Sensors and Actuators A-physical最新文献_第4页

Secondary coiled artificial muscle with improved load capacity and reduced energy consumption 二次卷曲人造肌肉，提高了承载能力，降低了能耗

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-02-02 DOI: 10.1016/j.sna.2026.117553

Jung Gi Choi , Jinyeong Choi , Gyu Hyeon Song , Changsoon Choi , Seon Jeong Kim

It is necessary to improve their operability under high loads and reduce the energy consumption required for actuation to effectively use these coiled fiber-type artificial muscles. To address these challenges, a secondary coiled artificial muscle was fabricated by plying two coiled artificial muscles. The secondary coiled artificial muscle exhibited a more compact structure than the conventional primary coiled artificial muscle, resulting in reduced energy consumption required for sufficient heating to induce actuation. The average electric power consumption for actuation was reduced from 0.97 to 0.33 W/g·K. Furthermore, the secondary coiled artificial muscle demonstrated the ability to operate under higher loads and exhibited an improved tensile stroke. The actuation performance of the secondary coiled artificial muscle was further enhanced by applying imbalanced loads across each coiled fiber during the plying process. This approach enabled simultaneous improvements in both tensile stroke and work capacity. Thus, the tensile stroke and work capacity of the secondary coiled artificial muscle, fabricated under imbalanced loading conditions, increased by 1.34 and 1.5 times, respectively, compared to those fabricated under evenly applied loads. These findings indicate that the secondary coiled artificial muscle holds considerable potential for use in various fields.

提高其在高负荷下的可操作性，降低驱动能耗，是有效利用这些卷曲纤维型人造肌肉的必要条件。为了解决这些问题，我们将两个卷曲的人造肌肉连接在一起，制成了一个二次卷曲的人造肌肉。次级卷曲人造肌肉比传统的初级卷曲人造肌肉结构更紧凑，从而减少了足够加热诱导驱动所需的能量消耗。驱动的平均电耗由0.97降至0.33 W/g·K。此外，二级卷曲人工肌肉显示出在更高负载下操作的能力，并表现出改善的拉伸行程。在缠绕过程中，通过在每个缠绕纤维上施加不平衡载荷，进一步增强了次级卷曲人工肌肉的驱动性能。这种方法可以同时提高拉伸行程和工作能力。因此，在不平衡载荷条件下制作的二次卷曲人造肌肉的拉伸行程和工作能力分别比在均匀载荷下制作的人造肌肉增加了1.34倍和1.5倍。这些发现表明，二次卷曲人工肌肉在各个领域具有相当大的应用潜力。

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引用次数: 0

Fluid dynamic optimization of the gas chamber in an NDIR CO2 sensor by flow visualization experiment and CFD simulation 基于流动可视化实验和CFD模拟的NDIR型CO2传感器气体室流体动力学优化

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117526

Le Zhao , Xi Chen , Xuejiao Liu

Optical path underutilization resulting from flow nonuniformity in gas chamber often limits the response speed and measurement accuracy of non-dispersive infrared (NDIR) CO₂ sensors. In this study, we focused on a typical cylindrical gas chamber and designed a simple transparent deflector to optimize the flow field through combined flow visualization experiments and CFD simulations. By redirecting the gas flow and suppressing the large-scale vortex formation, the right-trapezoidal deflector equipped at the inlet region effectively improved both gas diffusion speed and uniformity. As a result, the CO₂ concentration in previously underutilized "dead volume" near the inlet increased to a level close to that of the supplied standard gas. The effectiveness of this deflector-based optimization in enhancing CO₂-IR interaction was experimentally confirmed by comparing the responses of two NDIR CO₂ sensors with and without the deflector. This improvement was particularly pronounced for gas mixtures with lower CO₂ concentrations and higher flow velocities, achieving an approximately 15 % reduction in response time. These findings provide a novel strategy for enhancing the performance and optimizing the structure of NDIR sensors.

