Sensors and Actuators A-physical最新文献_第5页

Theoretical analysis and design improvement of nonlinearity in capacitive accelerometers 电容式加速度计非线性特性的理论分析与设计改进

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-16 DOI: 10.1016/j.sna.2026.117480

Jiacheng Li , Rui Feng , Ming Zhou , Xinlian Shang , Xiaoyi Wang , Huikai Xie

This paper systematically conducts theoretical analysis, structural improvement design, finite element simulation verification, and mathematical compensation model research focusing on the nonlinear characteristics of capacitive comb-drive accelerometers. First, the structural design and fabrication process of the accelerometer are presented. Then, the generation mechanism of nonlinear errors is theoretically analyzed from three dimensions: structural design, fabrication error, and testing. Research results show that: the mass bias displacement, unilateral deformation of the substrate, and installation errors significantly increase the sensitivity asymmetry of the accelerometer, further leading to the deterioration of nonlinearity. This paper proposes a single-anchor layout design with parallel arrangement in the sensing direction. Finite element simulation confirms that the nonlinearity of the improved accelerometer caused by mass bias displacement is reduced by 96.36 %; under the same substrate bending amount, the nonlinearity of the improved accelerometer is reduced by 34.72 %. To address the installation error issue, a corresponding mathematical compensation model is constructed. Within the operating range of comb finger gap variation of ±7 %, the nonlinearity of the compensated open-loop accelerometer is reduced by 67.11 %, which can be stably controlled below 900 ppm.

本文针对电容式梳状驱动加速度计的非线性特性，系统地进行了理论分析、结构改进设计、有限元仿真验证和数学补偿模型研究。首先介绍了加速度计的结构设计和制造过程。然后从结构设计、制造误差和测试三个维度对非线性误差的产生机理进行了理论分析。研究结果表明：质量偏置位移、基片单边变形、安装误差等因素显著增加了加速度计的灵敏度不对称性，进一步导致非线性恶化。本文提出了一种传感方向平行布置的单锚点布局设计。有限元仿真结果表明，改进后的加速度计由质量偏差位移引起的非线性降低了96.36 %；在基材弯曲量相同的情况下，改进后的加速度计非线性度降低了34.72 %。针对安装误差问题，建立了相应的数学补偿模型。在梳指间隙变化±7 %的工作范围内，补偿后的开环加速度计的非线性降低了67.11 %，可稳定控制在900 ppm以下。

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引用次数: 0

Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance 利用石英晶体微天平对等离子体处理室进行空间分辨实时监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-22 DOI: 10.1016/j.sna.2026.117508

Ji Eun Kang , Ho Gon Kim , Sun Jae Jeong , Hye Won Han , Si Yeon Kim , Ga Hee Oh , Da Hun Ko , Dong Woo Kim , Geun Young Yeom

Precise control of chamber conditions is critical for ensuring the reproducibility and stability of semiconductor plasma processes. Conventional monitoring methods, however, often fail to provide accurate, localized real-time feedback, leading to process drift. This study demonstrates a real-time, spatially resolved monitoring system using quartz crystal microbalance (QCM) sensors to track the deposited materials’ accumulation and removal during SiO_x plasma enhanced atomic layer deposition (PEALD) and subsequent NF₃/Ar plasma cleaning. By installing sensors at the chamber wall, floor, and exhaust line, we revealed the highly non-uniform nature of material deposition on various locations of the deposition system and confirmed that relying on a single-point end point detection (EPD) results in incomplete cleaning in other regions. Detailed analysis correlated distinct changes in the QCM frequency slope with the morphological evolution of deposited materials—from a continuous film to islands and discrete particles—as validated by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). Furthermore, a direct comparison confirmed the QCM's superior capability over conventional Optical Emission Spectroscopy (OES) for providing a clear and stable localized EPD. The system’s versatility is further highlighted by its ability to operate in non-plasma zones where diagnostics like OES are limited. This work establishes spatially resolved QCM sensing as a powerful method for accurate chamber management, offering significant potential to enhance process reproducibility and efficiency in advanced semiconductor manufacturing.

