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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)最新文献

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Phase noise amplitude distribution as indicator of origin of random phase perturbation in a test oscillator 相位噪声幅值分布作为测试振荡器中随机相位扰动来源的指示
J. Hadzi-Vukovic, M. Jevtic, D. Simic
In this paper, we present an analysis of phase noise distribution. Phase noise, of a designed and realized test oscillator, as a consequence of low frequency (LF) noise up-conversion was simulated. The analysis shows that low frequency noise sources, which are inside the oscillator transistor, give the pure Gaussian distribution of phase noise and LF noise sources located outwith the transistor change this distribution. This behavior could be explained by the influence of the transistor and the transistor's package impedance, which contribute to the signal delay. The microwave test oscillator is designed and realized with AlGaAs/InGaAs HEMTs.
本文对相位噪声的分布进行了分析。对设计并实现的测试振荡器低频噪声上变频引起的相位噪声进行了仿真。分析表明,低频噪声源位于振荡器晶体管内部,相位噪声呈纯高斯分布,而低频噪声源位于晶体管外部,改变了这种分布。这种行为可以解释为晶体管和晶体管封装阻抗的影响,这有助于信号延迟。采用AlGaAs/InGaAs hemt设计并实现了微波测试振荡器。
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引用次数: 2
Non-traditional microwave electronics based on electron beam transverse grouping 基于电子束横向分组的非传统微波电子学
V. Vanke
Russian experience in the field of non-traditional microwave electronics based on electron beam transverse waves use is discussed in this short review. Devices studied include the cyclotron wave protector and parametric amplifier, the cyclotron wave electrostatic amplifier, the circularly polarized TWT, and a cyclotron wave converter of microwaves in DC.
本文简要介绍了俄罗斯在利用电子束横波的非传统微波电子学领域的经验。研究的器件包括回旋波保护器和参数放大器、回旋波静电放大器、圆极化行波管和直流微波回旋波变换器。
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引用次数: 3
Bridging the gap between AMR, GMR, and Hall magnetic sensors 弥合AMR, GMR和霍尔磁传感器之间的差距
Radivoje Popovic, P. Drljaca, Christian Schott
By integrating a magnetic flux concentrator (IMC) at the surface of a Hall magnetic sensor, we can dramatically improve its characteristics. Here we compare the performance of a new IMC Hall sensor ASIC with the performance of traditional magnetic field sensors, such as AMR, GMR, and conventional Hall sensor ASICs. We find that the detectivities of AMRs and GMRs for AC magnetic fields are much better than those of Hall ASICs; for low-frequency fields, the performance gap is smaller; but for DC fields, the resolution of the IMC Hall ASIC is much better than that of GMRs and approaches the resolution of a nonswitched AMR. Also according other parameters, the IMC Hall ASIC is positioned in the gap between AMRs, GMRs, and the conventional Hall ASIC magnetic field sensors.
通过在霍尔磁传感器表面集成磁通集中器(IMC),可以显著改善霍尔磁传感器的性能。在这里,我们比较了新的IMC霍尔传感器ASIC与传统磁场传感器(如AMR, GMR和传统霍尔传感器ASIC)的性能。我们发现,与霍尔asic相比,amr和gmr对交流磁场的探测能力要好得多;对于低频场,性能差距较小;但对于直流场,IMC霍尔ASIC的分辨率远好于gmr,接近非开关AMR的分辨率。同样根据其他参数,IMC霍尔ASIC被定位在amr, gmr和传统霍尔ASIC磁场传感器之间的间隙。
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引用次数: 52
Photoluminescence caused by presence of defects and oxides at the surface of Hg/sub 1-x/Cd/sub x/Te Hg/sub - 1-x/Cd/sub -x/ Te表面存在缺陷和氧化物引起的光致发光
M. Scepanovi, I. Hinić, M. Jevtic
The results of photoluminescence (PL) measurements performed for Hg/sub 1-x/Cd/sub x/Te (x=0.165) samples are presented. The surfaces of these samples were modified using long exposure to the atmosphere (series A), etching by 0.5% Br-methanol during 1 minute (series B) and during 5 minutes (series C). For each series samples PL spectra were measured at different temperatures in the range from 16 to 300 K. PL bands at about 2.1 eV and 2.3 eV are recognized in PL spectra of each series samples. The analysis of PL and Raman spectra shows that the band at /spl sim/2.1 eV is caused by presence of the nonstoichiometric oxides. The band at 2.3 eV originates of organic compounds which are deposited at the surface during etching process. PL of the observed samples decreases after irradiation by intense nanosecond pulse of Nd:YAG laser.
