Sensors and Actuators A-physical最新文献_第7页

Development of a low-frequency ultrasound system for non-invasive temperature measurement of liquids and biological tissue phantoms 一种用于液体和生物组织幻象无创温度测量的低频超声系统的研制

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-27 DOI: 10.1016/j.sna.2026.117531

Lichen Su , Tao Wang , Chengcheng Ma , Fei Wang , Cai Gao , Liangwei Wu , Xiaofeng Xuan

This work presents and validates a low-frequency, non-invasive method for real-time temperature monitoring using ultrasonic time-of-flight measurements. Low-frequency ultrasound operating at 40 kHz offers better penetration and measurement accuracy than high-frequency ultrasound above 1 MHz, but noise interference remains the primary challenge. By using a local peak flight-time measurement algorithm, an unscented Kalman filtering noise-reduction algorithm, and high-performance circuits and devices, this work accurately establishes the relationship between ultrasound speed and temperature in homogeneous media, including both liquids and biological tissue phantoms. The ultrasound speed-temperature functions of water, silicone oil, and silicone rubber in a specific range were experimentally measured in an acrylic container, and the results corresponded with reference data, verifying the reliability of the system. Furthermore, the method was utilized to characterize the ultrasound speed-temperature effect in an acrylamide hydrogel biological tissue phantom, with results aligning with theoretical expectations for the acoustic properties of water-based materials. Overall, this work demonstrates the feasibility of using an ultrasonic temperature measurement system with superior penetration in simulated biological tissue environments, providing valuable data for non-invasive, real-time monitoring of temperature variations in applications such as thermal therapy or chemical reactions.

这项工作提出并验证了一种低频、无创的方法，用于利用超声波飞行时间测量实时温度监测。工作在40 kHz的低频超声比1 MHz以上的高频超声具有更好的穿透性和测量精度，但噪声干扰仍然是主要的挑战。通过使用局部峰值飞行时间测量算法、无气味卡尔曼滤波降噪算法以及高性能电路和器件，本工作准确地建立了均匀介质（包括液体和生物组织幻影）中超声速度与温度之间的关系。在丙烯酸容器中实验测量了特定范围内的水、硅油和硅橡胶的超声速度-温度函数，结果与参考数据相吻合，验证了系统的可靠性。此外，利用该方法表征了丙烯酰胺水凝胶生物组织模体中的超声速度-温度效应，结果与水基材料声学特性的理论预期一致。总的来说，这项工作证明了在模拟生物组织环境中使用具有优越穿透性的超声波温度测量系统的可行性，为热治疗或化学反应等应用中的温度变化的非侵入性实时监测提供了有价值的数据。

{"title":"Development of a low-frequency ultrasound system for non-invasive temperature measurement of liquids and biological tissue phantoms","authors":"Lichen Su , Tao Wang , Chengcheng Ma , Fei Wang , Cai Gao , Liangwei Wu , Xiaofeng Xuan","doi":"10.1016/j.sna.2026.117531","DOIUrl":"10.1016/j.sna.2026.117531","url":null,"abstract":"<div><div>This work presents and validates a low-frequency, non-invasive method for real-time temperature monitoring using ultrasonic time-of-flight measurements. Low-frequency ultrasound operating at 40 kHz offers better penetration and measurement accuracy than high-frequency ultrasound above 1 MHz, but noise interference remains the primary challenge. By using a local peak flight-time measurement algorithm, an unscented Kalman filtering noise-reduction algorithm, and high-performance circuits and devices, this work accurately establishes the relationship between ultrasound speed and temperature in homogeneous media, including both liquids and biological tissue phantoms. The ultrasound speed-temperature functions of water, silicone oil, and silicone rubber in a specific range were experimentally measured in an acrylic container, and the results corresponded with reference data, verifying the reliability of the system. Furthermore, the method was utilized to characterize the ultrasound speed-temperature effect in an acrylamide hydrogel biological tissue phantom, with results aligning with theoretical expectations for the acoustic properties of water-based materials. Overall, this work demonstrates the feasibility of using an ultrasonic temperature measurement system with superior penetration in simulated biological tissue environments, providing valuable data for non-invasive, real-time monitoring of temperature variations in applications such as thermal therapy or chemical reactions.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117531"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ionic wind characteristics of electromagnetic plasma micro-actuator 电磁等离子体微执行器的离子风特性

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117534

Jisu Sinn , Youngmin Kim , Suhyeon Park

We propose a novel electromagnetic device that suppresses electrical coupling by minimizing the coupling area between the AC and DC voltage sources, while enabling stable ionic wind generation at a significantly reduced voltage. Lorentz-force-driven carrier injection allows plasma formation across an 8 mm gap at 900 V—an order of magnitude lower than the breakdown voltage for conventional two-electrode devices. The induced airflow is characterized using particle image velocimetry (PIV), revealing flow propagation profile along the substrate and a maximum velocity of 0.4 m/s at 1 W plasma power. Momentum flux analysis of ions and neutral molecules indicates that ionic wind generation arises from both volumetric electrohydrodynamic body force and enhanced jet dynamics. The effectiveness of the ionic wind is further validated using a micro thermal anemometer, and an optimized plasma generation scheme for efficient thermal management is presented.