精确控制腔室条件是确保半导体等离子体过程的再现性和稳定性的关键。然而，传统的监测方法往往不能提供准确的、局部的实时反馈，导致过程漂移。该研究展示了一种实时、空间分辨率的监测系统，该系统使用石英晶体微平衡（QCM）传感器来跟踪SiOx等离子体增强原子层沉积（PEALD）和随后的NF₃/Ar等离子体清洗过程中沉积材料的积累和去除。通过在室壁、地板和排气管道安装传感器，我们揭示了沉积系统不同位置的材料沉积高度不均匀的性质，并证实了依赖单点终点检测（EPD）会导致其他区域的不完全清洁。通过扫描电子显微镜（SEM）和x射线光电子能谱（XPS）的验证，详细分析了QCM频率斜率的明显变化与沉积材料的形态演变相关——从连续的薄膜到岛屿和离散的颗粒。此外，直接比较证实了QCM在提供清晰和稳定的局部EPD方面优于传统的光学发射光谱（OES）。该系统的多功能性进一步凸显了它在非等离子体层的工作能力，在这种情况下，OES等诊断方法有限。这项工作建立了空间分辨QCM传感作为精确腔室管理的强大方法，为提高先进半导体制造过程的可重复性和效率提供了巨大的潜力。

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引用次数: 0

A tree-shaped sensing structure for the measurement of vertical soil movements in construction sites 一种用于测量建筑工地土壤垂直运动的树形传感结构

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-19 DOI: 10.1016/j.sna.2026.117503

Gabriele Di Renzone , Klaus Stefan Drese , Almut Lottmann-Löer , Marco Mugnaini , Alessandro Pozzebon

In this paper, a novel sensing structure to be used for real-time monitoring of soil movements in construction sites is proposed. The structure integrates an array of sensor nodes, to be deployed at different depths according to a tree-shaped structure. Each sensor node measures temperature, Volumetric Water Content (VWC) and soil movement, by exploiting the measurement of pressure variations exerted by a column of water on pressure sensors positioned in the soil. The structure manages the acquisition of data from each sensor node every 30 minutes and transmits it to a remote data management centre using the Long Range Wide Area Network (LoRaWAN) protocol. A prototype of the structure was designed, developed and installed at a test site in Coburg. The results acquired across several months of experimentation demonstrate the accuracy of the measurements as well as the reliability of the overall sensing structure.

本文提出了一种用于建筑工地土壤运动实时监测的新型传感结构。该结构集成了一系列传感器节点，根据树形结构部署在不同的深度。每个传感器节点测量温度，体积含水量（VWC）和土壤运动，通过利用在土壤中的压力传感器上的水柱施加的压力变化的测量。该结构每30分钟从每个传感器节点采集数据，并使用远程广域网（LoRaWAN）协议将其传输到远程数据管理中心。该结构的原型是在科堡的一个试验场设计、开发和安装的。在几个月的实验中获得的结果证明了测量的准确性以及整体传感结构的可靠性。

引用次数: 0

Plexcitonics: Plasmon–exciton coupling of ZnO/Au heterostructure film for improving discrete particle detection 多激子学：用于改善离散粒子检测的ZnO/Au异质结构薄膜的等离激子-激子耦合

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-23 DOI: 10.1016/j.sna.2026.117523

Qais M. Al-Bataineh , Ahmad A. Ahmad , A.B. Migdadi , Lina A. Alakhras , Oana Brincoveanu , Alexandra Mocanu , Gabriela Toader , Ahmad D. Telfah , Roland Hergenröder

