Sensors and Actuators A-physical最新文献_第2页

Plexcitonics: Plasmon–exciton coupling of ZnO/Au heterostructure film for improving discrete particle detection 多激子学：用于改善离散粒子检测的ZnO/Au异质结构薄膜的等离激子-激子耦合

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-23 DOI: 10.1016/j.sna.2026.117523

Qais M. Al-Bataineh , Ahmad A. Ahmad , A.B. Migdadi , Lina A. Alakhras , Oana Brincoveanu , Alexandra Mocanu , Gabriela Toader , Ahmad D. Telfah , Roland Hergenröder

Plexcitonics, an interdisciplinary field focused on the study of plasmon-exciton coupling, is rapidly evolving and holds significant promise for advancing optical and optoelectronic devices. Experimental observations and mechanistic investigations of the plexcitonic phenomenon of ZnO/Au heterostructure film based on propagating surface plasmon polaritons in the gold layer and excitons confined within a continuous ZnO layer are presented using detailed characterizations. Diverging from conventional localized plasmon systems, this work establishes that the high electron affinity and static permittivity of the ZnO layer induce deep quantum spillover of metallic electrons, drastically increasing plasmon energy dissipation. Using the Thomas-Fermi approximation to model the interfacial electronics, we theoretically confirm that this spillover leads to a stronger spatial confinement and an effective compression of the SPP evanescent field. As a main application for plexcitons, a wide-field surface plasmon resonance microscope based on ZnO/Au heterostructure film is introduced to enhance the sensitivity of discrete particle detection. The ZnO/Au heterostructure film achieved a remarkable enhancement in the detection signal, resulting in a maximum intensity of 110 a.u. (Au control) to 190 a.u. for 100 nm silica nanoparticles. Our results provide insight into the enhancement of sensitivity and capabilities of discrete particle detection across a range of biomedical applications.

多激子学是一个专注于等离子体-激子耦合研究的跨学科领域，它正在迅速发展，对推进光学和光电子器件具有重要的前景。本文对ZnO/Au异质结构薄膜的多激子现象进行了实验观察和机理研究，该多激子现象是基于在金层中传播的表面等离子激子和限制在连续ZnO层中的激子。与传统的局域等离子体系统不同，本研究建立了ZnO层的高电子亲和力和静态介电常数诱导金属电子的深度量子溢出，急剧增加等离子体的能量耗散。利用Thomas-Fermi近似来模拟界面电子学，我们从理论上证实了这种溢出导致了更强的空间约束和SPP消失场的有效压缩。为了提高离散粒子检测的灵敏度，提出了一种基于ZnO/Au异质结构薄膜的宽场表面等离子体共振显微镜作为多激子的主要应用。ZnO/Au异质结构薄膜对探测信号有显著增强，最大强度达到110 a.u。（Au控制）至190 a.u。对于100 纳米二氧化硅纳米颗粒。我们的研究结果为提高灵敏度和离散粒子检测在一系列生物医学应用中的能力提供了见解。

{"title":"Plexcitonics: Plasmon–exciton coupling of ZnO/Au heterostructure film for improving discrete particle detection","authors":"Qais M. Al-Bataineh , Ahmad A. Ahmad , A.B. Migdadi , Lina A. Alakhras , Oana Brincoveanu , Alexandra Mocanu , Gabriela Toader , Ahmad D. Telfah , Roland Hergenröder","doi":"10.1016/j.sna.2026.117523","DOIUrl":"10.1016/j.sna.2026.117523","url":null,"abstract":"<div><div>Plexcitonics, an interdisciplinary field focused on the study of plasmon-exciton coupling, is rapidly evolving and holds significant promise for advancing optical and optoelectronic devices. Experimental observations and mechanistic investigations of the plexcitonic phenomenon of ZnO/Au heterostructure film based on propagating surface plasmon polaritons in the gold layer and excitons confined within a continuous ZnO layer are presented using detailed characterizations. Diverging from conventional localized plasmon systems, this work establishes that the high electron affinity and static permittivity of the ZnO layer induce deep quantum spillover of metallic electrons, drastically increasing plasmon energy dissipation. Using the Thomas-Fermi approximation to model the interfacial electronics, we theoretically confirm that this spillover leads to a stronger spatial confinement and an effective compression of the SPP evanescent field. As a main application for plexcitons, a wide-field surface plasmon resonance microscope based on ZnO/Au heterostructure film is introduced to enhance the sensitivity of discrete particle detection. The ZnO/Au heterostructure film achieved a remarkable enhancement in the detection signal, resulting in a maximum intensity of 110 a.u. (Au control) to 190 a.u. for 100 nm silica nanoparticles. Our results provide insight into the enhancement of sensitivity and capabilities of discrete particle detection across a range of biomedical applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117523"},"PeriodicalIF":4.9,"publicationDate":"2026-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Vibration characteristics of hemispherical shell resonators with coaxial error 含同轴误差的半球形壳体谐振腔振动特性

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-23 DOI: 10.1016/j.sna.2026.117506

Longkai Zheng , Shurui Wen , Fengming Li

Coaxial error of hemispherical shell resonators (HSRs) is commonly caused by machining, which can significantly influence the frequency splitting and the symmetry of mode shapes of the HSRs, ultimately affecting the performance of the resonators. This study aims to analyze the influences of coaxial error on the frequency splitting and mode shapes of the HSRs using both analytical and experimental techniques. The coaxial error is quantitatively characterized by establishing the relationship between the deviation distance e₁ and the center angle φ_a of the HSR. The analytical model of the HSR with coaxial error is established by applying Hamilton’s principle, and the vibration characteristics are conveniently analyzed. Taking into account the mass impact of the acceleration sensors, the natural frequencies, frequency splitting values, and mode shapes are obtained and compared by using the established analytical model, the finite element method (FEM) and the experimental tests, from which the accuracy of the established analytical model is also verified. The effects of the deviation distance on the vibration properties of the HSR are discussed in detail. The key contributions of this paper are the establishment of the theoretical model and the design of the modal experiments for HSRs with coaxial error, which provide references for future researches in related fields.

