426374","url":null,"abstract":"This paper presents a study on the thermal drift and long term stability of AlTi (with a TiW diffusion barrier) metal lines, polysilicon gauges and metal on polysilicon contact resistances for piezoresistive pressure sensors operating in harsh environments. Test structures have been exposed at 150/spl deg/C for a cumulated time of almost six months. All metal lines structures show a relative resistance decrease of around 4/spl times/10/sup -3/. On the other hand, polysilicon resistivity variations were not observable except for a few samples that showed a relative increase up to 7/spl times/10/sup -3/. Polysilicon contact resistance showed no particular trend with aging time. The impact of these results on the overall sensor reliability has also been discussed.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80934121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426145
O. Schatz
After the implementation of high standards concerning safety, environmental protection and comfort in the automotive world, compared to the 1970s, some trends are visible which will influence the further development of sensors in automotive applications. These trends are discussed: 1) an increase of system performance; 2) legislation; 3) commodity costs.
{"title":"Recent trends in automotive sensors","authors":"O. Schatz","doi":"10.1109/ICSENS.2004.1426145","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426145","url":null,"abstract":"After the implementation of high standards concerning safety, environmental protection and comfort in the automotive world, compared to the 1970s, some trends are visible which will influence the further development of sensors in automotive applications. These trends are discussed: 1) an increase of system performance; 2) legislation; 3) commodity costs.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85502153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-01-01DOI: 10.1109/ICSENS.2004.1426349
A. Baschirotto, E. Dallago, P. Malcovati, M. Marchesi, G. Venchi
An high sensitivity vector-2D magnetic sensor system for low magnetic field measurements has been realized and tested. The system, realized in PCB technology, consists of a double axis fluxgate magnetic sensor with its front-end electronic circuitry based on second-harmonic detection. The amorphous magnetic materials Vitrovac 6025X (25 /spl mu/m thick) and Vitrovac 6025Z (20 /spl mu/m thick) were used as a ferromagnetic core for the sensor. Applying a sinusoidal excitation current of 450 mA peak at 10 kHz with the Vitrovac 6025Z, the magnetic sensitivity was about 1.25 mV//spl mu/T, suitable for detecting the Earth's magnetic field (/spl plusmn/60 /spl mu/T), while the linearity error is 1.5% full scale. Using the thicker Vitrovac 6025X, a maximum sensitivity of about 1.68 mV//spl mu/T and a linearity error of about 1.55% full scale in the range of /spl plusmn/60 /spl mu/T were obtained with a larger sinusoidal excitation current of 600 mA peak at 10 kHz. The 2D vector sensor system presented is characterized by a very simple process fabrication due to the use of commercially available very thin ferromagnetic material.
{"title":"Precise vector-2D magnetic field sensor system for electronic compass","authors":"A. Baschirotto, E. Dallago, P. Malcovati, M. Marchesi, G. Venchi","doi":"10.1109/ICSENS.2004.1426349","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426349","url":null,"abstract":"An high sensitivity vector-2D magnetic sensor system for low magnetic field measurements has been realized and tested. The system, realized in PCB technology, consists of a double axis fluxgate magnetic sensor with its front-end electronic circuitry based on second-harmonic detection. The amorphous magnetic materials Vitrovac 6025X (25 /spl mu/m thick) and Vitrovac 6025Z (20 /spl mu/m thick) were used as a ferromagnetic core for the sensor. Applying a sinusoidal excitation current of 450 mA peak at 10 kHz with the Vitrovac 6025Z, the magnetic sensitivity was about 1.25 mV//spl mu/T, suitable for detecting the Earth's magnetic field (/spl plusmn/60 /spl mu/T), while the linearity error is 1.5% full scale. Using the thicker Vitrovac 6025X, a maximum sensitivity of about 1.68 mV//spl mu/T and a linearity error of about 1.55% full scale in the range of /spl plusmn/60 /spl mu/T were obtained with a larger sinusoidal excitation current of 600 mA peak at 10 kHz. The 2D vector sensor system presented is characterized by a very simple process fabrication due to the use of commercially available very thin ferromagnetic material.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85798431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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