Plexcitonics, an interdisciplinary field focused on the study of plasmon-exciton coupling, is rapidly evolving and holds significant promise for advancing optical and optoelectronic devices. Experimental observations and mechanistic investigations of the plexcitonic phenomenon of ZnO/Au heterostructure film based on propagating surface plasmon polaritons in the gold layer and excitons confined within a continuous ZnO layer are presented using detailed characterizations. Diverging from conventional localized plasmon systems, this work establishes that the high electron affinity and static permittivity of the ZnO layer induce deep quantum spillover of metallic electrons, drastically increasing plasmon energy dissipation. Using the Thomas-Fermi approximation to model the interfacial electronics, we theoretically confirm that this spillover leads to a stronger spatial confinement and an effective compression of the SPP evanescent field. As a main application for plexcitons, a wide-field surface plasmon resonance microscope based on ZnO/Au heterostructure film is introduced to enhance the sensitivity of discrete particle detection. The ZnO/Au heterostructure film achieved a remarkable enhancement in the detection signal, resulting in a maximum intensity of 110 a.u. (Au control) to 190 a.u. for 100 nm silica nanoparticles. Our results provide insight into the enhancement of sensitivity and capabilities of discrete particle detection across a range of biomedical applications.

多激子学是一个专注于等离子体-激子耦合研究的跨学科领域，它正在迅速发展，对推进光学和光电子器件具有重要的前景。本文对ZnO/Au异质结构薄膜的多激子现象进行了实验观察和机理研究，该多激子现象是基于在金层中传播的表面等离子激子和限制在连续ZnO层中的激子。与传统的局域等离子体系统不同，本研究建立了ZnO层的高电子亲和力和静态介电常数诱导金属电子的深度量子溢出，急剧增加等离子体的能量耗散。利用Thomas-Fermi近似来模拟界面电子学，我们从理论上证实了这种溢出导致了更强的空间约束和SPP消失场的有效压缩。为了提高离散粒子检测的灵敏度，提出了一种基于ZnO/Au异质结构薄膜的宽场表面等离子体共振显微镜作为多激子的主要应用。ZnO/Au异质结构薄膜对探测信号有显著增强，最大强度达到110 a.u。（Au控制）至190 a.u。对于100 纳米二氧化硅纳米颗粒。我们的研究结果为提高灵敏度和离散粒子检测在一系列生物医学应用中的能力提供了见解。

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引用次数: 0

A novel bidirectional high overload piezoresistive differential pressure sensor based on topology optimization 一种基于拓扑优化的新型双向高过载压阻差压传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117540

Meng Li , Xiaochen Yang , Xiangyue Meng , Dong Li , Huifeng Qiu , Liqun Du

To improve the overload capacity of piezoresistive differential pressure sensors (PDPS), this paper presents a bidirectional high overload PDPS based on topology optimization. The topology optimization design goal of the PDPS is maximum stiffness, and the constraint condition is maximum stress. The stress distribution, full scale output, and maximum stress value of topology-optimized and C-type membranes are analyzed using the finite-element method (FEM). FEM analyses demonstrated that, compared to conventional C-type membrane, a significant increase in overload capacity can be achieved by the proposed topology-optimized membrane. The silicon-based PDPS with bidirectional high overload is fabricated by microelectromechanical systems (MEMS) silicon technology. The measurement results reveal that the fabricated PDPS with the topology-optimized membrane has a burst pressure of 8.43 times the full scale and a sensitivity of 0.14 (mV/V/kPa) for a pressure range of 0–100 kPa. Compared to the conventional C-type membrane PDPS, the topology-optimized membrane increased the overload capacity by 33.6 % (the simulation result is 32.2 %) under the same full scale (100 kPa) and sensitivity (0.14 ± 0.01 mV/V/kPa). These results suggest that the new topology-optimized membrane is suitable for MEMS pressure sensors used in bidirectional overload measurement environments.