半球壳谐振器的同轴误差通常是由加工引起的，它会严重影响半球壳谐振器的分频和模态振型的对称性，最终影响谐振器的性能。本研究旨在利用分析和实验两种方法分析同轴误差对高磁谐振器的分频和模态振型的影响。通过建立高铁偏心距离e1与圆心角φa之间的关系，定量表征了同轴误差。应用Hamilton原理建立了含同轴误差高铁的解析模型，便于分析其振动特性。在考虑加速度传感器质量冲击的情况下，通过建立的解析模型、有限元法和实验测试，得到了加速度传感器的固有频率、分频值和振型，并进行了比较，验证了所建立解析模型的准确性。详细讨论了偏差距离对高铁振动性能的影响。本文的主要贡献在于建立了含同轴误差高铁的理论模型和模态实验设计，为今后相关领域的研究提供了参考。

{"title":"Vibration characteristics of hemispherical shell resonators with coaxial error","authors":"Longkai Zheng , Shurui Wen , Fengming Li","doi":"10.1016/j.sna.2026.117506","DOIUrl":"10.1016/j.sna.2026.117506","url":null,"abstract":"<div><div>Coaxial error of hemispherical shell resonators (HSRs) is commonly caused by machining, which can significantly influence the frequency splitting and the symmetry of mode shapes of the HSRs, ultimately affecting the performance of the resonators. This study aims to analyze the influences of coaxial error on the frequency splitting and mode shapes of the HSRs using both analytical and experimental techniques. The coaxial error is quantitatively characterized by establishing the relationship between the deviation distance <em>e</em><sub>1</sub> and the center angle <em>φ</em><sub><em>a</em></sub> of the HSR. The analytical model of the HSR with coaxial error is established by applying Hamilton’s principle, and the vibration characteristics are conveniently analyzed. Taking into account the mass impact of the acceleration sensors, the natural frequencies, frequency splitting values, and mode shapes are obtained and compared by using the established analytical model, the finite element method (FEM) and the experimental tests, from which the accuracy of the established analytical model is also verified. The effects of the deviation distance on the vibration properties of the HSR are discussed in detail. The key contributions of this paper are the establishment of the theoretical model and the design of the modal experiments for HSRs with coaxial error, which provide references for future researches in related fields.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117506"},"PeriodicalIF":4.9,"publicationDate":"2026-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance 利用石英晶体微天平对等离子体处理室进行空间分辨实时监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-22 DOI: 10.1016/j.sna.2026.117508

Ji Eun Kang , Ho Gon Kim , Sun Jae Jeong , Hye Won Han , Si Yeon Kim , Ga Hee Oh , Da Hun Ko , Dong Woo Kim , Geun Young Yeom

Precise control of chamber conditions is critical for ensuring the reproducibility and stability of semiconductor plasma processes. Conventional monitoring methods, however, often fail to provide accurate, localized real-time feedback, leading to process drift. This study demonstrates a real-time, spatially resolved monitoring system using quartz crystal microbalance (QCM) sensors to track the deposited materials’ accumulation and removal during SiO_x plasma enhanced atomic layer deposition (PEALD) and subsequent NF₃/Ar plasma cleaning. By installing sensors at the chamber wall, floor, and exhaust line, we revealed the highly non-uniform nature of material deposition on various locations of the deposition system and confirmed that relying on a single-point end point detection (EPD) results in incomplete cleaning in other regions. Detailed analysis correlated distinct changes in the QCM frequency slope with the morphological evolution of deposited materials—from a continuous film to islands and discrete particles—as validated by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). Furthermore, a direct comparison confirmed the QCM's superior capability over conventional Optical Emission Spectroscopy (OES) for providing a clear and stable localized EPD. The system’s versatility is further highlighted by its ability to operate in non-plasma zones where diagnostics like OES are limited. This work establishes spatially resolved QCM sensing as a powerful method for accurate chamber management, offering significant potential to enhance process reproducibility and efficiency in advanced semiconductor manufacturing.

精确控制腔室条件是确保半导体等离子体过程的再现性和稳定性的关键。然而，传统的监测方法往往不能提供准确的、局部的实时反馈，导致过程漂移。该研究展示了一种实时、空间分辨率的监测系统，该系统使用石英晶体微平衡（QCM）传感器来跟踪SiOx等离子体增强原子层沉积（PEALD）和随后的NF₃/Ar等离子体清洗过程中沉积材料的积累和去除。通过在室壁、地板和排气管道安装传感器，我们揭示了沉积系统不同位置的材料沉积高度不均匀的性质，并证实了依赖单点终点检测（EPD）会导致其他区域的不完全清洁。通过扫描电子显微镜（SEM）和x射线光电子能谱（XPS）的验证，详细分析了QCM频率斜率的明显变化与沉积材料的形态演变相关——从连续的薄膜到岛屿和离散的颗粒。此外，直接比较证实了QCM在提供清晰和稳定的局部EPD方面优于传统的光学发射光谱（OES）。该系统的多功能性进一步凸显了它在非等离子体层的工作能力，在这种情况下，OES等诊断方法有限。这项工作建立了空间分辨QCM传感作为精确腔室管理的强大方法，为提高先进半导体制造过程的可重复性和效率提供了巨大的潜力。

