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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)最新文献

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A novel analytical model of a SiC MOSFET 一种新的SiC MOSFET解析模型
R. Ramović, M. Jevtic, J. Hadzi-Vukovic, D. Randjelović
This paper presents a novel analytical model for simulation of characteristics of a n-channel MOSFET based on silicon-carbide (SiC). Using known experimental results, a semiempirical relation for carrier mobility (/spl mu/) dependence on electric field intensity, dopant concentration and temperature was formulated. Based on this relation appropriate analytical mathematical-physical model for simulation of current-voltage characteristics, transconductance and conductance of MOSFET were developed. All models were formulated taking into account, among other effects, the dependence of threshold voltage on temperature and impurity concentration in the channel, as well as the effect of the channel narrowing. Using the proposed model a simulation algorithm was designed and a simulation of the MOSFET's performance was performed. Results of the simulation are graphically presented in and discussed.
本文提出了一种新的基于碳化硅(SiC)的n沟道MOSFET特性仿真分析模型。利用已知的实验结果,建立了载流子迁移率(/spl mu/)与电场强度、掺杂剂浓度和温度的半经验关系。基于这一关系,建立了适合于模拟MOSFET电流电压特性、跨导和电导的解析数学物理模型。所有模型的建立都考虑了阈值电压对温度和通道中杂质浓度的依赖性以及通道变窄的影响等因素。利用该模型设计了仿真算法,并对MOSFET的性能进行了仿真。文中以图形方式给出了仿真结果并进行了讨论。
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引用次数: 10
Access to microsystem technology: the CMP services solution 获取微系统技术:CMP服务解决方案
B. Charlot, B. Courtois, H. Delori, J.-F. Paillotin, K. Torki
CMP aims at providing Universities, Research Laboratories and Industries with the possibility to have their integrated circuits projects fabricated for prototyping and low volume production. Presently, users are serviced for CMOS double layer poly/double layer metal (DLP/DLM) 0.8 /spl mu/, DLM/TLM 0.6 /spl mu/, DLP/4LM 0.35 /spl mu/, SLP/6LM 0.18 /spl mu/ and 0.12 /spl mu/, BiCMOS DLP/DLM 0.8 /spl mu/, SiGe BiCMOS DLP/DLM 0.8 /spl mu/ and 5 LM 0.35 /spl mu/, and HEMT GaAs 0.2 /spl mu/. About 40 multi-project runs are offered per year. Micro Electro Mechanical Systems (MEMS) are provided in standard CMP runs in CMOS DLP/DLM 0.8 /spl mu/m and DLM/TLM 0.6 /spl mu/, BiCMOS DLP/DLM 0.8 /spl mu/ and HEMT GaAs 0.2 /spl mu/, using compatible front-side bulk micro-machining. MUMPS process is offered as a surface micro-machining allowing one to integrate MEMS only microstructures. This paper describes the services available, focusing on the most advanced IC processes and on the MEMS processes.
CMP旨在为大学、研究实验室和工业提供制造原型和小批量生产的集成电路项目的可能性。目前,为用户服务的CMOS双层聚/双层金属(DLP/DLM) 0.8 /spl mu/、DLM/TLM 0.6 /spl mu/、DLP/4LM 0.35 /spl mu/、SLP/6LM 0.18 /spl mu/、0.12 /spl mu/、BiCMOS DLP/DLM 0.8 /spl mu/、SiGe BiCMOS DLP/DLM 0.8 /spl mu/、5lm 0.35 /spl mu/、HEMT GaAs 0.2 /spl mu/。每年提供大约40个多项目运行。微电子机械系统(MEMS)在标准CMP运行中提供CMOS DLP/DLM 0.8 /spl μ m和DLM/TLM 0.6 /spl μ m, BiCMOS DLP/DLM 0.8 /spl μ m和HEMT GaAs 0.2 /spl μ m,使用兼容的前端批量微加工。MUMPS工艺是一种表面微加工,允许集成MEMS微结构。本文介绍了现有的服务,重点介绍了最先进的IC工艺和MEMS工艺。
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引用次数: 0
Planar Schottky diodes with low barrier height for microwave detector application 微波探测器用低势垒高度平面肖特基二极管
V. Shashkin, Y. Chechenin, V. Danil’tsev, O. Khrykin, A. Maslovsky, A. Murel, V. Vaks
The results of designing and investigation of a sensitivity of microwave detectors, based on planar GaAs diodes with low effective Schottky barrier height are reported. Low pressure metalorganic chemical vapor deposition (MOCVD) technology was used for the modification of the effective Schottky barrier height by means of precise /spl delta/-doping of near-surface layer and for successive deposition of an aluminium film in non-interrupted growth run. A complete quantum-mechanical numerical simulation of the effect produced by /spl delta/-doping on the current-voltage characteristic of the modified diodes is carried out. Comparison of computational results with the experimental characteristics of diodes shows a rather good agreement. Analysis of the carried-out research has allowed one to choose optimum parameters of /spl delta/-layers for producing low barrier diodes (/spl sim/0.2 eV) with a reasonable ideality factor (n<1.5). The best performance of the low barrier diode corresponding to /spl gamma/=5000 V/W and NEP=(3/spl divide/6)/spl middot/10/sup -12/ W/spl middot/Hz/sup -1/2/ at 150 GHz was at zero bias voltage.