我们提出了一种新的电磁装置，通过最小化交流和直流电压源之间的耦合面积来抑制电耦合，同时在显著降低的电压下实现稳定的离子风力发电。洛伦兹力驱动的载流子注入允许等离子体在900 v下形成8 mm的间隙，这比传统双电极器件的击穿电压低一个数量级。利用粒子图像测速法（PIV）对诱导气流进行了表征，揭示了在1 W等离子体功率下沿基片的流动传播曲线和0.4 m/s的最大速度。离子和中性分子的动量通量分析表明，离子风的产生是由体积电流体动力体力和增强的射流动力共同产生的。利用微热风速仪进一步验证了离子风的有效性，并提出了一种优化的等离子体生成方案，以实现高效的热管理。

引用次数: 0

Mechanical behavior monitoring of a large-scale prefabricated subway station during assembly using fiber optic sensors 基于光纤传感器的大型装配式地铁车站装配过程力学行为监测

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-02-02 DOI: 10.1016/j.sna.2026.117546

Chengyu Hong , Siyan Lin , Shamsher Sadiq , Shuban Ali , Min Zhu , Ping Guo , Zhihong Duan

Large-scale prefabricated structural components of subway stations can experience significant mechanical demands during assembly due to their size, weight, and the construction sequence. This study analyzed the mechanical behavior of prefabricated subway station joints and structural members (base slab, sidewalls, and top slab) during the assembly process using Distributed Fiber Optic Sensing (DFOS) and Fiber Bragg Grating (FBG) sensor technologies. Strain variations, bending moments, and axial forces were examined to assess the influence of different assembly stages on structural performance. The results revealed that all joints-maintained strains within a safe margin of 40 με, but more significant strain disturbances were observed during the top slab assembly, with peak strains reaching −33 με. The top slab assembly also contributed the most to joint axial forces and bending moments, with contributions reaching up to 92.6 % and 96.2 %, respectively, emphasizing its critical impact on joint behavior. The base slab exhibited significant strain variations, with peak strains of 393.8 με (tensile) and −260.01 με (compressive) after the top slab assembly. In addition, axial forces in the sidewalls increased by up to 36.5 %, while bending moments in the base slab increased by 52.6 %. The study highlights the importance of precise alignment and localized reinforcement, particularly at critical joints, to ensure structural safety and minimize deformation. The use of DOFS proved highly effective in capturing continuous, high-resolution strain data, enabling precise assessment of structural behavior and providing valuable insights for risk control in prefabricated subway station assembly construction.

地铁车站的大型预制构件由于其尺寸、重量和施工顺序等因素，在装配过程中会遇到很大的机械需求。本研究采用分布式光纤传感（DFOS）和光纤布拉格光栅（FBG）传感器技术，分析了预制地铁车站节点和结构构件（底板、侧壁和顶板）在装配过程中的力学行为。测试了应变变化、弯矩和轴向力，以评估不同装配阶段对结构性能的影响。结果表明，所有节理维持的应变都在40 με的安全范围内，但在顶板装配过程中出现了更明显的应变扰动，峰值应变达到- 33 με。顶板组合对节点轴力和弯矩的贡献最大，分别达到92.6 %和96.2 %，强调了其对节点行为的关键影响。底板应变变化显著，顶板装配后的应变峰值分别为393.8 με（拉伸）和- 260.01 με（压缩）。此外，侧壁轴力增加36.5% %，而底板弯矩增加52.6% %。该研究强调了精确定位和局部加固的重要性，特别是在关键节点，以确保结构安全和最小化变形。事实证明，dfs在获取连续、高分辨率应变数据方面非常有效，能够精确评估结构行为，并为预制地铁车站组装施工的风险控制提供有价值的见解。

{"title":"Mechanical behavior monitoring of a large-scale prefabricated subway station during assembly using fiber optic sensors","authors":"Chengyu Hong , Siyan Lin , Shamsher Sadiq , Shuban Ali , Min Zhu , Ping Guo , Zhihong Duan","doi":"10.1016/j.sna.2026.117546","DOIUrl":"10.1016/j.sna.2026.117546","url":null,"abstract":"<div><div>Large-scale prefabricated structural components of subway stations can experience significant mechanical demands during assembly due to their size, weight, and the construction sequence. This study analyzed the mechanical behavior of prefabricated subway station joints and structural members (base slab, sidewalls, and top slab) during the assembly process using Distributed Fiber Optic Sensing (DFOS) and Fiber Bragg Grating (FBG) sensor technologies. Strain variations, bending moments, and axial forces were examined to assess the influence of different assembly stages on structural performance. The results revealed that all joints-maintained strains within a safe margin of 40 με, but more significant strain disturbances were observed during the top slab assembly, with peak strains reaching −33 με. The top slab assembly also contributed the most to joint axial forces and bending moments, with contributions reaching up to 92.6 % and 96.2 %, respectively, emphasizing its critical impact on joint behavior. The base slab exhibited significant strain variations, with peak strains of 393.8 με (tensile) and −260.01 με (compressive) after the top slab assembly. In addition, axial forces in the sidewalls increased by up to 36.5 %, while bending moments in the base slab increased by 52.6 %. The study highlights the importance of precise alignment and localized reinforcement, particularly at critical joints, to ensure structural safety and minimize deformation. The use of DOFS proved highly effective in capturing continuous, high-resolution strain data, enabling precise assessment of structural behavior and providing valuable insights for risk control in prefabricated subway station assembly construction.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117546"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Compact optical fiber sensor system featuring tunable sensitivity and real-time wireless interrogation 紧凑的光纤传感器系统，具有可调的灵敏度和实时无线询问

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-02-03 DOI: 10.1016/j.sna.2026.117545

