Sensors and Actuators A-physical最新文献_第3页

A rotary-actuated compression sensor for real-time biomechanical assessment of human skin 一种用于人体皮肤实时生物力学评估的旋转驱动压缩传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117479

Kung Ahn , Ikjin Kwon , JaeWoo Moon , Kyudong Han , Yong Ju Ahn

Human skin displays complex viscoelastic behavior arising from the interplay of collagen, elastin, and dermal ground substances, yet existing suction- and indentation-based devices provide limited physiological relevance and insufficient temporal resolution to characterize dynamic mechanical responses. We developed a novel contact-based elasticity device that applies controlled mechanical micro-compression using a rotary actuator and quantifies deformation through time-resolved electrical resistance sensing. A fully automated algorithm segments the resulting time-series into repeated base–peak–trough cycles and extracts multi-dimensional biomechanical descriptors, including deformation amplitude, loading slope, snap-back velocity, recovery time, and energy-based metrics. Validation with PDMS standards confirmed that five of six parameters robustly distinguished materials of different stiffness, demonstrating high sensitivity across a broad elasticity range. In individual measurements revealed clear lateral asymmetry within a single individual: the right cheek exhibited greater deformation and steeper loading slopes, whereas the left cheek showed faster recovery kinetics. A total of 250 participants aged 16–80 years were enrolled, including 218 female and 32 male participants, five viscoelastic parameters exhibited significant positive correlations with age (r = 0.16–0.33), revealing age-dependent degradation patterns that were not detectable in raw data. These findings demonstrate that integrating controlled compression with high-frequency resistance sensing enables detailed, physiologically relevant quantification of skin mechanics beyond the capabilities of traditional suction devices. The device algorithm system offers a robust platform for dermatologic evaluation, cosmetic efficacy testing, population-level aging research, and next-generation personalized skin-profiling technologies.

由于胶原蛋白、弹性蛋白和真皮基质物质的相互作用，人体皮肤表现出复杂的粘弹性行为，然而现有的基于吸吸和压痕的设备提供有限的生理相关性和时间分辨率不足以表征动态力学反应。我们开发了一种新型的基于接触的弹性装置，该装置使用旋转致动器应用受控的机械微压缩，并通过时间分辨电阻传感量化变形。全自动算法将结果时间序列分割为重复的基峰谷周期，并提取多维生物力学描述符，包括变形幅度、加载斜率、反弹速度、恢复时间和基于能量的指标。PDMS标准验证证实，6个参数中有5个能够稳健地区分不同刚度的材料，在广泛的弹性范围内显示出高灵敏度。在个体测量中显示出明显的横向不对称：右脸颊表现出更大的变形和更陡峭的加载斜率，而左脸颊表现出更快的恢复动力学。共招募了250名年龄在16-80岁之间的参与者，其中包括218名女性和32名男性参与者，五个粘弹性参数与年龄表现出显著的正相关（r = 0.16-0.33），揭示了原始数据中无法检测到的年龄依赖性退化模式。这些发现表明，将控制压缩与高频电阻传感相结合，可以超越传统吸入装置的能力，对皮肤力学进行详细的、生理学相关的量化。该设备算法系统为皮肤病学评估、化妆品功效测试、人口老龄化研究和下一代个性化皮肤分析技术提供了一个强大的平台。

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引用次数: 0

A composite thin-film strain gauge with a near-zero temperature coefficient of resistance and a highly linear response to strain 一种复合薄膜应变计，具有接近零的电阻温度系数和对应变的高度线性响应

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117519

Mengqiu Li , Yahui Li , Guifu Ding , Zhuoqing Yang

Strain gauges serve as fundamental sensors for structural deformation monitoring, yet their conventional counterparts exhibit pronounced temperature effect, compromising measurement accuracy and stability under thermal fluctuations. Based on micro-electromechanical systems (MEMS) fabrication technology, this study systematically investigates the evolution of micro-morphology and surface roughness of sputtered thin films. The core focus lies in elucidating the internal electron scattering mechanisms and their intrinsic correlation with the Temperature Coefficient of Resistance (TCR). Specifically, we analyze how static scattering interacts with and compensates for the temperature-dependent lattice vibration scattering during the heating process. Guided by these physical insights, a composite thin-film strain gauge was fabricated via co-sputtering to validate the proposed scattering regulation strategy. The device demonstrates a near-zero TCR of −2.5 ppm/°C, a gauge factor of 1.9, and a highly linear response to strain (R² ≈ 99.8 %) alongside remarkable cyclic stability. This work provides a fundamental physical insight into scattering engineering for designing precise strain sensors in thermally dynamic environments.