{"title":"Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance","authors":"Ji Eun Kang , Ho Gon Kim , Sun Jae Jeong , Hye Won Han , Si Yeon Kim , Ga Hee Oh , Da Hun Ko , Dong Woo Kim , Geun Young Yeom","doi":"10.1016/j.sna.2026.117508","DOIUrl":"10.1016/j.sna.2026.117508","url":null,"abstract":"<div><div>Precise control of chamber conditions is critical for ensuring the reproducibility and stability of semiconductor plasma processes. Conventional monitoring methods, however, often fail to provide accurate, localized real-time feedback, leading to process drift. This study demonstrates a real-time, spatially resolved monitoring system using quartz crystal microbalance (QCM) sensors to track the deposited materials’ accumulation and removal during SiO<sub><em>x</em></sub> plasma enhanced atomic layer deposition (PEALD) and subsequent NF₃/Ar plasma cleaning. By installing sensors at the chamber wall, floor, and exhaust line, we revealed the highly non-uniform nature of material deposition on various locations of the deposition system and confirmed that relying on a single-point end point detection (EPD) results in incomplete cleaning in other regions. Detailed analysis correlated distinct changes in the QCM frequency slope with the morphological evolution of deposited materials—from a continuous film to islands and discrete particles—as validated by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). Furthermore, a direct comparison confirmed the QCM's superior capability over conventional Optical Emission Spectroscopy (OES) for providing a clear and stable localized EPD. The system’s versatility is further highlighted by its ability to operate in non-plasma zones where diagnostics like OES are limited. This work establishes spatially resolved QCM sensing as a powerful method for accurate chamber management, offering significant potential to enhance process reproducibility and efficiency in advanced semiconductor manufacturing.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117508"},"PeriodicalIF":4.9,"publicationDate":"2026-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A high-performance piezoelectric MEMS microspeaker with flexible spring-patterned cantilevers 一种具有弹性弹簧悬臂梁的高性能压电MEMS微扬声器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-22 DOI: 10.1016/j.sna.2026.117522

Ning Deng , Xinyu Ding , Xudong Ma , Hui Shang , Jin Xu , Ke Cao , Kangfu Chen , Huikai Xie

This study presents a quasi-closed—flexible cantilever spring piezoelectric MEMS speaker structure based on the design of the 3 mm × 3 mm diaphragm in a quasi-enclosed cantilever spring structure. To mitigate the problem of low-frequency acoustic leakage, which arises from the differential strain between the central diaphragm and the outer diaphragm, a 2μm thick parylene C flexible film was employed. This parylene film resulted in the formation of a quasi-closed flexible cantilever spring structure, effectively enhancing the acoustic seal. The device can achieve the SPL output of more than 94 dB in the full frequency range of 20 Hz-20 kHz onwards for actuation voltages of 10 V_pp & 5 V_DC. In addition, the THD peak at high frequency harmonics is effectively reduced by controlling the output phase of the dual electrodes of the diaphragm. The experimental findings underscore the critical role of phase difference in enhancing the acoustic characteristics of piezoelectric MEMS speakers. By fine-tuning the phase difference of the driver signal within a designated frequency spectrum, there is a notable reduction in the THD near the resonant frequency, alongside the preservation of a high output sound pressure level. This research offers a robust framework and an innovative optimization strategy aimed at enhancing the acoustic output of piezoelectric MEMS loudspeakers across their entire frequency spectrum.

基于准封闭悬臂弹簧结构中3 mm × 3 mm膜片的设计，提出了一种准封闭柔性悬臂弹簧压电MEMS扬声器结构。为了解决由中心膜片和外膜片之间的应变差引起的低频声泄漏问题，采用了2μm厚的聚对二甲苯柔性薄膜。这种聚对二甲苯薄膜形成了一种准封闭的柔性悬臂弹簧结构，有效地增强了声密封性。当驱动电压为10 Vpp &； 5 VDC时，该器件可以在20 Hz-20 kHz以上的全频率范围内实现超过94 dB的声压级输出。此外，通过控制膜片双电极的输出相位，有效地降低了高频谐波处的THD峰值。实验结果强调了相位差对提高压电MEMS扬声器声学特性的重要作用。通过在指定频谱内微调驱动信号的相位差，在谐振频率附近的THD显著降低，同时保持高输出声压级。本研究提供了一个强大的框架和创新的优化策略，旨在提高压电MEMS扬声器在整个频谱上的声输出。