Aayush Madan, Yaowen Yang

This study introduces an intensity-based fiber optic sensor leveraging chirp fiber Bragg grating (CFBG), method, and system to produce clean, stable, and reliable signals for strain, temperature and vibration measurement. The sensor incorporates an interrogating CFBG with a center wavelength and bandwidth tailored to the specifications of sensing CFBG. This design ensures compatibility between the interrogating and sensing gratings, enabling accurate measurement through their optical spectrum overlap. The design layout also features an optical power adjustment mechanism that allows sensitivity to be configured for specific application needs. The research also details development of an optoelectronic interrogator prototype (or interrogator), enabling real-time, wireless signal acquisition from remote locations. This interrogator is characterized by its compact size, reflection-mode architecture, scalable configuration, portability, and cost-effectiveness. Under the optical test configuration, the sensor exhibits a strain sensitivity coefficient of 0.73 relative to the baseline optical power. The interrogator was evaluated over a strain range of up to 3000 µε, achieving a sensitivity of 0.82 mV/µε. The temperature sensitivity was measured to be 7.2 mV/°C. Furthermore, the time-domain response obtained from the long-term stability test demonstrates temporal consistency, with a moderate drift confined within ±5%, an hourly sampled coefficient of variation below 0.03, and autocorrelation coefficients exceeding 0.85. The advancement of such techniques holds significant potential to drive widespread deployment and adoption of fiber-optic sensing technologies functioning as optical nodes across diverse industries.

本研究介绍了一种基于强度的光纤传感器，利用啁啾光纤布拉格光栅（CFBG）、方法和系统来产生干净、稳定和可靠的应变、温度和振动测量信号。该传感器集成了一个询问CFBG，其中心波长和带宽根据感应CFBG的规格量身定制。这种设计确保了询问光栅和传感光栅之间的兼容性，通过其光谱重叠实现精确测量。该设计布局还具有光功率调节机制，允许根据特定应用需求配置灵敏度。该研究还详细介绍了光电询问器原型（或询问器）的开发，实现了远程位置的实时无线信号采集。该询问器的特点是尺寸紧凑、反射模式架构、可伸缩配置、可移植性和成本效益。在光学测试配置下，传感器相对于基线光功率的应变灵敏度系数为0.73。该询问器在高达3000µε的应变范围内进行评估，灵敏度为0.82 mV/µε。测得温度灵敏度为7.2 mV/℃。此外，从长期稳定性测试中获得的时域响应具有时间一致性，适度漂移限制在±5%以内，每小时抽样变异系数低于0.03，自相关系数超过0.85。这些技术的进步具有巨大的潜力，可以推动光纤传感技术在不同行业中作为光节点的广泛部署和采用。

{"title":"Compact optical fiber sensor system featuring tunable sensitivity and real-time wireless interrogation","authors":"Aayush Madan, Yaowen Yang","doi":"10.1016/j.sna.2026.117545","DOIUrl":"10.1016/j.sna.2026.117545","url":null,"abstract":"<div><div>This study introduces an intensity-based fiber optic sensor leveraging chirp fiber Bragg grating (CFBG), method, and system to produce clean, stable, and reliable signals for strain, temperature and vibration measurement. The sensor incorporates an interrogating CFBG with a center wavelength and bandwidth tailored to the specifications of sensing CFBG. This design ensures compatibility between the interrogating and sensing gratings, enabling accurate measurement through their optical spectrum overlap. The design layout also features an optical power adjustment mechanism that allows sensitivity to be configured for specific application needs. The research also details development of an optoelectronic interrogator prototype (or interrogator), enabling real-time, wireless signal acquisition from remote locations. This interrogator is characterized by its compact size, reflection-mode architecture, scalable configuration, portability, and cost-effectiveness. Under the optical test configuration, the sensor exhibits a strain sensitivity coefficient of 0.73 relative to the baseline optical power. The interrogator was evaluated over a strain range of up to 3000 µε, achieving a sensitivity of 0.82 mV/µε. The temperature sensitivity was measured to be 7.2 mV/°C. Furthermore, the time-domain response obtained from the long-term stability test demonstrates temporal consistency, with a moderate drift confined within ±5%, an hourly sampled coefficient of variation below 0.03, and autocorrelation coefficients exceeding 0.85. The advancement of such techniques holds significant potential to drive widespread deployment and adoption of fiber-optic sensing technologies functioning as optical nodes across diverse industries.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117545"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrochemical aptasensor for non-invasive detection of lactoferrin: A potential biomarker for Alzheimer’s disease 用于无创检测乳铁蛋白的电化学感应传感器：阿尔茨海默病的潜在生物标志物

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-15 DOI: 10.1016/j.sna.2026.117504

Damini Verma , Aadi Jeevaraj , B.S. Unnikrishnan , Devesh Bhimsaria , Gopinath Packirisamy

Here, we report the fabrication of a reusable, label-free, non-invasive, and reagent-less aptasensor for direct electrochemical detection of lactoferrin (LF), a significant biomarker for Alzheimer's disease (AD). The sensor was constructed by immobilizing thiolated aptamer of LF on a gold screen-printed electrode (AuSPE), followed by backfilling 6-Mercapto-1-hexanol (MCH) to form the MCH/Apt-LF/AuSPE aptasensor. The aptasensor was characterized using FESEM, FTIR, DPV, EIS and CV techniques. It revealed broad linear detection from 0.001 to 500 μg/mL, with a sensitivity of 13.072 μA [log₁₀ (μg/mL)]⁻¹ cm⁻² along with a very low detection limit of 0.0007 μg/mL and limit of quantification of 0.0024 µg/mL as per the DPV technique. It showed remarkable reproducibility and selectivity towards varying interferents found in saliva, offering fast, reagent-less, and sensitive determination of LF in AD evaluation. Additionally, the fabricated aptasensor exhibited an acceptable %RSD, remaining below 8.88% for the spiked artificial saliva sample. The developed platform shows promise for extension to the early, non-invasive diagnosis of other neurodegenerative disorders.