气体室内流动不均匀性导致光路利用率不足，限制了非色散红外（NDIR） CO2传感器的响应速度和测量精度。本研究以典型的圆柱形毒气室为研究对象，通过流动可视化实验和CFD模拟相结合的方法，设计了一种简单的透明导流板来优化流场。安装在入口区域的右梯形导流板通过改变气流方向和抑制大规模涡的形成，有效地提高了气体扩散速度和均匀性。结果，在入口附近以前未充分利用的“死体积”中的二氧化碳浓度增加到接近供应标准气体的水平。通过比较两个NDIR CO2传感器在有和没有偏转板的情况下的响应，实验证实了这种基于偏转板的优化在增强CO2- ir相互作用方面的有效性。对于二氧化碳浓度较低、流速较高的混合气体，这种改进尤为明显，响应时间减少了约15% %。这些发现为提高NDIR传感器的性能和优化结构提供了一种新的策略。

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引用次数: 0

Ultra high responsivity bridge uncooled infrared microbolometers based on Mn-Co-Ni-O thin-film 基于Mn-Co-Ni-O薄膜的超高响应率桥式非冷却红外微辐射热计

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117543

Yan Zhao , Zirui Yang , Chengchen Gao , Zhenchuan Yang

Mn-Co-Ni-O (MCNO) thin films are essential for uncooled infrared microbolometers owing to their high thermal sensitivity, yet conventional MCNO architectures are limited by performance and fabrication challenges. This work presents a novel suspended bridge microbolometer design with cantilever anchors optimized for MCNO integration, incorporating a post-annealing step after polyimide release to ensure compatibility with organic sacrificial layer removal. Additionally, an electrode and beam synchronous patterning process enables narrower bridge beams with thermal conductivity of ∼10⁻⁶ W/K for improved responsivity. These advances allow the MCNO film to achieve high normalized voltage responsivity (4.13 ×10⁴ V/W), low resistivity (5.78 Ω·cm), strong thermal stability, and a broad dynamic range, representing an 813-fold enhancement over conventional MCNO devices. Furthermore, the microbolometer demonstrates effective 1/f noise suppression (normalized noise factor ∼10⁻²⁸ cm³) and a 43-fold reduction in thermal noise, positioning MCNO as a leading material for large focal plane arrays.

Mn-Co-Ni-O （MCNO）薄膜由于其高热灵敏度对于非制冷红外微辐射热计至关重要，但传统的MCNO结构受到性能和制造挑战的限制。本研究提出了一种新型悬索桥微辐射热计设计，该设计采用针对MCNO集成优化的悬臂锚，在聚酰亚胺释放后采用后退火步骤，以确保有机牺牲层去除的兼容性。此外，电极和光束同步图像化工艺可以实现更窄的桥梁，其导热系数为~ 10−6 W/K，从而提高响应性。这些进步使MCNO薄膜具有高归一化电压响应率（4.13 ×104 V/W），低电阻率（5.78 Ω·cm），强热稳定性和宽动态范围，比传统MCNO器件提高了813倍。此外，微辐射热计显示出有效的1/f噪声抑制（归一化噪声因子~ 10⁻²⁸cm³）和43倍的热噪声降低，使MCNO成为大型焦平面阵列的主要材料。

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引用次数: 0

A novel bidirectional high overload piezoresistive differential pressure sensor based on topology optimization 一种基于拓扑优化的新型双向高过载压阻差压传感器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117540

Meng Li , Xiaochen Yang , Xiangyue Meng , Dong Li , Huifeng Qiu , Liqun Du

To improve the overload capacity of piezoresistive differential pressure sensors (PDPS), this paper presents a bidirectional high overload PDPS based on topology optimization. The topology optimization design goal of the PDPS is maximum stiffness, and the constraint condition is maximum stress. The stress distribution, full scale output, and maximum stress value of topology-optimized and C-type membranes are analyzed using the finite-element method (FEM). FEM analyses demonstrated that, compared to conventional C-type membrane, a significant increase in overload capacity can be achieved by the proposed topology-optimized membrane. The silicon-based PDPS with bidirectional high overload is fabricated by microelectromechanical systems (MEMS) silicon technology. The measurement results reveal that the fabricated PDPS with the topology-optimized membrane has a burst pressure of 8.43 times the full scale and a sensitivity of 0.14 (mV/V/kPa) for a pressure range of 0–100 kPa. Compared to the conventional C-type membrane PDPS, the topology-optimized membrane increased the overload capacity by 33.6 % (the simulation result is 32.2 %) under the same full scale (100 kPa) and sensitivity (0.14 ± 0.01 mV/V/kPa). These results suggest that the new topology-optimized membrane is suitable for MEMS pressure sensors used in bidirectional overload measurement environments.