{"title":"A high-performance piezoelectric MEMS microspeaker with flexible spring-patterned cantilevers","authors":"Ning Deng , Xinyu Ding , Xudong Ma , Hui Shang , Jin Xu , Ke Cao , Kangfu Chen , Huikai Xie","doi":"10.1016/j.sna.2026.117522","DOIUrl":"10.1016/j.sna.2026.117522","url":null,"abstract":"<div><div>This study presents a quasi-closed—flexible cantilever spring piezoelectric MEMS speaker structure based on the design of the 3 mm × 3 mm diaphragm in a quasi-enclosed cantilever spring structure. To mitigate the problem of low-frequency acoustic leakage, which arises from the differential strain between the central diaphragm and the outer diaphragm, a 2μm thick parylene C flexible film was employed. This parylene film resulted in the formation of a quasi-closed flexible cantilever spring structure, effectively enhancing the acoustic seal. The device can achieve the SPL output of more than 94 dB in the full frequency range of 20 Hz-20 kHz onwards for actuation voltages of 10 V<sub><em>pp</em></sub> & 5 V<sub><em>DC</em></sub>. In addition, the THD peak at high frequency harmonics is effectively reduced by controlling the output phase of the dual electrodes of the diaphragm. The experimental findings underscore the critical role of phase difference in enhancing the acoustic characteristics of piezoelectric MEMS speakers. By fine-tuning the phase difference of the driver signal within a designated frequency spectrum, there is a notable reduction in the THD near the resonant frequency, alongside the preservation of a high output sound pressure level. This research offers a robust framework and an innovative optimization strategy aimed at enhancing the acoustic output of piezoelectric MEMS loudspeakers across their entire frequency spectrum.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117522"},"PeriodicalIF":4.9,"publicationDate":"2026-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Investigation on parallel-sensing properties of metal rubber under compression loading based on electrical resistance change 基于电阻变化的压缩载荷下金属橡胶并联传感性能研究

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-22 DOI: 10.1016/j.sna.2026.117496

Chen Chen , Zesen Yuan , Yang Liu , Suchao Li , Wensong Zhou

Metal rubber (MR) is widely employed in structural vibration control and impact mitigation. A macroscopic electromechanical model of MR is derived in this study to investigate its parallel-sensing capability along with the original mechanical properties. The mechanical and electrical behavior of MR are first investigated using uniaxial compression and cyclic loading tests. The observed correlations between electrical resistance and mechanical responses are then applied to develop a macroscale electromechanical model of MR and propose methods for the identification of MR resistance, force, and displacement. Finally, the feasibility of using the electromechanical model to realize the parallel-sensing of MR is verified and evaluated. The results indicate that the electrical resistance of MR decreases with increasing wire diameter and nominal density, but increases with specimen thickness. Moreover, specimens with higher nominal density exhibit a more extensive overlap in their electrical resistance–displacement curves during cyclic loading. The proposed electromechanical model exhibits high accuracy in electrical resistance identification and shows greater sensitivity and accuracy for force identification at small displacements than large displacements, with displacement identification accuracy decreasing slightly after loading/unloading inflection points. The proposed method for realizing the parallel-sensing of MR holistically demonstrated high resolution and accuracy under low-frequency vibrations, though sensitivity diminishes for high‑frequency, small‑amplitude vibrations.

金属橡胶在结构振动控制和减震中得到了广泛的应用。本文建立了磁流变体的宏观机电模型，考察了磁流变体的并行传感能力和原有的力学性能。首先通过单轴压缩和循环加载试验研究了MR的机械和电气性能。观察到的电阻和机械响应之间的相关性，然后应用于开发磁流变的宏观机电模型，并提出识别磁流变阻力、力和位移的方法。最后，对利用机电模型实现磁流变并联传感的可行性进行了验证和评价。结果表明：磁流变电阻随线径和标称密度的增大而减小，随试样厚度的增大而增大；此外，较高标称密度的试件在循环加载过程中电阻-位移曲线的重叠范围更广。所提出的机电模型在电阻识别方面具有较高的准确性，在小位移处的力识别灵敏度和精度高于大位移处，在加载/卸载拐点后位移识别精度略有下降。该方法在低频振动下整体显示出较高的分辨率和精度，但在高频、小振幅振动下灵敏度会降低。

{"title":"Investigation on parallel-sensing properties of metal rubber under compression loading based on electrical resistance change","authors":"Chen Chen , Zesen Yuan , Yang Liu , Suchao Li , Wensong Zhou","doi":"10.1016/j.sna.2026.117496","DOIUrl":"10.1016/j.sna.2026.117496","url":null,"abstract":"<div><div>Metal rubber (MR) is widely employed in structural vibration control and impact mitigation. A macroscopic electromechanical model of MR is derived in this study to investigate its parallel-sensing capability along with the original mechanical properties. The mechanical and electrical behavior of MR are first investigated using uniaxial compression and cyclic loading tests. The observed correlations between electrical resistance and mechanical responses are then applied to develop a macroscale electromechanical model of MR and propose methods for the identification of MR resistance, force, and displacement. Finally, the feasibility of using the electromechanical model to realize the parallel-sensing of MR is verified and evaluated. The results indicate that the electrical resistance of MR decreases with increasing wire diameter and nominal density, but increases with specimen thickness. Moreover, specimens with higher nominal density exhibit a more extensive overlap in their electrical resistance–displacement curves during cyclic loading. The proposed electromechanical model exhibits high accuracy in electrical resistance identification and shows greater sensitivity and accuracy for force identification at small displacements than large displacements, with displacement identification accuracy decreasing slightly after loading/unloading inflection points. The proposed method for realizing the parallel-sensing of MR holistically demonstrated high resolution and accuracy under low-frequency vibrations, though sensitivity diminishes for high‑frequency, small‑amplitude vibrations.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117496"},"PeriodicalIF":4.9,"publicationDate":"2026-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and practical evaluation of a dual-band dispersion-engineered metamaterial sensor for sensing applications 用于传感应用的双波段色散工程超材料传感器的设计与实用评估

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-22 DOI: 10.1016/j.sna.2026.117515

