Sensors and Actuators A-physical最新文献

英文中文

Bio-inspired acoustic MEMS sensor with tunable resonance frequency

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116369

Vishal Gubbi , Tzvetan Ivanov , Kalpan Ved , Claudia Lenk , Martin Ziegler

A microelectromechanical system (MEMS) – based acoustic sensor with adaptive bandpass characteristics is presented, i.e. its resonance frequency can be dynamically modified by up to 25 % using relatively small bias voltages (<1 V). This allows for a frequency analysis of sound in hardware, for covering larger frequency ranges with a single sensor while retaining high quality factors, adapting the sensor for optimum detection performance under different conditions and compensating for mismatches due to fabrication tolerances. To achieve this, we utilize geometric nonlinearity effects through incorporating a clamped-clamped micromechanical beam. We show that for the fabricated sensors, DC actuation changes pre-deflection of the clamped-clamped beam and this pre-deflection changes the resonance frequency of the sensor. To adjust the design parameters, such as geometry, we developed a model, based on the Duffing oscillator equation, which describes the sensor’s nonlinear dynamics, including hardening/softening behavior due to an applied static deflection. We demonstrate the application of the frequency tunability for compensating fabrication variabilities (here thickness variation) and for analysis of frequency components in an applied sound signal. This principle of dynamic frequency tuning and hardware-based frequency analysis using a single MEMS sensor demonstrates potential for applications in (bio-inspired) acoustic sensing, gas flow sensing, and other sensing tasks requiring adaptive, tunable bandpass characteristics and for (adaptive) sensor (oscillator) networks.

{"title":"Bio-inspired acoustic MEMS sensor with tunable resonance frequency","authors":"Vishal Gubbi , Tzvetan Ivanov , Kalpan Ved , Claudia Lenk , Martin Ziegler","doi":"10.1016/j.sna.2025.116369","DOIUrl":"10.1016/j.sna.2025.116369","url":null,"abstract":"<div><div>A microelectromechanical system (MEMS) – based acoustic sensor with adaptive bandpass characteristics is presented, i.e. its resonance frequency can be dynamically modified by up to 25 % using relatively small bias voltages (<1 V). This allows for a frequency analysis of sound in hardware, for covering larger frequency ranges with a single sensor while retaining high quality factors, adapting the sensor for optimum detection performance under different conditions and compensating for mismatches due to fabrication tolerances. To achieve this, we utilize geometric nonlinearity effects through incorporating a clamped-clamped micromechanical beam. We show that for the fabricated sensors, DC actuation changes pre-deflection of the clamped-clamped beam and this pre-deflection changes the resonance frequency of the sensor. To adjust the design parameters, such as geometry, we developed a model, based on the Duffing oscillator equation, which describes the sensor’s nonlinear dynamics, including hardening/softening behavior due to an applied static deflection. We demonstrate the application of the frequency tunability for compensating fabrication variabilities (here thickness variation) and for analysis of frequency components in an applied sound signal. This principle of dynamic frequency tuning and hardware-based frequency analysis using a single MEMS sensor demonstrates potential for applications in (bio-inspired) acoustic sensing, gas flow sensing, and other sensing tasks requiring adaptive, tunable bandpass characteristics and for (adaptive) sensor (oscillator) networks.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"387 ","pages":"Article 116369"},"PeriodicalIF":4.1,"publicationDate":"2025-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143529233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Continuous blood pressure monitoring based on flexible CNT/Ecoflex porous composite materials

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116370

Jipeng Wang, Lizhong Xu

Currently, cardiovascular diseases such as hypertension and heart disease are one of the main causes of death. The existing blood pressure monitoring devices have a large volume or cannot achieve continuous blood pressure monitoring, which limits their application in early prevention. Here, a wearable health monitoring sensor based on CNT/Ecoflex porous composite material and pulse wave characteristic parameter prediction blood pressure model is proposed, which can achieve uninterrupted monitoring of blood pressure and heart rate. Based on the sensor, the predicted mean and standard deviations of systolic blood pressure (SBP) and diastolic blood pressure (DBP) from results of the standard blood pressure meter are 0.600 ± 4.251 and 0.580 ± 4.103 mm Hg, respectively. Based on this sensor, a portable device is developed for long-term blood pressure monitoring during human movement, which helps with early prevention and remote diagnosis.

