Sensors and Actuators A-physical最新文献_第3页

Design, fabrication and testing of MEMS based piezoresistive force sensor for human-machine interaction system in biomedical applications 生物医学人机交互系统中基于MEMS压阻式力传感器的设计、制造和测试

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-05 DOI: 10.1016/j.sna.2026.117566

R.S Divya , Ankur Verma , C.K Subash , K.J Suja , Lintu Rajan

The emergence of Human-Machine Interaction (HMI) technologies has been significantly impacted the biomedical field, as these have enabled intelligent, adaptable, and interactive communication between humans and medical instruments. This work presents the design, manufacturing and testing of a MEMS-based piezoresistive force sensor, designed for biomedical systems applications. The proposed sensor features a compact spiral structure with 1.5 mm × 1.5 mm in total dimensions and includes a 1 mm × 1 mm diaphragm that incorporates an Archimedean spiral piezoresistive structure in a Wheatstone bridge format to improve sensitivity and linearity. Static characterization resulted in a full-scale output of 180.10 mV with a sensitivity of 62.11 mV/N when a load was applied and 61.06 mV/N during unloading. Sensor exhibits a maximum hysteresis of 1.71 % FSS, nonlinearity of –2.04 % FSS and repeatability of 0.53 % FSS. Dynamic tests performed for normal forces ranging from 0.15 N to 0.5 N over ten loading cycles showed minimal deviation (<1 %), indicating high stability and repeatability. The sensor has a fast transient response, as 90 % of the peak output was achieved in milliseconds, and it exhibits very high sensitivity, compactness, and reliability. The results confirm that the developed sensor is a viable candidate for real-time force measurements in biomedical and robotic HMI systems. Future work will explore polymer-based spiral structures to further enhance sensor performance for flexible and wearable electronics.

人机交互（HMI）技术的出现对生物医学领域产生了重大影响，因为这些技术使人与医疗器械之间的智能，适应性和交互式通信成为可能。本工作介绍了一种基于mems的压阻式力传感器的设计、制造和测试，该传感器专为生物医学系统应用而设计。该传感器具有紧凑的螺旋结构，总尺寸为1.5 mm × 1.5 mm，包括1 mm × 1 mm的膜片，该膜片采用惠斯通电桥格式的阿基米德螺旋压阻结构，以提高灵敏度和线性度。静态特性导致满量程输出180.10 mV，加载时灵敏度为62.11 mV/N，卸载时灵敏度为61.06 mV/N。传感器的最大迟滞为1.71 % FSS，非线性为-2.04 % FSS，重复性为0.53 % FSS。在10个加载周期内，法向力范围从0.15 N到0.5 N进行的动态测试显示最小偏差（<1 %），表明高稳定性和可重复性。该传感器具有快速的瞬态响应，因为90% %的峰值输出在毫秒内实现，并且它具有非常高的灵敏度，紧凑性和可靠性。结果证实，所开发的传感器是生物医学和机器人人机交互系统中实时力测量的可行候选。未来的工作将探索基于聚合物的螺旋结构，以进一步提高柔性和可穿戴电子产品的传感器性能。

{"title":"Design, fabrication and testing of MEMS based piezoresistive force sensor for human-machine interaction system in biomedical applications","authors":"R.S Divya , Ankur Verma , C.K Subash , K.J Suja , Lintu Rajan","doi":"10.1016/j.sna.2026.117566","DOIUrl":"10.1016/j.sna.2026.117566","url":null,"abstract":"<div><div>The emergence of Human-Machine Interaction (HMI) technologies has been significantly impacted the biomedical field, as these have enabled intelligent, adaptable, and interactive communication between humans and medical instruments. This work presents the design, manufacturing and testing of a MEMS-based piezoresistive force sensor, designed for biomedical systems applications. The proposed sensor features a compact spiral structure with 1.5 mm × 1.5 mm in total dimensions and includes a 1 mm × 1 mm diaphragm that incorporates an Archimedean spiral piezoresistive structure in a Wheatstone bridge format to improve sensitivity and linearity. Static characterization resulted in a full-scale output of 180.10 mV with a sensitivity of 62.11 mV/N when a load was applied and 61.06 mV/N during unloading. Sensor exhibits a maximum hysteresis of 1.71 % FSS, nonlinearity of –2.04 % FSS and repeatability of 0.53 % FSS. Dynamic tests performed for normal forces ranging from 0.15 N to 0.5 N over ten loading cycles showed minimal deviation (<1 %), indicating high stability and repeatability. The sensor has a fast transient response, as 90 % of the peak output was achieved in milliseconds, and it exhibits very high sensitivity, compactness, and reliability. The results confirm that the developed sensor is a viable candidate for real-time force measurements in biomedical and robotic HMI systems. Future work will explore polymer-based spiral structures to further enhance sensor performance for flexible and wearable electronics.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117566"},"PeriodicalIF":4.9,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High sensitivity of laser-induced graphene strain sensors at low strains via elasticity-mismatched non-woven fabric units 通过弹性不匹配的无纺布单元在低应变下的激光诱导石墨烯应变传感器的高灵敏度