Md. Zikrul Bari Chowdhury , Mohammad Tariqul Islam , Mohamad A. Alawad , Mohamed Ouda , Abdulmajeed M. Alenezi

Juice adulteration, such as the addition of saccharine for profit, is a growing concern in food safety. Traditional methods for detecting such adulteration are often time-consuming, costly, and require specialized equipment. To address these limitations, this paper introduces the design, development, and experimental validation of a dispersion-engineered metamaterial-based sensor specifically focusing on the detection of juice adulteration. The proposed sensor offers a simple and efficient alternative to traditional methods, with a compact design measuring 13 × 13 mm², the sensor operates across dual frequency bands, resonating at 3 GHz and 4.95 GHz, exhibiting excellent transmission coefficients (S₂₁). The lower S-band resonance provides an optional communication mode, while the higher C-band resonance is dedicated to liquid-adulteration sensing in juice. The sensor demonstrates a high Q-factor of 95.40, with notable sensitivity. To ensure its accuracy, the sensor's performance was validated both numerically and experimentally. The S-parameters were verified using Advanced Design System (ADS) simulations, showing excellent agreement between the theoretical and practical results. Finally, this work is suitable for wireless communication and provides an efficient method for detecting adulterated juice without the need for complex laboratory procedures.

果汁掺假，如添加糖精牟利，是食品安全日益关注的问题。检测此类掺假的传统方法通常耗时、昂贵，并且需要专门的设备。为了解决这些限制，本文介绍了一种分散工程超材料传感器的设计、开发和实验验证，专门用于检测果汁掺假。该传感器为传统方法提供了一种简单而高效的替代方案，其紧凑的设计尺寸为13 × 13 mm²，传感器工作在双频段，共振频率为3 GHz和4.95 GHz，具有优异的传输系数（S21）。较低的s波段共振提供可选的通信模式，而较高的c波段共振专用于果汁中的液体掺假传感。该传感器具有95.40的高q因子，灵敏度显著。为了保证传感器的精度，对传感器的性能进行了数值和实验验证。利用先进设计系统（ADS）仿真验证了s参数，理论结果与实际结果吻合良好。最后，这项工作适用于无线通信，并提供了一种检测掺假果汁的有效方法，而无需复杂的实验室程序。

{"title":"Design and practical evaluation of a dual-band dispersion-engineered metamaterial sensor for sensing applications","authors":"Md. Zikrul Bari Chowdhury , Mohammad Tariqul Islam , Mohamad A. Alawad , Mohamed Ouda , Abdulmajeed M. Alenezi","doi":"10.1016/j.sna.2026.117515","DOIUrl":"10.1016/j.sna.2026.117515","url":null,"abstract":"<div><div>Juice adulteration, such as the addition of saccharine for profit, is a growing concern in food safety. Traditional methods for detecting such adulteration are often time-consuming, costly, and require specialized equipment. To address these limitations, this paper introduces the design, development, and experimental validation of a dispersion-engineered metamaterial-based sensor specifically focusing on the detection of juice adulteration. The proposed sensor offers a simple and efficient alternative to traditional methods, with a compact design measuring 13 × 13 mm², the sensor operates across dual frequency bands, resonating at 3 GHz and 4.95 GHz, exhibiting excellent transmission coefficients (S<sub>21</sub>). The lower S-band resonance provides an optional communication mode, while the higher C-band resonance is dedicated to liquid-adulteration sensing in juice. The sensor demonstrates a high Q-factor of 95.40, with notable sensitivity. To ensure its accuracy, the sensor's performance was validated both numerically and experimentally. The S-parameters were verified using Advanced Design System (ADS) simulations, showing excellent agreement between the theoretical and practical results. Finally, this work is suitable for wireless communication and provides an efficient method for detecting adulterated juice without the need for complex laboratory procedures.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117515"},"PeriodicalIF":4.9,"publicationDate":"2026-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and evaluation of a compact force feedback glove for virtual reality applications 用于虚拟现实应用的紧凑型力反馈手套的设计与评价

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-21 DOI: 10.1016/j.sna.2026.117514

Dapeng Chen , Haojun Ni , Juncheng Lou , Lianshun Shen , Zhong Wei , Jia Liu , Aiguo Song

The rapid advancement of Virtual Reality (VR) technology has sparked growing interest among researchers in wearable force feedback gloves for enhancing users’ perception of haptic properties of virtual objects. To provide a lightweight VR haptic solution offering sufficient force, fast and accurate response, we designed a force feedback glove based on a miniaturized Magnetorheological (MR) brake. This MR brake is designed using a simple “catheter-sinew” structure and can be constructed in a distributed manner to form the compact glove. The series-connected MR brake group can provide a maximum feedback force of 9.86 N for a single finger. To address output force discrepancies stemming from hysteresis, we implemented an adaptive fuzzy PID control strategy for precise control of the MR brake’s output force. Subsequently, we conducted three subjective perception experiments to assess the glove’s efficacy in displaying virtual object features within a VR setting. Experimental results show that the response time of the glove is 28 ms, and the accuracy rate in helping users identify the shape of virtual objects and the size information of given spheres can both reach more than 80%.