给出了汞/亚1-x/Cd/亚x/Te (x=0.165)样品的光致发光(PL)测量结果。这些样品的表面通过长时间暴露于大气(系列A),在1分钟(系列B)和5分钟(系列C)内用0.5% br -甲醇蚀刻来修饰。对于每个系列样品,在16至300 K的不同温度范围内测量了PL光谱。在每个系列样品的PL光谱中都可以识别出2.1 eV和2.3 eV左右的PL波段。发光光谱和拉曼光谱分析表明,在/spl sim/2.1 eV处的波段是由非化学计量氧化物的存在引起的。2.3 eV波段是蚀刻过程中沉积在表面的有机化合物。在强纳秒脉冲Nd:YAG激光的照射下,观察到的样品的PL值降低。
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引用次数: 0
Thermally stable low resistivity ohmic contacts for high power and high temperature SiC device applications 热稳定的低电阻率欧姆触点,用于高功率和高温SiC器件应用
R. Kakanakov, L. Kassamakova-Kolaklieva, N. Hristeva, G. Lepoeva, Konstantinos Zekentes
Ti/Al/p-SiC and Ni/n-SiC ohmic contacts with improved electrical and thermal properties in respect to their application in high power and high temperature SiC devices are reported in this work. Contact resistivity as a function of annealing was investigated over the temperature range of 700/spl deg/C -950/spl deg/C. The lowest resistivity of 1.42/spl times/10/sup -5/ /spl Omega/.cm/sup 2/ for the Ti/Al contact was obtained after annealing at 900/spl deg/C while for the Ni contact the lowest resistivity of 4.9/spl times/10/sup -6/ /spl Omega/ cm/sup 2/ was achieved at 950/spl deg/C. The contact stability during prolonged ageing and at high operating temperatures and current density was studied as a criterion for their reliability. It was found that both contacts were thermally stable during ageing in an inert ambient (N/sub 2/) at high temperature of 600/spl deg/C for 100 hours as well as at operating temperatures up to 450/spl deg/C in air and at current density of 10/sup 3/ A/cm/sup 2/ passed through the contacts during the heating. The improved electrical and thermal properties of the Ti/Al/p-SiC and Ni/n-SiC ohmic contacts were demonstrated in the power p-n SiC diode developed.
本文报道了Ti/Al/p-SiC和Ni/n-SiC欧姆触点在大功率和高温SiC器件中的应用,改善了它们的电学和热性能。在700/spl℃-950/spl℃的温度范围内,研究了接触电阻率随退火的变化规律。最低电阻率为1.42/spl倍/10/sup -5/ /spl ω /。Ti/Al触点在900/spl℃退火后的电阻率为cm/sup 2/, Ni触点在950/spl℃退火后的电阻率为4.9/spl times/10/sup -6/ /spl ω / cm/sup 2/。研究了长时间老化、高工作温度和高电流密度下的接触稳定性,作为其可靠性的判据。结果表明,两个触点在惰性环境(N/sub / 2/)中,在600/spl°C的高温下老化100小时,以及在空气中高达450/spl°C的工作温度下,在加热过程中通过触点的电流密度为10/sup 3/ A/cm/sup 2/时,均保持热稳定。在功率型p-n SiC二极管中,Ti/Al/p-SiC和Ni/n-SiC欧姆触点的电学和热学性能得到了改善。
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引用次数: 11
Thermal Ta/sub 2/O/sub 5/ - alternative to SiO/sub 2/ for high density dynamic memories 热Ta/sub 2/O/sub 5/ -可替代SiO/sub 2/用于高密度动态存储器
E. Atanassova, D. Spassov
Tantalum pentoxide thin layers (10-100 nm) obtained by thermal oxidation of rf sputtered Ta films on Si have been investigated with respect to their dielectric, structural and electrical properties. It is established that stoichiometric Ta/sub 2/O/sub 5/ detected at the surface of the layers is reduced to tantalum suboxides in their depth. The oxide parameters are discussed in terms of a presence of an unavoidable ultrathin SiO/sub 2/ between Si and Ta/sub 2/O/sub 5/ and bond defects in both the oxide and the interface transition region. Conditions which guarantee obtaining high quality tantalum oxide with a dielectric constant of 32 - 35 and a leakage current less than 10/sup -7/ - 10/sup -8/ A/cm/sup 2/ at 1.5 V (SiO/sub 2/ equivalent thickness of 2.5 - 3 nm) are established. These specifications make the layers obtained suitable alternative to SiO/sub 2/ for high density DRAMs application.