本文报道了基于低有效肖特基势垒高度的平面砷化镓二极管的灵敏度微波探测器的设计和研究结果。采用低压金属有机化学气相沉积(MOCVD)技术,通过精确/spl δ /近表面层掺杂来修饰有效肖特基势垒高度,并在不间断生长过程中连续沉积铝膜。对/spl δ /-掺杂对改性二极管电流-电压特性的影响进行了完整的量子力学数值模拟。计算结果与二极管的实验特性比较,结果吻合较好。对所进行的研究进行分析,可以选择最佳参数/spl δ /-层,以生产具有合理理想因子(n<1.5)的低势垒二极管(/spl sim/0.2 eV)。对应于/spl gamma/=5000 V/W和NEP=(3/spl divide/6)/spl middot/10/sup -12/ W/spl middot/Hz/sup -1/2/ 150 GHz的低势垒二极管在零偏置电压下表现最佳。
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引用次数: 6
Semiconductor devices for fiber optic communication systems 光纤通信系统用半导体器件
L. Lunardi
We review the state-of-the-art of heterojunction-based integrated circuit technologies that have potential applications for time division multiplexing (TDM) and wavelength division multiplexing (WDM) fiber optic communication systems.
我们回顾了基于异质结的集成电路技术的最新进展,这些技术在时分多路复用(TDM)和波分多路复用(WDM)光纤通信系统中具有潜在的应用。
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引用次数: 0
FSM non-minimal state encoding for low power 低功耗FSM非最小状态编码
I. Lemberski, M. Koegst, S. Cotofana, B. Juurlink
In this paper, we focus our attention on the problem of FSM state encoding for low power. In contrast to many publications where probabilistic approach to power estimation is offered, we consider power measurement based on given user-specified input sequence. Although the power dissipation depends on several parameters (register and output switching activity, complexity of combinational part, capacitance load on the gate), switching is the most important source of power dissipation. Our goal is to develop an encoding procedure which minimizes register switching activity. We start with a highly redundant (seed) encoding and minimize its length while minimizing the register switching activity. Unlike previous works, we don't restrict encoding final length (only register switching activity is considered). Therefore, final encoding length may differ from the minimal one. We tested our encoding procedure on several benchmarks from the MCNC set. The experiments show that in many cases, power dissipation obtained using our encoding (generally, of non-minimal length) is less than one achieved when encoding of minimal length is generated.
本文主要研究低功耗情况下的FSM状态编码问题。与许多提供概率方法进行功率估计的出版物相反,我们考虑基于给定用户指定输入序列的功率测量。虽然功耗取决于几个参数(寄存器和输出开关活动、组合部件的复杂性、栅极上的电容负载),但开关是最重要的功耗来源。我们的目标是开发一种编码过程,使寄存器转换活动最小化。我们从一个高度冗余(种子)编码开始,并最小化其长度,同时最小化寄存器切换活动。与以前的工作不同,我们不限制编码的最终长度(只考虑寄存器切换活动)。因此,最终编码长度可能与最小编码长度不同。我们在MCNC集的几个基准测试中测试了我们的编码过程。实验表明,在许多情况下,使用我们的编码(通常是非最小长度)获得的功耗小于生成最小长度编码时获得的功耗。
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引用次数: 8
Aging of copper-nickel-cobalt manganite NTC thermistors [Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/] 铜镍钴锰矿NTC热敏电阻的老化[Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/]
O. Mrooz, I. Hadzarnan, M. Vakiv, O. Shpotyuk, J. Plewa, H. Altenburg, H. Uphoff
Aging phenomenon in copper-nickel-cobalt manganite NTC thermistors under thermal stresses at 125 and 170/spl deg/C during 1000 h was studied. The relative resistance drift observed in NTC thermistors is correlated with the results of Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/ ceramic microstructures characterization (obtained by optical microscopy, SEM, electron probe and EDX microanalyses) and thermogravimetric analysis.