应变片是结构变形监测的基本传感器，但传统的应变片具有明显的温度效应，在热波动下影响测量精度和稳定性。本研究基于微机电系统（MEMS）制备技术，系统地研究了溅射薄膜的微观形貌和表面粗糙度的演变。核心重点在于阐明内部电子散射机制及其与电阻温度系数（TCR）的内在相关性。具体来说，我们分析了在加热过程中，静态散射如何与温度相关的晶格振动散射相互作用和补偿。在这些物理见解的指导下，通过共溅射制备了复合薄膜应变片，以验证所提出的散射调节策略。该装置的TCR接近于零，为- 2.5 ppm/°C，测量因子为1.9，对应变具有高度线性响应（R2≈99.8 %），并具有显著的循环稳定性。这项工作为在热动态环境中设计精确的应变传感器提供了散射工程的基本物理见解。

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引用次数: 0

Intelligent soft gripper with independently controlled multi-segment structure and conformally integrated all-nanofiber pressure sensor for achieving multifunctional grasping capability 采用自主控制多节段结构和保形集成全纳米纤维压力传感器的智能软爪，实现多功能抓取能力

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117517

Yigen Wu , Jie Liu , Yubo Hu , Zhi Hu , Hongyi Liu , Jiu Yu , Hanshi Li , Jian Peng

Empowering intelligent soft gripper with diverse grasping modes has attracted extensive interests in scenarios of industrial productivity, automated sorting domain and human-machine interaction. However, existing strategies for enriching grasping capability of soft gripper, such as alternatively designing intricate structures or integrating flexible pressure sensor, mainly suffered from unsimultaneous enhancement of intelligence or dexterity, and the integrated flexible sensors are often seriously affected by the dynamic large deformation of soft structure. In this work, an intelligent soft gripper with multifunctional grasping capability is constructed by synergistically designing multi-segmented structure and integrating stretchable ionic capacitive pressure sensor. Each individual pneumatic soft finger of the proposed intelligent gripper consists of independently controlled proximal, middle, and distal segments, enabling the capability to pick a wide variety of objects and to demonstrate in-hand operations. Moreover, the integrated pressure sensor features all-nanofiber structures, not only facilitating the improvement of tactile sensing performance (high sensitivity of 1.58 kPa⁻¹, exceptional robustness and stability) based on ionic capacitive effect, but also prompting the conformal integration with the compliance body of pneumatic soft finger. Finally, potential applications are demonstrated, including continuous tactile monitoring of each segment and high-accuracy object recognition. The gripper achieves a recognition accuracy of 90.3 % with a single sensor, which is further enhanced to 99.0 % by employing a 2 × 2 sensor array, both facilitated by a machine learning algorithm.This study simultaneously enhances the dexterity and intelligence of soft gripper and expedites its applications towards practical scenarios, contributing to the development of soft robotics towards hand-like embodied artificial intelligence.

具有多种抓取方式的智能软爪在工业生产、自动分拣和人机交互等领域引起了广泛的关注。然而，现有的增强软夹持器抓取能力的策略，如交替设计复杂结构或集成柔性压力传感器等，主要存在智能或灵巧性提升不同步的问题，且集成柔性传感器往往会受到软结构动态大变形的严重影响。本文通过协同设计多节段结构和集成可拉伸离子电容压力传感器，构建了具有多功能抓取能力的智能软抓取器。所提出的智能夹持器的每个独立的气动软手指由独立控制的近端、中端和远端部分组成，使其能够挑选各种各样的物体并演示手持操作。此外，集成压力传感器采用全纳米纤维结构，不仅有利于基于离子电容效应提高触觉传感性能（1.58 kPa−1的高灵敏度，出色的鲁棒性和稳定性），而且促进了与气动软指顺应体的保角集成。最后，展示了潜在的应用，包括每个部分的连续触觉监测和高精度物体识别。单传感器抓手的识别精度为90.3 %，通过采用2 × 2传感器阵列进一步提高到99.0 %，两者都通过机器学习算法实现。本研究提高了软抓取器的灵巧性和智能性，加快了其在实际场景中的应用，为软机器人向类手具人工智能方向发展做出了贡献。