为了提高压阻式压差传感器的过载能力，提出了一种基于拓扑优化的双向高过载压差传感器。PDPS的拓扑优化设计目标是最大刚度，约束条件是最大应力。采用有限元法对拓扑优化膜和c型膜的应力分布、满量程输出和最大应力值进行了分析。有限元分析表明，与传统的c型膜相比，该拓扑优化膜的过载能力显著提高。采用微机电系统（MEMS）硅技术制备了双向高过载的硅基PDPS。测试结果表明，在0 ~ 100 kPa的压力范围内，经拓扑优化的膜的破裂压力为满量程的8.43倍，灵敏度为0.14 （mV/V/kPa）。在相同满尺度（100 kPa）和灵敏度（0.14 ± 0.01 mV/V/kPa）下，与传统c型膜相比，拓扑优化膜的过载能力提高了33.6 %（仿真结果为32.2 %）。这些结果表明，新的拓扑优化膜适用于用于双向过载测量环境的MEMS压力传感器。

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引用次数: 0

Flexible actuators with photothermal-responsive and humidity-responsive properties via electrohydrodynamic direct writing 通过电流体动力直接写入具有光热响应和湿度响应特性的柔性执行器

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117538

Mengqin Zhang, Libing Zhang, Ting Wu, Haijun Song

Single-function flexible actuators have limitations in practical dynamic environmental interactions, restricting their application potential in smart materials and soft robotics. To address this issue, a bilayer actuator composed of MXene (Ti₃C₂Tₓ)/carboxylated cellulose nanofibers (cCNFs) and polyethylene (PE) was successfully fabricated. The fabrication process involved integrating MXene and cCNFs as functional layers via near-field electrohydrodynamic (EHD) direct-write printing, followed by lamination with commercial PE tape. This actuator exhibits dual-responsive properties to both photothermal stimulation and humidity variation. Characterization results show that the introduction of cCNF increased the interlayer spacing of MXene, effectively inhibiting MXene nanosheet stacking between nanosheets, while significantly enhancing the mechanical properties of the composite film. Performance tests demonstrate excellent dual-responsive characteristics: in terms of photothermal response, MXene converts near-infrared (NIR) light energy into thermal energy. The bending deformation is induced by utilizing the difference in thermal expansion coefficients (CTE) between the MXene/cCNF layer and the PE layer, combined with the moisture desorption effect of the MXene/cCNF layer. Among the samples, MXene/cCNF-PE with MXene of 0.3 g (MC3-PE) exhibits optimal performance, with a maximum bending curvature of 3.46 cm⁻¹ under 400 mW·cm⁻² NIR irradiation. In a relative humidity (RH) range of 50 % - 80 %, the MXene/cCNF layer generated internal stress via water absorption and swelling, while the hydrophobic PE layer maintains structural stability, thereby driving the actuator to bend. The maximum bending curvature of MC3-PE reaches 3.14 cm⁻¹ . This study provides a feasible strategy for the preparation of multi-responsive flexible actuators, which hold broad application prospects in intelligent regulation, environmental interaction, and micromechanical systems.

单功能柔性执行器在实际动态环境交互中存在局限性，限制了其在智能材料和软机器人领域的应用潜力。为了解决这一问题，成功制备了由MXene （Ti₃C₂Tₓ）/羧化纤维素纳米纤维（cCNFs）和聚乙烯（PE）组成的双层致动器。制造过程包括通过近场电流体动力（EHD）直写打印将MXene和cCNFs集成为功能层，然后用商用PE胶带层压。该致动器表现出对光热刺激和湿度变化的双重响应特性。表征结果表明，cCNF的引入增加了MXene的层间间距，有效抑制了MXene纳米片在纳米片之间的堆积，同时显著提高了复合膜的力学性能。性能测试显示了优异的双响应特性：在光热响应方面，MXene将近红外（NIR）光能转换为热能。利用MXene/cCNF层与PE层之间的热膨胀系数（CTE）差，结合MXene/cCNF层的吸湿效应诱导弯曲变形。其中MXene为0.3 g的MXene/cCNF-PE （MC3-PE）在400 mW·cm⁻²NIR照射下的最大弯曲曲率为3.46 cm⁻¹ ，表现出最佳的性能。在相对湿度（RH）为50 % ~ 80 %的范围内，MXene/cCNF层通过吸水和膨胀产生内应力，而疏水性PE层保持结构稳定，从而驱动致动器弯曲。MC3-PE的最大弯曲曲率为3.14 cm⁻¹ 。本研究为多响应柔性作动器的制备提供了一种可行的策略，在智能调节、环境交互、微机械系统等方面具有广阔的应用前景。

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引用次数: 0

Upconversion nanoparticle-based optical glucose sensing using phosphoresce lifetime spectroscopy excited with 980 nm laser sources 利用980 nm激光源激发磷光寿命光谱的上转换纳米颗粒光学葡萄糖传感