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-05 DOI: 10.1016/j.sna.2026.117568

Zi Hao Li , Jia Xin Ling , Nai Xu Wang , Jing Jin Shen , Li Wang

Laser-induced graphene (LIG) has gained widespread adoption in flexible strain sensors owing to its facile fabrication and patterning capabilities. However, conventional LIG-based sensors often exhibit limited sensitivity under low-strain conditions. To overcome this limitation, this study introduces a flexible LIG strain sensor augmented with triangular non-woven fabric units. The mismatch in elasticity between the non-woven fabric and the gel rubber substrate induces significant local strain concentration upon small stretching. The local strain causes the rupture of partial conductive pathways, thereby enhancing sensitivity in the low-strain regime. Meanwhile, a strain gradient distributed along the width of the triangular unit promotes sequential rupture of conductive paths from the base toward the tip, which improves the linearity of the sensor. Experimental results demonstrate that the proposed sensor achieves notable performance enhancements within the 0–25% strain range. Specifically, the gauge factor (GF) increases from 78.22 for the pristine LIG sensor to 102.64 and 147.37 for sensors with two and four non-woven units, respectively. In addition, the linearity improves from 0.907 (pristine LIG) to 0.977 (sensor with two non-woven units). Benefiting from these improvements, the fabricated sensor proves effective in detecting subtle human motions, including rectus abdominis stretching, wrist bending, and knee joint movement.

激光诱导石墨烯（LIG）由于其易于制造和图像化的能力，在柔性应变传感器中得到了广泛的应用。然而，传统的基于ligs的传感器在低应变条件下往往表现出有限的灵敏度。为了克服这一限制，本研究引入了一种带有三角形无纺布单元的柔性LIG应变传感器。非织造布和凝胶橡胶基材之间的弹性不匹配在小拉伸时引起显著的局部应变集中。局部应变导致部分导电通路断裂，从而提高了低应变状态下的灵敏度。同时，沿三角形单元宽度分布的应变梯度促进了从底部到尖端的导电路径的顺序断裂，从而提高了传感器的线性度。实验结果表明，该传感器在0 ~ 25%应变范围内的性能得到了显著提高。具体来说，测量因子（GF）从原始LIG传感器的78.22增加到具有两个和四个无纺布单元的传感器的102.64和147.37。此外，线性度从0.907（原始LIG）提高到0.977（带有两个无纺布单元的传感器）。得益于这些改进，制造的传感器被证明可以有效地检测细微的人体运动，包括腹直肌拉伸、手腕弯曲和膝关节运动。

{"title":"High sensitivity of laser-induced graphene strain sensors at low strains via elasticity-mismatched non-woven fabric units","authors":"Zi Hao Li , Jia Xin Ling , Nai Xu Wang , Jing Jin Shen , Li Wang","doi":"10.1016/j.sna.2026.117568","DOIUrl":"10.1016/j.sna.2026.117568","url":null,"abstract":"<div><div>Laser-induced graphene (LIG) has gained widespread adoption in flexible strain sensors owing to its facile fabrication and patterning capabilities. However, conventional LIG-based sensors often exhibit limited sensitivity under low-strain conditions. To overcome this limitation, this study introduces a flexible LIG strain sensor augmented with triangular non-woven fabric units. The mismatch in elasticity between the non-woven fabric and the gel rubber substrate induces significant local strain concentration upon small stretching. The local strain causes the rupture of partial conductive pathways, thereby enhancing sensitivity in the low-strain regime. Meanwhile, a strain gradient distributed along the width of the triangular unit promotes sequential rupture of conductive paths from the base toward the tip, which improves the linearity of the sensor. Experimental results demonstrate that the proposed sensor achieves notable performance enhancements within the 0–25% strain range. Specifically, the gauge factor (GF) increases from 78.22 for the pristine LIG sensor to 102.64 and 147.37 for sensors with two and four non-woven units, respectively. In addition, the linearity improves from 0.907 (pristine LIG) to 0.977 (sensor with two non-woven units). Benefiting from these improvements, the fabricated sensor proves effective in detecting subtle human motions, including rectus abdominis stretching, wrist bending, and knee joint movement.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"401 ","pages":"Article 117568"},"PeriodicalIF":4.9,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146192820","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Quasi-static and transient signal monitoring based on lithium niobate piezoelectric pressure sensor 基于铌酸锂压电压力传感器的准静态和瞬态信号监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-05 DOI: 10.1016/j.sna.2026.117567