为了提高压阻式压差传感器的过载能力，提出了一种基于拓扑优化的双向高过载压差传感器。PDPS的拓扑优化设计目标是最大刚度，约束条件是最大应力。采用有限元法对拓扑优化膜和c型膜的应力分布、满量程输出和最大应力值进行了分析。有限元分析表明，与传统的c型膜相比，该拓扑优化膜的过载能力显著提高。采用微机电系统（MEMS）硅技术制备了双向高过载的硅基PDPS。测试结果表明，在0 ~ 100 kPa的压力范围内，经拓扑优化的膜的破裂压力为满量程的8.43倍，灵敏度为0.14 （mV/V/kPa）。在相同满尺度（100 kPa）和灵敏度（0.14 ± 0.01 mV/V/kPa）下，与传统c型膜相比，拓扑优化膜的过载能力提高了33.6 %（仿真结果为32.2 %）。这些结果表明，新的拓扑优化膜适用于用于双向过载测量环境的MEMS压力传感器。

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引用次数: 0

Smart bioelectronics glucometer with CNT/MXene-FET test strip decorated with silver NWs featuring alarm functionality 智能生物电子血糖仪与CNT/MXene-FET测试条装饰银色NWs报警功能

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-11 DOI: 10.1016/j.sna.2026.117486

Milad Farahmandpour , Daryoosh Dideban , Masoomeh Monfared Dehbali , Zoheir Kordrostami

This study presents the development of an advanced smart bioelectronic glucometer featuring CNT/MXene-FET test strips with Ag NWs decoration and integrated alarm functionality. Three types of FET-based test strips were fabricated, each incorporating different channel materials: Multi-Walled Carbon Nanotubes (MWCNT), Ag NWs/MWCNT, and MXene/Ag NWs/MWCNT. The glucometer, leveraging IoT technology, transmits real-time glucose data to mobile devices, provides alarm notifications, and displays glucose levels and their intensities via an OLED screen. The use of MXene/Ag NWs/MWCNT as a tri-material channel yields a unique combination of high sensitivity, wide linear range, and rapid gating dynamics. Characterization reveals unique interfacial charge transfer at the MXene/Ag NWs/MWCNT junctions that underpins the observed high sensitivity and selectivity. The sensor exhibited two linear ranges (1–100 µM and 100 µM–20 mM) with high sensitivities of 13200 µA.mM⁻¹ and 200 µA.mM⁻¹ , LOD of 0.1 µM along with excellent reproducibility, repeatability, and stability. Validation with real blood samples from 20 volunteers confirmed its efficacy, demonstrating precise glucose monitoring suitable for clinical applications. MARD (Mean Absolute Relative Difference) results ranged from 0 % to 2.532 %, with the lowest MARD reaching 0 % in one test-strip lot. Distribution analysis showed that 60 % of strips exhibited a MARD below 1 %. This integrated platform offers a reliable, portable, and real-time solution for diabetes management.

本研究介绍了一种先进的智能生物电子血糖仪的开发，该血糖仪具有CNT/MXene-FET测试条，带有Ag NWs装饰和集成报警功能。制备了三种基于fet的测试条，每种测试条都包含不同的通道材料：多壁碳纳米管（MWCNT）， Ag NWs/MWCNT和MXene/Ag NWs/MWCNT。该血糖仪利用物联网技术，将实时血糖数据传输到移动设备，提供警报通知，并通过OLED屏幕显示血糖水平及其强度。使用MXene/Ag NWs/MWCNT作为三材料通道产生高灵敏度，宽线性范围和快速门控动力学的独特组合。表征揭示了MXene/Ag NWs/MWCNT结处独特的界面电荷转移，这支撑了观察到的高灵敏度和选择性。该传感器具有两个线性范围（1-100 µM和100µM - 20 µM），灵敏度高达13200 µA。mM⁻¹ 和200年 µ。mM⁻¹ ，LOD为0.1 µM，具有良好的重现性、重复性和稳定性。20名志愿者的真实血液样本验证了其有效性，证明了其适合临床应用的精确血糖监测。MARD（平均绝对相对差）结果的范围为0 % ~ 2.532 %，其中一个试纸批次的MARD最低达到0 %。分布分析表明，60 %的条带MARD低于1 %。该集成平台为糖尿病管理提供了可靠、便携和实时的解决方案。