引用次数: 0

Cold plasma-based dual cathode anemometer for simultaneous air speed and flow angle sensing

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116368

Dina Issa Falah Abu-Hassan , Holden King Ho Li , Ahjeong Son , Beelee Chua

Cold plasma-based dual cathode anemometer was used to achieve the simultaneous sensing of air speed and flow angle. Cold plasma (corona discharge) was incepted with high voltage of 2500–2800 V using a pin anode and dual plane cathodes. Ion clouds were formed between the anode and cathodes and were displaced upon interaction with air flow. The ion displacement manifest as changes in cathode currents and thus output voltages across the series resistors. Using air speeds of 0.09–2.72 m/s directed at flow angles of −30° to 30°, the output voltage responses showed adequate uniqueness to distinguish between different air speeds and flow angles. Since the responses are coupled, the output voltage sum and ratio between the two cathodes were calculated and used as metrics. The output voltage sum predominantly represented the air speed while the output voltage ratio primarily indicated the flow angle. These two metrics could be used as inputs into an iterative scheme to determine the air speed and flow angle. The proposed anemometer also had stable zero flow response and was robust to sudden air flow stop because it did not have moving parts. Given its tiny sensing volume of 3.2 × 3.2 × 3.0 mm³ and low power consumption (<25 mW), its applications can span conventional scenarios as metrology as well as recent advancements in carbon emission management and smart cities analytics.

{"title":"Cold plasma-based dual cathode anemometer for simultaneous air speed and flow angle sensing","authors":"Dina Issa Falah Abu-Hassan , Holden King Ho Li , Ahjeong Son , Beelee Chua","doi":"10.1016/j.sna.2025.116368","DOIUrl":"10.1016/j.sna.2025.116368","url":null,"abstract":"<div><div>Cold plasma-based dual cathode anemometer was used to achieve the simultaneous sensing of air speed and flow angle. Cold plasma (corona discharge) was incepted with high voltage of 2500–2800 V using a pin anode and dual plane cathodes. Ion clouds were formed between the anode and cathodes and were displaced upon interaction with air flow. The ion displacement manifest as changes in cathode currents and thus output voltages across the series resistors. Using air speeds of 0.09–2.72 m/s directed at flow angles of −30° to 30°, the output voltage responses showed adequate uniqueness to distinguish between different air speeds and flow angles. Since the responses are coupled, the output voltage sum and ratio between the two cathodes were calculated and used as metrics. The output voltage sum predominantly represented the air speed while the output voltage ratio primarily indicated the flow angle. These two metrics could be used as inputs into an iterative scheme to determine the air speed and flow angle. The proposed anemometer also had stable zero flow response and was robust to sudden air flow stop because it did not have moving parts. Given its tiny sensing volume of 3.2 × 3.2 × 3.0 mm<sup>3</sup> and low power consumption (<25 mW), its applications can span conventional scenarios as metrology as well as recent advancements in carbon emission management and smart cities analytics.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"387 ","pages":"Article 116368"},"PeriodicalIF":4.1,"publicationDate":"2025-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143519925","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Highly selective, low-temperature NH3 sensor based on spherical CuO and influence of its oxygen vacancy in sensing

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116384

Hongmin Zhu , Zhan Cheng , Fangling Zhou , Lu Kong , Zhenyu Yuan , Yanbai Shen , Fanli Meng

With the advent of the smart era, resistive semiconductor sensors present great promise for constructing sensing networks to deploy the Internet of Things for collecting air quality information. With the advent of the smart era, resistive semiconductor sensors present great promise for constructing sensing networks to deploy the Internet of Things for collecting air quality information. Oxygen vacancies affect the electronic structure of materials and give rise to unique physicochemical properties, which profoundly affect the sensing performance of the sensor. Peculiar phenomena and mechanisms of CuO oxygen vacancies have rarely been reported in gas sensitization. In this work, the oxygen vacancy-rich porous spherical CuO is prepared by thermal solvent reduction method. Moreover, the effect of oxygen vacancies is investigated on the electronic structure and electrical properties of CuO. Moreover, the sensing mechanism of oxygen vacancy with ammonia gas is explained by X-ray photoelectron spectroscopy (XPS) and density functional theory (DFT). The gas sensing results show that the response (631 %) of the synthesized oxygen vacancy-rich CuO-triethylene glycol (CuO-T) sensor to 100 ppm ammonia is 8.4 times higher than that of CuO-water (CuO-W) with a lower detection limit of 0.5 ppm at 200℃. The response of CuO-T sensor to ammonia gas is at least 19 times that of other gases, and has good humidity immunity. The designed CuO-T sensor has promising industrial applications. Meanwhile, the insightful understanding of CuO oxygen vacancies on electronic structure and electrical properties contributes to the design of high-performance ammonia sensors.