研究了铜镍钴锰酸盐NTC热敏电阻在125和170℃的热应力下1000 h的老化现象。在NTC热敏电阻中观察到的相对电阻漂移与Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/陶瓷微观结构表征(通过光学显微镜、SEM、电子探针和EDX显微分析获得)和热重分析结果相关。
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引用次数: 7
In-process diagnostics of recombination centres in structures of large-area solar cells 大面积太阳能电池结构中重组中心的过程诊断
V. Benda, J. Radil, T. Quan
The paper refers to a possibility to check carrier lifetime in the area close to the PN junction measuring forward characteristics at low current, densities, where generation-recombination portion of the current density dominates. The measurement allows one to determine energy level of dominant recombination centres and evaluate their concentration. The carrier lifetime in volume of the cell body can be evaluated using local irradiation of the surface of large-area solar cells with a laser diode (/spl lambda/=870 nm) from measured values of open circuit voltage V/sub oc/. The method can give information about recombination centres distribution in large-area solar cells. From V/sub oc/ distribution, position and extent of local defects can also be determined. Solar cell diagnostic methods can be used to investigate the influence of technology on characteristics of solar cells, with the aim of increasing efficiency and reliability of solar cells.
本文提到了在低电流密度下测量PN结附近区域载流子寿命的可能性,其中电流密度的产生-重组部分占主导地位。测量允许一个确定的能量水平的主要重组中心和评估他们的浓度。利用开路电压V/sub /测量值,用激光二极管(/spl λ /=870 nm)局部照射大面积太阳能电池表面,可以计算出电池体载流子的体积寿命。该方法可以给出大面积太阳能电池中复合中心分布的信息。根据V/sub /分布,还可以确定局部缺陷的位置和程度。太阳能电池诊断方法可用于研究技术对太阳能电池特性的影响,目的是提高太阳能电池的效率和可靠性。
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引用次数: 0
Nonlinear effects in magnetic angular position sensor with integrated flux concentrator 集成磁通集中器磁角位置传感器的非线性效应
P. Drljaca, M. Demierre, C. Schott, R. Popovic
We studied nonlinear behaviour of the angular position magnetic field sensor that consists of CMOS integrated circuit chip and a thin ferromagnetic disk. Developed numerical 3D model was compared with experimental results with a good agreement. Obtained numerical results were used to determine the linear magnetic working range of the sensor. We also calculated the nonlinear error for the disk positioning relative to the Hall elements and found 3.3% of error for the 10 /spl mu/m displacement. We proposed a simple amplitude calibration to strongly reduce nonlinearity coming from misalignment to 0.3% of the full scale. Additional nonlinearity from Hall elements has been discussed. The offset and sensitivity mismatch, contribute to the nonlinearity of the sensor less than 1/spl deg/.
研究了由CMOS集成电路芯片和薄铁磁片组成的角位置磁场传感器的非线性行为。所建立的三维数值模型与实验结果吻合较好。利用得到的数值结果确定了传感器的线性磁工作范围。我们还计算了相对于霍尔单元的磁盘定位的非线性误差,发现10 /spl mu/m位移的误差为3.3%。我们提出了一个简单的幅度校准,以强烈地减少非线性从失调到满量程的0.3%。讨论了霍尔单元的附加非线性。偏置和灵敏度失配导致传感器的非线性小于1/spl度。
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引用次数: 17
Internet-based software for teaching test of digital circuits 基于网络的数字电路教学测试软件
R. Ubar, E. Orasson, H. Wuttke
A new teaching concept for teaching testing issues in digital design, which supports the possibility of distance learning as well as a Web-based computer-aided teaching is presented. It offers a set of tools ("interactive modules") to inspect the teaching topics and to carry out laboratory research. The interactive modules are focused on easy action and reaction, learning by doing, a game-like use, and fostering students in critical thinking, problem solving skills and creativity.
提出了一种支持远程学习和基于网络的计算机辅助教学的数字化设计测试教学新理念。它提供了一套工具(“互动模块”)来检查教学主题和开展实验室研究。互动模块侧重于简单的动作和反应,在做中学习,游戏式的使用,培养学生的批判性思维,解决问题的能力和创造力。
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引用次数: 12
Simulation of nanometer-scale MOSFET's with ultra-thin gate oxide including full 2-dimensional quantum mechanical effects and gate tunneling current 超薄栅极氧化物纳米MOSFET的模拟,包括全二维量子力学效应和栅极隧道电流
Yutao Ma, Lifeng Chen, Jing Wang, L. Tian, Zhiping Yu, Litian Liu, Zhijian Li
A new simulator is developed including Quantum Mechanical Effects (QMEs) in the whole channel and gate tunneling current along the gate oxide. Schrodinger equation is solved using Modified Airy Function (MAF) method in the whole device including gate electrode, oxide and substrate and thus QMEs and tunneling effects can be taken into consideration at the same time. The simulator has high efficiency and accuracy. Advanced devices are simulated emphasizing QMEs and tunneling current through gate oxide.
开发了一种新的模拟器,包括整个通道中的量子力学效应和沿栅极氧化物的栅极隧道电流。采用修正Airy函数(MAF)法在整个器件中求解薛定谔方程,包括栅电极、氧化物和衬底,从而可以同时考虑QMEs和隧道效应。该仿真器效率高,精度高。对先进器件进行了仿真,重点介绍了QMEs和通过栅极氧化物的隧道电流。
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引用次数: 0
期刊
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)
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