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引用次数: 0

Design and fabrication of high-density flexible two-dimensional ultrasonic arrays based on staggered-layer stacking process technology 基于交错层堆积工艺技术的高密度柔性二维超声阵列的设计与制造

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-02-03 DOI: 10.1016/j.sna.2026.117551

Yirui Li , Jia Cao , Yiran Wu , Bo Wang , Zhe Zhang , Jiaxing Peng , Yaoyang Zhang , Jianzhong Chen , Weicen Chen , Xiang Li , Tao Zhou , Dawei Wu

To address the challenges of complex manufacturing, high cost, and low reliability in existing two-dimensional flexible phased array ultrasound devices, this paper proposes an innovative process based on staggered-layer stacking process technology. This process enables high-density flexible interconnections for full electrodes while effectively reducing manufacturing costs and maintaining excellent flexibility and reliability. By optimizing the electrode layout and element interconnection scheme, the process ensures superior electrical performance and mechanical robustness even under high-density element arrangements. Based on this innovative process, a 10 × 10 element two-dimensional flexible phased array with a center frequency of 1 MHz was successfully developed. Experimental results demonstrate a maximum crosstalk of - 43.2 dB between adjacent array elements, which is significantly lower than that of commercial transducers. While maintaining high flexibility, the device exhibits outstanding ultrasonic modulation capability. Owing to these advantages, the device shows great potential for diverse biomedical and therapeutic applications, especially in flexible wearable ultrasound systems, ultrasound-mediated stimulation, and focused therapeutic treatments.

针对现有二维柔性相控阵超声器件制造复杂、成本高、可靠性低等问题，提出了一种基于交错层叠加工艺技术的创新工艺。该工艺可实现全电极的高密度柔性互连，同时有效降低制造成本并保持优异的灵活性和可靠性。通过优化电极布局和元件互连方案，即使在高密度元件布置下，该工艺也能确保优越的电气性能和机械稳健性。基于这一创新工艺，成功研制了中心频率为1 MHz的10 × 10元二维柔性相控阵。实验结果表明，相邻阵列元件之间的最大串扰为- 43.2 dB，显著低于商用换能器。在保持高灵活性的同时，该器件表现出出色的超声波调制能力。由于这些优点，该设备在各种生物医学和治疗应用方面显示出巨大的潜力，特别是在柔性可穿戴超声系统，超声介导刺激和集中治疗治疗方面。

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引用次数: 0

Piezoelectric-driven soft robotics: Multifunctional materials, actuation mechanisms, challenges, and future prospects 压电驱动软体机器人：多功能材料、驱动机制、挑战与未来展望

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-02-02 DOI: 10.1016/j.sna.2026.117552

Ritik Raj , Jia-Yang Juang

Piezoelectric actuation offers a distinctive pathway for soft robotic systems by enabling precise, fast, and energy-efficient motion within compliant structures. Through direct and converse electromechanical coupling, piezoelectric materials allow actuation, sensing, and energy transduction to be inherently integrated, differentiating them from conventional rigid and fluidic actuation approaches. This review provides an overview of recent advances in piezoelectric materials, actuator architectures, and integrated soft robotic systems, with emphasis on flexible ceramics, polymeric and composite hybrids, and lead-free and biodegradable alternatives. The review examines different classes of piezoelectric materials and their functional roles in soft robotic actuation, sensing, and system integration. It surveys applications spanning locomotion and soft grippers, precision manufacturing and optical systems, as well as biomedical and wearable soft robotic platforms. Beyond material development, the review discusses system-level integration aspects, including hybrid actuation, embedded sensing, low-voltage operation, and data-driven approaches, which support the development of more efficient and integrated soft robotic systems. Persistent challenges such as hysteresis, creep, limited strain output, and power consumption are discussed alongside representative mitigation strategies including nonlinear compensation, learning-based control, and resonant operation. The review also outlines future research directions that emphasize sustainable material choices and improved control frameworks. By synthesizing developments in piezoelectric materials and actuation strategies, this review clarifies their role in advancing biomedical and human-interactive soft robotic technologies.