{"title":"Highly selective, low-temperature NH3 sensor based on spherical CuO and influence of its oxygen vacancy in sensing","authors":"Hongmin Zhu , Zhan Cheng , Fangling Zhou , Lu Kong , Zhenyu Yuan , Yanbai Shen , Fanli Meng","doi":"10.1016/j.sna.2025.116384","DOIUrl":"10.1016/j.sna.2025.116384","url":null,"abstract":"<div><div>With the advent of the smart era, resistive semiconductor sensors present great promise for constructing sensing networks to deploy the Internet of Things for collecting air quality information. With the advent of the smart era, resistive semiconductor sensors present great promise for constructing sensing networks to deploy the Internet of Things for collecting air quality information. Oxygen vacancies affect the electronic structure of materials and give rise to unique physicochemical properties, which profoundly affect the sensing performance of the sensor. Peculiar phenomena and mechanisms of CuO oxygen vacancies have rarely been reported in gas sensitization. In this work, the oxygen vacancy-rich porous spherical CuO is prepared by thermal solvent reduction method. Moreover, the effect of oxygen vacancies is investigated on the electronic structure and electrical properties of CuO. Moreover, the sensing mechanism of oxygen vacancy with ammonia gas is explained by X-ray photoelectron spectroscopy (XPS) and density functional theory (DFT). The gas sensing results show that the response (631 %) of the synthesized oxygen vacancy-rich CuO-triethylene glycol (CuO-T) sensor to 100 ppm ammonia is 8.4 times higher than that of CuO-water (CuO-W) with a lower detection limit of 0.5 ppm at 200℃. The response of CuO-T sensor to ammonia gas is at least 19 times that of other gases, and has good humidity immunity. The designed CuO-T sensor has promising industrial applications. Meanwhile, the insightful understanding of CuO oxygen vacancies on electronic structure and electrical properties contributes to the design of high-performance ammonia sensors.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"387 ","pages":"Article 116384"},"PeriodicalIF":4.1,"publicationDate":"2025-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143534804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A lightweight gas classification and concentration prediction method based on PTQ-CNN by using an electronic nose system

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116382

Yuanhu Zeng , Zhencheng Liu , Zhenyu Liu , Xiaoyan Peng , Hao Cui , Jia Yan , Shukai Duan , Lidan Wang , Jin Chu

As a device for gas detection, electronic nose (E-nose) has been widely used in many fields. In recent years, the emergence of deep learning has greatly improved the gas detection accuracy. However, numerous parameters make it difficult to deploy deep learning algorithms, hindering the real-world application of the E-nose. In this work, we designed a convolutional neural network (CNN) and post-training quantization (PTQ) was used to compress the model size to obtain a lightweight model. First, we designed an E-nose and an efficient gas data acquisition platform to collect sufficient gas data containing four different categories of gas for model training. In the process of designing the CNN, the effects of batch size, data length and number of convolutional kernels on the performance of the model have been discussed to obtain the best performance of the CNN. Then, using the PTQ to compress the CNN model, a lightweight model PTQ-CNN is obtained. The experimental results show that CNN still maintains a high accuracy in performing the tasks of concentration prediction and gas classification after being compressed by 3.75 × . Specifically, the average values of R², MAE and MSE of PTQ-CNN for gas concentration prediction were 0.993, 1.524 and 5.856, respectively, and the classification accuracy of the gas reached 99.89 %.