Feiyu Pan, Zihan Wang, Haoran Wei, Xiaojun Qiao, Wenping Geng, Xiujian Chou

Conventional piezoelectric pressure sensors often face performance trade-offs between sensitivity and wide range in practical applications, and exhibit large limitations in quasi-static and strong shock environments. Issues such as charge leakage and unstable polarization further limit their performance in long-duration monitoring. This study presents a lithium niobate–based piezoelectric pressure sensor featuring a coaxial, fully sealed structure with two axially aligned single crystals, enabling mechanical balance and enhanced signal reliability. The sensor was tested under various pressure conditions, including low (5–55 N), high (1–7 kN), quasi-static loading, and explosive shock environments. It achieved sensitivities of 12.6 pC/N(4013 pC/MPa) and 103.02 pC/N(32815 pC/MPa) in the respective ranges, with linearity coefficients above 0.996. Under a 5 kN quasistatic load, the charge decay was only 4.1 % over 25 min. The sensor demonstrated a response speed of up to 4 μs in the surge tube test, and realized a fast response of as fast as 2.6 μs under the TNT explosion shock wave, which verified its high dynamic adaptability and application feasibility in the field of explosion monitoring. The sensor effectively addresses key limitations of conventional devices by offering wide-range adaptability, quasi-static reliability, and microsecond-level response, making it highly suitable for aerospace applications, explosion impact monitoring, and other demanding industrial scenarios.

传统的压电式压力传感器在实际应用中往往面临灵敏度和宽量程之间的性能权衡，在准静态和强冲击环境中表现出很大的局限性。电荷泄漏和不稳定极化等问题进一步限制了它们在长时间监测中的性能。本研究提出了一种基于铌酸锂的压电压力传感器，该传感器具有同轴，全密封结构，具有两个轴向排列的单晶，可实现机械平衡并增强信号可靠性。该传感器在各种压力条件下进行了测试，包括低压力（5-55 N）、高压力（1-7 kN）、准静态加载和爆炸冲击环境。灵敏度分别为12.6 pC/N（4013 pC/MPa）和103.02 pC/N(32815 pC/MPa)，线性系数均在0.996以上。在5 kN准静态载荷下，25 min内电荷衰减率仅为4.1 %。该传感器在浪涌管试验中的响应速度可达4 μs，在TNT爆炸冲击波下的响应速度可达2.6 μs，验证了其在爆炸监测领域的高动态适应性和应用可行性。该传感器通过提供大范围适应性、准静态可靠性和微秒级响应，有效地解决了传统设备的关键限制，使其非常适合航空航天应用、爆炸冲击监测和其他苛刻的工业场景。

{"title":"Quasi-static and transient signal monitoring based on lithium niobate piezoelectric pressure sensor","authors":"Feiyu Pan, Zihan Wang, Haoran Wei, Xiaojun Qiao, Wenping Geng, Xiujian Chou","doi":"10.1016/j.sna.2026.117567","DOIUrl":"10.1016/j.sna.2026.117567","url":null,"abstract":"<div><div>Conventional piezoelectric pressure sensors often face performance trade-offs between sensitivity and wide range in practical applications, and exhibit large limitations in quasi-static and strong shock environments. Issues such as charge leakage and unstable polarization further limit their performance in long-duration monitoring. This study presents a lithium niobate–based piezoelectric pressure sensor featuring a coaxial, fully sealed structure with two axially aligned single crystals, enabling mechanical balance and enhanced signal reliability. The sensor was tested under various pressure conditions, including low (5–55 N), high (1–7 kN), quasi-static loading, and explosive shock environments. It achieved sensitivities of 12.6 pC/N(4013 pC/MPa) and 103.02 pC/N(32815 pC/MPa) in the respective ranges, with linearity coefficients above 0.996. Under a 5 kN quasistatic load, the charge decay was only 4.1 % over 25 min. The sensor demonstrated a response speed of up to 4 μs in the surge tube test, and realized a fast response of as fast as 2.6 μs under the TNT explosion shock wave, which verified its high dynamic adaptability and application feasibility in the field of explosion monitoring. The sensor effectively addresses key limitations of conventional devices by offering wide-range adaptability, quasi-static reliability, and microsecond-level response, making it highly suitable for aerospace applications, explosion impact monitoring, and other demanding industrial scenarios.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117567"},"PeriodicalIF":4.9,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Miniature E-type photoacoustic cell for detection of trace acetylene gas 用于微量乙炔气体检测的微型e型光声电池

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-03 DOI: 10.1016/j.sna.2026.117560

Bingyu Mo , Shanghu Zhou , Haiting Wang , Shenglong Li , Menglong Han , Xiaoyun Liu , Chenxi Li , Ke Chen

To achieve rapid flow measurement in oil-dissolved gas analysis, the photoacoustic (PA) detection technology based on a miniature E-type PA cell (E-PAC) has been proposed. The optimization of flow measurement time and volume reduction of the E-PAC are prioritized, while ensuring the stability of detection performance metrics. The E-PAC achieves sensor miniaturization by embedding the resonant cavity into the buffer chamber, with a total gas chamber volume of 3 mL. Consequently, concentrated thermal expansion from gas molecules absorbing optical energy generates stronger pressure fluctuations and enhanced PA signals. Meanwhile, finite element analysis is employed to optimize the positions of the gas inlet and outlet, achieving a reduction in gas response time. In the flow measurement experiment, when the gas flow rate reaches 50 sccm, the response time reaches its minimum, which is 39 s. Finally, to verify the gas detection capability of this system, acetylene (C₂H₂) gas detection experiment is carried out. When the integration time is set to 1 s, the sensor achieves a minimum detection limit of 12 ppb for C₂H₂ gas, accompanied by a normalized noise equivalent absorption (NNEA) coefficient of 6.97 × 10⁻¹⁰ W·cm⁻¹·Hz^−1/2.