在这里，我们报道了一种可重复使用、无标签、无创、无试剂的适配体传感器的制造，用于直接电化学检测乳铁蛋白（LF），这是阿尔茨海默病（AD）的重要生物标志物。该传感器是通过在金丝网印刷电极（AuSPE）上固定巯基化的LF适配体，然后回填6-巯基-1-己醇（MCH）形成MCH/Apt-LF/AuSPE适配体构建的。利用FESEM、FTIR、DPV、EIS和CV等技术对该传感器进行了表征。结果表明，DPV技术在0.001 ~ 500 μg/mL范围内具有较宽的线性检测范围，灵敏度为13.072 μA [log10 (μg/mL)]−1 cm−2，检出限为0.0007 μg/mL，定量限为0.0024 μg/mL。该方法对唾液中发现的各种干扰素具有显著的重复性和选择性，可快速、少试剂、灵敏地测定AD评价中的LF。此外，制备的配体传感器显示出可接受的%RSD，在加标的人工唾液样品中保持在8.88%以下。该开发的平台有望扩展到其他神经退行性疾病的早期、非侵入性诊断。

{"title":"Electrochemical aptasensor for non-invasive detection of lactoferrin: A potential biomarker for Alzheimer’s disease","authors":"Damini Verma , Aadi Jeevaraj , B.S. Unnikrishnan , Devesh Bhimsaria , Gopinath Packirisamy","doi":"10.1016/j.sna.2026.117504","DOIUrl":"10.1016/j.sna.2026.117504","url":null,"abstract":"<div><div>Here, we report the fabrication of a reusable, label-free, non-invasive, and reagent-less aptasensor for direct electrochemical detection of lactoferrin (LF), a significant biomarker for Alzheimer's disease (AD). The sensor was constructed by immobilizing thiolated aptamer of LF on a gold screen-printed electrode (AuSPE), followed by backfilling 6-Mercapto-1-hexanol (MCH) to form the MCH/Apt-LF/AuSPE aptasensor. The aptasensor was characterized using FESEM, FTIR, DPV, EIS and CV techniques. It revealed broad linear detection from 0.001 to 500 μg/mL, with a sensitivity of 13.072 μA [log<sub>10</sub> (μg/mL)]<sup>−1</sup> cm<sup>−2</sup> along with a very low detection limit of 0.0007 μg/mL and limit of quantification of 0.0024 µg/mL as per the DPV technique. It showed remarkable reproducibility and selectivity towards varying interferents found in saliva, offering fast, reagent-less, and sensitive determination of LF in AD evaluation. Additionally, the fabricated aptasensor exhibited an acceptable %RSD, remaining below 8.88% for the spiked artificial saliva sample. The developed platform shows promise for extension to the early, non-invasive diagnosis of other neurodegenerative disorders.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117504"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Tailoring oxygen vacancies and morphology in La-doped CeO2thin films for highly responsive gaseous NH3 sensing at room temperature 用于室温下高响应气体NH3传感的la掺杂ceo2薄膜的氧空位和形态

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-27 DOI: 10.1016/j.sna.2026.117528

Devarajan Alagarasan , S.S. Hegde , R. Naik , B. Shanmugavelu , Kumar Haunsbhavi , Hitha D. Shetty , K. Deva Arun Kumar , A. Anto Jeffery , Mohamed Benghanem , I.M. Ashraf , Mohd. Shkir

To evade the health risks posed by hazardous ammonia exposure, there is a growing need for sensitive and reliable NH₃ gas sensors that can function effectively at room temperature (RT). In the present report, the fabrication and characterization of La-doped cerium oxide (CeO₂) thin films synthesized via nebulizer spray pyrolysis (NSP) method was studied. Thin films deposited with varying La doping concentrations (1–5 wt%) were analyzed for their structural, morphological, optical, photoluminescence, and gas sensing properties. X-ray diffraction (XRD) confirmed the fluorite cubic structure with improved crystallinity, while FESEM analysis revealed a rougher and more porous surface composed of large-sized grains at 4 wt% La doping. Photoluminescence (PL) studies and XPS analysis indicated an increase in oxygen vacancy defect states upon La doping into CeO₂, which is favorable for gas sensing. UV–Vis spectroscopy showed bandgap narrowing up to 4 wt% La doping, attributed to electron transfer from O 2p to Ce 4 f states and the formation of defect levels. NH₃ gas sensing measurements demonstrated that the 4 wt% La-doped CeO₂ thin film exhibited the highest gas response of 3130, with fast rise and fall times of 5.7 s and 6.3 s, respectively, at 250 ppm NH₃ concentration. Additionally, the sensor showed high selectivity toward NH₃, good humidity tolerance, and long-term stability. The synergistic effects of optimized doping concentration, enhanced oxygen vacancies, and favourable morphology contribute to the superior sensing performance, making La-doped CeO₂ a promising candidate for efficient, low-temperature NH₃ gas sensors.