压电驱动通过在柔性结构内实现精确、快速和节能的运动，为软机器人系统提供了一条独特的途径。通过直接和反向机电耦合，压电材料允许驱动、传感和能量传导内在地集成在一起，将它们与传统的刚性和流体驱动方法区分开来。本文综述了压电材料、致动器结构和集成软机器人系统的最新进展，重点介绍了柔性陶瓷、聚合物和复合材料、无铅和可生物降解替代品。本文综述了不同类型的压电材料及其在软机器人驱动、传感和系统集成中的功能作用。它调查了运动和软抓取器，精密制造和光学系统，以及生物医学和可穿戴软机器人平台的应用。除了材料开发之外，该综述还讨论了系统级集成方面，包括混合驱动、嵌入式传感、低压操作和数据驱动方法，这些都支持开发更高效和集成的软机器人系统。讨论了迟滞、蠕变、有限应变输出和功耗等持续存在的挑战，以及具有代表性的缓解策略，包括非线性补偿、基于学习的控制和谐振操作。该综述还概述了强调可持续材料选择和改进控制框架的未来研究方向。通过综合压电材料和驱动策略的发展，本文综述了它们在推进生物医学和人机交互软机器人技术中的作用。

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引用次数: 0

Flexible actuators with photothermal-responsive and humidity-responsive properties via electrohydrodynamic direct writing 通过电流体动力直接写入具有光热响应和湿度响应特性的柔性执行器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117538

Mengqin Zhang, Libing Zhang, Ting Wu, Haijun Song

Single-function flexible actuators have limitations in practical dynamic environmental interactions, restricting their application potential in smart materials and soft robotics. To address this issue, a bilayer actuator composed of MXene (Ti₃C₂Tₓ)/carboxylated cellulose nanofibers (cCNFs) and polyethylene (PE) was successfully fabricated. The fabrication process involved integrating MXene and cCNFs as functional layers via near-field electrohydrodynamic (EHD) direct-write printing, followed by lamination with commercial PE tape. This actuator exhibits dual-responsive properties to both photothermal stimulation and humidity variation. Characterization results show that the introduction of cCNF increased the interlayer spacing of MXene, effectively inhibiting MXene nanosheet stacking between nanosheets, while significantly enhancing the mechanical properties of the composite film. Performance tests demonstrate excellent dual-responsive characteristics: in terms of photothermal response, MXene converts near-infrared (NIR) light energy into thermal energy. The bending deformation is induced by utilizing the difference in thermal expansion coefficients (CTE) between the MXene/cCNF layer and the PE layer, combined with the moisture desorption effect of the MXene/cCNF layer. Among the samples, MXene/cCNF-PE with MXene of 0.3 g (MC3-PE) exhibits optimal performance, with a maximum bending curvature of 3.46 cm⁻¹ under 400 mW·cm⁻² NIR irradiation. In a relative humidity (RH) range of 50 % - 80 %, the MXene/cCNF layer generated internal stress via water absorption and swelling, while the hydrophobic PE layer maintains structural stability, thereby driving the actuator to bend. The maximum bending curvature of MC3-PE reaches 3.14 cm⁻¹ . This study provides a feasible strategy for the preparation of multi-responsive flexible actuators, which hold broad application prospects in intelligent regulation, environmental interaction, and micromechanical systems.