虚拟现实（VR）技术的快速发展引起了研究人员对可穿戴力反馈手套的兴趣，以增强用户对虚拟物体触觉特性的感知。为了提供一个轻量级的VR触觉解决方案，提供足够的力，快速和准确的响应，我们设计了一种基于小型化磁流变（MR）制动器的力反馈手套。这种MR制动器采用简单的“导管-肌腱”结构设计，可以以分布式方式构造，形成紧凑的手套。串联的MR制动组可以为单个手指提供最大9.86 N的反馈力。为了解决磁滞导致的输出力差异，我们实施了自适应模糊PID控制策略来精确控制磁阻制动器的输出力。随后，我们进行了三个主观感知实验，以评估手套在VR环境中显示虚拟物体特征的功效。实验结果表明，该手套的响应时间为28 ms，帮助用户识别虚拟物体形状和给定球体大小信息的准确率均可达到80%以上。

{"title":"Design and evaluation of a compact force feedback glove for virtual reality applications","authors":"Dapeng Chen , Haojun Ni , Juncheng Lou , Lianshun Shen , Zhong Wei , Jia Liu , Aiguo Song","doi":"10.1016/j.sna.2026.117514","DOIUrl":"10.1016/j.sna.2026.117514","url":null,"abstract":"<div><div>The rapid advancement of Virtual Reality (VR) technology has sparked growing interest among researchers in wearable force feedback gloves for enhancing users’ perception of haptic properties of virtual objects. To provide a lightweight VR haptic solution offering sufficient force, fast and accurate response, we designed a force feedback glove based on a miniaturized Magnetorheological (MR) brake. This MR brake is designed using a simple “catheter-sinew” structure and can be constructed in a distributed manner to form the compact glove. The series-connected MR brake group can provide a maximum feedback force of 9.86 N for a single finger. To address output force discrepancies stemming from hysteresis, we implemented an adaptive fuzzy PID control strategy for precise control of the MR brake’s output force. Subsequently, we conducted three subjective perception experiments to assess the glove’s efficacy in displaying virtual object features within a VR setting. Experimental results show that the response time of the glove is 28 ms, and the accuracy rate in helping users identify the shape of virtual objects and the size information of given spheres can both reach more than 80%.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117514"},"PeriodicalIF":4.9,"publicationDate":"2026-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Radiation-enhanced air-coupled Langevin transducer based on an acoustic black hole structure 基于声黑洞结构的辐射增强空气耦合朗格万换能器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-21 DOI: 10.1016/j.sna.2026.117500

Huiqin Chen , Yi Wang , Hao Jiang , Cheng Chen , Shuyu Lin

Traditional Langevin transducers (TLTs) are severely limited in airborne radiation efficiency due to a significant acoustic impedance mismatch with air. Furthermore, complex near-sound field results in fluctuating pressure distributions that hinder effective energy utilization. To address these limitations, we propose an acoustic black hole-integrated air-coupled Langevin transducer (ABHLT) for enhanced radiation and uniform axial sound field in the near-field region. Finite element method (FEM) simulations and experimental measurements confirm that the ABHLT generates significantly higher axial sound pressure and effectively suppresses spatial pressure fluctuations along the propagation axis in the near-field region. Compared to the TLT, the ABHLT demonstrates a 63 % increase in electroacoustic efficiency and a 62 % increase in total radiation power. These improvements stem from longitudinal-flexural mode conversion which collectively enhances acoustic matching, amplifies flexural vibration displacement, and accumulates mechanical energy. This structurally simple solution enables more effective near-field airborne applications of Langevin transducers, such as ultrasonic processing and drying.

传统的朗格万换能器（tlt）由于与空气的声阻抗不匹配，严重限制了机载辐射效率。此外，复杂的近声场导致压力分布波动，阻碍了能量的有效利用。为了解决这些限制，我们提出了一种声学黑洞集成空气耦合朗格万换能器（ABHLT），用于增强近场区域的辐射和均匀轴向声场。有限元模拟和实验测量结果证实，ABHLT在近场区域产生了明显较高的轴向声压，并有效抑制了沿传播轴方向的空间压力波动。与TLT相比，ABHLT的电声效率提高了63% %，总辐射功率提高了62% %。这些改进源于纵向-弯曲模式转换，它们共同增强了声学匹配，放大了弯曲振动位移，并积累了机械能。这种结构简单的解决方案使朗格万换能器更有效的近场机载应用，如超声波处理和干燥。

{"title":"Radiation-enhanced air-coupled Langevin transducer based on an acoustic black hole structure","authors":"Huiqin Chen , Yi Wang , Hao Jiang , Cheng Chen , Shuyu Lin","doi":"10.1016/j.sna.2026.117500","DOIUrl":"10.1016/j.sna.2026.117500","url":null,"abstract":"<div><div>Traditional Langevin transducers (TLTs) are severely limited in airborne radiation efficiency due to a significant acoustic impedance mismatch with air. Furthermore, complex near-sound field results in fluctuating pressure distributions that hinder effective energy utilization. To address these limitations, we propose an acoustic black hole-integrated air-coupled Langevin transducer (ABHLT) for enhanced radiation and uniform axial sound field in the near-field region. Finite element method (FEM) simulations and experimental measurements confirm that the ABHLT generates significantly higher axial sound pressure and effectively suppresses spatial pressure fluctuations along the propagation axis in the near-field region. Compared to the TLT, the ABHLT demonstrates a 63 % increase in electroacoustic efficiency and a 62 % increase in total radiation power. These improvements stem from longitudinal-flexural mode conversion which collectively enhances acoustic matching, amplifies flexural vibration displacement, and accumulates mechanical energy. This structurally simple solution enables more effective near-field airborne applications of Langevin transducers, such as ultrasonic processing and drying.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117500"},"PeriodicalIF":4.9,"publicationDate":"2026-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhancing the room temperature ethanol gas sensing properties of MoS2 nanospheres by compositing with WO3 nanorods 通过与WO3纳米棒复合来提高MoS2纳米球的室温乙醇气敏性能