为了避免有害氨暴露带来的健康风险，人们越来越需要能够在室温（RT）下有效工作的敏感可靠的NH3气体传感器。本文研究了利用雾化器喷雾热解（NSP）法制备掺la氧化铈（CeO2）薄膜的制备与表征。研究了不同La掺杂浓度（1-5 wt%）沉积的薄膜的结构、形态、光学、光致发光和气敏性能。x射线衍射（XRD）证实了萤石的立方结构，结晶度有所提高，而FESEM分析显示，在4 wt% La掺杂时，萤石表面由大尺寸颗粒组成，更粗糙，更多孔。光致发光（PL）研究和XPS分析表明，La掺杂到CeO2后，氧空位缺陷态增加，有利于气敏。紫外可见光谱显示，由于电子从o2p态转移到ce4 f态以及缺陷能级的形成，La掺杂的带隙缩小至4 wt%。NH3气敏测试表明，在NH3浓度为250 ppm时，4 wt% la掺杂的CeO2薄膜表现出最高的气体响应，为3130，快速上升和下降时间分别为5.7 s和6.3 s。此外，该传感器对NH3具有较高的选择性、良好的耐湿性和长期稳定性。优化的掺杂浓度、增强的氧空位和良好的形貌的协同效应促成了优越的传感性能，使la掺杂的CeO2成为高效、低温NH3气体传感器的有希望的候选者。

{"title":"Tailoring oxygen vacancies and morphology in La-doped CeO2thin films for highly responsive gaseous NH3 sensing at room temperature","authors":"Devarajan Alagarasan , S.S. Hegde , R. Naik , B. Shanmugavelu , Kumar Haunsbhavi , Hitha D. Shetty , K. Deva Arun Kumar , A. Anto Jeffery , Mohamed Benghanem , I.M. Ashraf , Mohd. Shkir","doi":"10.1016/j.sna.2026.117528","DOIUrl":"10.1016/j.sna.2026.117528","url":null,"abstract":"<div><div>To evade the health risks posed by hazardous ammonia exposure, there is a growing need for sensitive and reliable NH<sub>3</sub> gas sensors that can function effectively at room temperature (RT). In the present report, the fabrication and characterization of La-doped cerium oxide (CeO<sub>2</sub>) thin films synthesized via nebulizer spray pyrolysis (NSP) method was studied. Thin films deposited with varying La doping concentrations (1–5 wt%) were analyzed for their structural, morphological, optical, photoluminescence, and gas sensing properties. X-ray diffraction (XRD) confirmed the fluorite cubic structure with improved crystallinity, while FESEM analysis revealed a rougher and more porous surface composed of large-sized grains at 4 wt% La doping. Photoluminescence (PL) studies and XPS analysis indicated an increase in oxygen vacancy defect states upon La doping into CeO<sub>2</sub>, which is favorable for gas sensing. UV–Vis spectroscopy showed bandgap narrowing up to 4 wt% La doping, attributed to electron transfer from O 2p to Ce 4 f states and the formation of defect levels. NH<sub>3</sub> gas sensing measurements demonstrated that the 4 wt% La-doped CeO<sub>2</sub> thin film exhibited the highest gas response of 3130, with fast rise and fall times of 5.7 s and 6.3 s, respectively, at 250 ppm NH<sub>3</sub> concentration. Additionally, the sensor showed high selectivity toward NH<sub>3</sub>, good humidity tolerance, and long-term stability. The synergistic effects of optimized doping concentration, enhanced oxygen vacancies, and favourable morphology contribute to the superior sensing performance, making La-doped CeO<sub>2</sub> a promising candidate for efficient, low-temperature NH<sub>3</sub> gas sensors.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117528"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Highly sensitive and wide-range flexible piezoresistive sensor based on a porous CNT-PDMS sponge and laser-induced graphene electrodes 基于多孔CNT-PDMS海绵和激光诱导石墨烯电极的高灵敏度和宽量程柔性压阻传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-02-06 DOI: 10.1016/j.sna.2026.117561

Chunli Luo , Shengchang Ren , Jianyu Yan , Wei Zhao , Weiguo Yan

Flexible pressure sensors play a crucial role in the application scenarios of electronic skin and wearable devices. Among them, high sensitivity and wide measurement range, as key performance parameters, are decisive for improving the overall performance of the pressure sensors. In this study, flexible piezoresistive sensors based on porous carbon nanotube (CNT) compound Polydimethylsiloxane (PDMS) Sponge are successfully prepared by a straightforward and efficient fabrication method. During the fabrication process, CNT-PDMS sponge-like(CPS) composite material are synthesized by incorporating CNTs as conductive fillers and sugars with varying particle sizes as porogen agents into PDMS. Furthermore, the electrical conductivity of the porous CNT-PDMS sponges is tunable through the dip-coating process using diverse CNT solutions onto the CPS substrates. The laser-induced graphene (LIG) was used as an electrode to construct a flexible piezoresistive sensor with a sandwich structure. The sensor exhibits high sensitivity (22.5 kPa⁻¹), a wide measurement range (0–110 kPa), and stable performance over 10,000 cycles. Additionally, the sensor exhibits superior performance in monitoring full-body movements, such as elbow flexion, finger flexion, and finger presses. The CNT@CPS sensor matrix is also proficient in precise measurement of pressure distributions, promising significant applications in fields such as wearable medical monitoring, intelligent robotics, and advanced human-machine interfaces.