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引用次数: 0

High-sensitivity electrically isolated differential strain gauge with temperature compensation for precise force measurements 具有温度补偿的高灵敏度电隔离差分应变计，用于精确的力测量

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117516

Sijia Ling , Xiaopeng Chen , Minyu Dai , Jin Zhang , Zhengyin Yu , Jiawen Yin , Jiawen Jian , Qinghui Jin

Strain gauges are critical for high precision force sensing in complex robotic environments. However, existing technologies suffer from weak output signals, temperature sensitivity, stiffness–sensitivity trade-off, and challenges in batch fabrication. In this work, a novel electrically isolated differential strain gauge based on SOI (Silicon-On-Insulator) and MEMS (Micro-Electro-Mechanical System) technology is proposed. A differential grid structure design with doped silicon to enhance sensitivity and accuracy. The SOI insulating layer effectively isolates leakage currents and suppresses temperature drift in concert with the optimized etching process. The integrated temperature element further ensures stability under complex operating conditions. The GF (gauge factor) reaches 155 within 0–145 με, demonstrating exceptionally high sensitivity. Each major error is controlled at a low level (<0.35 %). Furthermore, comparative experiments confirm that the temperature characteristics of the SOI full-bridge strain gauge substantially outperform those of bulk silicon. The proposed strain gauge demonstrates remarkable high sensitivity and low temperature drift, with considerable application potential in precision assembly, minimally invasive surgery, and human-computer interaction in robotics.

应变片对于复杂机器人环境中的高精度力传感至关重要。然而，现有的技术存在输出信号弱、温度敏感、刚度灵敏度权衡以及批量制造方面的挑战。本文提出了一种基于绝缘体上硅（SOI）和微机电系统（MEMS）技术的新型电隔离差分应变计。采用掺杂硅的差分网格结构设计，提高了灵敏度和精度。在优化的蚀刻工艺下，SOI绝缘层能有效隔离漏电流，抑制温度漂移。集成的温度元件进一步确保了复杂操作条件下的稳定性。GF （gauge factor）在0 ~ 145 με范围内达到155，具有极高的灵敏度。每个主要误差控制在较低水平（<0.35 %）。此外，对比实验证实，SOI全桥应变片的温度特性大大优于体硅应变片。该应变片具有较高的灵敏度和较低的温度漂移，在精密装配、微创手术、机器人人机交互等方面具有较大的应用潜力。

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引用次数: 0

Improved GCN with zero-shot learning for rolling bearing fault diagnosis 基于零弹学习的改进GCN滚动轴承故障诊断

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117484

Jinhua Wang , Wenbao Cao , Jie Cao , Yanhong Ma

In the complex operational environments of actual industrial machinery, fluctuating working conditions not only result in a scarcity of fault data but often leave no usable samples, which hampers the accuracy and generalizability of diagnostics. We propose a method that enhances the GCN with Zero-Shot Learning capabilities, termed GCN Zero-Shot Learning (GZSL). Initially, features of different fault types are extracted using a Deep Adaptive Convolutional Neural Network (DACNN). These features are then input into a GCN connected through residual learning. Additionally, we incorporate Label Smoothing (LS) regularization to refine the original loss function. A fault attribute learner is trained to understand the relationships among various attributes. For unknown fault classes, we transfer them to the fault attribute layer, where the attributes of the unknown faults are predicted, facilitating the diagnosis of these unknown classes.