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-21 DOI: 10.1016/j.sna.2026.117520

Vishakha Zimba, Meghana N., Jhasaketan Nayak

Molybdenum disulphide (MoS₂) occurs in two dimensional structures with large surface areas that can facilitate gas adsorptions. Gas sensing properties of MoS₂ can be significantly enhanced by coupling MoS₂ with metal oxide semiconductors. We have synthesized MoS₂/WO₃ nanocomposites by hydrothermal treatments and have utilized them for ethanol gas sensing. The morphologies and structures of MoS₂/WO₃ nanocomposites were studied by Field Emission Electron Microscopy (FESEM) and X-rays diffraction (XRD), respectively. Nanospheres of MoS₂ embedded in a sea of WO₃ nanorods were observed in the FESEM images. The XRD results confirmed that both MoS₂ and WO₃ had the hexagonal crystal structures. Transmission electron microscopy (TEM) was employed for microstructure study that revealed heterojunctions between MoS₂ nanospheres and WO₃ nanorods. The surface area of the MoS₂/WO₃ nanocomposite powder was measured by N₂ adsorption desorption method. The chemical state analysis was performed by X-rays photoelectron spectroscopy (XPS) analysis which indicated strong interfacial electronic interaction between MoS₂ and WO₃. Ethanol gas sensing properties of MoS₂/WO₃ nanocomposite based sensors were investigated at room temperature. The gas sensitivity of MoS₂/WO₃ was more than eighty times higher than that of pristine MoS₂. For ethanol gas, a maximum sensitivity of 0.37 ppm⁻¹ was recorded with MoS₂/WO₃ nanocomposite based gas sensor at room temperature. The response and recovery times were 23 s and 11 s respectively and about 16 % decrease in the sensor response was recorded over a period of four weeks. Because of short response and recovery times and stability of the response, the MoS₂/WO₃ nanocomposite can be considered as a potential candidate for the room temperature gas sensing.

二硫化钼（MoS2）存在于具有大表面积的二维结构中，可以促进气体的吸附。将MoS2与金属氧化物半导体耦合可以显著提高MoS2的气敏性能。采用水热法合成了MoS2/WO3纳米复合材料，并将其用于乙醇气体传感。采用场发射电子显微镜（FESEM）和x射线衍射仪（XRD）研究了MoS2/WO3纳米复合材料的形貌和结构。在FESEM图像中观察到二硫化钼纳米球镶嵌在WO3纳米棒海洋中。XRD结果证实，MoS2和WO3均具有六方晶体结构。透射电子显微镜（TEM）研究了二硫化钼纳米球与WO3纳米棒之间的异质结。采用N2吸附解吸法测定了MoS2/WO3纳米复合粉体的比表面积。x射线光电子能谱（XPS）分析表明，MoS₂和WO₃之间存在很强的界面电子相互作用。研究了MoS2/WO3纳米复合材料传感器在室温下的乙醇气敏性能。MoS2/WO3的气敏性是原始MoS2的80倍以上。对于乙醇气体，室温下基于MoS2/WO3纳米复合材料的气体传感器的最大灵敏度为0.37 ppm−1。反应和恢复时间分别为23 s和11 s，在四周的时间内，传感器反应下降了约16 %。由于响应时间短，恢复时间短，响应稳定，MoS2/WO3纳米复合材料可以被认为是室温气体传感的潜在候选者。

{"title":"Enhancing the room temperature ethanol gas sensing properties of MoS2 nanospheres by compositing with WO3 nanorods","authors":"Vishakha Zimba, Meghana N., Jhasaketan Nayak","doi":"10.1016/j.sna.2026.117520","DOIUrl":"10.1016/j.sna.2026.117520","url":null,"abstract":"<div><div>Molybdenum disulphide (MoS<sub>2</sub>) occurs in two dimensional structures with large surface areas that can facilitate gas adsorptions. Gas sensing properties of MoS<sub>2</sub> can be significantly enhanced by coupling MoS<sub>2</sub> with metal oxide semiconductors. We have synthesized MoS<sub>2</sub>/WO<sub>3</sub> nanocomposites by hydrothermal treatments and have utilized them for ethanol gas sensing. The morphologies and structures of MoS<sub>2</sub>/WO<sub>3</sub> nanocomposites were studied by Field Emission Electron Microscopy (FESEM) and X-rays diffraction (XRD), respectively. Nanospheres of MoS<sub>2</sub> embedded in a sea of WO<sub>3</sub> nanorods were observed in the FESEM images. The XRD results confirmed that both MoS<sub>2</sub> and WO<sub>3</sub> had the hexagonal crystal structures. Transmission electron microscopy (TEM) was employed for microstructure study that revealed heterojunctions between MoS<sub>2</sub> nanospheres and WO<sub>3</sub> nanorods. The surface area of the MoS<sub>2</sub>/WO<sub>3</sub> nanocomposite powder was measured by N<sub>2</sub> adsorption desorption method. The chemical state analysis was performed by X-rays photoelectron spectroscopy (XPS) analysis which indicated strong interfacial electronic interaction between MoS₂ and WO₃. Ethanol gas sensing properties of MoS<sub>2</sub>/WO<sub>3</sub> nanocomposite based sensors were investigated at room temperature. The gas sensitivity of MoS<sub>2</sub>/WO<sub>3</sub> was more than eighty times higher than that of pristine MoS<sub>2</sub>. For ethanol gas, a maximum sensitivity of 0.37 ppm<sup>−1</sup> was recorded with MoS<sub>2</sub>/WO<sub>3</sub> nanocomposite based gas sensor at room temperature. The response and recovery times were 23 s and 11 s respectively and about 16 % decrease in the sensor response was recorded over a period of four weeks. Because of short response and recovery times and stability of the response, the MoS<sub>2</sub>/WO<sub>3</sub> nanocomposite can be considered as a potential candidate for the room temperature gas sensing.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117520"},"PeriodicalIF":4.9,"publicationDate":"2026-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A pinwheel-shaped MEMS microspeaker with enhanced SPL and low harmonic distortion 一种具有增强声压级和低谐波失真的风车形MEMS微扬声器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-21 DOI: 10.1016/j.sna.2026.117505