柔性压力传感器在电子皮肤和可穿戴设备的应用场景中发挥着至关重要的作用。其中，高灵敏度和宽测量范围作为关键性能参数，是提高压力传感器整体性能的决定性因素。在本研究中，通过一种简单有效的制备方法，成功制备了基于多孔碳纳米管（CNT）化合物聚二甲基硅氧烷（PDMS）海绵的柔性压阻传感器。在制备过程中，将CNTs作为导电填料，将不同粒径的糖作为致孔剂加入到PDMS中，合成了CNT-PDMS海绵样复合材料。此外，多孔碳纳米管- pdms海绵的导电性可通过在CPS基材上使用不同碳纳米管溶液的浸涂工艺进行调节。采用激光诱导石墨烯（LIG）作为电极，构建了具有夹层结构的柔性压阻传感器。该传感器具有高灵敏度（22.5 kPa−1）、宽测量范围（0 ~ 110 kPa）、10000次以上稳定性能等特点。此外，该传感器在监测全身运动方面表现优异，如肘关节屈曲、手指屈曲和手指按压。CNT@CPS传感器矩阵还精通压力分布的精确测量，在可穿戴医疗监测，智能机器人和先进人机界面等领域具有重要应用前景。

{"title":"Highly sensitive and wide-range flexible piezoresistive sensor based on a porous CNT-PDMS sponge and laser-induced graphene electrodes","authors":"Chunli Luo , Shengchang Ren , Jianyu Yan , Wei Zhao , Weiguo Yan","doi":"10.1016/j.sna.2026.117561","DOIUrl":"10.1016/j.sna.2026.117561","url":null,"abstract":"<div><div>Flexible pressure sensors play a crucial role in the application scenarios of electronic skin and wearable devices. Among them, high sensitivity and wide measurement range, as key performance parameters, are decisive for improving the overall performance of the pressure sensors. In this study, flexible piezoresistive sensors based on porous carbon nanotube (CNT) compound Polydimethylsiloxane (PDMS) Sponge are successfully prepared by a straightforward and efficient fabrication method. During the fabrication process, CNT-PDMS sponge-like(CPS) composite material are synthesized by incorporating CNTs as conductive fillers and sugars with varying particle sizes as porogen agents into PDMS. Furthermore, the electrical conductivity of the porous CNT-PDMS sponges is tunable through the dip-coating process using diverse CNT solutions onto the CPS substrates. The laser-induced graphene (LIG) was used as an electrode to construct a flexible piezoresistive sensor with a sandwich structure. The sensor exhibits high sensitivity (22.5 kPa<sup>−1</sup>), a wide measurement range (0–110 kPa), and stable performance over 10,000 cycles. Additionally, the sensor exhibits superior performance in monitoring full-body movements, such as elbow flexion, finger flexion, and finger presses. The CNT@CPS sensor matrix is also proficient in precise measurement of pressure distributions, promising significant applications in fields such as wearable medical monitoring, intelligent robotics, and advanced human-machine interfaces.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117561"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A high-performance piezoelectric MEMS microspeaker with flexible spring-patterned cantilevers 一种具有弹性弹簧悬臂梁的高性能压电MEMS微扬声器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-22 DOI: 10.1016/j.sna.2026.117522

Ning Deng , Xinyu Ding , Xudong Ma , Hui Shang , Jin Xu , Ke Cao , Kangfu Chen , Huikai Xie

This study presents a quasi-closed—flexible cantilever spring piezoelectric MEMS speaker structure based on the design of the 3 mm × 3 mm diaphragm in a quasi-enclosed cantilever spring structure. To mitigate the problem of low-frequency acoustic leakage, which arises from the differential strain between the central diaphragm and the outer diaphragm, a 2μm thick parylene C flexible film was employed. This parylene film resulted in the formation of a quasi-closed flexible cantilever spring structure, effectively enhancing the acoustic seal. The device can achieve the SPL output of more than 94 dB in the full frequency range of 20 Hz-20 kHz onwards for actuation voltages of 10 V_pp & 5 V_DC. In addition, the THD peak at high frequency harmonics is effectively reduced by controlling the output phase of the dual electrodes of the diaphragm. The experimental findings underscore the critical role of phase difference in enhancing the acoustic characteristics of piezoelectric MEMS speakers. By fine-tuning the phase difference of the driver signal within a designated frequency spectrum, there is a notable reduction in the THD near the resonant frequency, alongside the preservation of a high output sound pressure level. This research offers a robust framework and an innovative optimization strategy aimed at enhancing the acoustic output of piezoelectric MEMS loudspeakers across their entire frequency spectrum.

基于准封闭悬臂弹簧结构中3 mm × 3 mm膜片的设计，提出了一种准封闭柔性悬臂弹簧压电MEMS扬声器结构。为了解决由中心膜片和外膜片之间的应变差引起的低频声泄漏问题，采用了2μm厚的聚对二甲苯柔性薄膜。这种聚对二甲苯薄膜形成了一种准封闭的柔性悬臂弹簧结构，有效地增强了声密封性。当驱动电压为10 Vpp &； 5 VDC时，该器件可以在20 Hz-20 kHz以上的全频率范围内实现超过94 dB的声压级输出。此外，通过控制膜片双电极的输出相位，有效地降低了高频谐波处的THD峰值。实验结果强调了相位差对提高压电MEMS扬声器声学特性的重要作用。通过在指定频谱内微调驱动信号的相位差，在谐振频率附近的THD显著降低，同时保持高输出声压级。本研究提供了一个强大的框架和创新的优化策略，旨在提高压电MEMS扬声器在整个频谱上的声输出。