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117533

Esmaeil Heydari , Amirhossein Moradi , Javad AmirAhmadi , Mohammad Moeini , Hossein Zare-behtash , Gongxun Bai

Upconversion nanoparticles (UCNPs) hold strong promise for the development of durable, contactless, and implantable photonic sensors owing to the deep tissue penetration of their near-infrared (NIR) excitation source and minimal photodamage by NIR light. Here, we report a Ba₂ErF₇@Ba₂La₄F₇@Ba₂Yb_0.98F₇Tm_0.02@Ba₂La₄F₇ UCNP-based glucose sensor that functions under 980 nm NIR laser excitation. The sensor is comprised of two layers, including an oxygen-sensitive bottom layer of PtTFPP-UCNPs doped in a xerogel film, and a top layer of glucose oxidase (GOx) immobilized within a hydrogel matrix. Excitation of oxygen-sensitive platinum (II) tetrakis(pentafluorophenyl)porphyrin (PtTFPP) complex is mediated by luminescence resonance energy transfer (LRET) from UCNPs. Glucose detection is based on oxygen consumption during the GOx-glucose reaction, which modulates the phosphorescence lifetime of PtTFPP. The glucose level is obtained from the slope of the time-dependent phosphorescence lifetime response instead of conventional end-point phosphorescence lifetime measurements, providing faster glucose quantification. The slope varies linearly with glucose concenrtation, which covers the physiologically relevant levels for detecting abnormalities in diabetic patients. Optical characterization of the sensors revealed a sensitivity of 13.4E-12 µs·dL·mg⁻¹ ·min⁻¹ , a limit of detection (LOD) of 11

\pm

1.45 mg/dL, short-term and long-term instabilities of 0.25

\pm

0.02 % and 1.6

\pm

0.9 %, respectively, and a reproducibility of 1.4 %. An in vitro cytotoxicity assay using human dermal fibroblasts (HDFs) demonstrated

94 \pm 7

% cell viability after 24 h incubation, confirming excellent biocompatibility of the sensor.

上转换纳米粒子（UCNPs）由于其近红外（NIR）激发源的深层组织穿透性和近红外光的最小光损伤，在开发耐用、非接触式和可植入光子传感器方面具有很强的前景。在这里，我们报道了一个Ba2ErF7@Ba2La4F7@Ba2Yb0.98F7Tm0.02@Ba2La4F7基于ucnp的葡萄糖传感器，它在980 nm近红外激光激发下工作。该传感器由两层组成，包括在干凝胶膜中掺杂的PtTFPP-UCNPs的氧敏底层和固定在水凝胶基质中的葡萄糖氧化酶（GOx）的顶层。氧敏铂（II）四（五氟苯基）卟啉（PtTFPP）配合物的激发是由UCNPs的发光共振能量转移（LRET）介导的。葡萄糖检测是基于gox -葡萄糖反应过程中的氧气消耗，这调节了PtTFPP的磷光寿命。葡萄糖水平是从时间依赖性磷光寿命响应的斜率获得的，而不是传统的终点磷光寿命测量，提供更快的葡萄糖定量。斜率随葡萄糖浓度呈线性变化，葡萄糖浓度覆盖了检测糖尿病患者异常的生理相关水平。该传感器的光学特性显示灵敏度为13.4E-12µs·dL·mg⁻¹ ·min⁻¹ ，检测限（LOD）为11±1.45 mg/dL，短期和长期不稳定性分别为0.25±0.02%和1.6±0.9%，重复性为1.4%。利用人真皮成纤维细胞（HDFs）进行的体外细胞毒性实验显示，24小时培养后，细胞存活率为94±7%，证实了该传感器具有良好的生物相容性。

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引用次数: 0

Ionic wind characteristics of electromagnetic plasma micro-actuator 电磁等离子体微执行器的离子风特性

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117534

Jisu Sinn , Youngmin Kim , Suhyeon Park

We propose a novel electromagnetic device that suppresses electrical coupling by minimizing the coupling area between the AC and DC voltage sources, while enabling stable ionic wind generation at a significantly reduced voltage. Lorentz-force-driven carrier injection allows plasma formation across an 8 mm gap at 900 V—an order of magnitude lower than the breakdown voltage for conventional two-electrode devices. The induced airflow is characterized using particle image velocimetry (PIV), revealing flow propagation profile along the substrate and a maximum velocity of 0.4 m/s at 1 W plasma power. Momentum flux analysis of ions and neutral molecules indicates that ionic wind generation arises from both volumetric electrohydrodynamic body force and enhanced jet dynamics. The effectiveness of the ionic wind is further validated using a micro thermal anemometer, and an optimized plasma generation scheme for efficient thermal management is presented.