为了实现油溶气分析中流量的快速测量，提出了一种基于微型e型光声池（E-PAC）的光声检测技术。优化流量测量时间和减少E-PAC的体积是优先考虑的，同时确保检测性能指标的稳定性。E-PAC通过将谐振腔嵌入缓冲腔中实现传感器小型化，总气室体积为3 mL。因此，吸收光能的气体分子的集中热膨胀产生更强的压力波动和增强的PA信号。同时，采用有限元分析对进气口和出气口位置进行优化，实现了气体响应时间的缩短。在流量测量实验中，当气体流量达到50 sccm时，响应时间达到最小值，为39 s。最后，为了验证该系统的气体检测能力，进行了乙炔（C2H2）气体检测实验。当积分时间设置为1 s时，传感器对C2H2气体的最小检测限为12 ppb，归一化噪声等效吸收（NNEA）系数为6.97 × 10−10 W·cm−1·Hz−1/2。

{"title":"Miniature E-type photoacoustic cell for detection of trace acetylene gas","authors":"Bingyu Mo , Shanghu Zhou , Haiting Wang , Shenglong Li , Menglong Han , Xiaoyun Liu , Chenxi Li , Ke Chen","doi":"10.1016/j.sna.2026.117560","DOIUrl":"10.1016/j.sna.2026.117560","url":null,"abstract":"<div><div>To achieve rapid flow measurement in oil-dissolved gas analysis, the photoacoustic (PA) detection technology based on a miniature E-type PA cell (E-PAC) has been proposed. The optimization of flow measurement time and volume reduction of the E-PAC are prioritized, while ensuring the stability of detection performance metrics. The E-PAC achieves sensor miniaturization by embedding the resonant cavity into the buffer chamber, with a total gas chamber volume of 3 mL. Consequently, concentrated thermal expansion from gas molecules absorbing optical energy generates stronger pressure fluctuations and enhanced PA signals. Meanwhile, finite element analysis is employed to optimize the positions of the gas inlet and outlet, achieving a reduction in gas response time. In the flow measurement experiment, when the gas flow rate reaches 50 sccm, the response time reaches its minimum, which is 39 s. Finally, to verify the gas detection capability of this system, acetylene (C<sub>2</sub>H<sub>2</sub>) gas detection experiment is carried out. When the integration time is set to 1 s, the sensor achieves a minimum detection limit of 12 ppb for C<sub>2</sub>H<sub>2</sub> gas, accompanied by a normalized noise equivalent absorption (NNEA) coefficient of 6.97 × 10<sup>−10</sup> W·cm<sup>−1</sup>·Hz<sup>−1/2</sup>.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117560"},"PeriodicalIF":4.9,"publicationDate":"2026-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Tri-cation doped Ni0.1Cu0.1Mn0.8Fe2O4 nanoparticles for ultra-sensitive, fast-response magnetoresistive sensors in weak magnetic fields 三阳离子掺杂Ni0.1Cu0.1Mn0.8Fe2O4纳米粒子用于弱磁场中超灵敏、快速响应的磁阻传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-03 DOI: 10.1016/j.sna.2026.117466

Reza Gholipur

Ni_0.1Cu_0.1Mn_0.8Fe₂O₄ nanoparticles were synthesized hydrothermally at 140–220 °C to optimize low-field magnetoresistive sensor performance (<100 Oe). Temperature variation tuned crystallite size, magnetic anisotropy, and exchange length, with the NC3 sample (180 °C) showing optimal single-domain characteristics. Two-probe sensors fabricated from NC3 delivered MR% = 8.7 % at 100 Oe, attributed to synergistic Ni^2 + /Cu²⁺ doping that enhances Fe³⁺-O-Mn²⁺ double-exchange coupling. Dynamic tests yielded an ultrafast response time of 12 ms through coherent magnetization rotation and 92.0 % MR% retention after 100 thermal cycles (25–85 °C). These properties make NC3 promising for low-power, real-time IoT magnet detection. The synthesis-to-device approach identifies 180 °C as the optimal temperature, linking materials optimization to sensor functionality for next-generation MRAM platforms.