{"title":"A lightweight gas classification and concentration prediction method based on PTQ-CNN by using an electronic nose system","authors":"Yuanhu Zeng , Zhencheng Liu , Zhenyu Liu , Xiaoyan Peng , Hao Cui , Jia Yan , Shukai Duan , Lidan Wang , Jin Chu","doi":"10.1016/j.sna.2025.116382","DOIUrl":"10.1016/j.sna.2025.116382","url":null,"abstract":"<div><div>As a device for gas detection, electronic nose (E-nose) has been widely used in many fields. In recent years, the emergence of deep learning has greatly improved the gas detection accuracy. However, numerous parameters make it difficult to deploy deep learning algorithms, hindering the real-world application of the E-nose. In this work, we designed a convolutional neural network (CNN) and post-training quantization (PTQ) was used to compress the model size to obtain a lightweight model. First, we designed an E-nose and an efficient gas data acquisition platform to collect sufficient gas data containing four different categories of gas for model training. In the process of designing the CNN, the effects of batch size, data length and number of convolutional kernels on the performance of the model have been discussed to obtain the best performance of the CNN. Then, using the PTQ to compress the CNN model, a lightweight model PTQ-CNN is obtained. The experimental results show that CNN still maintains a high accuracy in performing the tasks of concentration prediction and gas classification after being compressed by 3.75 × . Specifically, the average values of R<sup>2</sup>, MAE and MSE of PTQ-CNN for gas concentration prediction were 0.993, 1.524 and 5.856, respectively, and the classification accuracy of the gas reached 99.89 %.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"386 ","pages":"Article 116382"},"PeriodicalIF":4.1,"publicationDate":"2025-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143487935","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A combined sensor and a switch based on a chemiresistive material coupled with a resonant microbeam

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-24 DOI: 10.1016/j.sna.2025.116389

Hasan Albatayneh , Mohammad Matahen , Fahimullah Khan , Arron Kishlock , Zhishuo Yan , Danling Wang , Mohammad I. Younis

Despite the remarkable advancements to develop low-cost low-energy individual chemiresistive sensors, the complete sensor-actuator systems remain complex due to the implementation of energy-hungry components, such as transmitters, microcontrollers, and analog-to-digital and digital-to-analog converters. In an effort to alleviate this problem, we introduce a simple sensor-actuator platform by electrically coupling a chemiresistive material with a clamped-clamped microbeam and utilizing the nonlinear instabilities of buckling and pull-in. As a case study, we demonstrate the concept using the chemiresistive material Ti₃C₂T_x MXene for humidity sensing and actuation. The device can trigger actions when exceeding a pre-determined relative humidity (RH) threshold. It can also function as a sensor with a quasi-digital resonance frequency output in the sensing mode. Analytical results based on the Galerkin approach are obtained and compared to the experimental data. The results indicate that as RH levels increase, the coupled system of the chemiresistive material with the resonator has more sensitivity compared to the individual chemiresistive sensor. Simulation results are shown to demonstrate the capability of tuning and adjusting the switching thresholds to meet various application needs.

{"title":"A combined sensor and a switch based on a chemiresistive material coupled with a resonant microbeam","authors":"Hasan Albatayneh , Mohammad Matahen , Fahimullah Khan , Arron Kishlock , Zhishuo Yan , Danling Wang , Mohammad I. Younis","doi":"10.1016/j.sna.2025.116389","DOIUrl":"10.1016/j.sna.2025.116389","url":null,"abstract":"<div><div>Despite the remarkable advancements to develop low-cost low-energy individual chemiresistive sensors, the complete sensor-actuator systems remain complex due to the implementation of energy-hungry components, such as transmitters, microcontrollers, and analog-to-digital and digital-to-analog converters. In an effort to alleviate this problem, we introduce a simple sensor-actuator platform by electrically coupling a chemiresistive material with a clamped-clamped microbeam and utilizing the nonlinear instabilities of buckling and pull-in. As a case study, we demonstrate the concept using the chemiresistive material Ti<sub>3</sub>C<sub>2</sub>T<sub>x</sub> MXene for humidity sensing and actuation. The device can trigger actions when exceeding a pre-determined relative humidity (RH) threshold. It can also function as a sensor with a quasi-digital resonance frequency output in the sensing mode. Analytical results based on the Galerkin approach are obtained and compared to the experimental data. The results indicate that as RH levels increase, the coupled system of the chemiresistive material with the resonator has more sensitivity compared to the individual chemiresistive sensor. Simulation results are shown to demonstrate the capability of tuning and adjusting the switching thresholds to meet various application needs.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"387 ","pages":"Article 116389"},"PeriodicalIF":4.1,"publicationDate":"2025-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143509273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Review of fibre optic hydrophones for potential application in offshore carbon storage monitoring

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-21 DOI: 10.1016/j.sna.2025.116341