我们提出了一种新的电磁装置，通过最小化交流和直流电压源之间的耦合面积来抑制电耦合，同时在显著降低的电压下实现稳定的离子风力发电。洛伦兹力驱动的载流子注入允许等离子体在900 v下形成8 mm的间隙，这比传统双电极器件的击穿电压低一个数量级。利用粒子图像测速法（PIV）对诱导气流进行了表征，揭示了在1 W等离子体功率下沿基片的流动传播曲线和0.4 m/s的最大速度。离子和中性分子的动量通量分析表明，离子风的产生是由体积电流体动力体力和增强的射流动力共同产生的。利用微热风速仪进一步验证了离子风的有效性，并提出了一种优化的等离子体生成方案，以实现高效的热管理。

引用次数: 0

A low-magnetic-field laser emitter module with dual-layer microcoil for chip-scale atomic magnetometer applications 一种用于芯片级原子磁强计的双层微线圈低磁场激光发射器模块

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117544

Jianwei Hou , Yanbin Wang , Fengming Ye , Jiaxiang Wang , Mengqiu Li , Mingzhi Yu , Faheng Zang , Dezhao Li , Xiaojun Guo , Zhuoqing Yang

Chip-scale atomic magnetometers (CSAMs) facilitate high-precision measurements of ultra-weak magnetic fields, which are increasingly vital for portable applications, biomedical sensing, including magnetoencephalography (MEG) and magnetocardiography (MCG) and resource exploration. As a pivotal component, the laser source provides the specific wavelengths required to induce spin polarization in alkali metal atoms within the vapor cell. However, conventional Vertical-Cavity Surface-Emitting Lasers (VCSELs) are often limited by the stringent requirements for miniaturization and low magnetic interference in atomic magnetometers, primarily due to the induced magnetic fields generated by the integrated temperature-controlled coil. To address these challenges, this paper presents a laser emitter with Magnetic-field-suppressed Coils (LEMC). By configuring opposing current directions in adjacent windings, the magnetic fields generated by the energized wires are locally attenuated, achieving a significant suppression of the macroscopic induced magnetic field. Simulations of various current direction layouts demonstrate the superiority of the double-layer coil configuration in reducing magnetic interference. A silicon substrate with a deposited Si₃N₄ thin film serves as the thermal interface layer to ensure a precise temperature response. Experimental results demonstrate a residual magnetic field sensitivity of 0.49 nT/mA at a distance of 2 mm from the coil surface, while maintaining a temperature control stability of ±0.005°C at 80°C. The experiments also validated the stable temperature regulation of the coil and the wavelength tunability of the VCSEL. The proposed design represents a viable approach for applications in atomic sensors based on quantum mechanics principles.

芯片级原子磁强计（CSAMs）有助于超弱磁场的高精度测量，这在便携式应用，生物医学传感，包括脑磁图（MEG）和心磁图（MCG）和资源勘探中越来越重要。作为一个关键的组件，激光源提供了特定的波长，以诱导碱金属原子的自旋极化在蒸汽电池内。然而，传统的垂直腔表面发射激光器（VCSELs）往往受到原子磁强计小型化和低磁干扰的严格要求的限制，主要是由于集成温控线圈产生的感应磁场。为了解决这些问题，本文提出了一种具有磁场抑制线圈（LEMC）的激光发射器。通过在相邻绕组中配置相反的电流方向，通电导线产生的磁场被局部衰减，从而实现对宏观感应磁场的显著抑制。各种电流方向布局的仿真结果表明了双层线圈结构在减小磁干扰方面的优越性。硅衬底与沉积的Si3N4薄膜作为热界面层，以确保精确的温度响应。实验结果表明，在距离线圈表面2 mm处，残余磁场灵敏度为0.49 nT/mA，同时在80°C时保持±0.005°C的温度控制稳定性。实验还验证了线圈的稳定温度调节和VCSEL的波长可调性。提出的设计代表了基于量子力学原理的原子传感器应用的可行方法。

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引用次数: 0

High aspect ratio through-wafer etching of AT-cut quartz using double-sided offset apertures 高纵横比通过晶圆蚀刻at切割石英使用双面偏移孔径

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-30 DOI: 10.1016/j.sna.2026.117541