为了优化低场磁阻传感器的性能（<100 Oe），我们在140-220℃下水热合成了Ni0.1Cu0.1Mn0.8Fe2O4纳米颗粒。温度变化可调节晶体尺寸、磁各向异性和交换长度，其中NC3样品（180°C）表现出最佳的单畴特性。由NC3制成的双探针传感器在100 Oe下的MR% = 8.7 %，归因于协同Ni2 + /Cu2+掺杂增强了Fe3+-O-Mn2+双交换耦合。动态测试表明，通过相干磁化旋转获得的超快响应时间为12 ms，在100个热循环（25-85°C）后保持92.0 % MR%。这些特性使NC3有望用于低功耗、实时物联网磁铁检测。合成到器件的方法将180°C确定为最佳温度，将材料优化与下一代MRAM平台的传感器功能联系起来。

引用次数: 0

Human internal actuators using bending and twisting deformation of a soft heat storage material driven by ultrasonic heating of shape memory alloy wires 人体内部致动器是利用形状记忆合金丝的超声加热驱动的弯曲和扭转变形的软储热材料

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-03 DOI: 10.1016/j.sna.2026.117535

Satomitsu Imai

A soft actuator capable of changing the orientation of a human internal medical device was developed. The actuator in this study consists of shape memory alloy (SMA) wires attached to a short cylindrical polyurethane (PU) gel. The SMA wires are remotely heated by ultrasound. The SMA wires induce bending and torsional deformation of the PU gel. By attaching a medical device to the actuator, the orientation and posture of the device can be changed. The PU gel was 20 mm long and 9 mm in diameter. Heat transferred from the PU gel to the SMA wire (coil, diameter 0.56 mm) causes the SMA wire to contract and expand (bidirectional deformation). This system allows the actuator to be very compact, even capable of being swallowed by a person. The heating characteristics of the PU gel and SMA wire were experimentally investigated to identify the optimal structure of the actuator. The bending and torsion angles generated in the actuator were over 30° after approximately 3 min of ultrasonic heating (power: 20 W).

研制了一种能够改变人体内部医疗装置方向的软致动器。本研究中的致动器由形状记忆合金（SMA）导线连接到短圆柱形聚氨酯（PU）凝胶组成。通过超声波远程加热SMA导线。SMA钢丝引起PU凝胶的弯曲和扭转变形。通过在驱动器上安装一个医疗设备，可以改变设备的方向和姿势。PU凝胶长20 mm，直径9 mm。热量从PU凝胶传递到SMA丝（线圈，直径0.56 mm），导致SMA丝收缩和膨胀（双向变形）。这个系统使得执行器非常紧凑，甚至可以被一个人吞下。通过实验研究了PU凝胶和SMA丝的加热特性，确定了驱动器的最佳结构。超声加热约3 min（功率为20 W）后，致动器产生的弯曲和扭转角均大于30°。

引用次数: 0

Design and fabrication of high-density flexible two-dimensional ultrasonic arrays based on staggered-layer stacking process technology 基于交错层堆积工艺技术的高密度柔性二维超声阵列的设计与制造

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-03 DOI: 10.1016/j.sna.2026.117551

Yirui Li , Jia Cao , Yiran Wu , Bo Wang , Zhe Zhang , Jiaxing Peng , Yaoyang Zhang , Jianzhong Chen , Weicen Chen , Xiang Li , Tao Zhou , Dawei Wu

To address the challenges of complex manufacturing, high cost, and low reliability in existing two-dimensional flexible phased array ultrasound devices, this paper proposes an innovative process based on staggered-layer stacking process technology. This process enables high-density flexible interconnections for full electrodes while effectively reducing manufacturing costs and maintaining excellent flexibility and reliability. By optimizing the electrode layout and element interconnection scheme, the process ensures superior electrical performance and mechanical robustness even under high-density element arrangements. Based on this innovative process, a 10 × 10 element two-dimensional flexible phased array with a center frequency of 1 MHz was successfully developed. Experimental results demonstrate a maximum crosstalk of - 43.2 dB between adjacent array elements, which is significantly lower than that of commercial transducers. While maintaining high flexibility, the device exhibits outstanding ultrasonic modulation capability. Owing to these advantages, the device shows great potential for diverse biomedical and therapeutic applications, especially in flexible wearable ultrasound systems, ultrasound-mediated stimulation, and focused therapeutic treatments.

针对现有二维柔性相控阵超声器件制造复杂、成本高、可靠性低等问题，提出了一种基于交错层叠加工艺技术的创新工艺。该工艺可实现全电极的高密度柔性互连，同时有效降低制造成本并保持优异的灵活性和可靠性。通过优化电极布局和元件互连方案，即使在高密度元件布置下，该工艺也能确保优越的电气性能和机械稳健性。基于这一创新工艺，成功研制了中心频率为1 MHz的10 × 10元二维柔性相控阵。实验结果表明，相邻阵列元件之间的最大串扰为- 43.2 dB，显著低于商用换能器。在保持高灵活性的同时，该器件表现出出色的超声波调制能力。由于这些优点，该设备在各种生物医学和治疗应用方面显示出巨大的潜力，特别是在柔性可穿戴超声系统，超声介导刺激和集中治疗治疗方面。