{"title":"A high-performance piezoelectric MEMS microspeaker with flexible spring-patterned cantilevers","authors":"Ning Deng , Xinyu Ding , Xudong Ma , Hui Shang , Jin Xu , Ke Cao , Kangfu Chen , Huikai Xie","doi":"10.1016/j.sna.2026.117522","DOIUrl":"10.1016/j.sna.2026.117522","url":null,"abstract":"<div><div>This study presents a quasi-closed—flexible cantilever spring piezoelectric MEMS speaker structure based on the design of the 3 mm × 3 mm diaphragm in a quasi-enclosed cantilever spring structure. To mitigate the problem of low-frequency acoustic leakage, which arises from the differential strain between the central diaphragm and the outer diaphragm, a 2μm thick parylene C flexible film was employed. This parylene film resulted in the formation of a quasi-closed flexible cantilever spring structure, effectively enhancing the acoustic seal. The device can achieve the SPL output of more than 94 dB in the full frequency range of 20 Hz-20 kHz onwards for actuation voltages of 10 V<sub><em>pp</em></sub> & 5 V<sub><em>DC</em></sub>. In addition, the THD peak at high frequency harmonics is effectively reduced by controlling the output phase of the dual electrodes of the diaphragm. The experimental findings underscore the critical role of phase difference in enhancing the acoustic characteristics of piezoelectric MEMS speakers. By fine-tuning the phase difference of the driver signal within a designated frequency spectrum, there is a notable reduction in the THD near the resonant frequency, alongside the preservation of a high output sound pressure level. This research offers a robust framework and an innovative optimization strategy aimed at enhancing the acoustic output of piezoelectric MEMS loudspeakers across their entire frequency spectrum.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117522"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Self-powered sensing arrays with single-channel readout and damage-tolerant capability 具有单通道读出和容错能力的自供电传感阵列

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-29 DOI: 10.1016/j.sna.2026.117527

Borong Chen , Hongxin Hong , Qian Wei , Yuhang Han , Hao Wu

Self-powered sensing arrays for human–machine interaction (HMI) offer a promising alternative to conventional systems by eliminating the need for external power supplies. However, scaling such arrays often requires multi-channel readout architectures, which introduce wiring complexity and compromise robustness. To address this, we present a damage-tolerant, self-powered sensor array that uses an impedance-modulated single-channel readout (ISR-SA) for multi-site sensing with minimal hardware. The array’s parallel units are uniquely encoded by modulated resistors, which connect to the readout loop upon activation, converting spatial information into a single channel with distinct electrical signatures. To mitigate misinterpretation arising from analogous voltage peaks, we introduce a machine learning-based demodulation framework that leverages both peak voltage and signal shape features. This approach achieves 98.3 % recognition accuracy under manual pressing and sustains stable performance over 34,000 s of continuous operation. Moreover, the system exhibits damage tolerance, maintaining functionality even when some sensors fail. We demonstrate practical applicability through a self-powered numeric keyboard and a virtual vehicle controller, offering a low-power, minimally wired HMI solution suitable for integration into Internet of Things (IoT) and wearable devices.

用于人机交互（HMI）的自供电传感阵列通过消除对外部电源的需求，为传统系统提供了一个有前途的替代方案。然而，扩展这样的阵列通常需要多通道读出架构，这会引入布线复杂性并损害健壮性。为了解决这个问题，我们提出了一种抗损伤、自供电的传感器阵列，它使用阻抗调制单通道读出（ISR-SA），以最小的硬件进行多站点传感。阵列的并行单元由调制电阻唯一编码，在激活时连接到读出环路，将空间信息转换成具有不同电特征的单一通道。为了减轻由类似电压峰值引起的误解，我们引入了一种基于机器学习的解调框架，该框架利用峰值电压和信号形状特征。该方法在手动按压下的识别准确率达到98.3% %，连续运行34,000 s以上，性能稳定。此外，该系统具有损伤容忍度，即使在某些传感器发生故障时也能保持功能。我们通过自供电数字键盘和虚拟车辆控制器展示了实用性，提供了适合集成到物联网（IoT）和可穿戴设备中的低功耗，最少布线的HMI解决方案。

{"title":"Self-powered sensing arrays with single-channel readout and damage-tolerant capability","authors":"Borong Chen , Hongxin Hong , Qian Wei , Yuhang Han , Hao Wu","doi":"10.1016/j.sna.2026.117527","DOIUrl":"10.1016/j.sna.2026.117527","url":null,"abstract":"<div><div>Self-powered sensing arrays for human–machine interaction (HMI) offer a promising alternative to conventional systems by eliminating the need for external power supplies. However, scaling such arrays often requires multi-channel readout architectures, which introduce wiring complexity and compromise robustness. To address this, we present a damage-tolerant, self-powered sensor array that uses an impedance-modulated single-channel readout (ISR-SA) for multi-site sensing with minimal hardware. The array’s parallel units are uniquely encoded by modulated resistors, which connect to the readout loop upon activation, converting spatial information into a single channel with distinct electrical signatures. To mitigate misinterpretation arising from analogous voltage peaks, we introduce a machine learning-based demodulation framework that leverages both peak voltage and signal shape features. This approach achieves 98.3 % recognition accuracy under manual pressing and sustains stable performance over 34,000 s of continuous operation. Moreover, the system exhibits damage tolerance, maintaining functionality even when some sensors fail. We demonstrate practical applicability through a self-powered numeric keyboard and a virtual vehicle controller, offering a low-power, minimally wired HMI solution suitable for integration into Internet of Things (IoT) and wearable devices.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117527"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A low-magnetic-field laser emitter module with dual-layer microcoil for chip-scale atomic magnetometer applications 一种用于芯片级原子磁强计的双层微线圈低磁场激光发射器模块