Kaiwen Chen , Chunyan Yin , Fangmeng Xu, Guangbin Dou

High-aspect-ratio (AR) structures remain challenging to achieve in quartz wet etching, particularly on AT-cut wafers. This study introduces a novel double-sided offset mask design method to enhance the AR of through-wafer structures. A conventional wet etching process was conducted on a 100 µm-thick AT-cut quartz wafer using both aligned and offset double-sided masks. The results show that offset masks achieved an AR of 0.630, a 39 % improvement over aligned masks (AR = 0.452), confirming the effectiveness of the proposed design. Furthermore, a formula is proposed to predict the minimum offset required for successful through-wafer etching. The proposed method proves effective in quartz MEMS fabrication, facilitating the miniaturization of quartz MEMS devices.

高纵横比（AR）结构在石英湿法蚀刻中仍然具有挑战性，特别是在at切割晶圆上。本研究提出一种新的双面偏置掩模设计方法，以提高通晶片结构的AR。在100 μ m厚的AT-cut石英晶圆上使用对准和偏移双面掩模进行了传统的湿法蚀刻工艺。结果表明，偏移掩模的AR值为0.630，比对齐掩模（AR = 0.452）提高了39 %，证实了所提出设计的有效性。此外，还提出了一个公式来预测成功通过晶圆刻蚀所需的最小偏移量。该方法在石英MEMS制造中被证明是有效的，促进了石英MEMS器件的小型化。

引用次数: 0

TiO₂/SiO₂/MWCNT/PV Waste (TSMP) nanocomposite for flexible strain sensors 用于柔性应变传感器的TiO₂/SiO₂/MWCNT/PV Waste （TSMP）纳米复合材料

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical

Pub Date : 2026-01-29 DOI: 10.1016/j.sna.2026.117537

Zufar Alfarros , Muhammad Luthfi Hakim , Rohadi Satrio Budi Utomo , Budi Prawara , Arif Kusumawanto , Muhammad Akhsin Muflikhun

A TiO₂/SiO₂/MWCNT/PV (TSMP) nanocomposite was synthesized through a modified sol–gel route to develop a structurally reinforced and highly conductive hybrid material for flexible strain-sensing applications. Characterization was done through a series of different tools including FT-IR, SEM-EDS, and UV-Visible analysis to ascertain the element distribution, chemical bonding, and optical absorption. Differential Scanning Calorimetry (DSC) revealed a glass transition temperature of 62.7 °C, indicating thermal stability suitable for wearable electronics. When integrated into a silicone rubber matrix, the TSMP/MWCNT composite enabled a flexible strain sensor with a gauge factor of 20.75, a strain ranges up to 100 %, a rapid response time of 130 ms, and stable electromechanical durability over 1200 loading–unloading cycles. These properties allowed precise real-time detection of human motions such as finger and wrist bending. The balanced contribution of TiO₂–SiO₂ structural rigidity, MWCNT conductivity, and PV matrix flexibility results in a robust and responsive nanocomposite. Notably, the PV employed in this work was derived from PV waste, demonstrating its successful incorporation into a high-performance functional material. The versatility and stability of this TSMP architecture also position it for future applications in soft robotics, interactive wearable systems, and next-generation health-monitoring platforms.

采用溶胶-凝胶改性的方法合成了tio2 / sio2 /MWCNT/PV （TSMP）纳米复合材料，为柔性应变传感应用开发了一种结构增强、高导电性的杂化材料。表征通过一系列不同的工具，包括FT-IR， SEM-EDS和uv -可见分析来确定元素分布，化学键和光吸收。差示扫描量热法（DSC）显示玻璃化转变温度为62.7°C，表明热稳定性适合可穿戴电子产品。当集成到硅橡胶基体中时，TSMP/MWCNT复合材料实现了测量系数为20.75的柔性应变传感器，应变范围高达100 %，快速响应时间为130 ms，并且在1200次加载-卸载循环中具有稳定的机电耐用性。这些特性可以精确地实时检测人体运动，如手指和手腕弯曲。TiO 2 -SiO 2结构刚度、MWCNT电导率和PV基体柔韧性的平衡贡献导致了坚固和响应的纳米复合材料。值得注意的是，这项工作中使用的光伏来源于光伏废弃物，表明其成功地融入了高性能功能材料。这种TSMP架构的多功能性和稳定性也使其在软机器人、交互式可穿戴系统和下一代健康监测平台的未来应用中处于有利地位。

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引用次数: 0