M. Hadeed , H.S. Bhatti , A.M. Aizzuddin , E. Vorathin , H. Mohamad

This review paper explores the advancements in fibre optic hydrophones for their potential application in offshore carbon storage monitoring. As global carbon dioxide (CO₂) emissions continue to rise, carbon capture and storage (CCS) technology has gained widespread attention for its role in reducing CO₂ levels in the atmosphere. Conventional electrical hydrophones are commonly used for monitoring offshore carbon storage reservoirs via seismic acquisition. However, superior advantages such as immunity to electromagnetic interference and the capability for long-range multiplexing position fibre optic sensors (FOSs) as promising candidates for seismic monitoring in carbon storage applications. Therefore, this paper provides a comprehensive review of various fibre optic hydrophones categorized by their working principles including Mach-Zehnder interferometric (MZI), Michelson interferometric (MI), Sagnac interferometric (SI), Fabry-Perot interferometric (FPI), fibre laser sensors and other sensors. Each type of sensor is analysed based on its design, operating frequency range, responsivity or sensitivity and minimum detectable pressure (MDP). The review concludes with a discussion on the future prospects of fibre optic hydrophones for offshore carbon storage monitoring highlighting their potential and challenges in CCS applications.

{"title":"Review of fibre optic hydrophones for potential application in offshore carbon storage monitoring","authors":"M. Hadeed , H.S. Bhatti , A.M. Aizzuddin , E. Vorathin , H. Mohamad","doi":"10.1016/j.sna.2025.116341","DOIUrl":"10.1016/j.sna.2025.116341","url":null,"abstract":"<div><div>This review paper explores the advancements in fibre optic hydrophones for their potential application in offshore carbon storage monitoring. As global carbon dioxide (CO<sub>2</sub>) emissions continue to rise, carbon capture and storage (CCS) technology has gained widespread attention for its role in reducing CO<sub>2</sub> levels in the atmosphere. Conventional electrical hydrophones are commonly used for monitoring offshore carbon storage reservoirs via seismic acquisition. However, superior advantages such as immunity to electromagnetic interference and the capability for long-range multiplexing position fibre optic sensors (FOSs) as promising candidates for seismic monitoring in carbon storage applications. Therefore, this paper provides a comprehensive review of various fibre optic hydrophones categorized by their working principles including Mach-Zehnder interferometric (MZI), Michelson interferometric (MI), Sagnac interferometric (SI), Fabry-Perot interferometric (FPI), fibre laser sensors and other sensors. Each type of sensor is analysed based on its design, operating frequency range, responsivity or sensitivity and minimum detectable pressure (MDP). The review concludes with a discussion on the future prospects of fibre optic hydrophones for offshore carbon storage monitoring highlighting their potential and challenges in CCS applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"386 ","pages":"Article 116341"},"PeriodicalIF":4.1,"publicationDate":"2025-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143508146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Compact MEMS-based sensor for refractive index monitoring of liquids

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-21 DOI: 10.1016/j.sna.2025.116328

Thomas Handte , Sebastian Bohm , Boris Goj , Lars Dittrich , Erich Runge , Stefan Sinzinger

This work introduces and verifies a novel sensor design for measuring the refractive index of liquids. Due to the compact size and efficient fabrication, this type of sensor is specifically suited, e. g. as part of industrial condition monitoring, for the continuous determination of liquid mixture concentrations. Utilizing micro-electromechanical systems (MEMS) technology, the sensor combines cost-effective manufacturing, robustness, and versatility in liquid characterization. The measurement is based on the different degrees of reflection of a collimated light beam at different positions along a curved interface between the silicon platform and the liquid. As a result, the beam undergoes an overall approximately linear intensity loss, which is highly sensitive to the refractive index of the medium to be analyzed. The measuring range and sensitivity of the sensor can be adjusted to accommodate various applications. This paper presents detailed design principles, outlines the manufacturing process, and supports analytical considerations with rigorous numerical simulations. Experimental studies conducted using various mixtures of water with solvents such as Ethylene Glycol and Glycerol (commonly used as an industrial coolants) confirm the viability of the sensor system for real-world applications, highlighting its potential as a reliable tool for condition monitoring in liquid-based systems.