在实际工业机械复杂的运行环境中，波动的工作条件不仅导致故障数据的稀缺，而且往往没有留下可用的样本，这阻碍了诊断的准确性和泛化性。我们提出了一种增强GCN零射击学习能力的方法，称为GCN零射击学习（GZSL）。首先，利用深度自适应卷积神经网络（Deep Adaptive Convolutional Neural Network， DACNN）提取不同类型故障的特征。然后将这些特征输入到通过残差学习连接的GCN中。此外，我们结合标签平滑（LS）正则化来改进原始损失函数。训练故障属性学习器来理解各种属性之间的关系。对于未知的故障类别，我们将其转移到故障属性层，在故障属性层中对未知故障的属性进行预测，便于这些未知类别的诊断。

引用次数: 0

Engineering high-performance BiSeTe ultra-thin film on flexible FEP 柔性FEP上的工程高性能BiSeTe超薄薄膜

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-20 DOI: 10.1016/j.sna.2026.117518

G. Durak Yüzüak , E. Yüzüak

Flexible thermoelectric (TE) devices hold great promise for powering wearable electronics by harvesting the temperature difference between human skin and the environment. Conventional Bi₂Te₃, although efficient, suffers from rigidity and limited suitability for flexible applications, while organic alternatives typically lack sufficient TE performance. Here, we demonstrate an n-type BiSeTe thin film deposited on a flexible fluorinated ethylene propylene (FEP) substrate, incorporating a Cr buffer layer, achieving a room-temperature power factor of ∼3.9 μW.cm⁻¹.K⁻², which is within the range reported for flexible thin-film TE devices on polymer substrates. The film exhibits excellent mechanical resilience, retaining 90 % of its initial conductivity after 5000 bending cycles, and shows high thermal stability over 50 heating–cooling cycles with deviations below 1.5 %. A four-leg n-type prototype generates 10 mV and 70 nW at ΔT = 40 K, demonstrating its potential for powering low-energy wearable sensors. This work presents a scalable inorganic thin-film TE platform that effectively balances mechanical flexibility, device stability, and practical energy conversion performance for wearable and localized power generation applications.

柔性热电（TE）设备通过收集人体皮肤和环境之间的温差，为可穿戴电子设备供电，前景广阔。传统的Bi2Te3虽然效率高，但在灵活应用方面存在刚性和局限性，而有机替代品通常缺乏足够的TE性能。在这里，我们展示了一种n型BiSeTe薄膜沉积在柔性氟化乙丙烯（FEP）衬底上，包含Cr缓冲层，实现了约3.9 μW.cm−1的室温功率因数。K−2，这是报道的范围内的柔性薄膜TE器件在聚合物衬底。该薄膜表现出优异的机械回弹性，在5000次弯曲循环后保持90 %的初始导电性，并在50次加热-冷却循环中表现出高的热稳定性，偏差低于1.5 %。四腿n型原型机在ΔT = 40 K时产生10 mV和70 nW，展示了其为低能耗可穿戴传感器供电的潜力。这项工作提出了一个可扩展的无机薄膜TE平台，有效地平衡了机械灵活性、器件稳定性和实用的能量转换性能，适用于可穿戴和本地化发电应用。

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引用次数: 0

A tree-shaped sensing structure for the measurement of vertical soil movements in construction sites 一种用于测量建筑工地土壤垂直运动的树形传感结构

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-19 DOI: 10.1016/j.sna.2026.117503

Gabriele Di Renzone , Klaus Stefan Drese , Almut Lottmann-Löer , Marco Mugnaini , Alessandro Pozzebon

In this paper, a novel sensing structure to be used for real-time monitoring of soil movements in construction sites is proposed. The structure integrates an array of sensor nodes, to be deployed at different depths according to a tree-shaped structure. Each sensor node measures temperature, Volumetric Water Content (VWC) and soil movement, by exploiting the measurement of pressure variations exerted by a column of water on pressure sensors positioned in the soil. The structure manages the acquisition of data from each sensor node every 30 minutes and transmits it to a remote data management centre using the Long Range Wide Area Network (LoRaWAN) protocol. A prototype of the structure was designed, developed and installed at a test site in Coburg. The results acquired across several months of experimentation demonstrate the accuracy of the measurements as well as the reliability of the overall sensing structure.