{"title":"Design and fabrication of high-density flexible two-dimensional ultrasonic arrays based on staggered-layer stacking process technology","authors":"Yirui Li , Jia Cao , Yiran Wu , Bo Wang , Zhe Zhang , Jiaxing Peng , Yaoyang Zhang , Jianzhong Chen , Weicen Chen , Xiang Li , Tao Zhou , Dawei Wu","doi":"10.1016/j.sna.2026.117551","DOIUrl":"10.1016/j.sna.2026.117551","url":null,"abstract":"<div><div>To address the challenges of complex manufacturing, high cost, and low reliability in existing two-dimensional flexible phased array ultrasound devices, this paper proposes an innovative process based on staggered-layer stacking process technology. This process enables high-density flexible interconnections for full electrodes while effectively reducing manufacturing costs and maintaining excellent flexibility and reliability. By optimizing the electrode layout and element interconnection scheme, the process ensures superior electrical performance and mechanical robustness even under high-density element arrangements. Based on this innovative process, a 10 × 10 element two-dimensional flexible phased array with a center frequency of 1 MHz was successfully developed. Experimental results demonstrate a maximum crosstalk of - 43.2 dB between adjacent array elements, which is significantly lower than that of commercial transducers. While maintaining high flexibility, the device exhibits outstanding ultrasonic modulation capability. Owing to these advantages, the device shows great potential for diverse biomedical and therapeutic applications, especially in flexible wearable ultrasound systems, ultrasound-mediated stimulation, and focused therapeutic treatments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117551"},"PeriodicalIF":4.9,"publicationDate":"2026-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Compact optical fiber sensor system featuring tunable sensitivity and real-time wireless interrogation 紧凑的光纤传感器系统，具有可调的灵敏度和实时无线询问

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-03 DOI: 10.1016/j.sna.2026.117545

Aayush Madan, Yaowen Yang

This study introduces an intensity-based fiber optic sensor leveraging chirp fiber Bragg grating (CFBG), method, and system to produce clean, stable, and reliable signals for strain, temperature and vibration measurement. The sensor incorporates an interrogating CFBG with a center wavelength and bandwidth tailored to the specifications of sensing CFBG. This design ensures compatibility between the interrogating and sensing gratings, enabling accurate measurement through their optical spectrum overlap. The design layout also features an optical power adjustment mechanism that allows sensitivity to be configured for specific application needs. The research also details development of an optoelectronic interrogator prototype (or interrogator), enabling real-time, wireless signal acquisition from remote locations. This interrogator is characterized by its compact size, reflection-mode architecture, scalable configuration, portability, and cost-effectiveness. Under the optical test configuration, the sensor exhibits a strain sensitivity coefficient of 0.73 relative to the baseline optical power. The interrogator was evaluated over a strain range of up to 3000 µε, achieving a sensitivity of 0.82 mV/µε. The temperature sensitivity was measured to be 7.2 mV/°C. Furthermore, the time-domain response obtained from the long-term stability test demonstrates temporal consistency, with a moderate drift confined within ±5%, an hourly sampled coefficient of variation below 0.03, and autocorrelation coefficients exceeding 0.85. The advancement of such techniques holds significant potential to drive widespread deployment and adoption of fiber-optic sensing technologies functioning as optical nodes across diverse industries.

本研究介绍了一种基于强度的光纤传感器，利用啁啾光纤布拉格光栅（CFBG）、方法和系统来产生干净、稳定和可靠的应变、温度和振动测量信号。该传感器集成了一个询问CFBG，其中心波长和带宽根据感应CFBG的规格量身定制。这种设计确保了询问光栅和传感光栅之间的兼容性，通过其光谱重叠实现精确测量。该设计布局还具有光功率调节机制，允许根据特定应用需求配置灵敏度。该研究还详细介绍了光电询问器原型（或询问器）的开发，实现了远程位置的实时无线信号采集。该询问器的特点是尺寸紧凑、反射模式架构、可伸缩配置、可移植性和成本效益。在光学测试配置下，传感器相对于基线光功率的应变灵敏度系数为0.73。该询问器在高达3000µε的应变范围内进行评估，灵敏度为0.82 mV/µε。测得温度灵敏度为7.2 mV/℃。此外，从长期稳定性测试中获得的时域响应具有时间一致性，适度漂移限制在±5%以内，每小时抽样变异系数低于0.03，自相关系数超过0.85。这些技术的进步具有巨大的潜力，可以推动光纤传感技术在不同行业中作为光节点的广泛部署和采用。

{"title":"Compact optical fiber sensor system featuring tunable sensitivity and real-time wireless interrogation","authors":"Aayush Madan, Yaowen Yang","doi":"10.1016/j.sna.2026.117545","DOIUrl":"10.1016/j.sna.2026.117545","url":null,"abstract":"<div><div>This study introduces an intensity-based fiber optic sensor leveraging chirp fiber Bragg grating (CFBG), method, and system to produce clean, stable, and reliable signals for strain, temperature and vibration measurement. The sensor incorporates an interrogating CFBG with a center wavelength and bandwidth tailored to the specifications of sensing CFBG. This design ensures compatibility between the interrogating and sensing gratings, enabling accurate measurement through their optical spectrum overlap. The design layout also features an optical power adjustment mechanism that allows sensitivity to be configured for specific application needs. The research also details development of an optoelectronic interrogator prototype (or interrogator), enabling real-time, wireless signal acquisition from remote locations. This interrogator is characterized by its compact size, reflection-mode architecture, scalable configuration, portability, and cost-effectiveness. Under the optical test configuration, the sensor exhibits a strain sensitivity coefficient of 0.73 relative to the baseline optical power. The interrogator was evaluated over a strain range of up to 3000 µε, achieving a sensitivity of 0.82 mV/µε. The temperature sensitivity was measured to be 7.2 mV/°C. Furthermore, the time-domain response obtained from the long-term stability test demonstrates temporal consistency, with a moderate drift confined within ±5%, an hourly sampled coefficient of variation below 0.03, and autocorrelation coefficients exceeding 0.85. The advancement of such techniques holds significant potential to drive widespread deployment and adoption of fiber-optic sensing technologies functioning as optical nodes across diverse industries.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117545"},"PeriodicalIF":4.9,"publicationDate":"2026-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Piezoelectric-driven soft robotics: Multifunctional materials, actuation mechanisms, challenges, and future prospects 压电驱动软体机器人：多功能材料、驱动机制、挑战与未来展望