研究了射频溅射Ta薄膜在Si上热氧化得到的五氧化二钽薄层(10-100 nm)的介电、结构和电学性能。确定了在层表面检测到的化学计量量Ta/sub 2/O/sub 5/在其深度上被还原为亚氧化钽。在Si和Ta/sub 2/O/sub 5/之间不可避免地存在超薄SiO/sub 2/,并且在氧化物和界面过渡区都存在键缺陷。建立了在1.5 V (SiO/ sub2 /等效厚度为2.5 ~ 3nm)条件下,保证获得介电常数为32 ~ 35,漏电流小于10/sup -7/ - 10/sup -8/ a /cm/sup 2/的优质氧化钽的条件。这些规格使得该层获得了适合高密度dram应用的SiO/sub 2/替代品。
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引用次数: 0
Study of photo-emission current impact on spectral characteristics of double barrier photo-receiving structure [NiSi-Si-TiSi/sub 2/] 光发射电流对双势垒光接收结构光谱特性影响的研究[NiSi-Si-TiSi/sub 2/]
Kh. Khudaverdyan, H. Harutyunyan
The silicide-silicon-silicide type photoreceiving structures recrystallized by laser, currently studied differ efficiently from conventional photoreceivers in their multifunctional operation. In them, the photosensitivity can be controlled by the external voltage and the device can be used as a zero frequency gauge due to dependence of the photocurrent on the external voltage of the mark shift point. This work is the first to investigate the influence of the photoemission from the contact on the spectral characteristics of the afore-mentioned structures.
目前研究的用激光再结晶的硅化物-硅-硅化物型光接收结构在多功能操作上与传统的光接收结构有很大的不同。其中,光敏度可以由外部电压控制,由于光电流依赖于标记移位点的外部电压,该器件可以用作零频率计。这项工作是第一次研究接触的光电发射对上述结构的光谱特性的影响。
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引用次数: 1
Temperature response of irradiated MOSFETs 辐照mosfet的温度响应
S.S. Lornakin, G. Zebrev, D.V. Ivashin
It was shown experimentally that above threshold transconductance in investigated n-MOSFETs degrades after irradiation and short-term anneal only in subthreshold and moderate inversion regions. Subsequent durable anneal degrades transconductance on the whole operating gate bias range.
实验表明,在辐照和短期退火后,高于阈值的n- mosfet的跨导率仅在亚阈值和中等反转区下降。随后的持久退火降低了整个工作栅极偏置范围内的跨导性。
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引用次数: 3
Evaluation of epi layer resistivity effects in mixed-signal submicron CMOS integrated circuits 混合信号亚微米CMOS集成电路中外延层电阻率效应的评价
V. Liberali
This paper illustrates a simple model for calculation and experimental evaluation of epi layer resistance. The model can be used during early stages of mixed-signal integrated circuit design, to estimate the effects of switching noise injection from digital cells to analog circuitry. Moreover, the proposed model leads to a simplified equivalent circuit that can be used for fast SPICE-level simulations of crosstalk effects.
本文给出了一个简单的外延层电阻计算和实验评估模型。该模型可用于混合信号集成电路设计的早期阶段,以估计从数字单元到模拟电路的开关噪声注入的影响。此外,所提出的模型导致一个简化的等效电路,可用于快速spice级串扰效应的模拟。
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引用次数: 3
Unified MOSFET scaling theory using variational method 用变分法统一MOSFET标度理论
Ping He, Wensong Chen, L. Tian, Litian Liu, Zhijian Li
Using the variational method, the two dimensional Poisson Equation is solved in the MOSFET device region including the gate oxide region, depletion region and buried oxide region (for SOI device). An analytical expression for the potential distribution together with a new natural gate length scale for MOSFET is derived. The 2-D effects in front gate dielectric, back gate dielectric and silicon film can all be taken into account in this derivation. The validity of electrical equivalent oxide thickness approximation is also investigated using this model. Comparison of the short channel effect for uniform channel doping bulk MOSFET, intrinsic channel doping bulk MOSFET, SOI MOSFET and double gated MOSFET is conducted using our model. The results are verified by 2D numerical simulation using the 2D device simulator MEDICI.
利用变分法求解了MOSFET器件区域的二维泊松方程,包括栅极氧化区、耗尽区和埋地氧化区(SOI器件)。推导出了MOSFET电位分布的解析表达式和新的自然栅长度尺度。在此推导中可以考虑到正极介电介质、后门介电介质和硅膜的二维效应。利用该模型考察了电等效氧化厚度近似的有效性。利用该模型对均匀沟道掺杂大块MOSFET、本征沟道掺杂大块MOSFET、SOI MOSFET和双门控MOSFET的短沟道效应进行了比较。利用二维器件模拟器MEDICI进行了二维数值模拟,验证了实验结果。
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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)
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