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117544

Jianwei Hou , Yanbin Wang , Fengming Ye , Jiaxiang Wang , Mengqiu Li , Mingzhi Yu , Faheng Zang , Dezhao Li , Xiaojun Guo , Zhuoqing Yang

Chip-scale atomic magnetometers (CSAMs) facilitate high-precision measurements of ultra-weak magnetic fields, which are increasingly vital for portable applications, biomedical sensing, including magnetoencephalography (MEG) and magnetocardiography (MCG) and resource exploration. As a pivotal component, the laser source provides the specific wavelengths required to induce spin polarization in alkali metal atoms within the vapor cell. However, conventional Vertical-Cavity Surface-Emitting Lasers (VCSELs) are often limited by the stringent requirements for miniaturization and low magnetic interference in atomic magnetometers, primarily due to the induced magnetic fields generated by the integrated temperature-controlled coil. To address these challenges, this paper presents a laser emitter with Magnetic-field-suppressed Coils (LEMC). By configuring opposing current directions in adjacent windings, the magnetic fields generated by the energized wires are locally attenuated, achieving a significant suppression of the macroscopic induced magnetic field. Simulations of various current direction layouts demonstrate the superiority of the double-layer coil configuration in reducing magnetic interference. A silicon substrate with a deposited Si₃N₄ thin film serves as the thermal interface layer to ensure a precise temperature response. Experimental results demonstrate a residual magnetic field sensitivity of 0.49 nT/mA at a distance of 2 mm from the coil surface, while maintaining a temperature control stability of ±0.005°C at 80°C. The experiments also validated the stable temperature regulation of the coil and the wavelength tunability of the VCSEL. The proposed design represents a viable approach for applications in atomic sensors based on quantum mechanics principles.

芯片级原子磁强计（CSAMs）有助于超弱磁场的高精度测量，这在便携式应用，生物医学传感，包括脑磁图（MEG）和心磁图（MCG）和资源勘探中越来越重要。作为一个关键的组件，激光源提供了特定的波长，以诱导碱金属原子的自旋极化在蒸汽电池内。然而，传统的垂直腔表面发射激光器（VCSELs）往往受到原子磁强计小型化和低磁干扰的严格要求的限制，主要是由于集成温控线圈产生的感应磁场。为了解决这些问题，本文提出了一种具有磁场抑制线圈（LEMC）的激光发射器。通过在相邻绕组中配置相反的电流方向，通电导线产生的磁场被局部衰减，从而实现对宏观感应磁场的显著抑制。各种电流方向布局的仿真结果表明了双层线圈结构在减小磁干扰方面的优越性。硅衬底与沉积的Si3N4薄膜作为热界面层，以确保精确的温度响应。实验结果表明，在距离线圈表面2 mm处，残余磁场灵敏度为0.49 nT/mA，同时在80°C时保持±0.005°C的温度控制稳定性。实验还验证了线圈的稳定温度调节和VCSEL的波长可调性。提出的设计代表了基于量子力学原理的原子传感器应用的可行方法。

{"title":"A low-magnetic-field laser emitter module with dual-layer microcoil for chip-scale atomic magnetometer applications","authors":"Jianwei Hou , Yanbin Wang , Fengming Ye , Jiaxiang Wang , Mengqiu Li , Mingzhi Yu , Faheng Zang , Dezhao Li , Xiaojun Guo , Zhuoqing Yang","doi":"10.1016/j.sna.2026.117544","DOIUrl":"10.1016/j.sna.2026.117544","url":null,"abstract":"<div><div>Chip-scale atomic magnetometers (CSAMs) facilitate high-precision measurements of ultra-weak magnetic fields, which are increasingly vital for portable applications, biomedical sensing, including magnetoencephalography (MEG) and magnetocardiography (MCG) and resource exploration. As a pivotal component, the laser source provides the specific wavelengths required to induce spin polarization in alkali metal atoms within the vapor cell. However, conventional Vertical-Cavity Surface-Emitting Lasers (VCSELs) are often limited by the stringent requirements for miniaturization and low magnetic interference in atomic magnetometers, primarily due to the induced magnetic fields generated by the integrated temperature-controlled coil. To address these challenges, this paper presents a laser emitter with Magnetic-field-suppressed Coils (LEMC). By configuring opposing current directions in adjacent windings, the magnetic fields generated by the energized wires are locally attenuated, achieving a significant suppression of the macroscopic induced magnetic field. Simulations of various current direction layouts demonstrate the superiority of the double-layer coil configuration in reducing magnetic interference. A silicon substrate with a deposited Si<sub>3</sub>N<sub>4</sub> thin film serves as the thermal interface layer to ensure a precise temperature response. Experimental results demonstrate a residual magnetic field sensitivity of 0.49 nT/mA at a distance of 2 mm from the coil surface, while maintaining a temperature control stability of ±0.005°C at 80°C. The experiments also validated the stable temperature regulation of the coil and the wavelength tunability of the VCSEL. The proposed design represents a viable approach for applications in atomic sensors based on quantum mechanics principles.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117544"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

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