本文提出了一种用于建筑工地土壤运动实时监测的新型传感结构。该结构集成了一系列传感器节点，根据树形结构部署在不同的深度。每个传感器节点测量温度，体积含水量（VWC）和土壤运动，通过利用在土壤中的压力传感器上的水柱施加的压力变化的测量。该结构每30分钟从每个传感器节点采集数据，并使用远程广域网（LoRaWAN）协议将其传输到远程数据管理中心。该结构的原型是在科堡的一个试验场设计、开发和安装的。在几个月的实验中获得的结果证明了测量的准确性以及整体传感结构的可靠性。

引用次数: 0

A hierarchical adaptive particle swarm optimizer with diversity maintenance for suppressing edge distortion in DMD lithography 基于多样性保持的分层自适应粒子群优化算法抑制DMD光刻边缘畸变

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-17 DOI: 10.1016/j.sna.2026.117512

Shengzhou Huang , Siwen He , Yongkang Shao , Dongjie Wu , Jiani Pan , Linsong Zhu , Chengcheng Sheng , Chenyi Song

Digital micromirror device (DMD) maskless lithography suffers from severe edge distortions, such as edge serration and linewidth non-uniformity, primarily due to the discrete nature of micromirrors and optical diffraction effects. These distortions significantly degrade imaging fidelity, posing a major challenge for high-precision applications. While particle swarm optimization (PSO) is a promising solution for mask optimization, its traditional form often succumbs to premature convergence in high-dimensional problems. To address this, we propose a novel hierarchical adaptive PSO algorithm integrated with a dynamic diversity maintenance strategy. The core of our approach lies in a dynamic particle classification mechanism that divides the population into superior, medium, and inferior tiers, enabling differentiated search guidance. This is coupled with an adaptive inertia weight strategy tailored to each particle's level to balance global exploration and local exploitation. Furthermore, the algorithm incorporates a hybrid learning strategy, a subpopulation assistance mechanism, and a stagnation detection-recovery mechanism to collectively sustain population diversity and prevent premature convergence. Extensive numerical experiments on the CEC2005 and CEC2022 benchmark suites demonstrate that the enhanced PSO significantly outperforms conventional PSO in solving high-dimensional and complex optimization problems. When applied to DMD mask optimization, our method reduces pixel errors (PE) by an average of 85.2 % and achieves a maximum structural similarity (SSIM) index of 0.99. These results validate the effectiveness and practicality of our proposed algorithm in suppressing edge distortion and enhancing imaging fidelity for digital lithography.

数字微镜器件（DMD）无掩模光刻受到严重的边缘畸变，如边缘锯齿和线宽不均匀性，主要是由于微镜的离散性和光学衍射效应。这些畸变显著降低了成像保真度，对高精度应用构成了重大挑战。粒子群优化（PSO）是一种很有前途的掩模优化方法，但其传统形式在高维问题中容易过早收敛。为了解决这个问题，我们提出了一种结合动态多样性维护策略的分层自适应粒子群算法。我们的方法的核心在于一个动态的粒子分类机制，该机制将种群划分为高级，中等和低级，从而实现差异化的搜索指导。这与针对每个粒子级别定制的自适应惯性权重策略相结合，以平衡全局探索和局部开发。此外，该算法还结合了混合学习策略、亚种群辅助机制和停滞检测-恢复机制，以共同维持种群多样性并防止过早收敛。在CEC2005和CEC2022基准套件上进行的大量数值实验表明，改进的粒子群算法在解决高维复杂优化问题方面明显优于传统粒子群算法。当应用于DMD掩模优化时，我们的方法将像素误差（PE）平均降低了85.2 %，最大结构相似度（SSIM）指数为0.99。实验结果验证了该算法在抑制边缘畸变和提高数字光刻成像保真度方面的有效性和实用性。

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引用次数: 0

Highly sensitive and selective ethanol detection at low temperature via pulse laser deposited V₂O₅ thin film 通过脉冲激光沉积V₂O₅薄膜在低温下进行高灵敏度和选择性乙醇检测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-17 DOI: 10.1016/j.sna.2026.117513