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-02 DOI: 10.1016/j.sna.2026.117552

Ritik Raj , Jia-Yang Juang

Piezoelectric actuation offers a distinctive pathway for soft robotic systems by enabling precise, fast, and energy-efficient motion within compliant structures. Through direct and converse electromechanical coupling, piezoelectric materials allow actuation, sensing, and energy transduction to be inherently integrated, differentiating them from conventional rigid and fluidic actuation approaches. This review provides an overview of recent advances in piezoelectric materials, actuator architectures, and integrated soft robotic systems, with emphasis on flexible ceramics, polymeric and composite hybrids, and lead-free and biodegradable alternatives. The review examines different classes of piezoelectric materials and their functional roles in soft robotic actuation, sensing, and system integration. It surveys applications spanning locomotion and soft grippers, precision manufacturing and optical systems, as well as biomedical and wearable soft robotic platforms. Beyond material development, the review discusses system-level integration aspects, including hybrid actuation, embedded sensing, low-voltage operation, and data-driven approaches, which support the development of more efficient and integrated soft robotic systems. Persistent challenges such as hysteresis, creep, limited strain output, and power consumption are discussed alongside representative mitigation strategies including nonlinear compensation, learning-based control, and resonant operation. The review also outlines future research directions that emphasize sustainable material choices and improved control frameworks. By synthesizing developments in piezoelectric materials and actuation strategies, this review clarifies their role in advancing biomedical and human-interactive soft robotic technologies.

压电驱动通过在柔性结构内实现精确、快速和节能的运动，为软机器人系统提供了一条独特的途径。通过直接和反向机电耦合，压电材料允许驱动、传感和能量传导内在地集成在一起，将它们与传统的刚性和流体驱动方法区分开来。本文综述了压电材料、致动器结构和集成软机器人系统的最新进展，重点介绍了柔性陶瓷、聚合物和复合材料、无铅和可生物降解替代品。本文综述了不同类型的压电材料及其在软机器人驱动、传感和系统集成中的功能作用。它调查了运动和软抓取器，精密制造和光学系统，以及生物医学和可穿戴软机器人平台的应用。除了材料开发之外，该综述还讨论了系统级集成方面，包括混合驱动、嵌入式传感、低压操作和数据驱动方法，这些都支持开发更高效和集成的软机器人系统。讨论了迟滞、蠕变、有限应变输出和功耗等持续存在的挑战，以及具有代表性的缓解策略，包括非线性补偿、基于学习的控制和谐振操作。该综述还概述了强调可持续材料选择和改进控制框架的未来研究方向。通过综合压电材料和驱动策略的发展，本文综述了它们在推进生物医学和人机交互软机器人技术中的作用。

{"title":"Piezoelectric-driven soft robotics: Multifunctional materials, actuation mechanisms, challenges, and future prospects","authors":"Ritik Raj , Jia-Yang Juang","doi":"10.1016/j.sna.2026.117552","DOIUrl":"10.1016/j.sna.2026.117552","url":null,"abstract":"<div><div>Piezoelectric actuation offers a distinctive pathway for soft robotic systems by enabling precise, fast, and energy-efficient motion within compliant structures. Through direct and converse electromechanical coupling, piezoelectric materials allow actuation, sensing, and energy transduction to be inherently integrated, differentiating them from conventional rigid and fluidic actuation approaches. This review provides an overview of recent advances in piezoelectric materials, actuator architectures, and integrated soft robotic systems, with emphasis on flexible ceramics, polymeric and composite hybrids, and lead-free and biodegradable alternatives. The review examines different classes of piezoelectric materials and their functional roles in soft robotic actuation, sensing, and system integration. It surveys applications spanning locomotion and soft grippers, precision manufacturing and optical systems, as well as biomedical and wearable soft robotic platforms. Beyond material development, the review discusses system-level integration aspects, including hybrid actuation, embedded sensing, low-voltage operation, and data-driven approaches, which support the development of more efficient and integrated soft robotic systems. Persistent challenges such as hysteresis, creep, limited strain output, and power consumption are discussed alongside representative mitigation strategies including nonlinear compensation, learning-based control, and resonant operation. The review also outlines future research directions that emphasize sustainable material choices and improved control frameworks. By synthesizing developments in piezoelectric materials and actuation strategies, this review clarifies their role in advancing biomedical and human-interactive soft robotic technologies.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117552"},"PeriodicalIF":4.9,"publicationDate":"2026-02-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Mechanical behavior monitoring of a large-scale prefabricated subway station during assembly using fiber optic sensors 基于光纤传感器的大型装配式地铁车站装配过程力学行为监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-02 DOI: 10.1016/j.sna.2026.117546