{"title":"Compact MEMS-based sensor for refractive index monitoring of liquids","authors":"Thomas Handte , Sebastian Bohm , Boris Goj , Lars Dittrich , Erich Runge , Stefan Sinzinger","doi":"10.1016/j.sna.2025.116328","DOIUrl":"10.1016/j.sna.2025.116328","url":null,"abstract":"<div><div>This work introduces and verifies a novel sensor design for measuring the refractive index of liquids. Due to the compact size and efficient fabrication, this type of sensor is specifically suited, e.g. as part of industrial condition monitoring, for the continuous determination of liquid mixture concentrations. Utilizing micro-electromechanical systems (MEMS) technology, the sensor combines cost-effective manufacturing, robustness, and versatility in liquid characterization. The measurement is based on the different degrees of reflection of a collimated light beam at different positions along a curved interface between the silicon platform and the liquid. As a result, the beam undergoes an overall approximately linear intensity loss, which is highly sensitive to the refractive index of the medium to be analyzed. The measuring range and sensitivity of the sensor can be adjusted to accommodate various applications. This paper presents detailed design principles, outlines the manufacturing process, and supports analytical considerations with rigorous numerical simulations. Experimental studies conducted using various mixtures of water with solvents such as Ethylene Glycol and Glycerol (commonly used as an industrial coolants) confirm the viability of the sensor system for real-world applications, highlighting its potential as a reliable tool for condition monitoring in liquid-based systems.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"386 ","pages":"Article 116328"},"PeriodicalIF":4.1,"publicationDate":"2025-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143480560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

AlN-based solid mounted resonators functionalized with WO3 films for NO detection

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-21 DOI: 10.1016/j.sna.2025.116355

José Manuel Carmona-Cejas, Teona Mirea, Jimena Olivares, Ricardo Hervás, Marta Clement

This work presents the design, manufacture and characterization of nitric oxide (NO) sensors operating at high temperatures. The sensors rely on AlN-based solidly mounted resonators (SMRs) as transduction devices. WO₃ films are sputtered under different deposition conditions on the upper electrode of the devices to act as functionalization layers. We assess the topography and crystallinity of the layers before and after an annealing process of 350 °C for 12 h in air, observing a dominant monoclinic phase without significant degradation of the Q factor after such process. The characterization of the SMR sensors indicates that sub ppm detection can be achieved by all the studied configurations in the 200–300 °C range, with two of the sensors achieving high sensitivities even at 350 °C. The highest values reported are 5.32 kHz/ppm and 5.48 kHz/ppm for resonant and anti-resonant frequencies at 200 °C.

引用次数: 0

Dynamics of the aging process of field emission from an array of p-type pyramidal Si emitters

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2025-02-21 DOI: 10.1016/j.sna.2025.116356

Anatoly G. Kolosko , Gleb D. Demin , Eugeni O. Popov , Sergei V. Filippov , Ilya D. Evsikov , Bogdan V. Lobanov , Nikolay A. Djuzhev

The emission characteristics of a cathode consisting of an array of p-type Si pyramidal field emitters have been studied. Using advanced computerized technique for a comprehensive analysis of the properties of field emission structures, the process of activation of emission sites, operation of the cathode in the mode of relative stability of the current level, as well as field emission in the mode of extreme and unstable currents were analyzed. The field emission orthodoxy test demonstrated the difficulty of describing the performance of Si tips using the classical Murphy-Good theoretical formalism for metals. Using Morgulis-Stratton theory, which takes into account the features of field-electron emission from the semiconductor, a simulation of the properties of the cathode under consideration was carried out, and analysis of its experimental current-voltage characteristics was performed. The calculated field enhancement factor at the top of the Si pyramidal field emitter coincided with the value obtained from the experiment with high accuracy.

{"title":"Dynamics of the aging process of field emission from an array of p-type pyramidal Si emitters","authors":"Anatoly G. Kolosko , Gleb D. Demin , Eugeni O. Popov , Sergei V. Filippov , Ilya D. Evsikov , Bogdan V. Lobanov , Nikolay A. Djuzhev","doi":"10.1016/j.sna.2025.116356","DOIUrl":"10.1016/j.sna.2025.116356","url":null,"abstract":"<div><div>The emission characteristics of a cathode consisting of an array of p-type Si pyramidal field emitters have been studied. Using advanced computerized technique for a comprehensive analysis of the properties of field emission structures, the process of activation of emission sites, operation of the cathode in the mode of relative stability of the current level, as well as field emission in the mode of extreme and unstable currents were analyzed. The field emission orthodoxy test demonstrated the difficulty of describing the performance of Si tips using the classical Murphy-Good theoretical formalism for metals. Using Morgulis-Stratton theory, which takes into account the features of field-electron emission from the semiconductor, a simulation of the properties of the cathode under consideration was carried out, and analysis of its experimental current-voltage characteristics was performed. The calculated field enhancement factor at the top of the Si pyramidal field emitter coincided with the value obtained from the experiment with high accuracy.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"386 ","pages":"Article 116356"},"PeriodicalIF":4.1,"publicationDate":"2025-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143480629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

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