Rui Liu, Zeyi Wang, Yuanpeng Ma, Dong Zhang, Xiasheng Guo

Piezoelectric MEMS loudspeakers face limitations in vibration amplitude and sound pressure level (SPL), hindering their adoption in compact audio applications. This work introduces a pinwheel-shaped membrane structure that incorporates rotated cantilevers and folded spring units to enhance acoustic output without increasing the device footprint. Through finite element analysis, the optimized design achieved a 23% improvement in membrane displacement compared to a conventional architecture. Lumped-element modeling predicted an SPL enhancement of up to

10 dB

in the frequency range from

100 Hz

to

8 kHz

. Experimental results validated these predictions, with the fabricated device producing over

80 dB

SPL under

15 V

drive and maintaining total harmonic distortion (THD) below 1% at

1 kHz

and

94 dB

SPL. Furthermore, the influence of DC bias on nonlinear distortion was systematically investigated. Results showed that a moderate DC bias effectively suppressed second-order harmonic distortion, while low-voltage AC-driven operation also maintained low THD, aided by the built-in polarization of the PZT film. The proposed design offers a structurally robust and high-performance solution for piezoelectric MEMS loudspeakers, demonstrating significant potential for energy-efficient micro-acoustic systems in next-generation portable devices.

压电式MEMS扬声器在振动幅度和声压级（SPL）方面受到限制，阻碍了其在紧凑型音频应用中的应用。这项工作引入了一个风车形的膜结构，它结合了旋转悬臂和折叠弹簧单元，以增强声学输出，而不增加设备的占地面积。通过有限元分析，与传统结构相比，优化设计的膜位移提高了23%。集总元建模预测，在100Hz至8kHz的频率范围内，声压级增强高达10dB。实验结果验证了这些预测，在15V驱动下制造的器件产生超过80dB SPL，并且在1kHz和94dB SPL下保持总谐波失真（THD）低于1%。此外，系统地研究了直流偏置对非线性畸变的影响。结果表明，适度的直流偏压可以有效地抑制二阶谐波畸变，而低压交流驱动的工作也保持了低THD，这得益于PZT薄膜的内置极化。提出的设计为压电MEMS扬声器提供了结构坚固且高性能的解决方案，展示了下一代便携式设备中节能微声系统的巨大潜力。

{"title":"A pinwheel-shaped MEMS microspeaker with enhanced SPL and low harmonic distortion","authors":"Rui Liu, Zeyi Wang, Yuanpeng Ma, Dong Zhang, Xiasheng Guo","doi":"10.1016/j.sna.2026.117505","DOIUrl":"10.1016/j.sna.2026.117505","url":null,"abstract":"<div><div>Piezoelectric MEMS loudspeakers face limitations in vibration amplitude and sound pressure level (SPL), hindering their adoption in compact audio applications. This work introduces a pinwheel-shaped membrane structure that incorporates rotated cantilevers and folded spring units to enhance acoustic output without increasing the device footprint. Through finite element analysis, the optimized design achieved a 23% improvement in membrane displacement compared to a conventional architecture. Lumped-element modeling predicted an SPL enhancement of up to <span><math><mn>10</mn><mspace></mspace><mrow><mtext>dB</mtext></mrow></math></span> in the frequency range from <span><math><mn>100</mn><mspace></mspace><mrow><mtext>Hz</mtext></mrow></math></span> to <span><math><mn>8</mn><mspace></mspace><mrow><mtext>kHz</mtext></mrow></math></span>. Experimental results validated these predictions, with the fabricated device producing over <span><math><mn>80</mn><mspace></mspace><mrow><mtext>dB</mtext></mrow></math></span> SPL under <span><math><mn>15</mn><mspace></mspace><mrow><mtext>V</mtext></mrow></math></span> drive and maintaining total harmonic distortion (THD) below 1% at <span><math><mn>1</mn><mspace></mspace><mrow><mtext>kHz</mtext></mrow></math></span> and <span><math><mn>94</mn><mspace></mspace><mrow><mtext>dB</mtext></mrow></math></span> SPL. Furthermore, the influence of DC bias on nonlinear distortion was systematically investigated. Results showed that a moderate DC bias effectively suppressed second-order harmonic distortion, while low-voltage AC-driven operation also maintained low THD, aided by the built-in polarization of the PZT film. The proposed design offers a structurally robust and high-performance solution for piezoelectric MEMS loudspeakers, demonstrating significant potential for energy-efficient micro-acoustic systems in next-generation portable devices.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117505"},"PeriodicalIF":4.9,"publicationDate":"2026-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0