Chengyu Hong , Siyan Lin , Shamsher Sadiq , Shuban Ali , Min Zhu , Ping Guo , Zhihong Duan

Large-scale prefabricated structural components of subway stations can experience significant mechanical demands during assembly due to their size, weight, and the construction sequence. This study analyzed the mechanical behavior of prefabricated subway station joints and structural members (base slab, sidewalls, and top slab) during the assembly process using Distributed Fiber Optic Sensing (DFOS) and Fiber Bragg Grating (FBG) sensor technologies. Strain variations, bending moments, and axial forces were examined to assess the influence of different assembly stages on structural performance. The results revealed that all joints-maintained strains within a safe margin of 40 με, but more significant strain disturbances were observed during the top slab assembly, with peak strains reaching −33 με. The top slab assembly also contributed the most to joint axial forces and bending moments, with contributions reaching up to 92.6 % and 96.2 %, respectively, emphasizing its critical impact on joint behavior. The base slab exhibited significant strain variations, with peak strains of 393.8 με (tensile) and −260.01 με (compressive) after the top slab assembly. In addition, axial forces in the sidewalls increased by up to 36.5 %, while bending moments in the base slab increased by 52.6 %. The study highlights the importance of precise alignment and localized reinforcement, particularly at critical joints, to ensure structural safety and minimize deformation. The use of DOFS proved highly effective in capturing continuous, high-resolution strain data, enabling precise assessment of structural behavior and providing valuable insights for risk control in prefabricated subway station assembly construction.

地铁车站的大型预制构件由于其尺寸、重量和施工顺序等因素，在装配过程中会遇到很大的机械需求。本研究采用分布式光纤传感（DFOS）和光纤布拉格光栅（FBG）传感器技术，分析了预制地铁车站节点和结构构件（底板、侧壁和顶板）在装配过程中的力学行为。测试了应变变化、弯矩和轴向力，以评估不同装配阶段对结构性能的影响。结果表明，所有节理维持的应变都在40 με的安全范围内，但在顶板装配过程中出现了更明显的应变扰动，峰值应变达到- 33 με。顶板组合对节点轴力和弯矩的贡献最大，分别达到92.6 %和96.2 %，强调了其对节点行为的关键影响。底板应变变化显著，顶板装配后的应变峰值分别为393.8 με（拉伸）和- 260.01 με（压缩）。此外，侧壁轴力增加36.5% %，而底板弯矩增加52.6% %。该研究强调了精确定位和局部加固的重要性，特别是在关键节点，以确保结构安全和最小化变形。事实证明，dfs在获取连续、高分辨率应变数据方面非常有效，能够精确评估结构行为，并为预制地铁车站组装施工的风险控制提供有价值的见解。

{"title":"Mechanical behavior monitoring of a large-scale prefabricated subway station during assembly using fiber optic sensors","authors":"Chengyu Hong , Siyan Lin , Shamsher Sadiq , Shuban Ali , Min Zhu , Ping Guo , Zhihong Duan","doi":"10.1016/j.sna.2026.117546","DOIUrl":"10.1016/j.sna.2026.117546","url":null,"abstract":"<div><div>Large-scale prefabricated structural components of subway stations can experience significant mechanical demands during assembly due to their size, weight, and the construction sequence. This study analyzed the mechanical behavior of prefabricated subway station joints and structural members (base slab, sidewalls, and top slab) during the assembly process using Distributed Fiber Optic Sensing (DFOS) and Fiber Bragg Grating (FBG) sensor technologies. Strain variations, bending moments, and axial forces were examined to assess the influence of different assembly stages on structural performance. The results revealed that all joints-maintained strains within a safe margin of 40 με, but more significant strain disturbances were observed during the top slab assembly, with peak strains reaching −33 με. The top slab assembly also contributed the most to joint axial forces and bending moments, with contributions reaching up to 92.6 % and 96.2 %, respectively, emphasizing its critical impact on joint behavior. The base slab exhibited significant strain variations, with peak strains of 393.8 με (tensile) and −260.01 με (compressive) after the top slab assembly. In addition, axial forces in the sidewalls increased by up to 36.5 %, while bending moments in the base slab increased by 52.6 %. The study highlights the importance of precise alignment and localized reinforcement, particularly at critical joints, to ensure structural safety and minimize deformation. The use of DOFS proved highly effective in capturing continuous, high-resolution strain data, enabling precise assessment of structural behavior and providing valuable insights for risk control in prefabricated subway station assembly construction.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117546"},"PeriodicalIF":4.9,"publicationDate":"2026-02-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0