Rohit Kumar , Puja Ghosh , Anurag Gupta , C.S. Prajapati

This study presents a highly sensitive, selective, and stable ethanol sensor based on an amorphous V₂O₅ thin film deposited via pulsed laser deposition technique. The sensor operates effectively at a low temperature of 100 °C under low bias voltage of 5 V, achieving a detection limit of 40 ppm. Detailed characterization of thin film sensor was investigated using XRD, TG-DTA, Raman spectroscopy, FESEM, AFM, and XPS. UV-PL spectroscopy reveals an optical band gap of 2.7 eV, further indicating the presence of oxygen vacancies. I–V measurements demonstrate Ohmic-type conduction behavior. The sensor shows a consistent and robust ethanol response of ∼106 % to 120 ppm ethanol, with rapid response and recovery times of ∼13 s and ∼19 s, respectively. It also displays exceptional selectivity over interfering gases such as CH₄, C₂H₆CO, NH₃, NO₂, and CO, with a sensitivity of approximately 100 % at lowest 40 ppm concentration. Additionally, the device maintains high repeatability and long term operational stability across multiple testing cycles and sustained monitoring over 60 days. These findings underscore the potential of amorphous V₂O₅ thin films for ethanol sensing applications in industrial safety, environmental surveillance, and medical diagnostics in breath-based disease detection.

本研究提出了一种高灵敏度，选择性和稳定的乙醇传感器，该传感器基于通过脉冲激光沉积技术沉积的无定形V₂O₅薄膜。该传感器在5 V的低偏置电压下有效工作在100°C的低温下，达到40 ppm的检测限。采用XRD、TG-DTA、拉曼光谱、FESEM、AFM和XPS对薄膜传感器进行了详细表征。紫外- pl光谱显示了2.7 eV的光学带隙，进一步表明了氧空位的存在。I-V测量显示欧姆型传导行为。该传感器对乙醇的响应为~ 106 %至120 ppm乙醇，具有一致和稳健的乙醇响应，快速响应和恢复时间分别为~ 13 s和~ 19 s。它还对CH₄，C₂H₆CO, NH₃，NO₂和CO等干扰气体表现出优异的选择性，在最低40 ppm浓度下，灵敏度约为100% %。此外，该设备在多个测试周期和超过60天的持续监测中保持高重复性和长期运行稳定性。这些发现强调了无定形V₂O₅薄膜在工业安全，环境监测和基于呼吸的疾病检测中的医疗诊断中的乙醇传感应用的潜力。

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引用次数: 0

Theoretical analysis and design improvement of nonlinearity in capacitive accelerometers 电容式加速度计非线性特性的理论分析与设计改进

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-16 DOI: 10.1016/j.sna.2026.117480

Jiacheng Li , Rui Feng , Ming Zhou , Xinlian Shang , Xiaoyi Wang , Huikai Xie

This paper systematically conducts theoretical analysis, structural improvement design, finite element simulation verification, and mathematical compensation model research focusing on the nonlinear characteristics of capacitive comb-drive accelerometers. First, the structural design and fabrication process of the accelerometer are presented. Then, the generation mechanism of nonlinear errors is theoretically analyzed from three dimensions: structural design, fabrication error, and testing. Research results show that: the mass bias displacement, unilateral deformation of the substrate, and installation errors significantly increase the sensitivity asymmetry of the accelerometer, further leading to the deterioration of nonlinearity. This paper proposes a single-anchor layout design with parallel arrangement in the sensing direction. Finite element simulation confirms that the nonlinearity of the improved accelerometer caused by mass bias displacement is reduced by 96.36 %; under the same substrate bending amount, the nonlinearity of the improved accelerometer is reduced by 34.72 %. To address the installation error issue, a corresponding mathematical compensation model is constructed. Within the operating range of comb finger gap variation of ±7 %, the nonlinearity of the compensated open-loop accelerometer is reduced by 67.11 %, which can be stably controlled below 900 ppm.

本文针对电容式梳状驱动加速度计的非线性特性，系统地进行了理论分析、结构改进设计、有限元仿真验证和数学补偿模型研究。首先介绍了加速度计的结构设计和制造过程。然后从结构设计、制造误差和测试三个维度对非线性误差的产生机理进行了理论分析。研究结果表明：质量偏置位移、基片单边变形、安装误差等因素显著增加了加速度计的灵敏度不对称性，进一步导致非线性恶化。本文提出了一种传感方向平行布置的单锚点布局设计。有限元仿真结果表明，改进后的加速度计由质量偏差位移引起的非线性降低了96.36 %；在基材弯曲量相同的情况下，改进后的加速度计非线性度降低了34.72 %。针对安装误差问题，建立了相应的数学补偿模型。在梳指间隙变化±7 %的工作范围内，补偿后的开环加速度计的非线性降低了67.11 %，可稳定控制在900 ppm以下。

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引用次数: 0