单功能柔性执行器在实际动态环境交互中存在局限性，限制了其在智能材料和软机器人领域的应用潜力。为了解决这一问题，成功制备了由MXene （Ti₃C₂Tₓ）/羧化纤维素纳米纤维（cCNFs）和聚乙烯（PE）组成的双层致动器。制造过程包括通过近场电流体动力（EHD）直写打印将MXene和cCNFs集成为功能层，然后用商用PE胶带层压。该致动器表现出对光热刺激和湿度变化的双重响应特性。表征结果表明，cCNF的引入增加了MXene的层间间距，有效抑制了MXene纳米片在纳米片之间的堆积，同时显著提高了复合膜的力学性能。性能测试显示了优异的双响应特性：在光热响应方面，MXene将近红外（NIR）光能转换为热能。利用MXene/cCNF层与PE层之间的热膨胀系数（CTE）差，结合MXene/cCNF层的吸湿效应诱导弯曲变形。其中MXene为0.3 g的MXene/cCNF-PE （MC3-PE）在400 mW·cm⁻²NIR照射下的最大弯曲曲率为3.46 cm⁻¹ ，表现出最佳的性能。在相对湿度（RH）为50 % ~ 80 %的范围内，MXene/cCNF层通过吸水和膨胀产生内应力，而疏水性PE层保持结构稳定，从而驱动致动器弯曲。MC3-PE的最大弯曲曲率为3.14 cm⁻¹ 。本研究为多响应柔性作动器的制备提供了一种可行的策略，在智能调节、环境交互、微机械系统等方面具有广阔的应用前景。

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引用次数: 0

Design and application of multimodal visual-tactile sensor for object information perception 面向物体信息感知的多模态视触觉传感器的设计与应用

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-29 DOI: 10.1016/j.sna.2026.117529

Shixin Wang, Ling Weng, Lanyang Hao, Shichao Zuo, Zipeng Yang, Mingyuan Wang, Xiaotao Du

Aiming at the problem of single perception modality in existing tactile sensing systems, this paper designs and implements a multimodal visual-tactile sensor tailored for robotic grasping. This sensor adopts a modular hierarchical design and integrates three functional modules: the texture perception layer, the temperature and force perception layer, and the visual perception layer. The texture perception layer achieves high-precision 3D shape reconstruction through translucent elastomer and a dual-layer surface reflection coating, with a mean absolute error (MAE) of 0.0512 mm. The temperature and force perception layer utilizes thermochromic materials and a 5 × 7 marking point array to achieve temperature and multi-dimensional force perception respectively, among which the response time of the thermochromic material is 0.1 s and the recovery time is 0.2 s. The visual perception layer adopts transparent PDMS material to ensure visual information acquisition in a non-contact state. By integrating sensors into the UR5e robotic arm system and combining the YOLOv11 object detection algorithm with ArUco visual positioning technology, a complete vision-guided robotic grasping system was constructed. Through the grasping experiments with three distinct fruit types, namely mandarin, lychee, and nectarine, the effectiveness of the multimodal collaborative perception was validated across object recognition, pose detection, texture reconstruction, and temperature and force perception. The experimental results demonstrate that this sensor enables comprehensive information acquisition ranging from macro-level scene understanding to micro-level contact details. This improves the environment adaptability and operational precision of robots while optimizing robotic tactile perception technology.

针对现有触觉传感系统感知模式单一的问题，设计并实现了一种适合机器人抓取的多模态视触觉传感器。该传感器采用模块化分层设计，集成了纹理感知层、温度与力感知层、视觉感知层三个功能模块。纹理感知层通过半透明弹性体和双层表面反射涂层实现高精度三维形状重建，平均绝对误差（MAE）为0.0512 mm。温度和力感知层分别利用热致变色材料和5 × 7标记点阵列实现温度和多维力感知，其中热致变色材料的响应时间为0.1 s，恢复时间为0.2 s。视觉感知层采用透明PDMS材料，确保在非接触状态下获取视觉信息。通过将传感器集成到UR5e机械臂系统中，并将YOLOv11目标检测算法与ArUco视觉定位技术相结合，构建了完整的视觉引导机器人抓取系统。通过柑橘、荔枝和油桃三种不同水果类型的抓取实验，验证了多模态协同感知在物体识别、姿态检测、纹理重建、温度和力感知等方面的有效性。实验结果表明，该传感器能够实现从宏观层面的场景理解到微观层面的接触细节的综合信息采集。在优化机器人触觉感知技术的同时，提高了机器人的环境适应性和操作精度。

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